CN215064355U - Displacement sensor based on photoelectric detector array - Google Patents
Displacement sensor based on photoelectric detector array Download PDFInfo
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- CN215064355U CN215064355U CN202121560314.9U CN202121560314U CN215064355U CN 215064355 U CN215064355 U CN 215064355U CN 202121560314 U CN202121560314 U CN 202121560314U CN 215064355 U CN215064355 U CN 215064355U
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Abstract
The utility model provides a displacement sensor based on photoelectric detector array, include: the first reflecting mirror is used for receiving the laser beam reflected by the first reflecting surface of the triangular wave reflecting mirror and reflecting the laser beam to the second reflecting surface of the triangular wave reflecting mirror along the same path; the first optical deflector is used for deflecting the incident angle of the received laser beam within a set angle interval; the first photoelectric detector array comprises a plurality of first photoelectric detectors which are arranged at intervals and used for receiving the laser beams deflected by the first optical deflector; and the processing system is used for calculating the displacement change value of the measured object according to the time when the first photoelectric detector receives the laser beam, the vertical distance between the first photoelectric detector and the first optical deflector, the distance between the first photoelectric detectors and the deflection speed of the first optical deflector. The utility model discloses displacement sensor's measurement accuracy can be improved.
Description
Technical Field
The utility model relates to a measure technical field, in particular to displacement sensor based on photoelectric detector array.
Background
The new displacement measurement principle based on the optical triangulation amplification method is realized by combining a triangular wave optical Device and a high-precision phototriode (Position sensitive Device, also called a photoelectric detector) on the basis of the optical triangulation amplification method. As shown in fig. 4, in the displacement sensor, the reflected laser beam is deflected by the optical deflector, and a time difference is generated between two times of reception in one deflection period, as the movement progresses, the time difference of receiving the reflected laser beam by one of the photodetectors becomes larger, and the time difference of receiving the reflected laser beam by the other photodetector becomes smaller, so that the displacement can be measured according to the time difference and the deflection angle. The structure realizes differential amplification measurement through time measurement results of two photodetectors, but nonlinear errors exist in the scheme, and the requirement on time uniformity is high.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a can improve measurement accuracy's displacement sensor based on photoelectric detector array to reduce the influence of nonlinear error, further improve measurement accuracy.
In order to achieve the above object, the present invention provides the following technical solutions:
a displacement sensor based on a photodetector array, comprising:
a triangular wave reflector including a first reflecting surface and a second reflecting surface;
a first laser beam is incident to a first reflecting surface of the triangular wave reflecting mirror;
the first reflecting mirror is used for receiving a laser beam reflected by a first reflecting surface of the triangular wave reflecting mirror and reflecting the laser beam to a second reflecting surface of the triangular wave reflecting mirror along the same path in the measuring process that the laser beam is incident to the same first reflecting surface;
the first optical deflector is used for deflecting the incident angle of the laser beam reflected by the second reflecting surface of the triangular wave reflecting mirror within a set angle interval;
the first photoelectric detector array comprises a plurality of first photoelectric detectors which are arranged at intervals and used for receiving the laser beams deflected by the first optical deflector;
and the processing system is used for calculating the displacement change value of the measured object according to the time when the first photoelectric detector receives the laser beam, the vertical distance between the first photoelectric detector and the first optical deflector, the distance between the first photoelectric detectors and the deflection speed of the first optical deflector.
In a more optimized scheme, the distance between every two adjacent photodetectors is equal. By arranging the photoelectric detectors in equidistant distribution, the distance between every two photoelectric detectors can be avoided from being measured and calculated, the calculation process is simplified, and meanwhile, the calculation amount is reduced.
In one embodiment, the first reflecting surface and the second reflecting surface of the triangular wave reflecting mirror respectively form an angle of 150 degrees with the horizontal plane, the first incident angle of the laser beam to the first reflecting surface is 30 degrees, and the first reflecting mirror is parallel to the first reflecting surface.
Preferably, the displacement sensor based on the photodetector array further includes:
the second laser beam is incident to the first reflecting surface of the triangular wave reflecting mirror, and the initial incident point positions of the first laser beam and the second laser beam on the first reflecting surface are different;
the second reflecting mirror is used for receiving the laser beam reflected by the first reflecting surface of the triangular wave reflecting mirror and reflecting the laser beam to the second reflecting surface of the triangular wave reflecting mirror along the same path in the measuring process that the second laser beam is incident to the same first reflecting surface;
a second optical deflector for deflecting the incident angle of the laser beam reflected by the second reflecting surface of the triangular wave reflector within a set angle interval;
the second photoelectric detector array comprises a plurality of second photoelectric detectors which are arranged at intervals and used for receiving the laser beams deflected by the second optical deflector;
the processing system is specifically used for calculating the displacement change value of the measured object according to the time of the first photoelectric detector for receiving the laser beam, the vertical distance between the first photoelectric detector and the first optical deflector, the distance between the first photoelectric detectors and the deflection speed of the first optical deflector; or, the displacement change value of the measured object is calculated according to the time when the second photoelectric detector receives the laser beam, the vertical distance between the second photoelectric detector and the second optical deflector, the distance between the second photoelectric detector and the second optical deflector and the deflection speed of the second optical deflector.
In a more optimized scheme, the distance between every two adjacent photodetectors is equal.
Compared with the prior art, the utility model discloses following beneficial effect has:
the utility model discloses displacement sensor based on photoelectric detector array, light deflector are by voltage signal control angular adjustment, and current T0 is constantly incident to one of them photoelectric detector, and the angle size an that the angle deflected this moment can be confirmed, and T1 is incident to next photoelectric detector next moment, and the angle size b that its angle deflected also can be confirmed. From the angle a and the angle b, the measured distance of the two photodetectors can be determined, and the theoretical distance (position interval) of the two photodetectors is known, and the theoretical distance minus the measured distance is the actual displacement of the measured object in the time period T1-T0.
The utility model discloses a displacement measurement is realized to the time difference that two photoelectric detector received the laser beam at present back, can realize the displacement measurement of high accuracy through the time measurement of high accuracy, changes displacement measurement into time measurement, realizes more easily than the displacement measurement of traditional displacement measurement sensor high accuracy, and the mode through the photoelectric detector array can reduce the influence of nonlinear error moreover, then further improves measurement accuracy.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to these drawings without inventive efforts.
Fig. 1 is a schematic diagram illustrating a measurement principle of a displacement sensor based on a photodetector array in a structure provided in embodiment 1.
Fig. 2 shows a schematic view of the measurement principle.
Fig. 3 is a schematic diagram illustrating a measurement principle of a displacement sensor based on a photodetector array in another structure provided in embodiment 2.
Fig. 4 is a schematic view of a measurement principle of a displacement sensor in the prior art to which the present invention is directed.
The reference numbers in the figures illustrate:
the laser device comprises a first laser source 1, a second laser source 2, a first laser beam 3, a second laser beam 4, a triangular wave reflector 5, a shell 6, a first photodetector 7, a first reflector 9, a first optical deflector 10, a second reflector 11, a second optical deflector 12 and a second photodetector 13; a first reflective surface 51 and a second reflective surface 52.
Detailed Description
The technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the drawings in the embodiment of the present invention. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without any inventive work belong to the protection scope of the present invention.
Example 1
Referring to fig. 1, the present embodiment provides a displacement sensor based on a photodetector array, including a first laser source 1, a triangular wave reflector 5, a first reflector 9, and a photodetector array, wherein the triangular wave reflector 5 includes a plurality of reflective surfaces, and for convenience of understanding, a reflective surface for receiving a laser beam emitted by the first (or second) laser source is defined as a first reflective surface, and a reflective surface for receiving a laser beam reflected by the first (or second) reflector is defined as a second reflective surface.
The first photodetector array is composed of a plurality of first photodetectors 7, for example, 6 photodetectors in fig. 1, and two photodetectors 7 are disposed at intervals. For convenience of calculation, the photo-detectors are preferably arranged at equal intervals, that is, the intervals between every two adjacent photo-detectors 7 are equal.
It should be noted that for easier illustration and viewing, only the first (left to right) photodetector-7 shifted position representation (dashed box) is shown in fig. 1, and the other photodetector-7 shifted position representation is not shown.
In the displacement sensor based on the photodetector array in this embodiment:
the laser source I1 is used for emitting a laser beam I3 and emitting the laser beam I to a first reflecting surface 51 of the triangular wave reflector 5;
the first reflecting mirror 9 is used for receiving the laser beam reflected by the first reflecting surface 51 of the first triangular wave reflecting mirror 5 from the first laser beam 3, and enabling the laser beam to be reflected to the second reflecting surface 52 of the triangular wave reflecting mirror 5 along the same path in the measuring process that the first laser beam 3 is incident to the same first reflecting surface 51;
the first optical deflector 10 is used for enabling the angle of the laser reflected by the second reflecting surface 52 of the triangular wave reflecting mirror 5 to deflect at a constant speed within a set angle interval;
the photoelectric detector I7 is used for receiving the laser beam deflected by the optical deflector I10; that is, the photodetector one 7 is within the set angle range of the optical deflector one 10, thereby ensuring that the laser beam deflected by the optical deflector one 10 can be received.
And the processing system is used for calculating the displacement change value of the measured object according to the time when the first photodetector 7 receives the laser beam, the vertical distance between the first photodetector 7 and the first optical deflector 10, the distance between the first photodetector 7 and the deflection speed of the first optical deflector 10.
The processing system may be an arithmetic circuit composed of components, and different circuit structures are provided based on different implementation manners, but a person skilled in the art can easily implement the arithmetic circuit according to the calculation process of the processing system, so that a specific arithmetic circuit diagram is not given here. The processing system may also be a processor integrated with an arithmetic circuit, such as an STM32 series single chip microcomputer.
The purpose of the first optical deflector 10 is to deflect the incident laser beam, and in the simplest embodiment, a reflecting mirror (or a multi-surface reflecting mirror) is arranged on a rotating platform, and the rotating platform rotates to change the incident angle of the laser beam incident to the reflecting mirror, so that the deflection purpose is realized. The rotating table is driven to rotate by a motor, and the motor is controlled by a voltage signal. In addition, in this embodiment, the optical deflector rotates at a constant speed, which has the advantage of simplifying the calculation by not calculating the deflection angle according to the speed and time every time (every calculation period) of measurement and calculation. However, as an implementation possibility, the optical deflector may not rotate at a constant speed, but the calculation is relatively complicated.
Preferably, the optical deflector may be a crystal of potassium tantalate niobate to achieve high frequency angular deflection.
In this embodiment, the deflection interval of the optical deflector one 10 is less than 15 degrees, that is, the set angle interval is less than 15 degrees, and the time for the optical deflector one 10 to rotate from the initial position to the end position and then return from the end position to the initial position is one deflection cycle.
In order to ensure the amplification performance of the displacement sensor based on the photoelectric detector array, the included angle between the laser beam incident to the first photoelectric detector 7 and the first photoelectric detector 7 is preferably smaller than 45 degrees.
As shown in fig. 1, the first photodetector 7 is a phototransistor, the first laser beam 3 before displacement is shown by a solid line, the first laser beam 3 after displacement is shown by a dotted line, and the transmission path of the first laser beam 3 is as follows:
before displacement, the laser source I1 emits a laser beam I3 to the first reflecting surface 51 of the triangular wave reflecting mirror 5, the first reflecting surface 51 of the triangular wave reflecting mirror 5 reflects the laser beam I3 to the first reflecting mirror 9, the first reflecting mirror 9 reflects the laser beam reflected by the first reflecting surface 51 to the second reflecting surface 52, and the second reflecting surface 52 reflects the incident laser beam to the optical deflector I10. The light is deflected by the light deflector one 10 and then enters one of the photodetectors one 7. If no displacement occurs, the light is deflected by the optical deflector one 10 at the next moment and received by the other photodetector one 7.
After displacement (shown as leftward displacement in fig. 1, during the displacement, the first laser source 1, the first reflector 9, the first optical deflector 10, and the first photodetector 7 synchronously move leftward), the first laser source 1 emits a first laser beam 3 to a first reflecting surface 51 of the triangular reflector 5 (compared with another position point of the same reflecting surface before the displacement), the first reflecting surface 51 of the triangular reflector 5 reflects the first laser beam 3 to the first reflector 9, the first reflector 9 reflects the laser reflected by the first reflecting surface 51 to a second reflecting surface 52 along the same path before the displacement, and the second reflecting surface 52 reflects the incident laser beam to the first optical deflector 10 along the same path before the displacement. The light is deflected by the light deflector one 10 and then enters one of the photodetectors one 7, and is deflected by the light deflector one 10 and then received by the other photodetector one 7 at the next moment.
If the measured object does not displace, the time difference of receiving the laser beam between the two adjacent photodetectors before and after receiving the laser beam is equal, for example, the time (time) when one photodetector with the number of 1/3/5 receives the laser beam successively is t1/t2/t3, then t3-t2 is t2-t 1. If the measured object displaces, the time difference changes, for example, the time difference is shortened, whether the displacement occurs or not can be judged according to the change of the time difference, and the displacement of the measured object is measured after the displacement is detected.
The displacement measurement principle is as follows: the optical deflector is controlled by a voltage signal to adjust the angle, the current time T0 is incident to one of the photodetectors I, the angle a of the angle deflection I can be determined (the rotation speed is multiplied by the rotation time to determine the angle), the next time T1 is incident to the next photodetector I, and the angle b of the angle deflection can also be determined. From the angle a and the angle b, the measured distance of the two photodetectors is determined, and the theoretical distance (i.e., the position interval) between the two photodetectors is known, and the theoretical distance minus the measured distance is the actual displacement of the measured object during the time period T0-T1.
As shown in fig. 2, before the displacement (for the displacement at the next time), the laser beam is received by the first photodetector on the left and is received at the position indicated by the solid line, after the displacement, the laser beam is received by the first photodetector on the right and is received at the position indicated by the dotted line (the position indicated by the solid line of the first photodetector on the right is displaced to the position indicated by the dotted line), the measured distance is the distance between the position indicated by the solid line on the left and the position indicated by the dotted line on the right, the theoretical distance is the distance between the positions indicated by the two solid lines, and the theoretical distance minus the measured distance is the displacement of the object to be measured.
The vertical distance between the array of the photodetectors and the first optical deflector is defined as h, the vertical line is taken as a reference line, the measurement distance is h (tan α + tan β), and α, β and h are known numbers, so that the measurement distance can be measured, and then the displacement can be calculated.
In order to realize that the laser beam reflected by the first mirror 9 is reflected to the second reflecting surface 52 of the triangular wave mirror 5 along the same path before and after the displacement, the following can be realized, for example: the first reflecting mirror is parallel to the first reflecting surface and the second reflecting surface, and the acute included angle between the first laser beam and the first reflecting surface is equal to twice the included angle between the first reflecting surface and the horizontal plane.
For example, as a preferred embodiment, the angles between the first reflective surface 51 and the second reflective surface 52 of the triangular wave mirror 5 and the horizontal plane are respectively 150 degrees (taking the horizontal right as a positive direction and rotating along the counterclockwise direction as an example), the incident angle of the laser beam one 3 emitted by the laser source one 1 to the first reflective surface 51 is 30 degrees, and the mirror one 9 is parallel to the first reflective surface 51. In the measurement process that the first guarantee reflector 9 enables the laser beam 3 emitted by the first laser source 1 to be incident on the same first reflection surface, under the condition that the emitted laser beam 3 is reflected to the second reflection surface 52 of the triangular wave reflector 5 along the same path, other different arrangement modes can be provided.
The triangular wave does not necessarily need an isosceles triangular wave, i.e., the acute included angles between the two reflecting surfaces forming the triangular wave and the horizontal plane may be equal or unequal. In the displacement sensor based on the photodetector array provided by the present embodiment, for the triangular wave reflecting mirror 5, under the condition that the first reflecting surface 51 is parallel to the second reflecting surface 52, the specific structure thereof is not limited, that is, the included angle between the two reflecting surfaces forming the triangular wave is not limited.
Referring to fig. 1, the displacement sensor based on the photodetector array may further include a housing 6, the first laser source 1, the first reflector 9, the first optical deflector 10, and the first photodetector 7 are all fixedly disposed in the housing 6 to form a measuring head, and the first laser beam 3 emitted from the first laser source 1 and the reflected light beam thereof may both pass through a transmitting and receiving end surface of the measuring head. The laser source I1, the reflector I9, the optical deflector I10 and the photoelectric detector I7 are fixedly arranged in the shell 6, so that the positions of the laser source I, the reflector I9, the optical deflector I10 and the photoelectric detector I can be kept fixed, and synchronous displacement of the laser source I, the reflector I, the optical deflector I10 and the photoelectric detector I can be guaranteed.
During measurement, the triangular wave reflecting mirror 5 can be fixed on a measured object according to actual application conditions, the measuring head keeps fixed, when the measured object displaces, the triangular wave reflecting mirror 5 and the measuring head move relatively, and the measuring head can measure to obtain the displacement value of the triangular wave reflecting mirror 5, namely the measured object. As another embodiment, the measuring head may be fixed on the measured object, the triangular wave reflecting mirror 5 remains stationary, the measured object displaces to drive the measuring head to move, the measuring head and the triangular wave reflecting mirror 5 displace relatively, and the measuring head may measure the relative displacement between the measuring head and the triangular wave reflecting mirror 5, so as to obtain the displacement value of the measured object.
The triangular wave reflector 5 or the measuring head is selected for measurement to be fixed on a measured object, so that the measurement convenience is improved.
When the displacement sensor based on the photoelectric detector array is applied to displacement measurement, the steps are as follows:
fixing a measured object on a triangular wave reflector or a measuring head;
adjusting the position relation of a first laser beam (namely, a first laser source), a first triangular wave reflector, a first optical deflector, a first photoelectric detector and a second photoelectric detector, so that the first reflector receives the first laser beam reflected by a first reflecting surface of the first triangular wave reflector, the first laser beam is reflected to a second reflecting surface of the first triangular wave reflector along the same path in the measuring process of the first laser beam incident to the same first reflecting surface, and a plurality of first photoelectric detectors are all in the deflection interval of the first optical deflector, namely, in the rotating process of the first optical deflector, one first photoelectric detector is ensured to receive the first laser beam reflected by the second reflecting surface of the first triangular wave reflector at a certain moment;
step three, starting a first optical deflector to rotate at a constant speed, emitting a first laser beam, detecting the first laser beam by a first photoelectric detector after the first laser beam passes through a first reflecting surface of a triangular wave reflector, a first reflecting mirror and a second reflecting surface of the triangular wave reflector, and recording the time for detecting the first laser beam;
step four, the measured object moves, and in the moving process, the time for each photoelectric detector to detect the laser beam is respectively recorded;
and step five, the processing system calculates the displacement change value of the measured object according to the time of the first photoelectric detector for receiving the laser beam, the vertical distance between the first photoelectric detector and the first optical deflector, the distance between the first photoelectric detectors and the deflection speed of the first optical deflector.
Example 2
Referring to fig. 3 (only 4 photodetectors are shown in the photodetector array in fig. 3), compared with the displacement sensor based on the photodetector array described in embodiment 1, the displacement sensor based on the photodetector array provided in this embodiment further includes a second laser beam 4 incident on the other first reflecting surface 51 of the triangular wave mirror 5; and the following components:
the second reflecting mirror 11 is used for receiving the laser beam, reflected by the second first reflecting surface 51 of the triangular wave reflecting mirror 5, of the second laser beam 4 and reflecting the laser beam to the second reflecting surface 52 of the triangular wave reflecting mirror 5 along the same path in the measurement process that the second laser beam 4 is incident to the first reflecting surface 51;
a second optical deflector 12 for deflecting the incident angle of the laser beam reflected by the second reflecting surface 52 of the triangular wave mirror 5 at a constant speed within a set angle interval;
a second photodetector array for receiving the laser beam deflected by the second optical deflector; the second photoelectric detector array is composed of a plurality of second photoelectric detectors 13, and the two second photoelectric detectors 13 are arranged at intervals. For convenience of calculation, the two photodetectors 13 are preferably arranged at equal intervals, that is, the two photodetectors are equally spaced.
In the displacement sensor based on the photodetector array according to this embodiment, the processing system calculates a displacement variation value of the measured object according to a time when the first photodetector receives the laser beam, a vertical distance between the first photodetector and the first optical deflector, a distance between the first photodetectors, and a deflection speed of the first optical deflector; or, the displacement change value of the measured object is calculated according to the time when the second photoelectric detector receives the laser beam, the vertical distance between the second photoelectric detector and the second optical deflector, the distance between the second photoelectric detector and the second optical deflector and the deflection speed of the second optical deflector.
The displacement sensor based on the photoelectric detector array in the embodiment can realize continuous displacement measurement. Specifically, one of the two laser beams can be selected for measurement, when one of the reflection points of the laser beam is located at some positions of the reflection surface, such as the top of the reflection surface, the intersection line position of the two reflection surfaces, etc., the light path of the reflected laser beam is changed, and therefore the reflected laser beam may not be reflected to the corresponding photodetector, and the other reflection point of the laser beam is located at other positions of the other reflection surface, and may be reflected to the corresponding photodetector, and each moment of the movement of the measured object can be realized, at least one of the laser beams reflected by each second reflection surface 52 on the triangular wave reflection mirror 5 may be reflected to the corresponding photodetector, at this time, the processing system may switch back and forth to calculate the time difference between the two sets of photodetectors, and perform superposition accumulation, so as to realize the measurement of the displacement of the measured object by one-time change or continuous incremental displacement change, the measurement method is simple, reliable, and convenient to operate, and the measurement accuracy can be improved.
As shown in fig. 3, the laser beam one 3 and the laser beam two 4 are respectively emitted by the laser source one 1 and the laser source two 2.
The two measuring systems can be arranged in a shell to form a measuring head, and also can be respectively arranged in a shell to form two measuring heads. Specifically, a first laser source, a second laser source, a first reflector, a second reflector, a first optical deflector, a second optical deflector, a first photoelectric detector and a second photoelectric detector are all fixedly arranged in a shell to form a measuring head. Or the first laser source, the first reflector, the first optical deflector and the first photoelectric detector are all fixedly arranged in a shell to form a measuring head; and the second laser source, the second reflector, the second optical deflector and the second photoelectric detector are fixedly arranged in the other shell to form the other measuring head.
It is easy to understand that in this embodiment, the first laser source and the second laser source are arranged to avoid that when one of the photodetectors cannot receive the laser beam, the other photodetector can receive the laser beam to achieve displacement measurement, so that in addition to the arrangement shown in fig. 3, there may be other arrangement manners as long as the first laser source and the second laser source are arranged in a staggered manner, so that the initial incident point positions of the first laser beam and the second laser beam on the first reflection surface are different, for example, the second laser beam may be incident on another first reflection surface on the same side as the first reflection surface on which the first laser beam is incident, and may be incident on the same reflection surface on which the first laser beam is incident, but the incident point positions are different.
The photodetectors (one and two) may be position sensitive detector phototriodes, or devices such as photodiodes, photocells, etc.
When the displacement sensor based on the photoelectric detector array in the embodiment is applied to displacement measurement, the steps are as follows:
fixing a measured object on a triangular wave reflector or a measuring head;
adjusting the position relation of a first laser beam, a first triangular wave reflector, a first light deflector, a first photoelectric detector and a second photoelectric detector to enable the first reflector to receive the first laser beam reflected by a first reflecting surface of the first triangular wave reflector, the first laser beam is reflected to a second reflecting surface of the first triangular wave reflector along the same path in the measuring process that the first laser beam is incident to the same first reflecting surface, and the first photoelectric detectors are all in the deflection interval of the first light deflector; adjusting the position relation of the second laser beam, the triangular wave reflector, the second light deflector, the third photoelectric detector and the fourth photoelectric detector, so that the second reflector receives the laser beam reflected by the first reflecting surface of the triangular wave reflector, the laser beam is reflected to the second reflecting surface of the triangular wave reflector along the same path in the measuring process that the second laser beam is incident to the same first reflecting surface, and the plurality of second photoelectric detectors are all in the deflection interval of the second light deflector;
step three, starting a first optical deflector to rotate at a constant speed, emitting a first laser beam, detecting the first laser beam by a first photoelectric detector after the first laser beam passes through a first reflecting surface of a triangular wave reflector, a first reflecting mirror and a second reflecting surface of the triangular wave reflector, and recording the time for detecting the first laser beam; or starting the second optical deflector to rotate at a constant speed, emitting a second laser beam, sequentially passing through the first reflecting surface of the triangular wave reflector, the second reflecting surface of the reflector and the second reflecting surface of the triangular wave reflector, detecting the second laser beam by the second photoelectric detector, and recording the time for detecting the second laser beam;
step four, the measured object moves, and in the moving process, the time for each photoelectric detector to detect the laser beam is respectively recorded, or the time for each photoelectric detector to detect the laser beam is respectively recorded;
step five, the processing system calculates the displacement change value of the measured object according to the time of the first photoelectric detector for receiving the laser beam, the vertical distance between the first photoelectric detector and the first optical deflector, the distance between the first photoelectric detectors and the deflection speed of the first optical deflector; or, the displacement change value of the measured object is calculated according to the time when the second photoelectric detector receives the laser beam, the vertical distance between the second photoelectric detector and the second optical deflector, the distance between the second photoelectric detector and the second optical deflector and the deflection speed of the second optical deflector.
The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention.
Claims (8)
1. A displacement sensor based on a photodetector array, comprising:
a triangular wave reflector including a first reflecting surface and a second reflecting surface;
a first laser beam is incident to a first reflecting surface of the triangular wave reflecting mirror;
the first reflecting mirror is used for receiving a laser beam reflected by a first reflecting surface of the triangular wave reflecting mirror and reflecting the laser beam to a second reflecting surface of the triangular wave reflecting mirror along the same path in the measuring process that the laser beam is incident to the same first reflecting surface;
the first optical deflector is used for deflecting the incident angle of the laser beam reflected by the second reflecting surface of the triangular wave reflecting mirror within a set angle interval;
the first photoelectric detector array comprises a plurality of first photoelectric detectors which are arranged at intervals and used for receiving the laser beams deflected by the first optical deflector;
and the processing system is used for calculating the displacement change value of the measured object according to the time when the first photoelectric detector receives the laser beam, the vertical distance between the first photoelectric detector and the first optical deflector, the distance between the first photoelectric detectors and the deflection speed of the first optical deflector.
2. The displacement sensor based on the photo-detector array as claimed in claim 1, wherein the spacing between every two adjacent photo-detectors is equal.
3. The displacement sensor based on the photo-detector array as claimed in claim 1, wherein the first reflecting mirror is parallel to the first reflecting surface and parallel to the second reflecting surface, and the acute angle between the first reflecting surface and the laser beam is equal to twice the angle between the first reflecting surface and the horizontal plane.
4. The displacement sensor based on the photoelectric detector array is characterized by further comprising a shell, a first laser beam is obtained by emitting a first laser source, and the first laser source, the first reflector and the first photoelectric detector are fixedly arranged in the shell to form a measuring head.
5. The photodetector array based displacement sensor as claimed in any one of claims 1 to 4, further comprising:
the second laser beam is incident to the first reflecting surface of the triangular wave reflecting mirror, and the initial incident point positions of the first laser beam and the second laser beam on the first reflecting surface are different;
the second reflecting mirror is used for receiving the laser beam reflected by the first reflecting surface of the triangular wave reflecting mirror and reflecting the laser beam to the second reflecting surface of the triangular wave reflecting mirror along the same path in the measuring process that the second laser beam is incident to the same first reflecting surface;
a second optical deflector for deflecting the incident angle of the laser beam reflected by the second reflecting surface of the triangular wave reflector within a set angle interval;
the second photoelectric detector array comprises a plurality of second photoelectric detectors which are arranged at intervals and used for receiving the laser beams deflected by the second optical deflector;
the processing system is specifically used for calculating the displacement change value of the measured object according to the time of the first photoelectric detector for receiving the laser beam, the vertical distance between the first photoelectric detector and the first optical deflector, the distance between the first photoelectric detectors and the deflection speed of the first optical deflector; or, the displacement change value of the measured object is calculated according to the time when the second photoelectric detector receives the laser beam, the vertical distance between the second photoelectric detector and the second optical deflector, the distance between the second photoelectric detector and the second optical deflector and the deflection speed of the second optical deflector.
6. The displacement sensor based on the photo-detector array as claimed in claim 5, wherein the two photo-detectors are equally spaced.
7. The displacement sensor based on the photoelectric detector array is characterized in that the first laser beam and the second laser beam are respectively incident to two different first reflecting surfaces of the triangular wave reflecting mirror.
8. The displacement sensor based on the photoelectric detector array is characterized by further comprising two shells, wherein the first laser beam and the second laser beam are obtained by emitting the first laser source and the second laser source respectively, the first laser source, the first reflector, the first optical deflector and the first photoelectric detector are fixedly arranged in one shell to form one measuring head, and the second laser source, the second reflector, the second optical deflector and the second photoelectric detector are fixedly arranged in the other shell to form the other measuring head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN115556143A (en) * | 2022-11-07 | 2023-01-03 | 咸宁千机智能科技有限公司 | Laser displacement sensor, mechanical arm posture sensing unit and composite robot |
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| CN115556143A (en) * | 2022-11-07 | 2023-01-03 | 咸宁千机智能科技有限公司 | Laser displacement sensor, mechanical arm posture sensing unit and composite robot |
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