CN108956671A - Scanning electron microscope test special-shaped sample carrying and stationary fixture - Google Patents

Scanning electron microscope test special-shaped sample carrying and stationary fixture Download PDF

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Publication number
CN108956671A
CN108956671A CN201811136837.3A CN201811136837A CN108956671A CN 108956671 A CN108956671 A CN 108956671A CN 201811136837 A CN201811136837 A CN 201811136837A CN 108956671 A CN108956671 A CN 108956671A
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CN
China
Prior art keywords
outline border
hook
special
pedestal
shaped sample
Prior art date
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Application number
CN201811136837.3A
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Chinese (zh)
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CN108956671B (en
Inventor
王祎帆
杨东有
刘昌奎
周静怡
侯金涛
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AECC Beijing Institute of Aeronautical Materials
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AECC Beijing Institute of Aeronautical Materials
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2204Specimen supports therefor; Sample conveying means therefore
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

Type of the present invention belongs to clamp art, is related to one kind and is directed to scanning electron microscope test special-shaped sample carrying and stationary fixture.Alignment jig includes pedestal and outline border, bidirectional modulation threaded rod, sleeve, outline border and pedestal are integrated design, the top of pedestal and outline border is divided into outline border, outline border inner cavity is wedge-shaped hollow structure, outline border inner cavity is equipped with two groups of teeth shape hook, and upper group of hook is pointed tooth, and the tooth tip interval of upper group of hook matches with the maximum width of special-shaped sample, the following group hook is square tooth, and the following group hook increment interval width matches with the minimum widith of special-shaped sample.Type of the present invention using the fixed outline border of two size dentations and threaded top post integrated structure, structure is simple, be easy to make and flexible operation, using reliable.Invention fixture breaches scanning electron microscope and tests the limitation stringent to sample size and shape need, especially in blade of aviation engine microscopic observation field, has very high research application and engineering application value.

Description

Scanning electron microscope test special-shaped sample carrying and stationary fixture
Technical field
Type of the present invention belongs to clamp art, is related to one kind and is directed to the special-shaped sample carrying of scanning electron microscope test and solid Clamp tool.
Background technique
The major function of scanning electron microscope is to observe sample surfaces microscopic appearance and analysis sample element or structure, with People higher and higher requirement is proposed to experiment effect, for the experimental result obtained, in addition to instrument performance and operate level It improves, the tool and spare part level for sample observation are promoted also extremely important.
In aero-engine, blade is listed in the most key in engine since use environment temperature is high, stress is complicated Structure, the performance level of blade, especially temperature resistant grade become the important symbol of the advanced degree of aero-engine.In aviation In the research work of engine blade, scanning electron microscope microscopic observation frequency is high, task weight, but due to blade and joint tongue head shapes Irregularly, specie size is various, and the fixation of sample increases difficulty when to its microscopic observation.The operation of conventional is to use aluminium foil Paper bag lives tenon tooth bottom injustice regional observation transverse direction fracture, and sample is easy to happen fine motion, and observing effect is bad or is unable to satisfy sight Examine requirement.If sample carrying fixture is capable of fixing such irregular sample, micro- rolling during sampling test is prevented, can effectively be solved Technical staff's problem that high power is observed during the test obtains truer good test result.It is found according to investigation, it is existing The sample carrying fixture of scanning electron microscope test is not directed to the type, and it is lateral to encase tenon tooth bottom injustice regional observation with aluminium-foil paper During the traditional operation of fracture, sample is easy to happen fine motion, and observing effect is bad, therefore, it is necessary to make the type fixture.
Summary of the invention
The purpose of type of the present invention is: proposing that one kind can satisfy blade tenon tooth and the irregular sample fixation of other same types is wanted The scanning electron microscope test sample carrying fixture asked.
The technical solution of type of the present invention is: alignment jig includes pedestal and outline border, bidirectional modulation threaded rod, sleeve, outline border Design is integrated with pedestal, and the top of pedestal and outline border is divided into outline border, and outline border inner cavity is wedge-shaped hollow structure, and outline border is set on inner cavity There is two groups of teeth shape hook, upper group of hook is pointed tooth, and the tooth tip interval of upper group of hook matches with the maximum width of special-shaped sample, under Group hook is square tooth, and the following group hook increment interval width matches with the minimum widith of special-shaped sample;Pedestal and outline border up and down Threaded hole is provided on the division surface of part, the upper section of bidirectional modulation threaded rod passes through on the top and the bottom division surface of pedestal and outline border Threaded hole is placed in outline border inner cavity, and the lower end of bidirectional helical bar is directly screwed with electron microscopic sample platform to be connect, and sleeve is socketed in pedestal With the lower part of outline border, when installing special-shaped sample on fixture, one group in two groups of teeth shape hook is same with bidirectional modulation threaded rod When contacted with special-shaped sample three-dimensional.
The abnormal shape sample is the blade with tenon tooth.
The pointed tooth inclined-plane of the upper group of hook is consistent with blade tenon tooth inclined-plane.
The following group hook increment shape is consistent with blade tenon tooth end surface shape.
The advantages of type of the present invention is: type of the present invention is using the fixed outline border of two size dentations and threaded top post integrated structure, knot Structure is simple, be easy to make and flexible operation, using reliable.Size not equal sample can be carried, a large amount of types and size are covered Blade and similar structure sample, and using bidirectional helical bar design, one end and equipment sample platform screw connection, while passing through set Cylinder is fixed, cooperates reliable and stable;Dentalation can cooperate blade tenon tooth and other irregular shape sample knots on the inside of fixture outline border Structure increases analysis sample size and samples the flexibility of shape, especially for certain points that should not or be not easy to be destroyed Sample is analysed, this fixture can be used by sample itself and be destructively directly placed into scanning electron microscope example room without any, carry out lossless Wound test, then sample is completely fixed by the threaded top post other end, avoid irregular shape test specimen in scanning electron microscopic observation Small drift occurs with during energy disperse spectroscopy test, fixture is reliable and stable in use;Sample is loaded on equipment sample platform After upper, demand observation position or height can be had reached by sleeve flexible modulation fixture, to obtain comprehensive, true and reliable Scanning electron microscopic observation information and power spectrum test data;Present clip breaches scanning electron microscope test and wants to sample size and shape Stringent limitation is asked especially in blade of aviation engine microscopic observation field to there is very high research application and engineering to answer With value.
Detailed description of the invention
Fig. 1 is the front view of type of the present invention;
Fig. 2 is the left view of Fig. 1;
Fig. 3 is the top view of Fig. 1.
Specific embodiment
It elaborates with reference to the accompanying drawing to technical solution of the present invention.
Alignment jig includes pedestal and outline border 1, bidirectional modulation threaded rod 2, sleeve 3, and outline border and pedestal 1 are integrated design, The top of pedestal and outline border 1 is divided into outline border, and outline border inner cavity is wedge-shaped hollow structure, and outline border inner cavity is equipped with two groups of teeth shape hook, It is pointed tooth that upper group of card 4, which hooks, and the tooth tip interval of upper group of hook matches with the maximum width of special-shaped sample, and the following group hook 5 is square tooth, 5 increment interval width of the following group hook matches with the minimum widith of special-shaped sample;The top and the bottom division surface 6 of pedestal and outline border 1 On to be provided with diameter be φ 8mm threaded hole, the upper section of bidirectional modulation threaded rod 2 passes through the top and the bottom division surface 6 of pedestal and outline border 1 On threaded hole be placed in outline border inner cavity, the lower end of bidirectional helical bar 2 is directly screwed with electron microscopic sample platform 7 to be connect, and adjusting is passed through 2 length of threaded rod cooperates jointly with hook, and 3 diameter phi 22mm of sleeve is also to be threadedly engaged with sleeve exocoel diameter phi 26mm, set It connects in the lower part of pedestal and outline border 1,2 other end of threaded rod is screwed with equipment sample platform 7 to be connect, and guarantees to cooperate by sleeve 3 Stability prevents micro- rolling of fixture during test operation.When installing special-shaped sample on fixture, in two groups of teeth shape hook One group contacts with special-shaped sample three-dimensional simultaneously with bidirectional modulation threaded rod.Matched using the hook and adjusting threaded rod of different spacing It closes, it can three-dimensional clamping sample.
Embodiment 1
Test specimen is the blade with tenon tooth, and tenon tooth shape is wedge shape, and greatest width dimension is 11.5mm at tenon tooth, is being filled When carrying the wedge shape tenon tooth blade, fixture is laterally slid into, using organizing pointed dentation hook on outline border and threaded top post three-dimensional blocks sample Fixture is finally covered upper bush by product, is adjusted proper height, is tightened on equipment sample seat, can put it into scanning electron microscope sample Product are analyzed in room.
Embodiment 2
Test specimen be the blade with tenon tooth, tenon tooth shape be it is rectangular, at tenon tooth greatest width dimension be 10.5mm, filling When carrying the rectangular tenon tooth blade, fixture is laterally slid into, blocks sample using shape dentation hook under outline border and threaded top post three-dimensional, most Fixture is covered into upper bush afterwards, proper height is adjusted, is tightened on equipment sample seat, can put it into scanning electron microscope example room It is analyzed.

Claims (4)

1. a kind of test of scanning electron microscope carries alignment jig with special-shaped sample, characterized in that alignment jig include pedestal and outline border, Bidirectional modulation threaded rod, sleeve, outline border and pedestal are integrated design, and the top of pedestal and outline border is divided into outline border, and outline border inner cavity is Wedge-shaped hollow structure, outline border inner cavity are equipped with two groups of teeth shape hook, and upper group of hook is pointed tooth, the tooth tip interval of upper group of hook with it is different The maximum width of pattern product matches, and the following group hook is square tooth, and the following group hook increment interval width and the minimum of special-shaped sample are wide Degree matches;Threaded hole is provided on the top and the bottom division surface of pedestal and outline border, the upper section of bidirectional modulation threaded rod passes through pedestal It is placed in outline border inner cavity with the threaded hole on the top and the bottom division surface of outline border, the lower end of bidirectional helical bar and electron microscopic sample platform are straight It connects and screws connection, sleeve is socketed in the lower part of pedestal and outline border, when installing special-shaped sample on fixture, in two groups of teeth shape hook One group contacted simultaneously with special-shaped sample three-dimensional with bidirectional modulation threaded rod.
2. scanning electron microscope test according to claim 1 carries alignment jig with special-shaped sample, characterized in that the abnormal shape Sample is the blade with tenon tooth.
3. scanning electron microscope test according to claim 1 carries alignment jig with special-shaped sample, characterized in that described upper group The pointed tooth inclined-plane of hook is consistent with blade tenon tooth inclined-plane.
4. scanning electron microscope test according to claim 1 carries alignment jig with special-shaped sample, characterized in that the following group Hook increment shape is consistent with blade tenon tooth end surface shape.
CN201811136837.3A 2018-09-27 2018-09-27 Special-shaped sample bearing and fixing clamp for scanning electron microscope test Active CN108956671B (en)

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CN201811136837.3A CN108956671B (en) 2018-09-27 2018-09-27 Special-shaped sample bearing and fixing clamp for scanning electron microscope test

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Application Number Priority Date Filing Date Title
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CN108956671B CN108956671B (en) 2020-12-29

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU429481A1 (en) * 1971-05-31 1974-05-25 В. Л. Лившиц , И. И. Левицкий INDICATOR OF OBJECTS FOR ULTRATOMY OF LIGHT OPTICAL PREPARATIONS
CN201936840U (en) * 2010-12-02 2011-08-17 上海梅山钢铁股份有限公司 Specimen holder for analysis of scanning electron microscope
CN202230039U (en) * 2011-09-14 2012-05-23 中国航空工业集团公司北京航空材料研究院 Sample bearing and position adjusting bracket used in electron probe tests
CN205140924U (en) * 2015-11-23 2016-04-06 内蒙古北方重工业集团有限公司 Quick positioner of scanning electron microscope sample microdomain
CN105522547A (en) * 2015-12-15 2016-04-27 贵州黎阳航空动力有限公司 Auxiliary blade detection device for scanning electron microscope and application method thereof
CN206912732U (en) * 2017-06-23 2018-01-23 成都飞机工业(集团)有限责任公司 A kind of irregular part fast fixture

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU429481A1 (en) * 1971-05-31 1974-05-25 В. Л. Лившиц , И. И. Левицкий INDICATOR OF OBJECTS FOR ULTRATOMY OF LIGHT OPTICAL PREPARATIONS
CN201936840U (en) * 2010-12-02 2011-08-17 上海梅山钢铁股份有限公司 Specimen holder for analysis of scanning electron microscope
CN202230039U (en) * 2011-09-14 2012-05-23 中国航空工业集团公司北京航空材料研究院 Sample bearing and position adjusting bracket used in electron probe tests
CN205140924U (en) * 2015-11-23 2016-04-06 内蒙古北方重工业集团有限公司 Quick positioner of scanning electron microscope sample microdomain
CN105522547A (en) * 2015-12-15 2016-04-27 贵州黎阳航空动力有限公司 Auxiliary blade detection device for scanning electron microscope and application method thereof
CN206912732U (en) * 2017-06-23 2018-01-23 成都飞机工业(集团)有限责任公司 A kind of irregular part fast fixture

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