CN108956671B - Special-shaped sample bearing and fixing clamp for scanning electron microscope test - Google Patents

Special-shaped sample bearing and fixing clamp for scanning electron microscope test Download PDF

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Publication number
CN108956671B
CN108956671B CN201811136837.3A CN201811136837A CN108956671B CN 108956671 B CN108956671 B CN 108956671B CN 201811136837 A CN201811136837 A CN 201811136837A CN 108956671 B CN108956671 B CN 108956671B
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China
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outer frame
hooks
special
base
electron microscope
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CN108956671A (en
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王祎帆
杨东有
刘昌奎
周静怡
侯金涛
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AECC Beijing Institute of Aeronautical Materials
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AECC Beijing Institute of Aeronautical Materials
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2204Specimen supports therefor; Sample conveying means therefore
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

The invention belongs to the technical field of clamps, and relates to a special-shaped sample bearing and fixing clamp for a scanning electron microscope test. The adjusting clamp comprises a base, an outer frame, a bidirectional adjusting threaded rod and a sleeve, the outer frame and the base are designed into a whole, the base and the upper portion of the outer frame are of the outer frame, the inner cavity of the outer frame is of a wedge-shaped hollow structure, two sets of toothed hooks are arranged on the inner cavity of the outer frame, the upper set of hooks are sharp teeth, the tooth tip interval of the upper set of hooks is identical with the maximum width of the special-shaped sample, the lower set of hooks are square teeth, and the tooth end interval width of the lower set of hooks is identical with the minimum width of the special. The invention adopts a structure of combining the two-dimension toothed fixed outer frame with the threaded support pillar, and has the advantages of simple structure, easy manufacture, flexible operation and reliable use. The fixture breaks through the limitation that the scanning electron microscope test has strict requirements on the size and the shape of the sample, and particularly has high scientific research application and engineering application values in the field of microscopic observation of blades of aero-engines.

Description

Special-shaped sample bearing and fixing clamp for scanning electron microscope test
Technical Field
The invention belongs to the technical field of clamps, and relates to a special-shaped sample bearing and fixing clamp for a scanning electron microscope test.
Background
The scanning electron microscope has the main functions of observing the microscopic appearance of the surface of a sample and analyzing elements or structures of the sample, and along with the increasing requirements of people on experimental effects, in order to obtain good experimental results, in addition to the improvement of the performance and the operation level of an instrument, the horizontal improvement of tools and spare parts for sample observation is also very important.
In an aircraft engine, a blade is a most critical structure in the engine due to high use environment temperature and complex stress, and the performance level, particularly the temperature resistance level, of the blade becomes an important mark of the advanced degree of the aircraft engine. In the scientific research work of the blades of the aero-engine, the microscopic observation frequency of a scanning electron microscope is high, the task is heavy, but the fixing difficulty of a sample is increased during the microscopic observation of the blades and the connecting tenons due to irregular shapes and various sizes of the blades and the connecting tenons. In the conventional operation, the transverse fracture is observed by wrapping the uneven area at the bottom of the tenon tooth with aluminum foil paper, a sample is easy to generate micro motion, and the observation effect is poor or the observation requirement cannot be met. If the sample bearing clamp can fix the irregular sample, micro shaking in the sample test process is prevented, the problem of high-power observation of technicians in the test process can be effectively solved, and a more real and good test result is obtained. According to research and discovery, the sample that present scanning electron microscope test used bears anchor clamps does not relate to this type, and in the traditional operation process of using aluminium foil paper to wrap the uneven region in tenon tooth bottom and observing transverse fracture, the sample takes place the fine motion easily, and the observation effect is not good, consequently, is necessary to make this type of anchor clamps.
Disclosure of Invention
The purpose of the invention is: the sample bearing clamp for the scanning electron microscope test can meet the fixing requirements of blade tenon teeth and other irregular samples of the same type.
The technical scheme of the invention is as follows: the adjusting clamp comprises a base, an outer frame, a bidirectional adjusting threaded rod and a sleeve, the outer frame and the base are designed into a whole, the upper parts of the base and the outer frame are the outer frame, the inner cavity of the outer frame is of a wedge-shaped hollow structure, two groups of toothed hooks are arranged on the inner cavity of the outer frame, the upper group of hooks are sharp teeth, the tooth tip intervals of the upper group of hooks are matched with the maximum width of the special-shaped sample, the lower group of hooks are square teeth, and the tooth end interval width of the lower group of hooks is matched with the minimum width of the special-; the upper and lower part separating surfaces of the base and the outer frame are provided with threaded holes, the upper section of the bidirectional adjusting threaded rod penetrates through the threaded holes on the upper and lower part separating surfaces of the base and the outer frame and is arranged in the inner cavity of the outer frame, the lower end of the bidirectional threaded rod is directly screwed and connected with the sample stage of the electron microscope, the sleeve is sleeved on the lower part of the base and the outer frame, and when the special-shaped sample is installed on the clamp, one group of the two groups of toothed clamping hooks and the bidirectional adjusting threaded rod are simultaneously in three-.
The special-shaped sample is a blade with tenon teeth.
The sharp tooth inclined plane of the upper group of clamping hooks is consistent with the blade tenon tooth inclined plane.
The shape of the tooth end of the lower group of the clamping hooks is consistent with that of the tooth end of the blade tenon.
The invention has the advantages that: the invention adopts a structure of combining the two-dimension toothed fixed outer frame with the threaded support pillar, and has the advantages of simple structure, easy manufacture, flexible operation and reliable use. The device can bear samples with different sizes, covers a large number of types and sizes of blades and samples with similar structures, utilizes the design of a bidirectional threaded rod, has one end connected with the sample table of the device in a screwing manner, is fixed by a sleeve, and is stable and reliable in matching; the toothed structure on the inner side of the outer frame of the clamp can be matched with the tenon teeth of the blades and other irregular sample structures, so that the sampling size and the sampling shape flexibility of an analysis sample are improved, particularly for some analysis samples which are not suitable for or difficult to damage, the clamp can be used for directly placing the sample into a sample chamber of a scanning electron microscope without any damage to carry out a nondestructive test, and then the sample is completely fixed through the other end of the threaded support pillar, so that the small drift of the irregular test sample in the observation process of the scanning electron microscope and the test process of an energy spectrometer is avoided, and the clamp is stable and reliable in the use process; after a sample is clamped on a sample table of the device, the clamp can be flexibly adjusted through the sleeve to reach the required observation position or height, so that comprehensive, real and reliable observation information of the scanning electron microscope and energy spectrum test data are obtained; the fixture breaks through the limitation that the scanning electron microscope test has strict requirements on the size and the shape of the sample, and particularly has high scientific research application and engineering application values in the field of microscopic observation of blades of aero-engines.
Drawings
FIG. 1 is a front view of a version of the invention;
FIG. 2 is a left side view of FIG. 1;
fig. 3 is a top view of fig. 1.
Detailed Description
The technical scheme of the invention is explained in detail in the following with the accompanying drawings.
The adjusting clamp comprises a base and an outer frame 1, a bidirectional adjusting threaded rod 2 and a sleeve 3, the outer frame and the base 1 are designed into a whole, the upper parts of the base and the outer frame 1 are the outer frame, the inner cavity of the outer frame is of a wedge-shaped hollow structure, two groups of toothed hooks are arranged in the inner cavity of the outer frame, an upper group of hooks 4 are sharp teeth, the tooth tip intervals of the upper group of hooks are matched with the maximum width of the special-shaped sample, a lower group of hooks 5 are square teeth, and the tooth end interval width of the lower group of hooks 5 is matched with the minimum width of the special-; it is phi 8mm threaded hole to open the diameter on the upper and lower part parting bead 6 of base and frame 1, the upper segment of two-way adjusting threaded rod 2 passes the screw hole on base and the upper and lower part parting bead 6 of frame 1 and arranges in the frame inner chamber, the lower extreme and the electronic speculum sample platform 7 of two-way threaded rod 2 are directly screwed and are connected, cooperate with the trip jointly through adjusting threaded rod 2 length, 3 diameter phi 22mm of sleeve, also be screw-thread fit with sleeve exocoel diameter phi 26mm, cup joint the lower part at base and frame 1, the threaded rod 2 other end is screwed with equipment sample platform 7 and is connected, guarantee cooperation stability through sleeve 3, prevent that anchor clamps from shaking a little in experimental operation process. When the special-shaped sample is arranged on the clamp, one of the two groups of toothed clamping hooks and the bidirectional adjusting threaded rod are simultaneously in three-way contact with the special-shaped sample. The clamping hooks with different intervals are matched with the adjusting threaded rod, so that the sample can be clamped in a three-way manner.
Example 1
The test sample is the blade of taking the tenon tooth, and the tenon tooth shape is the wedge, and tenon tooth department maximum width size is 11.5mm, and when loading this wedge tenon tooth blade, the side direction slips into anchor clamps, uses group cusp dentate trip and screw thread fore-set three-dimensional on the frame to block the sample, sheathes the sleeve with the anchor clamps at last, adjusts suitable height, screws on equipment sample seat, can put into scanning electron microscope sample indoor with it and carry out the analysis.
Example 2
The test sample is the blade of taking the tenon tooth, and the tenon tooth shape is square, and the biggest width size of tenon tooth department is 10.5mm, and when loading this square tenon tooth blade, the side direction slips into anchor clamps, uses the frame to appear down the cusp trip and the sample is blocked to the screw apical post three-dimensional, sheathes the sleeve with the anchor clamps at last, adjusts suitable height, screws on equipment sample seat, can put into scanning electron microscope sample indoor with it and carry out the analysis.

Claims (3)

1. A special-shaped sample bearing and adjusting clamp for a scanning electron microscope test is characterized by comprising a base, an outer frame, a bidirectional adjusting threaded rod and a sleeve, wherein the outer frame and the base are designed integrally, the upper parts of the base and the outer frame are provided with the outer frame, the inner cavity of the outer frame is of a wedge-shaped hollow structure, two groups of toothed hooks are arranged in the inner cavity of the outer frame, the upper group of hooks are sharp teeth, the tooth tip interval of the upper group of hooks is matched with the maximum width of a special-shaped sample, the lower group of hooks are square teeth, and the tooth end interval width of the lower group of hooks is matched with the minimum width of the; the upper and lower part separating surfaces of the base and the outer frame are provided with threaded holes, the upper section of the bidirectional adjusting threaded rod passes through the threaded holes on the upper and lower part separating surfaces of the base and the outer frame and is arranged in the inner cavity of the outer frame, the lower end of the bidirectional adjusting threaded rod is directly screwed and connected with an electron microscope sample stage, the sleeve is sleeved on the lower parts of the base and the outer frame, and when a special-shaped sample is arranged on the clamp, one of the two groups of toothed clamping hooks and the bidirectional adjusting threaded rod are simultaneously in three-way contact with; the special-shaped sample is a blade with tenon teeth.
2. The special-shaped sample bearing and adjusting clamp for the scanning electron microscope test as claimed in claim 1, wherein the inclined plane of the sharp tooth of the upper set of clamping hooks is consistent with the inclined plane of the tenon tooth of the blade.
3. The special-shaped sample bearing and adjusting clamp for the scanning electron microscope test as claimed in claim 1, wherein the shape of the tooth end of the lower set of clamping hooks is consistent with the shape of the tooth end of the blade tenon.
CN201811136837.3A 2018-09-27 2018-09-27 Special-shaped sample bearing and fixing clamp for scanning electron microscope test Active CN108956671B (en)

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CN108956671B true CN108956671B (en) 2020-12-29

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CN114518376B (en) * 2022-02-18 2024-08-23 中国核动力研究设计院 Electron probe shielding sample seat for radioactive sample

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SU429481A1 (en) * 1971-05-31 1974-05-25 В. Л. Лившиц , И. И. Левицкий INDICATOR OF OBJECTS FOR ULTRATOMY OF LIGHT OPTICAL PREPARATIONS
CN201936840U (en) * 2010-12-02 2011-08-17 上海梅山钢铁股份有限公司 Specimen holder for analysis of scanning electron microscope
CN202230039U (en) * 2011-09-14 2012-05-23 中国航空工业集团公司北京航空材料研究院 Sample bearing and position adjusting bracket used in electron probe tests
CN205140924U (en) * 2015-11-23 2016-04-06 内蒙古北方重工业集团有限公司 Quick positioner of scanning electron microscope sample microdomain
CN105522547A (en) * 2015-12-15 2016-04-27 贵州黎阳航空动力有限公司 Auxiliary blade detection device for scanning electron microscope and application method thereof
CN206912732U (en) * 2017-06-23 2018-01-23 成都飞机工业(集团)有限责任公司 A kind of irregular part fast fixture

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