CN107063552A - A kind of fiber-optic fiber gas pressure sensor - Google Patents
A kind of fiber-optic fiber gas pressure sensor Download PDFInfo
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- CN107063552A CN107063552A CN201611112349.XA CN201611112349A CN107063552A CN 107063552 A CN107063552 A CN 107063552A CN 201611112349 A CN201611112349 A CN 201611112349A CN 107063552 A CN107063552 A CN 107063552A
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- fiber
- gas pressure
- pressure sensor
- open cavity
- optical fiber
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The present invention discloses a kind of fiber-optic fiber gas pressure sensor, and the sensor can form a spherical cavity by the welding process that discharges in the welding interface of two single-mode fibers.Then, the microchannel of a length of 24 μm of processing is burnt on single-mode fiber cladding side by femto-second laser, microchannel is directly connected with spherical hollow space, and microchannel is connected at optical fiber side opening with capillary glass tube, it is convenient to be contacted with extraneous under test gas.The sensitivity of the gas pressure sensor is about 193.46pm/bar.The method according to the invention prepares fiber-optic fiber gas pressure sensor, manufacturing process is simple, low manufacture cost, Stability Analysis of Structures, with certain mechanical strength, and influence will not be produced on periphery electromagnetic environment, electric spark will not be produced, the special dimension such as air pressure detection in the detection of precision chemical laboratory atmosphere, the detection of petroleum gas pot air pressure, the pressure monitoring of various gas cylinders, aerospace craft can be widely used in.
Description
Technical field
The present invention relates to a kind of fiber-optic fiber gas pressure sensor, especially a kind of all -fiber begin to speak formula Mach-Zehnder do
Relate to type (MZI) gas pressure sensor.
Background technology
Compared with traditional various kinds of sensors, it is a series of unique that fibre optical sensor has the advantages that, such as sensitivity is high, anti-electromagnetism
Interference, it is corrosion-resistant, be easy to implement frequency multiplexing technique, simple in construction, small volume is lightweight, little power consumption etc..Stress, temperature, air pressure are
The fibre optical sensor of current most widely used fibre optical sensor, especially phase modulation-type, because it can be realized in a wide range of
Parameter is quick to external world and accurate dynamic measurement and by many concerns.Among sensors with auxiliary electrode, optical fiber mach-Zeng Deer
Interferometer (MZI) is one of important and widely used structure type：It mainly changes signal arm and ginseng by extraneous parameter
The phase difference between arm is examined, recycles demodulation techniques to know the real-time change information of parameter.All -fiber MZI is due to two-way being transmitted
Light is integrated among same optical fiber, is made that device is dexterousr, cost performance is higher and is easy to encapsulation, in recent years grinding as people
Study carefully focus.Fibre optical sensor begin to speak formula structure can make gas pressure value directly with optical signal interact, increase optical fiber
Contact area, thus it is more accurate rapid to gas pressure response to be measured, improve measurement accuracy and measurement efficiency.
The content of the invention
It is an object of the invention to provide a kind of optical fiber mach-Zeng Deer interference-type gas pressure sensors, the sensor
The accurate detection to gas pressure under some special applications scenes, such as strong-electromagnetic field environment or inflammable and explosive environment can be solved,
And a kind of method that use femtosecond laser process technology prepares miniature open cavity on single mode ordinary optic fibre is provided.The sensor
Principle is as follows：First, miniature open cavity is prepared on single mode ordinary optic fibre by femto-second laser and optical fiber splicer, it is miniature
Open cavity diameter is about 30 μm, and the miniature open cavity is located between single-mode fiber fibre core and covering, and passes through glass capillary
Pipe is contacted with test gas；The light that wideband light source is sent is two-way in the punishment of single-mode fiber cavity, all the way from the micro- of fiber core
Pass through, passed through all the way from the bottom fiber core of miniature open cavity in the air of type open cavity, during common arrival spectrometer,
According to Mach Zehnder interference (MZI) principle, spectrometer will show interference illustration.Under test gas is entered by capillary glass tube
Optical fiber cavity, makes cavity volume occur slight change, so as to change the interference illustration of spectrometer.By measuring collection of illustrative plates peak value ripple
Long variable quantity, you can to measure the atmospheric pressure value of under test gas.The method according to the invention prepares optical fiber mach-Zeng Deer interference
Type gas pressure sensor, manufacturing process is simple, low manufacture cost, Stability Analysis of Structures, with certain mechanical strength, and will not
Influence is produced on periphery electromagnetic environment, electric spark will not be produced, the detection of precision chemical laboratory atmosphere, oil gas can be widely used in
The special dimension such as air pressure detection in the detection of tank air pressure, the pressure monitoring of various gas cylinders, aerospace craft.
The advantage of the invention is that：The present invention uses full-fiber sensor, using Mach Zehnder interference principle design,
Preparation method is simple and easy to apply, improves the use field of fibre optical sensor, and precision is high, applied widely.
Brief description of the drawings
The fiber-optic fiber gas pressure sensor that Fig. 1 is the present invention opens the micro- enlarged drawing of microcavity；
Fig. 2 is the structure chart of the fiber-optic fiber gas pressure sensor of the present invention；
Fig. 3 is test result curve of the fiber-optic fiber gas pressure sensor of the present invention under different air pressure；
Fig. 4 is the fiber-optic fiber gas pressure sensor pressure and peak wavelength curve of the present invention.
1- wideband light sources；2- under test gas；3- capillary glass tubies；4- coverings；5- fibre cores；6- stainless steel capillaries；7-“T”
Type engineering plastics pipe；8- spectrometers.
Embodiment
Below in conjunction with specific embodiment, and referring to the drawings, the present invention is described in more detail.
A kind of optical fiber mach-Zeng Deer interference-type gas pressure sensors comprise the following steps：Reference picture 1, passes through first
Femto-second laser exports laser, and wavelength is 780nm, and the pulse period is 120fs, and repetitive rate is 1KHz, and pulse power is 6 μ J；
Then output laser is by 20 times of enlargement ratio lens focus, and lens numerical aperture is 0.5, focuses on laser smooth general
Logical single-mode fiber end face fibre core 5 and the interface ablation of covering 4 go out 24x14x57 μm3Rectangle pit-hole, be then placed in fused fiber splice
Machine, and another single-mode fiber flat end face welding, setting welding current are 6.2mA, and the welding duration is 2.0s.By putting
Electro fusion process, can form a spherical cavity, the position of cavity is in single mode in the welding interface of two single-mode fibers
In the middle of fiber core 5 and covering 4, diameter is about 30 μm.Then, burnt by femto-second laser on the side of single-mode fiber covering 4
Burn a length of 24 μm of microchannel of processing, microchannel is directly connected with spherical hollow space, microchannel is at optical fiber side opening and glass
Capillary 3 is connected, convenient to be contacted with extraneous under test gas 2.The miniature open cavity of optical fiber completes.
The structure chart of the fiber-optic fiber gas pressure sensor of specific embodiment reference picture 2, in order to ensure system job stability and
Reliability, prepares the single-mode fiber (including fibre core 5 and covering 4) completed by miniature open cavity and capillary glass tube 3 is inserted in
In 316 stainless steel capillaries 6, strengthen the mechanical strength and corrosion resistance of sensor；Simultaneously by the miniature open cavity of single-mode fiber
It is put into T-shape engineering plastics pipe 7, all coupling parts and filling part strengthen sensor sensing using the encapsulation of 353ND glue
Position mechanical strength and water resistance.Single-mode fiber two ends are respectively connected to wideband light source 1 and spectrometer 8, capillary glass tube 3 connects
Enter under test gas 2, gas pressure value can be calculated by the peak wavelength change of the spectrogram of spectrometer 8.
Fig. 3 is test result curve of the fiber-optic fiber gas pressure sensor of the present invention under different air pressure.It can be seen that to be measured
When gas 2 is under the different air pressure of 0bar, 3bar, 5bar, 7bar, 9bar (1bar=0.1MPa), peak wavelength intensity occurs
Significant change, with the increase of pressure, change trend is presented in peak wavelength intensity.
Fig. 4 is the fiber-optic fiber gas pressure sensor pressure and peak wavelength curve of the present invention, shows that the air pressure of under test gas 2 is big
Good linear relationship is showed between the small peak wavelength spectral intensity with spectrometer 8.By calculating, the gas pressure sensor
Sensitivity be about 193.46pm/bar.
Above-mentioned detailed description is illustrating for possible embodiments of the present invention, and the embodiment simultaneously is not used to limit this hair
Bright the scope of the claims, all equivalence enforcements or change without departing from carried out by the present invention are intended to be limited solely by the scope of the claims of this case.
Claims (5)
1. a kind of optical fiber mach-Zeng Deer interference-type gas pressure sensors, it is characterised in that：This method includes swashing by femtosecond
Light device and optical fiber splicer prepare miniature open cavity on single-mode fiber, and build horse using the miniature open cavity of optical fiber
Conspicuous-Zeng Deer interference-types baroceptor.
2. femto-second laser according to claim 1, it is characterised in that：Output of laser wavelength is 780nm, and the pulse period is
120fs, repetitive rate is 1KHz, and pulse power is 6 μ J.
3. optical fiber splicer according to claim 1, it is characterised in that：Setting welding current is 6.2mA, welding duration
For 2.0s.
4. miniature open cavity according to claim 1, it is characterised in that：The position of cavity is in single-mode fiber fibre core and covering
Centre, diameter is about 30 μm.
5. Mach Zehnder interference type baroceptor according to claim 1, it is characterised in that：Miniature open cavity system
The standby single-mode fiber completed and capillary glass tube are inserted in 316 stainless steel capillaries；The miniature open cavity of single-mode fiber is put
Enter in T-shape engineering plastics pipe, all coupling parts and filling part are using the encapsulation of 353ND glue.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611112349.XA CN107063552A (en) | 2016-11-30 | 2016-11-30 | A kind of fiber-optic fiber gas pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611112349.XA CN107063552A (en) | 2016-11-30 | 2016-11-30 | A kind of fiber-optic fiber gas pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107063552A true CN107063552A (en) | 2017-08-18 |
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ID=59618987
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201611112349.XA Pending CN107063552A (en) | 2016-11-30 | 2016-11-30 | A kind of fiber-optic fiber gas pressure sensor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108680532A (en) * | 2018-07-17 | 2018-10-19 | 深圳大学 | Biosensor and preparation method thereof based on optical fiber mach-Zeng Deer interferometers |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5644125A (en) * | 1994-11-23 | 1997-07-01 | Research Foundation Of State University Ny | Spectrometer employing a Mach Zehnder interferometer created by etching a waveguide on a substrate |
| CN201811917U (en) * | 2010-07-28 | 2011-04-27 | 山东大学 | Photoacoustic spectrum gas detection system based on Mach-Zehnder interferometer |
| CN203595666U (en) * | 2013-12-17 | 2014-05-14 | 山东微感光电子有限公司 | Capillary tube optical fiber reference air chamber |
| CN205015117U (en) * | 2015-08-17 | 2016-02-03 | 中国计量学院 | Optic fibre baroceptor based on M -Z interferes |
| CN205483383U (en) * | 2016-01-21 | 2016-08-17 | 中国计量学院 | Reflective FP chamber optic fibre baroceptor |
-
2016
- 2016-11-30 CN CN201611112349.XA patent/CN107063552A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5644125A (en) * | 1994-11-23 | 1997-07-01 | Research Foundation Of State University Ny | Spectrometer employing a Mach Zehnder interferometer created by etching a waveguide on a substrate |
| CN201811917U (en) * | 2010-07-28 | 2011-04-27 | 山东大学 | Photoacoustic spectrum gas detection system based on Mach-Zehnder interferometer |
| CN203595666U (en) * | 2013-12-17 | 2014-05-14 | 山东微感光电子有限公司 | Capillary tube optical fiber reference air chamber |
| CN205015117U (en) * | 2015-08-17 | 2016-02-03 | 中国计量学院 | Optic fibre baroceptor based on M -Z interferes |
| CN205483383U (en) * | 2016-01-21 | 2016-08-17 | 中国计量学院 | Reflective FP chamber optic fibre baroceptor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108680532A (en) * | 2018-07-17 | 2018-10-19 | 深圳大学 | Biosensor and preparation method thereof based on optical fiber mach-Zeng Deer interferometers |
| CN108680532B (en) * | 2018-07-17 | 2023-06-09 | 深圳大学 | Biosensor based on optical fiber Mach-Zehnder interferometer and manufacturing method thereof |
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Application publication date: 20170818 |