CN109014610A - A kind of system and method for passive zoom laser processing transparent material - Google Patents
A kind of system and method for passive zoom laser processing transparent material Download PDFInfo
- Publication number
- CN109014610A CN109014610A CN201811009711.XA CN201811009711A CN109014610A CN 109014610 A CN109014610 A CN 109014610A CN 201811009711 A CN201811009711 A CN 201811009711A CN 109014610 A CN109014610 A CN 109014610A
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- Prior art keywords
- transparent material
- passive
- laser
- electrical
- lifting platform
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses a kind of system and methods of passive zoom laser processing transparent material, and system of the present invention includes laser source, laser source support post, vibration mirror scanning head, scanning lens, host computer, motor, electrical-controlled lifting platform, platform floor, motion control card and galvanometer control card；Method of the present invention is the following steps are included: (1) PC control electrical-controlled lifting platform operates；(2) the X/Y axis movement of PC control vibration mirror scanning head；(3) laser beam that laser source issues is swung by the direction vibration mirror scanning head X/Y；(4) laser beam is focused on transparent material by scanning lens, is processed to material.System light path structure of the present invention is simple, and optical device is few, greatly reduces cost；The method carries out passive zoom to the focus point of laser beam, realizes that transparent material from bottom to top, is successively processed, improves processing efficiency and processing effect, expand the thickness range of material to be processed.
Description
Technical field
The present invention relates to laser-processing system and method, more particularly to one kind are transparent for glass, quartz and sapphire etc.
The passive variable focus laser machining system and method for material.
Background technique
When using laser processing transparent material such as glass, quartz and sapphire, existing method generallys use autozoom
Come realize laser three-D cutting and drilling, mainly comprise the steps that (1) laser emit laser beam, laser beam enter
In laser cutting head, after the reflection of the first variable curvature reflection unit and the reflection of the second variable curvature reflection unit, then it is poly- through lens group
Jiaozhuo is used in workpiece surface；(2) air pressure for adjusting cylinder in the first variable curvature reflection unit and the second variable curvature reflection unit, makes
The Deformation Curvature of two reflecting mirrors changes, and then realizes the automatic adjustment of laser beam focal length.Also have currently on the market specially
Equipment of the door using the method for such autozoom for laser processing, as Three-Dimensional Dynamic focusing laser galvanometer scanning system is exactly
Realize that the material different to thickness such as is cut and punched at the processing technologys by autozoom.
And the existing method laser machined using autozoom, that there are optical paths is complicated for technique device system,
Optical device is more, the problem of probability of damage is higher, processing thickness is easy to be restricted, higher cost occurs in device.It would therefore be highly desirable to
It solves the above problems.
Summary of the invention
Goal of the invention: in view of the above drawbacks of the prior art, the purpose of the present invention is to provide a kind of passive zoom laser
The system and method for transparent material is processed, the Three-Dimensional Dynamic of substitution active dynamic zoom focuses laser galvanometer scanning system, realizes
The processing method that transparent material from bottom to top, is successively cut or drilled, while cost is reduced, the three-dimensional for reaching needs is cut
It the effects of processing such as cuts and drills.
Technical solution: in order to achieve the above object, the system packet of passive zoom laser processing transparent material of the present invention
Include laser source, laser source support post, vibration mirror scanning head, scanning lens, host computer, motor, electrical-controlled lifting platform, platform bottom
Plate, motion control card and galvanometer control card；Laser source support post is located on the upside of electrical-controlled lifting platform, and fixes with platform floor
Connection.
Further, laser source is fixedly connected on laser source support post.
Further, platform floor is connect with electrical-controlled lifting platform；The top surface of laser source is parallel with platform floor, side
It is vertical with platform floor.
Further, transparent material to be processed is placed on electrical-controlled lifting platform, and the electrical-controlled lifting platform is using high
Negative-pressure vacuum machine adsorbs the transparent material.
The method of passive zoom laser processing transparent material of the present invention the following steps are included:
(1) host computer is operated by motor control electrical-controlled lifting platform；
(2) while PC control electrical-controlled lifting platform operates, the X/Y axis movement of control vibration mirror scanning head；
(3) galvanometer control card issues control signal, controls the energy and frequency of laser source outgoing laser beam；Laser beam passes through
The swing in the direction vibration mirror scanning head X/Y, the figure for keeping laser beam as needed change；
(4) it is focused on transparent material through vibration mirror scanning head laser beam adjusted by scanning lens, material is carried out
Processing.
Further, in step (1), host computer sends control instruction to motion control card, and motion control card sends pulse
It goes here and there to motor, train of pulse is operated motor based on the received, to drive electrical-controlled lifting platform to carry out rise and fall fortune in real time
It is dynamic.
Further, in step (2), host computer sends control instruction and gives galvanometer control card, and galvanometer controls card control galvanometer
The X/Y axis of probe moves.
Further, in step (4), laser beam from below to up, cutting and drilling processing is successively carried out to transparent material.
The utility model has the advantages that compared with prior art, the present invention has following remarkable advantage:
(1) structure is simple, at low cost: it is passive that the present invention is carried out by focus point of the adjustment hoistable platform in real time to laser beam
The method of zoom, the technique device to compare using the method for traditional autozoom for laser processing, light channel structure is simple,
Optical device is few；The price of the motor and electric lifting platform that use is three points that Three-Dimensional Dynamic focuses laser galvanometer scanning system
One of to 1/6th, cost of the totle drilling cost well below conventional laser processing unit (plant)；
(2) maintenance of equipment is simple: light channel structure of the invention is simple, and optical device is few, therefore optical device damages
Probability is low；And because device cost is lower, inventory can be prepared, thus after sale, it is easy to maintenance quick；And conventional three-dimensional dynamic focusing
Laser galvanometer scanning system light path is complicated, optical device is more, and it is higher that probability of damage occurs in device, and maintenance difficulty is relatively
Greatly, the period is longer；
(3) rapidoprint thickness range is big: method of the invention can be adjusted by electrical-controlled lifting platform is processed
The thickness range of transparent material, the maximum gauge of material are shaken in 12mm or so much larger than using conventional three-dimensional dynamic focusing laser
When scarnning mirror system is processed, maximum processing thickness 5mm of material or so；
(4) machining accuracy, high-efficient: electrical-controlled lifting platform uses high negative pressure vacuum machine adsorption production, protects positions of materials
It is fixed to keep steady；Meanwhile the automatic whereabouts such as powder, clast generated when subsurface material cutting or drilling, and inhaled by high negative pressure vacuum machine
It is attached, powder, clast are effectively prevented in incision accumulation, substantially increase cutting, drilling efficiency and kerf quality；Pass through three axis
Linkage control is always positioned at light spot focus on machining locus during cutting material, thus realize high-precision, it is high-quality
The special-shaped glass of amount is cut, and the high standard that the material cut and edge quality for processing it can satisfy specific industry is wanted
It asks.
Detailed description of the invention
Fig. 1 is the system schematic that the passive zoom of the present invention laser machines transparent material；
Fig. 2 is flow chart of the method for the present invention.
Specific embodiment
Technical solution of the present invention is described further with reference to the accompanying drawing.
As shown in Figure 1, the system of passive zoom laser processing transparent material of the present invention includes laser source 1, laser
Source support post 2, vibration mirror scanning head 3, scanning lens 4, host computer 5, motor 6, electrical-controlled lifting platform 7, platform floor 8, movement
Control card 9 and galvanometer control card 10.
Platform floor 8 and 7 elastic connection of electrical-controlled lifting platform；Laser source support post 2 is located on electrical-controlled lifting platform 7
Side, and be fixedly connected with platform floor 8；Laser source 1 is fixedly connected on 2 on laser source support post, and platform floor 8 passes through precision
Processing guarantees the flatness and the depth of parallelism of its upper and lower surface, thus keep the top surface of laser source 1 parallel with platform floor 8, side
It is vertical with platform floor 8；The transparent material that need to be processed is placed above in electrical-controlled lifting platform 7, is adsorbed and is produced using high negative pressure vacuum machine
Product guarantee position stability.
As shown in Fig. 2, coming the invention also discloses a kind of system using above-mentioned passive zoom laser processing transparent material
The method for carrying out passive zoom laser processing transparent material, step include: that the transmission control instruction of (1) host computer 5 is controlled to movement
Fabrication 9, motion control card 9 send train of pulse to motor 6, and train of pulse is operated motor 6 based on the received, to drive in real time
Executing agency, that is, electrical-controlled lifting platform 7 carries out rise and fall campaign；
(2) it while host computer 5 controls the operating of electrical-controlled lifting platform 7 by motor 6, sends control instruction and is controlled to galvanometer
Card 10, the X/Y axis movement of control vibration mirror scanning head 3；
(3) galvanometer control card 10 issues control signal while controlling vibration mirror scanning head 3, and control laser source 1, which projects, to swash
The energy and frequency of light beam, laser beam make the figure that laser beam is as needed by the swing in the direction X/Y of vibration mirror scanning head 3
It changes, guarantees that laser facula and predetermined material processing route precision coincide；
(4) it is focused on transparent material through vibration mirror scanning head laser beam adjusted by scanning lens 4, from below to up,
Successively carry out cutting and drilling processing.
Claims (8)
1. a kind of system of passive zoom laser processing transparent material, it is characterised in that: supported including laser source (1), laser source
Column (2), vibration mirror scanning head (3), scanning lens (4), host computer (5), motor (6), electrical-controlled lifting platform (7), platform floor
(8), motion control card (9) and galvanometer control card (10)；Laser source support post (2) is located on the upside of electrical-controlled lifting platform (7), and
It is fixedly connected with platform floor (8).
2. the system of passive zoom laser processing transparent material according to claim 1, it is characterised in that: laser source (1)
It is fixedly connected on laser source support post (2).
3. the system of passive zoom laser processing transparent material according to claim 2, it is characterised in that: platform floor
(8) it is connect with electrical-controlled lifting platform (7)；The top surface of laser source (1) is parallel with platform floor (8), side and platform floor (8)
Vertically.
4. the system of passive zoom laser processing transparent material according to claim 1, it is characterised in that: to be processed is saturating
Bright material is placed on electrical-controlled lifting platform (7), and the electrical-controlled lifting platform (7) adsorbs the transparent material using high negative pressure vacuum machine
Material.
5. a kind of method of the passive zoom laser processing transparent material based on system described in any one of claim 1-4,
It is characterized in that: the following steps are included:
(1) host computer (5) passes through motor (6) control electrical-controlled lifting platform (7) operating；
(2) while host computer (5) control electrical-controlled lifting platform (7) operating, the X-Y axis movement of control vibration mirror scanning head (3)；
(3) galvanometer control card (10) issues control signal, controls the energy and frequency of laser source (1) outgoing laser beam；Laser beam
By the swing in vibration mirror scanning head (3) direction X-Y, the figure for keeping laser beam as needed changes；
(4) focused on transparent material through vibration mirror scanning head (3) laser beam adjusted by scanning lens (4), to material into
Row processing.
6. the method for passive zoom laser processing transparent material according to claim 5, it is characterised in that: in step (1),
Host computer (5) sends control instruction and gives motion control card (9), and motion control card (9) sends train of pulse and gives motor (6), motor (6)
Train of pulse is operated based on the received, to drive electrical-controlled lifting platform (7) to carry out rise and fall campaign in real time.
7. the method for passive zoom laser processing transparent material according to claim 5, it is characterised in that: in step (2),
Host computer (5) sends control instruction and gives galvanometer control card (10), and galvanometer control card (10) controls the X/Y axis of vibration mirror scanning head (3)
Movement.
8. the method for passive zoom laser processing transparent material according to claim 5, it is characterised in that: in step (4),
Laser beam from below to up, cutting and drilling processing is successively carried out to transparent material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811009711.XA CN109014610A (en) | 2018-08-31 | 2018-08-31 | A kind of system and method for passive zoom laser processing transparent material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811009711.XA CN109014610A (en) | 2018-08-31 | 2018-08-31 | A kind of system and method for passive zoom laser processing transparent material |
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| Publication Number | Publication Date |
|---|---|
| CN109014610A true CN109014610A (en) | 2018-12-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201811009711.XA Pending CN109014610A (en) | 2018-08-31 | 2018-08-31 | A kind of system and method for passive zoom laser processing transparent material |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110560891A (en) * | 2019-09-25 | 2019-12-13 | 吉林大学 | Device and method for processing transparent dielectric material by using static pressure water to assist nanosecond laser |
| CN114178718A (en) * | 2021-12-31 | 2022-03-15 | 南京萃智激光应用技术研究院有限公司 | Dust-free laser processing device and method for photomask |
| CN114619157A (en) * | 2022-03-16 | 2022-06-14 | 新代科技(苏州)有限公司 | Glass drilling device based on 2D galvanometer laser machining and Z-axis movement |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110560891A (en) * | 2019-09-25 | 2019-12-13 | 吉林大学 | Device and method for processing transparent dielectric material by using static pressure water to assist nanosecond laser |
| CN114178718A (en) * | 2021-12-31 | 2022-03-15 | 南京萃智激光应用技术研究院有限公司 | Dust-free laser processing device and method for photomask |
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