CN108728803A - A kind of axial field generator for magnetic of cycle pulse scanning - Google Patents
A kind of axial field generator for magnetic of cycle pulse scanning Download PDFInfo
- Publication number
- CN108728803A CN108728803A CN201810917140.3A CN201810917140A CN108728803A CN 108728803 A CN108728803 A CN 108728803A CN 201810917140 A CN201810917140 A CN 201810917140A CN 108728803 A CN108728803 A CN 108728803A
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- China
- Prior art keywords
- armature
- magnetic
- electrode
- power supply
- field generator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 14
- 238000003860 storage Methods 0.000 claims abstract description 13
- 238000009413 insulation Methods 0.000 claims description 20
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 12
- 229910052802 copper Inorganic materials 0.000 claims description 12
- 239000010949 copper Substances 0.000 claims description 12
- 239000012212 insulator Substances 0.000 claims description 11
- 239000004020 conductor Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 230000005611 electricity Effects 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 229910002804 graphite Inorganic materials 0.000 claims description 2
- 239000010439 graphite Substances 0.000 claims description 2
- 239000002245 particle Substances 0.000 abstract description 10
- 238000007747 plating Methods 0.000 abstract description 4
- 238000010891 electric arc Methods 0.000 description 5
- 230000005684 electric field Effects 0.000 description 3
- 238000000429 assembly Methods 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 206010054949 Metaplasia Diseases 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000015689 metaplastic ossification Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
Abstract
The present invention discloses a kind of axial field generator for magnetic of cycle pulse scanning, including Power Supply Assembly, motor, speed reducer, armature assembly and magnetic pole, the output shaft of the motor and the input axis connection of speed reducer, the armature assembly includes armature body and armature shaft, the output shaft of the speed reducer and armature axis connection, the armature body is circumferentially installed with multiple first electrodes, second electrode there are one being set on the armature shaft, the magnetic pole includes a holder and multiple solenoids, the holder axially offers multiple storage tanks, the solenoid is installed in storage tank, the armature shaft is electrically connected with Power Supply Assembly, the first electrode is electrically connected with solenoidal one end, the solenoidal other end is electrically connected with Power Supply Assembly, the first electrode is one-to-one relationship with solenoid.Arc source magnetic field caused by the present invention does not interfere charged particle to be axially moved the additional miscellaneous power of power, so that electric spots moving is more improved, keeps institute's film plating layer more fine and smooth.
Description
Technical field
The present invention relates to magnetic field generating device technical field, more particularly to a kind of cycle pulse scanning axial magnetic field fills
It sets.
Background technology
Production equipment of the vacuum arc ion plating equipment as vacuum coating, has currently been widely applied to industrial metaplasia
In production.Be typically provided with field generator for magnetic in the vacuum arc ion plating equipment, can generate vacuum arc source magnetic field to
Improve the movement locus and speed of electric arc spot.
But the electromagnetic field generated in traditional field generator for magnetic carries radial direction or Circumferential field, this can have lost axial direction
Ionic flux, the arc cathode manufactured in these magnetic fields can cause coated film deposition rate loss to reach 30%-50%, and cause thin
Binding force of membrane declines, and the reason of causing this phenomenon is that ion is reached than declining the loss for leading to etch and bombard heating and film forming
The reduction of energy.
Invention content
The technical problem to be solved by the present invention is to, for the above-mentioned prior art in deficiency, a kind of cycle pulse is provided and is swept
Axial magnetic field generating means is retouched, the arc source magnetic field generated does not interfere charged particle to be axially moved the additional miscellaneous power of power, makes
The movement of electric arc spot more improves, and keeps institute's film plating layer more fine and smooth.
In order to solve the above technical problems, the technical scheme is that：
A kind of axial field generator for magnetic of cycle pulse scanning, including Power Supply Assembly, motor, speed reducer, armature assembly and magnetic pole,
The output shaft of the motor and the input axis connection of speed reducer, the armature assembly include armature body and armature shaft, the armature
Axis is rotatably dispose in armature body, and output shaft and the armature axis connection of the speed reducer, the armature body is circumferentially installed with multiple
First electrode is set on the armature shaft there are one second electrode, and the second electrode is rotated with armature shaft, and the magnetic pole includes one
Holder and multiple solenoids, the holder axially offer multiple storage tanks, and the solenoid is installed in storage tank, and described
The axis of storage tank is superimposed with each other with solenoidal axis, and the solenoid is one-to-one relationship, the armature with storage tank
Axis is electrically connected with Power Supply Assembly, and the first electrode is electrically connected by conducting wire with solenoidal one end, described solenoidal another
End is electrically connected with Power Supply Assembly, and the first electrode is one-to-one relationship with solenoid.
As a preferred embodiment, the armature assembly further includes insulating sleeve, axle sleeve and two cleat insulators, the insulation
Sleeve and axle sleeve are set between armature shaft and armature body, and the insulating sleeve is sheathed on outside armature shaft, and the axle sleeve is sheathed on absolutely
Outside edge sleeve, the side wall of the insulating sleeve and axle sleeve offers a clip slot, and the cleat insulator and second electrode are installed in folder
In slot, the second electrode is set between two cleat insulators.
As a preferred embodiment, the armature assembly further includes armature case and bearing, and the bearing holder (housing, cover) is set to armature shaft
Both ends, the armature case includes shell and end cap, and the casing is set to outside armature body, and the end cap is covered on the two of shell
Side, the end cap are set in outside bearing, and insulation sleeve is equipped between the bearing and end cap.
As a preferred embodiment, the axial field generator for magnetic of cycle pulse scanning further includes ring power spring, described
Ring power spring is installed between shell and armature body.
As a preferred embodiment, the axial field generator for magnetic of cycle pulse scanning further includes overhang insulation sleeve,
The overhang insulation sleeve is sheathed between armature body and axle sleeve, and the inside of the one side and end cap of the overhang insulation sleeve
Face offsets, and the another side of the overhang insulation sleeve and the lateral surface of first electrode offset.
As a preferred embodiment, the Power Supply Assembly includes power supply, transformer, ammeter and voltmeter, the electric current
One end of table is electrically connected with the anode of power supply, and the other end of the ammeter is electrically connected with one end of transformer, the transformer
The other end be electrically connected with armature assembly/magnetic pole, the voltmeter and ammeter and transformers connected in parallel, the cathode of the power supply with
Magnetic pole/armature assembly electrical connection.
As a preferred embodiment, the material of the first electrode is copper, and the material of the second electrode is copper or graphite.
As a preferred embodiment, the solenoidal coil method be copper conductor, the copper conductor it is a diameter of
0.5mm, the solenoidal coil turn are 800.
As a preferred embodiment, the rotating speed of the armature shaft is 1-600r/min.
The beneficial effects of the invention are as follows：It is generated by the cooperation of Power Supply Assembly, motor, speed reducer, armature assembly and magnetic pole
Circumferentially flicker the scanning pulse axial magnetic field of variation, this magnetic field make electric arc spot circumferencial direction not inphase angle flicker without
The left selective dragging type movement stopped, thus the magnetic field does not interfere charged particle to be axially moved the additional miscellaneous power of power, makes electric arc
The movement of spot more improves, and keeps institute's film plating layer more fine and smooth.
Description of the drawings
Fig. 1 is the assembly structure diagram of embodiments of the present invention；
Fig. 2 is the sectional view of the armature assembly of the present invention；
Fig. 3 is the sectional view at A-A in Fig. 2；
Fig. 4 is solenoid magnet field direction, direction of an electric field and the charging particle movement direction schematic diagram of the present invention.
In figure：1- Power Supply Assemblies, 11- power supplys, 12- ammeters, 13- transformers, 14- voltmeters, 2- motors, 3- slow down
Machine, 4- armature assemblies, 41- armature bodies, 42- armature shafts, 43- insulating sleeves, 44- axle sleeves, 45- cleat insulators, 46- shells, 47-
End cap, 48- bearings, 49- overhang insulation sleeves, 5- magnetic poles, 51- holders, 52- solenoids, 6- first electrodes, 7- second electrodes,
8- insulation sleeves, 9- ring power springs.
Specific implementation mode
Xia Mianjiehefutuduibenfamingjiegouyuanlihegongzuoyuanlizuojinyibuxiangxishuoming.
As shown in FIG. 1 to 3, the axial field generator for magnetic of a kind of cycle pulse scanning, including Power Supply Assembly 1, motor 2,
Speed reducer 3, armature assembly 4 and magnetic pole 5, the Power Supply Assembly 1 include power supply 11, transformer 13, ammeter 12 and voltmeter 14,
One end of the ammeter 12 is electrically connected with the anode of power supply 11, the other end of the ammeter 12 and one end electricity of transformer 13
Connection, the voltmeter 14 is in parallel with ammeter 12 and transformer 13, the input shaft of the output shaft and speed reducer 3 of the motor 2
Connection, the armature assembly 4 include armature body 41 and armature shaft 42, and the armature shaft 42 is rotatably dispose in armature body 41, institute
The output shaft for stating speed reducer 3 is connect with armature shaft 42, and the armature body 41 is circumferential to be installed with multiple first electrodes 6, the armature
It is set on axis 42 there are one second electrode 7, the second electrode 7 is rotated with armature shaft 42, and the magnetic pole 5 includes a holder and multiple
Solenoid, the holder axially offer multiple storage tanks, and the solenoid is installed in storage tank, and the axis of the storage tank
Line is superimposed with each other with solenoidal axis, and the solenoid is one-to-one relationship, the armature shaft 42 and power supply with storage tank
11 cathode electrical connection, the first electrode 6 is electrically connected by conducting wire with solenoidal one end, the solenoidal other end and
The other end of the transformer 13 is electrically connected, and the first electrode 6 is one-to-one relationship with solenoid, wherein holder 51 can
Think circle as shown in Figure 1, or other arbitrary shapes.
As a preferred embodiment, the armature assembly 4 further includes insulating sleeve 43, axle sleeve 44 and two cleat insulators 45,
The insulating sleeve 43 and axle sleeve 44 are set between armature shaft 42 and armature body 41, and the insulating sleeve 43 is sheathed on armature shaft 42
Outside, the axle sleeve 44 is sheathed on outside insulating sleeve 43, and the side wall of the insulating sleeve 43 and axle sleeve 44 offers a clip slot, described
Cleat insulator 45 and second electrode 7 are installed in clip slot, and the second electrode 7 is set between two cleat insulators 45.
As a preferred embodiment, the armature assembly 4 further includes armature case and bearing 48, and the bearing 48 is sheathed on electricity
The both ends of pivot 42, the armature case include shell 46 and end cap 47, and the shell 46 is sheathed on outside armature body 41, the end cap
47 are covered on the both sides of shell 46, and the end cap 47 is set in outside bearing 48, and insulation is equipped between the bearing 48 and end cap 47
Set 8.
As a preferred embodiment, the axial field generator for magnetic of cycle pulse scanning further includes ring power spring 9, described
Ring power spring 9 is installed between shell 46 and armature body 41.
As a preferred embodiment, the axial field generator for magnetic of cycle pulse scanning further includes overhang insulation sleeve
49, the overhang insulation sleeve 49 is sheathed between armature body 41 and axle sleeve 44, and the one side of the overhang insulation sleeve 49
It offsets with the medial surface of end cap 47, the another side of the overhang insulation sleeve 49 and the lateral surface of first electrode 6 offset, insulation
The setting of sleeve 43, insulation sleeve 8, cleat insulator 45 and overhang insulation sleeve 49 makes second electrode 7 and the friction of first electrode 6 generate
Electric current will not leak away, ensure that the job stability of the axial field generator for magnetic of cycle pulse scanning.
As a preferred embodiment, the material of the first electrode 6 is copper, and the material of the second electrode 7 is copper or stone
Ink.
As a preferred embodiment, the solenoidal coil method be copper conductor, the copper conductor it is a diameter of
0.5mm, the solenoidal coil turn are 800.
It should be noted that the cathode of the power supply 11 can also be electrically connected with solenoid, the other end of the transformer 13
It can also be electrically connected with armature shaft 42, the current value of power supply is 0-1A, and voltage value is less than 36V.
Make armature shaft 42 with the rotational speed of 1-600r/min by the cooperation of Power Supply Assembly 1, motor 2 and speed reducer 3,
Two electrodes 7 are rotated with armature shaft 42, tangent one by one with multiple first electrodes 6, and corresponding helical in magnetic pole 5 is enabled to generate electric current
Pipe generates axial magnetic field consistent with direction of an electric field as shown in Figure 4, which makes charged particle axially movable, due to this
Magnetic field is consistent with direction of an electric field caused by the axial field generator for magnetic of cycle pulse scanning, and charged particle is in axial Lip river at this time
Human relations magnetic force is zero, and such magnetic field only has direction effect of contraction, charged particle that can smoothly press the magnetic line of force direction charged particle
The axial field generator for magnetic of outflow, i.e. this cycle pulse scanning not only realizes the magnetic confinement of plasma, and can be to it
In charged particle acting.
Beneficial effects of the present invention：It is produced by the cooperation of Power Supply Assembly 1, motor 2, speed reducer 3, armature assembly 4 and magnetic pole 5
The scanning pulse axial magnetic field of the raw variation that circumferentially flickers, this magnetic field make electric arc spot circumferencial direction not flickering for inphase angle and
Selective dragging type movement is ceaselessly done, thus the magnetic field does not interfere charged particle to be axially moved the additional miscellaneous power of power, makes electricity
The movement of arc spot more improves, and keeps institute's film plating layer more fine and smooth.
The above is only better embodiment of the present invention, and every technical solution according to the present invention is to above implementation
Any subtle modifications, equivalent variations and modifications, belong in the range of technical solution of the present invention made by mode.
Claims (9)
1. a kind of axial field generator for magnetic of cycle pulse scanning, it is characterised in that：It is mechanical, electrical including Power Supply Assembly, motor, deceleration
Pivot component and magnetic pole, the output shaft of the motor and the input axis connection of speed reducer, the armature assembly include armature body and electricity
Pivot, the armature shaft are rotatably dispose in armature body, output shaft and the armature axis connection of the speed reducer, the armature body week
To multiple first electrodes are installed with, set on the armature shaft there are one second electrode, the second electrode is rotated with armature shaft, institute
It includes a holder and multiple solenoids to state magnetic pole, and the holder axially offers multiple storage tanks, and the solenoid is installed on appearance
It sets in slot, and the axis of the storage tank is superimposed with each other with solenoidal axis, the solenoid is to correspond with storage tank
Relationship, the armature shaft are electrically connected with Power Supply Assembly, and the first electrode is electrically connected by conducting wire with solenoidal one end, described
The solenoidal other end is electrically connected with Power Supply Assembly, and the first electrode is one-to-one relationship with solenoid.
2. a kind of axial field generator for magnetic of cycle pulse scanning according to claim 1, it is characterised in that：The armature
Component further includes insulating sleeve, axle sleeve and two cleat insulators, and the insulating sleeve and axle sleeve are set between armature shaft and armature body,
The insulating sleeve is sheathed on outside armature shaft, and the axle sleeve is sheathed on outside insulating sleeve, the side wall of the insulating sleeve and axle sleeve
Offer a clip slot, the cleat insulator and second electrode are installed in clip slot, the second electrode be set to two cleat insulators it
Between.
3. a kind of axial field generator for magnetic of cycle pulse scanning according to claim 1, it is characterised in that：The armature
Component further includes armature case and bearing, and the bearing holder (housing, cover) is set to the both ends of armature shaft, and the armature case includes shell and end cap, institute
Casing is stated outside the armature body, the end cap is covered on the both sides of shell, and the end cap is set in outside bearing, the bearing with
Insulation sleeve is equipped between end cap.
4. a kind of axial field generator for magnetic of cycle pulse scanning according to claim 3, it is characterised in that：It further include ring
Power spring, the ring power spring are installed between shell and armature body.
5. a kind of axial field generator for magnetic of cycle pulse scanning according to claim 4, it is characterised in that：It further include end
Portion's insulating sleeve, the overhang insulation sleeve are sheathed between armature body and axle sleeve, and the one side of the overhang insulation sleeve
It offsets with the medial surface of end cap, the another side of the overhang insulation sleeve and the lateral surface of first electrode offset.
6. a kind of axial field generator for magnetic of cycle pulse scanning according to claim 1, it is characterised in that：The power supply
Component includes power supply, transformer, ammeter and voltmeter, and one end of the ammeter is electrically connected with the anode of power supply, the electricity
The other end of flow table is electrically connected with one end of transformer, and the other end of the transformer is electrically connected with armature assembly/magnetic pole, described
Voltmeter and ammeter and transformers connected in parallel, the cathode of the power supply are electrically connected with magnetic pole/armature assembly.
7. a kind of axial field generator for magnetic of cycle pulse scanning according to claim 1, it is characterised in that：Described first
The material of electrode is copper, and the material of the second electrode is copper or graphite.
8. a kind of axial field generator for magnetic of cycle pulse scanning according to claim 1, it is characterised in that：The helical
The coil method of pipe is copper conductor, and a diameter of 0.5mm of the copper conductor, the solenoidal coil turn is 800.
9. a kind of axial field generator for magnetic of cycle pulse scanning according to claim 1, it is characterised in that：The armature
The rotating speed of axis is 1-600r/min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810917140.3A CN108728803A (en) | 2018-08-13 | 2018-08-13 | A kind of axial field generator for magnetic of cycle pulse scanning |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810917140.3A CN108728803A (en) | 2018-08-13 | 2018-08-13 | A kind of axial field generator for magnetic of cycle pulse scanning |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108728803A true CN108728803A (en) | 2018-11-02 |
Family
ID=63942746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810917140.3A Pending CN108728803A (en) | 2018-08-13 | 2018-08-13 | A kind of axial field generator for magnetic of cycle pulse scanning |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108728803A (en) |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1522443A (en) * | 1977-04-05 | 1978-08-23 | Butler O | Electromagnetic solenoid actuators |
| JPH10140345A (en) * | 1996-11-14 | 1998-05-26 | Hitachi Ltd | Sputtering electrode and magnetron sputtering device |
| JP2000239841A (en) * | 1999-02-24 | 2000-09-05 | Ulvac Japan Ltd | Method and device for sputtering |
| CN1314070A (en) * | 1998-06-26 | 2001-09-19 | 汤姆森管电子有限公司 | Plasma accelerator arrangement |
| US20010032633A1 (en) * | 2000-02-24 | 2001-10-25 | Bircann Raul A. | Magnetically-efficient solenoid for a linear actuator |
| CN101054659A (en) * | 2007-05-15 | 2007-10-17 | 扬州大学 | Magnetron sputtering coating method under multi-stage acceleration mode |
| CN101363115A (en) * | 2008-03-21 | 2009-02-11 | 中国科学院金属研究所 | Arc source of rotary magnetron arc ion plating |
| CN102534523A (en) * | 2010-12-15 | 2012-07-04 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Magnetron source, magnetron sputtering device and magnetron sputtering method |
| CN102758186A (en) * | 2011-04-26 | 2012-10-31 | 中国科学院金属研究所 | Electric arc ion plating apparatus |
| CN103540900A (en) * | 2013-10-22 | 2014-01-29 | 中国科学院金属研究所 | Magnetic control arc ion plating composite depositing process and magnetic control arc ion plating composite depositing device |
| CN103643213A (en) * | 2013-11-28 | 2014-03-19 | 中国科学院金属研究所 | Auxiliary electric arc ion plating device for coupling rotary transverse magnetic field with axial magnetic field |
| CN107077893A (en) * | 2014-05-29 | 2017-08-18 | 辉光能源公司 | Electricity generation system and its correlation technique |
| CN208803135U (en) * | 2018-08-13 | 2019-04-30 | 东莞市典雅五金制品有限公司 | A kind of axial field generator for magnetic of cycle pulse scanning |
-
2018
- 2018-08-13 CN CN201810917140.3A patent/CN108728803A/en active Pending
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1522443A (en) * | 1977-04-05 | 1978-08-23 | Butler O | Electromagnetic solenoid actuators |
| JPH10140345A (en) * | 1996-11-14 | 1998-05-26 | Hitachi Ltd | Sputtering electrode and magnetron sputtering device |
| CN1314070A (en) * | 1998-06-26 | 2001-09-19 | 汤姆森管电子有限公司 | Plasma accelerator arrangement |
| JP2000239841A (en) * | 1999-02-24 | 2000-09-05 | Ulvac Japan Ltd | Method and device for sputtering |
| US20010032633A1 (en) * | 2000-02-24 | 2001-10-25 | Bircann Raul A. | Magnetically-efficient solenoid for a linear actuator |
| CN101054659A (en) * | 2007-05-15 | 2007-10-17 | 扬州大学 | Magnetron sputtering coating method under multi-stage acceleration mode |
| CN101363115A (en) * | 2008-03-21 | 2009-02-11 | 中国科学院金属研究所 | Arc source of rotary magnetron arc ion plating |
| CN102534523A (en) * | 2010-12-15 | 2012-07-04 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Magnetron source, magnetron sputtering device and magnetron sputtering method |
| CN102758186A (en) * | 2011-04-26 | 2012-10-31 | 中国科学院金属研究所 | Electric arc ion plating apparatus |
| CN103540900A (en) * | 2013-10-22 | 2014-01-29 | 中国科学院金属研究所 | Magnetic control arc ion plating composite depositing process and magnetic control arc ion plating composite depositing device |
| CN103643213A (en) * | 2013-11-28 | 2014-03-19 | 中国科学院金属研究所 | Auxiliary electric arc ion plating device for coupling rotary transverse magnetic field with axial magnetic field |
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