CN108956671B - Special-shaped sample carrying and fixing jig for scanning electron microscope test - Google Patents
Special-shaped sample carrying and fixing jig for scanning electron microscope test Download PDFInfo
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- CN108956671B CN108956671B CN201811136837.3A CN201811136837A CN108956671B CN 108956671 B CN108956671 B CN 108956671B CN 201811136837 A CN201811136837 A CN 201811136837A CN 108956671 B CN108956671 B CN 108956671B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
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Abstract
本发明型属于夹具技术领域,涉及一种针对于扫描电镜试验用异型样品承载与固定夹具。调节夹具包括底座与外框、双向调节螺纹杆、套筒,外框与底座为一体设计,底座与外框的上部分为外框,外框内腔为楔形中空结构,外框内腔上设有两组齿状卡勾,上组卡勾为尖齿,上组卡勾的齿尖间隔与异型样品的最大宽度相吻合,下组卡勾为方齿,下组卡勾齿端间隔宽度与异型样品的最小宽度相吻合。本发明型采用两尺寸齿状固定外框与螺纹顶柱结合结构,结构简单、易于制作而且操作灵活、使用可靠。发明夹具突破了扫描电镜试验对试样大小和形状要求严格的局限性,特别是在航空发动机叶片微观观察领域,具有很高的科研应用和工程应用价值。
The invention belongs to the technical field of jigs, and relates to a special-shaped sample carrying and fixing jig for scanning electron microscope test. The adjusting fixture includes a base and an outer frame, a two-way adjusting threaded rod, and a sleeve. The outer frame and the base are designed as a whole. The upper part of the base and the outer frame is an outer frame, and the inner cavity of the outer frame is a wedge-shaped hollow structure. There are two sets of toothed hooks, the upper hooks are tines, the tooth tip interval of the upper hooks is consistent with the maximum width of the special-shaped sample, the lower hooks are square teeth, and the width of the tooth ends of the lower hooks is the same as The minimum width of the profiled samples coincides. The present invention adopts the combination structure of the two-dimensional tooth-shaped fixed outer frame and the threaded top column, which is simple in structure, easy to manufacture, flexible in operation and reliable in use. The invented fixture breaks through the limitation of strict requirements on the size and shape of the sample in the scanning electron microscope test, especially in the field of microscopic observation of aero-engine blades, and has high scientific research application and engineering application value.
Description
技术领域technical field
本发明型属于夹具技术领域,涉及一种针对于扫描电镜试验用异型样品承载与固定夹具。The invention belongs to the technical field of jigs, and relates to a special-shaped sample carrying and fixing jig for scanning electron microscope test.
背景技术Background technique
扫描电子显微镜的主要功能是观察样品表面微观形貌和分析样品元素或结构,随着人们对实验效果提出越来越高要求,为获得好的实验结果,除了仪器性能和操作水平的提高,用于样品观察的工具和备件水平提升也非常重要。The main function of the scanning electron microscope is to observe the microscopic morphology of the sample surface and analyze the element or structure of the sample. It is also important to improve the level of tools and spare parts for sample observation.
航空发动机中,叶片由于使用环境温度高、应力复杂而被列为发动机中最为关键的结构,叶片的性能水平,特别是耐温等级,成为航空发动机先进程度的重要标志。在航空发动机叶片的科研工作中,扫描电镜微观观察频率高,任务重,但由于叶片及连接榫头形状不规则、种类尺寸繁多,给其微观观察时试样的固定增加了难度。以往常规的操作是用铝箔纸包住榫齿底部不平区域观察横向断口,样品容易发生微动,观察效果不佳或无法满足观察要求。样品承载夹具若能固定该类不规则试样,防止样品试验过程中的微晃,可有效解决技术人员在试验过程中高倍观察的难题,获得更真实良好的试验结果。据调研发现,现有的扫描电镜试验用的样品承载夹具未涉及该类型,用铝箔纸包住榫齿底部不平区域观察横向断口的传统操作过程中,样品容易发生微动,观察效果不佳,因此,有必要制作该类型夹具。In aero-engines, blades are listed as the most critical structures in the engine due to the high ambient temperature and complex stress. The performance level of the blades, especially the temperature resistance grade, has become an important symbol of the advanced degree of aero-engines. In the scientific research of aero-engine blades, the frequency of microscopic observation of SEM is high and the task is heavy. However, due to the irregular shape, variety and size of blades and connecting tenons, it is difficult to fix the sample during microscopic observation. In the past, the conventional operation was to wrap the uneven area at the bottom of the tenon teeth with aluminum foil to observe the transverse fracture. If the sample-carrying fixture can fix such irregular samples and prevent the sample from shaking during the test, it can effectively solve the problem of high-power observation by technicians during the test, and obtain more real and good test results. According to the investigation, it is found that the existing sample holding fixture for SEM test does not involve this type. During the traditional operation of wrapping the uneven area at the bottom of the tenon teeth with aluminum foil to observe the transverse fracture, the sample is prone to fretting and the observation effect is not good. Therefore, it is necessary to make this type of fixture.
发明内容SUMMARY OF THE INVENTION
本发明型的目的是:提出一种能够满足叶片榫齿及其他同类型不规则试样固定要求的扫描电子显微镜试验用样品承载夹具。The purpose of the present invention is to provide a sample carrying fixture for scanning electron microscope test which can meet the fixing requirements of blade tenon teeth and other irregular samples of the same type.
本发明型的技术方案是:调节夹具包括底座与外框、双向调节螺纹杆、套筒,外框与底座为一体设计,底座与外框的上部分为外框,外框内腔为楔形中空结构,外框内腔上设有两组齿状卡勾,上组卡勾为尖齿,上组卡勾的齿尖间隔与异型样品的最大宽度相吻合,下组卡勾为方齿,下组卡勾齿端间隔宽度与异型样品的最小宽度相吻合;底座与外框的上下部分分隔面上开有螺纹孔,双向调节螺纹杆的上段穿过底座与外框的上下部分分隔面上的螺纹孔置于外框内腔中,双向螺纹杆的下端与电镜样品台直接旋紧连接,套筒套接在底座与外框的下部分,在夹具上安装异型样品时,两组齿状卡勾中的一组与双向调节螺纹杆同时与异型样品三向接触。The technical scheme of the present invention is as follows: the adjusting fixture includes a base and an outer frame, a two-way adjusting threaded rod and a sleeve, the outer frame and the base are designed as one body, the upper part of the base and the outer frame is an outer frame, and the inner cavity of the outer frame is a wedge-shaped hollow Structure, there are two sets of toothed hooks on the inner cavity of the outer frame, the upper hooks are tines, the tooth tips of the upper hooks are consistent with the maximum width of the special-shaped sample, the lower hooks are square teeth, and the lower hooks are square teeth. The interval width of the hook tooth end of the group card is consistent with the minimum width of the special-shaped sample; there are threaded holes on the separation surface of the upper and lower parts of the base and the outer frame. The threaded hole is placed in the inner cavity of the outer frame, the lower end of the bidirectional threaded rod is directly connected with the electron microscope sample stage, and the sleeve is sleeved on the lower part of the base and the outer frame. One group of hooks and the two-way adjusting threaded rod are in three-way contact with the special-shaped sample at the same time.
所述异型样品为带榫齿的叶片。The special-shaped sample is a blade with tenon teeth.
所述上组卡勾的尖齿斜面与叶片榫齿斜面一致。The inclined surface of the tines of the upper set of hooks is consistent with the inclined surface of the tenon teeth of the blade.
所述下组卡勾齿端形状与叶片榫齿端面形状一致。The shape of the tooth end of the lower group of hook teeth is consistent with the shape of the end surface of the blade tenon tooth.
本发明型的优点是:本发明型采用两尺寸齿状固定外框与螺纹顶柱结合结构,结构简单、易于制作而且操作灵活、使用可靠。可承载尺寸不等的样品,涵盖大量类型及尺寸的叶片及相似结构样品,并利用双向螺纹杆设计,一端和设备样品台旋紧连接,同时通过套筒固定,配合稳定可靠;夹具外框内侧齿状结构可配合叶片榫齿及其他不规则形状试样结构,增加了分析样品取样大小和取样形状的灵活性,特别对于某些不宜或不易被破坏的分析样品,可以使用本夹具将样品本身不经任何破坏地直接放入扫描电镜样品室,进行无损伤试验,再通过螺纹顶柱另一端完全固定试样,避免不规则形状试验样品在扫描电镜观察和能谱仪试验过程中发生微小漂移,夹具在使用过程中稳定可靠;样品装卡在设备样品台上后,可通过套筒灵活调节夹具已达到需求观察位置或高度,从而获得全面、真实而可靠的扫描电镜观察信息和能谱试验数据;本发明夹具突破了扫描电镜试验对试样大小和形状要求严格的局限性,特别是在航空发动机叶片微观观察领域,具有很高的科研应用和工程应用价值。The advantages of the present invention are as follows: the present invention adopts the combination structure of the two-size tooth-shaped fixed outer frame and the threaded top column, which is simple in structure, easy to manufacture, flexible in operation and reliable in use. It can carry samples of different sizes, covering a large number of types and sizes of blades and samples of similar structures, and uses a two-way threaded rod design, one end is screwed to the equipment sample stage, and fixed by a sleeve, and the cooperation is stable and reliable; the inner side of the outer frame of the fixture The tooth-like structure can be matched with blade tenon teeth and other irregular-shaped sample structures, which increases the flexibility of sampling size and sampling shape of the analysis sample. Directly put it into the SEM sample chamber without any damage, and conduct a non-destructive test, and then completely fix the sample through the other end of the threaded top column to avoid the irregular shape of the test sample. , the fixture is stable and reliable during use; after the sample is installed on the sample stage of the equipment, the fixture can be flexibly adjusted through the sleeve to reach the required observation position or height, so as to obtain comprehensive, true and reliable scanning electron microscope observation information and energy spectrum test The fixture of the invention breaks through the limitation of the scanning electron microscope test on the strict requirements on the size and shape of the sample, especially in the field of microscopic observation of aero-engine blades, and has high scientific research application and engineering application value.
附图说明Description of drawings
图1是本发明型的正视图;Fig. 1 is the front view of the present invention;
图2是图1的左视图;Fig. 2 is the left side view of Fig. 1;
图3是图1的俯视图。FIG. 3 is a plan view of FIG. 1 .
具体实施方式Detailed ways
下面结合附图对本发明技术方案作详细说明。The technical solutions of the present invention will be described in detail below with reference to the accompanying drawings.
调节夹具包括底座与外框1、双向调节螺纹杆2、套筒3,外框与底座1为一体设计,底座与外框1的上部分为外框,外框内腔为楔形中空结构,外框内腔上设有两组齿状卡勾,上组卡4勾为尖齿,上组卡勾的齿尖间隔与异型样品的最大宽度相吻合,下组卡勾5为方齿,下组卡勾5齿端间隔宽度与异型样品的最小宽度相吻合;底座与外框1的上下部分分隔面6上开有直径为φ8mm螺纹孔,双向调节螺纹杆2的上段穿过底座与外框1的上下部分分隔面6上的螺纹孔置于外框内腔中,双向螺纹杆2的下端与电镜样品台7直接旋紧连接,通过调节螺纹杆2长度与卡勾共同配合,套筒3直径φ22mm,与套筒外腔直径φ26mm也为螺纹配合,套接在底座与外框1的下部分,螺纹杆2另一端与设备样品台7旋紧连接,通过套筒3保证配合稳定性,防止夹具在试验操作过程中的微晃。在夹具上安装异型样品时,两组齿状卡勾中的一组与双向调节螺纹杆同时与异型样品三向接触。利用不同间距的卡勾和调节螺纹杆配合,可三向卡紧试样。The adjustment fixture includes a base and an outer frame 1, a two-way adjustment threaded
实施例1Example 1
试验样品为带榫齿的叶片,榫齿形状为楔形,榫齿处最大宽度尺寸为11.5mm,在装载该楔形榫齿叶片时,侧向滑入夹具,使用外框上组尖形齿状卡勾和螺纹顶柱三向卡住样品,最后将卡具套上套筒,调节合适高度,旋紧在设备样品座上,即可将其放入扫描电镜样品室内进行分析。The test sample is a blade with tenon teeth, the shape of the tenon teeth is wedge-shaped, and the maximum width of the tenon teeth is 11.5mm. The hook and the threaded top column clamp the sample in three directions. Finally, put the clamp on the sleeve, adjust the appropriate height, and screw it on the sample holder of the equipment, and then put it into the SEM sample chamber for analysis.
实施例2Example 2
试验样品为带榫齿的叶片,榫齿形状为方形,榫齿处最大宽度尺寸为10.5mm,在装载该方形榫齿叶片时,侧向滑入夹具,使用外框下形齿状卡勾和螺纹顶柱三向卡住样品,最后将卡具套上套筒,调节合适高度,旋紧在设备样品座上,即可将其放入扫描电镜样品室内进行分析。The test sample is a blade with tenon teeth, the shape of the tenon teeth is square, and the maximum width dimension of the tenon teeth is 10.5mm. The threaded top column clamps the sample in three directions. Finally, put the clamp on the sleeve, adjust the appropriate height, screw it on the sample holder of the equipment, and then put it into the SEM sample chamber for analysis.
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CN201936840U (en) * | 2010-12-02 | 2011-08-17 | 上海梅山钢铁股份有限公司 | Specimen holder for analysis of scanning electron microscope |
CN202230039U (en) * | 2011-09-14 | 2012-05-23 | 中国航空工业集团公司北京航空材料研究院 | Sample bearing and position adjusting bracket for electronic probe test |
CN205140924U (en) * | 2015-11-23 | 2016-04-06 | 内蒙古北方重工业集团有限公司 | Quick positioner of scanning electron microscope sample microdomain |
CN105522547A (en) * | 2015-12-15 | 2016-04-27 | 贵州黎阳航空动力有限公司 | Auxiliary blade detection device for scanning electron microscope and application method thereof |
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