CN108691769B - 真空泵装置及用于真空泵装置的运转控制方法 - Google Patents

真空泵装置及用于真空泵装置的运转控制方法 Download PDF

Info

Publication number
CN108691769B
CN108691769B CN201810321818.1A CN201810321818A CN108691769B CN 108691769 B CN108691769 B CN 108691769B CN 201810321818 A CN201810321818 A CN 201810321818A CN 108691769 B CN108691769 B CN 108691769B
Authority
CN
China
Prior art keywords
pump
booster pump
main
main pump
booster
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201810321818.1A
Other languages
English (en)
Chinese (zh)
Other versions
CN108691769A (zh
Inventor
林介元
岩崎弘一
大须贺透
石井勇次
河嶌浩康
岛田圣二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of CN108691769A publication Critical patent/CN108691769A/zh
Application granted granted Critical
Publication of CN108691769B publication Critical patent/CN108691769B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/403—Electric motor with inverter for speed control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/86—Detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Forklifts And Lifting Vehicles (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
CN201810321818.1A 2017-04-12 2018-04-11 真空泵装置及用于真空泵装置的运转控制方法 Active CN108691769B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-078915 2017-04-12
JP2017078915A JP2018178846A (ja) 2017-04-12 2017-04-12 真空ポンプ装置の運転制御装置、及び運転制御方法

Publications (2)

Publication Number Publication Date
CN108691769A CN108691769A (zh) 2018-10-23
CN108691769B true CN108691769B (zh) 2021-11-02

Family

ID=62528208

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810321818.1A Active CN108691769B (zh) 2017-04-12 2018-04-11 真空泵装置及用于真空泵装置的运转控制方法

Country Status (5)

Country Link
EP (1) EP3388676B1 (ja)
JP (1) JP2018178846A (ja)
KR (1) KR102564312B1 (ja)
CN (1) CN108691769B (ja)
TW (1) TWI775832B (ja)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2755328A1 (de) * 1977-03-08 1978-09-14 Leybold Heraeus Sogev Oelgedichtete vakuumpumpe
WO2006051260A1 (en) * 2004-11-09 2006-05-18 The Boc Group Plc Vacuum pumping system
WO2006082366A1 (en) * 2005-02-02 2006-08-10 Edwards Limited Method of operating a pumping system
WO2006109861A1 (en) * 2005-04-08 2006-10-19 Ebara Corporation Vacuum pump self-diagnosis method, vacuum pump self-diagnosis system, and vacuum pump central monitoring system
CN103711697A (zh) * 2012-10-05 2014-04-09 株式会社荏原制作所 干式真空泵装置和在该干式真空泵所使用的控制装置
CN106014999A (zh) * 2016-06-09 2016-10-12 中国石油大学(华东) 一种水环真空泵机组高效运行控制方法和控制系统
CN106232992A (zh) * 2014-03-24 2016-12-14 阿特利耶博世股份有限公司 真空泵系统中的泵送方法和真空泵系统

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2621141B1 (fr) * 1987-09-25 1989-12-01 Cit Alcatel Procede de demarrage de pompes a vide couplees en serie, et dispositif permettant la mise en oeuvre de ce procede
JP2004324644A (ja) * 2003-04-10 2004-11-18 Ebara Corp ドライ真空ポンプ及びその起動方法
JP4218756B2 (ja) 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
JP4820304B2 (ja) * 2007-01-18 2011-11-24 株式会社荏原製作所 真空ポンプユニット
TWI467092B (zh) * 2008-09-10 2015-01-01 Ulvac Inc 真空排氣裝置
GB2502134B (en) * 2012-05-18 2015-09-09 Edwards Ltd Method and apparatus for adjusting operating parameters of a vacuum pump arrangement
JP6030384B2 (ja) * 2012-08-27 2016-11-24 株式会社荏原製作所 ポンプ制御装置
CN104989621A (zh) * 2015-07-15 2015-10-21 陆铭 智能真空排气台

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2755328A1 (de) * 1977-03-08 1978-09-14 Leybold Heraeus Sogev Oelgedichtete vakuumpumpe
WO2006051260A1 (en) * 2004-11-09 2006-05-18 The Boc Group Plc Vacuum pumping system
WO2006082366A1 (en) * 2005-02-02 2006-08-10 Edwards Limited Method of operating a pumping system
WO2006109861A1 (en) * 2005-04-08 2006-10-19 Ebara Corporation Vacuum pump self-diagnosis method, vacuum pump self-diagnosis system, and vacuum pump central monitoring system
CN103711697A (zh) * 2012-10-05 2014-04-09 株式会社荏原制作所 干式真空泵装置和在该干式真空泵所使用的控制装置
CN106232992A (zh) * 2014-03-24 2016-12-14 阿特利耶博世股份有限公司 真空泵系统中的泵送方法和真空泵系统
CN106014999A (zh) * 2016-06-09 2016-10-12 中国石油大学(华东) 一种水环真空泵机组高效运行控制方法和控制系统

Also Published As

Publication number Publication date
EP3388676B1 (en) 2020-11-04
KR102564312B1 (ko) 2023-08-07
CN108691769A (zh) 2018-10-23
EP3388676A1 (en) 2018-10-17
JP2018178846A (ja) 2018-11-15
TW201842272A (zh) 2018-12-01
TWI775832B (zh) 2022-09-01
KR20180115229A (ko) 2018-10-22

Similar Documents

Publication Publication Date Title
US10284131B2 (en) Motor-driven compressor for a vehicle
EP2873865B1 (en) Motor-driven compressor
WO2001021959A1 (fr) Unite hydraulique autonome entrainant un inverseur
US8613600B2 (en) Vacuum pump system
US9929682B2 (en) Motor control device
CN108691769B (zh) 真空泵装置及用于真空泵装置的运转控制方法
US10465677B2 (en) Control method for compressor system
EP1638201B1 (en) Method for controlling and driving a pump for household appliances
US20120100012A1 (en) Method for controlling electric compressor
EP3456972A1 (en) Power-loss ridethrough system and method
CN112963336B (zh) 一种水泵的控制方法
JP2012031832A (ja) 電動ポンプユニット
JP6374998B2 (ja) 自吸式ポンプの運転装置、液体供給装置、及び自吸式ポンプの運転方法
WO2016115428A1 (en) Controller and method for detecting a blocked state of an electrical machine
JP5003429B2 (ja) インバータ装置
TWI707534B (zh) 乾式真空泵浦裝置及其控制方法與控制程式
CN106067743A (zh) 无刷直流电机控制装置
KR100887149B1 (ko) 토출 저압 검출 기능을 구비한 인버터 부스터 펌프 장치
WO2015194425A1 (ja) 液体吐出装置
EP2363949B1 (en) Motor device and pump equipped with the same
JP2001263252A (ja) ポンプのインバータ制御装置
US20230318500A1 (en) Motor-driven compressor
JP2008144602A (ja) スクリュー圧縮機の始動装置
JP2002195162A (ja) ジェットバス安全装置
CN204919688U (zh) 供水装置

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant