CN109069027B

CN109069027B - Pulse wave detection device and biological information measurement device

Info

Publication number: CN109069027B
Application number: CN201780024609.4A
Authority: CN
Inventors: 加藤雄树; 间野纯平; 藤田丽二; 山下新吾; 小椋敏彦
Original assignee: Omron Healthcare Co Ltd
Current assignee: Omron Healthcare Co Ltd
Priority date: 2016-04-28
Filing date: 2017-04-19
Publication date: 2021-09-10
Anticipated expiration: 2037-04-19
Also published as: EP3453320A1; WO2017188093A1; CN109069027A; EP3453320B1; JP6750294B2; US20190046051A1; EP3453320A4; JP2017196309A

Abstract

The invention provides a pressure pulse wave sensor and a biological information measuring device having the same, which can sufficiently ensure the durability when being worn for a long time and can restrain the manufacturing cost. A pressure pulse wave sensor (10) is provided with: a sensor chip (22) having a pressure detection element (24); a substrate (50) for fixing the sensor chip (22); and a protective cover (40) that protects the substrate (50) and the sensor chip (22). The outer peripheral surface of the protective cover (40) has a top surface (41) that is disposed above the pressure detection element (24) in a direction (Z) perpendicular to the detection surface (26) of the sensor chip (22) and that is parallel to the detection surface (26). An opening (42) is formed in the protective cover (40), the opening (42) penetrates from a position of the top surface (41) facing the detection surface (26) to the detection surface (26) side, and a filler (55) is filled between the opening (42) and the detection surface (26).

Description

Pulse wave detection device and biological information measurement device

Technical Field

The present invention relates to a pulse wave detection device and a biological information measurement device.

Background

There is known a biological information measurement device capable of measuring biological information such as a pulse wave or a blood pressure using information detected by a pressure sensor in a state where the pressure sensor is in direct contact with a body part through which an artery such as a radial artery of a wrist passes (for example, see patent document 1).

The pressure sensor mounted on the biological information measurement device described in patent document 1 includes: a circuit substrate; a spacer disposed on the circuit substrate; a sensor chip disposed on the spacer; a housing for accommodating the circuit board; and a protective plate for protecting the circuit substrate. An opening is provided in the protective plate, and the sensor chip protrudes from the opening.

Documents of the prior art

Patent document 1: japanese patent laid-open publication No. Hei 4-67839

In the sensor portion described in patent document 1, the sensor chip protrudes from the opening of the protection plate. Therefore, in the pressure sensor, the surface of the sensor chip in the portion that contacts the wrist is dominant, and the force applied to the surface of the sensor chip is large. Therefore, when the biological information measurement device is assumed to be worn for a long time such as a day, the durability of the sensor chip is improved.

Disclosure of Invention

In view of the above problems, an object of the present invention is to provide a pressure pulse wave sensor, a pulse wave detection device, and a biological information measurement device, which can sufficiently ensure durability when worn for a long time and can suppress manufacturing costs.

The present invention provides a pressure pulse wave sensor, including: a sensor chip having a pressure detection element; a substrate that fixes the sensor chip; and a protective member that protects the substrate and the sensor chip, the protective member having an opening that is disposed in a direction perpendicular to a detection surface of the pressure detection element on which the sensor chip is formed, at a position opposite to the detection surface on a side opposite to a fixing position side of the sensor chip and the substrate with respect to the pressure detection element, and a filler is filled between the opening and the detection surface.

The pulse wave detection device of the present invention includes the pressure pulse wave sensor and a rotation mechanism, and the pressure pulse wave sensor includes: a sensor chip having an element array constituted by a plurality of pressure detecting elements arranged in one direction; a substrate that fixes the sensor chip; a protective member that protects the substrate and the sensor chip; and a filling material filled between a detection surface of the sensor chip formed by the pressure detection element and an opening provided in the protective member, wherein in the pressure pulse wave sensor, the opening is disposed on a side opposite to a side of the sensor chip fixed to the substrate and is disposed at a position facing the detection surface in a vertical direction perpendicular to the detection surface, the rotation mechanism rotates the pressure pulse wave sensor about directions perpendicular to the one direction and the vertical direction, respectively, and the outer peripheral surface of the protective member has: a top surface on which the opening is formed; and an inclined surface that is connected to both end edges of the top surface in the one direction, the inclined surface being inclined with respect to an opening surface of the opening portion, an inclination angle of the inclined surface being larger than a maximum value of a rotation angle at which the pressure pulse wave sensor can be rotated by the rotating mechanism.

The biological information measuring apparatus of the present invention includes: the pulse wave detection device; and a biological information calculation unit that calculates biological information based on the pressure pulse wave detected by the pressure pulse wave sensor.

The biological information measuring apparatus of the present invention includes: the pressure pulse wave sensor; and a biological information calculation unit that calculates biological information based on the pressure pulse wave detected by the pressure pulse wave sensor.

According to the present invention, it is possible to provide a pressure pulse wave sensor and a biological information measurement device including the pressure pulse wave sensor, which can sufficiently ensure durability when worn for a long time and can suppress manufacturing costs.

Drawings

Fig. 1 is a schematic diagram showing a schematic configuration of a biological information measurement device 100 according to an embodiment of the present invention.

Fig. 2 is an exploded perspective view showing an external configuration of the pressure pulse wave sensor 10 shown in fig. 1.

Fig. 3 is a perspective view showing an external configuration of the pressure pulse wave sensor 10 shown in fig. 1.

Fig. 4 is a schematic diagram showing an external configuration of the sensor unit 20 shown in fig. 2.

Fig. 5 is a schematic cross-sectional view of the line V-V shown in fig. 3.

Fig. 6 is a plan view of the pressure pulse wave sensor 10 shown in fig. 3 as viewed from the direction Z.

Fig. 7 is a perspective view showing an external configuration of a protective cover 401 of a modification of the protective cover 40 of the pressure pulse wave sensor 10 shown in fig. 2.

Fig. 8 is a schematic cross-sectional view of the pressure pulse wave sensor 12 of the modification of the pressure pulse wave sensor 10 shown in fig. 2.

Fig. 9 is a perspective view showing an external configuration of a sensor unit 201 according to a modification of the sensor unit 20 of the pressure pulse wave sensor 10 shown in fig. 2.

Fig. 10 is a schematic cross-sectional view of a modification of the pressure pulse wave sensor 10 shown in fig. 2.

Detailed Description

Embodiments of the present invention will be described below with reference to the drawings.

The biological information measurement device 100 includes: a case 80; an air bag 70 supported by the case 80; a rotation driving unit 60 fixed to the air bladder 70; and a pressure pulse wave sensor 10 rotatably supported by the rotation driving unit 60. The biological information measurement device 100 is worn on the wrist of the person to be measured using a band not shown.

The air bladder 70 constitutes a pressing member that presses the rotation driving unit 60 and the pressure pulse wave sensor 10 against the surface of the wrist. The air bladder 70 has its internal pressure adjusted by a pump, not shown, built in the case 80. The pump is controlled by a control unit built in the casing 80.

The rotation driving unit 60 includes: a rotation mechanism 61 for rotating the pressure pulse wave sensor 10 about respective axes extending in two mutually perpendicular directions along a detection surface of the pressure pulse wave sensor 10, which will be described later; and a driver 62 that drives the rotating mechanism 61. The driver 62 is controlled by a control unit built in the casing 80.

The pressure pulse wave sensor 10 is a sensor as follows: in a state where the air bladder 70 is pressed against the body surface with a predetermined pressing force, a pressure pulse wave, which is a pressure vibration wave transmitted from the radial artery T passing through the inside of the wrist to the body surface, is detected. The case 80 incorporates therein a not-shown biological information calculation unit that calculates biological information such as a pulse rate, a heart rate, or a blood pressure value based on the pressure pulse wave detected by the pressure pulse wave sensor 10.

Fig. 2 is an exploded perspective view showing an external configuration of the pressure pulse wave sensor 10 shown in fig. 1. Fig. 3 is a perspective view showing an external configuration of the pressure pulse wave sensor 10 shown in fig. 1.

The pressure pulse wave sensor 10 includes: two sensor portions 20 elongated in a direction X as one direction; a flexible substrate 21 on which two sensor units 20 are fixed in a row in a direction Y perpendicular to the direction X; a base 30 for fixing the flexible substrate 21; and a protective cover 40 as a protective member fixed to the base 30 on which the flexible substrate 21 is fixed, for protecting the two sensor units 20.

The susceptor 30 has a rectangular planar shape as viewed from a direction Z perpendicular to the direction X and the direction Y, and has a carrying surface 32 for carrying the flexible substrate 21. The mount surface 32 is provided with two base through holes 33 corresponding to the number of the sensor units 20, and the base through holes 33 penetrate the mount surface 32 in the direction Z. Further, openings 34 having a size allowing the flexible substrate 21 to pass therethrough are provided at both end positions in the direction Y on the carrying surface 32. Both ends of the flexible substrate 21 are drawn out to the back surface side of the base 30 through the opening 34.

The planar shape of the protective cover 40 as viewed in the direction Z is a rectangle having the same size as the outer shape of the base 30, and the protective cover 40 is fixed to the surface around the mounting surface 32 of the base 30 in a state where the flexible substrate 21 is fixed to the base 30.

The protective cover 40 has two openings 42 formed at positions respectively facing the two sensor portions 20 in a state where the protective cover is fixed to the base 30. The outer peripheral surface (the surface exposed to the outside in the state shown in fig. 3) of the protective cover 40 includes: a flat top surface 41; an inclined surface 44 connected to an end edge 45 of the top surface 41; and a vertical surface 46 connected to an end edge of the inclined surface 44 and perpendicular to the top surface 41. The shape of the protective cover 40 will be described in detail later.

Fig. 4 is a schematic diagram showing an external configuration of the sensor unit 20 shown in fig. 2. Fig. 5 is a schematic cross-sectional view of the line V-V shown in fig. 3.

The sensor unit 20 includes a sensor chip 22 and a container-shaped substrate 50, the substrate 50 has a recess 51, and the sensor chip 22 is fixed to a bottom surface 52 of the recess 51.

The sensor chip 22 includes a semiconductor substrate 23 such as a silicon single crystal or a single crystal of a compound semiconductor such as gallium-arsenic. The semiconductor substrate 23 is rectangular with the direction X being the longitudinal direction. An element array 25 is formed on the surface of the semiconductor substrate 23, and the element array 25 is composed of a plurality of pressure detection elements 24 arranged in the direction X. The pressure detection element 24 detects strain applied to the element as a pressure signal, and for example, an element of a resistance strain type, a semiconductor piezoresistive type, or a capacitance type is used. The surface of the semiconductor substrate 23 is a flat surface, and the flat surface constitutes a detection surface 26 for detecting pressure. The direction perpendicular to the detection surface 26 is the direction Z.

Chip-side terminal portions 27 are formed at both ends of the surface of the semiconductor substrate 23 in the direction X, and the chip-side terminal portions 27 are constituted by electrode pads electrically connected to the respective pressure detection elements 24 (see fig. 4).

The substrate 50 is made of a hard substrate having sufficiently higher rigidity than the semiconductor substrate 23, such as a ceramic substrate or a glass substrate. The substrate 50 is rectangular with the direction X being the longitudinal direction.

As shown in fig. 5, a concave portion depressed in the direction Z perpendicular to the detection surface 26 is formed on the surface opposite to the detection surface 26 of the semiconductor substrate 23. The semiconductor substrate 23 has a structure having a thin portion (diaphragm) thinner than other portions in the direction Z by the concave portion.

The portion of the opposite surface of the detection surface 26 of the semiconductor substrate 23 except the recess is fixed to the bottom surface 52 of the recess 51 of the substrate 50 by the adhesive 29. The adhesive 29 is made of, for example, an ultraviolet curable resin.

The semiconductor substrate 23 is fixed to the bottom surface of the recess 51 of the substrate 50, and the recess of the semiconductor substrate 23 is made to communicate with the atmosphere only through the through hole 54 formed in the bottom surface 52 of the recess 51 of the substrate 50.

As shown in fig. 5, a through hole 211 is formed in the flexible substrate 21 at a position facing the through hole 54 of the substrate 50. The through hole 211 communicates with the base through hole 33 of the base 30. Thus, the inside of the concave portion of the semiconductor substrate 23 is maintained at atmospheric pressure by the base through-hole 33, the through-hole 211, and the through-hole 54.

As shown in fig. 4, the substrate-side terminals 53 are provided on the surfaces of the substrate 50 on which the recessed portions 51 are formed at both ends in the direction X, and the substrate-side terminals 53 are constituted by electrode tabs electrically connected to the respective electrode tabs of the chip-side terminals 27.

As shown in fig. 5, the electrode pads of the chip-side terminal portions 27 and the electrode pads of the substrate-side terminal portions 53 are connected by conductive members 28 of gold, aluminum, or the like. The conductive member 28 is protected by covering the periphery thereof with a protective member 281 made of an insulating material such as resin. The space between the side surface of the recess 51 of the substrate 50 and the semiconductor substrate 23 and the adhesive 29 is filled with the material 282, which has a smaller volume change due to temperature and humidity than the protective member 281.

Next, the protective cover 40 will be described in detail.

The top surface 41 of the protective cover 40 is a surface parallel to the detection surface 26, and is arranged on the opposite side of the fixing portion (portion having the adhesive material 29) of the sensor chip 22 and the substrate 50 from the pressure detection element 24 in the direction Z perpendicular to the detection surface 26 of the sensor chip 22. Two surfaces are parallel, which means the following state: the angle of the two faces is within a tolerance range centered at 0 degrees. Likewise, two-plane vertical refers to the following states: the angle formed by the two faces is within a tolerance range centered at 90 degrees.

The protective cover 40 has an opening 42 formed therein, and the opening 42 penetrates from a position of the top surface 41 facing the detection surface 26 of each sensor chip 22 toward the detection surface 26. In a plan view seen in the direction Z, the entirety of the element row 25 overlaps the opening 42.

As shown in fig. 5, a space surrounded by the inner peripheral surface of the protective cover 40, the base 30, the sensor portion 20, and the flexible substrate 21 is filled with a filler 55.

The filler 55 is also filled in the opening 42 of the protective cover 40, and a surface 551 of the filler 55 exposed to the outside is formed to be flush with the top surface 41 of the protective cover 40. The surface 551 constitutes an opening surface of the opening 42. The plane formed by the surface 551 of the filler 55 and the top surface 41 of the protective cover 40 is parallel to the detection surface 26, and forms a contact surface with the surface of the subject.

The filler material 55 is preferably a material having a lower hardness than the protective cover 40. For example, it is preferable to use ceramic as the material of the protective cover 40, and epoxy resin, silicone resin, or the like having hardness lower than that of ceramic as the filler 55.

As shown in fig. 5, in a cross section of a straight line overlapping the top surface 41 and extending in the direction X, the inclined surface 44 of the protective cover 40 is continuous with both end edges 45X of the top surface 41 in the direction X and inclined at an inclination angle θ in the direction of approaching the sensor chip 22 in the direction Z with respect to the surface 551.

Further, as shown in fig. 5, the vertical surface 46 of the protective cover 40 is a surface which is continuous with the inclined surface 44 and is perpendicular to the surface 551. The vertical surface 46 is located on the sensor chip 22 side than the surface 551 in the direction Z, and is located outside the end edge 45 of the top surface 41 in a plan view viewed from the direction Z.

In addition, in a cross section of a straight line extending in the direction Y of the pressure pulse wave sensor 10 of fig. 3 and passing through the top surface 41, the shape of the protective cover 40 is the same as the shape of the protective cover 40 shown in fig. 5. That is, the outer peripheral surface of the protective cover 40 has: a top surface 41; an inclined surface 44 which is continuous with both end edges of the top surface 41 in the direction Y and is inclined with respect to the top surface 41 in a direction approaching the sensor chip 22; and a vertical surface 46 connected to the inclined surface 44.

The side surfaces 31 at both ends of the base 30 in the X and Y directions are connected to the vertical surfaces 46 of the protective cover 40 in the same plane in a state where the protective cover 40 is fixed, and the vertical surfaces 46 and the side surfaces 31 form the same horizontal plane in the Z direction.

Fig. 6 is a plan view of the pressure pulse wave sensor 10 shown in fig. 3 as viewed from the direction Z. In fig. 6, the sensor portion 20 only illustrates the position of the conductive member 28 and omits other components.

As shown in fig. 6, the conductive member 28 of the sensor portion 20 is disposed at a position not overlapping with the end edge 45 of the top surface 41 in a plan view seen from the direction Z.

The edge 45 of the top surface 41 is a portion to which the maximum stress is applied in a state where the top surface 41 is pressed against the body surface. On the other hand, since the conductive member 28 is formed by wire bonding or the like, there is a possibility of disconnection if a large force is applied.

As shown in fig. 6, the conductive member 28 is provided at a position not overlapping with the end edge 45 of the top surface 41, and the conductive member 28 is not provided below a portion to which a large stress is applied. Therefore, even when the pressure pulse wave sensor 10 is pressed against the body surface, the force applied to the conductive member 28 can be reduced, and disconnection can be prevented.

Although the conductive member 28 is present inside the end edge 45 in fig. 6, the same effect can be obtained even in a configuration in which the conductive member 28 is present outside the end edge 45.

The rotation mechanism 61 of the biological information measurement device 100 shown in fig. 1 is used to rotate the pressure pulse wave sensor 10 about two axes, i.e., an axis extending in the direction X and an axis extending in the direction Y.

The biological information measurement device 100 configured as described above is worn on the wrist so that the direction X intersects the radial artery T (see fig. 1) of the wrist that is the subject of detection of the pressure pulse wave.

When the biological information measurement device 100 is worn on the wrist and a measurement start instruction is given, the control unit increases the internal pressure of the air bladder 70 and presses the pressure pulse wave sensor 10 against the surface of the wrist.

The control unit determines the rotation angles of the pressure pulse wave sensor 10 about two axes, i.e., an axis extending in the direction X and an axis extending in the direction Y, so as to maximize the detection accuracy of the pressure pulse wave.

The control unit rotates the pressure pulse wave sensor 10 by the above-described determined rotation angle, detects the pressure pulse wave by the pressure detection element 24 of the pressure pulse wave sensor 10 in a state where the pressure pulse wave sensor 10 is pressed against the body surface with a predetermined pressing force, and calculates and stores the biological information based on the detected pressure pulse wave.

Thus, according to the pressure pulse wave sensor 10, the opening 42 of the protective cover 40 is provided above the detection surface 26 of the sensor chip 22, and the filling material 55 fills the opening 42, so that the top surface 41 of the protective cover 40 and the surface 551 of the filling material 55 form a contact surface with the body surface.

Therefore, the contact surface of the pressing body surface is formed by the protective cover 40 and the filler 55, and the durability of the sensor chip 22 of the pressure pulse wave sensor 10 can be improved. Therefore, the biological information measurement device 100 can be worn on the wrist for a long period of time. By using a material having a higher hardness than the filler 55 as the protective cover 40, the durability can be further improved.

In addition, according to the pressure pulse wave sensor 10, the surface 551 of the filler 55 can be easily planarized by the flatness of the top surface 41. Therefore, the manufacturing cost can be reduced. When the protective cover 40 is made of a material having a higher hardness than the filler 55, the surface 551 of the filler 55 can be more easily planarized.

Further, the pressure pulse wave sensor 10 has the following structure: the protective cover 40 has inclined surfaces 44 connected to both end edges 45X of the top surface 41 in the direction X. With this configuration, when the pressure pulse wave sensor 10 is rotated about the axis extending in the direction Y (about the wrist) by the rotation driving unit 60, the area of the protective cover 40 in contact with the body surface can be reduced.

The biological information measurement device 100 is worn on the wrist so that the top surface 41 of the protective cover 40 is positioned above the radial artery T, and hard tissues such as the radius and tendons are present around the radial artery T.

When the pressure pulse wave sensor 10 is rotated around the wrist, the inclined surface 44 of the protective cover 40 can release the pressure from these hard tissues, so that the wearing feeling of the biological information measurement device 100 can be improved. Further, by making the rotation operation of the pressure pulse wave sensor 10 less likely to be disturbed by hard tissues, a desired rotation angle can be maintained with a small driving force and pressing force.

In addition, the inclined surface 44 of the protective cover 40 may not be a flat surface but a curved surface. That is, the protective cover 40 may have a curved surface connecting the top surface 41 and the vertical surface 46. The curved surface constitutes a surface which is continuous with both end edges of the top surface 41 in the direction X and intersects with the surface 551 and a surface perpendicular to the surface 551, respectively. Accordingly, even when the inclined surface 44 is formed of a curved surface, the curved surface of the protective cover 40 can release the pressure from these hard tissues when the pressure pulse wave sensor 10 is rotated around the wrist, and therefore the wearing feeling of the biological information measurement device 100 can be improved.

The inclination angle θ of the inclined surface 44 shown in fig. 5 is preferably larger than the maximum value of the rotation angle by which the rotation mechanism 61 can rotate the pressure pulse wave sensor 10 about the axis extending in the direction Y (the rotation angle when the detection surface 26 is perpendicular to the pressing direction of the pressure pulse wave sensor 10 by the air bladder 70).

By setting such a value in advance, even when the pressure pulse wave sensor 10 is rotated maximally around the wrist, the inclined surface 44 can be prevented from contacting the body surface, and the rotation operation can be performed smoothly.

The pressure pulse wave sensor 10 has a structure in which the protective cover 40 has a vertical surface 46. In order to acquire calibration data required to convert the strain signal detected by the pressure detection element 24 into a pressure value, the following operations are required to be performed on the sensor chip 22 in the manufacturing process: in a state where the contact surface constituted by the top surface 41 and the surface 551 is housed in the sealed container, pressure is applied to the contact surface and a signal is acquired from the pressure detection element 24.

The protective cover 40 has a vertical surface 46 on the base 30 side of the surface 551, and a hood-shaped tool is attached around the vertical surface 46, whereby the inside of the tool can be easily sealed. Therefore, the calibration data generation work is easily performed, and the manufacturing cost can be reduced.

The protective cover 401 is configured by changing both end surfaces of the protective cover 40 in the direction Y to a vertical surface 46 perpendicular to the surface 551. The vertical surface 46 is a surface continuous with an edge of the top surface 41 in the direction Y.

According to the structure of the protective cover 401, since the edge of the top surface 41 in the direction Y is located at a position away from the sensor chip 22, stress applied to the sensor chip 22 can be reduced, the accuracy of pressure pulse wave detection can be improved, and the durability of the pressure pulse wave sensor 10 can be improved.

The outer peripheral surface of the protective cover 40 of the pressure pulse wave sensor 10 may be constituted by only the top surface 41 and a vertical surface 46, and the vertical surface 46 is connected to an edge 45 of the top surface 41 and is perpendicular to the surface 551. That is, the inclined surface 44 of the outer circumferential surface of the protective cover 40 is not necessarily provided.

Fig. 8 is a schematic cross-sectional view of a pressure pulse wave sensor 12 as a modification of the pressure pulse wave sensor 10 shown in fig. 2.

The outer peripheral surface of the protective cover 40 of the pressure pulse wave sensor 12 shown in fig. 8 is composed of a top surface 41 and a vertical surface 46 connected to the edge of the top surface 41, and is different from the structure shown in fig. 5 in that the outer peripheral surface of the protective cover 40 does not have an inclined surface 44. The other structure is the same as that of the pressure pulse wave sensor 10, and the same operation and effect can be obtained. In the structure shown in fig. 8, the edge of the top surface 41 coincides with the vertical surface 46 in a plan view seen from the direction Z.

The configuration of the sensor unit 20 mounted on the pressure pulse wave sensor 10 and the pressure pulse wave sensor 12 is not limited to the configuration shown in fig. 1 and 8. For example, the sensor section 20 may be changed to the sensor section 201 shown in fig. 9.

The sensor portion 201 has the same structure as the sensor portion 20 except that the substrate 50 is changed to a flat plate-like substrate 501. Even in the case of using such a sensor unit 201, the above-described effects can be obtained.

The embodiments of the present invention are described in detail below with reference to the accompanying drawings. The scope of the present invention is defined not by the above description but by the appended claims, and includes all modifications equivalent to and within the scope of the claims.

For example, the pressure pulse wave sensor 10 has two sensor units 20, but may have only one sensor unit 20. In this case, the rotating mechanism 61 is changed to a mechanism for rotating the pressure pulse wave sensor 10 only about an axis extending in the direction Y.

When the pressure pulse wave sensor 10 has only one sensor unit 20, only one pressure detection element 24 may be formed on the surface of the sensor chip 22 of the sensor unit 20. In this case, the rotation driving part 60 may be omitted.

Further, the pressure pulse wave sensor 10 may have the following structure: there are three or more sensor sections 20 arranged in the direction Y.

Although the top surface 41 of the protective cover 40 is parallel to the detection surface 26, the top surface 41 of the protective cover 40 may be inclined with respect to the detection surface 26 as shown in fig. 10. In the modification shown in fig. 10, the opening 42 formed in the top surface 41 is also filled with the filler 55, and the opening surface of the opening 42 is parallel to the detection surface 26. Durability can be improved in this structure as well.

Although the biological information measurement device 100 worn on the wrist has been described above, the present invention can be applied to any type of biological information measurement device that is worn on a body part through which an artery passes.

As described above, the following matters are disclosed in the present specification.

Disclosed is a pressure pulse wave sensor, including: a sensor chip having a pressure detection element; a substrate that fixes the sensor chip; and a protective member that protects the substrate and the sensor chip, the protective member having an opening that is disposed in a direction perpendicular to a detection surface of the pressure detection element on which the sensor chip is formed, at a position opposite to the detection surface on a side opposite to a fixing position side of the sensor chip and the substrate with respect to the pressure detection element, and a filler is filled between the opening and the detection surface.

Disclosed is a pressure pulse wave sensor, wherein the protective member is made of a material having a higher hardness than the filler material.

Disclosed is a pressure pulse wave sensor, wherein the protective member is made of ceramic.

Disclosed is a pressure pulse wave sensor, wherein the outer peripheral surface of the protective member has a vertical surface that is perpendicular to the opening surface of the opening, the vertical surface being located on the sensor chip side of the opening surface in the vertical direction, and the vertical surface overlaps with or is located outside the end edge of the top surface of the protective member that forms the opening in a plan view viewed from the vertical direction.

A sensor chip has an element array composed of a plurality of pressure detection elements arranged in one direction, and an outer peripheral surface of a protective member has surfaces connected to both end edges of the one direction forming a top surface of an opening portion and intersecting with an opening surface of the opening portion and a surface perpendicular to the opening surface, respectively.

Disclosed is a pressure pulse wave sensor, further comprising: a substrate-side terminal portion provided on the substrate for electrical connection with a terminal portion provided on an end portion of the sensor chip in the one direction; and a conductive member connecting the terminal portions of the sensor chip and the substrate-side terminal portions, the conductive member being disposed at a position not overlapping with an end edge of the top surface in a plan view viewed from the vertical direction.

Disclosed is a pressure pulse wave sensor, wherein the outer peripheral surface of the protective member has a vertical surface that is a surface that is continuous with both end edges of the top surface in directions perpendicular to the one direction and the vertical direction, respectively, and that is perpendicular to the opening surface of the opening.

Disclosed is a pulse wave detection device, including: the pressure pulse wave sensor; and a rotating mechanism which enables the pressure pulse wave sensor to rotate around directions respectively perpendicular to the one direction and the vertical direction, the connected surfaces are inclined surfaces which are inclined relative to the opening surface, and the inclination angle of the inclined surfaces is larger than the maximum value of the rotation angle which can enable the pressure pulse wave sensor to rotate by utilizing the rotating mechanism.

Disclosed is a biological information measurement device which includes: the pulse wave detection device; and a biological information calculation unit that calculates biological information based on the pressure pulse wave detected by the pressure pulse wave sensor.

Disclosed is a biological information measurement device which includes: the pressure pulse wave sensor; and a biological information calculation unit that calculates biological information based on the pressure pulse wave detected by the pressure pulse wave sensor.

Industrial applicability

The invention is particularly suitable for wrist-worn sphygmomanometers and the like, and has high convenience and effectiveness.

Although the present invention has been described above with reference to specific embodiments, the present invention is not limited to the above embodiments, and various modifications can be made without departing from the scope of the technical idea of the disclosed invention.

The present application is based on Japanese patent application 2016 (091665) filed on 28.4.2016 and the contents of which are hereby incorporated herein.

Description of the reference numerals

100 biological information measuring apparatus

10. 12 pressure pulse wave sensor

60 rotation driving part

61 rotating mechanism

62 driver

70 air bag

80 case body

Radial artery of T

20 sensor part

21 flexible substrate

211 through hole

22 sensor chip

23 semiconductor substrate

24 pressure detecting element

25 element row

26 test surface

27 chip side terminal part

28 conductive member

281 protection component

282 materials

29 adhesive material

30 base

31 side surface

32 bearing surface

33 base through hole

34 opening

40. 401 protective cover

41 top surface

42 opening part

44 inclined plane

45. 45x edge

46 vertical plane

50. 501 substrate

51 recess

52 bottom surface

53 substrate-side terminal portion

54 through hole

55 filling material

551 surfaces (open surface)

Angle of inclination theta

X, Y, Z direction

Claims

1. A pulse wave detection device is characterized in that,

comprises a pressure pulse wave sensor and a rotating mechanism,

the pressure pulse wave sensor includes:

a sensor chip having an element array constituted by a plurality of pressure detecting elements arranged in one direction;

a substrate that fixes the sensor chip;

a protective member that protects the substrate and the sensor chip; and

a filler material filled between a detection surface of the sensor chip formed by the pressure detection element and an opening provided in the protective member,

in the pressure pulse wave sensor, the opening is disposed on a side of the sensor chip opposite to a side fixed to the substrate and at a position facing the detection surface in a vertical direction perpendicular to the detection surface,

the rotating mechanism rotates the pressure pulse wave sensor about directions respectively perpendicular to the one direction and the perpendicular direction,

the outer peripheral surface of the protective member has:

a top surface on which the opening is formed; and

an inclined surface that is a surface connected to both end edges of the top surface in the one direction, the inclined surface being inclined with respect to an opening surface of the opening portion,

the inclination angle of the inclined plane is larger than the maximum value of the rotation angle which can enable the pressure pulse wave sensor to rotate by utilizing the rotating mechanism.

2. The pulse wave detection device according to claim 1, wherein the protective member is composed of a material that is harder than the filler material.

3. The pulse wave detection device according to claim 2, wherein the protective member is composed of ceramic.

4. The pulse wave detection device according to any one of claims 1 to 3,

the outer peripheral surface of the protective member further has a vertical surface perpendicular to the opening surface of the opening,

the vertical surface is located on the sensor chip side with respect to the opening surface in the vertical direction, and is located outside an end edge of the top surface in a plan view viewed from the vertical direction.

5. The pulse wave detection device according to any one of claims 1 to 3, further comprising:

a substrate-side terminal portion provided on the substrate for electrical connection with a terminal portion provided on an end portion of the sensor chip in the one direction; and

a conductive member connecting the terminal portion of the sensor chip and the substrate-side terminal portion,

the conductive member is disposed at a position not overlapping with an end edge of the top surface in a plan view seen from the vertical direction.

6. A biological information measuring apparatus characterized by comprising:

the pulse wave detection device according to any one of claims 1 to 5; and

and a biological information calculation unit that calculates biological information based on the pressure pulse wave detected by the pressure pulse wave sensor.