CN108754439A - One kind is split type to prevent board group part - Google Patents
One kind is split type to prevent board group part Download PDFInfo
- Publication number
- CN108754439A CN108754439A CN201810864618.0A CN201810864618A CN108754439A CN 108754439 A CN108754439 A CN 108754439A CN 201810864618 A CN201810864618 A CN 201810864618A CN 108754439 A CN108754439 A CN 108754439A
- Authority
- CN
- China
- Prior art keywords
- plate
- fixed plate
- changeing
- board group
- group part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses it is a kind of it is split type prevent board group part, including fixed plate, changeing plate and connecting bracket；The rear side in fixed plate is arranged in the connecting bracket, and the lower end of fixed plate and the upper end for changeing plate are spliced by interlaced bridging arrangement, and are bolted, and an entirety is formed, and fixed plate and the front side surface for changeing plate are smoothly connected；The lower end for changeing plate is provided with forward extension, and the front side surface of fixed plate is smooth surface, and the working surface for changeing plate and extension has equally distributed particle bulge-structure；Prevent the middle and lower part of plate since the target sputtered is deposited on mostly, therefore, after long-time use, it only needs replacing and clears up and change plate part positioned at lower part, it need not be to preventing that board group part integrally carries out changeing cleaning, the use for reducing material reduces cost, and improves the efficiency for changeing and clearing up.
Description
Technical field
Split type prevent board group part the present invention relates to a kind of.
Background technology
Vacuum splashing and plating be under vacuum conditions, using physics mode by material source gasification be gaseous molecular, atom or from
Son is deposited in matrix surface by low-pressure gas or gas ions process, makes it have the technology of certain specific function film；Because splashing
During plating, sputter source meeting random direction sputtering, other than adhering on target substrate surface, some can be attached to surrounding
The surface at other positions avoids attachment, depositional coating for protection other structures part, use is needed to prevent that plate carries out covered protection；
It is existing to prevent that plate is an integral structure mostly, integral replacing is needed after long-time use, and clear up the plank changed,
Cost is increased, and reduces efficiency.
Invention content
For the above technical problems, the purpose of the present invention is：It proposes and a kind of split type prevents board group part.
What technical solution of the invention was realized in：It is a kind of it is split type prevents board group part, including fixed plate, changeing
Plate and connecting bracket；The rear side in fixed plate is arranged in the connecting bracket, and the lower end of fixed plate passes through phase with the upper end for changeing plate
Mutually bridging arrangement splicing staggeredly, and be bolted, an entirety is formed, fixed plate and the front side surface for changeing plate are smooth
Connection；The lower end for changeing plate is provided with forward extension, and the front side surface of fixed plate is smooth surface, changes plate and extension
Working surface have equally distributed particle bulge-structure.
Preferably, the fixed plate is inclined-plane or arc surface, the worksheet of extension with the front side working surface for changeing plate
Face is horizontal plane.
Preferably, the cross sectional shape of the particle bulge-structure is trapezoidal.
Due to the application of the above technical scheme, the present invention has following advantages compared with prior art：
The split type of the present invention prevents board group part, by fixed plate and changes plate two parts and forms, since the target sputtered is most
It is deposited on the middle and lower part for preventing plate, therefore, after long-time use, it is only necessary to replace and clear up and change plate part i.e. positioned at lower part
Can, it need not reduce the use of material to preventing that board group part integrally carries out changeing cleaning, reduce cost, and improve
The efficiency for changeing and clearing up.
Description of the drawings
Technical scheme of the present invention is further explained below in conjunction with the accompanying drawings：
Attached drawing 1 is a kind of split type schematic diagram for preventing board group part of the present invention；
Attached drawing 2 is the schematic diagram of the particle bulge-structure of the present invention.
Specific implementation mode
Illustrate the present invention below in conjunction with the accompanying drawings.
As shown in attached drawing 1-2, one kind of the present invention is split type to prevent board group part, including one kind is split type to prevent board group
Part, including fixed plate 11, changeing plate 12 and connecting bracket 14；The rear side in fixed plate 11 is arranged in the connecting bracket 14, fixed
Plate 11 is fixed by connecting bracket 14, and the lower end of fixed plate 11 and the upper end for changeing plate 12 are spelled by interlaced bridging arrangement
It connects, and is fixed by bolt 15, form an entirety, fixed plate 11 and the front side surface for changeing plate 12 are smoothly connected；It is described to tear open
The lower end for changing plate 12 is provided with forward extension 13.
The fixed plate 11 and the working surface for changeing plate 12 are inclined-plane or arc surface, receive target as sputter to improve entirety
Range；And set the front side surface of fixed plate 11 to smooth surface, it is equal in the working surface setting for changeing plate 12 and extension 13
The particle bulge-structure 21 of even distribution makes target mainly be attached to and changes on plate 12 and extension 13, and increases receiving area, long
Time is needed replacing using rear and cleaning changes plate 12, and the cross sectional shape of particle bulge-structure 21 could be provided as ladder
Shape.
The above embodiments merely illustrate the technical concept and features of the present invention, and its object is to allow person skilled in the art
Scholar can understand present disclosure and be implemented, and it is not intended to limit the scope of the present invention, all according to the present invention
Equivalent change or modification made by Spirit Essence should all cover within the scope of the present invention.
Claims (3)
1. one kind is split type to prevent board group part, it is characterised in that：Including fixed plate（11）, change plate（12）And connecting bracket
（14）；The connecting bracket（14）It is arranged in fixed plate（11）Rear side, fixed plate（11）Lower end and change plate（12）It is upper
End is spliced by interlaced bridging arrangement, and passes through bolt（15）It is fixed, form an entirety, fixed plate（11）With change
Plate（12）Front side surface be smoothly connected；It is described to change plate（12）Lower end be provided with forward extension（13）, fixed plate
（11）Front side surface be smooth surface, change plate（12）And extension（13）Working surface have equally distributed particle protrusion knot
Structure（21）.
Split type prevent board group part 2. according to claim 1, it is characterised in that：The fixed plate（11）With change plate
（12）Front side working surface be inclined-plane or arc surface, extension（13）Working surface be horizontal plane.
Split type prevent board group part 3. according to claim 1, it is characterised in that：The particle bulge-structure（21）Cut
Face shape is trapezoidal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810864618.0A CN108754439A (en) | 2018-08-01 | 2018-08-01 | One kind is split type to prevent board group part |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810864618.0A CN108754439A (en) | 2018-08-01 | 2018-08-01 | One kind is split type to prevent board group part |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108754439A true CN108754439A (en) | 2018-11-06 |
Family
ID=63968349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810864618.0A Withdrawn CN108754439A (en) | 2018-08-01 | 2018-08-01 | One kind is split type to prevent board group part |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108754439A (en) |
-
2018
- 2018-08-01 CN CN201810864618.0A patent/CN108754439A/en not_active Withdrawn
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20181106 |
|
| WW01 | Invention patent application withdrawn after publication |