CN108627943A - A kind of broadband hot spot focusing device suitable for ultra-high vacuum environment - Google Patents
A kind of broadband hot spot focusing device suitable for ultra-high vacuum environment Download PDFInfo
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- CN108627943A CN108627943A CN201810741536.7A CN201810741536A CN108627943A CN 108627943 A CN108627943 A CN 108627943A CN 201810741536 A CN201810741536 A CN 201810741536A CN 108627943 A CN108627943 A CN 108627943A
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- focus module
- hot spot
- fixed
- movable block
- cavity
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
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Abstract
The invention discloses a kind of broadband hot spot focusing devices suitable for ultra-high vacuum environment, belong to high vacuum focusing system design field.The focus module that bevel gear combination, realization hot spot including vacuum cavity, adjustable focal length are reduced；The back-and-forth motion of support and control focus module holder is driven by the knob that bevel gear combines, pass through the transmission between screw thread, focus module is enable to realize the Modulatory character of focal length, so as on the basis of not increasing light path and light path complexity, effectively reduce 1000nm 120nm wave-length coverage spot sizes, and focus module in vacuum environment can be moved away to original light path by the ease of Use of the snap part in focus module, not limit original optical source wavelength range.
Description
Technical field
The invention belongs to high vacuum focusing system design fields, and in particular to a kind of wide wave suitable for ultra-high vacuum environment
Section hot spot focusing device, for the device that in ultra-high vacuum environment, vacuum ultraviolet-near-infrared hot spot micron (μm) grade focuses.
Background technology
The size for detecting hot spot is spectrum power spectrum quasi-instrument one important performance indicator of equipment, but test equipment is included
Routine/standard spot focus system tend not to meet work characterized to the test of small size (micron-submillimeter) functional material
Make.Nowadays the research of nano material is always a research hotspot, and dimension and the size of material also contribute to the performance of material, institute
With this for the smaller material of these sizes, for normal size is heterogeneous or stray crystal sample, we are more desirable to by reducing light
Spot is to complete microcell scanning probe.In certain characterization methods (such as Angle-resolved Photoemission), the size of hot spot is not
Sample can be more than, not so can cover other non-experiment materials, lead to that measured experimental result is there are deviation or there are larger
Impurity signal.
Since synchrotron radiation light beam line optical path length is limited, in order to keep higher luminous flux, by a certain number of
Total reflection mirror/grating focuses, and there are critical focus for light beam line itself.
For the X-ray wave band of synchrotron radiation light source, in order to further reduce spot size, generally can by K-B mirrors or
Person's zone plate carries out the focusing of hot spot, such as the micro- focal line station (BL15U1) of hard X ray of shanghai light source, sample in nearly sample spot
The minimum light spot (FWHM) at place is less than 2 × 2 μm under the focusing of K-B mirrors2, 0.2 × 0.2 μ is less than in the case where zone plate focuses
m2.But since K-B mirrors and zone plate cost are very high, operation is complex, and equipment itself excessively close to sample spot, limits sample
Product migration area cannot achieve adjusting, and not applicable and near-infrared-vacuum ultraviolet wave band hot spot in addition, focus point is fixed
It focuses.
We devise it is a kind of for vacuum environment it is infrared-device that is focused of vacuum ultraviolet wave band hot spot, can be to reality
The nearly sample spot emergent light spot in line station is tested to further reduce.For the present situation that current synchrotron radiation light source hot spot is larger, a kind of energy letter
Single easy device for changing light source spot size seems very valuable.The device both can be applicable to synchrotron radiation vacuum
Ultraviolet band light source can also apply to the wave band hot spot focusing of common off-line equipment, therefore, for sub-mm size sample
Research is of great significance.
Invention content
The invention solves technical problems to be：Overcome the limitation and deficiency of the prior art, providing one kind can change true
The focusing device of light source spot size when Altitude measures.The device can be used cooperatively with various samples characterization test instrument,
By simple and practicable operation, vacuum ultraviolet wave band spot size can be reduced under conditions of significantly not extending light beam line, into
And carry out the light excite-probe experiment of submillimeter sample.
The technical solution adopted by the present invention is：A kind of broadband hot spot focusing device suitable for ultra-high vacuum environment, should
Device is combined by the bevel gear of vacuum cavity, adjustable focal length and focus module forms, the bevel gear combination of adjustable focal length
Including snap ring, round bar, three fixed links, movable block, threaded rod, the first angular wheel, the second angular wheel, knob and carrying
Focus module and switch module are fixed on the i.e. original light path in middle by block with three fixed links and movable block combination, mobile
Block periphery is integrated between threaded rod and movable block by being welded to connect there are two round bar and a threaded rod, and also with the
One angular wheel is connected through a screw thread.By turn knob, the second angular wheel and the first angular wheel are rotated, to rotate spiral shell
Rasp bar makes movable block realize and is moved forward and backward, i.e., focus module can also realize anterior-posterior translation；Focus module includes buckle, the first spiral shell
Hole, the first circular groove, circular hole, circular cone cavity, the second screw hole, carrier block, the second circular groove and third screw hole, in carrier block
Between the first circular groove and the second circular groove contribute to place the lens of focal beam spot, using screw etc. by the first spiral shell
Hole, the second screw hole and third screw hole are fixed, and can be fixed lens by circular cone cavity and carrier block, circular cone cavity top opens one
A circular hole, buckle is for focus module into fixation after light path.The carrier block of focus module is connected through the hinge and carries
Block is linked together, and focus module can be achieved with relatively rotating, and the manipulator in cavity is used so that buckle is tightly fixed with snap ring.
Wherein, circular cone cavity and carrier block realize the fixation of lens jointly, for the lens of different-thickness, by screw into
Row is adjusted；Circular cone cavity top opens a sizeable circular hole, functions as diaphragm, is used for the size of limited spot；
Manipulator in cavity so that buckle is tightly fixed with snap ring, even if realizing that the function of "ON" is focused with hot spot, need not make
Used time opens snap ring by manipulator, and focus module will turn to the underface of off-beams line position, realize the work(of "Off"
It can be focused without using hot spot.
Wherein, focus module and switch module are fixed on centre (the i.e. original of vacuum cavity by three fixed links and movable block
Have light path), ensure the focusing that can carry out hot spot to light beam line when using focusing function；The cavity of round bar one side and outside
It is fixed, ensure that focus module is in the position of middle always, on the other hand due to round bar and movable block be not it is fixed i.e.
It can relatively move, ensure that movable block movement is the position for being always positioned at middle.
The principle of the present invention is：Present invention is mainly used for being focused to millimeter hot spot under vacuum condition, for small
The research of sample sizes provides the scheme of simple possible, the device by the bevel gear of vacuum cavity, adjustable focal length combine with
And focus module composition.The device is applicable in for testing light source used, is connected in the light path of experiment by vacuum cavity,
One is formed with experimental provision, is verified by experiments, vacuum can reach 10-10Mbar magnitudes.It is logical that the device essentially consists in focus module
It crosses convex lens and diaphragm is focused light beam line, and water translation is combined by bevel gear and moves focus module, to different waves
Long light is focused.It is this can hot spot focus and adjust focal position mechanical structure, can be to the light of different wave length
Hot spot diminution is carried out, an easily solution party is provided with the variation of energy to measure some small sample physical properties
Case.And when needing to there is the light of strong absorption bands (λ ＜ 120nm) to be tested using condenser lens material, it need not destroy
Under vacuum condition, buckle is opened by the manipulator in vacuum cavity, focus module is removed into light path, does not interfere with original light
The luminous flux in source, the structure also avoid the tedious work of dismounting focusing device.
The present invention is with the advantages of prior art：
1) present invention design is simple, cost is relatively low.
2) present invention can effectively reduce and may be implemented in 1000nm-120nm wave-length coverages on the basis of not increasing light path
Spot size, this for research small sample material physical property have unique advantage.
3) focus module is moved away from original light path by ease of Use in vacuum environment in the present invention, does not limit original light source
Wave-length coverage.
Description of the drawings
Fig. 1 is the signal of focus module a kind of broadband hot spot focusing device suitable for ultra-high vacuum environment of the invention
Figure, Fig. 1 (a) they are focus module structure chart, and Fig. 1 (b) is focus module sectional view, wherein 11 be buckle, and 12 be the first screw hole,
13 be the first circular groove, and 14 be circular hole, and 15 be circular cone cavity, and 16 be the second screw hole, and 17 be carrier block, and 18 is round recessed for second
Slot, 19 be third screw hole.
Fig. 2 is angular wheel combination of the present invention and focus module assembling schematic diagram, wherein 11 be buckle, and 17 be carrier block,
21 be snap ring, and 22 be round bar, and 23 be three fixed links, and 24 be movable block, and 25 be threaded rod, and 26 be the first angular wheel, and 27 are
Second angular wheel, 28 be knob, and 29 be carrier block.
Fig. 3 is the focusing device sectional view of present invention light source spot size when vacuum environment measures, wherein 25 be screw thread
Bar, 31 be flange-interface, and 32 be fixed plate, and 33 be steel ball pulley interface.
Fig. 4 is the light channel structure figure of the focus module of the present invention, wherein 41 be the first convex lens, and 42 be diaphragm, and 43 be the
Two convex lenses, 44 be sample.
Specific implementation mode
In the following description, for illustrative purposes, some details are proposed to provide complete understanding of the present invention.So
And it would be apparent to those skilled in the art that some or all feature using the present invention can implement the present invention,
The present invention can also be implemented by not needing certain specific details.In other cases, show in block diagram form well known structure and
Equipment is to prevent the basic principle of the obscure present invention.
It should be appreciated that Fig. 1 to Fig. 3 is only schematical and can be not drawn to scale.
The present invention devises one kind and can be effectively focused under vacuum conditions to light source spot size and can be with
The device that laboratory apparatus combines as a whole, below in conjunction with the accompanying drawings, specific implementation mode of the invention are explained in detail：
Fig. 1 is the schematic diagram and sectional view of focus module in the present invention.13 He of the first circular groove among carrier block 17
Second circular groove 18 contributes to place the lens of focal beam spot, using screw etc. by the first screw hole 12,16 and of the second screw hole
Third screw hole 19 is fixed, and can be fixed lens by circular cone cavity 15 and carrier block 17, for the lens of different-thickness, be passed through
Screw is adjusted.Circular cone cavity top opens a sizeable circular hole 14, functions as diaphragm, further limits light
The size of spot.Buckle 11 is for focus module into fixation after light path.
Fig. 2 is angular wheel combination of the present invention and focus module assembling schematic diagram.The carrier block 17 of focus module passes through hinge
Chain link is linked together with carrier block 29, and focus module can be achieved with relatively rotating, and the manipulator in cavity is used to buckle
11 is tightly fixed with snap ring 21, realizes the function of "ON" (even if being focused with hot spot), is not needing in use, being beaten by manipulator
Snap ring is opened, focus module will turn to the underface of off-beams line position, realize "Off" (not using hot spot to focus)
Function.Focus module and switch module are fixed on middle (i.e. original light with three fixed links 23 and the combination of movable block 24
Road), ensure the focusing that can carry out hot spot to light beam line when using focusing function.There are two round bars 22 and one for movable block periphery
A threaded rod 25 is integrated between threaded rod 25 and movable block by being welded to connect, and is also passed through with the first angular wheel 26
It is threadedly coupled.22 one side of round bar and the cavity of outside are fixed, and ensure that focus module is in the position of middle, another party always
Face ensures that the movement of movable block 24 is to be always positioned at just since round bar 22 and movable block are not fixed (can relatively move)
Intermediate position.By turn knob 28, the second angular wheel 27 and the first angular wheel 26 are rotated, to rotate threaded rod,
Make movable block 24 realize to be moved forward and backward, i.e., focus module can also realize anterior-posterior translation.So we can be with turn knob 28, just
It can easily realize that the intersection point different-energy light beam line is moved on test specimen.
Fig. 3 is the focusing device sectional view of present invention light source spot size when vacuum environment measures.The two of outside cavity
A flange-interface 31, it is convenient to be connect with laboratory apparatus, while can guarantee that whole device is in the environment of ultrahigh vacuum.Both ends chamber
The fixed plate 32 of body mainly fixes round bar 22, while the steel ball pulley interface 33 in fixed plate 32 is connected with threaded rod 25,
Enable threaded rod normal rotation.
Fig. 4 is the light channel structure figure of the focus module of the present invention, including the first convex lens 41, diaphragm 42, the second convex lens
43, sample 44.The light source of vacuum ultraviolet-near-infrared is converged by the light of the first convex lens 41 and is made by the first convex lens 41
With light source capable of being realized to, preliminary hot spot focuses, then by the size of 42 further limited spot of diaphragm, last light source is the
Spot size is realized under the convergence effect of two convex lenses 43 and is reduced.First lens and the second lens can be according to specific light source waves
Long feature or experiment demand choose halide or the customization of oxide optical crystal, in vacuum ultraviolet wave band, can generally choose fluorine
Change calcium crystal.
The focusing device that we design (such as ultrahigh vacuum) can both be focused light beam line under particular circumstances,
Refocusing can also be realized to the light of different wave length, while when focusing device need not be used, simple operations can also be passed through
Focus module is removed into light path, original light source is not interfered with and uses, provided more to the experimental study of small sample
It is convenient.
What the present invention did not elaborated partly belongs to techniques known.
Although the illustrative specific implementation mode of the present invention is described above, in order to the technology people of technical field
Member understands the present invention, it should be apparent that the present invention is not limited to the range of specific implementation mode, to the ordinary skill of the art
For personnel, as long as the spirit and scope of the present invention that various change is limited and determined in the attached claims, these variations
It is it is clear that should all cover in scope of the presently claimed invention.
Claims (3)
1. a kind of broadband hot spot focusing device suitable for ultra-high vacuum environment, it is characterised in that：The device by vacuum cavity,
The bevel gear of adjustable focal length combines and focus module composition, wherein the bevel gear combination of adjustable focal length includes snap ring
(21), round bar (22), three fixed links (23), movable block (24), threaded rod (25), the first angular wheel (26), the second taper
Gear (27), knob (28) and carrier block (29), with three fixed links (23) and movable block (24) combination by focus module and
Switch module is fixed on middle, and movable block periphery is there are two round bar (22) and a threaded rod (25), threaded rod (25) and shifting
It is integrated by being welded to connect between motion block, and is also connected through a screw thread with the first angular wheel (26)；Pass through turn knob
(28), the second angular wheel of rotation (27) and the first angular wheel (26), to rotate threaded rod, before so that movable block (24) is realized
After move, realize focus module anterior-posterior translation, adjust different wavelengths of light focal position；
Focus module includes buckling (11), the first screw hole (12), the first circular groove (13), circular hole (14), circular cone cavity (15),
Second screw hole (16), carrier block (17), the second circular groove (18) and third screw hole (19), the first intermediate circle of carrier block (17)
Connected in star (13) and the second circular groove (18) contribute to place the lens of focal beam spot, using screw etc. by the first screw hole
(12), the second screw hole (16) and third screw hole (19) are fixed, can be consolidated lens by circular cone cavity (15) and carrier block (17)
Fixed, circular cone cavity top opens a circular hole (14), and buckle (11) is for focus module into the fixation after light path；Focus module
Carrier block (17) be connected through the hinge and be linked together with carrier block (29), focus module can be achieved with relatively rotating, and use chamber
Internal manipulator so that buckle (11) fixes with snap ring (21).
2. the broadband hot spot focusing device according to claim 1 suitable for ultra-high vacuum environment, it is characterised in that：Circle
Cone cavity (15) and carrier block (17) realize that the lens of different-thickness are adjusted by screw for the fixation of lens jointly；
Circular cone cavity top opens a sizeable circular hole (14), functions as diaphragm, is used for the size of limited spot；Cavity
Interior manipulator so that buckle (11) tightly fixes with snap ring (21), even if realizing that the function of "ON" is focused with hot spot, is being not required to
It wants in use, opening snap ring by manipulator, focus module will turn to the underface of off-beams line position, realize "Off"
Function i.e. without using hot spot focus.
3. the broadband hot spot focusing device according to claim 1 suitable for ultra-high vacuum environment, it is characterised in that：Three
Focus module and switch module are fixed on the i.e. original light path in centre of vacuum cavity by root fixed link (23) and movable block (24), are protected
Light beam line can be carried out when using focusing function the focusing of hot spot by demonstrate,proving；Round bar (22) is on the one hand fixed with the cavity of outside,
Ensure that focus module is in the position of middle always, on the other hand due to round bar (22) and movable block be not it is fixed can
Enough relative movements ensure that movable block (24) movement is to be always positioned at middle position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810741536.7A CN108627943A (en) | 2018-07-06 | 2018-07-06 | A kind of broadband hot spot focusing device suitable for ultra-high vacuum environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810741536.7A CN108627943A (en) | 2018-07-06 | 2018-07-06 | A kind of broadband hot spot focusing device suitable for ultra-high vacuum environment |
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| Publication Number | Publication Date |
|---|---|
| CN108627943A true CN108627943A (en) | 2018-10-09 |
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| CN201810741536.7A Pending CN108627943A (en) | 2018-07-06 | 2018-07-06 | A kind of broadband hot spot focusing device suitable for ultra-high vacuum environment |
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Citations (7)
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| JPH06201966A (en) * | 1992-12-28 | 1994-07-22 | Minolta Camera Co Ltd | Flare preventing mechanism for zoom lens barrel |
| US6526089B1 (en) * | 1999-09-29 | 2003-02-25 | Sunx Limited | Laser marker and method of light spot adjustment therefor |
| US20050286250A1 (en) * | 2002-09-09 | 2005-12-29 | Tsunemichi Tanaka | Spotlight |
| CN204474762U (en) * | 2015-02-03 | 2015-07-15 | 湖南大学 | A kind of laser processing reflect focalization mirror hot spot setting device |
| CN204681480U (en) * | 2015-06-11 | 2015-09-30 | 山东省科学院海洋仪器仪表研究所 | A kind of video imaging apparatus focal length adjustment device |
| CN107024760A (en) * | 2017-04-21 | 2017-08-08 | 清华大学 | A kind of transmission-type light splitting focusing system for VUV LASER |
| CN208953760U (en) * | 2018-07-06 | 2019-06-07 | 中国科学技术大学 | A kind of broadband hot spot focusing device suitable for ultra-high vacuum environment |
-
2018
- 2018-07-06 CN CN201810741536.7A patent/CN108627943A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06201966A (en) * | 1992-12-28 | 1994-07-22 | Minolta Camera Co Ltd | Flare preventing mechanism for zoom lens barrel |
| US6526089B1 (en) * | 1999-09-29 | 2003-02-25 | Sunx Limited | Laser marker and method of light spot adjustment therefor |
| US20050286250A1 (en) * | 2002-09-09 | 2005-12-29 | Tsunemichi Tanaka | Spotlight |
| CN204474762U (en) * | 2015-02-03 | 2015-07-15 | 湖南大学 | A kind of laser processing reflect focalization mirror hot spot setting device |
| CN204681480U (en) * | 2015-06-11 | 2015-09-30 | 山东省科学院海洋仪器仪表研究所 | A kind of video imaging apparatus focal length adjustment device |
| CN107024760A (en) * | 2017-04-21 | 2017-08-08 | 清华大学 | A kind of transmission-type light splitting focusing system for VUV LASER |
| CN208953760U (en) * | 2018-07-06 | 2019-06-07 | 中国科学技术大学 | A kind of broadband hot spot focusing device suitable for ultra-high vacuum environment |
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