CN108843855A - A kind of microfluidic system and normally closed micro-valve, control method - Google Patents
A kind of microfluidic system and normally closed micro-valve, control method Download PDFInfo
- Publication number
- CN108843855A CN108843855A CN201811008782.8A CN201811008782A CN108843855A CN 108843855 A CN108843855 A CN 108843855A CN 201811008782 A CN201811008782 A CN 201811008782A CN 108843855 A CN108843855 A CN 108843855A
- Authority
- CN
- China
- Prior art keywords
- spool
- valve
- micro
- normally closed
- microchannel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 17
- 239000000463 material Substances 0.000 claims abstract description 23
- 239000011159 matrix material Substances 0.000 claims abstract description 15
- 239000012780 transparent material Substances 0.000 claims abstract description 7
- 239000000155 melt Substances 0.000 claims abstract description 5
- 238000002309 gasification Methods 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 238000009500 colour coating Methods 0.000 claims description 4
- 230000035515 penetration Effects 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 14
- 238000012545 processing Methods 0.000 abstract description 9
- 230000010354 integration Effects 0.000 abstract description 4
- 239000012530 fluid Substances 0.000 description 13
- 238000005516 engineering process Methods 0.000 description 6
- 238000002844 melting Methods 0.000 description 6
- 230000008018 melting Effects 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 239000003153 chemical reaction reagent Substances 0.000 description 5
- 238000013461 design Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 239000011162 core material Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000008033 biological extinction Effects 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 230000009466 transformation Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 239000012782 phase change material Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 206010054949 Metaplasia Diseases 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000571 coke Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 201000010099 disease Diseases 0.000 description 1
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 230000015689 metaplastic ossification Effects 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000033772 system development Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000010257 thawing Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0036—Operating means specially adapted for microvalves operated by temperature variations
Abstract
The invention discloses a kind of microfluidic system and normally closed micro-valves, control method.The normally closed micro-valve includes being provided with the intracorporal microchannel of base, spool is equipped in the microchannel, which is separated into first pipe and second pipe for microchannel, and first pipe is connected to second pipe when spool melts or gasifies;The spool is identical as the tube wall material of microchannel, has transparent material between the outside wall surface and spool of described matrix.Micro-valve structure of the invention is simple, can solve micro-valve and microfluidic system integration problem, and spool is identical as the tube wall material of microchannel, thus greatly reduces difficulty of processing, thereby reduces production cost.
Description
Technical field
The present invention relates to a kind of microfluidic system and normally closed micro-valves, control method, belong to micron-sized valve control field.
Background technique
Micro-valve microfluidic system in microfluidic system refers to will be involved by biological or chemical field using micro-processing technology
Various Operations Analyst functions, such as pretreatment, mixing, reaction, separation and the detection of sample be integrated on a microchip
Analysis system.Micro-fluidic chip has micromation, integrated, efficient, quick, atomic reagent consumption and at low cost etc. excellent
Point can be widely applied to the various fields such as biomedicine, medical diagnosis on disease treatment, environment measuring and protection, military affairs and space probation,
It is forward position and the hot spot of Present S & T Development.Crucial execution unit of the micro-valve as microfluidic system, is flowed in chip channel
Body has flowed the device of control metering function, and effect is the open and close for realizing fluid channel and the switching of fluid flow direction.It
Effect in microfluidic system is equivalent to as the effect of diode in integrated circuits, is the most important portion of microfluidic system
One of part.The development of micro-valve is an important symbol of microfluidic system development level, and the research of micro-valve has become current miniflow
Control a branch the most active in system research.
Micro-fluidic chip is a kind of science and technology to be manipulated fluid for main feature in micro-meter scale space, tool
Have the function on miniature to one several square centimeter chips of the basic function in the laboratories such as biology, chemistry, therefore is otherwise known as
Chip lab.Micro-valve fluid control technology therein is exactly a kind of micro-control key technology.Existing micro-valve, which is broadly divided into, to be not required to
It wants the passive valves of external impetus or control and realizes the unlatching of valve and the active valve of closure using extraneous actuating power.
The active valve that each laboratory uses at present mainly has pneumatic micro valve, direct torque micro-valve, phase transformation valve, thermal expansion valve
Deng.Wherein pneumatic micro valve is the active valve of one kind using extraneous gas as brake force.Such valve is mostly double-channel structure, is divided into
Fluid channel and gas passage are changed using the air pressure of gas passage, realize the closure and unlatching of fluid channel micro-valve.Torque control
Micro-valve processed be using microchannel above screw control the film of its end to realize closure degree.When downward the turn of the screw, film
Compressive deformation makes channel blockage, and after Unscrewed screw, film resiles, and channel is opened.The actuating member of phase transformation valve is paraffin etc.
The relatively low substance of melting point is at different phase by changing temperature, to realize the switching function of valve.The invention belongs to
One kind of phase transformation valve.Thermal expansion valve is prepared by two kinds of different thermal bimorphs of the coefficient of expansion, is applied not using diffusion resistance
Same power, makes wafer expansion, and when the temperature increases, valve is opened.
In recent years, micro-valve is quickly grown, but it is substrate that conventional micro-valve device, which generallys use the materials such as glass, silicon wafer,
Utilize Si micromachining technique(Such as photoetching, etching)Be process, process equipment and raw material are required it is high, processing cost compared with
It is high;Micro-valve structure is also complex at present, mostly nonplanar layer stereo structure, need to using multilayer silicon bonding technique processing and
At, technique very complicated, the process-cycle is longer;And this nonplanar micro-valve structure it is not easy of integration in microfluidic system,
Increase the integrated difficulty of microfluidic system.Therefore the commercialization degree of micro-valve is not still high at present.
Chinese invention patent publication number CN1512095C disclose it is a kind of for opening and closing the ice valve of micro-/ nano fluid channel,
It includes:One, which is placed on the semiconductor cooler for flowing the fluid channel lower end for having fluid and one, is located at the system of the semiconductor cooler
The radiator of cold end or heating end is equipped with the thermally conductive of low thermal resistance high strength insulating varniss composition between semiconductor cooler and radiator
Insulating layer;One is located at the microheater to heat fluid in fluid channel of fluid channel upper surface;The microheater
It to be passed through the steamdrum of steam, be the Mini electric device of charged, or is the miniature laser heater with laser heating source;Half
Conductor refrigerator is made of multiple semiconductor refrigerating wired in parallel;It is a kind of ideal easy convenient for controlling without any moving component
In integrated micro-valve structure.However the patent due to using ice as spool, therefore, it is impossible to for have reagent storage, just
It is not no spool under normal state;Further, ice is easy to react with reagent, and ice is oversized as spool(It can not
Accomplish micron order), cannot achieve precision control, in addition, if the patent is used for micro-fluidic chip, then also needing in chip
Implantation circuit is wanted, the manufacture difficulty of chip will be further increased in this, reduces its reliability.
Summary of the invention
The present invention is intended to provide a kind of microfluidic system and normally closed micro-valve, control method, which utilizes laser
Micro-valve in microfluidic system is opened as actuating power, micro-valve structure of the invention is simple, can solve micro-valve and micro-fluidic system
System integration problem, and spool is identical as the tube wall material of microchannel, thus greatly reduces difficulty of processing, thereby reduces life
Produce cost.
To achieve the goals above, the technical scheme adopted by the invention is that:
A kind of normally closed micro-valve, is structurally characterized in that, the normally closed micro-valve includes being provided with the intracorporal microchannel of base, and feature exists
In equipped with spool in the microchannel, which is separated into first pipe and second pipe for microchannel, and when spool is molten
First pipe is connected to second pipe when changing or gasifying;The spool is identical as the tube wall material of microchannel, described matrix
There is transparent material between outside wall surface and spool.
When spool melts or gasifies, first pipe is connected to second pipe as a result,.
As a result, spool of the invention normal temperature state bottom spool it is non-fusible or gasification, micro-valve is normally closed, when needing to open, lead to
Cross heating device(Preferably laser heats)Spool is set to melt or gasify, to guarantee that microchannel is unimpeded.
To those skilled in the art, when needing to melt spool, conventional thinking is to design the fusing point of valve core material
At the material melting point lower than matrix or the tube wall of microchannel, can guarantee to will not influence matrix when spool fusing in this way.
The present invention has found that the spool of the normally closed micro-valve and the tube wall of microchannel are material of the same race after further investigation
It is made more preferable instead, most important benefit is machined to that this is lower, and test proves, fusing or gasification spool are pinpointed by laser,
It can guarantee that the tube wall of microchannel will not be melted while spool melts or gasifies.
According to an embodiment of the invention, can also make further optimization to the present invention, the following are the skills formed after optimization
Art scheme:
Preferably, described matrix is composed of chip cover board and chip pad, shape between the chip cover board and chip pad
At the microchannel;The chip cover board and/or chip pad are made of translucent material;It is preferred that the spool, chip cover board
It is integrated with chip pad.Chip cover board and chip pad double as valve body as a result, and this integral structure solves micro-
The problem of valve and integrated chip, while technology difficulty and processing cost are reduced, and there is better sealing.
Preferably, the fusing point of the spool is 40 DEG C -170 DEG C;It is preferred that the gasification temperature of the spool is 80 DEG C -300 DEG C.
It is preferred that the spool of the normally closed micro-valve is made of high molecular polymer.The high molecular polymer refers to be repeated to be formed by connecting by key
High molecular weight(Usually up to 10~106)Compound.
On tube wall in order to guarantee the first pipe and/or the tube wall of second pipe is equipped with run-off.
In order to avoid spool blocks microchannel in fusing or reduces the through-current capacity of microchannel, the depth of the run-off
Degree is opposite first pipe or the recessed 0.5mm-1mm of second pipe inner wall;And/or the run-off is along microchannel length
The size in direction is 0.5mm-1mm.In this way, spool can automatically flow into run-off in fusing.The design of run-off can be protected
Liquid after demonstrate,proving spool fusing flows into run-off, the flow for influencing microchannel is avoided, to guarantee that microchannel is unimpeded.
The size design of run-off not only ensure that fusing after spool do not influence the flow of microchannel, but also avoid result in pedestal or
The thickness of cover board is blocked up.
In general, realizing the quantitative control of precision for convenience, the diameter of the spool is 0.3mm-1mm, preferably
0.5mm;And/or the internal diameter of the microchannel is 0.3mm-1mm, preferably 0.5mm.
For the ease of spool by rapid melting, extinction efficiency is improved, at least one outer surface of the spool is equipped with dark color
Coating or the spool are made of black material;It is preferred that the dark color coating is black coating.Fusing or gas can be shortened in this way
Change the time of spool.
Based on the same inventive concept, the present invention also provides a kind of biological chip miniflow control systems, which is characterized in that packet
The laser light source for including the normally closed micro-valve and being arranged on the outside of matrix, the laser light source for melting or gasify the spool and
It is connected to the first pipe with second pipe.
The present invention separates the body portion of micro-valve and actuating power source as a result, simplifies the production work of micro-valve entirety
Skill makes to be easier integrated micro-valve in microfluidic system, considerably reduces the manufacturing cost of microfluidic system.
Laser of the present invention is a kind of artificial light, is able to achieve directional lighting, and light stability, and wavelength is single, energy
Greatly.
Preferably, the laser light source is blue and violet laser sources;It is preferred that the wave-length coverage of the laser is 400nm-
980nm。
Based on the same inventive concept, the present invention also provides a kind of control method of biological chip miniflow control system,
Include the following steps:
S1, laser light source are arranged on the outside of normally closed micro-valve;
S2, laser light source emit laser, and the transparent material between the outside wall surface and spool of laser penetration matrix is simultaneously radiated at described
On spool, spool is melted or gasified, normally closed micro-valve is opened, and the wave-length coverage of laser irradiation time 2s-30s, laser are
400nm-980nm。
Micro-valve of the invention has started a kind of new micro-valve unlatching thinking, and laser is opened insertion miniflow as actuating power
Valve body structure in control system, the major advantage of micro-valve:The response of micro-valve control process is fast, stability is high, can effectively realize industry
Metaplasia produces and practical application.
Micro-valve of the present invention is the key that microfluidic system execution unit, realizes the stream of micro-valve under the effect of the laser
Switching of the body channel from normally closed to normally opened.
Compared with prior art, the beneficial effects of the invention are as follows:
1, the actuating power steady sources of micro-valve, are not take up micro-fluidic chip resource;Valve body structure is simple, micro-valve and micro-fluidic chip
It is easily integrated, process equipment and raw material are of less demanding, and production cost is greatly lowered, and make suitable for mass production and commercialization
With.
2, micro-valve opening speed is fast, and most fast 2s or so can puncture spool, realizes the unlatching of micro-valve.Laser energy is high, expands
The big material range of micro-valve, is not limited to low melting point phase-change material.Laser beam energy is concentrated, when control laser spot is with puncturing
Between, it can be achieved that only hit micro-valve spool, the other parts structure and material of microfluidic system are not damaged, have and widely answer
Use prospect.
3, the body portion of micro-valve and actuating power source are separated, simplifies the manufacture craft of micro-valve entirety, makes miniflow
It is easier integrated micro-valve in control system, considerably reduces the manufacturing cost of microfluidic system, is applicable to extensive industry
The generation and use of the microfluidic system of change.
4, the spool of normally closed micro-valve of the invention and the tube wall of microchannel are made of material of the same race, and processing cost is lower.
Compared with CN1512095C, the present invention does not need refrigeration part, and spool can be accomplished to the water of 0.3mm-1mm
It is flat, it is easy to implement precision control.In addition, micro-valve of the invention is normally closed micro-valve, it is only necessary to it is opened when specific, without
It needs to be again switched off.Finally, spool of the invention will not react with reagent, pollution reagent is avoided.
Detailed description of the invention
Fig. 1 is the vertical section structure schematic diagram of the micro-valve of an embodiment of the present invention;
Fig. 2 is the micro-valve open state figure of the microfluidic system of an embodiment of the present invention;
Fig. 3 is the vertical section structure schematic diagram of another embodiment of the invention.
In figure
1- cover board;2- microchannel;3- pedestal;4- spool;5- laser light source;6- matrix;21- first pipe;22- second is managed
Road;23- run-off.
Specific embodiment
Come that the present invention will be described in detail below with reference to attached drawing and in conjunction with the embodiments.It should be noted that in the feelings not conflicted
Under condition, the feature in embodiment and embodiment in the present invention be can be combined with each other.For sake of convenience, hereinafter as occurred
"upper", "lower", "left", "right" printed words only indicate consistent with the upper and lower, left and right direction of attached drawing itself, do not play limit to structure
It is set for using.
A kind of microfluidic system, as shown in Fig. 2, including laser light source 5 and as shown in Figure 1 normal being arranged on the outside of chip
Close micro-valve, the laser light source 5 be used to melt or gasify the normally closed micro-valve spool 4 and open the normally closed micro-valve.Such as Fig. 1
It is shown, it is equipped with spool 4 in the microchannel 2, which is separated into first pipe 21 and second pipe 22 for microchannel 2,
And first pipe 21 is connected to second pipe 22 when spool 4 is opened;The spool 4 is identical as the tube wall material of microchannel 2,
There is transparent material between the outside wall surface and spool 4 of described matrix 6, the purpose that transparent material is arranged is easy for laser and passes through, with
Just fixed point fusing or the spool that gasifies.In the present embodiment, the mode that normally closed micro-valve is opened preferably uses laser fixed point to add
The spool of the normally closed micro-valve of heat, the spool fusing of micro-valve normally closed in this way, so that first pipe 21 and second pipe 22 form and lead to
Road.
In order to facilitate manufacture, a kind of embodiment is that the normally closed micro-valve includes spool 4 and by chip cover board 1 and chip pad
3 valve bodies formed, form microchannel 2 between the chip cover board 1 and chip pad 3, the spool 4 is blocked in the miniflow
In pipeline 2.The chip cover board 1 and/or chip pad 3 are made of translucent material, and the fusing point of the spool 4 is higher than room temperature and valve
The fusing point of core 4 is below the fusing point of cover board 1 and pedestal 3.The fusing point of the spool 4 is 40 DEG C -170 DEG C, preferably 100 DEG C -120
℃.The boiling point of the spool 4 is 80 DEG C -300 DEG C.The spool is made of high molecular polymer.The diameter of the spool is
0.5mm.The internal diameter of the microchannel 2 is 0.5mm.The internal diameter of the first pipe 4 and second pipe 9 is 0.5mm.
The material not strong to laser absorption rate, it is difficult to generate fuel factor and melt or gasify, can be smeared on its surface layer deep
Color coating, preferably black coating or the spool are made of black material, using dark color to the strong absorbent of laser, improve
Its surface makes its temperature distortion to the absorption efficiency of laser photon, opens micro fluid circuits.
The laser light source 5 is blue and violet laser sources.The wave-length coverage of the laser is 400nm-980nm.
When manufacture, first pipe and second pipe are directly opened up on matrix, first pipe and second pipe coaxial line are set
It sets and is separated by the spool.The aperture end of first pipe and second pipe is blocked by plunger.
As shown in figure 3, the upstream side of the spool, which is equipped with, is located at first pipe 21 as another embodiment of the invention
On run-off 23 or the downstream side of the spool be equipped with the run-off 23 being located on second pipe 22, in best first pipe 21
With run-off 23 is equipped on second pipe 22.In this way, when spool melts, it can be in automatic stream run-off, to avoid shadow
The caliber for ringing first pipe 21 and second pipe 22, influences flow.The depth of the run-off is opposite first pipe 21 or the
The recessed 0.5mm-1mm of two pipelines, 22 inner wall.The run-off along 22 length direction of first pipe 21 or second pipe ruler
Very little is 0.5mm-1mm.
The present invention using laser penetrability and focus positioning, by specific wavelength, power, power level laser penetration table
Face translucent material focuses on predetermined micro-valve position, recycles the fuel factor of laser energy, so that spool 2 is absorbed laser photon and turns
Turn to thermal energy.Spool 2 is heated by deformation, thawing(Spool state as shown in Figure 2), gasification etc. processes, make originally block
Pipeline is unimpeded, realizes micro-fluidic pipeline by closed state to open state.
Micro-valve is not only that spool 2 Micro-flow pipe can be jammed in, and to realize that pipeline is closed, can also directly utilize core
Piece material makes micro-valve, at this point, the spool 4, chip cover board 1 and chip pad 3 are integrated.It can be directly in chip
Micro-valve structure is placed on chip structure when design, the machine-shaping together with chip.Such micro-valve structure there is no micro-valve with
The integration problem of chip can be greatly lowered processing cost and technology difficulty, and have more preferable airtightness.
Micro-valve structure of the invention is simple, and the spool 2 for blocking pipeline need to be only injected on miniflow access.
Micro-valve start-up course is as follows:First with the penetrability of laser, make the transparent cover plate on laser penetration upper layer, by laser coke
Away from alignment micro-valve spool position.Due to the high-energy of laser, after absorbing laser photon energy, spool 2 can be heated rapidly spool
Deformation is melted or gasification, divides out along tube wall(As shown in Figure 2), the pipeline of blocking is just got through originally, realizes micro-valve
It opens, most fast 2s of laser irradiation time or so, the wave-length coverage of laser is 400nm-980nm.Design according to the present invention
The embodiment of run-off, when spool mutually becomes liquid, under the action of gravity and surface tension, the spool flow direction for becoming liquid is overflow
The position Liu Chi, to realize the unimpeded of microchannel 2.
Laser light source as actuating power is located at chip exterior, is not required to install with integrated chip, and performance is stablized, and can repeatedly weigh
It is multiple to use, be conducive to the commercial applications of micro-fluidic chip.
Micro-valve of the invention possesses that structure is simple, simple processing compared to common micro-valve, is not required to integrate, low in cost, holds
The advantages that easily producing in enormous quantities.
For being not easy the spool of extinction, dark pigment can be smeared on its surface, to improve its extinction efficiency, to realize
The control function of micro-valve.
The normally closed micro-valve of the present embodiment has the following advantages that:
1, the actuating power steady sources of micro-valve, are not take up micro-fluidic chip resource, and valve core structure is simple, and micro-valve is easy to collect with chip
At process equipment and raw material are of less demanding, and production cost is greatly lowered, and are suitable for mass production and commercially use.
2, micro-valve opening speed is fast, and 2s or so can puncture spool, realizes the unlatching of micro-valve.Laser energy is high, expands
The material range of micro-valve is not limited to low melting point phase-change material.Laser beam energy is concentrated, and laser spot and breakdown time are controlled,
It can be achieved only to hit micro-valve spool, the other parts structure and material of microfluidic system do not damaged, had a wide range of applications
Prospect.
3, normally closed micro-valve and actuating power source separate, and simplify the manufacture craft of micro-valve entirety, make in microfluidic system
More easily integrated micro-valve considerably reduces the manufacturing cost of microfluidic system, is applicable to the miniflow of extensive industrialization
The generation and use of control system.
The content that above-described embodiment illustrates should be understood as that these embodiments are only used for being illustrated more clearly that the present invention, without
For limiting the scope of the invention, after the present invention has been read, those skilled in the art are to various equivalent forms of the invention
Modification each fall within the application range as defined in the appended claims.
Claims (10)
1. a kind of normally closed micro-valve, which is characterized in that the normally closed micro-valve includes being provided with matrix(6)Interior microchannel(2),
It is characterized in that, the microchannel(2)It is interior to be equipped with spool(4), the spool(4)By microchannel(2)It is separated into first pipe
(21)And second pipe(22);The spool(4)With microchannel(2)Tube wall material it is identical, described matrix(6)Outside wall surface
With spool(4)Between have transparent material.
2. normally closed micro-valve according to claim 1, which is characterized in that described matrix(6)By chip cover board(1)With chip bottom
Seat(3)It is composed, the chip cover board(1)And chip pad(3)Between form the microchannel(2);The chip lid
Plate(1)And/or chip pad(3)It is made of translucent material;It is preferred that the spool(4), chip cover board(1)And chip pad(3)
It is integrated.
3. normally closed micro-valve according to claim 1, which is characterized in that the spool(4)Fusing point be 40 DEG C -170 DEG C;It is excellent
Select the spool(4)Gasification temperature be 80 DEG C -300 DEG C.
4. normally closed micro-valve according to claim 1, which is characterized in that the first pipe(21)Tube wall on and/or
Two pipelines(22)Tube wall be equipped with run-off(23).
5. normally closed micro-valve according to claim 4, which is characterized in that the run-off(23)Depth be opposite first pipe
Road(21)Or second pipe(22)The recessed 0.5mm-1mm of inner wall;
And/or the run-off(23)Along microchannel(2)The size of length direction is 0.5mm-1mm.
6. normally closed micro-valve according to any one of claims 1-5, which is characterized in that the spool(4)Diameter be
0.3mm-1mm, preferably 0.5mm;And/or the microchannel(2)Internal diameter be 0.3mm-1mm, preferably 0.5mm.
7. normally closed micro-valve according to any one of claims 1-5, which is characterized in that the spool(4)At least one
Outer surface is equipped with dark coating or the spool(4)It is made of black material;It is preferred that the dark color coating is black coating.
8. a kind of biological chip miniflow control system, which is characterized in that including such as of any of claims 1-7 normally closed micro-
Valve and setting are in matrix(6)The laser light source in outside(5), the laser light source(5)For the spool that melts or gasify(4)And make
The first pipe(21)And second pipe(22)Connection.
9. microfluidic system according to claim 8, which is characterized in that the laser light source(5)For blue and violet laser sources;
It is preferred that the wave-length coverage of the laser is 400nm-980nm.
10. a kind of control method of the biological chip miniflow control system as described in any one of claim 8-9, which is characterized in that
Include the following steps:
S1, laser light source(5)It is arranged on the outside of the normally closed micro-valve such as any one of claim 1-7;
S2, laser light source(5)Emit laser, laser penetration matrix(6)Outside wall surface and spool(4)Between transparent material and photograph
It penetrates in the spool(4)On, by spool(4)Melt or gasification, normally closed micro-valve are opened, laser irradiation time 2s-30s, laser
Wave-length coverage be 400nm-980nm.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811008782.8A CN108843855B (en) | 2018-08-31 | 2018-08-31 | Microfluidic system, normally-closed micro valve and control method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811008782.8A CN108843855B (en) | 2018-08-31 | 2018-08-31 | Microfluidic system, normally-closed micro valve and control method |
Publications (2)
Publication Number | Publication Date |
---|---|
CN108843855A true CN108843855A (en) | 2018-11-20 |
CN108843855B CN108843855B (en) | 2024-03-12 |
Family
ID=64188886
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201811008782.8A Active CN108843855B (en) | 2018-08-31 | 2018-08-31 | Microfluidic system, normally-closed micro valve and control method |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN108843855B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114768899A (en) * | 2022-03-28 | 2022-07-22 | 广州万德康科技有限公司 | Micro-fluidic chip applying phase change valve and in-vitro diagnostic device |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1369039A (en) * | 1999-06-28 | 2002-09-11 | 加利福尼亚技术学院 | Microfabricated elastomeric valve and pump systems |
CN101050417A (en) * | 2006-04-04 | 2007-10-10 | 三星电子株式会社 | Valve unit and apparatus having the same |
CN101126465A (en) * | 2006-08-16 | 2008-02-20 | 三星电子株式会社 | Valve unit, reaction apparatus with the same, and method of forming valve in channel |
US20080314465A1 (en) * | 2007-06-21 | 2008-12-25 | Samsung Electronics Co., Ltd. | Microfluidic valve, method of manufacturing the same, and microfluidic device comprising the microfluidic valve |
US20100276005A1 (en) * | 2009-04-30 | 2010-11-04 | Comm. a I'energie atom. et aux energies alterna. | Single use microfluidic valve |
CN208703274U (en) * | 2018-08-31 | 2019-04-05 | 湖南乐准智芯生物科技有限公司 | A kind of biological detection chip and normally closed micro-valve |
-
2018
- 2018-08-31 CN CN201811008782.8A patent/CN108843855B/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1369039A (en) * | 1999-06-28 | 2002-09-11 | 加利福尼亚技术学院 | Microfabricated elastomeric valve and pump systems |
CN101050417A (en) * | 2006-04-04 | 2007-10-10 | 三星电子株式会社 | Valve unit and apparatus having the same |
CN101126465A (en) * | 2006-08-16 | 2008-02-20 | 三星电子株式会社 | Valve unit, reaction apparatus with the same, and method of forming valve in channel |
US20080314465A1 (en) * | 2007-06-21 | 2008-12-25 | Samsung Electronics Co., Ltd. | Microfluidic valve, method of manufacturing the same, and microfluidic device comprising the microfluidic valve |
US20100276005A1 (en) * | 2009-04-30 | 2010-11-04 | Comm. a I'energie atom. et aux energies alterna. | Single use microfluidic valve |
CN208703274U (en) * | 2018-08-31 | 2019-04-05 | 湖南乐准智芯生物科技有限公司 | A kind of biological detection chip and normally closed micro-valve |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114768899A (en) * | 2022-03-28 | 2022-07-22 | 广州万德康科技有限公司 | Micro-fluidic chip applying phase change valve and in-vitro diagnostic device |
CN114768899B (en) * | 2022-03-28 | 2024-04-16 | 广州万德康科技有限公司 | Microfluidic chip applying phase change valve and in-vitro diagnosis device |
Also Published As
Publication number | Publication date |
---|---|
CN108843855B (en) | 2024-03-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP2002895B1 (en) | Microfluidic device for simultaneously conducting multiple analyses | |
CN107012086B (en) | Real-time fluorescence PCR thermal cycle device and PCR appearance | |
CN102580799B (en) | Machining method of micro-drop and micro-fluidic control chip | |
CN107051598B (en) | PCR microfluidic chip, preparation and use methods thereof and PCR equipment | |
CN108679301B (en) | Shielding system, control method and biochip between a kind of micro-valve and liquid | |
JP2012507680A (en) | MICRO HEAT PIPE ARRAY HAVING FINE TUBE ARRAY, ITS MANUFACTURING METHOD, AND HEAT EXCHANGE SYSTEM | |
CN205824328U (en) | A kind of micro-fluidic chip and be applied to the micro-valve of magnetic cock body of micro-fluidic chip | |
CN208703274U (en) | A kind of biological detection chip and normally closed micro-valve | |
CN209178400U (en) | A kind of PCR instrument with sealer function | |
CN204948606U (en) | Two phase flow microchannel cold plates | |
CN206351047U (en) | Microfluid tweezers based on micro-nano fiber | |
JPWO2013153912A1 (en) | Valve, microfluidic device, microstructure, valve seat, valve seat manufacturing method, and microfluidic device manufacturing method | |
CN108843855A (en) | A kind of microfluidic system and normally closed micro-valve, control method | |
CN208295287U (en) | A kind of normally closed micro-valve and microfluidic system | |
CN107619781A (en) | A kind of single reaction temperature control high flux micro-fluidic chip nucleic acid amplifier | |
CN108591610A (en) | A kind of microfluidic system and micro-valve, control method | |
Gui et al. | Microfluidic phase change valve with a two-level cooling/heating system | |
US11378340B2 (en) | Heat transfer devices and methods of cooling heat sources | |
CN107193304B (en) | A kind of recyclegas temperature control device suitable for a variety of biological samples | |
WO2010060302A1 (en) | A heat pipe with arranged micro-pore tubes, its fabricating method and a heat exchanging system | |
CN106024736B (en) | Integrated low-grade fever tube radiator based on MEMS technology | |
CN207976487U (en) | A kind of biological detection chip of the normally closed micro-valve of band | |
CN110988022B (en) | Sleeve type cooling water jacket structure and gravity assisted heat pipe detection device and detection method | |
CN210344518U (en) | Phase change microvalve device | |
CN110107736B (en) | Phase-change micro-valve device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |