CN108914082B - Surface treatment method of austenitic stainless steel - Google Patents
Surface treatment method of austenitic stainless steel Download PDFInfo
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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Abstract
The invention discloses a surface treatment method of austenitic stainless steel, and belongs to the technical field of surface modification of metal materials. The method comprises the steps of firstly carrying out electric spark machining on the austenitic stainless steel to obtain the parallel-distributed groove-shaped surface appearance, then adopting a plasma surface alloying technology to obtain a surface titanium alloy layer, and finally obtaining the surface modified austenitic stainless steel. The invention combines the electric spark processing and the plasma surface alloying technology to carry out surface treatment on the austenitic stainless steel, thereby improving the wear resistance of the austenitic stainless steel.
Description
Technical Field
The invention relates to a surface treatment method of austenitic stainless steel, belonging to the technical field of surface modification of metal materials.
Background
The austenitic stainless steel has good comprehensive mechanical property and process property, and shows better corrosion resistance in oxidizing and reducing media, so the austenitic stainless steel is widely applied to the fields of industry, civilian use, national defense and the like. Austenitic stainless steel is also the most various stainless steel and the most used steel, and the production amount and the used amount thereof account for more than half of the total production amount and the used amount of the stainless steel. However, austenitic stainless steel is generally not used for manufacturing sliding friction auxiliary parts due to the limitations of low surface hardness, large friction coefficient, poor wear resistance and other disadvantages, and the wider use of austenitic stainless steel is limited. Based on the fact that the friction and abrasion starts to occur on the surface of the material, researches show that the wear resistance of the austenitic stainless steel can be effectively improved by means of surface technology. The selection of a proper surface treatment technology has significant meaning for expanding the application of austenitic stainless steel as a friction material.
Disclosure of Invention
The invention aims to provide a surface treatment method of austenitic stainless steel, and the modified austenitic stainless steel has excellent wear resistance.
The invention provides a surface treatment method of austenitic stainless steel, which comprises the steps of firstly carrying out electric spark processing on the austenitic stainless steel to obtain parallel-distributed groove-shaped surface appearances, then obtaining a titanium alloy layer by adopting a plasma surface alloying technology, and finally obtaining the surface-modified austenitic stainless steel. The electric spark machining can realize the cutting or forming of metal materials under the working conditions of low voltage and large current, and the surface of the obtained sheet austenitic stainless steel is in the shape of a groove-shaped surface which is distributed in parallel. The parallel arrangement of the grooves can significantly improve the tribological properties. The plasma surface alloying technology is to utilize plasma generated by gas glow discharge under low vacuum condition to realize surface alloying. The furnace body of the plasma surface alloying furnace is an anode and is grounded, and the furnace chamber is internally provided with another cathode besides a workpiece to be treated as one cathode for discharging. Under the action of certain bias voltage and electric field, the argon ions bombard the source material, and the sputtered alloy elements are deposited and diffused to form a surface alloying layer on the surface of the workpiece. The titanium alloy layer has solid solution of titanium in the austenitic stainless steel and also has a plurality of intermetallic compounds, so that the surface hardness and the wear resistance of the austenitic stainless steel can be improved, and the titanium alloy layer and the austenitic stainless steel are firmly metallurgically bonded. The invention combines the electric spark processing and the plasma surface alloying technology, obviously improves the wear resistance of the austenitic stainless steel, and has the advantages of the parallel distributed groove-shaped surface appearance in the aspect of tribology.
The surface treatment method of the austenitic stainless steel comprises the following steps:
(1) degreasing the austenitic stainless steel bar: soaking in an alkaline solution at the temperature of 80-90 ℃ for 5-10 min;
(2) ultrasonically cleaning, washing by distilled water and drying the austenitic stainless steel bar with the oil removed on the surface in absolute ethyl alcohol for later use;
(3) carrying out electric spark machining on the austenitic stainless steel bar treated in the step (2): using a molybdenum wire electric spark cutting machine to process the austenitic stainless steel bar into a wafer workpiece, and obtaining the parallel distributed groove-shaped surface appearance, wherein the processing parameters are as follows: the pulse width is 5-10 mu s, the working voltage is 90-100V, the working current is 0.15-0.25A, and the stepping stroke is 0.1-0.15 mm;
(4) carrying out absolute ethyl alcohol ultrasonic cleaning, distilled water cleaning and drying on the austenitic stainless steel wafer workpiece obtained in the step (3), and then placing the workpiece on a workpiece table in a furnace cavity of a plasma surface alloying furnace, wherein the plasma surface alloying furnace is connected with two pulse power supplies;
(5) pumping the furnace chamber of the plasma surface alloying furnace to a vacuum degree of 0.1Pa, introducing argon gas into the furnace chamber as a carrier gas to maintain the pressure in the furnace chamber at 35-45 Pa, starting a first pulse power supply, applying direct current bias voltage between an anode and a cathode of the first pulse power supply, generating glow discharge in the furnace chamber, ionizing argon atoms into plasma, gradually raising the surface temperature of an austenitic stainless steel wafer workpiece along with the increase of the direct current bias voltage, and performing ion bombardment cleaning on the austenitic stainless steel wafer workpiece for 20-40 min when the temperature of the workpiece is raised to 500-550 ℃;
(6) and starting a second pulse power supply, applying a direct current bias voltage between the anode and the cathode of the second pulse power supply, gradually increasing the direct current bias voltage, controlling the bias voltage value difference between the second pulse power supply and the first pulse power supply to be 200-350V, gradually increasing the temperature of the workpiece to be 850-1000 ℃, preserving the temperature for 1-4 h, slowly reducing the direct current bias voltage of the second pulse power supply and the first pulse power supply after the heat preservation is finished, continuing the process for 30 min, and then sequentially closing the second pulse power supply and the first pulse power supply to slowly cool the austenitic stainless steel wafer workpiece to the room temperature along with the furnace.
In the preparation method, in the step (1), the alkali washing solution has the formula: 65-75 g/L sodium hydroxide; 35-45 g/L sodium carbonate; 15-25 g/L sodium phosphate; 5-15 g/L sodium silicate.
In the preparation method, the plasma surface alloying furnace device comprises two pulse power supplies; a workpiece platform is arranged above the furnace bottom and is connected with the cathode of the first pulse power supply to form a workpiece electrode; a pure titanium plate is arranged above the workpiece table and connected with the cathode of the second pulse power supply to form a titanium alloying source electrode; the pure titanium plate is suspended above the workpiece through a source electrode suspension bracket, and the source electrode suspension bracket is fixed at the bottom of the furnace; the top of the furnace shell of the plasma surface alloying furnace is connected with the anodes of the first pulse power supply and the second pulse power supply and is grounded; a temperature measuring window is arranged on the left side of the furnace body, and the photoelectric thermometer is arranged on the outer side of the window and is opposite to the workpiece; the furnace bottom is provided with a pipeline, the left side of the furnace bottom is provided with a first pipeline connected with a vacuumizing device, and the right side of the furnace bottom is provided with a second pipeline connected with an aerating device.
Furthermore, the distance between the pure titanium plate and the austenitic stainless steel wafer workpiece is set to be 16-22 mm.
In the preparation method, in the step (5), the flow rate of the argon gas is controlled to be 60-70 sccm.
As a preferred technical solution, the preparation method specifically comprises the following steps:
(1) degreasing the austenitic stainless steel bar: soaking in an alkaline solution at the temperature of 80-90 ℃ for 5-10 min, wherein the formula of the alkaline solution is as follows: 65-75 g/L sodium hydroxide; 35-45 g/L sodium carbonate; 15-25 g/L sodium phosphate; 5-15 g/L sodium silicate;
(2) carrying out absolute ethyl alcohol ultrasonic cleaning, distilled water cleaning and drying on the austenitic stainless steel bar with the oil removed on the surface in absolute ethyl alcohol for later use;
(3) carrying out electric spark machining on the cleaned austenitic stainless steel bar: using a molybdenum wire electric spark cutting machine to process the austenitic stainless steel bar into a wafer workpiece, and obtaining the parallel distributed groove-shaped surface appearance, wherein the processing parameters are as follows: pulse width is 8 mus, working voltage is 95V, working current is 0.2A, and stepping stroke is 0.12 mm;
(4) carrying out absolute ethyl alcohol ultrasonic cleaning, distilled water cleaning and drying on the austenitic stainless steel wafer workpiece obtained in the step (3), then placing the workpiece on a workpiece table in a plasma surface alloying furnace, and connecting the plasma surface alloying furnace with two pulse power supplies to realize plasma surface alloying of the austenitic stainless steel wafer workpiece: firstly, connecting a workpiece platform with a cathode of a first pulse power supply to form a workpiece electrode, then hanging a pure titanium plate above an austenitic stainless steel wafer workpiece in a furnace cavity of a plasma surface alloying furnace through a source electrode suspension bracket, setting the distance between the pure titanium plate and the austenitic stainless steel wafer workpiece to be 18 mm, connecting the pure titanium plate with a cathode of a second pulse power supply through the source electrode suspension bracket to form a titanizing source electrode, and connecting a furnace shell with anodes of the first pulse power supply and the second pulse power supply and grounding;
(5) pumping the interior of a furnace chamber of a plasma surface alloying furnace to a vacuum degree of 0.1Pa, introducing argon gas serving as carrier gas into the furnace chamber, controlling the flow to be 45 sccm, maintaining the pressure in the furnace chamber to be 40 Pa, starting a first pulse power supply, applying direct current bias between an anode and a cathode of the first pulse power supply, generating glow discharge in the furnace body, ionizing argon atoms into plasma, gradually increasing the surface temperature of an austenitic stainless steel wafer workpiece along with the increase of the direct current bias, and performing ion bombardment cleaning on austenitic stainless steel for 30 min when the temperature of the workpiece electrode is increased to 525 ℃;
(6) and starting a second pulse power supply, applying a direct current bias voltage between the anode and the cathode of the second pulse power supply, gradually increasing the direct current bias voltage, controlling the bias voltage value difference between the second pulse power supply and the first pulse power supply within the range of 200V, gradually increasing the temperature of the workpiece and maintaining the temperature at 950 ℃, preserving the temperature for 3 h, slowly reducing the direct current bias voltage of the second pulse power supply and the direct current bias voltage of the first pulse power supply after the heat preservation is finished, continuing the process for 30 min, and then sequentially closing the second pulse power supply and the first pulse power supply to slowly cool the austenitic stainless steel wafer workpiece to the room temperature along with the furnace.
The invention has the beneficial effects that:
the invention combines the electric spark processing and the plasma surface alloying technology to carry out the surface treatment on the austenitic stainless steel, fully exerts the advantages of the electric spark processing and the plasma surface alloying technology and improves the wear resistance of the austenitic stainless steel.
Drawings
FIG. 1 is a schematic structural view of a plasma surface alloying furnace;
FIG. 2 is a surface topography of the austenitic stainless steel after treatment in example 1;
FIG. 3 is a cross-sectional profile of an austenitic stainless steel after treatment in example 1;
FIG. 4 is an X-ray diffraction pattern of the austenitic stainless steel treated in example 1;
FIG. 5 is a diagram of wear scars from dry friction of untreated austenitic stainless steel with GCr 15;
FIG. 6 is a graph of the wear scar of the treated austenitic stainless steel of example 1 dry rubbed with GCr 15;
FIG. 7 shows untreated austenitic stainless steel and Si3N4Wear scar pattern of dry rub;
FIG. 8 shows the austenitic stainless steel and Si after treatment in example 13N4Wear scar pattern of dry rub;
FIG. 9 is a graph of wear scar of untreated austenitic stainless steel with grease lubricated friction of GCr 15;
FIG. 10 is a graph of wear scar of treated austenitic stainless steel of example 1 with grease lubricated friction of GCr 15;
FIG. 11 shows untreated austenitic stainless steel and Si3N4Wear scar map of grease lubrication friction;
FIG. 12 shows the austenitic stainless steel and Si after treatment in example 13N4Wear scar map of grease lubrication friction;
in the figure: 1: a furnace chamber; 2: a furnace shell; 3: a pure titanium plate; 4: a workpiece; 5: a temperature measuring window; 6: a photoelectric thermometer; 7: a first pipeline; 8: a workpiece stage; 9: a furnace bottom; 10: a second pipeline; 11: a source suspension bracket; 12: a first pulse power supply; 13: a second pulse power supply;
H. j, K: grooves for surface treating the austenitic stainless steel surface in fig. 2; l, M, N, P: grooves for surface treating the austenitic stainless steel surface in fig. 3; q: is a grinding scar of the surface of the untreated austenitic stainless steel of fig. 5; r: is a wear scar of the surface treated austenitic stainless steel surface of fig. 6; s: is a grinding scar of the surface of the untreated austenitic stainless steel of fig. 7; t: is a wear scar of the surface treated austenitic stainless steel surface of fig. 8; u: is a wear scar of the untreated austenitic stainless steel surface of fig. 9; v: is a wear scar of the surface treated austenitic stainless steel surface of fig. 10; w: is a wear scar of the untreated austenitic stainless steel surface of fig. 11; x: is a wear scar of the surface treated austenitic stainless steel surface in fig. 12.
Detailed Description
The present invention is further illustrated by, but is not limited to, the following examples.
The present invention is now carried out using the apparatus of fig. 1, taking 316 austenitic stainless steel as an example.
As shown in fig. 1: the plasma surface alloying furnace device comprises two pulse power supplies; a workpiece table 8 is arranged above the furnace bottom 9, and the workpiece table 8 is connected with the cathode of a first pulse power supply 12 to form a workpiece electrode; a pure titanium plate 3 is arranged above the workpiece table 8, and the pure titanium plate 3 is connected with the cathode of a second pulse power supply 13 to form a titanium alloying source electrode; the pure titanium plate 3 is suspended above the workpiece 4 through a source electrode suspension bracket 11 by the pure titanium plate 3, and the source electrode suspension bracket 11 is fixed at the furnace bottom 9; the top of the furnace shell 2 of the plasma surface alloying furnace is connected with the anodes of a first pulse power supply 12 and a second pulse power supply 13 and is grounded; a temperature measuring window 5 is arranged on the left side of the furnace shell 2, and a photoelectric thermometer 6 is arranged on the outer side of the temperature measuring window 5 and is opposite to the workpiece; the furnace bottom 9 is provided with a pipeline, the left side of the furnace bottom 9 is provided with a first pipeline 7 connected with a vacuumizing device, and the right side of the furnace bottom is provided with a second pipeline 10 connected with an aerating device.
Example 1:
(1) degreasing the austenitic stainless steel bar: soaking in an alkaline solution at the temperature of 80-90 ℃ for 10 min, wherein the alkaline solution comprises the following formula: 70 g/L sodium hydroxide; 40 g/L sodium carbonate; 20 g/L sodium phosphate; 10 g/L sodium silicate;
(2) carrying out absolute ethyl alcohol ultrasonic cleaning, distilled water cleaning and drying on the austenitic stainless steel bar with the oil removed on the surface in absolute ethyl alcohol for later use;
(3) carrying out electric spark machining on the cleaned austenitic stainless steel bar: using a molybdenum wire electric spark cutting machine to process the austenitic stainless steel bar into a wafer workpiece, and obtaining the parallel distributed groove-shaped surface appearance, wherein the processing parameters are as follows: pulse width is 8 mus, working voltage is 95V, working current is 0.2A, and stepping stroke is 0.12 mm;
(4) carrying out absolute ethyl alcohol ultrasonic cleaning, distilled water cleaning and drying on the austenitic stainless steel wafer workpiece 4 obtained in the step (3), then placing the workpiece on a workpiece table 8 in a furnace chamber 1 of a plasma surface alloying furnace, and connecting the plasma surface alloying furnace with two pulse power supplies to realize the plasma surface titanium alloying of the austenitic stainless steel wafer workpiece 4: firstly, the pure titanium plate 3 is suspended above an austenitic stainless steel round piece workpiece 4 in a furnace chamber 1 of a plasma surface alloying furnace through a source electrode suspension bracket 11 to form a workpiece electrode by connecting a workpiece table 8 with a cathode of a first pulse power supply 12, the distance between the pure titanium plate 3 and the austenitic stainless steel round piece workpiece 4 is set to be 18 mm, the pure titanium plate 3 is connected with a cathode furnace shell of a second pulse power supply 13 through the source electrode suspension bracket 11 to form a titanium alloying source electrode, and a plasma surface alloying furnace 2 is connected with anodes of the first pulse power supply 12 and the second pulse power supply 13 and is grounded;
(5) the furnace chamber 1 of the plasma surface alloying furnace is internally pumped to have the vacuum degree of 10-1Pa, introducing argon gas into the furnace chamber 1 as a carrier gas, controlling the flow at 65 sccm, maintaining the air pressure in the furnace chamber 1 at 40 Pa, starting the first pulse power supply 12, applying a direct-current bias voltage between an anode and a cathode of the first pulse power supply, generating glow discharge in the furnace chamber 1, ionizing argon atoms into plasma, gradually increasing the surface temperature of the austenitic stainless steel wafer workpiece 4 along with the increase of the direct-current bias voltage, and performing ion bombardment cleaning on the austenitic stainless steel wafer workpiece 4 for 30 min when the temperature of the workpiece is increased to 525 ℃;
(6) and starting the second pulse power supply 13, applying a direct current bias voltage between the anode and the cathode of the second pulse power supply 13, gradually increasing the direct current bias voltage, controlling the bias voltage value difference between the second pulse power supply 13 and the first pulse power supply 12 to be 200V, gradually increasing the temperature of the workpiece pole and maintaining the temperature at 950 ℃, preserving the temperature for 3 h, slowly reducing the direct current bias voltage of the second pulse power supply 13 and the first pulse power supply 12 after the heat preservation is finished, continuing the process for 30 min, and then sequentially closing the second pulse power supply 13 and the first pulse power supply 12 to slowly cool the austenitic stainless steel wafer workpiece 4 to the room temperature along with the furnace.
FIG. 2 is a surface topography of an austenitic stainless steel wafer workpiece after treatment according to example 1, and H, J, K are grooves respectively formed in the surface of the austenitic stainless steel wafer workpiece surface treated in FIG. 2; as can be seen in the figure, H, J, K indicates regions as trenches running approximately parallel.
Fig. 3 is a cross-sectional profile of the austenitic stainless steel treated in example 1, which is taken perpendicular to the surface of the austenitic stainless steel after surface treatment, and the profile of the austenitic stainless steel after surface treatment is obtained from the outside and the inside. It can be more intuitively observed from fig. 3 that the surface of the austenitic stainless steel after the surface treatment has parallel grooves. L, M, N, P: is a groove of the surface treated austenitic stainless steel surface in fig. 3.
FIG. 4 is an X-ray diffraction pattern of the austenitic stainless steel treated in example 1, and it can be seen that a plurality of titanium-containing intermetallic compounds are present in the titanium alloy layer obtained by the plasma surface alloying technique, and these compounds can improve the surface hardness of the austenitic stainless steel.
To highlight the effect of the present invention, the untreated austenitic stainless steel and the austenitic stainless steel treated in example 1 were subjected to the frictional wear test using the same test parameters. FIG. 5 is a diagram of wear scars from dry friction of untreated austenitic stainless steel with GCr 15; FIG. 6 is a graph of the wear scar of the treated austenitic stainless steel of example 1 dry rubbed with GCr 15; FIG. 7 shows untreated austenitic stainless steel and Si3N4Wear scar pattern of dry rub; FIG. 8 shows the austenitic stainless steel and Si after treatment in example 13N4Wear scar pattern of dry rub; FIG. 9 is a graph of wear scar of untreated austenitic stainless steel with grease lubricated friction of GCr 15; FIG. 10 is a graph of wear scar of treated austenitic stainless steel of example 1 with grease lubricated friction of GCr 15; FIG. 11 shows untreated austenitic stainless steel and Si3N4Wear scar map of grease lubrication friction; FIG. 12 shows the austenitic stainless steel and Si after treatment in example 13N4Wear scar pattern of grease lubrication friction.
Under the conditions of dry friction and grease lubrication friction, the alloy is mixed with GCr15 steel balls and Si3N4The ceramic balls are rubbed, under the same test conditions, the surface of the surface-treated austenitic stainless steel does not form complete and continuous grinding marks, and the obtained grinding marks areBoth the length and width are significantly less than untreated stainless steel, i.e., the surface treated austenitic stainless steel is less damaged than untreated stainless steel. Therefore, the wear resistance of the austenitic stainless steel can be obviously improved by performing surface treatment on the austenitic stainless steel.
Q: is a grinding scar of the surface of the untreated austenitic stainless steel of fig. 5; r: is a wear scar of the surface treated austenitic stainless steel surface of fig. 6; s: is a grinding scar of the surface of the untreated austenitic stainless steel of fig. 7; t: is a wear scar of the surface treated austenitic stainless steel surface of fig. 8; u: is a wear scar of the untreated austenitic stainless steel surface of fig. 9; v: is a wear scar of the surface treated austenitic stainless steel surface of fig. 10; w: is a wear scar of the untreated austenitic stainless steel surface of fig. 11; x: is a wear scar of the surface treated austenitic stainless steel surface in fig. 12. The parallel grooves formed by the spark process can significantly improve their tribological properties: during dry friction, the grooves distributed in parallel can capture abrasive dust, reduce abrasive wear and reduce the actual contact area; under the lubricating condition, the grooves distributed in parallel can store lubricating media, provide continuous lubrication and play a role in enhancing dynamic pressure effect under the fluid lubrication state, and can effectively provide lubricants under the boundary lubrication and the lean oil condition.
Example 2:
the difference between the embodiment and the embodiment 1 is that in the step (4), the distance between the pure titanium plate and the austenitic stainless steel circular piece is set to be 18 mm, the bias voltage value difference between the second pulse power supply and the first pulse power supply in the step (6) is controlled to be 300V, the temperature is kept at 900 ℃, the temperature is kept for 4 h, and other steps and parameters are the same as those in the embodiment 1.
Example 3:
the difference between the embodiment and the embodiment 1 is that in the step (4), the distance between the pure titanium plate and the austenitic stainless steel circular piece is set to be 16 mm, the bias voltage value difference between the second pulse power supply and the first pulse power supply in the step (6) is controlled to be 300V, the temperature is kept at 1000 ℃, the temperature is kept for 2 h, and other steps and parameters are the same as those in the embodiment 1.
Under the process conditions, the wear resistance of the austenitic stainless steel can be obviously improved. Under the condition of dry friction, the steel ball is mixed with GCr15 steel ball and Si3N4The test data for the rubbing of the ceramic balls are shown in table 1.
The test results obtained from the frictional wear test can be seen in table 1: the 316 austenitic stainless steel was surface treated to the parameters shown in example 1, example 2 and example 3 to a wear rate that was an order of magnitude lower than that of the untreated stainless steel.
Claims (6)
1. A surface treatment method of austenitic stainless steel is characterized in that: firstly, carrying out electric spark processing on austenitic stainless steel to obtain the parallel-distributed groove-shaped surface appearance, and then obtaining a surface titanium alloy layer by adopting a plasma surface alloying technology to obtain surface-modified austenitic stainless steel;
the method comprises the following steps:
(1) degreasing the austenitic stainless steel bar: soaking in an alkaline solution at the temperature of 80-90 ℃ for 5-10 min;
(2) ultrasonically cleaning, washing by distilled water and drying the austenitic stainless steel bar with the oil removed on the surface in absolute ethyl alcohol for later use;
(3) carrying out electric spark machining on the austenitic stainless steel bar treated in the step (2): using a molybdenum wire electric spark cutting machine to process the austenitic stainless steel bar into a wafer workpiece, and obtaining the parallel distributed groove-shaped surface appearance, wherein the processing parameters are as follows: the pulse width is 5-10 mu s, the working voltage is 90-100V, the working current is 0.15-0.25A, and the stepping stroke is 0.1-0.15 mm;
(4) carrying out absolute ethyl alcohol ultrasonic cleaning, distilled water cleaning and drying on the austenitic stainless steel wafer workpiece obtained in the step (3), and then placing the workpiece on a workpiece table in a furnace cavity of a plasma surface alloying furnace, wherein the plasma surface alloying furnace is connected with two pulse power supplies;
(5) pumping the furnace chamber of the plasma surface alloying furnace to a vacuum degree of 0.1Pa, introducing argon gas into the furnace chamber as a carrier gas to maintain the pressure in the furnace chamber at 35-45 Pa, starting a first pulse power supply, applying direct current bias voltage between an anode and a cathode of the first pulse power supply, generating glow discharge in the furnace chamber, ionizing argon atoms into plasma, gradually raising the surface temperature of an austenitic stainless steel wafer workpiece along with the increase of the direct current bias voltage, and performing ion bombardment cleaning on the austenitic stainless steel wafer workpiece for 20-40 min when the temperature of the workpiece is raised to 500-550 ℃;
(6) and starting a second pulse power supply, applying a direct current bias voltage between the anode and the cathode of the second pulse power supply, gradually increasing the direct current bias voltage, controlling the bias voltage value difference between the second pulse power supply and the first pulse power supply to be 200-350V, gradually increasing the temperature of the workpiece to be 850-1000 ℃, preserving the temperature for 1-4 h, slowly reducing the direct current bias voltage of the second pulse power supply and the first pulse power supply after the heat preservation is finished, continuing the process for 30 min, and then sequentially closing the second pulse power supply and the first pulse power supply to slowly cool the austenitic stainless steel wafer workpiece to the room temperature along with the furnace.
2. The surface treatment method of an austenitic stainless steel according to claim 1, characterized in that: in the step (1), the formula of the alkaline solution is as follows: 65-75 g/L sodium hydroxide; 35-45 g/L sodium carbonate; 15-25 g/L sodium phosphate; 5-15 g/L sodium silicate.
3. The surface treatment method of an austenitic stainless steel according to claim 1, characterized in that: the plasma surface alloying furnace device comprises two pulse power supplies; a workpiece platform is arranged above the furnace bottom and is connected with the cathode of the first pulse power supply to form a workpiece electrode; a pure titanium plate is arranged above the workpiece table and connected with the cathode of the second pulse power supply to form a titanium alloying source electrode; the pure titanium plate is suspended above the workpiece through a source electrode suspension bracket, and the source electrode suspension bracket is fixed at the bottom of the furnace; the top of the furnace shell of the plasma surface alloying furnace is connected with the anodes of the first pulse power supply and the second pulse power supply and is grounded; a temperature measuring window is arranged on the left side of the furnace body, and the photoelectric thermometer is arranged on the outer side of the window and is opposite to the workpiece; the furnace bottom is provided with a pipeline, the left side of the furnace bottom is provided with a first pipeline connected with a vacuumizing device, and the right side of the furnace bottom is provided with a second pipeline connected with an aerating device.
4. The surface treatment method of an austenitic stainless steel according to claim 3, characterized in that: the distance between the pure titanium plate and the austenitic stainless steel wafer workpiece is set to be 16-22 mm.
5. The surface treatment method of an austenitic stainless steel according to claim 1, characterized in that: in the step (5), the flow rate of the argon gas is controlled to be 60-70 sccm.
6. The surface treatment method of an austenitic stainless steel according to any of claims 1 to 5, characterized in that: the method comprises the following steps:
(1) degreasing the austenitic stainless steel bar: soaking in an alkaline solution at the temperature of 80-90 ℃ for 5-10 min, wherein the formula of the alkaline solution is as follows: 65-75 g/L sodium hydroxide; 35-45 g/L sodium carbonate; 15-25 g/L sodium phosphate; 5-15 g/L sodium silicate;
(2) carrying out absolute ethyl alcohol ultrasonic cleaning, distilled water cleaning and drying on the austenitic stainless steel bar with the oil removed on the surface in absolute ethyl alcohol for later use;
(3) carrying out electric spark machining on the cleaned austenitic stainless steel bar: using a molybdenum wire electric spark cutting machine to process the austenitic stainless steel bar into a wafer workpiece, and obtaining the parallel distributed groove-shaped surface appearance, wherein the processing parameters are as follows: pulse width is 8 mus, working voltage is 95V, working current is 0.2A, and stepping stroke is 0.12 mm;
(4) carrying out absolute ethyl alcohol ultrasonic cleaning, distilled water cleaning and drying on the austenitic stainless steel wafer workpiece obtained in the step (3), then placing the workpiece on a workpiece table in a plasma surface alloying furnace, and connecting the plasma surface alloying furnace with two pulse power supplies to realize plasma surface alloying of the austenitic stainless steel wafer workpiece: firstly, connecting a workpiece platform with a cathode of a first pulse power supply to form a workpiece electrode, then hanging a pure titanium plate above an austenitic stainless steel wafer workpiece in a furnace cavity of a plasma surface alloying furnace through a source electrode suspension bracket, setting the distance between the pure titanium plate and the austenitic stainless steel wafer workpiece to be 18 mm, connecting the pure titanium plate with a cathode of a second pulse power supply through the source electrode suspension bracket to form a titanizing source electrode, and connecting a furnace shell with anodes of the first pulse power supply and the second pulse power supply and grounding;
(5) pumping the interior of a furnace chamber of a plasma surface alloying furnace to a vacuum degree of 0.1Pa, introducing argon gas serving as carrier gas into the furnace chamber, controlling the flow to be 45 sccm, maintaining the pressure in the furnace chamber to be 40 Pa, starting a first pulse power supply, applying direct current bias between an anode and a cathode of the first pulse power supply, generating glow discharge in the furnace body, ionizing argon atoms into plasma, gradually increasing the surface temperature of an austenitic stainless steel wafer workpiece along with the increase of the direct current bias, and performing ion bombardment cleaning on austenitic stainless steel for 30 min when the temperature of the workpiece electrode is increased to 525 ℃;
(6) and starting a second pulse power supply, applying a direct current bias voltage between the anode and the cathode of the second pulse power supply, gradually increasing the direct current bias voltage, controlling the bias voltage value difference between the second pulse power supply and the first pulse power supply within the range of 200V, gradually increasing the temperature of the workpiece and maintaining the temperature at 950 ℃, preserving the temperature for 3 h, slowly reducing the direct current bias voltage of the second pulse power supply and the direct current bias voltage of the first pulse power supply after the heat preservation is finished, continuing the process for 30 min, and then sequentially closing the second pulse power supply and the first pulse power supply to slowly cool the austenitic stainless steel wafer workpiece to the room temperature along with the furnace.
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