CN108680276A - One kind being based on Nd:The High-termperature Optical Fiber Sensor of YAG crystalline ceramics chips - Google Patents
One kind being based on Nd:The High-termperature Optical Fiber Sensor of YAG crystalline ceramics chips Download PDFInfo
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- CN108680276A CN108680276A CN201810522102.8A CN201810522102A CN108680276A CN 108680276 A CN108680276 A CN 108680276A CN 201810522102 A CN201810522102 A CN 201810522102A CN 108680276 A CN108680276 A CN 108680276A
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- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
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Abstract
The invention discloses one kind being based on Nd:The High-termperature Optical Fiber Sensor of YAG crystalline ceramics chips, belongs to technical field of optical fiber sensing, including light source module, optical fiber sensing probe module, spectral analysis module and link block, and the optical fiber sensing probe module includes taper temperature-sensitive cap, Nd:YAG crystalline ceramics chip, temperature sensing matrix；The present invention is by Nd:YAG crystalline ceramics chip front/rear ends carry out carrying out reverse transfer after repeatedly interfering as reflecting surface, cause Nd using temperature change:The measurement of temperature may be implemented by the drift of monitoring interference wavelength for the variation of YAG crystalline ceramics chip coefficient of thermal expansion and thermo-optical coeffecient.The present invention encapsulates optical fiber sensing probe module using no gelatinization, glue problem of aging when effectivelying prevent high temperature；Increase radiator structure enhancing single mode optical fiber service life in a high temperauture environment simultaneously, there is practicability, of low cost, compact-sized, the advantages that capable of realizing 1000 degree of high temperature measurements.
Description
Technical field
The invention belongs to fiber optic sensor technology fields, and in particular to one kind being based on Nd:The optical fiber of YAG crystalline ceramics chips
Pyrostat.
Background technology
Fibre optical sensor is the new sensor that recent decades grow up, and is to be used for detection light using optical fiber as medium
When propagating in a fiber, because of the variation of environment (physical quantity, chemical quantity or biomass etc.) where all or part of link of optical fiber
The device for bringing light-transfer characteristic to change.Fibre optical sensor have size is small, light-weight, stability is good, accuracy and sensitivity is high,
The advantages that long distance of signal transmission, electromagnetism interference, radioresistance, corrosion-resistant, fire prevention, explosion-proof, long lifespan, in bridge, dam, tunnel
The large scale structures engineering fields such as road, drilling well and harbour tippler have been widely used.The main component of optical fiber is property ratio
Relatively stable silica has longer service life.
As modern industrial production is more and more for pyrometric demand under adverse circumstances, to the range and standard of thermometric
Exactness also proposed requirements at the higher level.With the development of optical fibre high temp sensitive, present existing sensor has thermocouple, blackbody chamber, light
The number of different types such as fiber grating sensor, interferometric optical fiber sensor.Research shows that film thermocouple high-temperature field there is also
Certain bottleneck, as resistance to oxidation it is anticorrosive in terms of；And there is also response lags for black matrix cavity configuration, it is difficult to adapt to aerospace etc.
Requirement of the field to real-time；And fiber-optic grating sensor can degenerate under certain high temperature range, to constrain this
Use of the class device under higher temperature environment, although 700 can be born using Bragg grating device prepared by femtosecond laser
Degree or more high temperature, however its cost of manufacture is high, and grating long-term work under 1000 degree or more high temperature itself can still be sent out
It is raw to degenerate, it can not really realize reliable high temp sensitive detection；And interference-type structure fabrication is complex, it is with high content of technology, be
The hot spot studied at present.
Since the 1970s mid-term, the U.S. pays much attention to the research and development of fibre optical sensor, in military and civilian field
All in leading position.British government also attaches great importance to the research and development of fiber optic sensing device, has set up Britain's fibre optical sensor cooperation
Association.Japan payes attention to and puts into a large amount of funds to carry out the technical research of fibre optical sensor, and having formulated 1979-1986, " light is answered
With plan control figures " 7 years plan, investment be up to 7,000,000,000 U.S. dollars.The research work of China's fiber optic sensing device starts from 70 years
Dai Mo, start-up time simultaneously not bery lag.Fibre-optical F-P sensor delicate structure, belongs to multiple-beam interference.But focus mostly at present in
1000 DEG C of temperature below of ordinary optic fibre pair detect, for the temperature sensing under the hyperthermal environments such as aero-engine, also
There is no good detection method.
If patent CN106066215A discloses a kind of sapphire pyrostat, pass through high temperature resistant lock pin and high temperature resistant set
The structure design of cylinder, is tightly fastened sapphire fiber and sapphire wafer, can realize that large-scale temperature measures, but
It is that most common packaged type is that fibre optical sensor is pasted on sensing matrix by adhesive at present.But there are commonly
Machine adhesive is heat-resisting, oil resistant and wear-resisting property are poor, easily aging, and service life is limited.Sunshine, high temperature under natural conditions and tide
Wet environment can all lead to the aging and failure of epoxy adhesive.Therefore in engineer application, the limited service life of adhesive
Become a key factor of limitation fibre optical sensor service life.Currently, for the Fabry-Perot outside fiber end face
Sieve (method amber) is interfered in correlative study, and it is ideally strictly right that two fiber end faces or optical fiber are considered increasingly as with crystal end-face
It is accurate.But a degree of offset is will produce when fiber end face is aligned in production application, cause High-termperature Optical Fiber Sensor
The sensing capabilities of device are affected.These offsets include：Radial displacement occurs for optical fiber；Inclination angle is generated between fiber end face；Crystal
End face run-off the straight.
Based on factors above, the present invention proposes a kind of based on Nd:The High-termperature Optical Fiber Sensor of YAG crystalline ceramics chips, profit
With crystalline ceramics crystal physicochemistry property is stable, high-melting-point and corrosion resistant characteristic, using the crystalline ceramics of polishing both surfaces
Chip receives using optical fiber and transmits interference signal as F-P cavity.Optical fiber sensing probe module is connected solid by internal and external threads
It is fixed, the problem of optical fiber sensing probe encapsulates without gelatinization, also overcomes adhesive non-refractory is realized, proposes optical fiber sensing probe
Using three fiber end faces are coplanar and Nd:YAG crystalline ceramics chips are parallel, can detect Nd:Whether YAG crystalline ceramics chip inclines
Tiltedly, precision is improved.
Invention content
The purpose of the present invention is to provide one kind being based on Nd:The High-termperature Optical Fiber Sensor of YAG crystalline ceramics chips, the sensing
Device is based on Nd:YAG crystalline ceramics chip front/rear ends are repeatedly interfered as reflecting surface, and 1000 DEG C of high temperature sides may be implemented
Amount, the sensor are encapsulated using High-termperature Optical Fiber Sensor without gelatinization simultaneously, and glue problem of aging when effectivelying prevent high temperature has steady
It is qualitative good, it is highly practical, make the advantages that simple, sensitivity is high.
The object of the present invention is achieved like this：
One kind being based on Nd:The High-termperature Optical Fiber Sensor of YAG crystalline ceramics chips, including light source module 1, optical fiber sensing probe
Module 2, spectrometer analysis module 3, link block 4；The light source module 1 is wideband light source, 1 output end of light source module and first
2 × 2 Coupler ports 401 are connected by single-mode transmission optical fiber；Link block 4 is 2 × 2 couplers, including the one 2 × 2nd coupling
The 401, the 22 × 2nd Coupler ports 402 of device port and the 32 × 2nd Coupler ports 403；The spectral analysis module 3 is light
Spectrum analysis instrument, 3 input terminal of spectral analysis module are connected with the 22 × 2nd Coupler ports 402 by single-mode transmission optical fiber；Optical fiber
2 incidence end of sensing probe module is connected with the 32 × 2nd Coupler ports 403 by single-mode transmission optical fiber；The Fibre Optical Sensor is visited
Head module 2 includes taper temperature-sensitive cap 5, Nd:YAG crystalline ceramics chip 6, temperature sensing matrix 10；
The taper temperature-sensitive cap 5 is that one end is circular cone, and the other end is cavity round metal cylindricality；The cylinder of taper temperature-sensitive cap 5
End carries internal thread；There are one annular grooves close to the inside of conical end for the cavity round metal cylindricality；
The generally cylindrical cavity of the temperature sensing matrix 10；With round logical at 10 one end center of temperature sensing matrix
Hole, symmetrical n circular through hole around circular through hole at center；10 both ends of temperature sensing matrix carry external screw thread.
The Nd:The front/rear end of YAG crystalline ceramics chip 6 is the smooth circular configuration of polishing；Nd:YAG crystalline ceramics
6 diameter of chip is more than the 5 cylindrical diameter of cavity round metal of taper temperature-sensitive cap；Nd:YAG crystalline ceramics chip 6 passes through embedded side
Formula is fixedly connected at the annular groove on the inside of cavity round metal cylindricality.
The cylindrical end of the external screw thread that described 10 one end of temperature sensing matrix carries and the taper temperature-sensitive cap 5 carries internal thread
Connection.
First optical fiber 7, the second optical fiber 8, third are installed in the circular through hole at 10 one end center of the temperature sensing matrix
Optical fiber 9；First optical fiber 7, the second optical fiber 8,9 three's fiber end face of third optical fiber are concordant and coplanar, and arrangement mode is in triangle
Shape structure.
First optical fiber 7, the second optical fiber 8, the end face of 9 three of third optical fiber and the Nd:Before YAG crystalline ceramics chip 6
Identical gap is arranged in end face.
It is equipped in n circular through hole symmetrical around circular through hole at the center of the temperature sensing matrix 10 scattered
Heat structure.
The temperature sensing matrix 10 is ceramic material.
First optical fiber 7, the second optical fiber 8, the Standard single-mode fiber that 9 three of third optical fiber is same size.
Both the internal thread of 5 cylindrical end of taper temperature-sensitive cap and the external screw thread at 10 both ends of temperature sensing matrix screw thread model
Identical, screw thread model size is determined according to the specification of sensor.
The beneficial effects of the present invention are：
One kind of the present invention being based on Nd:The High-termperature Optical Fiber Sensor of YAG crystalline ceramics chips can realize 1000 DEG C of high temperature
Real-time measurement, utilize Nd:YAG crystalline ceramics crystal physicochemistries property stabilization, high-melting-point and corrosion resistant characteristic, use
The Nd of polishing both surfaces:YAG crystalline ceramics chip receives using optical fiber and transmits interference signal as F-P cavity；
It is of the invention a kind of based on Nd:The High-termperature Optical Fiber Sensor of YAG crystalline ceramics chips passes through optical fiber sensing probe module
In the connection that is screwed, realize the front end of optical fiber sensing probe module and encapsulated without gelatinization, also overcome adhesive intolerant to height
The problem of temperature, while realizing that optical fiber sensing probe module is completely closed, it is not influenced by external environment humidity；Increase heat dissipation simultaneously
Structure radiates to single mode optical fiber, overcomes the problems, such as that single mode optical fiber cannot bear 1000 DEG C of hot environment；
Optical fiber sensing probe module in the present invention uses three single mode optical fiber end faces coplanar and Nd:YAG crystalline ceramics is brilliant
Piece is parallel, can detect Nd:Whether YAG crystalline ceramics chip tilts, and improves precision, stability is good, structural manufacturing process and treatment process
Simply, of low cost, it is easy to operate.
Description of the drawings
Fig. 1 is the structural schematic diagram of the High-termperature Optical Fiber Sensor of the embodiment of the present invention；
Fig. 2 is the overall structure diagram of the optical fiber sensing probe module of the embodiment of the present invention；
Fig. 3 is each component connection relationship diagram of the optical fiber sensing probe module of the embodiment of the present invention；
Fig. 4 is the single mode optical fiber position arrangement schematic diagram of the optical fiber sensing probe module of the embodiment of the present invention；
Fig. 5 is light source light spectrum schematic diagram at room temperature of the embodiment of the present invention；
Fig. 6 is that the embodiment of the present invention measures the spatial frequency spectrum schematic diagram that reflectance spectrum obtains at room temperature；
Fig. 7 is that the embodiment of the present invention measures the spatial frequency spectrum schematic diagram that reflectance spectrum obtains at different temperatures；
Fig. 8 is the optical path difference and temperature relation schematic diagram of the High-termperature Optical Fiber Sensor of the embodiment of the present invention.
Specific implementation mode
The present invention is described further below in conjunction with the accompanying drawings.
It is an object of the invention to overcome the above-mentioned prior art insufficient, provide a kind of based on Nd:YAG crystalline ceramics chips
High-termperature Optical Fiber Sensor, High-termperature Optical Fiber Sensor may be implemented and encapsulated without gelatinization, glue problem of aging when effectivelying prevent high temperature, surely
Qualitative good, the present invention uses three fiber end faces coplanar and Nd:YAG crystalline ceramics chips are parallel, can detect Nd:The transparent potteries of YAG
Whether porcelain chip tilts, and improves precision, while the present invention carries out heat conduction and heat radiation using device and avoids single mode optical fiber in hot environment
It is lower to damage the practicability, it can be achieved that High-termperature Optical Fiber Sensor.
One kind being based on Nd:The High-termperature Optical Fiber Sensor of YAG crystalline ceramics chips, including light source module 1, optical fiber sensing probe
Module 2, spectrometer analysis module 3, link block 4；The light source module 1 is wideband light source, 1 output end of light source module and first
2 × 2 Coupler ports 401 are connected by single-mode transmission optical fiber；Link block 4 is 2 × 2 couplers, including the one 2 × 2nd coupling
The 401, the 22 × 2nd Coupler ports 402 of device port and the 32 × 2nd Coupler ports 403；The spectral analysis module 3 is light
Spectrum analysis instrument, 3 input terminal of spectral analysis module are connected with the 22 × 2nd Coupler ports 402 by single-mode transmission optical fiber；Optical fiber
2 incidence end of sensing probe module is connected with the 32 × 2nd Coupler ports 403 by single-mode transmission optical fiber；The Fibre Optical Sensor is visited
Head module 2 includes taper temperature-sensitive cap 5, Nd:YAG crystalline ceramics chip 6, temperature sensing matrix 10；
The taper temperature-sensitive cap 5 is that one end is circular cone, and the other end is cavity round metal cylindricality；The cylinder of taper temperature-sensitive cap 5
End carries internal thread；There are one annular grooves close to the inside of conical end for the cavity round metal cylindricality；The taper temperature-sensitive
Cap 5 selects coefficient of thermal expansion to be less than Nd:The metal material or ceramic material of YAG crystalline ceramics chip 6.
The generally cylindrical cavity of the temperature sensing matrix 10；With round logical at 10 one end center of temperature sensing matrix
Hole, symmetrical n circular through hole around circular through hole at center；It is specifically set according to the size of 10 diameter of temperature sensing matrix
The quantity of n is counted, 10 both ends of temperature sensing matrix carry external screw thread.
The Nd:The front/rear end of YAG crystalline ceramics chip 6 is the smooth circular configuration of polishing；Nd:YAG crystalline ceramics
6 diameter of chip is more than the 5 cylindrical diameter of cavity round metal of taper temperature-sensitive cap；Nd:YAG crystalline ceramics chip 6 passes through embedded hand
Section is fixedly connected with cylindrical metal cavity annular groove.
Described 10 one end of temperature sensing matrix is carried with M5 external screw threads and the cylindrical end of the taper temperature-sensitive cap 5 in M5
It is threadedly coupled, the cylindrical end of the external screw thread that described 10 one end of temperature sensing matrix carries and the taper temperature-sensitive cap 5 carries interior spiral shell
Line connects.
First optical fiber 7, the second optical fiber 8, third are installed in the circular through hole at 10 one end center of the temperature sensing matrix
Optical fiber 9；First optical fiber 7, the second optical fiber 8,9 three's fiber end face of third optical fiber are concordant and coplanar, and arrangement mode is in triangle
Shape structure.The Nd:6 front end face of YAG crystalline ceramics chip and the first optical fiber 7, the second optical fiber 8,9 three of third optical fiber end
Identical gap is set between face.N symmetrical around circular through hole circle at the center of the temperature sensing matrix 10
Radiator structure is installed in through hole, and n is determined according to the specification of temperature sensing matrix 10；The temperature sensing matrix 10 is ceramic material
Matter；First optical fiber 7, the second optical fiber 8, the Standard single-mode fiber that 9 three of third optical fiber is same size.
Embodiment
In conjunction with shown in Fig. 1-3, the present invention is a kind of to be based on Nd:The High-termperature Optical Fiber Sensor of YAG crystalline ceramics chips, including light
Source module 1, optical fiber sensing probe module 2, spectrometer analysis module 3, link block 4；The light source module 1 is wideband light source,
1 output end of light source module is connected with the one 2 × 2nd Coupler ports 401 by single-mode transmission optical fiber；Link block 4 is 2 × 2 couplings
Clutch, including the one 2 × 2nd Coupler ports 401, the 22 × 2nd Coupler ports 402 and the 32 × 2nd Coupler ports 403；
The spectral analysis module 3 is spectroanalysis instrument, and 3 input terminal of spectral analysis module passes through with the 22 × 2nd Coupler ports 402
Single-mode transmission optical fiber is connected；2 incidence end of optical fiber sensing probe module passes through single mode transport light with the 32 × 2nd Coupler ports 403
Fibre is connected；The optical fiber sensing probe module 2 includes taper temperature-sensitive cap 5, Nd:YAG crystalline ceramics chip 6, temperature sensing matrix
10；
The Nd:The front/rear end of YAG crystalline ceramics chip 6 is speculum and taper temperature-sensitive cap 5 and temperature sensing base
Body 10 constitutes optical fiber sensing probe module 2；
The taper temperature-sensitive cap 5 is that one end is circular cone, and the other end is cavity round metal cylindricality, the circle of taper temperature-sensitive cap 5
Styletable carries M5 internal threads；There are one annular grooves close to the inside of conical end for cavity round metal cylindricality；Taper temperature-sensitive cap can be with
Sensor is facilitated to be inserted directly into dut temperature field such as soil or rock.
Described 10 one end of temperature sensing matrix carries M5 with M5 external screw threads and the cylindrical end of the taper temperature-sensitive cap 5
Internal thread connects.
The Nd:YAG crystalline ceramics chip 6 selects the Nd that thickness 2.8mm, area are about 10mm × 10mm:YAG is transparent
Ceramic wafers 6 are unfavorable for Nd in order to avoid its rough surface can cause the diffusing reflection of light:6 front and back end of YAG crystalline ceramics chip
Interfered in face.To Nd:The end face of YAG crystalline ceramics is ground, and presses corase grinding successively, and middle mill, fine grinding and polishing are ground,
Before grinding, abrasive sheet and glass negative are cleaned with deionized water, finally obtains smooth front/rear end by Nd:YAG crystalline ceramics
Chip 6 is fixedly connected by being embedded in means with annular groove.
In conjunction with shown in Fig. 3, the temperature sensing matrix 10 is a generally cylindrical hollow chamber, the temperature sensing
A diameter of 3mm circular through holes are carried at 10 one end center of matrix, at center around through-hole symmetrical 4 a diameter of 4mm circle
Shape through-hole；The temperature sensing matrix 10 uses ceramic material, compares metal material, and ceramic hardness bigger is more not easily susceptible to
Metal material more high temperature resistant is compared in the impact of external force；First optical fiber 7, the second optical fiber 8,9 three's optical fiber end of third optical fiber
Face is all generally flush with and co-planar arrangement, and first optical fiber 7, the second optical fiber 8, third optical fiber 9 are fixed by ceramic tube respectively, Gu
It is to be consolidated the first optical fiber 7, the second optical fiber 8, third optical fiber 9 by high temperature inorganic adhesive in ceramic tube rear end to determine mode
It is fixed, and be inlaid at the center of temperature sensing matrix 10 in circular through hole, the radiator structure is carried out using high temperature resistant heat pipe
Heat conduction and heat radiation, first heat pipe 11, the second heat pipe 12, third heat pipe 13, the 4th heat pipe 14, which are inlaid in respectively at center, to be led to
Around hole in the circular through hole of symmetrical 4 a diameter of 4mm；
First optical fiber 7 described in this implementation, the second optical fiber 8, the conventional single mode light that 9 three of third optical fiber is same size
The core diameter of fibre, single mode optical fiber is 8.2 μm, and cladding diameter is 125 μm；Wideband light source in the light source module 1 is defeated
It is 1500nm-1620nm to go out wavelength；
First heat pipe 11, the second heat pipe 12, third heat pipe 13, the 4th heat pipe 14 basic functional principle be by pipe
Shell, liquid-sucking core and end cap composition, will be pumped into 1.3 × 10 in pipe-1-1.3×10-4Suitable working fluid is filled with after the negative pressure of Pa,
Make to be close to it is hydraulically full in the liquid-sucking core capillary-porous material of inside pipe wall after sealed.To one end be evaporator section also cry heating
Section, the other end are that condensation segment is also cooling section, are needed to arrange adiabatic section two sections of centres according to application.When one end of heat pipe by
Liquid evaporation vaporization when hot in capillary wick, steam flow to other end releasing heat under small pressure difference and condense into liquid, liquid
Evaporator section is flowed back in effect of the body again along porous material by capillary force.So cycle not oneself, heat by one end of heat pipe reach it is another-
End, to play the role of heat dissipation.
The working fluid selection of 1000 DEG C of ambient operating temperature described in the present embodiment or more, the heat pipe is sodium, lithium
Or silver, the working fluid fusing point of sodium heat pipe is 98 DEG C, and boiling point is 892 DEG C under air, and operating temperature range is 600-1200 DEG C；Lithium
The working fluid fusing point of heat pipe is 179 DEG C, and boiling point is 1340 DEG C under air, and operating temperature range is 1000-1800 DEG C；Silver-colored heat pipe
Working fluid fusing point be 960 DEG C, boiling point is 2120 DEG C under air, and operating temperature range is 1800-2300 DEG C.
In conjunction with as indicated at 4,9 three end face parallel co-planar of first optical fiber 7, the second optical fiber 8 and third optical fiber, arrangement side
Formula structure triangular in shape.The optical fiber sensing probe module 2 of the present embodiment uses three fiber end faces coplanar and Nd:The transparent potteries of YAG
Porcelain chip 6 is parallel, can detect Nd:Whether YAG crystalline ceramics chip 6 tilts, and improves precision；
It is interfered between fiber end face and chip front end face to reduce, improves the quality of crystal plate interference spectrum, it is described
First optical fiber 7, the second optical fiber 8, the polishing of 9 endface of third optical fiber obtain flat surface and and Nd:Before YAG crystalline ceramics chip 6
Identical gap is set between end face.In order to improve the accuracy of sensor, the first optical fiber 7, the second optical fiber 8, third optical fiber 9 three
The plane and Nd that fiber end face is constituted:YAG crystalline ceramics chip 6 is parallel.The interference signal finally obtained is broadly divided into three kinds：
First, Nd:6 front/rear end of YAG crystalline ceramics chip reflects；Second is that fiber end face reflection and Nd:YAG crystalline ceramics is brilliant
6 front end face of piece reflects；Third, fiber end face reflection and Nd:6 rear end face of YAG crystalline ceramics chip reflects.The
A kind of interference signal of acquisition is used for sensing analysis；Second of interference signal obtained with the third is for judging Nd:YAG is transparent
Whether ceramic wafers 6 tilt, so that improving sensing accuracy, exclude error interference.
The present invention working method be：The broadband light that the light source module 1 is sent out is by the one 2 × 2nd in link block 4
Coupler ports 401 enter, and out enter Fibre Optical Sensor by single-mode transmission optical fiber by the 32 × 2nd Coupler ports 403 and visit
Head module 2, due to the Nd in optical fiber sensing probe module 2:The front/rear end of YAG crystalline ceramics chip 6 is repeatedly interfered
After carry out reverse transfer.According to F-P sensing theories, temperature change by optical fiber sensing probe mould taper temperature-sensitive cap 5 in the block come
Experience dut temperature field and makes Nd:YAG crystalline ceramics chip 6 generates thermal expansion, and broadband light is by Nd:YAG crystalline ceramics chip 6
Front/rear end multiple reflections are interfered so that two-beam road generates optical path difference, forms interference fringe；Pass through single mode transport light again
Fibre is transferred to light again to the 32 × 2nd Coupler ports 403 in link block 4 into the outflow of the 22 × 2nd Coupler ports 402
Spectrum analysis module 3.
It being based on Nd using one kind:The application process that the High-termperature Optical Fiber Sensor of YAG crystalline ceramics chips is measured into trip temperature
For：
Optical fiber sensing probe module 2 is connect with the 32 × 2nd Coupler ports 403 in link block 4；Link block 4
In the one 2 × 2nd Coupler ports 401 and the 22 × 2nd Coupler ports 402 connect light source module 1 and spectrum analysis mould respectively
Block 3 will obtain light source light spectrum at room temperature, in conjunction with shown in Fig. 5.The present invention is that sensor-based system is two-chamber composition, by by data
Doing Fourier transformation can be explained with spatial frequency, and in conjunction with shown in Fig. 6, first peak is single mode optical fiber end face and Nd:YAG is saturating
The air chamber that 6 front end face of bright ceramic wafers is constituted is, and then second peak beside it is Nd:The reality of YAG crystalline ceramics chip 6
Body cavity, the last one peak are single mode optical fiber end face and rear end Nd:The combination chamber of 6 rear end face of YAG crystalline ceramics chip is constituted.Work as height
When temperature sensor measuring temperature, optical fiber sensing probe module 2 is placed in the environment of temperature change (high temperature process furnances).When
When high temperature process furnances change, the spectrum of fine sensing probe module 2 can accordingly generate variation, in conjunction with shown in Fig. 7, different temperatures
The lower spatial frequency spectrum schematic diagram for measuring reflectance spectrum and obtaining.Changed by monitoring spectrally spectrum of wavelengths, so that it may to obtain temperature
Spend information.In conjunction with shown in Fig. 8, optical path difference and the temperature relation schematic diagram of High-termperature Optical Fiber Sensor of the present invention measure temperature entire
During degree, the temperature-responsive of spectrum shows relatively more linear, can obtain Nd:The thermo-optical coeffecient of YAG crystalline ceramics chip 6
σT；Due to known Nd:The thermalexpansioncoefficientα of YAG crystalline ceramics chip 6T, refractive index n and Nd:The thickness of YAG crystalline ceramics chip 6
Spend lOPL2。
In order to prove the feasibility of hot environment sensor, with the raising of temperature, interference wave spectrum can be moved to long wave direction
It is dynamic.The round-trip optical path difference of one F-P cavity indicates：
lOPL=2nl, (1)
Wherein, n is refractive index, and l is the physical length of cavity, and optical path difference is determined by temperature and causes the heat of cavity swollen
Swollen and thermo-optic effect carries out differential to (1) formula, can obtain：
Here σTIndicate thermo-optical coeffecient, αTExpression is coefficient of thermal expansion, is empty for cavity, we can ignore heat
Optical effect, but for Nd:For YAG crystalline ceramics chip reality chambers, both factors should all consider；
ΔlOPL1=lOPL1αT1ΔT；
ΔlOPL2=lOPL2(σT2+αT2)ΔT；
ΔlOPL3=lOPL1αT1ΔT+OPL2(σT2+αT2)ΔT；
Wherein, subscript 1,2 and 3 respectively represents air chamber and Nd:YAG crystalline ceramics chip cavity and air chamber and Nd:YAG is real
Body combines the position of chamber.
The spatial frequency of wave spectrum is about：
Wherein, λ1And λ1It is the spike of two adjacent interference fringes；
Optical path difference Δ l is can be seen that from (2) formulaOPLThere are monotonic relationshis between temperature T variations, utilize spectrum analysis
Module can measure the trough and wave crest of interference wave spectrum, the change for changing to obtain spatial frequency peak with temperature using Fourier spectrum
Change.
With the variation of the environment temperature of sensor, Nd:The refractive index n and thickness l of YAG chipsOPL2Due to thermo-optical coeffecient
σT2And thermalexpansioncoefficientαT2And change, therefore, interference fringe Δ lOPL2Change can be expressed as the function Δ T of temperature；
ΔlOPL2=lOPL2(σT2+αT2)ΔT；
Based on equation：
2nlOPL2=m λ0；
Wherein here λ0Meaning is the wavelength (generally can be wave crest or trough) of characteristic spectrum position, and m is corresponding dry
Relate to sequence.Thus measuring high temperature optical fiber sensor sensitivity is：48.983pm/ DEG C, measuring temperature is by light in following interference fringe
Spectral displacement and the function representation of temperature are：
Δλ0≈λ0(σT2+αT2)ΔT；
Wherein, Δ λ0Refer to λ0Variable quantity,
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, any made by repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (9)
1. one kind being based on Nd:The High-termperature Optical Fiber Sensor of YAG crystalline ceramics chips, including light source module (1), optical fiber sensing probe
Module (2), spectrometer analysis module (3), link block (4)；The light source module (1) is wideband light source, and light source module (1) is defeated
Outlet is connected with the one 2 × 2nd Coupler ports (401) by single-mode transmission optical fiber；Link block (4) is 2 × 2 couplers, packet
Include the one 2 × 2nd Coupler ports (401), the 22 × 2nd Coupler ports (402) and the 32 × 2nd Coupler ports (403)；Institute
It is spectroanalysis instrument, spectral analysis module (3) input terminal and the 22 × 2nd Coupler ports (402) to state spectral analysis module (3)
It is connected by single-mode transmission optical fiber；Optical fiber sensing probe module (2) incidence end passes through list with the 32 × 2nd Coupler ports (403)
Mould Transmission Fibers are connected；It is characterized in that：The optical fiber sensing probe module (2) includes taper temperature-sensitive cap (5), Nd:YAG is transparent
Ceramic wafers (6), temperature sensing matrix (10)；
One end of the taper temperature-sensitive cap (5) is circular cone, and the other end is cavity round metal cylindricality；The cylinder of taper temperature-sensitive cap (5)
End carries internal thread；There are one annular grooves close to the inside of conical end for the cavity round metal cylindricality；
The temperature sensing matrix (10) generally cylindrical cavity；With round logical at temperature sensing matrix (10) one end center
Hole, symmetrical n circular through hole around circular through hole at center；Temperature sensing matrix (10) both ends carry external screw thread.
2. according to claim 1 a kind of based on Nd:The High-termperature Optical Fiber Sensor of YAG crystalline ceramics chips, feature exist
In：The Nd:The front/rear end of YAG crystalline ceramics chip (6) is the smooth circular configuration of polishing；Nd:YAG crystalline ceramics chips
(6) diameter is more than the cylindrical diameter of taper temperature-sensitive cap (5) cavity round metal；Nd:YAG crystalline ceramics chip (6) by be embedded in
Mode is fixedly connected at the annular groove on the inside of cavity round metal cylindricality.
3. according to claim 1 a kind of based on Nd:The High-termperature Optical Fiber Sensor of YAG crystalline ceramics chips, feature exist
In：The external screw thread that described temperature sensing matrix (10) one end carries and the cylindrical end of the taper temperature-sensitive cap (5) carry internal thread
Connection.
4. according to claim 1 a kind of based on Nd:The High-termperature Optical Fiber Sensor of YAG crystalline ceramics chips, feature exist
In：The first optical fiber (7), the second optical fiber (8), third are installed in circular through hole at temperature sensing matrix (10) one end center
Optical fiber (9)；First optical fiber (7), the second optical fiber (8), third optical fiber (9) three's fiber end face are concordant and coplanar, arrangement side
Formula structure triangular in shape.
5. according to claim 4 a kind of based on Nd:The High-termperature Optical Fiber Sensor of YAG crystalline ceramics chips, feature exist
In：First optical fiber (7), the second optical fiber (8), the end face of third optical fiber (9) three and the Nd:YAG crystalline ceramics chip (6)
Identical gap is arranged in front end face.
6. according to claim 1 a kind of based on Nd:The High-termperature Optical Fiber Sensor of YAG crystalline ceramics chips, feature exist
In：Heat dissipation is installed in n circular through hole symmetrical around circular through hole at the center of the temperature sensing matrix (10)
Structure.
7. according to claim 1 a kind of based on Nd:The High-termperature Optical Fiber Sensor of YAG crystalline ceramics chips, feature exist
In：The temperature sensing matrix (10) is ceramic material.
8. according to claim 4 or 5 a kind of based on Nd:The High-termperature Optical Fiber Sensor of YAG crystalline ceramics chips, feature
It is：First optical fiber (7), the second optical fiber (8), the Standard single-mode fiber that third optical fiber (9) three is same size.
9. according to claim 1 or 3 a kind of based on Nd:The High-termperature Optical Fiber Sensor of YAG crystalline ceramics chips, feature
It is：Both the internal thread of taper temperature-sensitive cap (5) cylindrical end and the external screw thread at temperature sensing matrix (10) both ends screw-type
Number identical, screw thread model size is determined according to the specification of sensor.
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