CN100363669C - Ice valve for opening and closing micron/nano fluid path - Google Patents
Ice valve for opening and closing micron/nano fluid path Download PDFInfo
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- CN100363669C CN100363669C CNB021597502A CN02159750A CN100363669C CN 100363669 C CN100363669 C CN 100363669C CN B021597502 A CNB021597502 A CN B021597502A CN 02159750 A CN02159750 A CN 02159750A CN 100363669 C CN100363669 C CN 100363669C
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Abstract
The present invention relates to an ice valve for opening and closing a micro/nanometer fluid flow passage. The ice valve for opening and closing a micro/nanometer fluid flow passage comprises a semiconductor refrigerator, a heat radiator and a miniature heater, wherein the semiconductor refrigerator is placed at the lower end of a micro flow passage in which fluid flows, and the heat radiator is positioned at a refrigeration end or a heating end of the semiconductor refrigerator. A heat-conducting insulating layer composed of insulating varnish with low thermal resistance and high strength is arranged between the semiconductor refrigerator and the heat radiator. The miniature heater which is positioned at the upper end surface of the micro flow passage is used for heating the fluid in the micro flow passage. The miniature heater is a steam bag in which steam is led, a miniature electric heater with a power supply, or a miniature laser heater with a laser heating source. The semiconductor refrigerator is formed by the parallel connection of a plurality of semiconductor refrigeration modules. The ice valve for opening and closing a micro/nanometer fluid flow passage does not have the any moving part, so the control is convenient. Thus, the ice valve for opening and closing a micro/nanometer fluid flow passage is a micro valve structure which is easy to be integrated.
Description
Technical field
The present invention relates to a kind of embolism that forms when utilizing fluid self to freeze with the block fluid passage, open the ice valve of fluid passage during thawing; Be particularly related to a kind ofly by means of semiconductor refrigerating sheet, block fluid passage when making fluid in the micro-/ nano fluid passage freezing melts the ice valve of opening the fluid passage when being heated.
Background technique
Valve is the indispensable vitals of pipe-line system, and it is used for connecting or blocking ducted flowing medium, perhaps is used for the flow and the pressure of control media, also or be used to guarantee the proper functioning and the safety of whole tubing.Through exploration over a long time, people become better and approaching perfection day by day to the grasp of conventional valve technology, but in recent years along with little/receive the develop rapidly of yardstick fluid device technology, many new problems have been proposed, the exploration of micro channel valve has been caused people's great attention.
Before 50 years, scientist uses large-scale integrated circuit (LSI) that electronic circuit is become dwindling of thousands of times, has brought the revolution of electronic technology, also allows PC afterwards come into huge numbers of families.Today, same thing also occurs in microfluid microchannel field.Further expansion such as the Human Genome Project requires a large amount of crisscross micro-channel, little reaction cabin, and little valve, micro control system carries out integrated processing, to accelerate the paces of genetic analysis.The microfluid pipe-line system is integrated good by numerous scientists, and people wish can be easily to wherein complexity control is carried out in transmission, solution mixing, heating and the cooling of little sample by it.
But one of the biggest problem that runs into aspect the microfluid pipe-line system is integrated is exactly the realization of little valve, because carry out two basic demands that are integrated with of micro channel: the one, need the little valve of reliable integrability; The 2nd, need be very easily to this slightly valve carry out addressing and control.At this, people have carried out various trials to the design of little valve, control the runner switch, utilize the dislocation of two miniature porous slabs to produce the break-make effect such as utilizing the inflation pressure to allow the miniature elastic film produce deformation, or utilize the stifled road etc. that stops of action of small valve block.But because more or less all there are moving element in these valves and are not easy to electric control, be difficult to carry out integrated and centralized control, in the face of micro flow channel integrated the time, often have too many difficulties to cope with.
Obviously, little for adapting to/as to receive the development of fluid device technology, a kind of simple in structure, movement-less part and little valve of being convenient to electric control are demanded urgently occurring.
Summary of the invention
The objective of the invention is to: a kind of moving element that need not is provided, and is convenient to electric control, simple, little valve arrangement of integrability.A kind of freezing and melting the ice valve of blocking and connect runner of microfluid self of utilizing is provided;
Technological scheme of the present invention is as follows:
The ice valve that is used to open and close the micro-/ nano fluid passage that the present invention relates to, it is characterized in that, comprise: one is placed on the radiator 1 that flows and have the semiconductor cooler 3 and of micro channel 6 lower ends of fluid to be positioned at the refrigeration end of this semiconductor cooler 3 or heat end, is provided with the heat conductive insulating layer that the low thermal resistance high strength insulating varniss constitutes between semiconductor cooler 3 and the radiator 1; One is arranged in the microheater 5 in order to heating micro channel 6 fluids of micro channel 6 upper-end surfaces; Described microheater 5 for the steam bag that feeds steam, be the miniature electric heater in charged source, or for being with the miniature laser heater in laser heating source; Described semiconductor cooler 3 is in parallel or be composed in series by a plurality of semiconductor refrigeration modules; The whole geometry of this ice valve is of a size of 1nm * 1nm * 1nm to 10cm * 10cm * 10cm; Described micro channel 6 cross-sectional dimension are that 1nm * 1nm is to 10cm * 10cm; The material of described micro channel 6 is by glass, semiconductor or metal, and its cross section is circle, rectangle, triangle or polygonal; Described micro channel 6 upper ends are provided with the liquid jet hole 7 of the ejectable liquid that communicates with it.
The ice valve that is used to open and close the micro-/ nano fluid passage provided by the invention, by means of semiconductor cooler, form embolism when utilizing fluid self to freeze with the block fluid passage, open the fluid passage during thawing, easy to use, simple, and be convenient to control, need not any moving element, and integrability.
Description of drawings:
Accompanying drawing 1 is a structural representation of the present invention;
Accompanying drawing 2a and accompanying drawing 2b are for regulating the fundamental diagram of fluid flow in the runner by the voltage that changes semiconductor cooler;
Accompanying drawing 3a and accompanying drawing 3b are the fundamental diagram that the semiconductor cooler that utilizes a plurality of semiconductor refrigeration elements to constitute is regulated flow;
Accompanying drawing 4 is for the structural representation of one embodiment of the invention with by atomizing of liquids and make it freeze to block the fundamental diagram of gas flow in the runner;
Wherein: radiator 1 heat conductive insulating layer 2 semiconductor cooler 3
Semiconductor refrigeration module I, II, III
Embodiment
By accompanying drawing as can be known, the ice valve that is used to open and close the micro-/ nano fluid passage of the present invention comprises: comprising: one is placed on the radiator 1 that flows and have the semiconductor cooler 3 and of micro channel 6 lower ends of fluid to be positioned at the refrigeration end of this semiconductor cooler 3 or heat end, is provided with the heat conductive insulating layer of low thermal resistance high strength insulating varniss formation between semiconductor cooler 3 and the radiator 1; One is arranged in the microheater 5 in order to heating micro channel 6 fluids of micro channel 6 upper-end surfaces; Described microheater 5 for the steam bag that feeds steam, be the miniature electric heater in charged source, or for being with the miniature laser heater in laser heating source; Described semiconductor cooler 3 is in parallel or be composed in series by a plurality of semiconductor refrigeration modules; The whole geometry size of described ice valve can be 1nm * 1nm * 1nm and (as Fig. 3 a), also can be 10cm * 10cm * 10cm (as Fig. 3 b, when 3 of semiconductor cooler 3 refrigeration are a plurality of); Equally, described micro channel 6 cross-sectional dimension are 1nm * 1nm, or 10cm * 10cm or arbitrary section size between the two; The material of described micro channel 6 is by glass, semiconductor or metal, and its cross section is circle, rectangle, triangle or polygonal; Described micro channel 6 upper ends are provided with the liquid jet hole 7 of the ejectable liquid that communicates with it.
During use, during semiconductor cooler 3 refrigeration, freeze fluid in the micro channel 6 to block its fluid passage; Liquid with in the microheater 5 heating micro channel 6 melts the fluid in the micro channel 6, just reopens (unlatching) fluid passage.
By Fig. 2 a and Fig. 2 b and Fig. 3 a and Fig. 3 b as can be known, described semiconductor cooler 3 can be made up of the parallel connection of a few block semiconductor refrigeration module (also can connect), semiconductor cooler 3 shown in Fig. 3 a and Fig. 3 b adopts the parallel connection of 3 (or a plurality of) semiconductor refrigeration modules, if refrigerating capacity does not reach the ducted liquid of quick freezing, it is also conceivable that and adopt the Placement of series multistage semiconductor refrigeration module to improve the operating rate that the temperature difference is accelerated the ice valve.To be coated with the high strength insulating varniss of last layer low thermal resistance between the carrier 4 of semiconductor refrigeration module and radiator 1 and micro channel 6, to play the effect that heat conduction rapidly can be insulated again.For reaching desirable heat-transfer effect, must apply certain pressure between semiconductor cooler 3 and the radiator 1 to guarantee good thermo-contact, also can be coated with the last layer heat-conducting silicone grease between their surface of contact to improve heat-transfer effect.
Adopt the voltage that changes semiconductor refrigerating sheet 3 and micro electic heater 5, change the thickness that its refrigerating capacity and heating capacity are adjusted ice sheet in the runner, the runner water cross section is amassed change.Pressure difference before and after the ice valve is certain, and different water cross sections is long-pending will to produce different flows, thereby reaches the purpose of regulating flow, shown in Fig. 3 a and Fig. 3 b; Can see that not freezing fluid 72 can flow through by the small space above conduit, and the conduit below has one deck ice sheet 71, block fluid flow mistake.
The control of ice valve flow of the present invention is by regulating to semiconductor cooler 3 added voltages with to microheater 5 added voltages, change the refrigeration and the heating capacity of ice valve, control the degree that fluid freezes and melts in the micro channel 6, thereby the size that changes micro channel 6 cross-section areas is come control flow rate; Adopt the mode of Fig. 3 a, the semiconductor cooler of below micro channel 6, placing of forming by the semiconductor refrigeration module 3, semiconductor refrigeration module I, II, III as shown in Fig. 3 a and Fig. 3 b, each semiconductor refrigeration module places micro channel 6 belows with parallel form, control by the number of control module during work that fluid freezes situation in the micro channel 6, and the size that changes the cross-section area of micro channel 6 is come control flow rate.Shown among Fig. 3 a when the work of semiconductor refrigeration module I and refrigeration module II, the situation of freezing of fluid in the micro channel 6 when III is in off state, can see, if under the situation of certain pressure difference control, the flow of fluid will become 2/3rds of peak rate of flow in the runner.
In addition, ice valve of the present invention can also adopt various ways, as shown in Figure 4, the fluid that passes through in micro channel 6 is a gas 91, in the time of can't making gas in 3 temperature ranges that can reach of semiconductor cooler, freeze for solid, the mode that can adopt extra spray liquid 81 (as water) to freeze to block runner.Such as, when the gas in the needs blocking-up micro channel 6, the liquid jet hole 7 ejection liquid of micro channel 6 tops, liquid touches flow path wall, because the cooling action of semiconductor cooler 3, the temperature of flow path wall is very low, the liquid quick freezing forms ice cube 33, thus gas flow in the blocking-up runner.How many its flows can by the operating voltage of semiconductor cooler 3 or controlling of spray liquid.When needs are connected runner, change the voltage direction of semiconductor cooler 3, then the flow path wall temperature rises, and obturator melts rapidly, and micro channel 6 is recovered on state again.Mix with working gas because the liquid of spray can enter runner, so will suitably add segregating unit it is separated, with the normal operation of assurance device in ice valve back.
More than ice valve in if desired its temperature reduce rapidly, the liquid quick freezing is to reach quick barrier effect, except using semiconductor cooler, it is also conceivable that the method that adopts utmost point cryogenic substance sprays outside pipeline such as liquid nitrogen realizing reducing more rapidly the temperature in the runner, thereby reach the high speed barrier effect.
In sum, ice valve provided by the invention is a kind of simple in structure, good airproof performance, and little valve of movement-less part, its size can be designed to from nanometer scale to a centimetre magnitude all size, thereby can be used for multiple occasion.Have very high price performance, be convenient to integratedly, especially be suitable among the extensive micro fluid system.And existing general valve is because what all can contain moving element, and be difficult to the valve body microminiaturization, and be operated in profound hypothermia situation following time when valve body, owing to the reason of expanding with heat and contract with cold, often occur the slit between each moving element and cause leaking, and major part is used for the material of the seal washer normal temperature under and can occurs at low temperatures hardening, and follows the string, cause seal failure, make leakage more serious.
In assembly process, for guaranteeing good thermo-contact between semiconductor cooler 3, micro channel and the radiator three, can between it, apply certain pressure and cooperate, fit system foundation material is separately decided with size.Radiator 1 adopts metallic aluminium or other highly heat-conductive materials to make, and the density of its fin will acquire a certain degree, and reduces the temperature of semiconductor cooler temperature end by air-cooled or water-cooled.If heat the thawing fluid by semiconductor cooler being added backward voltage, and the then cold and hot end transposition of semiconductor cooler, this moment, radiator was equivalent to a heat absorber.Micro channel 6 can be made by glass, silicon or metal according to the practical application of microchannel, its cross-section of pipeline can be rectangle, circle, triangle or other shapes, the bottom of micro-channel 6 can not be too thick to guarantee with semiconductor cooler 3 fully fast heat exchange being arranged, to reach the purpose of the very fast break-make of little valve.Consider, semiconductor refrigerating sheet should freeze and heat again, can cause certain time-delay can for the break-make of fluid, for satisfying some valves sensitivity is had relatively high expectations, can consider to add that at the opposite side of micro-channel a microheater 5 is used for the rapid heating fluid, allow the simple refrigeration of semiconductor refrigerating sheet to improve motor reaction speed.Microheater 5 can simply be made by a thermal resistor sheet, and is same, also insulation processing must be arranged between microheater and the micro-channel, with anticreep.Because microheater is not indispensable parts, so dot its position among Fig. 1.
Ice valve provided by the present invention can be used in numerous little space situations, and the incomparable advantage of many other type valves is arranged:
1, movement-less part: this is that most of valves are difficult to accomplish. This also is extensive micro flow channel collection One of indispensable requirement of one-tenthization. Because what " folding " of valve adopted is thermal control, so really take off From the constraint of moving component, can accomplish low wearing and tearing, greatly prolonged service life.
2, good airproof performance: this also is the desired excellent properties that reaches of good valve. Because the ice valve adopts Be that fluid self freezes to block flowing of oneself, what this had just fundamentally stopped to leak at the valve place sends out Give birth to. And because cooling piece is by the break-make situation in the cold and hot control pipeline, in the pipeline outside pipeline How much structures are without any change. Therefore be under the situation of opening the flow condition in the runner and its when the ice valve He partly has no difference, and valve is reduced to zero to the impact of conduction status current downflow in the runner.
3, the electric control of convenience and high-efficiency: this also is that it is fit to one of integrated important feature. It only relates to And the conversion of arriving two kinds of energy mode of electric heating, and do not resemble magnetic valve etc., needing electric energy conversion is magnetic energy, turns to again Turn to mechanical energy, need the power conversion of various ways, therefore ice the easier realization electric control of valve, realize more Convenient, efficient is also higher.
4, volume is little: because the ice valve is simple in structure, only need a semiconductor chilling plate and a heat radiation Sheet gets final product, and therefore can allow to ice valve and do very littlely, and this will send out in the use occasion of many micro-/ nano devices Wave important function.
Certainly, the ice valve also has its certain use occasion:
1, at first, the ice valve is a normally open valve door.Make ice valve closure, must continue to the semiconductor refrigerating sheet power supply, to keep the low temperature of valve body.
2, ice valve refrigerating capacity must guarantee fluid semiconductor refrigerating sheet can freeze in the temperature range that can reach, if exceed, can consider to adopt the joint work of multilevel semiconductor refrigerating sheet.
3, fluid freezes or melts, and should have any impact unlikelyly for fluid itself, can not produce any negative effect to this system.
The using process of ice valve provided by the invention is performed such.The runner that needs conducting or shutoff is received conduit provided by the invention ingress by certain connecting tube such as plastic tube or metal tube, and open liquid it is circulated in pipeline; In the time of the needs block flow, open semiconductor cooler, then its upper end liquid freezes and blocks runner; Otherwise, if need conducting liquid, then to the reverse making alive of semiconductor refrigerating sheet or open heater band, then runner i.e. circulation again after frozen liquid melts.
Claims (7)
1. ice valve that is used to open and close the micro-/ nano fluid passage, it is characterized in that, comprise: one is placed on the radiator (1) that flows and have the semiconductor cooler (3) and of micro channel (6) lower end of fluid to be positioned at the refrigeration end of this semiconductor cooler (3) or heat end, is provided with the heat conductive insulating layer that the low thermal resistance high strength insulating varniss constitutes between semiconductor cooler (3) and the radiator (1); One is arranged in the microheater (5) in order to heating micro channel (6) fluid of micro channel (6) upper-end surface.
2. by the described ice valve that is used to open and close the micro-/ nano fluid passage of claim 1, it is characterized in that, described microheater (5) for the steam bag that feeds steam, be the miniature electric heater in charged source, or for being with the miniature laser heater in laser heating source.
3. by the described ice valve that is used to open and close the micro-/ nano fluid passage of claim 1, it is characterized in that described semiconductor cooler (3) is in parallel or be composed in series by a plurality of semiconductor refrigeration modules.
4. by the described ice valve that is used to open and close the micro-/ nano fluid passage of claim 1, it is characterized in that the whole geometry of this ice valve is of a size of 1nm * 1nm * 1nm to 10cm * 10cm * 10cm.
5. by the described ice valve that is used to open and close the micro-/ nano fluid passage of claim 1, it is characterized in that described micro channel (6) cross-sectional dimension is that 1nm * 1nm is to 10cm * 10cm.
6. by the described ice valve that is used to open and close the micro-/ nano fluid passage of claim 1, it is characterized in that the material of described micro channel (6) is by glass, semiconductor or metal, its cross section is circle, rectangle, triangle or polygonal.
7. by the described ice valve that is used to open and close the micro-/ nano fluid passage of claim 1, it is characterized in that described micro channel (6) upper end is provided with the liquid jet hole (7) of the ejectable liquid that communicates with it.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021597502A CN100363669C (en) | 2002-12-30 | 2002-12-30 | Ice valve for opening and closing micron/nano fluid path |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021597502A CN100363669C (en) | 2002-12-30 | 2002-12-30 | Ice valve for opening and closing micron/nano fluid path |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1512095A CN1512095A (en) | 2004-07-14 |
| CN100363669C true CN100363669C (en) | 2008-01-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021597502A Expired - Fee Related CN100363669C (en) | 2002-12-30 | 2002-12-30 | Ice valve for opening and closing micron/nano fluid path |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1316239C (en) * | 2005-05-19 | 2007-05-16 | 上海交通大学 | Nano refrigerant, and experimental apparatus for capability of heat transferring pressure drop of gas-liquid two phases |
| CN104896192B (en) * | 2015-05-08 | 2017-05-31 | 沈阳航空航天大学 | A kind of micro-fluidic ice valve of high response speed |
| CN108679301B (en) | 2018-09-06 | 2019-01-08 | 湖南乐准智芯生物科技有限公司 | Shielding system, control method and biochip between a kind of micro-valve and liquid |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0309450B1 (en) * | 1986-05-31 | 1991-05-08 | Robert Bosch Gmbh | Micro-valve arrangement |
| US5029805A (en) * | 1988-04-27 | 1991-07-09 | Dragerwerk Aktiengesellschaft | Valve arrangement of microstructured components |
| US5238223A (en) * | 1989-08-11 | 1993-08-24 | Robert Bosch Gmbh | Method of making a microvalve |
| US5681024A (en) * | 1993-05-21 | 1997-10-28 | Fraunhofer-Gesellschaft zur Forderung der angerwanden Forschung e.V. | Microvalve |
-
2002
- 2002-12-30 CN CNB021597502A patent/CN100363669C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0309450B1 (en) * | 1986-05-31 | 1991-05-08 | Robert Bosch Gmbh | Micro-valve arrangement |
| US5029805A (en) * | 1988-04-27 | 1991-07-09 | Dragerwerk Aktiengesellschaft | Valve arrangement of microstructured components |
| US5238223A (en) * | 1989-08-11 | 1993-08-24 | Robert Bosch Gmbh | Method of making a microvalve |
| US5681024A (en) * | 1993-05-21 | 1997-10-28 | Fraunhofer-Gesellschaft zur Forderung der angerwanden Forschung e.V. | Microvalve |
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| CN1512095A (en) | 2004-07-14 |
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Granted publication date: 20080123 Termination date: 20191230 |