CN108956623A - A kind of Demura multiaxis automatic detection mechanism - Google Patents
A kind of Demura multiaxis automatic detection mechanism Download PDFInfo
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- CN108956623A CN108956623A CN201810735111.5A CN201810735111A CN108956623A CN 108956623 A CN108956623 A CN 108956623A CN 201810735111 A CN201810735111 A CN 201810735111A CN 108956623 A CN108956623 A CN 108956623A
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- ccd camera
- demura
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- 238000001514 detection method Methods 0.000 title claims description 25
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 19
- 230000006698 induction Effects 0.000 claims description 10
- 238000009434 installation Methods 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 claims description 3
- 230000033228 biological regulation Effects 0.000 abstract description 4
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000017105 transposition Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 230000035755 proliferation Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
Abstract
The invention discloses a kind of Demura multiaxis full-automatic detector structures comprising rack and CCD camera are provided with transplanting mould group in rack, and the movable end of transplanting mould group is connected with connection frame, and CCD camera is connected to below connection frame；It is provided with coaxially arranged first straight line slide unit between connection frame and CCD camera, second straight line slide unit, swings slide unit and gear focus adjusting mechanism.Compared with traditional Demura testing agency, it is the configuration of the present invention is simple, easy to use, it can be such that CCD camera is displaced along X-axis, Y-axis and Z-direction, simultaneously around X-axis, Y-axis, Z axis rotation, full-automatic regulation is realized simultaneously, and there is focal length setting mechanism, avoiding CCD camera from adjusting along Z-direction, amplitude is excessive to cause focusing inaccurate and damage camera.
Description
Technical field
The present invention relates to a kind of Demura testing agency, belong to display panel detection technique field, more particularly to a kind of
Demura multiaxis automatic detection mechanism.
Background technique
In recent years, with the rapid proliferation of domestic TV, consumer requires the picture of TV display screen also more next
It is higher, therefore the quality of TV display screen is also higher and higher.TV display screen panel is due to production technology complexity, control
Difficulty is big, and Mura phenomenon (brightness irregularities) are be easy to cause during production, bright spot or dim spot, i.e. some of panel occur
The block-like trace phenomenon in region area as caused by the difference of display brightness, reduces the credit rating of panel.It is above-mentioned in order to eliminate
Mura phenomenon, Demura (it is uneven to eliminate panel luminance) technology are come into being.
Demura technology is that a kind of elimination display Mura makes the uniform technology of picture brightness.The original substantially of Demura technology
Reason is that Display panel grey menu is allowed to be obtained with capacitor coupled apparatus (Charge Coupled Device, CCD) photographed screen
Then the brightness value of each pixel in panel adjusts the grayscale value or voltage of the pixel in the region Mura, made dark region
Brighten, excessively bright region it is dimmed, reach uniform display effect.In the prior art, display is eliminated using Demura technology
It is generally to carry out in darkroom and generally all manually adjust, therefore that there are freedom degrees is less, limitation is big, easy when Mura
The defects of causing detection error.Such as a kind of Mura of display screen is disclosed in Chinese invention patent specification CN107086021A
Compensation system and method.The Mura compensation system of the display screen may include darkroom, camera level/XY direction position transposition bearing,
Camera vertical direction adjusts axis, CCD camera, fixed base station, vibration isolators and data terminal.Wherein camera level/XY direction position
Transposition bearing can be used for adjusting the horizontal displacement of CCD camera, such as to the left or move right, to adjust CCD camera acquisition
It is placed in the image data of the target area of the display screen on fixed base station.Camera vertical direction adjustment axis can be used for adjusting
The vertical displacement of CCD camera, for example, downwards or move up, with the display for adjusting CCD camera Yu being placed on fixed base station
Vertical range between screen.Camera level/XY direction position transposition bearing, camera vertical direction adjustment axis, CCD camera, fixed base
Platform and vibration isolators can be set in darkroom, and data terminal can be set except darkroom.Above-mentioned technical proposal exists
Following technical problem: firstly, the invention does not disclose the technical solution of a complete automatic detection mechanism, according to
The description of above-mentioned documents, can only knowing CCD camera, there are three freedom degrees, and what CCD camera drive not by
It is open；Secondly, the position height for adjusting CCD camera according to adjustment mechanism realizes that focusing will necessarily cause to adjust because of amplitude modulation is much
It is burnt inaccurate, while the damage of camera may also be caused；Finally, the CCD camera of Three Degree Of Freedom is unable to satisfy Mura compensation system
Required measuring accuracy.
Summary of the invention
In view of the above-mentioned drawbacks of the prior art, the technical problem to be solved in the present invention is to provide a kind of Demura multiaxises
Automatic detection mechanism, structure are simple and convenient to operate, and be can be realized and are adjusted to the six degree of freedom of CCD camera and guarantee CCD camera
Focusing accuracy.
In order to solve the above technical problems, present invention employs such a Demura multiaxis automatic detection mechanism, including machine
Frame and CCD camera are provided with the transplanting mould group for driving the CCD camera to move along vertical Z axis, the shifting in the rack
The movable end for planting mould group is connected with connection frame, and the CCD camera is connected to below the connection frame；The connection frame with it is described
It is provided with the coaxially arranged first straight line slide unit for driving the CCD camera to move along horizontal X axis between CCD camera, uses
In the second straight line slide unit for driving the CCD camera to move along vertical Z axis, for driving the CCD camera around horizontal X axis and Z
The swing slide unit that axis rotates and the gear focus adjusting mechanism for adjusting the CCD camera focal length；The gear focus adjusting mechanism includes
Pedestal, driving source, driving gear and driven gear；The pedestal is connect with the swing slide unit, on the pedestal it is affixed
CCD camera and the driving source are stated, the output end of the driving source and the driving gear are affixed, the focusing of the CCD camera
Place is connected with the driven gear, the driving gear and driven gear engaged transmission.
In a kind of preferred embodiment of the invention, also set up between the CCD camera and the gear focus adjusting mechanism
There is focusing position-limit mechanism.
In a kind of preferred embodiment of the invention, the focusing position-limit mechanism includes the photoelectricity for being fixed in pedestal lower end
Sensor and the inductance loop coaxially arranged with driving gear, the inductance loop include for the cooperation limit with photoelectric sensor
Induction part and the interconnecting piece that source output terminal is driven for being set with connection.
In a kind of preferred embodiment of the invention, the interconnecting piece is sleeve-shaped, the internal diameter of the interconnecting piece of sleeve-shaped
Corresponding with the driving outer diameter of source output terminal, the interconnecting piece of sleeve-shaped radially arranges that setting is multiple for fixing inductance loop
Threaded hole.
In a kind of preferred embodiment of the invention, the photoelectric sensor is two, and two photoelectric sensors are along perpendicular
Histogram is arranged to upper and lower；The inductance loop is two, and there are an angles between the induction part on two inductance loops.
In a kind of preferred embodiment of the invention, the driving source is cooperated by installation guide frame and the pedestal
Connection.
In a kind of preferred embodiment of the invention, the installation guide frame includes vertically-mounted guide plate, horizontal peace
Dress guide plate and U-shaped connecting plate, the vertically-mounted guide plate are vertically fixed in the pedestal upper end, set on the vertically-mounted guide plate
It is equipped with for connecting the waist-shaped hole along Z-direction arrangement for being horizontally mounted guide plate, the guide plate that is horizontally mounted passes through bolt
It is affixed with the vertically-mounted guide plate, it is described be horizontally mounted be provided on guide plate for connect the U-shaped connecting plate along Y-axis side
To the waist-shaped hole of arrangement, the guide plate that is horizontally mounted is bolted to described be horizontally mounted guide plate lower end, the U-shaped connection
The driving source is connected on plate.
In a kind of preferred embodiment of the invention, the end of the U-shaped connecting plate is connected with focusing position-limit mechanism.
In a kind of preferred embodiment of the invention, the movable end and the first straight line slide unit of the transplanting mould group
Fixing end is affixed, and the movable end of the first straight line slide unit is connect with the fixing end of the second straight line slide unit, and described second is straight
The movable end of line slide unit is connect with the fixing end for swinging slide unit, and the movable end for swinging slide unit is connected with the gear tune
Focusing mechanism.
In a kind of preferred embodiment of the invention, the movable end and the second straight line slide unit of the transplanting mould group
Fixing end is affixed, and the movable end of the second straight line slide unit is connect with the fixing end of the first straight line slide unit, and described first is straight
The movable end of line slide unit is connect with the fixing end for swinging slide unit, and the movable end for swinging slide unit is connected with the gear tune
Focusing mechanism.
It is the configuration of the present invention is simple, easy to use the beneficial effects of the present invention are: compared with traditional Demura testing agency,
It can be such that CCD camera is displaced along X-axis and Z-direction, while rotate around X-axis and Z axis, while realizing full-automatic regulation, and have
There is focal length setting mechanism, avoiding CCD camera from adjusting along Z-direction, amplitude is excessive to cause focusing inaccurate and damage camera；Into one
Step, the present invention passes through the transplanting mould group for a coarse adjustment CCD camera relative to the distance of liquid crystal display panel to be measured, an accurate adjustment
CCD camera is relative to the second straight line slide unit of the distance of liquid crystal display panel to be measured and secondary accurate adjustment CCD camera relative to liquid crystal to be measured
The gear focus adjusting mechanism of the distance of panel, to effectively improve the full-automatic focusing accuracy and speed of CCD camera；The present invention
CCD camera is realized along X-axis by the way that transplanting mould group, straight line slide unit are arranged on the rack, swings slide unit mate gear focus adjusting mechanism
CCD camera is facilitated in the detection process to provide multiple freedom degrees for CCD camera with the movement and rotation of Z-direction
The variation of spatial position, pitch angle；Further, the present invention controls the focusing essence of CCD camera by the external gear of a pair of meshing
Degree eliminates the mechanism for driving CCD camera to be displaced that traditional Demura testing agency is arranged along Z-direction, not only reduces
The volume and quality of Demura testing agency, and improve the focusing accuracy of CCD camera；Further, the present invention in order to
It prevents focus adjusting mechanism from adjusting excessive damage camera internal part, is provided between CCD camera and gear focus adjusting mechanism a set of
Focusing position-limit mechanism, which includes photoelectric sensor and inductance loop, can efficiently control focus adjusting mechanism
Rotate angle；Further, of the invention for convenience that focusing range, focusing limit above-mentioned are reasonably selected according to different operating conditions
Photoelectric sensor and inductance loop in the mechanism of position are 2, and inductance loop is sleeved on the output end of driving source, two inductions
The angle between induction part on ring is adjustable, to realize the control of CCD camera focus adjustment range；Further, this hair
Bright straight line slide unit, swing slide unit and first straight line slide unit is existing product, directly buys assembly and uses, without individually setting
Meter；Further, the present invention facilitates driving gear installation position by the way that installation guide frame is arranged between driving source and pedestal
The adjusting and use set.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of Demura multiaxis automatic detection mechanism of the embodiment of the present invention；
Fig. 2 is a kind of transplanting modular structure schematic diagram of Demura multiaxis automatic detection mechanism of the embodiment of the present invention；
Fig. 3 is a kind of connection frame of Demura multiaxis automatic detection mechanism of the embodiment of the present invention and is mounted on connection frame each
The structural schematic diagram of device；
Fig. 4 is the axis surveys view of focusing position-limit mechanism in a kind of Demura multiaxis automatic detection mechanism of the embodiment of the present invention；
Fig. 5 is the main view of focusing position-limit mechanism in a kind of Demura multiaxis automatic detection mechanism of the embodiment of the present invention；
In figure: 1- rack；2-CCD camera；3- transplants mould group；4- connection frame；5- first straight line slide unit；6- swings slide unit；
7- gear focus adjusting mechanism；8- second straight line slide unit；9- focusing position-limit mechanism；The vertically-mounted guide plate of 10-；11- is horizontally mounted guide plate；
12-U shape connecting plate；7.1- pedestal；7.2- driving source；7.3- driving gear；7.4- driven gear；9.1- photoelectric sensor；
9.2- inductance loop；9.2-1- induction part；9.2-2- interconnecting piece；The A- present invention；B- product orientation jig；The darkroom C-.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that described herein, specific examples are only used to explain the present invention, not
For limiting the present invention.
A kind of Demura multiaxis automatic detection mechanism as shown in Figure of description 1-2 it is found that it is used in the C of darkroom, and
The adjustable product orientation jig B of cooperation position is needed to use, which includes rack 1 and CCD camera 2, is arranged in rack 1
There is the transplanting mould group 3 for driving CCD camera 2 to move along vertical Z axis, which belongs to the prior art, transplants mould group 3
Movable end be connected with connection frame 4, CCD camera 2 is connected to 4 lower section of connection frame；It is provided between connection frame 4 and CCD camera 2 same
Axis arrangement the first straight line slide unit 5 for driving CCD camera 2 to move along horizontal X axis, for driving CCD camera 2 along vertical Z
The mobile second straight line slide unit 8 of axis, the swing slide unit 6 for driving CCD camera 2 to rotate around horizontal X axis and Z axis and for adjusting
The gear focus adjusting mechanism 7 of 2 focal length of CCD camera, first straight line slide unit 5 and 8 position of second straight line slide unit can be interchanged；Gear focusing
Mechanism 7 includes pedestal 7.1, driving source 7.2, driving gear 7.3 and driven gear 7.4；Pedestal 7.1, which is fixed in, to be swung under slide unit 6
It holds, is connected with CCD camera 2 and driving source 7.2 on pedestal 7.1, the output end and driving gear 7.3 of driving source 7.2 are affixed, CCD
Driven gear 7.4,7.4 engaged transmission of driving gear 7.3 and driven gear are connected at the focusing of camera 2.It may be noted that above-mentioned
First straight line slide unit 5, swing slide unit 6 and second straight line slide unit 8 are the prior art.
The excessive damage for causing camera internal part of the angular adjustment of CCD camera focus adjusting mechanism, the present invention exist in order to prevent
Focusing position-limit mechanism 9 is additionally provided between CCD camera 2 and gear focus adjusting mechanism 7, focusing position-limit mechanism 9 includes being fixed in pedestal
The photoelectric sensor 9.1 of 7.1 lower ends and the inductance loop 9.2 coaxially arranged with driving gear 7.3, inductance loop 9.2 include for
The induction part 9.2-1 of the cooperation of photoelectric sensor 9.1 and for be set with connection 7.2 output end of driving source interconnecting piece 9.2-2, even
Socket part 9.2-2 is sleeve-like configuration, and middle part offers the through-hole radially arranged and is used to consolidate with 7.2 output end of driving source
It is fixed；Pass through the cooperation of induction part 9.2-1 and photoelectric sensor 9.1, so that it may the focusing model of pre-set gear focus adjusting mechanism 7
It encloses.Further, in order to adapt to various operating conditions, the quickly and easily focusing range of adjustment gear focus adjusting mechanism 7, the present invention is by light
Electric transducer 9.1 is two and two photoelectric sensors 9.1 are arranged up and down along the vertical direction；Inductance loop 9.2 is two, two senses
Answer between the induction part 9.2-1 on ring 9.2 that there are an angles, to expand the focusing range of gear focus adjusting mechanism 7.
Further, the installation and debugging of driving gear 7.3 of the invention for convenience, driving source 7.2 of the invention are logical
It crosses installation guide frame and pedestal 7.1 is cooperatively connected；Installation guide frame includes vertically-mounted guide plate 10, is horizontally mounted guide plate 11
With U-shaped connecting plate 12, vertically-mounted guide plate 10 is vertically fixed in 7.1 upper end of pedestal, is provided with and is used on vertically-mounted guide plate 10
Connection is horizontally mounted the waist-shaped hole along Z-direction arrangement of guide plate 11, is horizontally mounted guide plate 11 and is led by bolt with vertically-mounted
Plate 10 is affixed, is horizontally mounted the waist-shaped hole arranged along the y axis being provided on guide plate 11 for connecting U-shaped connecting plate 12, water
Safety dress guide plate 11 is bolted to be horizontally mounted 11 lower end of guide plate, is connected with driving source 7.2 on U-shaped connecting plate 12；U-shaped
The end of connecting plate 12 is connected with focusing position-limit mechanism 9.
Manner of execution of the invention is as follows:
Transplanting mould group 3 be fixed in rack 1, transplanting mould group 3 effect drive first straight line slide unit 5, second straight line slide unit 8,
It swings slide unit 10 and CCD camera 2 generates the position of Z-direction displacement coarse adjustment CCD camera 2；The effect of first straight line slide unit 5 drives
CCD camera 2 generates X-direction displacement；The effect of second straight line slide unit 8 drives CCD camera 2 to generate Z-direction and is displaced an accurate adjustment
The position of CCD camera 2；Swinging the effect of slide unit 6 can be such that CCD camera 2 rotates rotating around X, Y-axis；Driving source 7.2 acts on external gear
Mechanism drives CCD camera 2 to move up and down, secondary 2 focal length of accurate adjustment CCD camera.
To sum up, which can be such that CCD camera 2 generates along the x axis with the displacement of Z-direction, and can make CCD camera
2 rotate around X-axis and Z axis, and compared with traditional Demura testing agency, the body function is powerful, full-automatic regulation, and have focal length
Regulation limiting device avoids adjustment amplitude excessive, damages camera.
It should be understood that the above is only a specific embodiment of the invention, but protection scope of the present invention is not limited to
In this, anyone skilled in the art within the technical scope disclosed by the invention, the variation that can readily occur in or is replaced
It changes, should be covered by the protection scope of the present invention.
Claims (10)
1. a kind of Demura multiaxis automatic detection mechanism, including rack (1) and CCD camera (2), it is provided on the rack (1)
Transplanting mould group (3) for driving the CCD camera (2) to move along vertical Z axis, the movable end connection of transplanting mould group (3)
Have connection frame (4), the CCD camera (2) is connected to below the connection frame (4)；It is characterized by: the connection frame (4) with
It is provided between the CCD camera (2) coaxially arranged first straight for driving the CCD camera (2) to move along horizontal X axis
It is line slide unit (5), the second straight line slide unit (8) for driving the CCD camera (2) to move along vertical Z axis, described for driving
The swing slide unit (6) that CCD camera (2) is rotated around horizontal X axis and Z axis and the gear tune for adjusting the CCD camera (2) focal length
Focusing mechanism (7)；The gear focus adjusting mechanism (7) includes pedestal (7.1), driving source (7.2), driving gear (7.3) and driven tooth
It takes turns (7.4)；The pedestal (7.1) connect with the swing slide unit (6), is connected with the CCD camera on the pedestal (7.1)
(2) and the driving source (7.2), the output end and the driving gear (7.3) of the driving source (7.2) are affixed, the CCD phase
It is connected at the focusing of machine (2) driven gear (7.4), the driving gear (7.3) and the driven gear (7.4) engagement
Transmission.
2. a kind of Demura multiaxis automatic detection mechanism according to claim 1, it is characterised in that: the CCD camera (2) and
Focusing position-limit mechanism (9) is additionally provided between the gear focus adjusting mechanism (7).
3. a kind of Demura multiaxis automatic detection mechanism according to claim 2, it is characterised in that: the focusing position-limit mechanism
It (9) include the photoelectric sensor (9.1) and the inductance loop coaxially arranged with driving gear (7.3) for being fixed in pedestal (7.1) lower end
(9.2), the inductance loop (9.2) includes the induction part (9.2-1) for the cooperation limit with photoelectric sensor (9.1) and is used for
The interconnecting piece (9.2-2) of suit connection driving source (7.2) output end.
4. a kind of Demura multiaxis automatic detection mechanism according to claim 3, it is characterised in that: the interconnecting piece (9.2-
It 2) is sleeve-shaped, the internal diameter of the interconnecting piece (9.2-2) of sleeve-shaped is corresponding with the outer diameter of driving source (7.2) output end, sleeve-shaped
Interconnecting piece (9.2-2) radially arrange be arranged it is multiple for fixing the threaded holes of inductance loop (9.2).
5. a kind of Demura multiaxis automatic detection mechanism according to claim 3, it is characterised in that: the photoelectric sensor
It (9.1) is two, two photoelectric sensors (9.1) are arranged up and down along the vertical direction；The inductance loop (9.2) is two, two
There are an angles between induction part (9.2-1) on inductance loop (9.2).
6. a kind of Demura multiaxis automatic detection mechanism according to claim 1, it is characterised in that: the driving source (7.2)
It is cooperatively connected by installation guide frame and the pedestal (7.1).
7. a kind of Demura multiaxis automatic detection mechanism according to claim 6, it is characterised in that: the installation guide frame
Including vertically-mounted guide plate (10), it is horizontally mounted guide plate (11) and U-shaped connecting plate (12), the vertically-mounted guide plate (10) is vertical
It is fixed in the pedestal (7.1) upper end, is provided on the vertically-mounted guide plate (10) and described is horizontally mounted guide plate for connecting
(11) the waist-shaped hole along Z-direction arrangement, described be horizontally mounted guide plate (11) pass through bolt and the vertically-mounted guide plate
(10) affixed, it is described to be horizontally mounted the arrangement along the y axis being provided on guide plate (11) for connecting the U-shaped connecting plate (12)
Waist-shaped hole, it is described be horizontally mounted guide plate (11) be bolted to it is described be horizontally mounted guide plate (11) lower end, the U-shaped connects
The driving source (7.2) are connected on fishplate bar (12).
8. a kind of Demura multiaxis automatic detection mechanism according to claim 7, it is characterised in that: the U-shaped connecting plate
(12) end is connected with focusing position-limit mechanism (9).
9. a kind of Demura multiaxis automatic detection mechanism according to claim 1, it is characterised in that: the transplanting mould group (3)
Movable end and the first straight line slide unit (5) fixing end it is affixed, the movable end of the first straight line slide unit (5) and described the
The fixing end of two straight line slide units (8) connects, the movable end of the second straight line slide unit (8) and the fixation for swinging slide unit (6)
End connection, the movable end for swinging slide unit (6) are connected with the gear focus adjusting mechanism (7).
10. a kind of Demura multiaxis automatic detection mechanism according to claim 1, it is characterised in that: the transplanting mould group (3)
Movable end and the second straight line slide unit (8) fixing end it is affixed, the movable end of the second straight line slide unit (8) and described the
The fixing end of one straight line slide unit (5) connects, the movable end of the first straight line slide unit (5) and the fixation for swinging slide unit (6)
End connection, the movable end for swinging slide unit (6) are connected with the gear focus adjusting mechanism (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810735111.5A CN108956623B (en) | 2018-07-06 | 2018-07-06 | Demura multiaxis automated inspection mechanism |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810735111.5A CN108956623B (en) | 2018-07-06 | 2018-07-06 | Demura multiaxis automated inspection mechanism |
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| CN108956623A true CN108956623A (en) | 2018-12-07 |
| CN108956623B CN108956623B (en) | 2024-02-27 |
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| CN201810735111.5A Active CN108956623B (en) | 2018-07-06 | 2018-07-06 | Demura multiaxis automated inspection mechanism |
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| CN109373977A (en) * | 2019-01-02 | 2019-02-22 | 山东农业大学 | The active vision platform and plant phenotype acquisition methods obtained for plant phenotype |
| CN112066895A (en) * | 2020-07-22 | 2020-12-11 | 北京量拓科技有限公司 | Sample stage and ellipsometer with same |
| CN112344984A (en) * | 2020-09-27 | 2021-02-09 | 东风汽车有限公司 | Multi-station full-automatic disc gear detection device |
| CN112344985A (en) * | 2020-09-27 | 2021-02-09 | 东风汽车有限公司 | Multi-station full-automatic disc gear detection device |
| CN113176074A (en) * | 2021-04-20 | 2021-07-27 | 武汉精立电子技术有限公司 | Non-contact Demura-Gamma-Flicker three-in-one measuring system and method |
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