CN108716887B - Differential displacement sensor and measuring method thereof - Google Patents
Differential displacement sensor and measuring method thereof Download PDFInfo
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- CN108716887B CN108716887B CN201810481648.3A CN201810481648A CN108716887B CN 108716887 B CN108716887 B CN 108716887B CN 201810481648 A CN201810481648 A CN 201810481648A CN 108716887 B CN108716887 B CN 108716887B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
The invention provides a differential displacement sensor and a measuring method thereof, wherein the differential displacement sensor comprises a first laser beam; the first spectroscope group comprises a first spectroscope and a second spectroscope, the first spectroscope and the second spectroscope are arranged at a certain included angle, the laser beams reflected by the reflecting surface of the triangular wave reflecting mirror are made to enter the first spectroscope, one part of the laser beams are reflected by the first spectroscope and the second spectroscope in sequence and then enter one of the first photoelectric detectors, and the other part of the laser beams are transmitted by the first spectroscope and then enter the other photoelectric detector; and the processing system is used for calculating the displacement change value of the measured object according to the incident position change value of the first laser beam received by the first photoelectric detector. According to the differential displacement sensor, through the arrangement of the first spectroscope group, when the processing error exists in the triangular wave reflecting surface, the comprehensive amplification factor of the whole sensor can be kept consistent, and the measurement accuracy of the sensor is reliably ensured.
Description
Technical Field
The invention relates to the technical field of measurement, in particular to a differential displacement sensor and a measurement method thereof.
Background
The new displacement measurement principle based on the optical triangular amplification method is realized by combining a triangular wave optical device and a high-precision PSD (Position SEITIVE DEVICE, position sensitive detector) on the basis of the optical triangular amplification method. The triangular wave optical device subdivides the linear displacement at equal intervals, reduces the processing precision and the size requirement of the optical device, simultaneously reduces the size requirement of the high-precision PSD, and realizes high-precision displacement measurement in a small range. As shown in FIG. 1, the displacement measurement principle and structure based on the optical triangular amplification method can be seen from FIG. 1, after the reading head and the triangular wave optical reflection component are relatively displaced, the horizontal small displacement T is amplified to T on the photoelectric detector (PSD) through optical triangular amplification, so that the accuracy of length measurement can be greatly improved. The amplification factor is related to the angle of the reflecting surface of the triangular wave reflecting mirror, and the amplification factor of the sensor is required to be consistent, so that the angle of each reflecting surface of the triangular wave reflecting mirror is required to be consistent, however, based on the limitation of a processing technology, the angle of each reflecting surface of the triangular wave reflecting mirror cannot be ensured to be consistent, and processing errors are necessarily caused in the processing process of the triangular wave reflecting surface, so that the incident light angle of the PSD in the measuring process is changed, namely the measuring precision of the conventional displacement sensor cannot be ensured.
Disclosure of Invention
The invention aims to provide a differential displacement sensor capable of reducing the accuracy requirement of mirror surface processing of a triangular wave reflector and improving the displacement measurement accuracy and a measurement method thereof.
In order to achieve the above object, the present invention provides the following technical solutions:
A differential displacement sensor, comprising:
The triangular wave reflector comprises a plurality of reflecting surfaces;
the first laser beam is incident to one reflecting surface of the triangular wave reflecting mirror;
The first spectroscope group comprises a first spectroscope and a second spectroscope, the first spectroscope and the second spectroscope are arranged at a certain included angle, the first laser beam reflected by the reflecting surface of the triangular wave reflecting mirror is made to enter the first spectroscope, one part of the laser beam is reflected by the first spectroscope and the second spectroscope in sequence and then enters one photoelectric detector, and the other part of the laser beam is made to enter the other photoelectric detector after being transmitted by the first spectroscope;
the first photoelectric detector is used for receiving the laser beam transmitted or reflected by the first spectroscope group and measuring the incident position of the laser beam;
And the processing system is used for calculating the displacement change value of the measured object according to the incident position change value of the first laser beam received by the first photoelectric detectors.
In a further optimized scheme, the setting positions between the two photoelectric detectors I and the spectroscope group I satisfy the following relation: the incident angles of the first spectroscope group and the second spectroscope group respectively incident to the first photoelectric detectors are the same. For example, the first spectroscope and the second spectroscope are arranged at an included angle of 90 degrees, and the first photoelectric detector and the second photoelectric detector are arranged in parallel. By the arrangement, when the angle of the reflecting surface of the triangular wave reflecting mirror changes, the two photoelectric detectors are guaranteed to be respectively reduced and amplified in the same multiple, and the operation process is simplified.
In another aspect, the differential displacement sensor further includes:
a second laser beam is incident on one reflecting surface of the triangular wave reflecting mirror;
the beam splitter group II comprises a beam splitter III and a reflecting mirror IV, the beam splitter III and the reflecting mirror IV are arranged at a certain angle, the laser beam II reflected by the reflecting surface of the triangular wave reflecting mirror is made to enter the beam splitter III, one part of the laser beam II is reflected by the beam splitter III and the reflecting mirror IV in sequence and then enters one photoelectric detector II, and the other part of the laser beam II is transmitted by the beam splitter III and then enters the other photoelectric detector II;
the two photoelectric detectors II are used for receiving the laser beams II transmitted or reflected by the spectroscope group II and measuring the incident positions of the laser beams II;
the processing system is specifically configured to process the displacement variation value of the measured object according to the variation of the incident position of the first laser beam received by the first photoelectric detector or the variation of the incident position of the second laser beam received by the second photoelectric detector.
On the other hand, the embodiment of the invention also provides a method for measuring displacement by using the differential displacement sensor, which comprises the following steps:
fixing the measured object on a triangular wave reflector or a reading head;
The position relation among the first laser beam, the triangular wave reflector, the first photoelectric detector and the first spectroscope group is adjusted, so that the first laser beam reflected by the reflecting surface of the triangular wave reflector is incident to the first spectroscope, one part of the first laser beam is reflected by the first spectroscope and the second spectroscope in sequence and then is incident to one of the first photoelectric detectors, and the other part of the first laser beam is transmitted by the first spectroscope and then is incident to the other one of the first photoelectric detectors;
Transmitting a first laser beam, wherein the first laser beam is reflected by a reflecting surface of the triangular wave reflecting mirror and then enters a first spectroscope group, the first laser beam is reflected by the first spectroscope group and then is detected by a first photoelectric detector, and the first spectroscope group transmits and then is detected by a second photoelectric detector;
The measured object is displaced, and in the displacement process, the first photoelectric detectors detect the position change of the first laser beam respectively until the measured object stops displacing;
The processing system obtains a displacement value of the measured object by processing the position change detected by the first photoelectric detector.
Compared with the prior art, the invention has the following beneficial effects:
According to the differential displacement sensor, through the arrangement of the first spectroscope group, when the angle of the reflecting surface of the triangular wave reflecting mirror has a processing error, the amplification factor of one photoelectric detector is increased, the amplification factor of the other photoelectric detector is reduced, the overall amplification factor of the differential displacement sensor can be kept unchanged as a result of synthesis, namely, the amplification factor of the whole differential displacement sensor is not influenced by the angle processing error of the reflecting surface of the triangular wave reflecting mirror, and the displacement measurement precision is insensitive to the angle processing error of the triangular wave reflecting surface, so that the measurement precision of the differential displacement sensor can be improved.
The differential displacement sensor can realize continuous displacement measurement through the arrangement of the photoelectric detector I, the photoelectric detector II and the corresponding spectroscope group.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic diagram of a displacement measurement principle of a displacement sensor in the prior art.
Fig. 2 is a schematic diagram showing a measurement principle of a differential displacement sensor with a structure according to embodiment 1.
Fig. 3 is a schematic diagram showing a measurement principle of a differential displacement sensor with another structure provided in embodiment 1.
Fig. 4 is a schematic diagram showing a measurement principle of a differential displacement sensor with another structure provided in embodiment 1.
Fig. 5 is a schematic diagram showing a measurement principle of a differential displacement sensor with a structure according to embodiment 2.
The reference numerals in the figures illustrate:
The laser device comprises a first laser source 1, a second laser source 2, a first laser beam 3, a second laser beam 4, a triangular wave reflector 5, a shell 6, a first photoelectric detector 7, a second photoelectric detector 8, a first spectroscope group 9 and a second spectroscope group 10.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. All other embodiments, which can be obtained by a person skilled in the art without creative efforts, are included in the protection scope of the present invention based on the embodiments of the present invention.
Example 1
Referring to fig. 2, a differential displacement sensor is provided in this embodiment, which includes a laser source 1, a triangular wave reflector 5, a beam splitter group 9, and a photodetector 7, wherein,
The laser source 1 is used for emitting a laser beam 3 and directing the laser beam to a reflecting surface of the triangular wave reflector 5; the first spectroscope group 9 comprises a first spectroscope and a second spectroscope, the first spectroscope and the second spectroscope are vertically arranged, the first laser beam 3 reflected by the reflecting surface of the triangular wave reflector 5 is incident to the first spectroscope, one part of the first laser beam 3 is reflected by the first spectroscope and the second spectroscope and then is incident to one of the first photoelectric detectors 7, and the other part of the first laser beam 3 is transmitted by the first spectroscope and then is incident to the other photoelectric detector 7; the two photoelectric detectors I7 are arranged in parallel, and the incidence angles of the laser beams I3 incident to the two photoelectric detectors I7 are the same; the two photoelectric detectors 7 are used for receiving the incident laser beam I and measuring the incident position of the incident laser beam I; and the processing system is used for calculating the displacement change value of the measured object according to the incident position change value of the laser beam I3 received by the two photoelectric detectors I.
In order to ensure the amplification performance of the differential displacement sensor, the included angle between the first laser beam incident to the first photodetector 7 and the first photodetector 7 is preferably smaller than 45 degrees.
As shown in fig. 2, the laser beam one 3 before displacement is indicated by a solid line, the laser beam one 3 after displacement is indicated by a broken line, and the transmission path of the laser beam one 3 is as follows:
Before displacement, the first laser source 1 emits the first laser beam 3 to a reflecting surface of the triangular wave reflecting mirror 5, the reflecting surface of the triangular wave reflecting mirror 5 reflects the first laser beam 3 to a first spectroscope in the first spectroscope group 9, a part of the first laser beam 3 is firstly reflected to a second spectroscope and then is reflected to one of the first photoelectric detectors 7 (PSD 2 in the figure) through the second spectroscope, the other part of the first laser beam 3 is transmitted through the first spectroscope and then enters the other photoelectric detector 7 (PSD 1 in the figure), the PSD1 receives the first laser beam transmitted by the first spectroscope and measures the incident position, which is marked as a first incident position, and the PSD2 receives the first laser beam reflected by the second spectroscope and measures the incident position, which is marked as a second incident position.
After displacement (shown as displacement to the left in fig. 2, the first laser source 1, the first beam splitter group 9 and the first photodetector 7 are synchronously displaced), the first laser source 1 emits the first laser beam 3 to the same reflecting surface of the triangular wave reflecting mirror 5, the reflecting surface of the triangular wave reflecting mirror 5 reflects the first laser beam 3 to the first beam splitter in the beam splitter group 9, a part of the first laser beam 3 is reflected by the first beam splitter to the second beam splitter and then reflected by the second beam splitter to one of the photodetectors 7 (PSD 2 in the figure), the other part of the first laser beam 3 is transmitted by the first beam splitter and then enters the other photodetector 7 (PSD 1 in the figure), the PSD1 receives the first transmitted laser beam and measures the incident position, which is referred to as a third incident position, and the PSD2 receives the first laser beam reflected by the second beam splitter and measures the incident position, which is referred to as a fourth incident position.
The displacement variation of the PSD1 can be obtained from the first incidence position and the third incidence position, the displacement variation of the PSD2 can be obtained from the second incidence position and the fourth incidence position, the weighted average of the displacement variation of the PSD1 and the PSD2 is taken as the displacement variation of the differential displacement sensor, and then the displacement of the measured object can be accurately calculated according to the amplification factor of the system.
In this embodiment, by arranging the two photo-detectors 7 and the beam splitter group 9, when there is a processing error in the angles of the plurality of reflection surfaces of the triangular wave reflector, i.e. the angles of the reflection surfaces are different, the magnification of one photo-detector 7 (such as PSD2 in FIG. 2) is reduced, the magnification of the other photo-detector 7 (such as PSD1 in FIG. 2) is increased, and the result is the combination (i.e. ) The amplification factor of the whole differential displacement sensor can be kept unchanged, so that the amplification factor can be influenced by the angle processing error of the reflecting surface, in other words, the amplification factor of the differential displacement sensor can be ensured not to be influenced by the processing technology of the triangular wave reflector 5.
It should be noted that, in this embodiment, based on the consideration of convenient operation and assembly, the first beam splitter and the second beam splitter are disposed at an angle of 90 degrees, and the first two photodetectors are disposed in parallel. However, as an embodiment, there may be other arrangements of the first spectroscope set, where the first two photodetectors are not arranged in parallel, for example, as shown in fig. 3, so long as the following conditions are satisfied:
The first spectroscope and the second spectroscope are arranged at a certain included angle, the first laser beam reflected by the reflecting surface of the triangular wave reflecting mirror is made to enter the first spectroscope, one part of the first laser beam is reflected by the first spectroscope and the second spectroscope in sequence and then enters one photoelectric detector, and the other part of the first laser beam is transmitted by the first spectroscope and then enters the other photoelectric detector.
For example, when the angle between the first beam splitter and the second beam splitter is not 90 degrees, the angle of the reflecting surface of the triangular wave reflecting mirror changes, the displacement measured by the PSD1 and the PSD2 is reduced (the displacement amount of the object to be measured is still in an amplified state, that is, only the reduction of the amplification factor), and one is increased, but the reduction is different from the increase, for example, the amplification factor after the displacement of the PSD1 is increased is d1 times, the amplification factor after the displacement of the PSD2 is reduced is d2 times, and then the displacement value of the whole differential displacement sensor (that is, the displacement value of the object to be measured) is:
In addition, when the first spectroscope and the second spectroscope are disposed at an included angle other than 90 degrees, the incident angles of the laser beams incident to the first PSD1 and the second PSD2 can be the same by setting the position relationship between the first PSD1 and the second PSD2, so that when the angle of the reflecting surface of the triangular wave reflector changes, the displacement changes measured by the first PSD1 and the second PSD2 are respectively reduced and increased by the same multiple, as shown in FIG. 3, so as to simplify the operation process.
In fig. 2 to 3, the angle between the reflecting surface of the triangular wave reflecting mirror 5 and the horizontal plane is 30 degrees, and the incident angle of the laser beam one 3 incident on the reflecting surface of the triangular wave reflecting mirror 5 is 30 degrees, so the laser beam reflected by the reflecting surface of the triangular wave reflecting mirror 5 is vertically incident on the photodetector one 7, and fig. 2 to 3 are only examples, and in this embodiment, the angle of the reflecting surface of the triangular wave reflecting mirror 5 is not limited, and the incident angle of the laser beam one 3 incident on the reflecting surface of the triangular wave reflecting mirror 5 is also not limited, for example, as shown in fig. 4.
Referring to fig. 1, the differential displacement sensor may further include a housing 6, where the first laser source 1, the first spectroscope set 9 and the first photodetector 7 are fixedly disposed in the housing 6 to form a reading head, and the first laser beam 3 emitted by the first laser source 1 and the reflected beam thereof may pass through a transmitting-receiving end surface of the reading head. The laser source 1, the spectroscope group 9 and the photoelectric detector 7 are fixedly arranged in the shell 6, so that the positions of the laser source 1, the spectroscope group 9 and the photoelectric detector are kept fixed, and synchronous displacement of the laser source, the spectroscope group and the photoelectric detector can be ensured.
During measurement, the triangular wave reflector 5 can be fixed on the measured object according to actual application conditions, the reading head is kept fixed, and when the measured object is displaced, the triangular wave reflector 5 and the reading head move relatively, and the reading head can measure and obtain the displacement value of the triangular wave reflector 5, namely the measured object; or the reading head can be fixed on the measured object, the triangular wave reflector 5 is kept motionless, the measured object is displaced to drive the reading head to move, the reading head and the triangular wave reflector 5 are relatively displaced, the reading head can measure the relative displacement between the reading head and the triangular wave reflector 5, and then the displacement value of the measured object is obtained; the triangular wave reflector 5 or the reading head is selected for measurement to be fixed on the measured object, so that the measurement convenience is improved.
When the differential displacement sensor is used for measuring displacement, the steps are as follows:
step one, fixing an object to be measured on a triangular wave reflector or a reading head;
Step two, adjusting the position relation among the laser beam I, the triangular wave reflector, the photoelectric detectors I and the spectroscope group I, so that the laser beam I reflected by the reflecting surface of the triangular wave reflector is incident to the spectroscope I, one part of the laser beam I is reflected by the spectroscope I and the reflecting mirror II in sequence and then is incident to one of the photoelectric detectors I, and the other part of the laser beam is transmitted by the spectroscope I and then is incident to the other photoelectric detector I;
emitting a first laser beam, wherein the first laser beam is reflected by a reflecting surface of the triangular wave reflecting mirror and then enters a first spectroscope group, the first laser beam is reflected by the first spectroscope group and then is detected by a first photoelectric detector to be at an initial position of the reflected laser beam, and the first laser beam is transmitted by the first spectroscope group and then is detected by a second photoelectric detector to be at an initial position of the transmitted laser beam;
step four, the measured object is displaced, and in the displacement process, the two photoelectric detectors I respectively detect the position change of the laser beam I until the measured object stops displacement;
And fifthly, the processing system obtains a displacement value of the measured object by processing the position change detected by the first photoelectric detectors.
Example 2
Referring to fig. 5, compared with the differential displacement sensor described in embodiment 1, the differential displacement sensor provided in this embodiment further includes a second laser beam incident on the other reflecting surface of the triangular wave reflecting mirror 5; the following components:
The beam splitter group II comprises a beam splitter III and a reflecting mirror IV, the beam splitter III and the reflecting mirror IV are vertically arranged, the laser beam II reflected by the other reflecting surface of the triangular wave reflecting mirror 5 is incident to the beam splitter III, one part of the laser beam II is reflected by the beam splitter III and the reflecting mirror IV in sequence and then is incident to one of the photoelectric detectors II 8, and the other part of the laser beam II is transmitted by the beam splitter III and then is incident to the other photoelectric detector II 8; the positional relationship of the two photoelectric detectors II 8 satisfies: the incidence angles of the laser beams II 4 incident on the two photoelectric detectors II 8 are the same; the two photodetectors 8 are used for receiving the incident laser beam 4 and measuring the incident position thereof.
In the differential displacement sensor, the processing system processes and obtains the displacement variation value of the measured object according to the variation of the first incidence position of the laser beam 3 received by the first photoelectric detector 7 and the variation of the second incidence position of the laser beam 4 received by the second photoelectric detector 8.
The differential displacement sensor in this embodiment can realize continuous displacement measurement. Specifically, one of the two laser beams can be selected for measurement, when one of the laser beam reflection points is located at some positions of the reflection surfaces, such as the top end of the reflection surface, the intersection line position of the two reflection surfaces, and the like, the length of the corresponding photoelectric detector is limited, so that the corresponding photoelectric detector cannot reflect the laser beam, the displacement value of the corresponding photoelectric detector cannot be calculated, the other laser beam reflection point is located at other positions of the other reflection surface, the other laser beam reflection point can reflect the corresponding photoelectric detector and can perform conversion measurement, each moment of movement of a measured object can be realized, at least one of the laser beams reflected by each reflection surface on the triangular wave reflector 5 can reflect the corresponding photoelectric detector, and at the moment, the processing system can switch back and forth to calculate the position change of the reflected laser beams of the two photoelectric detectors for superposition accumulation, so that the measurement of the displacement of the measured object is realized, the measurement method is simple and reliable, the operation is convenient, and the measurement precision can be improved.
As shown in fig. 5, the first laser beam 3 and the second laser beam 4 are respectively emitted by the first laser source 1 and the second laser source 2, and this arrangement can simplify the structure of the differential displacement sensor. Of course, the first laser beam 3 and the second laser beam 4 can be obtained from one laser source, and a beam splitter and at least one reflecting mirror are needed, so that the structure is complex.
The two sets of measuring systems can be arranged in one shell to form one reading head, or the two sets of measuring systems can be respectively arranged in one shell to form two reading heads. Specifically, the first laser source, the second laser source, the first spectroscope set, the second spectroscope set, the first photoelectric detector and the second photoelectric detector are fixedly arranged in a shell to form a reading head. Or the first laser source, the first spectroscope group and the first photoelectric detector are fixedly arranged in one shell to form a reading head, and the second laser source, the second spectroscope group and the second photoelectric detector are fixedly arranged in the other shell to form the other reading head.
The first spectroscope group and the second spectroscope group can be integrally formed components, are convenient to manufacture and ensure mutual angle fixation, and meanwhile, the first spectroscope and the second spectroscope are made of the same raw material and have a light splitting function; the light source can also be formed by connecting a spectroscope and a reflector, and the reflector II and the reflector IV can adopt a total reflection mirror because the reflector II and the reflector IV have reflection effects.
Similarly, the third spectroscope and the fourth reflecting mirror can be arranged at an included angle other than 90 degrees, and the included angle between the third spectroscope and the fourth reflecting mirror can be the same as or different from the included angle between the first spectroscope and the second reflecting mirror.
As shown in fig. 2, a position sensitive detector PSD is used for the photodetector.
It is easy to understand that in this embodiment, the purpose of setting the first laser source and the second laser source is to avoid that when one group of photodetectors (one or two) cannot receive the laser beam, the other group of photodetectors can receive the laser beam to realize displacement measurement, so other setting modes besides the setting mode shown in fig. 5 are also possible, as long as the first laser source and the second laser source are set in a staggered manner, so that the initial incident point positions of the first laser beam and the second laser beam on the first reflecting surface are different. For example, the second laser beam may be incident on another first reflecting surface on the same side as the first reflecting surface on which the first laser beam is incident, or may be incident on another first reflecting surface on the opposite side to the first reflecting surface on which the first laser beam is incident (see fig. 5), or may be incident on the same reflecting surface on which the first laser beam is incident, but the incident point positions are different.
When the differential displacement sensor in this embodiment is applied to displacement measurement, the steps are as follows:
step one, fixing an object to be measured on a triangular wave reflector or a reading head;
Step two, adjusting the position relation among the laser beam I, the triangular wave reflector, the photoelectric detectors I and the spectroscope group I, so that the laser beam I reflected by the reflecting surface of the triangular wave reflector is incident to the spectroscope I, one part of the laser beam I is reflected by the spectroscope I and the reflecting mirror II in sequence and then is incident to one of the photoelectric detectors I, and the other part of the laser beam is transmitted by the spectroscope I and then is incident to the other photoelectric detector I; the position relation among the laser beam II, the triangular wave reflector, the photoelectric detectors II and the spectroscope group II is adjusted, so that the laser beam II reflected by the reflecting surface of the triangular wave reflector is incident to the spectroscope III, one part of the laser beam II is reflected by the spectroscope III and the reflecting mirror IV in sequence and then is incident to one of the photoelectric detectors II, and the other part of the laser beam II is transmitted by the spectroscope III and then is incident to the other photoelectric detector II;
Emitting a first laser beam, wherein the first laser beam is reflected by a reflecting surface of the triangular wave reflecting mirror and then enters a first spectroscope group, the first laser beam is reflected by the first spectroscope group and then is detected by a first photoelectric detector to be at an initial position of the reflected laser beam, and the first laser beam is transmitted by the first spectroscope group and then is detected by a second photoelectric detector to be at an initial position of the transmitted laser beam; or emitting a second laser beam, wherein the second laser beam is reflected by the reflecting surface of the triangular wave reflecting mirror and then enters the second spectroscope group, the initial position of the reflected laser beam is detected by the second photoelectric detector after being reflected by the second spectroscope group, and the initial position of the transmitted laser beam is detected by the second photoelectric detector after being transmitted by the second spectroscope group;
Step four, the measured object is displaced, in the displacement process, the first photoelectric detector detects the position change of the first laser beam respectively, or the second photoelectric detector detects the position change of the second laser beam respectively until the measured object stops displacing;
And fifthly, the processing system obtains a displacement value of the measured object by processing the position change detected by the first photoelectric detector or the second photoelectric detector.
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any person skilled in the art will readily recognize that changes and substitutions are within the scope of the present invention.
Claims (9)
1. A differential displacement sensor, which comprises a differential displacement sensor, characterized by comprising the following steps:
The triangular wave reflector comprises a plurality of reflecting surfaces;
the first laser beam is incident to the reflecting surface of the triangular wave reflecting mirror;
The first spectroscope group comprises a first spectroscope and a second spectroscope, the first spectroscope and the second spectroscope are arranged at a certain included angle, the first laser beam reflected by the reflecting surface of the triangular wave reflecting mirror is made to enter the first spectroscope, one part of the laser beam is reflected by the first spectroscope and the second spectroscope in sequence and then enters one photoelectric detector, and the other part of the laser beam is made to enter the other photoelectric detector after being transmitted by the first spectroscope;
The first spectroscope and the second spectroscope are arranged at an included angle of 90 degrees, and the first photoelectric detector and the second photoelectric detector are arranged in parallel;
the first photoelectric detectors are used for receiving the first laser beams transmitted or reflected by the first spectroscope group and measuring the incident positions of the first laser beams;
The processing system is used for calculating a displacement change value of the measured object according to the incident position change value of the first laser beam received by the two photoelectric detectors;
The displacement change value of the measured object is as follows:
Wherein X represents the displacement value of the differential displacement sensor, Y1 represents the change distance of the incident point of one photoelectric detector before and after displacement, Y2 represents the change distance of the incident point of the other photoelectric detector before and after displacement, d1 represents the magnification of the one photoelectric detector after the displacement change, and d2 represents the magnification of the other photoelectric detector after the displacement change.
2. The differential displacement sensor according to claim 1, wherein the arrangement positions between the two photodetectors one and the spectroscope group one satisfy the relationship: the incidence angles of the laser beams which are respectively incident to the first photoelectric detectors after passing through the first spectroscope group are the same.
3. The differential displacement sensor of claim 1, further comprising a housing, wherein the first laser beam is emitted by the first laser source, and wherein the first laser source, the first beam splitter group, and the first two photodetectors are fixedly disposed within the housing to form the readhead.
4. A differential displacement sensor according to any one of claims 1-2, further comprising: the first laser beam and the second laser beam are respectively different in initial incidence point positions of the triangular wave reflecting surface;
The beam splitter group II comprises a beam splitter III and a reflecting mirror IV, the beam splitter III and the reflecting mirror IV are arranged at a certain included angle, the laser beam II reflected by the reflecting surface of the triangular wave reflecting mirror is made to enter the beam splitter III, one part of the laser beam II is reflected by the beam splitter III and the reflecting mirror IV in sequence and then enters one photoelectric detector II, and the other part of the laser beam II is transmitted by the beam splitter III and then enters the other photoelectric detector II;
the two photoelectric detectors II are used for receiving the laser beams II transmitted or reflected by the spectroscope group II and measuring the incident positions of the laser beams II;
the processing system is specifically configured to process the displacement variation value of the measured object according to the variation of the incident position of the first laser beam received by the first photoelectric detector or the variation of the incident position of the second laser beam received by the second photoelectric detector.
5. The differential displacement sensor of claim 4, wherein the angle between beam splitter three and mirror four is the same as the angle between beam splitter one and mirror two.
6. The differential displacement sensor of claim 4, wherein the first and second laser beams are incident on the same reflecting surface of the triangular wave mirror or the first and second laser beams are incident on two different reflecting surfaces of the triangular wave mirror.
7. The differential displacement sensor according to claim 4, further comprising a housing, wherein the first laser beam and the second laser beam are respectively emitted by the first laser source and the second laser source, and the first laser source, the second laser source, the first beam splitter group, the second beam splitter group, the first two photodetectors and the second two photodetectors are fixedly arranged in the housing to form a reading head; or alternatively
The laser beam I and the laser beam II are respectively emitted by the laser source I and the laser source II, the laser source I, the spectroscope group I and the two photoelectric detectors I are fixedly arranged in one shell to form a reading head, and the laser source II, the spectroscope group II and the two photoelectric detectors II are fixedly arranged in the other shell to form the other reading head.
8. A method of measuring a differential displacement sensor according to any one of claims 1 to 3, comprising the steps of:
fixing the measured object on a triangular wave reflector or a reading head;
The position relation among the first laser beam, the triangular wave reflector, the first photoelectric detector and the first spectroscope group is adjusted, so that the first laser beam reflected by the reflecting surface of the triangular wave reflector is incident to the first spectroscope, one part of the first laser beam is reflected by the first spectroscope and the second spectroscope in sequence and then is incident to one of the first photoelectric detectors, and the other part of the first laser beam is transmitted by the first spectroscope and then is incident to the other one of the first photoelectric detectors;
Transmitting a first laser beam, wherein the first laser beam is reflected by a reflecting surface of the triangular wave reflecting mirror and then enters a first spectroscope group, the first laser beam is reflected by the first spectroscope group and then is detected by a first photoelectric detector, and the first spectroscope group transmits and then is detected by a second photoelectric detector;
The measured object is displaced, and in the displacement process, the first photoelectric detectors detect the position change of the first laser beam respectively until the measured object stops displacing;
The processing system obtains a displacement value of the measured object by processing the position change detected by the first photoelectric detector.
9. The measurement method of a differential displacement sensor according to any one of claims 4 to 7, comprising the steps of:
fixing the measured object on a triangular wave reflector or a reading head;
The position relation among the first laser beam, the triangular wave reflector, the first photoelectric detector and the first spectroscope group is adjusted, so that the first laser beam reflected by the reflecting surface of the triangular wave reflector is incident to the first spectroscope, one part of the first laser beam is reflected by the first spectroscope and the second spectroscope in sequence and then is incident to one of the first photoelectric detectors, and the other part of the first laser beam is transmitted by the first spectroscope and then is incident to the other one of the first photoelectric detectors; the position relation among the laser beam II, the triangular wave reflector, the photoelectric detectors II and the spectroscope group II is adjusted, so that the laser beam II reflected by the reflecting surface of the triangular wave reflector is incident to the spectroscope III, one part of the laser beam II is reflected by the spectroscope III and the reflecting mirror IV in sequence and then is incident to one of the photoelectric detectors II, and the other part of the laser beam II is transmitted by the spectroscope III and then is incident to the other photoelectric detector II;
Transmitting a first laser beam, wherein the first laser beam is reflected by a reflecting surface of the triangular wave reflecting mirror and then enters a first spectroscope group, the first laser beam is reflected by the first spectroscope group and then is detected by a first photoelectric detector, and the first spectroscope group transmits and then is detected by a second photoelectric detector; or emitting a second laser beam, wherein the second laser beam is reflected by the reflecting surface of the triangular wave reflecting mirror and then enters the second spectroscope group, the initial position of the reflected laser beam is detected by the second photoelectric detector after being reflected by the second spectroscope group, and the initial position of the transmitted laser beam is detected by the second photoelectric detector after being transmitted by the second spectroscope group;
The displacement of the measured object is carried out, and in the displacement process, the first photoelectric detectors respectively detect the position change of the first laser beam, or the second photoelectric detectors respectively detect the position change of the second laser beam until the measured object stops displacing;
the processing system is used for processing the position change detected by the first photoelectric detector or the second photoelectric detector to obtain a displacement value of the detected object.
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| CN109084692B (en) * | 2018-11-05 | 2024-10-15 | 北方民族大学 | Differential displacement sensor with refractive mirror and measuring method thereof |
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