CN208733210U - One kind preventing that plate changes mechanism automatically - Google Patents
One kind preventing that plate changes mechanism automatically Download PDFInfo
- Publication number
- CN208733210U CN208733210U CN201821230201.0U CN201821230201U CN208733210U CN 208733210 U CN208733210 U CN 208733210U CN 201821230201 U CN201821230201 U CN 201821230201U CN 208733210 U CN208733210 U CN 208733210U
- Authority
- CN
- China
- Prior art keywords
- plate
- lifter plate
- transverse
- changeing
- mounting portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model relates to one kind to prevent that plate changes mechanism automatically, comprising lifter plate, elevating mechanism, change plate and transverse-moving mechanism；Elevating mechanism drives lifter plate lifting, and transverse-moving mechanism is provided with Mobile base；Plate is changed with mounting portion and stitching section, mounting portion is fixed on Mobile base, and stitching section is used to splice with lifter plate；The lifter plate and after changeing plate splicing, lifter plate and the front side working surface for changeing plate are smoothly connected, and cooperate mounting portion and avoiding structure；The front side surface of the lifter plate is smooth surface, and the working surface for changeing plate and extension has equally distributed particle bulge-structure；The middle and lower part of plate is prevented since the target sputtered is deposited on mostly, therefore, after long-time use, it only needs to act by elevating mechanism and transverse-moving mechanism, separates lifter plate with plate is changed, and plate will be changed and remove replacement, it does not need to preventing that plate integrally carries out changeing cleaning, the use for reducing material, reduces costs, and saves manpower.
Description
Technical field
The utility model relates to one kind to prevent that plate changes mechanism automatically.
Background technique
Vacuum splashing and plating be under vacuum conditions, using physics mode by material source gasify for gaseous molecular, atom or from
Son is deposited in matrix surface by low-pressure gas or gas ions process, makes it have the technology of certain specific function film；Because splashing
During plating, sputter source meeting random direction sputtering, around other than the attachment of target substrate surface, some can be attached to
The surface at other positions, for protection other structures part avoid attachment, depositional coating, need using prevent plate carry out covered protection；
It is existing to prevent that plate is an integral structure mostly, integral replacing is needed after long-time use, and clear up the plate changed,
Cost is increased, and reduces efficiency.
Utility model content
For the above technical problems, the purpose of this utility model is: proposing one kind and prevents that plate changes machine automatically
Structure.
The technical solution of the utility model is achieved in that one kind prevents that plate changes mechanism automatically, includes lifting
Plate, changes plate and transverse-moving mechanism at elevating mechanism；The elevating mechanism drives lifter plate lifting, and transverse-moving mechanism is provided with Mobile base,
Transverse-moving mechanism drives Mobile base to laterally move；For the plate that changes with mounting portion and stitching section, mounting portion is fixed on shifting
On dynamic seat, stitching section is used to splice with lifter plate；The lifter plate and after changeing plate splicing, lifter plate and the front side work for changeing plate
Make smooth surface connection, and cooperates mounting portion and avoiding structure；The front side surface of the lifter plate is smooth surface, changes plate and prolongs
The working surface of extending portion has equally distributed particle bulge-structure.
Preferably, the lifter plate and the working surface of stitching section are inclined-plane or arc surface, and the working surface of mounting portion is
Horizontal plane.
Preferably, the cross sectional shape of the particle bulge-structure is trapezoidal.
Due to the application of the above technical scheme, the utility model has the advantage that compared with prior art
The utility model prevents that plate changes mechanism automatically, by lifter plate, elevating mechanism, changes plate and transverse-moving mechanism group
At, the middle and lower part of plate is prevented since the target sputtered is deposited on mostly, after long-time use, it is only necessary to pass through lifting
Mechanism and transverse-moving mechanism movement, separates lifter plate with plate is changed, and will change plate removal and replace, and do not need to preventing plate
Entirety carries out changeing cleaning, reduces the use of material, reduces costs, saves manpower.
Detailed description of the invention
Technical solutions of the utility model are described further with reference to the accompanying drawing:
Attached drawing 1 is a kind of schematic diagram prevented plate and change mechanism automatically of the utility model；
Attached drawing 2 is the schematic diagram of the particle bulge-structure of the utility model.
Specific embodiment
Illustrate the utility model with reference to the accompanying drawing.
As shown in attached drawing 1-2, one kind described in the utility model prevents that plate changes mechanism automatically, is used in vacuum sputtering equipment
In, it includes lifter plate 11, elevating mechanism 12, change plate and transverse-moving mechanism 13；The elevating mechanism 12 drives 11 liters of lifter plate
Drop, transverse-moving mechanism 13 are provided with Mobile base 14, and transverse-moving mechanism 13 drives Mobile base 14 to laterally move；The plate that changes has peace
Dress portion 15 and stitching section 16, mounting portion 15 are fixed on Mobile base 14, and stitching section 16 is used to splice with lifter plate 11.
When work, first the drive Mobile base 14 of transverse-moving mechanism 13 is moved on the outside of body, plate will be changed and pass through mounting portion 15
It is fixed on Mobile base 14, control elevating mechanism 12 makes lifter plate 11 rise certain altitude, concedes traveling to plate is changed
Space, subsequent transverse-moving mechanism 13 drive Mobile base 14 to move forward to stroke end, are lowered back to original position, transverse-moving mechanism with after lifting plate 11
13 drive Mobile base 14 to back up a little further distance again, cooperate stitching section 16 and lifter plate 11 and are spliced into an entirety；It is reversed
The above process can be realized and change automatically moving out for plate.
After splicing, the front side working surface of lifter plate 11 and stitching section 16 is smoothly connected, working surface can for inclined-plane or
Arc surface, the upside working surface of mounting portion 15 are horizontal plane, to improve the whole range for receiving target as sputter；And lifter plate 11
Front side surface be smooth surface, and equally distributed particle bulge-structure is set in the working surface of stitching section 16 and mounting portion 15
21, it is attached to target mainly on stitching section 16 and mounting portion 15, and increase receiving area, the section shape of particle bulge-structure 21
Shape can be set to trapezoidal.
The above is only the specific application examples of the utility model, do not constitute any limit to the protection scope of the utility model
System.Any technical scheme formed by adopting equivalent transformation or equivalent replacement, all fall within the utility model rights protection scope it
It is interior.
Claims (3)
1. one kind prevents that plate changes mechanism automatically, it is characterised in that: comprising lifter plate (11), elevating mechanism (12), change plate and
Transverse-moving mechanism (13)；The elevating mechanism (12) drives lifter plate (11) lifting, and transverse-moving mechanism (13) is provided with Mobile base (14),
Transverse-moving mechanism (13) drives Mobile base (14) to laterally move；The plate that changes is with mounting portion (15) and stitching section (16), peace
Dress portion (15) is fixed on Mobile base (14), and stitching section (16) are used to splice with lifter plate (11)；The lifter plate (11)
After changeing plate splicing, lifter plate (11) and the front side working surface for changeing plate are smoothly connected, and make mounting portion (15) and evacuation
Structure (4) cooperation；The front side surface of the lifter plate (11) is smooth surface, and the working surface for changeing plate has equally distributed particle
Bulge-structure (21).
2. according to claim 1 prevent that plate changes mechanism automatically, it is characterised in that: the lifter plate (11) and stitching section
(16) working surface is inclined-plane or arc surface, and the working surface of mounting portion (15) is horizontal plane.
3. according to claim 1 prevent that plate changes mechanism automatically, it is characterised in that: the particle bulge-structure (21)
Cross sectional shape is trapezoidal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821230201.0U CN208733210U (en) | 2018-08-01 | 2018-08-01 | One kind preventing that plate changes mechanism automatically |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821230201.0U CN208733210U (en) | 2018-08-01 | 2018-08-01 | One kind preventing that plate changes mechanism automatically |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208733210U true CN208733210U (en) | 2019-04-12 |
Family
ID=66029201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821230201.0U Expired - Fee Related CN208733210U (en) | 2018-08-01 | 2018-08-01 | One kind preventing that plate changes mechanism automatically |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208733210U (en) |
-
2018
- 2018-08-01 CN CN201821230201.0U patent/CN208733210U/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR102069018B1 (en) | Positioning arrangement for substrate carrier and mask carrier, transfer system for substrate carrier and mask carrier, and methods therefor | |
| US8137519B2 (en) | Sputtering cathode, sputtering apparatus provided with sputtering cathode, film-forming method, and method for manufacturing electronic device | |
| CN103938161A (en) | Evaporating device and evaporating method of substrate | |
| CN107761051B (en) | A kind of mask, mask evaporation component and evaporation coating device | |
| KR20090093161A (en) | Evaporating apparatus and method for forming thin film | |
| CN208733210U (en) | One kind preventing that plate changes mechanism automatically | |
| CN102881614B (en) | Biaxial drive mechanism and die bonder | |
| KR20150049645A (en) | Thin film depositing apparatus | |
| US8431493B2 (en) | Replaceable substrate masking on carrier and method for processing a substrate | |
| CN105154837A (en) | Target replacement device for sputtering facility and sputtering facility | |
| CN103252804B (en) | The groove processing instrument of substrate and groove processing apparatus | |
| CN208733211U (en) | One kind preventing that plate changes sputter automatically | |
| CN204735377U (en) | Vehicle chassis nanometer coating spraying prosthetic devices | |
| US11440778B2 (en) | Crane | |
| US10549876B2 (en) | Label attaching apparatus | |
| CN108754438A (en) | One kind preventing that plate changes sputter automatically | |
| CN108715994A (en) | One kind preventing that plate changes mechanism automatically | |
| CN105690079A (en) | Full-automatic flat gasket assembly machine | |
| CN208733209U (en) | A kind of sputter prevents that plate changes structure | |
| KR20200036683A (en) | Film formation apparatus, film formation method, and manufacturing method of electronic device | |
| CN208829756U (en) | One kind preventing that plate switches sputter mechanism | |
| US2806619A (en) | Platform pivoting and sliding construction for lift truck | |
| CN108690959A (en) | A kind of sputter for automatically switching to prevent plate | |
| CN108677153A (en) | A kind of sputter prevents that plate changes structure | |
| CN104425335A (en) | Equipment used for holding substrate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190412 Termination date: 20200801 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |