CN109013536A - A kind of silicon powder ultrasonic cleaning equipment - Google Patents
A kind of silicon powder ultrasonic cleaning equipment Download PDFInfo
- Publication number
- CN109013536A CN109013536A CN201810755385.0A CN201810755385A CN109013536A CN 109013536 A CN109013536 A CN 109013536A CN 201810755385 A CN201810755385 A CN 201810755385A CN 109013536 A CN109013536 A CN 109013536A
- Authority
- CN
- China
- Prior art keywords
- pipe
- silicon powder
- cleaning
- cylinder
- cleaning pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 41
- 239000011863 silicon-based powder Substances 0.000 title claims abstract description 41
- 238000004506 ultrasonic cleaning Methods 0.000 title claims abstract description 17
- 238000004140 cleaning Methods 0.000 claims abstract description 71
- 239000007788 liquid Substances 0.000 claims abstract description 32
- 238000000926 separation method Methods 0.000 claims abstract description 21
- 239000012452 mother liquor Substances 0.000 claims abstract description 10
- 239000012530 fluid Substances 0.000 claims description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 238000011010 flushing procedure Methods 0.000 claims description 7
- JEGUKCSWCFPDGT-UHFFFAOYSA-N h2o hydrate Chemical compound O.O JEGUKCSWCFPDGT-UHFFFAOYSA-N 0.000 claims description 3
- 230000007704 transition Effects 0.000 claims description 3
- 230000035939 shock Effects 0.000 abstract description 5
- 239000012535 impurity Substances 0.000 abstract description 4
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000005406 washing Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004484 Briquette Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000016507 interphase Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/11—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with bag, cage, hose, tube, sleeve or like filtering elements
- B01D29/31—Self-supporting filtering elements
- B01D29/35—Self-supporting filtering elements arranged for outward flow filtration
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Silicon Compounds (AREA)
Abstract
The invention discloses a kind of silicon powder ultrasonic cleaning equipments, including bracket, cleaning pipe, ultrasonic oscillator and solid-liquid separation device, the cleaning pipe is installed on the ground by bracket, liquid-feeding tube and discharge nozzle are connected separately at the top and bottom of cleaning pipe, control valve is installed on discharge nozzle, the end of cleaning pipe is also connect with charge pipe, the cleaning pipe is ladder-type structure, ultrasonic oscillator is mounted at each inflection point of cleaning pipe, ultrasonic oscillator is connect by signal wire with supersonic generator, the end of discharge nozzle is in the surface of solid-liquid separation device, the beneficial effects of the present invention are: cleaning pipe is step-like, it can make silicon powder rushed along step-like cleaning tube edge whereabouts side by ultrasonic wave, shock wave when simultaneously by bubbles burst, its surface dirt impurity etc. is cleaned, cleaning efficiency is high, clearly Silicon powder after washing is able to achieve by solid-liquid separation device and is efficiently separated with mother liquor, and to be dried silicon powder can be used later.
Description
Technical field
The present invention relates to a kind of cleaning device, specifically a kind of silicon powder ultrasonic cleaning equipment.
Background technique
Silicon material is a kind of very important semiconductor material, can be used for making diode, triode, luminescent device, pressure-sensitive
A variety of components such as element, solar battery sheet are widely used in radio engineering, automatic field, signalling arrangement, power work
The fields such as journey.
Silicon powder is prepared as a raw material with silico briquette, and various new high-tech industries, but silicon powder production line are widely used in
Cleaning method generally using rinsing or foam washing, cleaning efficiency is low, cleaning there are dead angle, clean it is not thorough enough, worker's
Large labor intensity, therefore under the premise of ensuring processing efficiency, propose a kind of silicon powder line cleaning dress for being able to solve problems
It sets necessary.
Summary of the invention
It is mentioned above in the background art to solve the purpose of the present invention is to provide a kind of silicon powder ultrasonic cleaning equipment
Problem.
To achieve the above object, the invention provides the following technical scheme:
A kind of silicon powder ultrasonic cleaning equipment, including bracket, cleaning pipe, ultrasonic oscillator and solid-liquid separation device, the cleaning
Pipe on the ground, is connected separately with liquid-feeding tube and discharge nozzle, pacified on discharge nozzle by bracket installation at the top and bottom of cleaning pipe
Equipped with control valve, the end of cleaning pipe is also connect with charge pipe, and the cleaning pipe is ladder-type structure, and each of cleaning pipe turns
Ultrasonic oscillator is mounted at point, ultrasonic oscillator is connect by signal wire with supersonic generator, the end of discharge nozzle
In the surface of solid-liquid separation device, the solid-liquid separation device includes cylinder, cylinder mould, bracing ring and fluid collection chamber, has taper
The top of the cylinder mould of inner cavity is equipped with a circle flange, and flange is connected to the top open part of cylinder, and the inside of the cylinder is set
There is the fluid collection chamber for storing mother liquor, the side wall of cylinder, which corresponds to, is equipped with liquid outlet connector, the liquid outlet connector at the position of fluid collection chamber
It is connect with return pipe, the end of return pipe is connect with liquid-feeding tube, and water pump is equipped on return pipe.
As a further solution of the present invention: transition being carried out with circular arc at the inflection point of the cleaning pipe.
As a further solution of the present invention: liquid level alarm device or level alarm for water are installed in the cleaning pipe.
As further scheme of the invention: the bottom of the cylinder is equipped with multiple supporting legs, is equipped on supporting leg
The universal wheel of multiple strap brakes.
As further scheme of the invention: being equipped with the filter for being filtered to mother liquor on the return pipe
Structure.
As the present invention further scheme: the inside of the cylinder is fixed with bracing ring, outside bracing ring and cylinder mould
Step at contact, offer multiple through-holes on the bracing ring.
As further scheme of the invention: the top of the cylinder mould is equipped with a flushing pipe, flushing pipe and clear water water source
Connection.
Compared with prior art, the beneficial effects of the present invention are: cleaning pipe be it is step-like, silicon powder can be made along rank
Trapezoidal cleaning tube edge whereabouts side is rushed by ultrasonic wave, while shock wave when by bubbles burst, surface dirt are miscellaneous
Matter etc. is cleaned, cleaning efficiency is high, and the silicon powder after cleaning is able to achieve by solid-liquid separation device and is efficiently separated with mother liquor,
Silicon powder, which is dried, later can be used.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of silicon powder ultrasonic cleaning equipment.
Fig. 2 is a kind of structural schematic diagram of solid-liquid separation device in silicon powder ultrasonic cleaning equipment.
Fig. 3 is a kind of structural schematic diagram of cleaning pipe in silicon powder ultrasonic cleaning equipment.
In figure: 1- bracket, 2- cleaning pipe, 3- liquid-feeding tube, 4- charge pipe, 5- ultrasonic oscillator, 6- discharge nozzle, 7- control valve
Door, 8- solid-liquid separation device, 9- cylinder mould, 10- flushing pipe, 11- return pipe, 12- water pump, 13- circular arc, the inner cavity 14-, 15- cylinder,
16- flange, 17- bracing ring, 18- fluid collection chamber, 19- supporting leg, 20- liquid outlet connector.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Embodiment 1
Please refer to Fig. 1 and 3, in the embodiment of the present invention, a kind of silicon powder ultrasonic cleaning equipment, including bracket 1, cleaning pipe 2, ultrasound
Wave oscillator 5 and solid-liquid separation device 8, the cleaning pipe 2 are installed on the ground by bracket 1, the top and bottom point of cleaning pipe 2
It is not connected with liquid-feeding tube 3 and discharge nozzle 6, control valve 7 is installed on discharge nozzle 6, the end of cleaning pipe 2 also connects with charge pipe 4
It connects, liquid-feeding tube 3 can be clear water for inputting cleaning solution, cleaning solution into cleaning pipe 2, and charge pipe 4 is for defeated into cleaning pipe 2
Enter silicon powder to be cleaned, the cleaning pipe 2 is ladder-type structure, is mounted on ultrasonic oscillator at each inflection point of cleaning pipe 2
5, ultrasonic oscillator 5 is connect by signal wire with supersonic generator, and the end of discharge nozzle 6 is being in solid-liquid separation device 8 just
Top, ultrasonic oscillator 5 can issue ultrasonic wave into cleaning pipe 2, the forward directed radiation of ultrasonic wave density interphase in cleaning solution,
It flows cleaning solution and generates the micro-bubbles of 50-500 μm of ten hundreds of diameters, the micro-bubble being present in cleaning solution
It is vibrated under the action of sound field, these bubbles are formed in the negative pressuren zone of ultrasonic wave longitudinal propagation, growth works as sound and in zone of positive pressure
When pressure reaches certain value, bubble is increased rapidly, and is then closed suddenly, and generates shock wave in bubble closure, is produced around it
Raw thousands of a atmospheric pressure, the dirty and dust etc. for being attached to silicon powder surface is cleaned out.
The working principle of the present embodiment is: when work, closing control valve 7 is inputted by liquid-feeding tube 3 into cleaning pipe 2
A certain amount of cleaning solution is careful not to pile, and how to judge that the additional amount of cleaning solution is enough to meet the requirements, in the cleaning pipe 2
Liquid level alarm device or level alarm for water are installed, a certain amount of silicon powder is then inputted into cleaning pipe 2 by charge pipe 4,
The valve on charge pipe 4 is closed, supersonic generator is started, ultrasonic oscillator 5 issues ultrasonic wave, and silicon powder is along step-like
Cleaning pipe 2 is rushed at whereabouts by ultrasonic wave, while shock wave when by bubbles burst, the quilts such as surface dirt impurity
It cleans out, after the completion of cleaning, control valve 7 is opened, the mixture of cleaning solution and silicon powder is input to solid-liquid separation device 8
Inside it is separated by solid-liquid separation.
For the ease of whereabouts of the silicon powder in cleaning pipe 2, so that silicon powder is not easy to be deposited in the dead angular position of cleaning pipe 2,
Transition is carried out with circular arc 13 at the inflection point of the cleaning pipe 2.
Embodiment 2
Referring to Fig. 2, the present embodiment is described further to the structure of the solid-liquid separation device 8 in embodiment 1, specifically
:
The solid-liquid separation device 8 includes cylinder 15, cylinder mould 9 and fluid collection chamber 18, the top of the cylinder mould 9 with conical internal cavity 14
Portion is equipped with a circle flange 16, and as seen from the figure, the angle of flange 16 is 180 °, and flange 16 is connected to the top open part of cylinder 15,
It takes out and places more convenient, and cylinder mould 9 is mainly used for holding silicon powder, and therefore, inevitable, the width of mesh of cylinder mould 9 is
Less than silicon powder partial size, the separation of silicon powder and cleaning solution is realized with this, the inside of the cylinder 15 is equipped with fluid collection chamber 18, is used for
Mother liquor after holding cleaning, the side wall of cylinder 15, which corresponds to, is equipped with liquid outlet connector 20 at the position of fluid collection chamber 18, also, for convenience
The movement of cylinder 15, the bottom of the cylinder 15 are equipped with multiple supporting legs 19, are equipped with the ten thousand of multiple strap brakes on supporting leg 19
To wheel.
Further, the liquid outlet connector 20 is connect with return pipe 11, and the end of return pipe 11 is connect with liquid-feeding tube 3, and
Water pump 12 is installed on return pipe 11, mother liquor can be pumped into return pipe 11, realize the recycling of mother liquor, and is actually made
Used time can install filter mechanism on return pipe 11, to realize the filtering to mother liquor, be convenient for its reuse, filter here
Structure is only filtered cleaning solution, belongs to the prior art, therefore do not limited specifically it.
Since the quality of silicon powder is larger, the flange 16 for depending merely on cylinder mould 9 comes load-bearing silicon powder quality and the impact force of water flow to be had very much
Its structure may be damaged, therefore, the inside of the cylinder 15 is fixed with bracing ring 17, outside bracing ring 17 and cylinder mould 9
It contacts, i.e., is supported by bracing ring 17 and flange 16 come the quality jointly to cylinder mould 9 at the step in portion, structure is guaranteed with this
Stability offer multiple through-holes (not illustrating in figure) on the bracing ring 17 and for the ease of the whereabouts of mother liquor.
Also, when being separated by solid-liquid separation, dust impurity in cleaning solution etc. may be attached on silicon powder, therefore in institute
The top for stating cylinder mould 9 is equipped with a flushing pipe 10, and flushing pipe 10 is connect with clear water water source, can be with after the completion of separation of solid and liquid
Silicon powder in cylinder mould 9 is rinsed, to guarantee cleaning quality.
It should be strongly noted that in the technical program, bracket 1, cleaning pipe 2, ultrasonic oscillator 5 and solid-liquid separation device
8 etc. are the application of the prior art, and set step-like for cleaning pipe 2, and cooperating the cleaning way of ultrasonic wave is the application's
Innovative point can make silicon powder be rushed while along step-like cleaning pipe 2 in whereabouts by ultrasonic wave, while by bubbles burst
When shock wave, surface dirt impurity etc. is cleaned, and cleaning efficiency is high.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims
Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (7)
1. a kind of silicon powder ultrasonic cleaning equipment, including bracket (1), cleaning pipe (2), ultrasonic oscillator (5) and solid-liquid separating machine
Structure (8), the cleaning pipe (2) are installed on the ground by bracket (1), are connected separately with and are added at the top and bottom of cleaning pipe (2)
Liquid pipe (3) and discharge nozzle (6) are equipped with control valve (7) on discharge nozzle (6), the end of cleaning pipe (2) also with charge pipe (4)
Connection, the cleaning pipe (2) are ladder-type structure, are mounted on ultrasonic oscillator (5) at each inflection point of cleaning pipe (2), surpass
Acoustic wave transducer (5) is connect by signal wire with supersonic generator, and the end of discharge nozzle (6) is in solid-liquid separation device (8)
Surface；The solid-liquid separation device (8) includes cylinder (15), cylinder mould (9), bracing ring (17) and fluid collection chamber (18), has cone
The top of the cylinder mould (9) of shape inner cavity (14) is equipped with circle flange (16), and flange (16) is connected at the top of cylinder (15) and opens
Mouthful place, equipped with fluid collection chamber (18), the side wall of cylinder (15) corresponds to be set at the positions of fluid collection chamber (18) for the inside of the cylinder (15)
Have liquid outlet connector (20), the liquid outlet connector (20) connect with return pipe (11), and the end and liquid-feeding tube (3) of return pipe (11) are even
It connects, and water pump (12) is installed on return pipe (11).
2. a kind of silicon powder ultrasonic cleaning equipment according to claim 1, which is characterized in that cleaning pipe (2) are turned
Transition is carried out at point with circular arc (13).
3. a kind of silicon powder ultrasonic cleaning equipment according to claim 2, which is characterized in that pacify on the cleaning pipe (2)
Equipped with liquid level alarm device or level alarm for water.
4. a kind of silicon powder ultrasonic cleaning equipment according to claim 3, which is characterized in that the bottom of the cylinder (15)
Equipped with multiple supporting legs (19), the movement of the universal wheel or cylinder (15) of multiple strap brakes is installed on supporting leg (19).
5. a kind of silicon powder ultrasonic cleaning equipment according to claim 4, which is characterized in that pacify on the return pipe (11)
Equipped with the filter mechanism for being filtered to mother liquor.
6. a kind of silicon powder ultrasonic cleaning equipment according to claim 5, which is characterized in that the inside of the cylinder (15)
It is fixed with bracing ring, is contacted at bracing ring and the step outside cylinder mould, multiple through-holes is offered on the bracing ring.
7. a kind of silicon powder ultrasonic cleaning equipment according to claim 6, which is characterized in that the top of the cylinder mould (9)
Equipped with a flushing pipe (10), flushing pipe (10) is connect with clear water water source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810755385.0A CN109013536B (en) | 2018-07-11 | 2018-07-11 | Silica flour ultrasonic cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810755385.0A CN109013536B (en) | 2018-07-11 | 2018-07-11 | Silica flour ultrasonic cleaning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109013536A true CN109013536A (en) | 2018-12-18 |
| CN109013536B CN109013536B (en) | 2021-08-20 |
Family
ID=64640402
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810755385.0A Active CN109013536B (en) | 2018-07-11 | 2018-07-11 | Silica flour ultrasonic cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109013536B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112845512A (en) * | 2020-12-29 | 2021-05-28 | 安徽天畅金属材料有限公司 | Continuous ultrasonic desulfurization treatment tank suitable for waste lead plaster |
| CN112974396A (en) * | 2021-01-22 | 2021-06-18 | 北京北方华创微电子装备有限公司 | Semiconductor cleaning apparatus and wafer cleaning method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU660735A1 (en) * | 1977-10-10 | 1979-05-05 | Ростовский-На-Дону Институт Сельскохозяйственного Машиностроения | Unit for ultrasonic cleaning of small components |
| JPH08332465A (en) * | 1995-06-07 | 1996-12-17 | Supiide Fuamu Clean Syst Kk | Washing method and washing device |
| CN2522187Y (en) * | 2002-01-21 | 2002-11-27 | 弘敬企业有限公司 | Fully automatic washing machine |
| CN101773916A (en) * | 2010-01-20 | 2010-07-14 | 常州亿晶光电科技有限公司 | Stepped multi-stage silicon material cleaning equipment |
| CN203886859U (en) * | 2014-07-03 | 2014-10-22 | 自贡佳源炉业有限公司 | Online ultrasonic powder cleaning machine |
| CN205914442U (en) * | 2016-08-02 | 2017-02-01 | 苏州银瑞光电材料科技有限公司 | Silver powder washing tank |
| CN208787076U (en) * | 2018-07-11 | 2019-04-26 | 田康 | A kind of silicon powder ultrasonic cleaning equipment |
-
2018
- 2018-07-11 CN CN201810755385.0A patent/CN109013536B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU660735A1 (en) * | 1977-10-10 | 1979-05-05 | Ростовский-На-Дону Институт Сельскохозяйственного Машиностроения | Unit for ultrasonic cleaning of small components |
| JPH08332465A (en) * | 1995-06-07 | 1996-12-17 | Supiide Fuamu Clean Syst Kk | Washing method and washing device |
| CN2522187Y (en) * | 2002-01-21 | 2002-11-27 | 弘敬企业有限公司 | Fully automatic washing machine |
| CN101773916A (en) * | 2010-01-20 | 2010-07-14 | 常州亿晶光电科技有限公司 | Stepped multi-stage silicon material cleaning equipment |
| CN203886859U (en) * | 2014-07-03 | 2014-10-22 | 自贡佳源炉业有限公司 | Online ultrasonic powder cleaning machine |
| CN205914442U (en) * | 2016-08-02 | 2017-02-01 | 苏州银瑞光电材料科技有限公司 | Silver powder washing tank |
| CN208787076U (en) * | 2018-07-11 | 2019-04-26 | 田康 | A kind of silicon powder ultrasonic cleaning equipment |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112845512A (en) * | 2020-12-29 | 2021-05-28 | 安徽天畅金属材料有限公司 | Continuous ultrasonic desulfurization treatment tank suitable for waste lead plaster |
| CN112845512B (en) * | 2020-12-29 | 2022-08-09 | 安徽天畅金属材料有限公司 | Continuous ultrasonic desulfurization treatment tank suitable for waste lead plaster |
| CN112974396A (en) * | 2021-01-22 | 2021-06-18 | 北京北方华创微电子装备有限公司 | Semiconductor cleaning apparatus and wafer cleaning method |
| CN112974396B (en) * | 2021-01-22 | 2022-07-22 | 北京北方华创微电子装备有限公司 | Semiconductor cleaning apparatus and wafer cleaning method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109013536B (en) | 2021-08-20 |
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Effective date of registration: 20210803 Address after: 341300 Shuitou village, Wenying Township, Chongyi County, Ganzhou City, Jiangxi Province Applicant after: Chongyi Yuande Mining Co.,Ltd. Address before: 476648 North China Institute of water resources and hydropower, No. 36, Beihuan Road, Zhengzhou City, Henan Province Applicant before: Tian Kang |
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