CN108680532B - Biosensor based on optical fiber Mach-Zehnder interferometer and manufacturing method thereof - Google Patents

Biosensor based on optical fiber Mach-Zehnder interferometer and manufacturing method thereof Download PDF

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CN108680532B
CN108680532B CN201810783322.6A CN201810783322A CN108680532B CN 108680532 B CN108680532 B CN 108680532B CN 201810783322 A CN201810783322 A CN 201810783322A CN 108680532 B CN108680532 B CN 108680532B
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optical fiber
glass tube
cavity
biosensor
light guide
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CN108680532A (en
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王英
王义平
邵宇
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Shenzhen University
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    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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Abstract

The invention provides a biosensor based on an optical fiber Mach-Zehnder interferometer and a manufacturing method thereof, which are used for detecting the concentration of a biological tissue solution, and solve the problems that the manufacturing personnel are dangerous and the reliability and the sensitivity of the biosensor are low in the manufacturing process; it comprises the following steps: the microfluidic chip is internally provided with a microfluidic channel, and is provided with a liquid inlet which is communicated with the microfluidic channel; the light guide component is arranged in the microfluidic channel and is provided with an MZ cavity which is communicated with the microfluidic channel; a light source providing member disposed at one side of the microfluidic chip; and a spectrometer arranged at one side of the microfluidic chip; the arrangement of the light guide component avoids the use of dangerous corrosive liquid in the process of manufacturing the biosensor, thereby ensuring the safety of manufacturing personnel.

Description

Biosensor based on optical fiber Mach-Zehnder interferometer and manufacturing method thereof
Technical Field
The invention belongs to the field of biosensors, and particularly relates to a biosensor based on an optical fiber Mach-Zehnder interferometer and a manufacturing method thereof.
Background
A Mach-Zehnder (MZ) interferometer is an interferometer that can be used to observe the relative phase shift changes that occur through different paths and media after splitting a beam emitted from a separate light source into two collimated beams. Mach-Zehnder interferometers have wide application in numerous fields, one of which is a biosensor based on MZ interferometers. However, existing fiber MZ interferometer-based biosensors have a number of drawbacks. In the process of manufacturing the biosensor, the optical fiber is required to be processed, and some processing methods are required to utilize harmful corrosive liquids (such as hydrofluoric acid and other chemical agents) to corrode the interior of the optical fiber to form an MZ cavity, and the corrosive liquids may cause harm to processing personnel, so that the processing of the optical fiber by using the processing method has great danger.
In the comprehensive view, the safety of the manufacturing personnel cannot be guaranteed in the manufacturing process of the existing biosensor based on the optical fiber MZ interferometer.
Disclosure of Invention
The invention aims to solve the technical problems that in the manufacturing process of the existing biosensor based on the optical fiber MZ interferometer, manufacturers are dangerous and the safety of the manufacturers cannot be guaranteed.
In order to solve the technical problems, the invention is realized by a biosensor based on an optical fiber Mach-Zehnder interferometer, which is characterized by comprising the following components: the microfluidic chip is internally provided with a microfluidic channel, and is provided with a liquid inlet which is communicated with the microfluidic channel; the light guide assembly is arranged in the micro-flow channel, an MZ cavity is formed in the light guide assembly, and the MZ cavity is communicated with the micro-flow channel; the light source providing piece is arranged at one side of the microfluidic chip and is connected with one end of the light guide assembly; and the spectrometer is arranged at one side of the microfluidic chip and is connected with one end of the light guide component, which is far away from the light source providing piece.
By adopting the technical scheme, when the biosensor based on the optical fiber Mach-Zehnder interferometer is used, the biological tissue solution is injected into the micro-fluidic channel from the liquid inlet, and the biological tissue solution enters the MZ cavity in the light guide component, after the optical signal provided by the light source providing piece enters the light guide component, and when the optical signal enters the MZ cavity, the optical signal simultaneously enters the interference arm formed by the biological tissue solution and the reference arm formed by the light guide component, after the optical signal passes through the MZ cavity, the optical signal is gathered in the light guide component, and the optical refractive index difference between the interference arm and the reference arm exists, so that the optical signal generates a refractive index difference, thereby generating optical path difference, forming interference, and finally the optical signal is projected on the spectrometer from the light outlet, thereby forming interference spectrum.
Further, the light guide assembly includes: a first optical fiber; the optical guide piece is arranged at one end of the first optical fiber, a cavity is formed in the optical guide piece, and the cavity is an MZ cavity; and the second optical fiber is arranged at one end of the light guide piece far away from the first optical fiber, and the first optical fiber and the second optical fiber are symmetrically arranged along the light guide piece.
Further, the light guide includes: the two opposite ends of the glass tube are respectively welded with the first optical fiber and the second optical fiber, the side surface of the glass tube is provided with a communication port, the two ends of the communication port extend to the first optical fiber and the second optical fiber respectively and extend to the two opposite ends of the glass tube, and the MZ cavity is communicated with the outside through the communication port; and the filling piece is filled in the MZ cavity, the diameter of the filling piece is smaller than that of the MZ cavity, one end of the first optical fiber and one end of the second optical fiber, which are welded to the glass tube, are both positioned on the inner wall of the cavity, and part of the first optical fiber and one end of the second optical fiber are in contact with the filling piece.
Further, the filling member and the sealing member are both ultraviolet curing glue, and the refractive index of the ultraviolet curing glue is 1.36.
By adopting the technical scheme, after the glass tube is filled with the ultraviolet curing adhesive with the refractive index of 1.36, the refractive index of the biosensor provided by the invention is reduced, so that the sensitivity of the biosensor provided by the invention is 40000nm/RIU, and the sensitivity of the common biosensor in the market is 10000nm/RIU, thereby improving the sensitivity of the biosensor.
Further, the glass tube length was 100 μm, and the outer and inner diameters of the glass tube were 125 μm and 75 μm, respectively.
Further, the first optical fiber and the second optical fiber are single-mode optical fiber cores.
Further, the light source providing member is used for providing a broadband light source.
Further, a plastic hose is arranged at a liquid inlet formed in the microfluidic chip.
Further, the microfluidic chip is provided with a liquid outlet, the liquid outlet is communicated with the microfluidic channel, one side of the microfluidic chip is provided with a waste liquid collecting device, and the waste liquid collecting device is communicated with the liquid outlet.
A method for manufacturing a biosensor based on an optical fiber mach-zehnder interferometer, the method comprising: welding a first optical fiber with one end of a glass tube, performing precise cutting treatment on the glass tube to ensure that the glass tube keeps a length of 100 mu m, and then welding a second optical fiber at the other end of the glass tube; one side of the glass tube is thrown away, and the throwing thickness is 40 mu m, so that a communication port is formed in the glass tube, and a cavity in the glass tube is communicated with the outside; filling ultraviolet curing glue in the glass tube, curing the ultraviolet curing glue, and enabling the diameter of the cured ultraviolet curing glue to be smaller than the diameter of a cavity in the glass tube; removing the redundant ultraviolet curing adhesive in the glass tube so as to ensure that the ultraviolet curing adhesive in the glass tube reaches the optimal interference light intensity contrast; manufacturing a microfluidic channel on a microfluidic chip, and forming a liquid inlet and a liquid outlet; placing a glass tube, a first optical fiber and a second optical fiber in the microfluidic channel, and sealing a light inlet and a light outlet at two ends of the microfluidic channel respectively by ultraviolet curing glue; one end of the first optical fiber, which is far away from the glass tube, is connected with the light source providing piece, and one end of the second optical fiber, which is far away from the glass tube, is connected with the spectrometer.
Compared with the prior art, the invention has the beneficial effects that: the method that the optical fibers are welded at the two ends of the glass tube and then the cavity is polished and opened from the side surface is adopted to replace the cavity in the biosensor of the MZ interferometer in the prior art, so that the cavity in the glass tube is used as the MZ cavity, and dangerous chemical agents such as hydrofluoric acid and the like are not needed to corrode the optical fibers, and the safety of a manufacturer is ensured in the process of manufacturing the biosensor; and the glass tube is filled by the filling piece with the refractive index of 1.36, so that the sensitivity of the biosensor provided by the invention is 40000nm/RIU, which is 4 times of the sensitivity of most biosensors in the market, and the sensitivity of the biosensor in the prior art is improved.
Drawings
FIG. 1 is a schematic structural diagram of a biosensor based on an optical fiber Mach-Zehnder interferometer according to an embodiment of the present invention, and a cross-sectional process is performed on a microfluidic chip;
FIG. 2 is a cross-sectional view of a microfluidic chip and light guide assembly of a fiber Mach-Zehnder interferometer based biosensor in accordance with an embodiment of the present invention;
FIG. 3 is a graph of drift of simulated peaks as a function of refractive index for a fiber Mach-Zehnder interferometer-based biosensor in accordance with an embodiment of the present invention.
In the drawings, each reference numeral denotes: 1. a microfluidic channel; 101. a syringe; 102. a light source providing member; 103. a liquid inlet; 104. a liquid outlet; 105. a waste liquid collection device; 106. a spectrometer; 107. a microfluidic chip; 11. a light inlet; 12. a light outlet; 13. a light guide assembly; 131. a glass tube; 132. a communication port; 14. a closure; 15. a plastic hose; 201. a first optical fiber; 202. MZ cavity; 203. a filler; 204. and a second optical fiber.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
A biosensor based on an optical fiber mach-zehnder interferometer, as shown in fig. 1 and 2, comprising: a microfluidic chip 107, a light guide assembly 13, a closure 14, a light source provider 102, and a spectrometer 106; the microfluidic chip 107 is internally provided with a microfluidic channel 1, the microfluidic channel 1 is communicated with the outside through a light inlet 11 and a light outlet 12, and the microfluidic chip 107 is provided with a liquid inlet 103 and a liquid outlet 104; the light guide component 13 is arranged in the micro-flow channel 1, an MZ cavity 202 is formed in the light guide component 13, the MZ cavity 202 is communicated with the micro-flow channel 1, biological tissue solution enters the micro-flow channel 1 and the MZ cavity 202 through the liquid inlet 103, and after the biological tissue solution enters the MZ cavity 202, the biological tissue solution is used as an interference arm of a biosensor, and part of the light guide component 13 is used as a reference arm of the biosensor; the sealing piece 14 is arranged on the micro-fluidic chip 107 and is used for sealing the light outlet 12 and the light inlet 11 after the light guide component 13 is arranged in the micro-fluidic channel 1, so that biological tissue solution is prevented from flowing out of the micro-fluidic chip 107 from the light outlet 12 and the light inlet 11, the probability of negative influence of the biological tissue solution on the light guide component 13 is reduced, meanwhile, the waste of the biological tissue solution is prevented, and the probability of corrosion of the biological tissue solution on the micro-fluidic chip 107 is reduced; the light source providing member 102 is disposed on a side of the microfluidic chip 107 where the light inlet 11 is formed, and is configured to provide a light source, in order to increase a spectral width of the light source to increase a measurement sensitivity of the biosensor, in this embodiment, the light source providing member 102 is configured to provide a broadband light source; the spectrometer 106 is disposed on one side of the microfluidic chip 107 with the light outlet 12, when the broadband light provided by the light source providing member 102 passes through the interference arm and the reference arm at the same time, the refractive index difference between the interference arm and the reference arm is caused by the difference of the light refractive indexes, so that the broadband light generates a refractive index difference, and an optical path difference is generated, so that interference is formed, and finally the broadband light is collected in the light guide assembly 13 and is projected onto the spectrometer 106 from the light outlet 12, so that an interference spectrum is formed.
In this embodiment, the micro-fluidic channel 1 is a straight channel, and the light inlet 11 and the light outlet 12 are symmetrical, so that the distance and time required for broadband light to pass through the micro-fluidic chip 107 can be reduced, thereby reducing the optical loss and improving the detection sensitivity of the biosensor.
Wherein the light guide assembly 13 comprises: the optical fiber comprises a first optical fiber 201, a light guide member and a second optical fiber 204, wherein the first optical fiber 201 and the second optical fiber 204 are respectively arranged at two opposite ends of the light guide member, a cavity is formed in the light guide member, the cavity is used as an MZ cavity 202, and a filling member 203 is filled in the cavity.
In this embodiment, the first optical fiber 201 and the second optical fiber 204 are both single-mode optical fiber cores, and the single-mode optical fiber cores have the advantages of low loss and minimum dispersion when transmitting optical signals, so that the detection accuracy of the biosensor can be improved.
The light guide includes: glass tube 131 and filler 203; the first optical fiber 201 and the second optical fiber 204 are welded at two opposite ends of the glass tube 131, a cavity in the glass tube 131 is used as an MZ cavity 202, a communication port 132 is formed in the side surface of the glass tube 131, the communication port 132 extends to the first optical fiber 201 and the second optical fiber 204 respectively and extends to two opposite ends of the light guide, and the MZ cavity 202 is communicated with the outside through the communication port 132; the filler 203 fills the MZ cavity 202 as a reference arm for the biosensor, and the filler 203 has a smaller diameter than the cavity so that the biological tissue solution flows into the MZ cavity to form an interference arm.
In this embodiment, the first optical fiber 201 and the second optical fiber 204 are welded to the glass tube 131, one end of the glass tube 131 is located on the inner wall of the cavity, and part of the first optical fiber is in contact with the filling member 203, the first optical fiber 201 is located on the light inlet 11 side of the microfluidic channel 1, and the second optical fiber 204 is located on the light outlet 12 side of the microfluidic channel 1.
As shown in fig. 2 and 3, in the present embodiment, the filling member 203 and the sealing member 14 are both made of an ultraviolet curing glue, the refractive index of the ultraviolet curing glue is 1.36, and when the ultraviolet curing glue is used as the filling member 203, the refractive index of the reference arm is made to be closer to the refractive index of the aqueous solution, so that the refractive index of the biosensor provided by the present invention is reduced, the sensitivity of the biosensor provided by the present invention is 40000nm/RIU, and the sensitivity of the biosensor commonly found in the market is 10000nm/RIU, so that the sensitivity of the biosensor is improved. When the ultraviolet curing glue is used as the sealing member 14, the ultraviolet curing glue has the advantages of quick curing, low energy consumption, no solvent pollution and the like, so that the time for curing the glue can be reduced, the waste of energy sources is reduced, the negative influence on biological tissue solution is reduced, and the like.
In the present embodiment, the length of the glass tube 131 is 100 μm, the inner diameter and the outer diameter of the glass tube 131 are 125 μm and 75 μm, respectively, and the communication port 132 formed in the glass tube 131 is formed by removing the thickness of 40 μm from the side of the glass tube 131.
At the liquid inlet 103 of the microfluidic chip 107, a plastic hose 15 is provided, and the use of the plastic hose 15 can be more convenient for introducing the biological tissue solution into the microfluidic channel 1, and in this embodiment, the syringe 101 is used to inject the biological tissue solution into the plastic hose 15 at a predetermined speed to introduce the biological tissue solution into the microfluidic channel 1.
The liquid outlet 104 of the microfluidic chip 107 is provided with the waste liquid collecting device 105, after the interference spectrum of a part of biological tissue solution is obtained, the biological tissue solution in the microfluidic chip 107 is led into the waste liquid collecting device 105, the microfluidic channel 1 and the light guide component 13 are cleaned by ethanol, then the ethanol is led into the waste liquid collecting device 105, and the waste liquid generated by multiple experiments can be temporarily stored by the arrangement of the waste liquid collecting device 105, so that each experiment of an experimenter is prevented from needing to put the waste liquid into a waste liquid putting point, the labor intensity of the experimenter is reduced, the time for putting the waste liquid by the experimenter is reduced, and the efficiency of continuous multiple experiments is improved.
The invention also provides a manufacturing method of the biosensor based on the optical fiber Mach-Zehnder interferometer, which comprises the following steps: welding the first optical fiber 201 with one end of the glass tube 131, performing precise cutting treatment on the glass tube 131 to ensure that the glass tube 131 maintains a length of 100 mu m, and then welding the second optical fiber 204 with the other end of the glass tube 131; one side of the glass tube 131 is thrown away, and the throwing thickness is 40 mu m, so that a communication port 132 is formed in the glass tube 131, and a cavity in the glass tube 131 is communicated with the outside; filling ultraviolet curing glue in the glass tube 131, curing the ultraviolet curing glue, and enabling the diameter of the ultraviolet curing glue after curing to be smaller than the diameter of a cavity in the glass tube 131; removing more ultraviolet curing glue in the glass tube 131 to enable the ultraviolet curing glue in the glass tube 131 to reach the optimal interference light intensity contrast; a microfluidic channel 1 is manufactured on a microfluidic chip 107, and a liquid inlet 103 and a liquid outlet 104 are formed; placing the glass tube 131, the first optical fiber 201 and the second optical fiber 204 in the microfluidic channel 1, and sealing the light inlet 11 and the light outlet 12 at two ends of the microfluidic channel 1 by ultraviolet curing glue respectively; the end of the first optical fiber 201 remote from the glass tube 131 is connected to the light source providing member 102, and the end of the second optical fiber 204 remote from the glass tube 131 is connected to the spectrometer 106.
The invention provides a biosensor based on an optical fiber Mach-Zehnder interferometer and a manufacturing method thereof, wherein the working principle or process is as follows: when manufacturing a biosensor, firstly, the light guide component 13 is placed in the micro-flow channel 1 of the micro-flow chip 107, then the light inlet 11 and the light outlet 12 at the two ends of the micro-flow channel 1 are sealed by ultraviolet curing glue, then one end of the first optical fiber 201 far away from the glass tube 131 is connected with the light source providing piece 102, one end of the second optical fiber 204 far away from the glass tube 131 is connected with the spectrometer 106, so that broadband light provided by the light source providing piece 102 can be projected on the spectrometer 106 through the first optical fiber 201, the glass tube 131 and the second optical fiber 204, then one end of the plastic hose 15 is fixed at the liquid inlet 103 of the micro-flow chip 107, the plastic hose 15 is communicated with the micro-flow channel 1 through the liquid inlet 103, and finally the waste liquid collecting device 105 is installed at the liquid outlet 104 of the micro-flow chip 107, thereby completing the manufacturing of the biosensor, and the safety of a manufacturer is ensured in the manufacturing process.
When the biosensor is used, firstly, the syringe 101 is used for extracting the biological tissue solution, then the syringe 101 is connected with the plastic hose 15, and the biological tissue solution is injected into the microfluidic channel 1 through the plastic hose 15 and the liquid inlet 103 at a preset rate, after the biological tissue solution enters the microfluidic channel 1 and the MZ cavity 202, the light source providing piece 102 is started, the light source providing piece 102 provides broadband light, the broadband light is transmitted in the first fiber core, when the broadband light reaches the MZ cavity 202, the broadband light enters an interference arm formed by the biological tissue solution, and a reference arm formed by the filling piece 203, and a refractive index difference exists between the interference arm and the reference arm at the second optical fiber 204 at the tail end of the interference arm, so that the broadband light generates an optical path difference, forms interference after the broadband light is projected on the spectrometer 106, data are recorded after the optical spectrum is stabilized, then the ethanol is exchanged and injected into the microfluidic channel 1 and the MZ cavity 202, the generated waste liquid is guided into the collecting device 105, and then the other biological tissue solution with different concentrations is injected into the microfluidic channel 1 and the MZ cavity 202, and the refractive index difference is higher than that the refractive index of the optical fiber is higher than that of the refractive index sensor is provided in the optical fiber, and the optical fiber is higher than that the refractive index of the optical fiber is equal to the refractive index sensor 1, and the optical fiber is higher than the refractive index sensor is provided by the optical fiber, and the optical fiber is used for the invention, and the refractive index sensor has the refractive index difference is higher than the refractive index difference of the refractive index difference of the biological tissue solution and has the refractive index difference and has the refractive index.
The biological tissue solutions with different concentrations have different densities, so that the refractive indexes are different, and after the biological tissue solutions with different concentrations are injected into the MZ cavity 202, the refractive indexes of the interference arms are changed, so that the refractive index difference between the interference arms and the reference arms is changed, wavelength drift is caused to occur to the interference spectrum, the measured concentration change of the biological tissue solution can be indirectly detected by detecting the wavelength drift of the interference spectrum, and after the biological sensor provided by the invention is used, the biological sensor based on the optical fiber Mach-Zehnder interferometer provided by the invention has higher refractive index sensitivity and lower refractive index detection limit, so that the biological tissue solution concentration detection also shows excellent sensing characteristics.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the invention.

Claims (7)

1. A biosensor based on an optical fiber mach-zehnder interferometer, comprising: the micro-fluidic chip (107), a micro-fluidic channel (1) is arranged in the micro-fluidic chip (107), a liquid inlet (103) is arranged in the micro-fluidic chip (107), and the liquid inlet (103) is communicated with the micro-fluidic channel (1);
the light guide assembly (13) is arranged in the micro-flow channel (1), an MZ cavity (202) is formed in the light guide assembly (13), and the MZ cavity (202) is communicated with the micro-flow channel (1);
a light source providing member (102) disposed at one side of the microfluidic chip (107), the light source providing member (102) being connected to one end of the light guide member (13); the method comprises the steps of,
a spectrometer (106) arranged at one side of the microfluidic chip (107), wherein the spectrometer (106) is connected with one end of the light guide component (13) far away from the light source providing piece (102);
the light guide assembly (13) comprises: a first optical fiber (201);
the optical guide piece is arranged at one end of the first optical fiber (201), a cavity is formed in the optical guide piece, and the cavity is an MZ cavity (202); the method comprises the steps of,
a second optical fiber (204) arranged at one end of the light guide far away from the first optical fiber (201), wherein the first optical fiber (201) and the second optical fiber (204) are symmetrically arranged along the light guide;
the first optical fiber (201) and the second optical fiber (204) are single-mode optical fiber cores;
the light guide includes:
the glass tube (131), opposite ends of the glass tube (131) are respectively welded with the first optical fiber (201) and the second optical fiber (204), a communication port (132) is formed in the side face of the glass tube (131), two ends of the communication port (132) extend to the first optical fiber (201) and the second optical fiber (204) respectively and extend to two opposite ends of the glass tube (131), a cavity in the glass tube (131) serves as an MZ cavity (202), and the MZ cavity (202) is communicated with the outside through the communication port (132); the method comprises the steps of,
and a filling member (203) filled in the MZ cavity (202), wherein the diameter of the filling member (203) is smaller than that of the MZ cavity (202), one end of the first optical fiber (201) and one end of the second optical fiber (204) welded to the glass tube (131) are positioned on the inner wall of the cavity, and part of the first optical fiber is contacted with the filling member (203).
2. The optical fiber mach-zehnder interferometer based biosensor of claim 1, wherein: the filler (203) is an ultraviolet curing glue, and the refractive index of the ultraviolet curing glue is 1.36.
3. The optical fiber mach-zehnder interferometer based biosensor of claim 1, wherein: the length of the glass tube (131) is 100 μm, and the outer diameter and the inner diameter of the glass tube (131) are 125 μm and 75 μm, respectively.
4. The optical fiber mach-zehnder interferometer based biosensor of claim 1, wherein: the light source providing member (102) is used for providing a broadband light source.
5. The optical fiber mach-zehnder interferometer based biosensor of claim 1, wherein: a plastic hose (15) is arranged at a liquid inlet (103) formed in the microfluidic chip (107).
6. The optical fiber mach-zehnder interferometer based biosensor of claim 1, wherein: the microfluidic chip (107) is provided with a liquid outlet (104), the liquid outlet (104) is communicated with the microfluidic channel (1), one side of the microfluidic chip (107) is provided with a waste liquid collecting device (105), and the waste liquid collecting device (105) is communicated with the liquid outlet (104).
7. A method for manufacturing a biosensor based on an optical fiber mach-zehnder interferometer, wherein the method is used for manufacturing the biosensor based on an optical fiber mach-zehnder interferometer according to any one of claims 1-6, and comprises:
welding a first optical fiber (201) with one end of a glass tube (131), cutting the glass tube (131), and then welding a second optical fiber (204) with the other end of the glass tube (131);
one side of the glass tube (131) is thrown away, so that a communication port (132) is formed in the glass tube (131) to enable a cavity inside the glass tube (131) to be communicated with the outside;
filling ultraviolet curing glue in the glass tube (131), curing the ultraviolet curing glue, and enabling the diameter of the ultraviolet curing glue after curing to be smaller than the diameter of a cavity in the glass tube (131);
removing the redundant ultraviolet curing glue in the glass tube (131) so as to ensure that the ultraviolet curing glue in the glass tube (131) reaches the optimal interference light intensity contrast;
a microfluidic channel (1) is manufactured on a microfluidic chip (107), and a liquid inlet (103) and a liquid outlet (104) are formed;
the glass tube (131), the first optical fiber (201) and the second optical fiber (204) are arranged in the micro-flow channel (1), and the light inlet (11) and the light outlet (12) at two ends of the micro-flow channel (1) are respectively sealed by ultraviolet curing glue;
one end of the first optical fiber (201) away from the glass tube is connected to the light source providing member (102), and one end of the second optical fiber (204) away from the glass tube (131) is connected to the spectrometer (106).
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