CN108724234A - A kind of robot Acetabula device - Google Patents
A kind of robot Acetabula device Download PDFInfo
- Publication number
- CN108724234A CN108724234A CN201810614389.7A CN201810614389A CN108724234A CN 108724234 A CN108724234 A CN 108724234A CN 201810614389 A CN201810614389 A CN 201810614389A CN 108724234 A CN108724234 A CN 108724234A
- Authority
- CN
- China
- Prior art keywords
- sucker
- layer
- disk body
- central
- layer sucker
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
- B25J15/0683—Details of suction cup structure, e.g. grooves or ridges
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
Abstract
The invention discloses a kind of robot Acetabula device, including disk body, the upper-center of the disk body is provided with central sucker, and the center of central sucker offers central stomata；The outside of the center sucker is disposed with first layer sucker, second layer sucker and third layer sucker outward from interior, and the inner central of first layer sucker, second layer sucker and third layer sucker offers through-hole；The lower end of the disk body is provided with air cavity, and air cavity is connected to central stomata, through-hole.Robot with Acetabula device at work, disk body is provided with multilayer sucker, smaller wafer or glass substrate can be picked up, each wafer or glass substrate and the suitable vacuum degree of each self-forming of each sucker, it avoids because local gas leakage causes overall vacuum degree insufficient, and adsorb and do not live, it breaks into pieces in the handling process, absorbent bodies are more stable；Whole preferably absorption crackle is more, uneven more serious substrate, is effectively monitored to adsorption process, reduces the damage of part to be adsorbed.
Description
Technical field
The present invention relates to robotic technology field, specially a kind of robot Acetabula device.
Background technology
Vacuum cup is that one kind maintains two articles to adhere to unseparated technology by vacuum degree.There is commercial Application and civil
Using it point, industrially realize that " taking " in carrying, transition process and " putting ", cooperation are real by changing the vacuum degree of sucker
Existing automated machine.Sucker can there are many kinds of, a kind of difference using inside and outside atmospheric pressure, the one kind being adsorbed on object
Pendant, or capture a kind of tool of object；Another kind is magnetic suction disc, dedicated for absorption to ferromagnetic material and solid
It is fixed, it is most of to apply in fields such as mechanical processings.Wherein for sucker when adsorbing the objects such as wafer, glass, ceramics, due to magnetic
Body is nonmagnetic to such article, so needing to use vacuum cup.
For a kind of sucker, robot and robot that notification number CN104875212A is proposed, for the suction of the structure
Disk, but there are some drawbacks, for smaller wafer or glass substrate, sucker is excessive to be not easy to adsorb and carry smaller wafer
Or glass substrate, or more for crackle, uneven more serious substrate, it is easy ventilation, it cannot between sucker is inside and outside
Suitable vacuum degree is kept, leads to object absorption loosely, is easy to break into pieces in the handling process；The another prison lacked to adsorption process
Control, for vacuum degree deficiency or it is excessive when, cannot find and handle in time, so as to cause the damage of part to be adsorbed.
Invention content
The purpose of the present invention is to provide a kind of robot Acetabula device, preferably adsorb crackle it is more, it is uneven compared with
For serious substrate and the damage of part to be adsorbed is reduced, the problems such as to solve to propose in above-mentioned background technology.
To achieve the above object, the present invention provides the following technical solutions：A kind of robot Acetabula device, including disk body,
The upper-center of the disk body is provided with central sucker, and the center of central sucker offers central stomata；The center sucker
Outside is disposed with first layer sucker, second layer sucker and third layer sucker, first layer sucker, second layer sucker outward from interior
Through-hole is offered with the inner central of third layer sucker；
Bumper ring is provided on the outside of the third layer sucker, bumper ring is fixedly connected with the upper end of disk body；
It is provided with flat head bolt on the outside of the upper end of the disk body, the lower end of disk body is provided with fixed seat, and disk body passes through tack
Bolt is fixedly connected with fixed seat；
The lower end of the disk body is provided with air cavity, and air cavity is connected to central stomata, through-hole；
The lower end of the fixed seat is provided with gas and enters pipe, and the left end that gas enters pipe is provided with pressure gauge, gas into
The right end for entering pipe is provided with pressure sensor, and gas enters pipe and connect with vacuum source；The upper end of the pressure sensor is provided with
The center of fixed plate, pressure sensor is provided with sensing chip, and pressure sensor is fixedly connected by fixed plate with fixed seat, induction
Piece is connected with air cavity.
Preferably, the cross section of the disk body is circle.
Preferably, the central sucker, first layer sucker, second layer sucker are identical with the height of third layer sucker.
Preferably, the height of the central sucker, first layer sucker, second layer sucker and third layer sucker is more than bumper ring
Height.
Preferably, the central sucker, first layer sucker, second layer sucker and third layer sucker use resin manufacture.
Preferably, the bumper ring is elastomeric member.
Preferably, padded coaming is filled in the fixed seat.
Compared with prior art, the beneficial effects of the invention are as follows：
1, the cross section of robot Acetabula device, disk body is circle, and central sucker, first layer sucker, the second layer are inhaled
Disk is identical with the height of third layer sucker, and disk body is provided with multilayer sucker, can pick up smaller wafer or glass substrate, each
Wafer or glass substrate and the suitable vacuum degree of each self-forming of each sucker, avoid because local gas leakage leads to overall vacuum degree not
Foot, and adsorb and do not live, it breaks into pieces in the handling process, absorbent bodies are more stable；Central sucker, first layer sucker, second layer sucker
It is slightly larger than the height of bumper ring with the height of third layer sucker, disk body is when adsorbing the objects such as wafer, glass, ceramics, bumper ring
The active force between disk body and part to be adsorbed is buffered, central sucker, first layer sucker, second layer sucker and third layer sucker are prevented
Excess compression causes to deform, and reduces its service life；Central sucker, first layer sucker, second layer sucker and third layer sucker can
It is manufactured with using resin material, is not easy gas leakage, seal is stronger.
2, the lower end of robot Acetabula device, disk body is provided with air cavity, and air cavity is connected to central stomata, through-hole,
One air cavity controls central sucker, first layer sucker, second layer sucker and the work of third layer sucker simultaneously；It is filled in fixed seat
Padded coaming effectively buffers or consumes the active force between disk body and part to be adsorbed, prevents from crushing part to be adsorbed；Gas enters
The left end of pipe is provided with pressure gauge, by reading the registration of pressure gauge, understands the size of vacuum degree in air cavity, prevents true in air cavity
Reciprocal of duty cycle is insufficient or excessive；The right end that gas enters pipe is provided with pressure sensor, before work, sets the threshold of pressure sensor
Value, when the threshold value in air cavity is excessive, sends out alarm, is effectively monitored to adsorption process, reduce the damage of part to be adsorbed.
Description of the drawings
Fig. 1 is the vertical view of the present invention；
Fig. 2 is the disk body sectional view of the present invention；
Fig. 3 is the sectional view of the present invention.
In figure：1, disk body；2, central sucker；3, central stomata；4, first layer sucker；5, second layer sucker；6, third layer
Sucker；7, through-hole；8, bumper ring；9, flat head bolt；10, fixed seat；11, air cavity；12, gas enters pipe；13, pressure gauge；14,
Pressure sensor；141, fixed plate；142, sensing chip；15, padded coaming.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
- 2 are please referred to Fig.1, in the embodiment of the present invention：A kind of robot Acetabula device, including disk body 1, the upper end of disk body 1
Center is provided with central sucker 2, and the center of central sucker 2 offers central stomata 3；The outside of central sucker 2 from it is interior outward according to
It is secondary to be provided with first layer sucker 4, second layer sucker 5 and third layer sucker 6, first layer sucker 4, second layer sucker 5 and third layer
The inner central of sucker 6 offers through-hole 7, and the cross section of disk body 1 is circle, central sucker 2, first layer sucker 4, the second layer
Sucker 5 is identical with the height of third layer sucker 6, and disk body 1 is provided with multilayer sucker, can inhale smaller wafer or glass substrate
It rises, each wafer or glass substrate and the suitable vacuum degree of each self-forming of each sucker are avoided because local gas leakage leads to entirety
Vacuum degree deficiency, and adsorb and do not live, it breaks into pieces in the handling process, absorbent bodies are more stable；Central sucker 2, first layer sucker 4,
Second layer sucker 5 and third layer sucker 6 can be manufactured using resin material, be not easy gas leakage, seal is stronger；Third layer sucker
6 outside is provided with bumper ring 8, and bumper ring 8 is fixedly connected with the upper end of disk body 1, central sucker 2, first layer sucker 4, second
The height of layer sucker 5 and third layer sucker 6 is slightly larger than the height of bumper ring 8, and disk body 1 is in objects such as absorption wafer, glass, ceramics
When, bumper ring 8 buffers the active force between disk body 1 and part to be adsorbed, prevents central sucker 2, first layer sucker 4, the second layer from inhaling
6 excess compression of disk 5 and third layer sucker, causes to deform, reduces its service life.
Referring to Fig. 3, being provided with flat head bolt 9 on the outside of the upper end of disk body 1, the lower end of disk body 1 is provided with fixed seat 10, disk
Body 1 is fixedly connected by flat head bolt 9 with fixed seat 10；The lower end of disk body 1 is provided with air cavity 11, air cavity 11 with central stomata
3, through-hole 7 is connected to, and an air cavity 11 controls central sucker 2, first layer sucker 4, second layer sucker 5 and third layer sucker 6 simultaneously
Work；It is filled with padded coaming 15 in fixed seat 10, effectively buffers or consume the active force between disk body 1 and part to be adsorbed,
It prevents from crushing part to be adsorbed；The lower end of fixed seat 10 is provided with gas and enters pipe 12, and the left end that gas enters pipe 12 is provided with pressure
Power table 13 understands the size of vacuum degree in air cavity 11, prevents vacuum degree deficiency in air cavity 11 by reading the registration of pressure gauge 13
Or it is excessive；The right end that gas enters pipe 12 is provided with pressure sensor 14, and gas enters pipe 12 and connect with vacuum source；Pressure sensing
The upper end of device 14 is provided with fixed plate 141, and the center of pressure sensor 14 is provided with sensing chip 142, and pressure sensor 14 passes through
Fixed plate 141 is fixedly connected with fixed seat 10, and sensing chip 142 is connected with air cavity 11, before work, sets pressure sensor
14 threshold value sends out alarm, is effectively monitored to adsorption process when the threshold value in air cavity 11 is excessive, reduces to be adsorbed
The damage of part.
Operation principle：The cross section of disk body 1 is circle, central sucker 2, first layer sucker 4, second layer sucker 5 and third
Layer sucker 6 height it is identical, disk body 1 is provided with multilayer sucker, can pick up smaller wafer or glass substrate, each wafer or
Glass substrate and the suitable vacuum degree of each self-forming of each sucker are avoided because local gas leakage causes overall vacuum degree insufficient, and
Absorption does not live, and breaks into pieces in the handling process, and absorbent bodies are more stable, and the lower end of disk body 1 is provided with air cavity 11, and air cavity 11 is in
Stomata 3, through-hole 7 is entreated to be connected to, an air cavity 11 controls central sucker 2, first layer sucker 4, second layer sucker 5 and third layer simultaneously
Sucker 6 works, and padded coaming 15 is filled in fixed seat 10, effectively buffers or consume the work between disk body 1 and part to be adsorbed
Firmly, it prevents from crushing part to be adsorbed, the left end that gas enters pipe 12 is provided with pressure gauge 13, by reading showing for pressure gauge 13
Number understands the size of vacuum degree in air cavity 11, prevents vacuum degree deficiency or excessive in air cavity 11, the right end that gas enters pipe 12 from setting
It is equipped with pressure sensor 14, before work, sets the threshold value of pressure sensor 14, when the threshold value in air cavity 11 is excessive, is sent out
Alarm, is effectively monitored adsorption process, reduces the damage of part to be adsorbed.
In summary：The cross section of robot Acetabula device, disk body 1 is circle, central sucker 2, first layer sucker
4, second layer sucker 5 is identical with the height of third layer sucker 6, and disk body 1 is provided with multilayer sucker, can be by smaller wafer or glass
Substrate picks up, and each wafer or glass substrate and the suitable vacuum degree of each self-forming of each sucker are avoided because local gas leakage is led
It causes overall vacuum degree insufficient, and adsorbs and do not live, or even break into pieces in the handling process, and is more stable when absorbent bodies, under disk body 1
End is provided with air cavity 11, and air cavity 11 is connected to central stomata 3, through-hole 7, and an air cavity 11 controls central sucker 2, first simultaneously
Layer sucker 4, second layer sucker 5 and third layer sucker 6 work, and padded coaming 15 is filled in fixed seat 10, effectively buffers or disappears
The active force between disk body 1 and part to be adsorbed is consumed, prevents from crushing part to be adsorbed, the left end that gas enters pipe 12 is provided with pressure
Table 13 understands the size of vacuum degree in air cavity 11 by reading the registration of pressure gauge 13, prevent in air cavity 11 vacuum degree deficiency or
Excessive, the right end that gas enters pipe 12 is provided with pressure sensor 14, before work, sets the threshold value of pressure sensor 14, when
When threshold value in air cavity 11 is excessive, alarm is sent out, effectively adsorption process is monitored, reduces the damage of part to be adsorbed.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
Any one skilled in the art in the technical scope disclosed by the present invention, according to the technique and scheme of the present invention and its
Inventive concept is subject to equivalent substitution or change, should be covered by the protection scope of the present invention.
Claims (7)
1. a kind of robot Acetabula device, including disk body (1), it is characterised in that：The upper-center of the disk body (1) is provided with
The center of central sucker (2), central sucker (2) offers central stomata (3)；It is described center sucker (2) outside from it is interior outward
It is disposed with first layer sucker (4), second layer sucker (5) and third layer sucker (6), first layer sucker (4), second layer sucker
(5) and the inner central of third layer sucker (6) offers through-hole (7)；
Bumper ring (8) is provided on the outside of the third layer sucker (6), bumper ring (8) is fixedly connected with the upper end of disk body (1)；
It is provided with flat head bolt (9) on the outside of the upper end of the disk body (1), the lower end of disk body (1) is provided with fixed seat (10), disk body
(1) it is fixedly connected with fixed seat (10) by flat head bolt (9)；
The lower end of the disk body (1) is provided with air cavity (11), and air cavity (11) is connected to central stomata (3), through-hole (7)；
The lower end of the fixed seat (10) is provided with gas and enters pipe (12), and the left end that gas enters pipe (12) is provided with pressure gauge
(13), gas enters the right end of pipe (12) and is provided with pressure sensor (14), and gas enters pipe (12) and connect with vacuum source；It is described
The upper end of pressure sensor (14) is provided with fixed plate (141), and the center of pressure sensor (14) is provided with sensing chip (142),
Pressure sensor (14) is fixedly connected by fixed plate (141) with fixed seat (10), sensing chip (142) and air cavity (11) company of contact
It connects.
2. a kind of robot Acetabula device as described in claim 1, it is characterised in that：The cross section of the disk body (1) is
It is round.
3. a kind of robot Acetabula device as described in claim 1, it is characterised in that：The center sucker (2), first layer
Sucker (4), second layer sucker (5) are identical with the height of third layer sucker (6).
4. a kind of robot Acetabula device as described in claim 1, it is characterised in that：The center sucker (2), first layer
The height of sucker (4), second layer sucker (5) and third layer sucker (6) is more than the height of bumper ring (8).
5. a kind of robot Acetabula device as described in claim 1, it is characterised in that：The center sucker (2), first layer
Sucker (4), second layer sucker (5) and third layer sucker (6) use resin manufacture.
6. a kind of robot Acetabula device as described in claim 1, it is characterised in that：The bumper ring (8) is elastic material
Expect component.
7. a kind of robot Acetabula device as described in claim 1, it is characterised in that：It is filled in the fixed seat (10)
Padded coaming (15).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810614389.7A CN108724234A (en) | 2018-06-14 | 2018-06-14 | A kind of robot Acetabula device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810614389.7A CN108724234A (en) | 2018-06-14 | 2018-06-14 | A kind of robot Acetabula device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108724234A true CN108724234A (en) | 2018-11-02 |
Family
ID=63929707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810614389.7A Withdrawn CN108724234A (en) | 2018-06-14 | 2018-06-14 | A kind of robot Acetabula device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108724234A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110369936A (en) * | 2019-07-19 | 2019-10-25 | 晶澳（邢台）太阳能有限公司 | Adsorbent equipment and photovoltaic string welding machine |
| CN110871454A (en) * | 2020-01-19 | 2020-03-10 | 广东电网有限责任公司东莞供电局 | Air-suction type end effector |
| CN111809222A (en) * | 2020-08-11 | 2020-10-23 | 硅密芯镀(海宁)半导体技术有限公司 | Wafer fixing device and wafer fixing method |
| CN112704597A (en) * | 2020-12-30 | 2021-04-27 | 福建恒安集团有限公司 | Forming process of large waist of baby paper diaper |
| US11613027B2 (en) | 2019-12-20 | 2023-03-28 | Piab Aktiebolag | Compressible sectioning suction cup lip and suction cup comprising the lip |
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| WO2015043638A1 (en) * | 2013-09-26 | 2015-04-02 | Süss Microtec Lithography Gmbh | Chuck for suction and holding a wafer |
| CN104858806A (en) * | 2014-02-26 | 2015-08-26 | 盛美半导体设备（上海）有限公司 | Vacuum clamp |
| CN206123690U (en) * | 2016-09-21 | 2017-04-26 | 国网内蒙古东部电力有限公司 | Grab table device based on sucking disc is gathered |
| CN206568177U (en) * | 2017-02-24 | 2017-10-20 | 成都易格机械有限责任公司 | A kind of vacuum chuck tooling platform |
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|---|---|---|---|---|
| EP0463853A1 (en) * | 1990-06-29 | 1992-01-02 | Canon Kabushiki Kaisha | Vacuum chuck |
| JP4092487B2 (en) * | 2003-04-03 | 2008-05-28 | 日産自動車株式会社 | Adsorption device |
| KR20070115248A (en) * | 2006-06-01 | 2007-12-05 | 삼성전자주식회사 | Apparatus for supporting a wafer |
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| CN201655776U (en) * | 2010-03-31 | 2010-11-24 | 固镒电子(芜湖)有限公司 | Sucker mold for rectifier crystal grain production |
| CN103531511A (en) * | 2012-07-04 | 2014-01-22 | 上海微电子装备有限公司 | Sucking disc, wafer bearing stage using same and wafer adsorption method |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110369936A (en) * | 2019-07-19 | 2019-10-25 | 晶澳（邢台）太阳能有限公司 | Adsorbent equipment and photovoltaic string welding machine |
| US11613027B2 (en) | 2019-12-20 | 2023-03-28 | Piab Aktiebolag | Compressible sectioning suction cup lip and suction cup comprising the lip |
| CN110871454A (en) * | 2020-01-19 | 2020-03-10 | 广东电网有限责任公司东莞供电局 | Air-suction type end effector |
| CN111809222A (en) * | 2020-08-11 | 2020-10-23 | 硅密芯镀(海宁)半导体技术有限公司 | Wafer fixing device and wafer fixing method |
| CN112704597A (en) * | 2020-12-30 | 2021-04-27 | 福建恒安集团有限公司 | Forming process of large waist of baby paper diaper |
| CN112704597B (en) * | 2020-12-30 | 2022-05-10 | 福建恒安集团有限公司 | Forming process of large waist of baby paper diaper |
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| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20181102 |
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