CN109085137A - Three-dimensional image forming apparatus and its imaging method based on K spatial alternation - Google Patents
Three-dimensional image forming apparatus and its imaging method based on K spatial alternation Download PDFInfo
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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- G01N21/4788—Diffraction
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
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Abstract
A kind of three-D imaging method based on K spatial alternation, this method are used the sheet optical illumination sample along optical axis direction, are interfered using identical sheet light source with the illumination light；Record interference pattern simultaneously therefrom obtains sample to be illuminated in the complex amplitude information (including amplitude and phase) of focal plane；The spatial spectral information of sample can be obtained by discrete Fourier transform；Then the spatial spectral information perpendicular to sample plane is calculated using sciagraphy；Again by discrete inverse Fourier transform, the strength information perpendicular to sample plane is obtained；Finally by scanning, final sample three-dimensional structure information is obtained.This method acquisition rate with higher and higher resolution ratio only need single acquisition, imaging can be realized especially for axial information is obtained.
Description
Technical field
The present invention relates to three-dimensional imaging field, especially a kind of three-dimensional image forming apparatus and its imaging based on K spatial alternation
Method.
Background technique
3 dimension imaging technology has had development at full speed since it is quoted extensively.The technology biological sample observation,
Diagnosing tumor etc. has great effect.There are many methods to be used in three-dimensional imaging field, such as Structured Illumination technology, altogether
Scanning, coherence chromatographic imaging are focused, sheet illuminates micro-imaging and coherence chromatographic imaging.These technologies can response sample
Internal structure, the reflectivity including sample, the information such as luminescent material concentration.Structured light three-dimensional imaging technology utilizes a carrier frequency
The illumination object of striped, record deformation after striped, then from the deforming stripe figure of acquisition digital demodulation reconstruct by
The 3-D image for surveying object, can eliminate the shadow effect of defocus part in this way.The three-dimensional imaging being most widely used
Technology is confocal scanning technology.The technology blocks passing through for defocus part light using pin hole, eliminates defocus sample yin to allow
The influence of shadow, but the technology, due to needing to be imaged using point by point scanning, acquisition data portion needs to spend a large amount of
Time.Optical coherence tomography can use grating and two-dimensional scanning mirrors, can be realized high horizontal and vertical resolution ratio.
Sheet optical illumination microtechnic uses a sheet light source irradiating sample, while acquiring reflected light in the direction perpendicular to optical path,
Since illumination light is a light sheets, collected reflected light is the axial distribution of sample.Due to lighting system and adopt
Collecting system is not coaxial system, therefore the technology has acquiring a certain degree of difficulty in realization.The method that this patent is proposed has high
Imaging rate, spatial resolution, and structure is simple, is easy to build assembling.
Summary of the invention
The purpose of the present invention is overcoming the above-mentioned prior art insufficient, a kind of three-D imaging method is provided, there is high imaging
Rate, high-resolution, and structure is simple, is easy to build assembling.
To solve the above problems, technical scheme is as follows:
A kind of three-dimensional image forming apparatus based on K spatial alternation, it is characterized in that: including laser, lens, the first light splitting rib
Mirror, the first cylindrical lens, laser spot detection device, computer, the second Amici prism, microcobjective, the one-dimensional electricity placed for sample to be tested
Dynamic displacement platform, clamper, microcobjective group, the first reflecting mirror, the second column thoroughly, the second reflecting mirror.
The positional relationship of said elements is as follows:
The laser (1), which issues laser, becomes a branch of directional light by lens (2), passes through the first Amici prism (3) point
Beam is transmitted light beam and the reflected beams, i.e. detection light beam and reference beam, and the detection light beam is focused through the first cylindrical lens (4)
As sheet illumination light, and sheet illumination light successively thinner through the second Amici prism (7) and microcobjective (8) convergence slabbing
It is radiated on sample to be tested, after sample to be tested reflects, backtracking is incident on the second light splitting after microcobjective (8) transmission
Prism (7)；
The reference beam forms sheet reference after the second reflecting mirror (14) are reflected, through the second cylindrical lens (13)
Light, and by the first reflecting mirror (12) reflection after, successively after microcobjective group (11) and the second Amici prism (7) transmit, with warp
The detection light beam co-incident of second Amici prism (7) reflection to laser spot detection device (5), the computer (6) respectively with institute
The laser spot detection device (5) stated is connected with one-dimensional electricity driving displacement platform (9).
The method that three-dimensional imaging is carried out to sample to be tested using the three-dimensional image forming apparatus based on K spatial alternation,
Feature is, method includes the following steps:
1. issuing laser as optical axis using laser, sample to be tested is fixed on the one-dimensional electricity driving displacement platform, by one-dimensional
The control of electricity driving displacement platform is sent into optical path, makes sample to be tested perpendicular to detection light beam incident direction, simultaneously, it is ensured that each optics member
Part is with detection beam orthogonal and center is maintained on optical axis；
2. measure sample to be tested to the second Amici prism (7) distance L1, the second Amici prism (7) to laser spot detection device
(5) the distance L of target surface2And second Amici prism (7) width D；
3. sheltering from reference path, retain detection optical path, records the 1st width with hot spot detector and scatter hot spot；
4. sheltering from detection optical path, retain reference path, records the 2nd width with hot spot detector and scatter hot spot；
5. retaining detection optical path and reference path, the 3rd width is recorded with hot spot detector and scatters hot spot；
6. the movement of computer (6) the control one-dimensional electricity driving displacement platform (9) makes sample to be tested according to default mobile step
Along moving perpendicular to optical axis direction, every movement is primary by long l, the acquisition of laser spot detection device repeat step 3., 4., 5. until mobile n times,
It acquires 3n width and scatters hot spot；
7. the spot intensity of laser spot detection device record inputs computer respectively, by computer carry out sample to be tested it is three-dimensional at
Picture.
The spot intensity of laser spot detection device record inputs computer respectively, is carried out using hot spot data to test sample by computer
The three-dimensional imaging of product.
The 3n width scattering light version that laser spot detection device records is calculated using computer, calculating process is specific as follows:
Step 7.1 enables n=1；
Step 7.2 reads in the 3 width scattering hot spot that the mobile n-th of one-dimensional electricity driving displacement platform is recorded；
The sum of step 7.3, the 1st width that hot spot figure and n-th are scattered with the 3rd width of n-th and the 2nd width scattering hot spot figure are done
Difference；
Step 7.4 does discrete Fourier transform to the image that step 7.3 obtains, and then intercepts 1 grade of frequency spectrum, and be moved to
At picture centre；
Step 7.5 does discrete inverse inverse Fourier transform to the image that step 7.4 obtains, and is then propagated using Fresnel public
Formula propagates to sample central plane, propagation distance are as follows: D+L1+L2；
Step 7.6 does discrete Fourier transform to the image that step 7.5 obtains；
Step 7.7 utilizes formulaCorresponding position of the wavefront on optical axis is obtained,
In, p is axial position, and m is lateral position, and n is lengthwise position, and λ is optical maser wavelength, Δ kxFor horizontal space frequency, Δ kyIt is vertical
To spatial frequency, Δ kzAxial space frequency；
Step 7.8, by corresponding amplitude at data (m, n) and phase shift to (m, p), to projecting wavefront to flat
Row is in the plane of optical axis；
Step 7.9 does discrete inverse Fourier transform to the result that step 7.8 obtains；
Step 7.10 enables n=n+1, repeats step 7, and 2 to step 7.9 until the mobile n times of electricity driving displacement platform, finally obtain
Three-dimensional data group, be the three-dimensional information of sample to be tested.
Compared with prior art, technical effect of the invention:
(1) this method is realizing that axial imaging is not need to scan, and the depth of sample to be tested can be obtained by one acquisition
Figure；
(2) this method meets same imaging shaft, therefore optical path is simple, and stabilization of equipment performance is high；
(3) this method can eliminate the mutual crosstalk between different levels, shield the projection of ambiguous location.
(4) cost has very lower than the methods of existing common optical coherence tomography in optical component detection field
Vast market prospect.
Detailed description of the invention
For the clearer technical solution illustrated in the embodiment of the present invention, will make below to required in embodiment description
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for
For those of ordinary skill in the art, under the premise of not paying labour, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is that the present invention is based on the schematic devices of the three-D imaging method of K spatial alternation.
In figure: 1- laser, 2- lens, the first Amici prism of 3-, the first cylindrical lens of 4-, 5- laser spot detection device, 6- are calculated
Machine, 7- Amici prism, 8- microcobjective, the one-dimensional electricity driving displacement platform that 9- is placed for sample to be tested, 10- clamper, the micro- object of 11-
Microscope group, the first reflecting mirror of 12-, the second cylindrical lens of 13-, the second reflecting mirror of 14-, the 9 to the second Amici prism of sample to be tested clamper 7
Linear distance be L1, the linear distance of the second Amici prism 7 to laser spot detection device target surface is L2, the second Amici prism width is
D。
Specific embodiment
Below with reference to embodiment and attached drawing, the invention will be further described, but should not be limited with this embodiment of the invention
Protection scope.
Fig. 1 is please first participated in, Fig. 1 is the schematic device of the three-D imaging method based on K spatial alternation, as shown, swashing
Light device 1, which issues the laser that wavelength is 632.8nm, becomes the smooth directional light of a branch of phase by lens 2, then is by splitting ratio
The Amici prism 3 of 1:1 generates two equal beam directional lights of intensity, respectively detection light beam and reference beam to the beam splitter,
Wherein detection light beam is focused by cylindrical lens 4 becomes sheet illumination light and by microcobjective 5, the thinner sheet of convergence slabbing
Illumination light is simultaneously radiated on sample to be tested clamper 10；Sample to be tested clamper is by one-dimensional electricity driving displacement platform control 9, reference path
Light be divided by Amici prism after reflected by reflecting mirror 14 after, by cylindrical lens 13, form sheet reference light, and by reflecting mirror
After 12 reflections, the reflected light of sample to be tested clamper 10 is radiated at jointly by light splitting rib by microcobjective group 11 and detection light
Mirror 7 is recorded by laser spot detection device 5, and record data are transferred to computer 6.
It is that 632.8nm laser passes through lens (2) as a branch of directional light that the laser (1), which issues wavelength, passes through beam splitting
It is transmitted light beam and the reflected beams than the first Amici prism (3) beam splitting for 1:1, that is, detects light beam and reference beam, it is described
Detecting light beam and focusing through the first cylindrical lens (4) becomes sheet illumination light, and the second Amici prism for being successively 1:1 through splitting ratio
(7) and microcobjective (8) converges the thinner sheet illumination of slabbing on sample to be tested, after sample to be tested reflects,
Backtracking is incident on the second Amici prism (7) after microcobjective (8) transmission；
The reference beam forms sheet reference after the second reflecting mirror (14) are reflected, through the second cylindrical lens (13)
Light, and by the first reflecting mirror (12) reflection after, successively after microcobjective group (11) and the second Amici prism (7) transmit, with warp
The detection light beam co-incident of second Amici prism (7) reflection to laser spot detection device (5), the computer (6) respectively with institute
The laser spot detection device (5) stated is connected with one-dimensional electricity driving displacement platform (9).
The focal length of first cylindrical lens 4 and the second cylindrical lens 13 is 40mm, linear distance of the cylindrical lens 4 apart from microcobjective 8
For 48.83mm, microcobjective 8 is 10 times of object lens, and the linear distance of microcobjective 8 to sample to be tested clamper 10 is 0.97mm,
The resolution ratio of laser spot detection device 5 is 2048 pixels × 2048 pixels, and minimum unit is 5.5 μm, the one-dimensional every movement of electricity driving displacement platform
Once, laser spot detection device records 3 width and scatters hot spot, respectively blocks reference light, keeps detection light, blocks detection light, keeps ginseng
The scatter diagram examined light, while detection light and reference light being kept to be recorded in the case of these three.One-dimensional electricity driving displacement platform moves 200 altogether
Secondary, each mobile accuracy is 5.5 μm, inputs computer respectively and is calculated.
Three-dimensional imaging is carried out using the device, steps are as follows:
1. issuing laser as optical axis using laser, sample to be tested is fixed on the one-dimensional electricity driving displacement platform, by one-dimensional
The control of electricity driving displacement platform is sent into optical path, makes sample to be tested perpendicular to detection light beam incident direction, simultaneously, it is ensured that each optics member
Part is with detection beam orthogonal and center is maintained on optical axis；
2. measure sample to be tested to the second Amici prism (7) distance L1, the second Amici prism (7) to laser spot detection device
(5) the distance L of target surface2And second Amici prism (7) width D；
3. sheltering from reference path, retain detection optical path, records the 1st width with hot spot detector and scatter hot spot；
4. sheltering from detection optical path, retain reference path, records the 2nd width with hot spot detector and scatter hot spot；
5. retaining detection optical path and reference path, the 3rd width is recorded with hot spot detector and scatters hot spot；
6. the movement of computer (6) the control one-dimensional electricity driving displacement platform (9) makes sample to be tested according to default mobile step
Along moving perpendicular to optical axis direction, every movement is primary by long l, the acquisition of laser spot detection device repeat step 3., 4., 5. until mobile n times,
It acquires 3n width and scatters hot spot；
7. the spot intensity of laser spot detection device record inputs computer respectively, by computer carry out sample to be tested it is three-dimensional at
Picture.
The spot intensity of laser spot detection device record inputs computer respectively, is carried out using hot spot data to test sample by computer
The three-dimensional imaging of product.
The 3n width scattering light version that laser spot detection device records is calculated using computer, calculating process is specific as follows:
Step 7.1 enables n=1；
Step 7.2 reads in the 3 width scattering hot spot that the mobile n-th of one-dimensional electricity driving displacement platform is recorded；
The sum of step 7.3, the 1st width that hot spot figure and n-th are scattered with the 3rd width of n-th and the 2nd width scattering hot spot figure are done
Difference；
Step 7.4 does discrete Fourier transform to the image that step 7.3 obtains, and then intercepts 1 grade of frequency spectrum, and be moved to
At picture centre；
Step 7.5 does discrete inverse inverse Fourier transform to the image that step 7.4 obtains, and is then propagated using Fresnel public
Formula propagates to sample central plane, propagation distance are as follows: D+L1+L2；
Step 7.6 does discrete Fourier transform to the image that step 7.5 obtains；
Step 7.7 utilizes formulaCorresponding position of the wavefront on optical axis is obtained,
In, p is axial position, and m is lateral position, and n is lengthwise position, and λ is optical maser wavelength, Δ kxFor horizontal space frequency, Δ kyIt is vertical
To spatial frequency, Δ kzAxial space frequency；
Step 7.8, by corresponding amplitude at data (m, n) and phase shift to (m, p), to projecting wavefront to flat
Row is in the plane of optical axis；
Step 7.9 does discrete inverse Fourier transform to the result that step 7.8 obtains；
Step 7.10 enables n=n+1, repeats step 7, and 2 to step 7.9 until the mobile n times of electricity driving displacement platform, finally obtain
Three-dimensional data group, be the three-dimensional information of sample to be tested.
The experimental results showed that apparatus of the present invention are successfully realized the three-dimensional imaging of sample, the device in the way of scanning,
It records 3n width and scatters hot spot, the three-dimensional structural feature for showing sample is calculated by computer, this method is not only restricted to laser spot detection
Device size, affected by environment smaller, apparatus structure is simple, and Measurement Resolution is high, and image taking speed is fast, is satisfied with optical component
The requirement of three dimensional detection.
Claims (6)
1. a kind of three-dimensional image forming apparatus based on K spatial alternation, it is characterised in that: including laser (1), lens (2), first point
Light prism (3), the first cylindrical lens (4), laser spot detection device (5), computer (6), the second Amici prism (7), microcobjective (8),
The one-dimensional electricity driving displacement platform (9) placed for sample to be tested, clamper (10), microcobjective group (11), the first reflecting mirror (12), the
Two cylindrical lens (13), the second reflecting mirror (14)；
The positional relationship of said elements is as follows:
The laser (1), which issues laser, becomes a branch of directional light by lens (2), is by the first Amici prism (3) beam splitting
Transmitted light beam and the reflected beams, i.e. detection light beam and reference beam, the detection light beam is focused through the first cylindrical lens (4) to be become
Sheet illumination light, and sheet illumination successively thinner through the second Amici prism (7) and microcobjective (8) convergence slabbing
On sample to be tested, after sample to be tested reflects, backtracking is incident on the second Amici prism after microcobjective (8) transmission
(7)；
The reference beam forms sheet reference light after the second reflecting mirror (14) are reflected, through the second cylindrical lens (13), and
After the first reflecting mirror (12) reflection, successively after microcobjective group (11) and the second Amici prism (7) transmit, and through second point
The detection light beam co-incident of light prism (7) reflection to laser spot detection device (5), the computer (6) respectively with the light
Spot detector (5) is connected with one-dimensional electricity driving displacement platform (9).
2. the three-dimensional image forming apparatus according to claim 1 based on K spatial alternation, it is characterised in that: further include clamper
(10), which is controlled by one-dimensional electricity driving displacement platform (9), for fixing sample to be tested.
3. carrying out three-dimensional imaging to sample to be tested using the three-dimensional image forming apparatus based on K spatial alternation described in as claimed in claim 1 or 22
Method, which is characterized in that method includes the following steps:
1. issuing laser as optical axis using laser, sample to be tested is fixed on the one-dimensional electricity driving displacement platform, by one-dimensional electronic
Displacement platform control be sent into optical path in, make sample to be tested perpendicular to detection light beam incident direction, simultaneously, it is ensured that each optical element with
It detects beam orthogonal and center is maintained on optical axis；
2. measure sample to be tested to the second Amici prism (7) distance L1, the second Amici prism (7) to laser spot detection device (5) target surface
Distance L2And second Amici prism (7) width D；
3. sheltering from reference path, retain detection optical path, records the 1st width with hot spot detector and scatter hot spot；
4. sheltering from detection optical path, retain reference path, records the 2nd width with hot spot detector and scatter hot spot；
5. retaining detection optical path and reference path, the 3rd width is recorded with hot spot detector and scatters hot spot；
6. the movement of computer (6) the control one-dimensional electricity driving displacement platform (9), makes sample to be tested according to default moving step length l
Along moving perpendicular to optical axis direction, every movement is primary, the acquisition of laser spot detection device repeat step 3., 4., 5. until mobile n times, are adopted
Collect 3n width and scatters hot spot；
7. the spot intensity of laser spot detection device record inputs computer respectively, the three-dimensional imaging of sample to be tested is carried out by computer.
4. three-D imaging method according to claim 3, which is characterized in that the step 7., using computer to hot spot
The 3n width scattering hot spot of detector record carries out three-dimensional imaging, the specific steps are as follows:
Step 7.1 enables n=1；
Step 7.2 reads in the 3 width scattering hot spot that the mobile n-th of one-dimensional electricity driving displacement platform is recorded；
The sum of step 7.3, the 1st width that hot spot figure and n-th are scattered with the 3rd width of n-th and the 2nd width scattering hot spot figure make the difference；
Step 7.4 does discrete Fourier transform to the image that step 7.3 obtains, and then intercepts 1 grade of frequency spectrum, and be moved to image
At center；
Step 7.5 does discrete inverse inverse Fourier transform to the image that step 7.4 obtains, and is then passed using Fresnel propagation formula
Cast to sample central plane, propagation distance are as follows: D+L1+L2；
Step 7.6 does discrete Fourier transform to the image that step 7.5 obtains；
Step 7.7 utilizes formulaObtain corresponding position of the wavefront on optical axis, wherein p
For axial position, m is lateral position, and n is lengthwise position, and λ is optical maser wavelength, Δ kxFor horizontal space frequency, Δ kyFor longitudinal sky
Between frequency, Δ kzAxial space frequency；
Step 7.8, by corresponding amplitude at data (m, n) and phase shift to (m, p), to projecting wavefront to being parallel to
The plane of optical axis；
Step 7.9 does discrete inverse Fourier transform to the result that step 7.8 obtains；
Step 7.10 enables n=n+1, repeats step 7, and 2 to step 7.9 until the mobile n times of electricity driving displacement platform, and finally obtained three
Dimension data group is the three-dimensional information of sample to be tested.
5. three-D imaging method according to claim 3 or 4, which is characterized in that the range of the default moving step length l
It is 1 μm -10 μm.
6. three-D imaging method according to claim 3 or 4, which is characterized in that the one-dimensional electricity driving displacement platform is mobile
The range of frequency n is 300-500 times.
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| CN201810954592.9A CN109085137B (en) | 2018-08-21 | 2018-08-21 | Three-dimensional imaging device based on K space transformation and imaging method thereof |
| PCT/CN2018/114488 WO2020037837A1 (en) | 2018-08-21 | 2018-11-08 | Three-dimensional imaging apparatus based on k space transformation and imaging method thereof |
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