CN108863409A - 一种炉内托辊的耐高温材料 - Google Patents

一种炉内托辊的耐高温材料 Download PDF

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CN108863409A
CN108863409A CN201810601724.XA CN201810601724A CN108863409A CN 108863409 A CN108863409 A CN 108863409A CN 201810601724 A CN201810601724 A CN 201810601724A CN 108863409 A CN108863409 A CN 108863409A
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娄志浩
娄学铭
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Jiangsu Zhendong Precision Mstar Technology Ltd
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Abstract

本发明公开了一种炉内托辊的耐高温材料，耐高温材料组分按重量比例包括氧化硅5%‑10%、氮化硅5%‑10%、氮化硼5%‑7%、碳化硼3%‑9%、陶瓷粉体13%‑36%、玻璃纤维8%‑12%、连续玄武岩纤维4%‑6%、白炭黑6%‑12%、石墨烯8%‑16%、硅酸锆粉4%‑12%、氧化铝钴8%‑12%、氧化锰8%‑15%。本发明制备方法简单，制得的托辊材料具有优异的耐磨、耐高温、阻燃、抗老化的优点，使用寿命长。

Description

一种炉内托辊的耐高温材料
技术领域
本发明涉及耐高温材料制备技术领域，具体为一种炉内托辊的耐高温材料。
背景技术
退火炉是在半导体器件制造中使用的一种工艺，其包括加热多个半导体晶片以影响其电性能。热处理是针对不同的效果而设计的。可以加热晶片以激活掺杂剂，将薄膜转换成薄膜或将薄膜转换成晶片衬底界面，使致密沉积的薄膜，改变生长的薄膜的状态，修复注入的损伤，移动掺杂剂或将掺杂剂从一个薄膜转移到另一个薄膜或从薄膜进入晶圆衬底；退火炉可以集成到其他炉子处理步骤中，例如氧化，或者可以自己处理。退火炉是由专门为加热半导体晶片而设计的设备完成的。退火炉是节能型周期式作业炉，超节能结构，采用纤维结构，节电60%。
目前炉内的托辊具有一定的抗压性和耐高温性，但是长期使用后出现老化现象，使用寿命短，有待进一步改进。
发明内容
本发明的目的在于提供一种炉内托辊的耐高温材料，以解决上述背景技术中提出的问题。
为实现上述目的，本发明提供如下技术方案：一种炉内托辊的耐高温材料,耐高温材料组分按重量比例包括氧化硅5%-10%、氮化硅5%-10%、氮化硼5%-7%、碳化硼3%-9%、陶瓷粉体13%-36%、玻璃纤维8%-12%、连续玄武岩纤维4%-6%、白炭黑6%-12%、石墨烯8%-16%、硅酸锆粉4%-12%、氧化铝钴8%-12%、氧化锰8%-15%。
优选的，耐高温材料组分优选的成分配比包括氧化硅7%、氮化硅7%、氮化硼4%、碳化硼6%、陶瓷粉体14%、玻璃纤维10%、连续玄武岩纤维5%、白炭黑9%、石墨烯12%、硅酸锆粉8%、氧化铝钴10%、氧化锰8%。
优选的，其制备方法包括以下步骤：
A、将氧化硅、氮化硅、氮化硼、碳化硼、陶瓷粉体混合后加入研磨机中研磨，时间为10min-15min，得到混合物A；
B、将玻璃纤维、连续玄武岩纤维、白炭黑、石墨烯、硅酸锆粉、氧化铝钴、氧化锰混合后加入混炼机中混炼，温度为120-150℃，时间为6min-12min，得到混合物B；
C、将混合物B加入混合物A中，充分混合后将混合物加入管式电炉中，在氮气气氛下以4℃-6℃/min的升温速率升温至1150℃-1250℃，保温1h-2h，再以2℃-4℃/min的升温速率升温至1350℃-1500℃，保温4h-6h,之后关闭管式电炉，缓慢冷却至室温，即得到耐高温材料。
与现有技术相比，本发明的有益效果是：本发明制备方法简单，制得的托辊材料具有优异的耐磨、耐高温、阻燃、抗老化的优点，使用寿命长；其中，本发明中添加的氧化硅具有耐磨、抗压的优点；添加的氮化硅具有高的机械强度。耐热冲击性好；添加的碳化硼具有密度低、强度大、高温稳定性以及化学稳定性好的特点；石墨烯具有优异的光学、电学、力学特性。添加的玻璃纤维、连续玄武岩纤维能够提高耐高温材料的韧性，防止出现开裂现象，进一步延长了使用寿命。
具体实施方式
下面对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
本发明提供如下技术方案：一种炉内托辊的耐高温材料,耐高温材料组分按重量比例包括氧化硅5%-10%、氮化硅5%-10%、氮化硼5%-7%、碳化硼3%-9%、陶瓷粉体13%-36%、玻璃纤维8%-12%、连续玄武岩纤维4%-6%、白炭黑6%-12%、石墨烯8%-16%、硅酸锆粉4%-12%、氧化铝钴8%-12%、氧化锰8%-15%。
实施例一：
耐高温材料组分按重量比例包括氧化硅5%、氮化硅5%、氮化硼5%、碳化硼3%、陶瓷粉体36%、玻璃纤维8%、连续玄武岩纤维4%、白炭黑6%、石墨烯8%、硅酸锆粉4%、氧化铝钴8%、氧化锰8%。
本实施例的制备方法包括以下步骤：
A、将氧化硅、氮化硅、氮化硼、碳化硼、陶瓷粉体混合后加入研磨机中研磨，时间为10min，得到混合物A；
B、将玻璃纤维、连续玄武岩纤维、白炭黑、石墨烯、硅酸锆粉、氧化铝钴、氧化锰混合后加入混炼机中混炼，温度为120℃，时间为6min，得到混合物B；
C、将混合物B加入混合物A中，充分混合后将混合物加入管式电炉中，在氮气气氛下以4℃/min的升温速率升温至1150℃，保温1h，再以2℃/min的升温速率升温至1350℃，保温4h,之后关闭管式电炉，缓慢冷却至室温，即得到耐高温材料。
实施例二：
耐高温材料组分按重量比例包括氧化硅10%、氮化硅10%、氮化硼7%、碳化硼9%、陶瓷粉体14%、玻璃纤维8%、连续玄武岩纤维4%、白炭黑6%、石墨烯9%、硅酸锆粉5%、氧化铝钴9%、氧化锰9%。
本实施例的制备方法包括以下步骤：
A、将氧化硅、氮化硅、氮化硼、碳化硼、陶瓷粉体混合后加入研磨机中研磨，时间为15min，得到混合物A；
B、将玻璃纤维、连续玄武岩纤维、白炭黑、石墨烯、硅酸锆粉、氧化铝钴、氧化锰混合后加入混炼机中混炼，温度为150℃，时间为12min，得到混合物B；
C、将混合物B加入混合物A中，充分混合后将混合物加入管式电炉中，在氮气气氛下以6℃/min的升温速率升温至1250℃，保温2h，再以4℃/min的升温速率升温至1500℃，保温6h,之后关闭管式电炉，缓慢冷却至室温，即得到耐高温材料。
实施例三：
耐高温材料组分按重量比例包括氧化硅6%、氮化硅6%、氮化硼7%、碳化硼4%、陶瓷粉体19%、玻璃纤维11%、连续玄武岩纤维5%、白炭黑7%、石墨烯10%、硅酸锆粉6%、氧化铝钴9%、氧化锰10%。
本实施例的制备方法包括以下步骤：
A、将氧化硅、氮化硅、氮化硼、碳化硼、陶瓷粉体混合后加入研磨机中研磨，时间为10min-15min，得到混合物A；
B、将玻璃纤维、连续玄武岩纤维、白炭黑、石墨烯、硅酸锆粉、氧化铝钴、氧化锰混合后加入混炼机中混炼，温度为140℃，时间为611min，得到混合物B；
C、将混合物B加入混合物A中，充分混合后将混合物加入管式电炉中，在氮气气氛下以6℃/min的升温速率升温至1150℃，保温1h，再以2℃/min的升温速率升温至1500℃，保温6h,之后关闭管式电炉，缓慢冷却至室温，即得到耐高温材料。
实施例四：
耐高温材料组分按重量比例包括氧化硅7%、氮化硅7%、氮化硼6%、碳化硼5%、陶瓷粉体13%、玻璃纤维10%、连续玄武岩纤维6%、白炭黑6%、石墨烯9%、硅酸锆粉7%、氧化铝钴9%、氧化锰15%。
本实施例的制备方法包括以下步骤：
A、将氧化硅、氮化硅、氮化硼、碳化硼、陶瓷粉体混合后加入研磨机中研磨，时间为10min-15min，得到混合物A；
B、将玻璃纤维、连续玄武岩纤维、白炭黑、石墨烯、硅酸锆粉、氧化铝钴、氧化锰混合后加入混炼机中混炼，温度为135℃，时间为10min，得到混合物B；
C、将混合物B加入混合物A中，充分混合后将混合物加入管式电炉中，在氮气气氛下以4℃/min的升温速率升温至1180℃，保温1h，再以4℃/min的升温速率升温至1450℃，保温4h,之后关闭管式电炉，缓慢冷却至室温，即得到耐高温材料。
实施例五：
耐高温材料组分按重量比例包括氧化硅7%、氮化硅7%、氮化硼4%、碳化硼6%、陶瓷粉体14%、玻璃纤维10%、连续玄武岩纤维5%、白炭黑9%、石墨烯12%、硅酸锆粉8%、氧化铝钴10%、氧化锰8%。
本实施例的制备方法包括以下步骤：
A、将氧化硅、氮化硅、氮化硼、碳化硼、陶瓷粉体混合后加入研磨机中研磨，时间为13min，得到混合物A；
B、将玻璃纤维、连续玄武岩纤维、白炭黑、石墨烯、硅酸锆粉、氧化铝钴、氧化锰混合后加入混炼机中混炼，温度为135℃，时间为9min，得到混合物B；
C、将混合物B加入混合物A中，充分混合后将混合物加入管式电炉中，在氮气气氛下以5℃/min的升温速率升温至1200℃，保温2h，再以3℃/min的升温速率升温至1400℃，保温5h,之后关闭管式电炉，缓慢冷却至室温，即得到耐高温材料。
实验例：
采用本发明各实施例制得的材料进行性能测试，得到数据如下表：
抗压强度（MPA） 耐高温（℃）
实施例一 85 1680
实施例二 88 1650
实施例三 90 1690
实施例四 88 1650
实施例五 92 1720
本发明制备方法简单，制得的托辊材料具有优异的耐磨、耐高温、阻燃、抗老化的优点，使用寿命长；其中，本发明中添加的氧化硅具有耐磨、抗压的优点；添加的氮化硅具有高的机械强度。耐热冲击性好；添加的碳化硼具有密度低、强度大、高温稳定性以及化学稳定性好的特点；石墨烯具有优异的光学、电学、力学特性。添加的玻璃纤维、连续玄武岩纤维能够提高耐高温材料的韧性，防止出现开裂现象，进一步延长了使用寿命。
尽管已经示出和描述了本发明的实施例，对于本领域的普通技术人员而言，可以理解在不脱离本发明的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型，本发明的范围由所附权利要求及其等同物限定。

Claims (3)

1.一种炉内托辊的耐高温材料,其特征在于：耐高温材料组分按重量比例包括氧化硅5%-10%、氮化硅5%-10%、氮化硼5%-7%、碳化硼3%-9%、陶瓷粉体13%-36%、玻璃纤维8%-12%、连续玄武岩纤维4%-6%、白炭黑6%-12%、石墨烯8%-16%、硅酸锆粉4%-12%、氧化铝钴8%-12%、氧化锰8%-15%。
2.根据权利要求1所述的一种炉内托辊的耐高温材料,其特征在于：耐高温材料组分优选的成分配比包括氧化硅7%、氮化硅7%、氮化硼4%、碳化硼6%、陶瓷粉体14%、玻璃纤维10%、连续玄武岩纤维5%、白炭黑9%、石墨烯12%、硅酸锆粉8%、氧化铝钴10%、氧化锰8%。
3.实现权利要求1所述的一种炉内托辊的耐高温材料的制备方法,其特征在于：其制备方法包括以下步骤：
A、将氧化硅、氮化硅、氮化硼、碳化硼、陶瓷粉体混合后加入研磨机中研磨，时间为10min-15min，得到混合物A；
B、将玻璃纤维、连续玄武岩纤维、白炭黑、石墨烯、硅酸锆粉、氧化铝钴、氧化锰混合后加入混炼机中混炼，温度为120-150℃，时间为6min-12min，得到混合物B；
C、将混合物B加入混合物A中，充分混合后将混合物加入管式电炉中，在氮气气氛下以4℃-6℃/min的升温速率升温至1150℃-1250℃，保温1h-2h，再以2℃-4℃/min的升温速率升温至1350℃-1500℃，保温4h-6h,之后关闭管式电炉，缓慢冷却至室温，即得到耐高温材料。
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