CN210344518U

CN210344518U - Phase change microvalve device

Info

Publication number: CN210344518U
Application number: CN201920635334.4U
Authority: CN
Inventors: 桂林; 张仁昌; 叶子
Original assignee: Technical Institute of Physics and Chemistry of CAS
Current assignee: Technical Institute of Physics and Chemistry of CAS
Priority date: 2019-05-06
Filing date: 2019-05-06
Publication date: 2020-04-17
Anticipated expiration: 2029-05-06

Abstract

The utility model relates to a micro-fluidic technology field provides a phase transition microvalve device, including fluid miniflow channel and heat conduction runner, the laminating of heat conduction runner's first end the fluid miniflow channel, cold source system and/or heat source system are connected to heat conduction runner's second end, and the cold source system includes the cold source fluid, and heat source system includes the heat source fluid, just the heat conduction runner with be equipped with microporous structure on fluid miniflow channel interconnect's the position. The utility model provides a phase transition microvalve device simplifies device structure and microfabrication manufacturing process, realizes miniaturation and integration to have with low costs, easy operation, controllability are good, compatible wide characteristics.

Description

Phase change microvalve device

Technical Field

The utility model relates to a micro-fluidic technical field especially relates to a phase transition microvalve device.

Background

The microfluidic technology can realize the control of microfluid in a micro-channel, and is widely applied to the fields of gene sequencing, drug screening, new material research and development, disease diagnosis and the like.

The microvalve is used as a key component in a microfluidic system, and plays roles of closing or opening a microchannel, changing the flow direction of microfluid and the like in an intricate and complex microchannel network. The micro valve is matched with parts of other microfluidic systems, and can realize the functions of orderly sample introduction, mixing, storage and the like of various microfluids.

At present, common micro valves in the micro-fluidic technology include pneumatic valves, mechanical valves, phase change valves and the like. Compared with other kinds of micro valves, the phase change valve has the advantages of no moving part, simplicity in manufacturing and the like, and the micro ice valve is a common phase change valve.

The micro-ice valve blocks the fluid micro-channel by cooling and solidifying a part of fluid (working medium) in the fluid micro-channel, so that the function of closing the fluid micro-channel is realized; and then heating the solidified working medium and melting the solidified working medium into liquid to realize the function of opening the fluid micro-channel.

A common micro-ice valve is composed of a fluid micro-channel and a semiconductor refrigerating plate, and the semiconductor refrigerating plate is usually disposed below the fluid micro-channel. The phase state of fluid in the fluid micro-channel is changed by utilizing the refrigerating and heating functions of the semiconductor refrigerating sheet, so that the aim of closing or opening the fluid micro-channel is fulfilled. In order to rapidly close and open the micro-channel by adopting the semiconductor refrigeration piece, a multi-stage semiconductor refrigeration piece and a complex heat dissipation system are generally needed, and the problems of low heat dissipation efficiency, slow state conversion, complex structure, high cost and the like exist.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

The utility model discloses aim at solving one of the technical problem that exists among prior art or the correlation technique at least: the existing phase-change micro valve has the defects of complex structure, slow switching between a closing state and an opening state and high cost.

The utility model aims at: the phase change micro-valve device has the advantages of simplifying the structure of the device and the micro-processing manufacturing process, realizing miniaturization and integration, along with low cost, simple operation, good controllability and wide compatibility.

(II) technical scheme

In order to solve the technical problem, the utility model provides a phase transition microvalve device, including fluid microchannel and heat conduction runner, the laminating of heat conduction runner's first end fluid microchannel, cold source system and/or heat source system are connected to heat conduction runner's second end, and cold source system includes cold source fluid, and heat source system includes heat source fluid, just heat conduction runner with be equipped with microporous structure on fluid microchannel interconnect's the position.

In some technical solutions, preferably, the microporous structure is uniformly distributed on the end surfaces of the heat conduction channel and the fluid microchannel, which are attached to each other, and the heat conductor in the heat conduction channel and the working medium in the fluid microchannel are separated on two sides of the microporous structure.

In some embodiments, preferably, the processing method of the microporous structure includes a photolithography process, and a convex stage is formed between adjacent microporous structures.

In some embodiments, it is preferable that two heat conduction channels are symmetrically connected to two sides of the fluid microchannel.

In some embodiments, preferably, the fluid microchannel includes a plurality of inlets and a plurality of outlets, one inlet and one outlet communicating with each other form a fluid tributary, and a side surface of each fluid tributary is connected to the heat conducting channel.

In some embodiments, it is preferable that the fluidic microchannel comprises one inlet, a plurality of outlets or a plurality of inlets and one outlet, and the fluidic microbranches forming a plurality of common inlets or outlets are formed;

or the fluid micro-channel comprises a plurality of inlets and a plurality of outlets, and a plurality of fluid micro-branches which are communicated in a staggered mode are formed.

In some technical solutions, it is preferable that a heat conductor is filled in the heat conducting flow channel, and the heat conductor is in direct contact with the cold source fluid and the heat source fluid.

In some technical solutions, preferably, the heat conduction flow channel is filled with a low-melting-point metal material, and the low-melting-point metal material includes a metal simple substance and a metal alloy.

In some embodiments, it is preferable that the cold source fluid includes a low temperature liquid fluid, and the temperature of the low temperature liquid fluid ranges from-200 ℃ to-100 ℃; the heat source fluid comprises a liquid or gaseous high temperature fluid, and the temperature of the high temperature fluid ranges from 40 ℃ to 60 ℃.

In some embodiments, preferably, the cryogenic liquid fluid includes liquid nitrogen, liquid oxygen, liquid argon; the high-temperature fluid comprises hot steam and hot water.

In some embodiments, it is preferable that at least one receiving structure is connected to the second end of the heat conducting flow channel, and the receiving structure is used for containing a cold source fluid and/or a hot source fluid.

In some embodiments, preferably, the second ends of the plurality of heat-conducting flow channels are connected to one accommodating structure, and the first end of each heat-conducting flow channel is connected to the fluid microchannel.

(III) advantageous effects

Compared with the prior art, the utility model has the advantages of it is following:

(1) the method comprises the steps that a cold source system or a heat source system is adopted to provide cold or heat for a working medium, the phase state of the working medium is changed, cold source fluid of the cold source system enables the working medium to be cooled and changed into a solid phase, a fluid micro-channel is closed, the flow of the working medium is blocked, similarly, heat source fluid of the heat source system enables the working medium to absorb heat and be heated and changed into a flowing state, the fluid micro-channel is opened, and the working medium flows; the cold source fluid and the heat source fluid respectively provide cold energy and heat energy, so that the working medium is ensured to be rapidly converted into a phase state, the structure is simplified, and the cost is reduced;

(2) and the cold source system and the heat source system transmit cold or heat to the working medium through the heat conduction flow channel, so that cold source fluid, heat source fluid and the working medium are prevented from being mixed, and the cleanness of various fluids is ensured.

Drawings

FIG. 1 is a schematic structural view of a preferred embodiment of the single-side opening and closing of a single fluid microchannel of the phase change microvalve device of the present invention;

fig. 2 is a schematic view of a partially enlarged structure a in fig. 1 of the phase change microvalve device of the present invention;

FIG. 3 is a schematic diagram of a preferred structure of the double-sided opening and closing of a single micro fluid channel of the phase change microvalve device of the present invention;

FIG. 4 is a schematic structural view of a preferred embodiment of the simultaneous on/off regulation of a multi-fluid micro-channel of the phase change micro-valve device of the present invention;

fig. 5 is a schematic structural view of a preferred embodiment of the multi-fluid micro-branch on-off adjustment of the phase change micro-valve device according to the present invention;

fig. 6 is a schematic structural view of another preferred embodiment of the multi-fluid micro-branch on-off adjustment of the phase change micro-valve device according to the present invention;

in the drawings, 1. a containment structure; 2. a microporous structure; 3. a heat conducting flow channel; 4. a fluid microchannel; 5. a phase change region; 6. and (4) a boss.

Detailed Description

The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.

With the development of micro-nano processing technology, micro-fluidic devices tend to be miniaturized and integrated. Key components in microfluidic systems, such as microvalves, require structures that facilitate miniaturization and integration, and are characterized by ease of fabrication, low cost, ease of operation, and the like. When the phase change valve works, other substances do not need to be added, fluid in the micro-channel cannot be polluted, and the phase change valve is suitable for opening and closing adjustment of the channel in the micro-fluidic system. But current phase change valve exists that the structure is complicated, the radiating effect is poor, with high costs scheduling problem, the utility model provides a phase change microvalve device simplifies device structure and microfabrication manufacturing process, realizes miniaturation and integration to have with low costs, easy operation, controllability are good, compatible wide characteristics.

Referring to fig. 1 to 6, the present invention provides a preferred embodiment of a phase change microvalve device, which includes a fluid microchannel 4 and a heat conducting channel 3, wherein a working medium flows in the fluid microchannel 4, and the on-off of the fluid microchannel 4 needs to be controlled to adjust the flowing state of the working medium, and the heat conducting channel 3 conducts cold or heat to adjust the phase state of the working medium in the fluid microchannel 4, thereby realizing the on-off adjustment of the fluid microchannel 4.

The first end of the heat conduction flow channel 3 is attached to the fluid micro flow channel 4, and the second end of the heat conduction flow channel 3 is connected with the cold source system and/or the heat source system. The cold source system and the heat source system transmit cold or heat to the fluid micro-channel 4 through the heat conduction channel 3, when the cold source system transmits the cold to the fluid micro-channel 4, the working medium in the fluid micro-channel 4 is cooled until the phase state of the working medium is changed, the working medium is cooled and changed into a solid phase, and the flowing of the working medium in the fluid micro-channel 4 is blocked. When the working medium needs to start flowing in the fluid micro-channel 4, the cold source system finishes transmitting cold energy to the fluid micro-channel 4, the heat source system transmits heat to the fluid micro-channel 4 through the heat conduction channel 3, so that the phase state of the working medium in the fluid micro-channel 4 is changed to conduct the fluid micro-channel 4, the working medium absorbs the heat, the phase state is changed from a solid phase to a liquid phase or a gas phase, and the working medium returns to the flowing state.

The fluid micro-channel 4 and the heat-conducting channel 3 are integrated on the micro-fluidic chip, the fluid micro-channel 4 and the heat-conducting channel 3 are coplanar, the heat-conducting channel 3 is provided with the side surface of the fluid micro-channel 4, and the heat-conducting channel 3 is attached to the side surface of the fluid micro-channel 4. The second end of the heat conducting flow channel 3 may also be provided as an inlet for a heat conductor, which is poured into the heat conducting flow channel 3 through the second end of the heat conducting flow channel 3.

Referring to fig. 1 and 2, a microporous structure 2 is disposed on an end surface of the heat conducting channel 3 and the fluid microchannel 4, a heat conductor in the heat conducting channel 3 transmits heat or cold to a working medium in the fluid microchannel 4 through the microporous structure 2, the heat conductor and the working medium directly contact with each other through the microporous structure 2 to transmit the heat or cold, but the microporous structure 2 can prevent the heat conductor from flowing into the fluid microchannel 4 and the working medium from flowing into the fluid microchannel 3, the microporous structure 2 not only has a function of transmitting the heat or cold, but also can separate the heat conductor and the working medium, prevent the heat conductor from mixing with the working medium, and ensure the independence and cleanness of the heat conductor and the working medium.

The area in the fluid microchannel 4 corresponding to the end face where the heat conduction channel 3 and the fluid microchannel 4 are attached to each other forms a phase change area 5, the range of the phase change area 5 can be expanded or reduced in the length direction of the fluid microchannel 4 by the position of the end face where the heat conduction channel 3 and the fluid microchannel 4 are attached to each other, and the range of the phase change area 5 is related to the cold source system and the heat source system providing cold and heat to the heat conduction channel 3.

The cold source fluid or the heat source fluid can rapidly change the temperature of the working medium in the phase change region 5 around the microporous structure 2, so that the phase change of the working medium is caused, and the fluid micro-channel 4 is closed or opened.

The cold source system or the heat source system transmits cold or heat to the heat conducting channel 3, the heat conducting channel 3 transmits the cold or heat to the working medium in the fluid micro-channel 4, the heat conductor in the heat conducting channel 3 directly transmits the cold or heat to the working medium through the microporous structure 2, the transmission efficiency of the cold or heat is improved, the heat conductor and the working medium are kept separated, and the working medium is prevented from being polluted by fluid mixing.

The heat conduction flow channel 3 is filled with a heat conductor, the heat conductor plays a role in cold or heat transmission, the heat conductor is in direct contact with a cold source fluid of a cold source system and a heat source fluid of a heat source system in the accommodating structure 1, the heat conductor is in direct contact with the cold source fluid and the heat source fluid, heat transmission efficiency is improved, and the fluid micro flow channel 4 is adjusted by being opened and closed quickly. The inlet of the heat conduction flow channel 3 is an open structure, and the cold source fluid or the heat source fluid in the containing structure 1 directly contacts with the heat conductor through the inlet of the heat conduction flow channel 3.

Specifically, the heat conducting flow channel 3 is filled with a low-melting-point metal material, the heat conductor comprises the low-melting-point metal material, the low-melting-point metal material belongs to a good heat conductor, the heat conducting effect is good, the performance is stable, and the microporous structure 2 cannot be penetrated due to large molecular tension. Preferably, the low melting point metal material includes a metal simple substance and a metal alloy, and preferably metallic bismuth or a bismuth alloy is used.

The material of the micro-fluidic chip belongs to a poor heat conductor, Polydimethylsiloxane (PDMS), glass or quartz is preferably adopted to prevent heat loss, and the low-melting-point metal material has better heat-conducting property than the material of the micro-fluidic chip, so that heat conduction is ensured.

After the low-melting-point metal material is heated by the heat source fluid to be liquid, the microporous structure 2 can prevent the liquid low-melting-point metal material from entering the fluid microchannel under the action of surface tension. Meanwhile, the working medium (solid or liquid) is blocked by the low-melting-point metal material and cannot enter the heat conduction flow channel 3. The temperature in the heat conduction flow channel 3 is reduced, and when the temperature is restored to the solidification point of the low-melting-point metal material, the low-melting-point metal material is cooled and solidified into a solid in the heat conduction flow channel 3. Generally, the low-melting-point metal material is in a solid state at room temperature, and therefore, when the working medium flows through the fluid micro flow channel 4 under the driving of pressure at room temperature, the low-melting-point metal material does not flow out of the heat conduction flow channel 3, and the low-melting-point metal material is not washed away.

At room temperature, a small amount of solid low-melting-point metal material can be left to be directly contacted with the cold source fluid or the heat source fluid. The micro-fluidic chip material belongs to a poor conductor of heat, and the low-melting-point metal material belongs to a good conductor of heat. Therefore, after the cold source fluid or the heat source fluid contacts the low-melting-point metal material, the heat can be rapidly transferred to the fluid in the phase change region 5 through the low-melting-point metal material without being diffused to the microfluidic chip material around the heat conduction channel 3. The size of the range of the phase change region 5 can be varied by controlling the amount of cold provided by the cold source fluid. Therefore, the phase change micro-valve device has the advantages of simple operation, good controllability, wide compatibility and the like.

The cold source fluid of the cold source system comprises low-temperature liquid fluid, the temperature range of the low-temperature liquid fluid is between-200 ℃ and-100 ℃, and the cold source fluid preferably adopts liquid nitrogen, or liquid oxygen, or liquid argon, liquid air and the like; the heat source fluid comprises liquid or gaseous high-temperature fluid, the temperature of the high-temperature fluid is in the range of 40-60 ℃, and hot air and hot water are preferably selected.

At least one containing structure 1 is connected to a second end of the heat conducting flow channel 3, and the containing structure 1 is used for containing a cold source fluid and/or a hot source fluid.

The second end of the heat conduction flow channel 3 can be connected with an accommodating structure 1, the cold source system and the cold source fluid in the cold source system and the heat source fluid in the heat source system share one accommodating structure 1, and when the fluid micro flow channel 4 needs to be closed, the cold source system supplies the cold source fluid to the accommodating structure 1 until the working medium in the fluid micro flow channel 4 is converted into a solid phase, so that the flow of the working medium is blocked; when the fluid micro-channel 4 needs to be opened, the cold source fluid of the cold source system is led out of the accommodating structure 1, the heat source system provides the heat source fluid into the accommodating structure 1, the working medium absorbs the heat of the heat source fluid to change into a fluid state, the fluid micro-channel 4 is opened, and the working medium flows stably.

In addition, the second end of the heat conducting flow channel 3 can be further connected with two accommodating structures 1, cold source fluid of the cold source system and heat source fluid of the heat source system are respectively introduced into one accommodating structure 1, when the fluid micro flow channel 4 needs to be closed, the cold source system introduces the cold source fluid into the accommodating structure 1 communicated with the cold source system, when the fluid micro flow channel 4 needs to be opened, the cold source fluid in the cold source system is led out of the accommodating structure 1, and the heat source system introduces the heat source fluid into the accommodating structure 1 communicated with the heat source system.

Furthermore, the second end of the heat conducting flow channel 3 may be further connected to a plurality of accommodating structures 1, the cold source system and the heat source system may share the plurality of accommodating structures 1, when the fluid micro flow channel 4 needs to be closed, the cold source fluid is introduced into all the accommodating structures 1, and when the fluid micro flow channel 4 needs to be opened, the cold source fluid is guided out of the accommodating structures 1 and introduced into the heat source fluid in all the accommodating structures 1. A plurality of containment structures 1 may also be distributed to the cold source system and the heat source system as required, for example, the containment structure 1 includes five, two of which are communicated with the cold source system and three of which are communicated with the heat source system.

The receiving structure 1 may be configured as a receiving groove, a receiving pipe, a receiving ball, etc.

Further, the microporous structures 2 are uniformly distributed on the end faces, which are attached to the heat conduction flow channel 3 and the fluid micro flow channel 4, and the contact area between the heat conductor and the working medium is increased by uniformly distributing the microporous structures 2.

The microporous structure 2 is preferably a microwell or an array of microwells. The shape of the micropores is preferably circular, or rectangular, or trapezoidal. The distance between the micropores is preferably between 5 and 20 microns.

The processing method of the microporous structure 2 comprises photoetching processing, and a boss 6 is formed between every two adjacent microporous structures 2. The processing method of the microporous structure 2 may be any processing method capable of processing the microporous structure 2 having an appropriate size, such as laser processing.

In the phase-change micro-valve device, a heat-conducting flow channel 3 and a fluid micro-flow channel 4 are integrated on a micro-fluidic chip and synchronously manufactured by adopting a micro-processing manufacturing process. Preferably, the micromachining process uses a conventional soft etching technique and uses the same mask to etch the heat conduction channel 3 and the fluid micro-channel 4 with equal height and coplanarity on the microfluidic chip material, and the microporous structure 2 at the intersection of the heat conduction channel 3 and the fluid micro-channel 4 can also be synchronously manufactured. Specifically, a hole puncher is used for manufacturing a micropore at the second end of the heat conduction flow channel 3 to serve as a cold source fluid groove or a heat source fluid containing structure 1, the diameter of the containing structure 1 is preferably 5-2 micrometers, and the containing structure 1 and the heat conduction flow channel 3 are equal in height. Preferably, the microfluidic chip uses PDMS as a base material. Therefore, the phase change micro valve with micron scale size can be manufactured by the micro-processing manufacturing process, and the manufacturing is simple and the cost is low. And the phase change micro valve device is very convenient to integrate a plurality of phase change micro valve devices or integrate the phase change micro valve devices and other components in a microfluidic system.

In some embodiments, as shown in fig. 1, the fluidic micro-channel 4 has an inlet and an outlet, and the heat-conducting channel 3 is disposed on only one side of the fluidic micro-channel 4. The working principle of the phase change micro-valve device is as follows: when the fluid micro-channel 4 needs to be closed, the accommodating structure 1 connected with the second end of the heat conducting channel 3 is an accommodating groove for accommodating cold source fluid, a proper amount of cold source fluid is regularly put into the accommodating groove, the temperature of the low-melting-point metal material in the heat conducting channel 3 is rapidly reduced, the liquid working medium in the phase change region 5 is cooled and solidified into a solid, the solid state can be maintained for a long time, and the phase change is controlled to only occur in the phase change region 5. The size of the phase change region 5 changes with the amount of the source fluid placed in the holding tank; when the fluid micro-channel 4 needs to be opened, the accommodating structure 1 connected with the second end of the heat-conducting channel 3 is an accommodating tank for accommodating heat source fluid, and after the heat source fluid is placed into the accommodating tank, the temperature of the low-melting-point metal material in the heat-conducting channel 3 is rapidly increased, so that the solid working medium in the phase-change region 5 is heated and melted into liquid, and the conduction of the fluid micro-channel 4 is realized.

In some technical solutions, as shown in fig. 3, two heat conduction flow channels 3 are symmetrically arranged on two sides of a fluid microchannel 4, each heat conduction flow channel 3 is connected with a cold source system and a heat source system, and a microporous structure 2 is arranged at a connection part of each heat conduction flow channel 3 and the fluid microchannel 4. Each heat conducting flow channel 3 is filled with a low melting point metal material and has an inlet.

The fluidic microchannel 4 comprises one inlet, one outlet, or one inlet, a plurality of outlets, or a plurality of inlets, one outlet, or a plurality of inlets, a plurality of outlets. When the number of the inlets or outlets of the fluid micro-channels 4 is more than one, the fluid micro-channels 4 comprise fluid micro-streams, one inlet and one outlet which are communicated with each other form one fluid micro-stream, and each fluid micro-stream is symmetrically provided with two heat conduction channels 3.

The working principle of the phase change micro-valve device is as follows: when the fluid micro-channel 4 needs to be closed, the cold source system fills the cold source fluid into the containing structure 1, and a proper amount of cold source fluid is regularly put into the containing structure 1 connected with the two heat conduction channels 3 at the same time, so that the temperature of the low-melting-point metal material is rapidly reduced, the liquid working medium in the phase change region 5 is cooled and solidified into a solid, the solid state can be maintained for a long time, and the phase change is controlled to only occur in the phase change region 5. When the fluid micro-channel 4 needs to be opened, the heat source system fills the heat source fluid into the containing structure 1, the heat source fluid is simultaneously put into the containing structures 1 of the two heat conduction channels 3, the temperature of the low-melting-point metal material is rapidly increased, and then the solid working medium in the phase change region 5 is heated and melted into liquid.

Compared with the mode that the heat conduction flow channel 3 is arranged on one side of the fluid micro-flow channel 4, the heat conduction flow channel 3 is additionally arranged on the other side of the fluid micro-flow channel 4, so that the response speed of the phase change micro-valve device can be increased, and the working stability of the phase change micro-valve device can be improved.

In some technical solutions, as shown in fig. 4, one accommodating structure 1 may provide a cold source fluid and/or a heat source fluid to a plurality of heat conducting flow channels 3 at the same time, one accommodating structure 1 is connected to second ends of the plurality of heat conducting flow channels 3, the plurality of heat conducting flow channels 3 are integrated on one accommodating structure 1, a first end of each heat conducting flow channel is connected to a fluid microchannel 4, and each guiding flow channel provides cold or heat to the fluid microchannel 4 connected thereto.

Preferably, the heat conduction flow channels 3 are connected to the side wall of the containing structure 1 and distributed radially to the periphery of the containing structure 1, and each heat conduction flow channel 3 can be connected with one fluid micro-channel 4 and simultaneously adjusts a plurality of fluid micro-channels 4, so that the efficiency is improved. In addition, all the heat conducting flow channels 3 can also be connected to an annular or special-shaped fluid micro-flow channel 4, and meanwhile, the opening and closing of different parts on one fluid micro-flow channel 4 are adjusted, so that the connection and disconnection of the fluid micro-flow channel 4 and other flow channels are adjusted.

In addition, each heat conduction flow channel 3 can be connected with an additional accommodating structure for supplementing cold or heat. The heat conducting flow channel 3 is additionally connected with an accommodating structure which is suitable for fluid micro-flow channels 4 or fluid micro-tributaries with different cold or heat requirements when being used for supplementing cold or heat.

Specifically, there are 6 fluidic channels 4, and each fluidic channel 4 has an inlet and an outlet independently. The number of the heat conduction flow channels 3 is equal to that of the fluid

micro-flow channels

4, 6 heat conduction flow channels are provided, each heat conduction flow channel 3 is only crossed with one fluid micro-flow channel 4, and the micropore structure 2 is arranged at the crossed position. The heat conducting flow channels 3 are filled with a low-melting-point metal material and share a receiving structure 1. The number of the phase change regions 5 is equal to that of the

fluid micro-channels

4, and 6 are provided. The number of the fluid microchannels 4 is not limited to 6, and may be set according to actual needs.

The working principle of the phase change micro-valve device is as follows: the shared accommodating structure 1 is connected with a cold source system and/or a heat source system, the heat conduction flow channels 3 are connected on the accommodating structure 1, the accommodating structure 1 simultaneously provides cold or heat for all the heat conduction flow channels 3, and simultaneously controls the opening and closing of the fluid micro-channels 4 and the fluid micro-branches; when a plurality of fluid microchannels 4 or a plurality of fluid tributaries in the fluid microchannels 4 need to be closed, the accommodating structure 1 is connected with a cold source system, the cold source system regularly puts a proper amount of cold source fluid into the accommodating structure 1, the temperature of working media in all the fluid microchannels 4 or all the fluid tributaries is rapidly reduced, the liquid working media in the phase change regions 5 of the fluid microchannels 4 or the fluid tributaries are cooled and solidified into solids, the solids can be kept for a long time, and the phase change is controlled to only occur in the phase change regions 5. When the fluid micro-channel 4 or the fluid micro-branch needs to be opened, the containing structure 1 is connected with a heat source system, the heat source system regularly puts a proper amount of heat source fluid into the containing structure 1, the temperature of the working medium on the fluid micro-branch or the fluid micro-channel 4 is rapidly raised, and then the solid working medium in the phase change region 5 is heated and melted into liquid.

The technical scheme shows that all parts can be easily integrated together, the heat conduction flow channels 3 share one containing structure 1, the opening and closing states of the fluid micro-flow channels 4 can be controlled simultaneously, and the integration level of the micro-flow control chip is improved compared with the technical scheme that one heat conduction flow channel 3 is connected with one independent containing structure 1.

In some embodiments, as shown in fig. 5 and 6, the fluid microchannel 4 includes a plurality of fluid tributaries, an inlet and an outlet that are communicated with each other form a fluid tributary, a side surface of each fluid tributary is connected with the heat conduction channel 3, and one or two of the heat conduction channels 3 are symmetrically arranged.

As shown in fig. 5, the fluidic microchannel 4 includes an inlet, a plurality of outlets or a plurality of inlets, and an outlet, and forms a plurality of fluid micro-streams sharing the inlet or outlet; as shown in fig. 6, the fluidic microchannel 4 includes a plurality of inlets and a plurality of outlets, forming a plurality of fluid substreams that are in staggered communication.

Specifically, a plurality of fluid microcurrents are integrated on one fluid microchannel 4, so that the fluid microcurrents can be opened and closed and adjusted, and the flow direction of fluid in the fluid microchannel 4 can be changed. As shown in fig. 5, the number of inlets and outlets of the fluid microchannel 4 is different, and specifically, the fluid microchannel 4 has one inlet and 6 outlets, and the inlet and the one outlet can form one branch flow to form 6 fluid microflow branch flows. The number of the heat conduction flow channels 3 is equal to the number of the outlets of the

fluid micro-channels

4, 6 heat conduction flow channels are provided, each heat conduction flow channel 3 is only crossed with one fluid micro-branch flow or an independent fluid micro-channel 4, and the micropore structure 2 is arranged at the crossed position. The heat conducting flow channels 3 are filled with a low melting point metal material and have an inlet. The number of the phase change regions 5 is equal to that of the heat conduction flow channels 3, and the number of the phase change regions is 6.

Each fluid micro-branch can be connected with one heat conduction flow channel 3, or two heat conduction flow channels 3 are symmetrically arranged, and each heat conduction flow channel 3 is connected to a cold source system or a heat source system.

The working principle of the phase change micro-valve device is as follows: when one or more fluid micro-branches in the fluid micro-channel 4 needs to be closed, the accommodating structure 1 connected with the heat conducting channel 3 on the fluid micro-branches is connected with a cold source system, a proper amount of cold source is regularly put into the accommodating structure 1, the temperature of the liquid working medium in the phase change region 5 on the fluid micro-branches is rapidly reduced, the working medium is cooled and solidified into a solid, the solid state can be kept for a long time, and the phase change is controlled to only occur in the phase change region 5. When one or more fluid micro-branches in the fluid micro-flow channel 4 needs to be opened, the containing structure 1 connected with the heat conducting flow channel 3 on the fluid micro-branches is connected with a heat source system, and after a heat source is introduced into the containing structure 1, the temperature of the phase change area 5 on the fluid micro-branches is rapidly raised, so that the phase state of the working medium in the phase change area 5 on the fluid micro-branches is changed, and the working medium is melted into liquid.

As shown in fig. 5, a structure of a fluid micro channel 4 in different forms is provided, which is suitable for micro fluidic chips with different structures, and increases the integration diversity of the phase change micro valve device and widens the application range of the micro ice valve device.

The structure of the fluid microchannel 4 is not limited to the structure shown in fig. 5, and the fluid microchannel 4 may have one inlet, a plurality of outlets, or a plurality of inlets and one outlet.

Further, as shown in fig. 6, the fluid microchannel 4 includes a plurality of inlets and a plurality of outlets, and any one of the inlets and one of the outlets are communicated to form one fluid micro-stream, so that a plurality of fluid micro-streams communicated in a staggered manner can be formed.

Specifically, the fluid microchannel 4 has 3 inlets and 3 outlets, each inlet and each outlet can form a fluid microcurrent flow, and the substreams intersect with each other to form a plurality of "+" intersections. Each fluid micro-branch is connected with a heat conduction flow channel 3, the number of the heat conduction flow channels 3 is twice that of the '+' intersection, and 4 heat conduction flow channels 3 are arranged. Each heat conduction flow channel 3 is crossed with a fluid micro-flow channel 4, a microporous structure 2 is arranged at the crossed position, phase change regions 5 are formed at the crossed positions, and the number of the phase change regions 5 is equal to that of the heat conduction flow channels 3, namely 4.

The principle of changing the flow direction of a fluid by using a phase change microvalve device is as follows: by regularly controlling the phase state of the working medium in the phase change zone 5, the flow direction of the working medium at the "+" shaped intersection can be changed.

For example, the working medium is first allowed to flow from the upper and left ends of the "+" intersection only to the lower end of the "+" intersection. At the moment, cold source fluid is introduced into the accommodating structure 1 of the heat conduction flow channel 3 at the right end of the + -shaped intersection, a proper amount of cold source fluid is regularly put into the accommodating structure 1, the temperature of the low-melting-point metal material in the heat conduction flow channel 3 is rapidly reduced, the liquid working medium in the phase change area at the right end of the + -shaped intersection is further cooled and solidified into a solid, the solid state can be kept for a long time, and the phase change is controlled to only occur in the phase change area 5. Then the working medium flows from the upper end and the left end of the plus-shaped intersection to the right end of the plus-shaped intersection. At the moment, the containing structure 1 of the heat conduction flow channel 3 at the right end of the + -shaped intersection is filled with heat source fluid, the heat source fluid is put into the containing structure 1, the temperature of the low-melting-point metal material in the heat conduction flow channel 3 is rapidly increased, and the solid working medium in the phase change area 5 at the right end of the + -shaped intersection is melted into liquid. The accommodating structure 1 connected with the heat conduction flow channel 3 at the lower end of the cross is in a shape of a cross, cold source fluid is introduced into the accommodating structure 1, a proper amount of cold source fluid is regularly put into the accommodating structure 1, the temperature of the low-melting-point metal material in the heat conduction flow channel 3 is rapidly reduced, the liquid working medium in the phase change area 5 at the lower end of the cross is further cooled and solidified into a solid, the solid state can be kept for a long time, and the phase change is controlled to only occur in the phase change area 5.

The fluid micro-channels 4 form a multi-cross structure, and the opening and closing of each fluid micro-branch is adjusted by regulating the phase state of the working medium in the phase change regions 5 at different positions, so that the flow direction of the working medium in the fluid micro-channels 4 is realized, and the flow direction of the fluid can be changed simply.

In the description of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood as appropriate by those of ordinary skill in the art.

In the description of the present invention, the terms "plurality", and "plural" mean two or more unless otherwise specified.

The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a phase transition microvalve device which characterized in that, includes fluid microchannel and heat conduction runner, the laminating of heat conduction runner's first end fluid microchannel, cold source system and/or heat source system are connected to heat conduction runner's second end, and cold source system includes cold source fluid, and heat source system includes heat source fluid, just heat conduction runner with be equipped with microporous structure on fluid microchannel interconnect's the position.

2. The phase-change microvalve device of claim 1, wherein the microporous structure is uniformly distributed on the end face where the heat conducting channel and the fluid microchannel are attached to each other, and the heat conductor in the heat conducting channel and the working medium in the fluid microchannel are separated on both sides of the microporous structure.

3. The phase change microvalve device of claim 2, wherein a land is formed between adjacent ones of said microporous structures.

4. The phase-change microvalve device of claim 1, wherein two of said heat conducting flow channels are symmetrically connected on both sides of said fluid microchannel.

5. The phase change microvalve device of claim 1, wherein said fluid microchannel comprises a plurality of inlets and a plurality of outlets, one inlet and one outlet communicating with each other to form fluid microbursts, each of said fluid microbursts having said thermally conductive channel attached to a side thereof.

6. The phase change microvalve device of claim 5 wherein said fluid microchannel comprises one inlet, multiple outlets or multiple inlets, one outlet, said fluid micrometric stream forming a plurality of common inlets or outlets;

7. The phase-change microvalve device according to claim 1, wherein said heat conducting flow channel is filled with a heat conductor, said heat conductor being in direct contact with said cold source fluid and said heat source fluid;

the heat conductor comprises a low-melting-point metal material, and the low-melting-point metal material comprises a metal simple substance and a metal alloy.

8. The phase change microvalve device of claim 1, wherein said cold source fluid comprises a cryogenic liquid fluid having a temperature in the range of-200 ℃ to-100 ℃; the heat source fluid comprises liquid or gaseous high-temperature fluid, and the temperature of the high-temperature fluid ranges from 40 ℃ to 60 ℃;

the low-temperature liquid fluid comprises liquid nitrogen, liquid oxygen and liquid argon;

the high-temperature fluid comprises hot steam and hot water.

9. The phase change microvalve device of any one of claims 1-8, wherein at least one containment structure is connected to the second end of the thermally conductive flow path, the containment structure being configured to contain a cold source fluid and/or a hot source fluid.

10. The phase change microvalve device of claim 9, wherein one of said containment structures is connected to second ends of a plurality of said thermally conductive flow channels, each of said thermally conductive flow channels having a first end to which said fluidic microchannel is connected.