CN111024373A - Lens assembly focal plane measuring and correcting device and focal plane measuring and correcting method - Google Patents

Lens assembly focal plane measuring and correcting device and focal plane measuring and correcting method Download PDF

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Publication number
CN111024373A
CN111024373A CN201911360175.2A CN201911360175A CN111024373A CN 111024373 A CN111024373 A CN 111024373A CN 201911360175 A CN201911360175 A CN 201911360175A CN 111024373 A CN111024373 A CN 111024373A
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CN
China
Prior art keywords
lens
focal plane
reticle
correcting
measuring
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CN201911360175.2A
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Chinese (zh)
Inventor
王昆
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Fuzhou Icamsys Photoelectric Technology Co ltd
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Fuzhou Icamsys Photoelectric Technology Co ltd
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Priority to CN201911360175.2A priority Critical patent/CN111024373A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0221—Testing optical properties by determining the optical axis or position of lenses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0257—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
    • G01M11/0264—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested by using targets or reference patterns
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B43/00—Testing correct operation of photographic apparatus or parts thereof

Abstract

The invention relates to a lens assembly focal plane measuring and correcting device and a focal plane measuring and correcting method. Comprises a focal plane measuring device, a focal plane correcting device and a control device; the focal plane measuring device comprises a measuring frame, a light source device, a light homogenizing plate, a reticle, a first lens component mounting seat, a digital camera, a protective cylinder and a reticle adjusting and driving device; a sensor is arranged on the reticle adjusting and driving device; the control device can calculate the focal plane position deviation value of the measured lens of the lens component to be detected and the measured lens of the standard lens component; the focal plane correction device comprises a correction rack, a second lens component mounting seat, a rotary clamping component and a rotary driving device; the control device is connected with the focal plane correction device so as to control the rotation of the rotation driving device according to the focal plane position deviation value. The invention can realize the functions of detecting and automatically correcting the focal plane of the lens component, thereby improving the focal plane precision of the lens components and improving the focal plane consistency of the lens components in the same batch.

Description

Lens assembly focal plane measuring and correcting device and focal plane measuring and correcting method
Technical Field
The invention relates to the field of lens equipment, in particular to a lens assembly focal plane measuring and correcting device and a focal plane measuring and correcting method.
Background
The monitoring camera has gone from black and white to color in the history of nearly 60 years since the birth of the last 60 years; the development of definition from VGA to 720P, 1080P to the present 5MP and 8 MP. The camera lens goes through the same process along with the development of the camera, the requirements of the camera lens with definition higher than one million on the precision and the stability of relevant accessories such as the camera lens and the assembly of the camera lens are higher and higher at present, wherein the camera lens is used as an optical imaging core component and a lens mount for fixing the camera lens to directly participate in the production and assembly of the million high-definition camera, and the requirements are mainly reflected in the aspects of the thread fit tightness (controlled by torsion), the coaxiality of a lens imaging optical axis and a lens mount mechanical axis and the like, and the aspects directly influence the whole assembly efficiency and the imaging quality of the camera; to solve the above problems in the camera manufacturing process, the optics manufacturer proposes the lens directly screwed into the lens holder (which is referred to as lock attachment in the industry) as a component to the downstream camera manufacturer, and currently, the optics factory usually adopts two locking methods:
one is a method for manually or electrically operating the lens to screw into the lens holder to complete the assembly; the other type is locking by adopting a lens locking machine which can mainly complete the functions of lens automatic feeding, lens base automatic feeding, automatic locking and the like. These locking methods can only use mechanical height control of the lens to fix the focal plane, i.e. to rotate the lens to a specified height position relative to the lens mount. The method does not consider the problem of thickness tolerance during lens processing, so that the focal plane consistency is poor and can only reach the precision of +/-0.2 to +/-0.5 mm generally, and the camera assembly straight-through rate, the production efficiency and the consistency are poor.
Disclosure of Invention
The invention aims to: the focal plane measuring and correcting device can realize the functions of detecting and automatically correcting the focal plane of the lens component, thereby improving the focal plane precision of the lens component and improving the focal plane consistency of lens components in the same batch.
The invention is realized by the following technical scheme:
the first scheme is as follows:
the utility model provides a correcting unit is measured to lens subassembly focal plane, the lens subassembly includes lens mount and the measurand lens of threaded connection on the lens mount, its characterized in that: the lens assembly focal plane measuring and correcting device comprises a focal plane measuring device, a focal plane correcting device and a control device;
the focal plane measuring device comprises a measuring rack, and a light source device, a light homogenizing plate, a reticle, a first lens component mounting seat and a digital camera which are sequentially arranged on the measuring rack along the extension direction of a measuring optical axis; the reticle is provided with a reticle identification pattern;
the focal plane measuring device also comprises a protective cylinder which is used for fixedly mounting the first lens component mounting seat on the measuring rack, the first lens component mounting seat is coaxially and fixedly arranged at the top of the protective cylinder, and the protective cylinder is arranged on one side of the first lens component mounting seat facing the light source device along the direction of the measuring optical axis; the lens assembly is fixedly arranged on the first lens assembly mounting seat through the lens seat of the lens assembly, and the middle part of the first lens assembly mounting seat is provided with a light through hole extending along the direction of the measuring optical axis; the digital camera is fixedly arranged on the other side, away from the light source device, of the first lens component mounting seat through the measuring rack and can shoot an image of a reticle identification pattern presented by the light source device through the measured lens after passing through the light homogenizing plate and the reticle;
the focal plane measuring device also comprises a reticle barrel for fixedly mounting the light source device, the light homogenizing plate and the reticle, and a reticle adjusting and driving device for driving the reticle barrel to move along the axial direction of the measuring light to be close to or far away from the first lens component mounting seat; one end of the reticle cylinder, which is provided with the reticle and the light homogenizing plate, extends into the protective cylinder, and the other end of the reticle cylinder extends out of the protective cylinder and is connected with the reticle adjusting and driving device; the reticle adjusting and driving device is also provided with a sensor for detecting the position of the reticle barrel;
the control device is respectively connected with the sensor, the reticle adjustment driving device and the digital camera to acquire a detection signal and calculate a focal plane position deviation value of a measured lens of the lens component to be detected and a measured lens of the standard lens component according to the detection signal;
the focal plane correction device comprises a correction rack, a second lens component mounting seat, a rotating clamping component and a rotating driving device, wherein the second lens component mounting seat is fixedly connected with the correction rack relatively and used for fixedly mounting a lens mount of a lens component, the rotating clamping component is rotatably connected to the correction rack and used for clamping a measured lens of the lens component fixedly mounted on the second lens component mounting seat and driving the measured lens to rotate, the rotating driving device is connected between the rotating clamping component and the correction rack and used for driving the rotating clamping component to rotate, and the measured lens of the lens component fixedly mounted on the second lens component mounting seat and the rotating center line of the rotating clamping component are positioned on the same correction optical axis;
the control device is connected with the rotary driving device of the focal plane correction device so as to control the rotary driving device to rotate according to the focal plane position deviation value to eliminate the focal plane position deviation value, so that the focal plane position of the measured lens of the lens component to be detected is consistent with that of the measured lens of the standard lens component.
Preferably, the digital camera comprises an imaging lens and a photosensitive sensor which are sequentially arranged along the measuring optical axis from the direction close to the first lens assembly mounting seat to the direction far away from the first lens assembly mounting seat; the photosensitive sensor is connected with the control device and is used for transmitting the image of the reticle identification pattern shot by the photosensitive sensor to the control device.
Preferably, the measuring rack comprises a lens holder mounting rack and a camera rack fixedly mounted and connected relative to the lens holder mounting rack, the protective cylinder is fixedly mounted on the lens holder mounting rack, and the digital camera is fixedly mounted on the camera rack;
the reticle adjusting and driving device comprises an adjusting slide rail, an adjusting slide block, an adjusting motor, an adjusting transmission assembly and a reticle barrel lifting platform, wherein the adjusting slide rail is fixedly arranged on a microscope base mounting frame and extends along the direction parallel to the measuring optical axis; the sensor is a position sensor which is arranged between the adjusting slide rail and the partition board cylinder lifting platform and is used for detecting the initial displacement position of the partition board cylinder; the adjusting transmission assembly comprises a nut fixedly connected with the adjusting slide block, a screw rod in threaded connection with the nut and extending along the direction parallel to the measuring optical axis, a screw rod transmission wheel coaxially and fixedly connected to the screw rod, and a transmission belt or a transmission chain connected between the screw rod transmission wheel and an output shaft of the adjusting motor. The sensor can also adopt a displacement sensor which can feed back the position information of the reticle cylinder in real time.
Preferably, the rotating and clamping assembly comprises a rotating body and correcting pneumatic clamping jaws distributed around the bottom of the rotating body around the center line of the rotating body and capable of moving radially relative to the center of the rotating body, and the correcting pneumatic clamping jaws can clamp or release the measured lens of the lens assembly fixedly mounted on the second lens assembly mounting seat when moving radially relative to the rotating body;
the focal plane correcting device also comprises a lifting control assembly which is connected between the rotating body and the correcting rack and is used for driving the rotating body to move towards the direction far away from or close to the second lens assembly mounting seat, wherein the lifting control assembly comprises a correcting slide rail which is fixedly arranged on the correcting rack and extends along the direction parallel to the correcting optical axis, a correcting slide block which is slidably connected on the correcting slide rail and can slide along the direction parallel to the correcting optical axis, a correcting lifting platform which is fixedly arranged on the correcting slide block, and a cylinder driving device which is fixedly arranged on the correcting rack and is connected with the correcting lifting platform through one end of a piston and is used for driving the correcting lifting platform to move along the extending direction of the correcting optical axis; the rotating driving device comprises a correcting motor arranged on the correcting lifting platform and a correcting transmission assembly connected between an output shaft of the correcting motor and a rotating shaft of the rotating body and used for driving the rotating body to rotate around a correcting optical axis;
the focal plane correction device also comprises a pneumatic device which is connected with the correction pneumatic clamping jaw to drive the correction pneumatic clamping jaw to move radially.
Preferably, the lens assembly focal plane measuring and correcting device further comprises a base for mounting the focal plane measuring device and the focal plane correcting device, and a feeding device arranged on the base and used for conveying the lens assembly; the feeding device comprises a Y-axis slide rail fixedly arranged on the base and extending along the Y-axis direction, a Y-axis sliding table connected on the Y-axis slide rail in a sliding manner, a Y-axis driving device fixedly arranged on the base and connected with the Y-axis sliding table and used for driving the Y-axis sliding table to slide along the Y-axis direction relative to the Y-axis slide rail, and an X-axis slide rail fixedly arranged on the Y-axis sliding table and extending along the X-axis direction vertical to the Y-axis direction, the X-axis sliding table is connected to the X-axis sliding rail in a sliding mode, the X-axis driving device is fixedly arranged on the Y-axis sliding table and connected with the X-axis sliding table and used for driving the X-axis sliding table to slide along the X-axis direction relative to the X-axis sliding rail, the Z-axis lifting table is arranged above the X-axis sliding table and can lift along the vertical direction perpendicular to the X axis and the Y axis, and the Z-axis driving device is connected between the Z-axis lifting table and the X-axis sliding table and used for driving the Z-axis lifting table to move up and down along the Z-axis direction relative to the X-axis;
the measuring optical axis and the correcting optical axis are both in a vertical direction parallel to the Z-axis direction, and a vertical connecting line of the measuring optical axis and the correcting optical axis is parallel to the X-axis direction;
the feeding device further comprises a conveying pneumatic clamping jaw assembly which is fixedly arranged on the Z-axis lifting table and extends towards the side of the measuring optical axis and the correcting optical axis from the Z-axis lifting table, the conveying pneumatic clamping jaw assembly is located between the focal plane measuring device and the focal plane correcting device, and the conveying pneumatic clamping jaw assembly comprises a pair of clamping jaws which can be opened and closed along the X-axis direction under the pneumatic action so as to clamp or loosen the lens assembly on the focal plane measuring device and/or the focal plane correcting device.
Preferably, an initial mounting seat which is positioned at the front side of the focal plane measuring device and used for placing the lens assembly in an initial rotating state and a finished product mounting seat which is positioned at the rear side of the focal plane correcting device and used for placing the debugged lens assembly are further arranged on the base; the vertical central shaft of the initial mounting seat, the measuring optical axis of the focal plane measuring device, the correcting optical axis of the focal plane correcting device and the vertical central shaft of the finished product mounting seat are sequentially arranged at intervals along the X-axis direction parallel to the X-axis slide rail; the feeding device also comprises an initial pneumatic clamping jaw assembly which is positioned between the initial mounting seat and the focal surface correction device and used for conveying the lens assembly on the initial mounting seat to the focal surface measuring device, and a finished product pneumatic clamping jaw assembly which is positioned between the focal surface correction device and the finished product mounting seat and used for conveying the lens assembly on the focal surface correction device to the finished product mounting seat; the initial pneumatic clamping jaw assembly, the conveying pneumatic clamping jaw assembly and the finished product pneumatic clamping jaw assembly are arranged in the same direction parallel to the X axis.
Scheme II:
a focal plane measurement correction method is characterized in that: the method comprises the following steps:
① measuring the position of reticle barrel of standard lens assembly by mounting the standard lens assembly on the first lens assembly mounting seat of focal plane measuring device, detecting the initial displacement position of reticle barrel by sensor, controlling the reticle regulating and driving device to move the reticle barrel and the reticle thereon toward and away from the first lens assembly mounting seat by control device to make the reticle identification pattern on the reticle form an image of reticle identification pattern on the digital camera, receiving the image information of each reticle identification pattern shot by the digital camera and the movement distance information of the reticle barrel relative displacement initial position corresponding to each reticle identification pattern image information fed back by the reticle regulating and driving device or sensor, finding out the optimal movement distance information of the reticle barrel relative displacement initial position corresponding to the clearest reticle identification pattern image information, adding the optimal movement distance information to the initial displacement position of the reticle barrel to obtain the position Z of the reticle barrel on the measuring rack0；
② measuring the position of the reticle barrel of the lens assembly to be detected by mounting the lens assembly to be detected on the first lens assembly mounting seat of the focal plane measuring device in place of the standard lens assembly, and then measuring and calculating the position Z of the reticle barrel corresponding to the lens assembly to be detected on the measuring rack when the image information of the reticle identification pattern shot by the digital camera is clearest according to the method of step ①n；
③ calculating the deviation of focal plane position △ Z of imaging lensn' according to the formula △ Zn′＝Zn-Z0The position Z of the reticle tube corresponding to the lens component to be detected on the measuring racknPosition Z of a reticle pod on a measuring rack corresponding to a standard lens assembly0Subtracting the displacement deviation value △ Z to obtain a reticle tube displacement deviation valuen', the reticle pod displacement offset value △ Zn' this is the reticle displacement deviation value △ Zn', the reticle displacement deviation value △ Zn' equivalently, when the lens unit to be inspected and the standard lens unit are respectively placed on the second lens unit mount and the reticle is stationary, the digital camera obtains clear reticle identification pattern image information, in which case the digital camera adjusts the deviation amount △ Z of the focal plane position of the imaging lens to be adjustedn′；
④ calculating the deviation value △ Z between the measured lens of the lens assembly to be detected and the measured lens of the standard lens assemblyn△ Z according to the imaging relation formulan′＝-β2△ZnWherein β is the magnification of an optical system consisting of a measured lens of the lens assembly and an imaging lens of the digital camera, β ═ f '/f, wherein-f' is the focal length of the imaging lens, f is the focal length of the measured lens, and β2>>1，△Zn' is the deviation amount of the focal plane position of the imaging lens;
⑤ correcting the focal plane position deviation value △ Z between the measured lens of the lens component to be detected and the measured lens of the standard lens componentnTransferring the lens assembly to be inspected to the second lens assembly mount of the focal plane correcting device, and the control device calculating the focal plane position deviation value △ Z of the inspected lens according to the step ④nControlling the rotation driving device of the focal plane corrector to drive the rotation clamping component for clamping the tested lens of the lens component to be detected to rotate relative to the lens base to eliminate the focal plane position deviation △ ZnSo that the focal plane positions of the measured lens of the lens component to be detected and the measured lens of the standard lens component are consistent.
Preferably, in the step ⑤, when adjusting, an angle ω that a correction motor in a rotation driving device of the focal plane correction device should rotate is calculated according to a formula ω (360 × △ Z)/S, where S is a lens pitch of a measured lens of the lens component to be detected, and the control device controls a rotation direction and a rotation angle of the correction motor according to the calculated ω value and the positive and negative values, so that the correction motor drives the rotation clamping component to drive the measured lens to rotate a corresponding angle relative to the lens base, so as to eliminate a measured lens focal plane position deviation value △ Z between the measured lens of the lens component to be detected and a standard lens component.
In steps ① and ②, the information on the moving distance of the reticle pod with respect to the initial position of the displacement can be calculated by adjusting the rotation angle of the motor and the pitch of the lead screw nut.
Compared with the prior art, the invention has the beneficial effects that:
1. the invention provides a lens assembly focal plane measuring and correcting device and a focal plane measuring and correcting method.
2. The lens assembly focal plane measuring and correcting device and the focal plane measuring and correcting method can enable the focal plane of the locked high-definition lens to be positioned more accurately, the measuring precision can reach +/-0.02 mm, and the method is greatly higher than other methods at present. A more stable and consistent lens assembly is provided for downstream camera manufacturers to improve camera assembly throughput and production efficiency and consistency.
3. The invention also has the characteristics of reasonable structural design and convenient popularization and application.
Drawings
Fig. 1 is a schematic three-dimensional structure diagram of a first embodiment of the present invention;
FIG. 2 is a schematic three-dimensional structure diagram of a first embodiment of the present invention;
FIG. 3 is a schematic three-dimensional structure of the lens assembly of the present invention;
FIG. 4 is a schematic vertical cross-sectional view of a lens assembly of the present invention;
FIG. 5 is a schematic diagram of a partial three-dimensional structure of a focal plane measuring device according to the present invention;
FIG. 6 is a schematic vertical cross-sectional view of FIG. 5;
FIG. 7 is a schematic view of the connection between the lens module and the first lens module mounting base according to the present invention;
FIG. 8 is a schematic view of the reticle adjustment drive and reticle pod of the present invention;
FIG. 9 is a schematic vertical cross-sectional view of a reticle pod of the present invention;
FIG. 10 is a first exploded view of a reticle adjustment drive according to the present invention;
FIG. 11 is a second exploded view of the reticle adjustment drive of the present invention;
FIG. 12 is a schematic view of the transmission portion of the reticle adjustment drive of the present invention;
FIG. 13 is a schematic view of the digital camera and camera housing of the present invention;
FIG. 14 is a first schematic three-dimensional view of a focal plane corrector according to the present invention;
FIG. 15 is a schematic three-dimensional structure diagram of a focal plane correcting device according to the present invention;
FIG. 16 is a three-dimensional schematic view of the focal plane corrector of the present invention;
FIG. 17 is a first schematic three-dimensional view of a feeding device according to the present invention;
FIG. 18 is a schematic three-dimensional structure diagram of a feeding device according to the present invention;
FIG. 19 is a third schematic view of the three-dimensional structure of the feeding device of the present invention;
FIG. 20 is a schematic diagram of the optical path of the focal plane measuring apparatus according to the present invention.
Description of reference numerals: 1-lens component, 11-lens seat, 12-measured lens, 2-focal plane measuring device, 21-first lens component mounting seat, 211-light through hole, 212-pin hole component, 22-reticle, 23-light homogenizing plate, 24-light source device, 25-digital camera, 251-imaging lens, 252-photosensitive sensor, 26-lens seat mounting frame, 27-protective sleeve, 28-reticle barrel, 29-reticle adjusting driving device, 291-adjusting slide rail, 292-adjusting slide block, 293-adjusting motor, 294-adjusting transmission component, 295-reticle barrel lifting platform, 296-sensor, 210-camera frame, 2A-measuring optical axis, 3-focal plane correcting device, 31-second lens component mounting seat, 32-correcting rack, 33-correcting slide rail, 34-correcting slide block, 35-correcting lifting platform, 36-cylinder driving device, 37-rotating clamping component, 371-rotating body, 372-correcting pneumatic clamping jaw, 38-correcting motor, 39-correcting transmission component, 3A-correcting optical axis, 5-feeding device and 51-Z-axis lifting platform, 52-Y-axis slide rail, 53-Y-axis sliding table, 54-Y-axis driving device, 55-X-axis slide rail, 56-X-axis sliding table, 57-X-axis driving device, 58-Z-axis driving device, 59-conveying pneumatic clamping jaw assembly, 510-initial pneumatic clamping jaw assembly, 511-finished product pneumatic clamping jaw assembly, 7-initial mounting seat and 8-finished product mounting seat.
Detailed Description
The invention is described in detail below with reference to the following description of the drawings:
the first embodiment is as follows:
as shown in fig. 1-20, a lens assembly focal plane measuring and correcting device, the lens assembly 1 includes a lens holder 11 and a measured lens 12 screwed on the lens holder 11, and is characterized in that: the lens assembly focal plane measuring and correcting device comprises a focal plane measuring device 2, a focal plane correcting device 3 and a control device;
the focal plane measuring device 2 comprises a measuring frame, and a light source device 24, a light homogenizing plate 23, a dividing plate 22, a first lens component mounting seat 21 and a digital camera 25 which are sequentially arranged on the measuring frame along the extension direction of a measuring optical axis 2A; the reticle 22 is provided with reticle identification patterns;
the focal plane measuring device 2 further comprises a protective cylinder 27 for fixedly mounting the first lens assembly mounting seat 21 on the measuring rack, the first lens assembly mounting seat 21 is coaxially and fixedly arranged at the top of the protective cylinder 27, and the protective cylinder 27 is arranged on one side of the first lens assembly mounting seat 21 facing the light source device 24 along the direction of the measuring optical axis 2A; the lens assembly 1 is fixedly arranged on the first lens assembly mounting seat 21 through the lens seat 11, and the middle part of the first lens assembly mounting seat 21 is provided with a light through hole 211 extending along the direction of the measuring optical axis 2A; the digital camera 25 is fixedly installed on the other side of the first lens component installation seat 21, which is far away from the light source device 24, through the measuring rack, and can shoot an image of a reticle identification pattern presented by the light source device 24 through the measured lens 12 after passing through the light homogenizing plate 23 and the reticle 22; the lens mount 11 in the lens assembly 1 and the first lens assembly mounting base 21 can be positioned and mounted through the pin-hole assembly 212 shown in fig. 7;
the focal plane measuring device 2 further comprises a reticle cylinder 28 for fixedly mounting the light source device 24, the dodging plate 23 and the reticle 22, and a reticle adjustment driving device 29 for driving the reticle cylinder 28 to move along the measuring optical axis 2A in a direction close to or far away from the first lens assembly mounting base 21; one end of the reticle cylinder 28, which is provided with the reticle 22 and the dodging plate 23, extends into the protection cylinder 27, and the other end of the reticle cylinder 28 extends out of the protection cylinder 27 and is connected with a reticle adjusting and driving device 29; the reticle adjustment driving device 29 is also provided with a sensor 296 for detecting the position of the reticle cylinder 28;
the control device is respectively connected with the sensor 296, the reticle adjustment driving device 29 and the digital camera 25 to acquire detection signals and calculate the focal plane position deviation value of the measured lens 12 of the lens component 1 to be detected and the measured lens 12 of the standard lens component 1 according to the detection signals;
the focal plane correcting device 3 comprises a correcting rack 32, a second lens component mounting seat 31 which is fixedly connected with the correcting rack 32 relatively and is used for fixedly mounting the lens seat 11 of the lens component 1, a rotating clamping component 37 which is rotatably connected with the correcting rack 32 and is used for clamping the measured lens 12 of the lens component 1 fixedly mounted on the second lens component mounting seat 31 and driving the measured lens 12 to rotate, and a rotating driving device which is connected between the rotating clamping component 37 and the correcting rack 32 and is used for driving the rotating clamping component 37 to rotate, wherein the rotating central lines of the measured lens 12 and the rotating clamping component 37 of the lens component 1 fixedly mounted on the second lens component mounting seat 31 are positioned on the same correcting optical axis 3A;
the control device is connected with the rotation driving device of the focal plane correction device 3 so as to control the rotation driving device to rotate according to the focal plane position deviation value to eliminate the focal plane position deviation value, so that the measured lens 12 of the lens component 1 to be detected is consistent with the focal plane position of the measured lens 12 of the standard lens component 1.
As shown in fig. 20, preferably, the digital camera 25 includes an imaging lens 251 and a light-sensitive sensor 252 arranged in sequence from being close to the first lens unit mount 21 to being far from the first lens unit mount 21 along the measurement optical axis 2A; the photosensor 252 is connected to the control device for transmitting the image of the reticle identification pattern captured by the photosensor to the control device.
As shown in fig. 5-13, preferably, the measuring frame includes a lens holder mounting frame 26 and a camera frame 210 fixedly mounted and connected with respect to the lens holder mounting frame 26, the protective cylinder 27 is fixedly mounted on the lens holder mounting frame 26, and the digital camera 25 is fixedly mounted on the camera frame 210;
the reticle adjustment driving device 29 comprises an adjustment slide rail 291 which is fixedly mounted on the microscope stand mounting frame 26 and extends in a direction parallel to the measurement optical axis 2A, an adjustment slide block 292 which is slidably connected to the adjustment slide rail 291 and can slide in a direction parallel to the measurement optical axis 2A relative to the adjustment slide rail 291, an adjustment motor 293 which is fixedly mounted on the side wall of the adjustment slide rail 291, an adjustment transmission assembly 294 which is connected between an output shaft of the adjustment motor 293 and the adjustment slide block 292 and is used for driving the adjustment slide block 292 to slide back and forth in the extending direction of the adjustment slide rail 291, and a reticle cylinder lifting platform 295 which is connected between the adjustment slide block 292 and the reticle cylinder 28 and is used for driving the reticle cylinder 28 and the adjustment slide block 292 to move synchronously; the sensor 296 is a position sensor which is arranged between the adjusting slide rail 291 and the dividing board cylinder lifting platform 295 and is used for detecting the displacement initial position of the dividing board cylinder 28; the adjusting transmission assembly 294 includes a nut fixedly connected to the adjusting slider 292, a lead screw in threaded connection with the nut and extending in a direction parallel to the measuring optical axis 2A, a lead screw transmission wheel coaxially and fixedly connected to the lead screw, and a transmission belt or a transmission chain connected between the lead screw transmission wheel and an output shaft of the adjusting motor 293. The sensor 296 may also be a displacement sensor that feeds back the position information of the reticle pod 28 in real time.
As shown in fig. 14 to 16, preferably, the rotary clamping assembly 37 includes a rotary body 371, a correcting pneumatic clamping jaw 372 distributed around the bottom of the rotary body 371 around the center line of the rotary body 371 and capable of moving radially relative to the center of the rotary body 371, the correcting pneumatic clamping jaw 372 being capable of clamping or unclamping the measured lens 12 of the lens assembly 1 fixedly mounted on the second lens assembly mounting seat 31 when moving radially relative to the rotary body 371;
the focal plane correcting device 3 further comprises a lifting control assembly connected between the rotating body 371 and the correcting rack 32 and used for driving the rotating body 371 to move towards the direction far away from or close to the second lens assembly mounting seat 31, wherein the lifting control assembly comprises a correcting slide rail 33 fixedly arranged on the correcting rack 32 and extending along the direction parallel to the correcting optical axis 3A, a correcting slide block 34 slidably connected on the correcting slide rail 33 and capable of sliding along the direction parallel to the correcting optical axis 3A, a correcting lifting platform 35 fixedly arranged on the correcting slide block 34, and a cylinder driving device 36 fixedly arranged on the correcting rack 32 and connected with the correcting lifting platform 35 through one end of a piston and used for driving the correcting lifting platform 35 to move along the extending direction of the correcting optical axis 3A; the rotating body 371 is rotatably mounted on the correcting lifting platform 35, and the rotating driving device comprises a correcting motor 38 arranged on the correcting lifting platform 35 and a correcting transmission assembly 39 connected between an output shaft of the correcting motor 38 and a rotating shaft of the rotating body 371 and used for driving the rotating body 371 to rotate around a correcting optical axis 3A;
the focal plane correcting device 3 further comprises a pneumatic device connected with the correcting pneumatic clamping jaw 372 to drive the correcting pneumatic clamping jaw 372 to move radially.
As shown in fig. 17-19, preferably, the lens assembly focal plane measuring and correcting device further includes a base for mounting the focal plane measuring device 2 and the focal plane correcting device 3, and a feeding device 5 disposed on the base for conveying the lens assembly 1; the feeding device 5 comprises a Y-axis sliding rail 52 fixedly arranged on the base and extending along the Y-axis direction, a Y-axis sliding table 53 connected to the Y-axis sliding rail 52 in a sliding manner, an X-axis sliding rail 55 fixedly arranged on the base and connected with the Y-axis sliding table 53 and used for driving the Y-axis sliding table 53 to slide along the Y-axis direction relative to the Y-axis sliding rail 52, an X-axis sliding table 56 connected to the X-axis sliding rail 55 in a sliding manner, an X-axis driving device 57 fixedly arranged on the Y-axis sliding table 53 and connected with the X-axis sliding table 56 and used for driving the X-axis sliding table 56 to slide along the X-axis direction relative to the X-axis sliding rail 55, a Z-axis lifting table 51 arranged above the X-axis sliding table 56 and capable of lifting along the vertical direction perpendicular to the X-axis and the Y-axis, and a Z-axis lifting table 51 connected between the Z-axis lifting table 51 and the X-axis sliding table 56 and used for driving the Z-axis lifting table 51 to lift 56 relative to slide along the A Z-axis drive 58 for upward and downward movement;
the measuring optical axis 2A and the correcting optical axis 3A are both in a vertical direction parallel to the Z-axis direction, and a vertical connecting line of the measuring optical axis 2A and the correcting optical axis 3A is parallel to the X-axis direction;
the feeding device 5 further comprises a conveying pneumatic clamping jaw assembly 59 which is fixedly arranged on the Z-axis lifting table 51 and extends towards the side where the measuring optical axis 2A and the correcting optical axis 3A are located from the Z-axis lifting table 51, the conveying pneumatic clamping jaw assembly 59 is located between the focal plane measuring device 2 and the focal plane correcting device 3, and the conveying pneumatic clamping jaw assembly 59 comprises a pair of clamping jaws which can be opened and closed along the X-axis direction under the pneumatic action to clamp or loosen the lens assembly 1 on the focal plane measuring device 2 and/or the focal plane correcting device 3.
As shown in fig. 17-19, it is preferable that an initial mounting seat 7 for placing the lens assembly 1 in the initial transition state is provided on the base at the front side of the focal plane measuring device 2, and a finished mounting seat 8 for placing the lens assembly 1 after adjustment is provided at the rear side of the focal plane correcting device 3; the vertical central shaft of the initial installation seat 7, the measurement optical axis 2A of the focal plane measurement device 2, the correction optical axis 3A of the focal plane correction device 3 and the vertical central shaft of the finished product installation seat 8 are sequentially arranged at intervals along the X-axis direction parallel to the X-axis slide rail 55; the feeding device 5 further comprises an initial pneumatic clamping jaw assembly 510, which is positioned between the initial mounting seat 7 and the focal plane correcting device 3 and is used for conveying the lens assembly 1 on the initial mounting seat 7 to the focal plane measuring device 2, and a finished product pneumatic clamping jaw assembly 511, which is positioned between the focal plane correcting device 3 and the finished product mounting seat 8 and is used for conveying the lens assembly 1 on the focal plane correcting device 3 to the finished product mounting seat 8; the initial pneumatic jaw assembly 510, the delivery pneumatic jaw assembly 59, and the final pneumatic jaw assembly 511 are in the same direction parallel to the X-axis.
Example two:
a focal plane measurement correction method is characterized in that: the method comprises the following steps:
① measuring reticle barrel position of standard lens assembly, mounting standard lens assembly 1 on the first lens assembly mounting seat 21 of focal plane measuring device 2, detecting displacement initial position of reticle barrel 28 by sensor 296, controlling reticle adjustment driving device 29 by control device to drive reticle barrel 28 and reticle 22 thereon to move toward and away from the first lens assembly mounting seat 21, so that reticle identification pattern on reticle 22 can form image of reticle identification pattern on digital camera 25, receiving image information of each reticle identification pattern captured by digital camera 25 and movement distance information of reticle barrel 28 relative displacement initial position corresponding to each reticle identification pattern image information fed back by reticle adjustment driving device 29 or sensor 296, finding out optimum movement distance information of reticle barrel 28 relative displacement initial position corresponding to clearest reticle identification pattern image information, adding the optimum movement distance information and reticle barrel 28 initial position to obtain Z-displacement barrel position of reticle barrel 28 on measuring rack0；
② measuring the position of the reticle barrel of the lens assembly to be detected, mounting the lens assembly 1 to be detected on the first lens assembly mounting seat 21 of the focal plane measuring device 2 instead of the standard lens assembly 1, and then measuring and calculating the position Z of the reticle barrel 28 corresponding to the lens assembly 1 to be detected on the measuring rack according to the method of step ① when the reticle identification pattern image information shot by the digital camera 25 is clearestn；
③ calculating the deviation of focal plane position △ Z of imaging lensn' according to the formula △ Zn′＝Zn-Z0The position Z of the reticle cylinder 28 corresponding to the lens assembly 1 to be detected on the measuring racknPosition Z of reticle cylinder 28 on the measuring rack corresponding to standard lens assembly 10Subtracting the displacement deviation value △ Z to obtain a reticle tube displacement deviation valuen', the reticle pod displacement offset value △ ZnIs that it isReticle displacement deviation value △ Zn' this reticle displacement deviation value △ Zn ' is equivalent to a focus face position deviation value △ Zn ' of the imaging lens 251 to be adjusted by the digital camera 25 in the case where the reticle identification pattern image information obtained by the digital camera 25 is clear when the lens assembly 1 to be detected and the standard lens assembly 1 are respectively placed on the second lens assembly mount 31 and the reticle 22 is stationary;
④ calculating the focal plane position deviation value △ Z between the measured lens 12 of the lens assembly 1 to be detected and the measured lens 12 of the standard lens assembly 1n△ Z according to the imaging relation formulan′＝-β2△ZnWherein β is the magnification of the optical system consisting of the test lens 12 of the lens assembly 1 and the imaging lens 251 of the digital camera 25, β ═ f '/f, wherein-f' is the focal length of the imaging lens 251, f is the focal length of the test lens 12, and β2>>1，△Zn' is the deviation amount of the focal plane position of the imaging lens;
⑤ correcting the focal plane position deviation value △ Z between the measured lens 12 of the lens component to be detected and the measured lens 12 of the standard lens componentnTransferring the lens assembly 1 to be inspected to the second lens assembly holder 31 of the focal plane correcting device 3, the control device calculating the focal plane position deviation value △ Z of the inspected lens 12 according to the step ④nControlling the rotation driving device of the focal plane correcting device 3 to drive the rotation clamping component 37 of the tested lens 12 for clamping the lens component 1 to be detected to rotate relative to the lens base 11 to eliminate the focal plane position deviation value △ ZnSo that the focal plane positions of the measured lens 12 of the lens component to be detected and the measured lens 12 of the standard lens component are consistent.
Preferably, in the step ⑤, when adjusting, an angle ω that the correction motor 38 should rotate in the rotation driving device of the focal plane correction device 3 is calculated according to a formula ω (360 × △ Z)/S, where S is a lens pitch of the measured lens 12 of the lens assembly 1 to be detected, and the control device controls the rotation direction and the rotation angle of the correction motor 38 according to the calculated ω value and the positive and negative values, so that the correction motor 38 drives the rotation clamping component 37 to drive the measured lens 12 to rotate relative to the lens base 12 by a corresponding angle, so as to eliminate the focal plane position deviation △ Z between the measured lens 12 of the lens assembly 1 to be detected and the measured lens 12 of the standard lens assembly 1.
In steps ① and ②, the movement distance information of the reticle pod 28 with respect to the initial displacement position can be calculated by adjusting the rotation angle of the motor 293 and the pitch of the lead screw nut.
While the invention has been illustrated and described with respect to specific embodiments and alternatives thereof, it will be understood that various changes and modifications can be made without departing from the spirit and scope of the invention. It is understood, therefore, that the invention is not to be in any way limited except by the appended claims and their equivalents.

Claims (8)

1. The utility model provides a correcting unit is measured to lens subassembly focal plane, lens subassembly (1) includes lens mount (11) and threaded connection measurand lens (12) on lens mount (11), its characterized in that: the lens assembly focal plane measuring and correcting device comprises a focal plane measuring device (2), a focal plane correcting device (3) and a control device;
the focal plane measuring device (2) comprises a measuring rack, and a light source device (24), a light homogenizing plate (23), a reticle (22), a first lens component mounting seat (21) and a digital camera (25) which are sequentially arranged on the measuring rack along the extension direction of a measuring optical axis (2A); the reticle (22) is provided with reticle identification patterns;
the focal plane measuring device (2) further comprises a protective barrel (27) used for fixedly mounting the first lens component mounting seat (21) on the measuring rack, the first lens component mounting seat (21) is coaxially and fixedly arranged at the top of the protective barrel (27), and the protective barrel (27) is arranged on one side, facing the light source device (24), of the first lens component mounting seat (21) along the direction of the measuring optical axis (2A); the lens assembly (1) is fixedly arranged on a first lens assembly mounting seat (21) through a lens seat (11), and a light through hole (211) extending along the direction of the measuring optical axis (2A) is formed in the middle of the first lens assembly mounting seat (21); the digital camera (25) is fixedly arranged on the other side, away from the light source device (24), of the first lens component mounting seat (21) through the measuring rack and can shoot an image of a reticle identification pattern, which is shown by the measured lens (12), of the light source device (24) after passing through the light homogenizing plate (23) and the reticle (22);
the focal plane measuring device (2) further comprises a reticle cylinder (28) used for fixedly mounting the light source device (24), the light homogenizing plate (23) and the reticle (22), and a reticle adjusting and driving device (29) used for driving the reticle cylinder (28) to move towards the direction close to or far away from the first lens component mounting base (21) along the measuring optical axis (2A); one end of the reticle cylinder (28) provided with the reticle (22) and the light homogenizing plate (23) extends into the protective cylinder (27), and the other end of the reticle cylinder (28) extends out of the protective cylinder (27) and is connected with a reticle adjusting and driving device (29); the reticle adjusting and driving device (29) is also provided with a sensor (296) for detecting the position of the reticle cylinder (28);
the control device is respectively connected with the sensor (296), the reticle adjustment driving device (29) and the digital camera (25) to acquire detection signals, and calculates focal plane position deviation values of the measured lens (12) of the lens component (1) to be detected and the measured lens (12) of the standard lens component (1) according to the detection signals;
the focal plane correcting device (3) comprises a correcting rack (32), a second lens component mounting seat (31) which is relatively and fixedly connected with the correcting rack (32) and is used for fixedly mounting a lens seat (11) of a lens component (1), a rotating clamping component (37) which is rotatably connected with the correcting rack (32) and is used for clamping a measured lens (12) of the lens component (1) fixedly mounted on the second lens component mounting seat (31) and driving the measured lens (12) to rotate, and a rotating driving device which is connected between the rotating clamping component (37) and the correcting rack (32) and is used for driving the rotating clamping component (37) to rotate, the rotation center lines of the measured lens (12) and the rotating clamping component (37) of the lens component (1) fixedly arranged on the second lens component mounting seat (31) are positioned on the same correction optical axis (3A);
the control device is connected with the rotary driving device of the focal plane correction device (3) so as to control the rotary driving device to rotate according to the focal plane position deviation value to eliminate the focal plane position deviation value, so that the measured lens (12) of the lens component (1) to be detected is consistent with the focal plane position of the measured lens (12) of the standard lens component (1).
2. The lens assembly focal plane measurement correction device of claim 1, wherein: the digital camera (25) comprises an imaging lens (251) and a photosensitive sensor (252) which are sequentially arranged along the measuring optical axis (2A) from the direction close to the first lens component mounting seat (21) to the direction far away from the first lens component mounting seat (21); the photosensitive sensor (252) is connected with the control device and is used for transmitting the image of the reticle identification pattern shot by the photosensitive sensor to the control device.
3. The lens assembly focal plane measurement correction device of claim 1, wherein: the measuring rack comprises a lens base mounting rack (26) and a camera rack (210) which is fixedly mounted and connected relative to the lens base mounting rack (26), the protective cylinder (27) is fixedly mounted on the lens base mounting rack (26), and the digital camera (25) is fixedly mounted on the camera rack (210);
the reticle adjusting and driving device (29) comprises an adjusting slide rail (291) which is fixedly installed on the microscope base installation rack (26) and extends in a direction parallel to the measuring optical axis (2A), an adjusting slide block (292) which is connected to the adjusting slide rail (291) in a sliding mode and can slide in a direction parallel to the measuring optical axis (2A) relative to the adjusting slide rail (291), an adjusting motor (293) which is fixedly installed on the side wall of the adjusting slide rail (291), an adjusting transmission assembly (294) which is connected between an output shaft of the adjusting motor (293) and the adjusting slide block (292) and used for driving the adjusting slide block (292) to slide in a reciprocating mode in the extending direction of the adjusting slide rail (291), and a reticle barrel lifting platform (295) which is connected between the adjusting slide block (292) and the reticle barrel (28) and used for driving the reticle barrel (28) and the adjusting slide block (292) to move synchronously; the sensor (296) is a position sensor which is arranged between the adjusting slide rail (291) and the reticle barrel lifting platform (295) and is used for detecting the displacement initial position of the reticle barrel (28); the adjusting transmission assembly (294) comprises a nut fixedly connected with the adjusting slide block (292), a screw rod in threaded connection with the nut and extending along the direction parallel to the measuring optical axis (2A), a screw rod transmission wheel coaxially and fixedly connected to the screw rod, and a transmission belt or a transmission chain connected between the screw rod transmission wheel and an output shaft of the adjusting motor (293).
4. The lens assembly focal plane measurement correction device of claim 1, wherein: the rotary clamping component (37) comprises a rotating body (371) and a correcting pneumatic clamping jaw (372) which is distributed around the center line of the rotating body (371) at the bottom of the rotating body (371) and can move radially relative to the center of the rotating body (371), and the correcting pneumatic clamping jaw (372) can clamp or release a measured lens (12) of the lens component (1) fixedly arranged on the second lens component mounting seat (31) when moving radially relative to the rotating body (371);
the focal plane correction device (3) also comprises a lifting control component which is connected between the rotating body (371) and the correction rack (32) and is used for driving the rotating body (371) to move towards the direction far away from or close to the second lens component mounting seat (31), the lifting control assembly comprises a correcting slide rail (33) which is fixedly arranged on the correcting rack (32) and extends along the direction parallel to the correcting optical axis (3A), a correcting slide block (34) which is connected to the correcting slide rail (33) in a sliding mode and can slide along the direction parallel to the correcting optical axis (3A), a correcting lifting platform (35) which is fixedly arranged on the correcting slide block (34), and a cylinder driving device (36) which is fixedly arranged on the correcting rack (32) and is connected with the correcting lifting platform (35) through one end of a piston and used for driving the correcting lifting platform (35) to move along the extending direction of the correcting optical axis (3A); the rotating body (371) is rotatably installed on the correcting lifting platform (35), and the rotating driving device comprises a correcting motor (38) arranged on the correcting lifting platform (35) and a correcting transmission component (39) which is connected between an output shaft of the correcting motor (38) and a rotating shaft of the rotating body (371) and is used for driving the rotating body (371) to rotate around the correcting optical axis (3A);
the focal plane correcting device (3) further comprises a pneumatic device which is connected with the correcting pneumatic clamping jaw (372) to drive the correcting pneumatic clamping jaw (372) to move radially.
5. The lens assembly focal plane measurement correction device of claim 1, wherein: the lens component focal plane measuring and correcting device also comprises a base used for installing the focal plane measuring device (2) and the focal plane correcting device (3), and a feeding device (5) arranged on the base and used for conveying the lens component (1); the feeding device (5) comprises a Y-axis sliding rail (52) which is fixedly arranged on the base and extends along the Y-axis direction, a Y-axis sliding table (53) which is connected to the Y-axis sliding rail (52) in a sliding manner, a Y-axis driving device (54) which is fixedly arranged on the base and is connected with the Y-axis sliding table (53) and used for driving the Y-axis sliding table (53) to slide along the Y-axis direction relative to the Y-axis sliding rail (52), an X-axis sliding rail (55) which is fixedly arranged on the Y-axis sliding table (53) and extends along the X-axis direction vertical to the Y-axis direction, an X-axis driving device (57) which is connected to the X-axis sliding table (55) in a sliding manner, a Z-axis lifting table (51) which is fixedly arranged above the X-axis sliding table (56) and can lift along the vertical direction vertical to the X-axis and the Y-axis, and a Z-axis lifting table (51) which is fixedly arranged on the Y-axis sliding table (53) and is connected with the, And a Z-axis driving device (58) which is connected between the Z-axis lifting platform (51) and the X-axis sliding platform (56) and is used for driving the Z-axis lifting platform (51) to move up and down along the Z-axis direction relative to the X-axis sliding platform (56);
the measuring optical axis (2A) and the correcting optical axis (3A) are both in a vertical direction parallel to the Z-axis direction, and a vertical connecting line of the measuring optical axis (2A) and the correcting optical axis (3A) is parallel to the X-axis direction;
the feeding device (5) further comprises a conveying pneumatic clamping jaw assembly (59) which is fixedly arranged on the Z-axis lifting table (51) and extends towards the side where the measuring optical axis (2A) and the correcting optical axis (3A) are located from the Z-axis lifting table (51), the conveying pneumatic clamping jaw assembly (59) is located between the focal plane measuring device (2) and the focal plane correcting device (3), and the conveying pneumatic clamping jaw assembly (59) comprises a pair of clamping jaws which can be opened and closed along the X-axis direction under the pneumatic action to clamp or loosen the lens assembly (1) on the focal plane measuring device (2) and/or the focal plane correcting device (3).
6. The lens assembly focal plane measurement correction device of claim 5, wherein: an initial mounting seat (7) which is positioned at the front side of the focal plane measuring device (2) and used for placing the lens assembly (1) in an initial rotating state and a finished product mounting seat (8) which is positioned at the rear side of the focal plane correcting device (3) and used for placing the debugged lens assembly (1) are also arranged on the base; the vertical central shaft of the initial mounting seat (7), the measuring optical axis (2A) of the focal plane measuring device (2), the correcting optical axis (3A) of the focal plane correcting device (3) and the vertical central shaft of the finished product mounting seat (8) are sequentially arranged at intervals along the X-axis direction parallel to the X-axis slide rail (55); the feeding device (5) further comprises an initial pneumatic clamping jaw assembly (510) which is positioned between the initial mounting seat (7) and the focal plane correcting device (3) and used for conveying the lens assembly (1) on the initial mounting seat (7) to the focal plane measuring device (2), and a finished product pneumatic clamping jaw assembly (511) which is positioned between the focal plane correcting device (3) and the finished product mounting seat (8) and used for conveying the lens assembly (1) on the focal plane correcting device (3) to the finished product mounting seat (8); the initial pneumatic clamping jaw assembly (510), the conveying pneumatic clamping jaw assembly (59) and the finished pneumatic clamping jaw assembly (511) are in the same direction parallel to the X axis.
7. A focal plane measurement correction method for performing focal plane measurement and correction using the focal plane measurement correction apparatus for a lens assembly according to any one of claims 1 to 6, characterized in that: the method comprises the following steps:
① measuring reticle barrel position of standard lens assembly, mounting standard lens assembly (1) on the first lens assembly mounting seat (21) of focal plane measuring device (2), detecting displacement initial position of reticle barrel (28) by sensor (296), controlling reticle adjustment driving device (29) by control device to drive reticle barrel (28) and reticle (22) thereon to move towards and away from the first lens assembly mounting seat (21), so that reticle identification pattern on reticle (22) can form image of reticle identification pattern on digital camera (25), receiving image information of each reticle identification pattern shot by digital camera (25) and movement distance information of reticle barrel (28) corresponding to each reticle identification pattern image information fed back by reticle adjustment driving device (29) or sensor (296), finding out optimum movement distance information of reticle barrel (28) corresponding to clearest reticle identification pattern image information, and adding the optimum movement distance information of reticle barrel (28) to the initial displacement information to obtain optimum movement distance information of reticle barrel (28) and adding the initial displacement information of reticle barrel (28) to the optimum movement distance information of reticle barrel(28) Position Z on the measuring carriage0；
② measuring the position of the reticle barrel of the lens component to be detected, namely, mounting the lens component (1) to be detected on the first lens component mounting seat (21) of the focal plane measuring device (2) in place of the standard lens component (1), and then measuring and calculating the position Z of the reticle barrel (28) corresponding to the lens component (1) to be detected on the measuring rack when the reticle identification pattern image information shot by the digital camera (25) is clearest according to the method of step ①n；
③ calculating the deviation of focal plane position △ Z of imaging lensn' according to the formula △ Zn′＝Zn-Z0The position Z of a reticle barrel (28) corresponding to the lens component (1) to be detected on the measuring racknThe position Z of a reticle cylinder (28) on the measuring frame, which corresponds to a standard lens assembly (1)0Subtracting the displacement deviation value △ Z to obtain a reticle tube displacement deviation valuen', the reticle pod displacement offset value △ Zn' this is the reticle displacement deviation value △ Zn' the reticle displacement deviation value △ Zn ' is equivalent to a focus face position deviation value △ Zn ' of an imaging lens (251) to be adjusted by a digital camera (25) in the two cases when the reticle discrimination pattern image information obtained by the digital camera (25) is clear when a lens component (1) to be detected and a standard lens component (1) are respectively placed on a second lens component mounting seat (31) and a reticle (22) is not moved;
④ calculating the focal plane position deviation value △ Z between the measured lens (12) of the lens assembly (1) to be detected and the measured lens (12) of the standard lens assembly (1)n△ Z according to the imaging relation formulan′＝-β2△ZnWherein β is the magnification of an optical system consisting of the measured lens (12) of the lens assembly (1) and the imaging lens (251) of the digital camera (25), β ═ f '/f, wherein-f' is the focal length of the imaging lens (251), f is the focal length of the measured lens (12), and β2>>1，△Zn' is the deviation amount of the focal plane position of the imaging lens;
⑤ correcting the tested lens (12) of the lens assembly to be tested with the standard lens assemblyThe focal plane position deviation value △ Z of the measured lens (12)nTransferring the lens assembly (1) to be inspected to a second lens assembly mount (31) of the focal plane correcting device (3), the control device calculating a focal plane position deviation value △ Z of the inspected lens (12) according to step ④nControlling a rotary driving device of the focal plane correction device (3) to drive a rotary clamping component (37) for clamping a tested lens (12) of the lens component (1) to be detected to rotate relative to a lens base (11) to eliminate a focal plane position deviation value △ ZnSo that the focal plane positions of the measured lens (12) of the lens component to be detected and the measured lens (12) of the standard lens component are consistent.
8. The focal plane measurement and correction method according to claim 7, wherein in the step ⑤, an angle ω that the correction motor (38) should rotate in the rotation driving device of the focal plane correction device (3) is calculated according to a formula ω (360 × △ Z)/S, wherein S is a lens pitch of the measured lens (12) of the lens assembly (1) to be detected, and the control device controls the rotation direction and the rotation angle of the correction motor (38) according to the calculated ω value and the positive and negative values, so that the correction motor (38) drives the rotation clamping component (37) to drive the measured lens (12) to rotate by a corresponding angle relative to the lens holder (12), thereby eliminating the deviation value △ Z between the measured lens (12) of the lens assembly (1) to be detected and the measured lens (12) of the standard lens assembly (1).
CN201911360175.2A 2019-12-25 2019-12-25 Lens assembly focal plane measuring and correcting device and focal plane measuring and correcting method Pending CN111024373A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113251959A (en) * 2021-07-08 2021-08-13 江苏才道精密仪器有限公司 Two-sided outward appearance synchronous detection device of U type work piece
CN114905247A (en) * 2021-06-15 2022-08-16 珠海市硅酷科技有限公司 Upper and lower lens base assembling equipment for high-precision optical lens
TWI800368B (en) * 2022-05-04 2023-04-21 張朝凱 Measuring device for focal length of off-axis elliptical cylindrical mirror

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114905247A (en) * 2021-06-15 2022-08-16 珠海市硅酷科技有限公司 Upper and lower lens base assembling equipment for high-precision optical lens
CN113251959A (en) * 2021-07-08 2021-08-13 江苏才道精密仪器有限公司 Two-sided outward appearance synchronous detection device of U type work piece
TWI800368B (en) * 2022-05-04 2023-04-21 張朝凱 Measuring device for focal length of off-axis elliptical cylindrical mirror

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