CN108821776A - 纯碳坯体的碳化硅密封件的制备方法 - Google Patents

纯碳坯体的碳化硅密封件的制备方法 Download PDF

Info

Publication number
CN108821776A
CN108821776A CN201810679689.3A CN201810679689A CN108821776A CN 108821776 A CN108821776 A CN 108821776A CN 201810679689 A CN201810679689 A CN 201810679689A CN 108821776 A CN108821776 A CN 108821776A
Authority
CN
China
Prior art keywords
pure carbon
sealing element
green body
mesh
silicon carbide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810679689.3A
Other languages
English (en)
Inventor
郭兴忠
王奇玄
黄凯越
高黎华
郑浦
杨辉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Xinxin Mstar Technology Ltd
Original Assignee
Zhejiang Xinxin Mstar Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang Xinxin Mstar Technology Ltd filed Critical Zhejiang Xinxin Mstar Technology Ltd
Priority to CN201810679689.3A priority Critical patent/CN108821776A/zh
Publication of CN108821776A publication Critical patent/CN108821776A/zh
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/573Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/42Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
    • C04B2235/422Carbon
    • C04B2235/425Graphite
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/42Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
    • C04B2235/428Silicon
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54Particle size related information
    • C04B2235/5418Particle size related information expressed by the size of the particles or aggregates thereof
    • C04B2235/5436Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6567Treatment time
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658Atmosphere during thermal treatment
    • C04B2235/6581Total pressure below 1 atmosphere, e.g. vacuum
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74Physical characteristics
    • C04B2235/77Density
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Ceramic Products (AREA)

Abstract

本发明提供一种纯碳坯体的碳化硅密封件的制备方法,包括以下步骤:1)、将石墨粉作为主原料与分散剂共同加入到占主原料质量的去离子水中,搅拌,加入粘结剂,继续搅拌,之后加入造孔剂,搅拌后倒出,得到水基纯碳料浆;2)、下将水基纯碳料浆烘干,得到纯碳粉粒,之后粉碎得到细纯碳颗粒;3)、将细纯碳颗粒放置于避光处陈腐1‑2天,干压成型,获得密封件坯体;4)、将密封件坯体和硅片按照放在真空反应烧结炉中,同时进行液相渗硅,得到含碳的碳化硅密封件。本发明由纯碳坯体利用液相渗硅的方法制备得到SiC陶瓷,降低了成本,节约了能源,且降低了制备过程的难度及复杂性。

Description

纯碳坯体的碳化硅密封件的制备方法
技术领域
本发明涉及一种以纯碳坯体制备碳化硅密封件的方法,具体为一种纯碳坯体的碳化硅密封件的制备方法。
背景技术
碳化硅(SiC)由于其具有高强度、高硬度、耐磨、耐腐蚀、抗氧化、高热导率、良好的高温稳定性能、低的膨胀系数、强的耐化学腐蚀性等优点,已成为新一代的机械密封基础材料。近年来,以反应烧结SiC陶瓷为代表的先进结构陶瓷已广泛应用于机械密封领域。
但是,由于SiC的摩擦系数较大,在工业领域中的磨损和消耗也很大,目前SiC陶瓷在采掘、破碎和研磨等工业领域的整个能量和经济成本消耗中占有相当大的比重。在矿物、水泥和煤粉等原材料的生产过程中都会因机器设备和零件的磨损而必须更换,对能源的消耗日益增大。而石墨在机械工业中常作为润滑剂。许多输送腐蚀介质的设备,广泛采用石墨材料制成活塞杯,密封圈和轴承,它们运转时勿需加入润滑油。因此考虑用全碳粉坯体通过反应烧结高温渗硅的方式制备SiC材料,使其兼具SiC的高强度、高硬度、耐磨的优势,以及石墨的润滑性,降低材料的摩擦系数,改善耐磨性能。
因此,需要对现有技术进行改进。
发明内容
本发明要解决的技术问题是提供一种高效的纯碳坯体的碳化硅密封件的制备方法。
为解决上述技术问题,本发明提供一种纯碳坯体的碳化硅密封件的制备方法,包括以下步骤:
1)、将石墨粉作为主原料与分散剂共同加入到占主原料质量79~81%的去离子水中,然后于800~1200r/min转速下,搅拌29~31min,加入粘结剂,继续搅拌9~11min,之后加入造孔剂,于500~700r/min转速下,搅拌19~21min后倒出,得到水基纯碳料浆(水基纯碳料浆的固相质量含量为59-62%);
粘结剂、分散剂、造孔剂的质量分别是主原料的质量的7.9~8.1%、2.9~3.1%、5-20%;
水基纯碳料浆的固相质量含量为59-62%是指:(主原料+粘结剂+分散剂+造孔剂)÷(主原料+粘结剂+分散剂+去离子水+造孔剂)=59-62%,上述百分比为重量百分比;
2)、于110~130℃下将水基纯碳料浆烘干11~13h,得到纯碳粉粒,之后粉碎至过55~65目筛,得到细纯碳颗粒;
3)、将细纯碳颗粒放置于避光处陈腐1-2天,之后采用0.9~1.1MPa干压成型,保压时间5~10s,获得密封件坯体(密度约1.10~1.50g/cm3);
4)、将密封件坯体和硅片按照1:1.1~1.5的质量比,放在真空反应烧结炉中,升温至1500~1560℃烧结3.5~4.5小时,同时进行液相渗硅,得到纯碳坯体的碳化硅密封件。
作为对本发明纯碳坯体的碳化硅密封件的制备方法的改进:将大于等于80目且小于等于150目的石墨粉以及大于等于200目且小于等于250目的石墨粉,按1:4.9~5.1的质量比例混合配制成主原料。
作为对本发明纯碳坯体的碳化硅密封件的制备方法的进一步改进:粘结剂为酚醛树脂,分散剂为四甲基氢氧化铵,造孔剂为聚乙烯醇。
本发明纯碳坯体的碳化硅密封件的制备方法的技术优势为:
1)引入了自润滑性能优越的石墨后,纯碳坯体的碳化硅密封件的干摩擦性能明显得到改善,其摩擦系数为0.1~0.2。
2)由纯碳坯体利用液相渗硅的方法制备得到SiC陶瓷,降低了成本,节约了能源,且降低了制备过程的难度及复杂性。
3)本发明所得的密封件,其体密为2.55-2.65g/cm3,抗压强度高于120MPa。
具体实施方式
下面结合具体实施例对本发明进行进一步描述,但本发明的保护范围并不仅限于此。
实施例1、纯碳坯体的碳化硅密封件的制备方法,将低目数(大于等于80目且小于等于150目)以及高目数(大于等于200目且小于等于250目)的石墨粉按1:5的质量比例配制成主原料,粘结剂为酚醛树脂,分散剂为四甲基氢氧化铵,造孔剂为聚乙烯醇,依次进行以下步骤:
1)、将上述主原料、为主原料重量3%的分散剂加入到为主原料重量80%的去离子水中,调节搅拌机转速为1000r/min,搅拌30min,加入为主原料重量8%的粘结剂,搅拌10min,之后加入为主原料重量5%的造孔剂,调节转速为600r/min,搅拌20min后倒出,得到固相质量含量为59%的水基纯碳料浆;
即(主原料+聚乙烯醇+四甲基氢氧化铵+酚醛树脂)÷(主原料+聚乙烯醇+四甲基氢氧化铵+去离子水+酚醛树脂)=59%(重量比)
2)、利用烘箱在120℃下对水基纯碳料浆烘干12h,得到纯碳粉粒,之后手工磨细过筛,得到细纯碳颗粒;筛子目数为60目;
3)、将上述纯碳颗粒放置于避光处处陈腐1-2天,之后采用1MPa干压成型,获得较低密度,不致密的密封件坯体;
4)、将上述密封件坯体和硅片按照1:1.3的质量比放在真空反应烧结炉中,升温至1530℃烧结4小时,同时进行液相渗硅,得到纯碳坯体的碳化硅密封件。其体积密度为2.570g/cm3,抗压强度大于120MPa。
实施例2:一种由纯碳坯体来制备碳化硅密封件的方法,将低目数(大于等于80目且小于等于150目)以及高目数(大于等于200目且小于等于250目)的石墨粉按1:5的质量比例配制成主原料,粘结剂为酚醛树脂,分散剂为四甲基氢氧化铵,造孔剂为聚乙烯醇,依次进行以下步骤:
1)、将上述主原料、为主原料重量3%的分散剂加入到为主原料重量80%的去离子水中,调节搅拌机转速为1000r/min,搅拌30min,加入为主原料重量8%的粘结剂,搅拌10min,之后加入为主原料重量10%的造孔剂,调节转速为600r/min,搅拌20min后倒出,得到固相质量含量为60.2%的水基纯碳料浆;
即(主原料+聚乙烯醇+四甲基氢氧化铵+酚醛树脂)÷(主原料+聚乙烯醇+四甲基氢氧化铵+去离子水+酚醛树脂)=60.2%(重量比)
2)、利用烘箱在120℃下对水基纯碳料浆烘干12h,得到纯碳粉粒,之后手工磨细过筛,得到细纯碳颗粒;筛子目数为60目;
3)、将上述纯碳颗粒放置于避光处处陈腐1-2天,之后采用1MPa干压成型,获得较低密度,不致密的密封件坯体;
4)、将上述密封件坯体和硅片按照1:1.3的质量比,放在真空反应烧结炉中,升温至1530℃烧结4小时,同时进行液相渗硅,得到纯碳坯体的碳化硅密封件。其体积密度为2.638g/cm3,抗压强度大于120MPa。
实施例3:一种由纯碳坯体来制备碳化硅密封件的方法,将低目数(大于等于80目且小于等于150目)以及高目数(大于等于200目且小于等于250目)的石墨粉按1:5的质量比例配制成主原料,粘结剂为酚醛树脂,分散剂为四甲基氢氧化铵,造孔剂为聚乙烯醇,依次进行以下步骤:
1)、将上述主原料、为主原料重量3%的分散剂加入到为主原料重量80%的去离子水中,调节搅拌机转速为1000r/min,搅拌30min,加入为主原料重量8%的粘结剂,搅拌10min,之后加入为主原料重量15%的造孔剂,调节转速为600r/min,搅拌20min后倒出,得到固相质量含量为61.2%的水基纯碳料浆;
即(主原料+聚乙烯醇+四甲基氢氧化铵+酚醛树脂)÷(主原料+聚乙烯醇+四甲基氢氧化铵+去离子水+酚醛树脂)=61.2%(重量比)
2)、利用烘箱在120℃下对水基纯碳料浆烘干12h,得到纯碳粉粒,之后手工磨细过筛,得到细纯碳颗粒;筛子目数为60目;
3)将上述纯碳颗粒放置于阴湿处陈腐1-2天,之后采用1MPa干压成型,获得较低密度,不致密的密封件坯体;
4)、将上述密封件坯体和硅片按照1:1.3的质量比,放在真空反应烧结炉中,升温至1530℃烧结4小时,同时进行液相渗硅,得到纯碳坯体的碳化硅密封件。其体积密度为2.648g/cm3,抗压强度大于120MPa。
实施例4:一种由纯碳坯体来制备碳化硅密封件的方法,将低目数(大于等于80目且小于等于150目)以及高目数(大于等于200目且小于等于250目)的石墨粉按1:5的质量比例配制成主原料,粘结剂为酚醛树脂,分散剂为四甲基氢氧化铵,造孔剂为聚乙烯醇,依次进行以下步骤:
1)、将上述主原料、为主原料重量3%的分散剂加入到去离子水中,调节搅拌机转速为1000r/min,搅拌30min,加入为主原料重量8%的粘结剂,搅拌10min,之后加入为主原料重量20%的造孔剂,调节转速为600r/min,搅拌20min后倒出,得到固相质量含量为62%的水基纯碳料浆;
即(主原料+聚乙烯醇+四甲基氢氧化铵+酚醛树脂)÷(主原料+聚乙烯醇+四甲基氢氧化铵+去离子水)=62%(重量比)
2)、利用烘箱在120℃下对水基纯碳料浆烘干12h,得到纯碳粉粒,之后手工磨细过筛,得到细纯碳颗粒;筛子目数为60目;
3)、将上述纯碳颗粒放置于避光处处陈腐1-2天,之后采用1MPa干压成型,获得较低密度,不致密的密封件坯体;
4)、将上述密封件坯体和硅片按照1:1.3的质量比,放在真空反应烧结炉中,升温至1530℃烧结4小时,同时进行液相渗硅,得到纯碳坯体的碳化硅密封件。其体积密度为2.646/cm3,抗压强度大于120MPa。
对比例1:将实施例1中步骤3)中“1MPa干压成型”改成“100MPa干压成型”,其余等同于实施例1。
干压压力过大时,会导致素坯过于致密,不利于渗硅进行,导致得到的样品只有表面为碳化硅,内部仍为纯碳。
对比例2.1:将实施例1中主原料改为等量的“低目数(大于等于80目且小于等于150目)的石墨粉”,其余等同于实施例1。
对比例2.2:将实施例1中主原料改为等量的“高目数(大于等于200目且小于等于250目)的石墨粉”,其余等同于实施例1。
对比例2.3:将实施例1中低目数(大于等于80目且小于等于150目)的石墨粉:高目数(大于等于200目且小于等于250目)的石墨粉从质量比“1:5”改成“1:3”,其余等同于实施例1。
对比例2.4:将实施例1中低目数(大于等于80目且小于等于150目)的石墨粉:高目数(大于等于200目且小于等于250目)的石墨粉从质量比“1:5”改成“1:7”,其余等同于实施例1。
均为低目数石墨粉(对比例2.1)或增加低目数石墨粉比例(对比例2.3)会导致粉料过粗,会延长前期制备料浆的周期;均为高目数石墨粉(对比例2.2)或增加高目数石墨粉比例(对比例2.4)会导致干压得到的坯体过于致密,不利于渗硅反应进行导致得到的样品只有表面为碳化硅,内部仍为纯碳。
对比例3:将实施例1的步骤3)中纯碳粉粒磨细到60目改为“100目”,其余等同于实施例1。
为了保证渗硅反应的进行,需要令纯碳坯体不过于致密,因此提高粉粒目数不可取,会使得得到的样品只有表面为碳化硅,内部仍为纯碳。
对比例4.1:改变实施例1的步骤1)中去离子水的用量,使得水基纯碳粉料浆固相质量含量为40%,其余等同于实施例1。
固相质量含量较低会导致烘干过程时间大幅度延长。
对比例4.2:改变实施例1的步骤1)中去离子水的用量,使得水基纯碳粉料浆固相质量含量为80%,其余等同于实施例1。
固相质量含量过高会导致样品在制备料浆过程中无法混匀,甚至于使造孔剂、粘结剂等都无法溶解,不能进行后续操作。
最后,还需要注意的是,以上列举的仅是本发明的若干个具体实施例。显然,本发明不限于以上实施例,还可以有许多变形。本领域的普通技术人员能从本发明公开的内容直接导出或联想到的所有变形,均应认为是本发明的保护范围。

Claims (3)

1.纯碳坯体的碳化硅密封件的制备方法,其特征在于,包括以下步骤:
1)、将石墨粉作为主原料与分散剂共同加入到占主原料质量79~81%的去离子水中,然后于800~1200r/min转速下,搅拌29~31min,加入粘结剂,继续搅拌9~11min;之后加入造孔剂,于500~700r/min转速下,搅拌19~21min后倒出,得到水基纯碳料浆;
粘结剂、分散剂、造孔剂的质量分别为主原料的质量的7.9~8.1%、2.9~3.1%、5-20%;
2)、于110~130℃下将水基纯碳料浆烘干11~13h,得到纯碳粉粒,之后粉碎至过55~65目筛,得到细纯碳颗粒;
3)、将细纯碳颗粒放置于避光处陈腐1-2天,之后采用0.9~1.1MPa干压成型,保压时间5~10s,获得密封件坯体;
4)、将密封件坯体和硅片按照1:1.1~1.5的质量比,放在真空反应烧结炉中,升温至1500~1560℃烧结3.5~4.5小时,同时进行液相渗硅,得到纯碳坯体的碳化硅密封件。
2.根据权利要求1所述的纯碳坯体的碳化硅密封件的制备方法,其特征在于:将大于等于80目且小于等于150目的石墨粉以及大于等于200目且小于等于250目的石墨粉,按1:4.9~5.1的质量比例混合配制成主原料。
3.根据权利要求2所述的纯碳坯体的碳化硅密封件的制备方法,其特征在于:粘结剂为酚醛树脂,分散剂为四甲基氢氧化铵,造孔剂为聚乙烯醇。
CN201810679689.3A 2018-06-27 2018-06-27 纯碳坯体的碳化硅密封件的制备方法 Pending CN108821776A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810679689.3A CN108821776A (zh) 2018-06-27 2018-06-27 纯碳坯体的碳化硅密封件的制备方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810679689.3A CN108821776A (zh) 2018-06-27 2018-06-27 纯碳坯体的碳化硅密封件的制备方法

Publications (1)

Publication Number Publication Date
CN108821776A true CN108821776A (zh) 2018-11-16

Family

ID=64138003

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810679689.3A Pending CN108821776A (zh) 2018-06-27 2018-06-27 纯碳坯体的碳化硅密封件的制备方法

Country Status (1)

Country Link
CN (1) CN108821776A (zh)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS554712B2 (zh) * 1971-09-22 1980-01-31
CN1264687A (zh) * 2000-03-15 2000-08-30 武汉工业大学 纯碳粉水基分散一步法制造反应烧结碳化硅陶瓷材料的方法
CN103641509A (zh) * 2013-12-09 2014-03-19 中国建筑材料科学研究总院 一种反应烧结用多孔碳预制体及其制备方法与应用

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS554712B2 (zh) * 1971-09-22 1980-01-31
CN1264687A (zh) * 2000-03-15 2000-08-30 武汉工业大学 纯碳粉水基分散一步法制造反应烧结碳化硅陶瓷材料的方法
CN103641509A (zh) * 2013-12-09 2014-03-19 中国建筑材料科学研究总院 一种反应烧结用多孔碳预制体及其制备方法与应用

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
王子晨等: "液相渗硅制备碳化硅/石墨复合陶瓷材料", 《陶瓷学报》 *

Similar Documents

Publication Publication Date Title
WO2013037094A1 (zh) 轻质梯度硬质合金密封环及制造方法
CN101962295A (zh) 一种新型碳化硅陶瓷及其制备方法
JP2007145684A (ja) 耐火れんが
CN104058754B (zh) β-SiC/Si2N2O复相结合SiC窑具及制备方法
CN107973610A (zh) 一种以废弃碳化硅匣钵为主要原料的碳化硅捣打料
CN105925257B (zh) 一种低密度陶粒支撑剂及其制备方法
CN105237032A (zh) 一种利用秸秆制作的保温隔音烧结砖及制备工艺
CN104817331B (zh) 一种高炉用压入密封料及其制备方法
CN108821776A (zh) 纯碳坯体的碳化硅密封件的制备方法
KR102419570B1 (ko) 가스켓 밀봉 재료
CN101551012A (zh) 含碳的碳化硅密封环及其制备方法
CN101255330B (zh) 常压烧结微孔碳化硅石墨自润滑密封环及其制造方法
CN104341163A (zh) 一种钢包水口座砖用接缝料
CN107021764A (zh) 高温硅线石砖及其生产方法
CN109336488B (zh) 一种耐高温瓷砖防水填缝剂及其制备工艺
CN109250929B (zh) 一种g85级钢铁渣粉及其制备方法
CN110683845A (zh) 一种极细结构炭素石墨制品的制备方法
CN110105072A (zh) 一种高硬度氮化硅材料的制备方法
CN103525494B (zh) 一种作为煅烧镁砂燃料用轻烧氧化镁结合的碎石油焦球及其制备方法
CN109053176B (zh) 含铬莫来石耐火材料及其制备方法
CN113200759A (zh) 非氧化物max相强韧化氮化硅陶瓷复合材料及其制备方法
CN115246743A (zh) 一种高稳定中性炉衬材料及其制备方法
CN111892403A (zh) 一种高温抗折型氮化硅结合碳化硅棚板及其制备方法
CN112707732A (zh) 一种熔炼石英用超长再生石墨电极的生产工艺
CN111848091A (zh) 一种低成本防火粉刷石膏的制备方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20181116

RJ01 Rejection of invention patent application after publication