CN109013536B - Silica flour ultrasonic cleaning device - Google Patents
Silica flour ultrasonic cleaning device Download PDFInfo
- Publication number
- CN109013536B CN109013536B CN201810755385.0A CN201810755385A CN109013536B CN 109013536 B CN109013536 B CN 109013536B CN 201810755385 A CN201810755385 A CN 201810755385A CN 109013536 B CN109013536 B CN 109013536B
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- CN
- China
- Prior art keywords
- pipe
- cleaning
- ultrasonic
- liquid
- silicon powder
- Prior art date
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 32
- 238000004506 ultrasonic cleaning Methods 0.000 title claims abstract description 17
- 239000000377 silicon dioxide Substances 0.000 title claims abstract description 16
- 235000013312 flour Nutrition 0.000 title abstract description 11
- 239000007788 liquid Substances 0.000 claims abstract description 70
- 238000004140 cleaning Methods 0.000 claims abstract description 59
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 26
- 239000011863 silicon-based powder Substances 0.000 claims abstract description 25
- 238000000926 separation method Methods 0.000 claims abstract description 22
- 238000007599 discharging Methods 0.000 claims abstract description 13
- 238000005406 washing Methods 0.000 claims abstract description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 21
- 238000009825 accumulation Methods 0.000 claims description 10
- 238000001914 filtration Methods 0.000 claims description 5
- 239000000843 powder Substances 0.000 claims description 5
- 239000012452 mother liquor Substances 0.000 abstract description 7
- 239000000428 dust Substances 0.000 abstract description 6
- 239000012535 impurity Substances 0.000 abstract description 5
- 230000035939 shock Effects 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000011010 flushing procedure Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/11—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with bag, cage, hose, tube, sleeve or like filtering elements
- B01D29/31—Self-supporting filtering elements
- B01D29/35—Self-supporting filtering elements arranged for outward flow filtration
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Silicon Compounds (AREA)
Abstract
The invention discloses a silicon powder ultrasonic cleaning device, which comprises a support, a cleaning pipe, an ultrasonic vibrator and a solid-liquid separation mechanism, wherein the cleaning pipe is arranged on the ground through the support, the top and the bottom of the cleaning pipe are respectively connected with a liquid feeding pipe and a discharging pipe, a control valve is arranged on the discharging pipe, the end part of the cleaning pipe is also connected with the charging pipe, the cleaning pipe is of a stepped structure, the ultrasonic vibrator is arranged at each corner of the cleaning pipe and is connected with an ultrasonic generator through a signal wire, and the end part of the discharging pipe is positioned right above the solid-liquid separation mechanism, and the invention has the beneficial effects that: the cleaning tube is step-shaped, and it can make silica flour be followed the cleaning tube limit whereabouts limit of stairstepping and is dashed by the ultrasonic wave, receives the shock wave effect when the bubble breaks simultaneously, and its surface dust impurity etc. is by the clean up, and cleaning efficiency is high, and silica flour after the washing can realize through solid-liquid separation mechanism with the high-efficient separation of mother liquor, later dries silica flour and can use.
Description
Technical Field
The invention relates to a cleaning device, in particular to an ultrasonic cleaning device for silicon powder.
Background
The silicon material is an important semiconductor material, can be used for manufacturing various components such as diodes, triodes, luminescent devices, pressure-sensitive elements, solar cells and the like, and is widely applied to the fields of radio engineering, automation, signal equipment, power engineering and the like.
The silicon powder is prepared from silicon blocks serving as raw materials and is widely applied to various high and new technology industries, but the cleaning method of the silicon powder production line generally adopts washing or soaking and cleaning, so that the cleaning efficiency is low, dead corners exist in cleaning, the cleaning is not thorough, and the labor intensity of workers is high, so that the silicon powder line cleaning device capable of solving the problems is necessary on the premise of ensuring the processing efficiency.
Disclosure of Invention
The invention aims to provide an ultrasonic cleaning device for silicon powder, which aims to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme:
a silica powder ultrasonic cleaning device comprises a support, a cleaning pipe, an ultrasonic vibrator and a solid-liquid separation mechanism, wherein the cleaning pipe is arranged on the ground through the support, the top and the bottom of the cleaning pipe are respectively connected with a liquid adding pipe and a discharging pipe, a control valve is arranged on the discharging pipe, the end part of the cleaning pipe is also connected with the charging pipe, the cleaning pipe is of a step-shaped structure, the ultrasonic vibrator is arranged at each corner of the cleaning pipe and is connected with an ultrasonic generator through a signal line, the end part of the discharging pipe is positioned right above the solid-liquid separation mechanism, the solid-liquid separation mechanism comprises a cylinder body, a mesh cage, a support ring and a liquid accumulation cavity, the top of the mesh cage is provided with a circle of flanging, the flanging is clamped at the opening at the top of the cylinder body, the inside of the cylinder body is provided with the liquid accumulation cavity for storing mother liquid, and the position, corresponding to the liquid accumulation cavity, of the side wall of the cylinder body is provided with a liquid outlet joint, the liquid outlet joint is connected with a water return pipe, the end part of the water return pipe is connected with a liquid adding pipe, and a water pump is arranged on the water return pipe.
As a further scheme of the invention: and the inflection point of the cleaning pipe is transited by an arc.
As a further scheme of the invention: and a liquid level alarm device or a water level alarm device is arranged on the cleaning pipe.
As a still further scheme of the invention: the bottom of barrel is equipped with a plurality of supporting legs, installs a plurality of universal wheels of taking the brake on the supporting leg.
As a still further scheme of the invention: and the water return pipe is provided with a filtering mechanism for filtering the mother liquor.
As a still further scheme of the invention: a supporting ring is fixed inside the cylinder body and is in contact with the step outside the cylinder mould, and a plurality of through holes are formed in the supporting ring.
As a still further scheme of the invention: a flushing pipe is arranged above the net cage and is connected with a clean water source.
Compared with the prior art, the invention has the beneficial effects that: the cleaning tube is step-shaped, and it can make silica flour be followed the cleaning tube limit whereabouts limit of stairstepping and is dashed by the ultrasonic wave, receives the shock wave effect when the bubble breaks simultaneously, and its surface dust impurity etc. is by the clean up, and cleaning efficiency is high, and silica flour after the washing can realize through solid-liquid separation mechanism with the high-efficient separation of mother liquor, later dries silica flour and can use.
Drawings
Fig. 1 is a schematic structural view of an ultrasonic cleaning apparatus for silicon powder.
Fig. 2 is a schematic structural view of a solid-liquid separation mechanism in the ultrasonic cleaning device for silicon powder.
Fig. 3 is a schematic structural view of a cleaning pipe in the ultrasonic cleaning device for silicon powder.
In the figure: 1-support, 2-cleaning tube, 3-liquid adding tube, 4-charging tube, 5-ultrasonic vibrator, 6-discharging tube, 7-control valve, 8-solid-liquid separating mechanism, 9-net cage, 10-flushing tube, 11-water return tube, 12-water pump, 13-circular arc, 14-inner cavity, 15-cylinder, 16-flanging, 17-support ring, 18-liquid accumulation cavity, 19-supporting leg and 20-liquid outlet joint.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
Referring to fig. 1 and 3, in an embodiment of the present invention, a silicon powder ultrasonic cleaning device includes a support 1, a cleaning pipe 2, an ultrasonic vibrator 5, and a solid-liquid separation mechanism 8, where the cleaning pipe 2 is installed on the ground through the support 1, the top and the bottom of the cleaning pipe 2 are respectively connected to a liquid adding pipe 3 and a liquid discharging pipe 6, the liquid discharging pipe 6 is installed with a control valve 7, the end of the cleaning pipe 2 is further connected to a liquid feeding pipe 4, the liquid adding pipe 3 is used for inputting cleaning liquid into the cleaning pipe 2, the cleaning liquid may be clear water, the liquid feeding pipe 4 is used for inputting silicon powder to be cleaned into the cleaning pipe 2, the cleaning pipe 2 has a stepped structure, an ultrasonic vibrator 5 is installed at each corner of the cleaning pipe 2, the ultrasonic vibrator 5 is connected to an ultrasonic generator through a signal line, the end of the liquid discharging pipe 6 is located right above the solid-liquid separation mechanism 8, the ultrasonic vibrator 5 can emit ultrasonic waves into the cleaning pipe 2, ultrasonic waves are radiated forwards at sparse and dense intervals in the cleaning liquid to enable the cleaning liquid to flow to generate tens of thousands of micro bubbles with the diameter of 50-500 mu m, the micro bubbles in the cleaning liquid vibrate under the action of a sound field, the bubbles form and grow in a negative pressure area where the ultrasonic waves longitudinally propagate, and in a positive pressure area, when sound pressure reaches a certain value, the bubbles rapidly increase and then suddenly close, shock waves are generated when the bubbles close, thousands of atmospheric pressures are generated around the bubbles, and dirt, dust and the like attached to the surface of the silicon powder are cleaned.
The working principle of the embodiment is as follows: during operation, close control flap 7, input a quantitative washing liquid into scavenge pipe 2 through liquid feeding pipe 3, pay attention to not putting to full, how to judge that the addition of washing liquid is enough to meet the requirements, install liquid level alarm device or water level alarm device on scavenge pipe 2, then input a quantitative silica flour through filling tube 4 in scavenge pipe 2, close the valve on filling tube 4, start supersonic generator, ultrasonic vibrator 5 sends the ultrasonic wave, and silica flour is being followed the scavenge pipe 2 limit whereabouts limit of stairstepping and is being dashed by the ultrasonic wave, receives the shock wave effect when the bubble breaks simultaneously, and its surface dust impurity etc. is cleared up, washs the completion back, opens control flap 7, carries out solid-liquid separation with the mixture input of washing liquid and silica flour in solid-liquid separation mechanism 8.
In order to facilitate the silicon powder to fall in the cleaning pipe 2, the silicon powder is not easy to accumulate at the dead angle position of the cleaning pipe 2, and the inflection point of the cleaning pipe 2 is transited by an arc 13.
Example 2
Referring to fig. 2, this embodiment further describes the structure of the solid-liquid separation mechanism 8 in embodiment 1, specifically:
the solid-liquid separation mechanism 8 comprises a cylinder body 15, a mesh cage 9 and a liquid accumulation cavity 18, wherein the top of the mesh cage 9 with a conical inner cavity 14 is provided with a circle of turned edges 16, as can be seen from the figure, the angle of the turned edges 16 is 180 degrees, the turned edges 16 are clamped at the opening at the top of the cylinder body 15, the turned edges 16 are convenient to take out and place, the mesh cage 9 is mainly used for containing silica powder, therefore, the mesh size of the mesh cage 9 is inevitably smaller than the particle size of the silica powder, so that the silica powder and cleaning liquid are separated, the liquid accumulation cavity 18 is arranged inside the cylinder body 15 and used for containing cleaned mother liquid, a liquid outlet joint 20 is arranged at the position, corresponding to the liquid accumulation cavity 18, of the side wall of the cylinder body 15, and a plurality of supporting legs 19 are arranged at the bottom of the cylinder body 15, and a plurality of universal wheels with brakes are arranged on the supporting legs 19.
Further, go out liquid joint 20 and be connected with wet return 11, the tip and the liquid feeding pipe 3 of wet return 11 are connected, and install water pump 12 on wet return 11, it can be with the mother liquor pump go into wet return 11, realize the recycle of mother liquor, and during the in-service use, can install filter mechanism on wet return 11, come to realize the filtration to the mother liquor, be convenient for its retrieval and utilization, filter mechanism here only filters the washing liquid, belongs to prior art, consequently does not carry out specific injecing to it.
Because the mass of the silicon powder is large, the structure of the cylinder 15 is likely to be damaged by the impact force of the silicon powder mass and the water flow which are borne by the flange 16 of the cylinder 9, the support ring 17 is fixed inside the cylinder 15, the support ring 17 is in contact with the step outside the cylinder 9, namely, the support ring 17 and the flange 16 support the mass of the cylinder 9 together, so that the stability of the structure is ensured, and a plurality of through holes (not shown) are formed in the support ring 17 for the mother liquor to fall.
Moreover, dust, impurities and the like in the cleaning liquid may be attached to the silicon powder during solid-liquid separation, so that a flushing pipe 10 is arranged above the mesh cage 9, the flushing pipe 10 is connected with a clean water source, and the silicon powder in the mesh cage 9 can be flushed after the solid-liquid separation is finished, so that the cleaning quality is ensured.
It should explain especially, among this technical scheme, support 1, scavenge pipe 2, ultrasonic vibrator 5 and solid-liquid separation mechanism 8 etc. are prior art's application, and set up scavenge pipe 2 to the step form, and the ultrasonic cleaning mode of cooperation is the innovation point of this application, and it can make silicon powder be followed 2 limit whereabouts limit of step form and is dashed by the ultrasonic wave, receives the shock wave effect when the bubble breaks simultaneously, and its surface dust impurity etc. is cleared up, and cleaning efficiency is high.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (6)
1. A silica powder ultrasonic cleaning device comprises a support (1), a cleaning pipe (2), ultrasonic vibrators (5) and a solid-liquid separation mechanism (8), wherein the cleaning pipe (2) is installed on the ground through the support (1), the top and the bottom of the cleaning pipe (2) are respectively connected with a liquid adding pipe (3) and a discharging pipe (6), a control valve (7) is installed on the discharging pipe (6), the end part of the cleaning pipe (2) is also connected with a charging pipe (4), the cleaning pipe (2) is of a stepped structure, each corner of the cleaning pipe (2) is provided with the ultrasonic vibrator (5), the ultrasonic vibrators (5) are connected with an ultrasonic generator through signal lines, and the end part of the discharging pipe (6) is positioned right above the solid-liquid separation mechanism (8); the solid-liquid separation mechanism (8) comprises a barrel (15), a mesh cage (9), a support ring (17) and a liquid accumulation cavity (18), wherein a circle of flanging (16) is arranged at the top of the mesh cage (9) with a conical inner cavity (14), the flanging (16) is clamped at an opening at the top of the barrel (15), the liquid accumulation cavity (18) is arranged inside the barrel (15), a liquid outlet joint (20) is arranged at the position, corresponding to the liquid accumulation cavity (18), of the side wall of the barrel (15), the liquid outlet joint (20) is connected with a water return pipe (11), the end part of the water return pipe (11) is connected with the liquid adding pipe (3), and a water pump (12) is arranged on the water return pipe (11); the inflection point of the cleaning pipe (2) is transited by an arc (13);
when the ultrasonic generator works, the ultrasonic vibrator (5) emits ultrasonic waves, so that the silicon powder falls along the stepped cleaning pipe (2) and is simultaneously washed up by the ultrasonic waves.
2. The ultrasonic cleaning device for silicon powder as defined in claim 1, wherein a liquid level alarm device or a water level alarm device is mounted on the cleaning pipe (2).
3. The ultrasonic cleaning device for silicon powder as claimed in claim 2, wherein a plurality of support legs (19) are arranged at the bottom of the cylinder body (15), and a plurality of universal wheels with brakes or the movement of the cylinder body (15) are mounted on the support legs (19).
4. The ultrasonic cleaning device for silicon powder as defined in claim 3, wherein a filtering mechanism for filtering mother liquid is installed on the water return pipe (11).
5. The ultrasonic cleaning device for silicon powder as defined in claim 4, wherein a support ring is fixed inside the cylinder (15) and contacts with a step outside the cylinder, and a plurality of through holes are opened on the support ring.
6. The ultrasonic cleaning device for silicon powder as defined in claim 5, wherein a washing pipe (10) is provided above the mesh cage (9), and the washing pipe (10) is connected to a clean water source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810755385.0A CN109013536B (en) | 2018-07-11 | 2018-07-11 | Silica flour ultrasonic cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810755385.0A CN109013536B (en) | 2018-07-11 | 2018-07-11 | Silica flour ultrasonic cleaning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109013536A CN109013536A (en) | 2018-12-18 |
| CN109013536B true CN109013536B (en) | 2021-08-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810755385.0A Active CN109013536B (en) | 2018-07-11 | 2018-07-11 | Silica flour ultrasonic cleaning device |
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| CN (1) | CN109013536B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112845512B (en) * | 2020-12-29 | 2022-08-09 | 安徽天畅金属材料有限公司 | Continuous ultrasonic desulfurization treatment tank suitable for waste lead plaster |
| CN112974396B (en) * | 2021-01-22 | 2022-07-22 | 北京北方华创微电子装备有限公司 | Semiconductor cleaning apparatus and wafer cleaning method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU660735A1 (en) * | 1977-10-10 | 1979-05-05 | Ростовский-На-Дону Институт Сельскохозяйственного Машиностроения | Unit for ultrasonic cleaning of small components |
| JPH08332465A (en) * | 1995-06-07 | 1996-12-17 | Supiide Fuamu Clean Syst Kk | Washing method and washing device |
| CN2522187Y (en) * | 2002-01-21 | 2002-11-27 | 弘敬企业有限公司 | Fully automatic washing machine |
| CN101773916A (en) * | 2010-01-20 | 2010-07-14 | 常州亿晶光电科技有限公司 | Stepped multi-stage silicon material cleaning equipment |
| CN203886859U (en) * | 2014-07-03 | 2014-10-22 | 自贡佳源炉业有限公司 | Online ultrasonic powder cleaning machine |
| CN205914442U (en) * | 2016-08-02 | 2017-02-01 | 苏州银瑞光电材料科技有限公司 | Silver powder washing tank |
| CN208787076U (en) * | 2018-07-11 | 2019-04-26 | 田康 | A kind of silicon powder ultrasonic cleaning equipment |
-
2018
- 2018-07-11 CN CN201810755385.0A patent/CN109013536B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU660735A1 (en) * | 1977-10-10 | 1979-05-05 | Ростовский-На-Дону Институт Сельскохозяйственного Машиностроения | Unit for ultrasonic cleaning of small components |
| JPH08332465A (en) * | 1995-06-07 | 1996-12-17 | Supiide Fuamu Clean Syst Kk | Washing method and washing device |
| CN2522187Y (en) * | 2002-01-21 | 2002-11-27 | 弘敬企业有限公司 | Fully automatic washing machine |
| CN101773916A (en) * | 2010-01-20 | 2010-07-14 | 常州亿晶光电科技有限公司 | Stepped multi-stage silicon material cleaning equipment |
| CN203886859U (en) * | 2014-07-03 | 2014-10-22 | 自贡佳源炉业有限公司 | Online ultrasonic powder cleaning machine |
| CN205914442U (en) * | 2016-08-02 | 2017-02-01 | 苏州银瑞光电材料科技有限公司 | Silver powder washing tank |
| CN208787076U (en) * | 2018-07-11 | 2019-04-26 | 田康 | A kind of silicon powder ultrasonic cleaning equipment |
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|---|---|
| CN109013536A (en) | 2018-12-18 |
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| TA01 | Transfer of patent application right |
Effective date of registration: 20210803 Address after: 341300 Shuitou village, Wenying Township, Chongyi County, Ganzhou City, Jiangxi Province Applicant after: Chongyi Yuande Mining Co.,Ltd. Address before: 476648 North China Institute of water resources and hydropower, No. 36, Beihuan Road, Zhengzhou City, Henan Province Applicant before: Tian Kang |
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| EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20181218 Assignee: Chongyi County Yuande New Materials Co.,Ltd. Assignor: Chongyi Yuande Mining Co.,Ltd. Contract record no.: X2024980018116 Denomination of invention: A silicon powder ultrasonic cleaning device Granted publication date: 20210820 License type: Common License Record date: 20241011 |