CN108620813A - Target blankss and its processing method - Google Patents
Target blankss and its processing method Download PDFInfo
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- CN108620813A CN108620813A CN201710159600.6A CN201710159600A CN108620813A CN 108620813 A CN108620813 A CN 108620813A CN 201710159600 A CN201710159600 A CN 201710159600A CN 108620813 A CN108620813 A CN 108620813A
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- target blankss
- target
- welding surface
- flat thread
- blankss
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
Abstract
A kind of target blankss of present invention offer and its processing method, processing method include：Target blankss are provided, target blankss have sputter face and the welding surface opposite with sputter face；Welding surface is machined, forms flat thread on welding surface, the tooth form of flat thread is triangle.The present invention is machined the welding surface of target blankss, and the tooth form that flat thread and flat thread are formed on welding surface is triangle；On the one hand, by flat thread, the roughness, the uniformity and adhesive force of welding surface can be increased, on the other hand, the tooth form of flat thread is triangle can be such that flat thread is embedded in backboard when being welded target blankss and backboard；Therefore in conjunction with two above aspect, when welding target blankss and backboard to form target material assembly, the problem of making the weld strength between target blankss and backboard be improved, effectivelying prevent that failure welding or desoldering occur between target blankss and backboard, to improve the performance of formed target material assembly.
Description
Technical field
The present invention relates to field of semiconductor manufacture more particularly to a kind of target blankss and its processing method.
Background technology
Sputtering technology is one of conventional process of field of semiconductor manufacture, with growing, the sputtering target of sputtering technology
Material plays increasingly important role in sputtering technology, the quality of sputtering target material directly influenced after sputtering at film quality
Amount.
In sputtering target material manufacturing field, target material assembly is by meeting the target blankss of sputtering performance, with target blankss by welding phase
In conjunction with backboard constitute.In sputtering process, the working environment residing for target material assembly is more severe.Such as：The back of the body of target material assembly
Plate side is cold by force by the cooling water of certain pressure, and target blankss side is then under vacuum environment, therefore in target material assembly
Opposite sides form huge pressure difference；Furthermore target blankss side is bombarded by various particles in high voltage electric field and high-intensity magnetic field,
There is amount of heat generation.Under such rugged environment, in order to ensure the stability of film quality and the quality of target material assembly,
The requirement of quality and solder bond rate to target blankss and backboard is higher and higher, is otherwise easy to cause the target material assembly heated
Under the conditions of deform, problems of crack, to influence quality of forming film, or even sputtering base is caused to damage.
But the performance of prior art target material assembly is to be improved.
Invention content
Problems solved by the invention is to provide a kind of target blankss and its processing method, improves the performance of target material assembly.
To solve the above problems, the present invention provides a kind of processing method of target blankss, including：Target blankss, the target blankss tool are provided
There are sputter face and the welding surface opposite with the sputter face；The welding surface is machined, on the welding surface
Flat thread is formed, the tooth form of the flat thread is triangle.
Optionally, the thread form angle of the flat thread is 50 degree to 70 degree.
Optionally, the screw pitch of the flat thread is 0.6 millimeter to 0.8 millimeter.
Optionally, a height of 0.51 millimeter to 0.71 millimeter of the spiral shell of the flat thread.
Optionally, the technique of the mechanical processing is turnery processing；The step of being machined to the welding surface is wrapped
It includes：Threaded blade is provided；Rough turn processing is carried out to the welding surface using the threaded blade；The welding surface is carried out rough turn
After processing, finishing processing is carried out to the welding surface using the threaded blade.
Optionally, the shape of the target blankss is cylinder；In the step of being machined to the welding surface, the spiral shell
Line blade is radially moved using the welding surface center of circle as starting point.
Optionally, the thread form angle of the flat thread is 60 degree；The threaded blade is 60 degree of threaded blades.
Optionally, the number of the rough turn processing is 5 times, and the parameter of the rough turn processing includes：Bite is 0.09 milli
For rice to 0.11 millimeter, target blankss rotating speed is 190 revs/min to 210 revs/min.
Optionally, the number of the finishing processing is 1 time, and the parameter of the finishing processing includes：Bite is 0.009 milli
For rice to 0.011 millimeter, target blankss rotating speed is 190 revs/min to 210 revs/min.
Optionally, the material of the target blankss is rafifinal, and the content of aluminium is 99.9% to 99.999% in rafifinal.
Correspondingly, the present invention provides a kind of target blankss, including：Sputter face；The welding surface opposite with the sputter face, the weldering
There is flat thread, the tooth form of the flat thread is triangle in junction.
Optionally, the thread form angle of the flat thread is 50 degree to 70 degree.
Optionally, the screw pitch of the flat thread is 0.6 millimeter to 0.8 millimeter.
Optionally, a height of 0.51 millimeter to 0.71 millimeter of the spiral shell of the flat thread.
Optionally, the material of the target blankss is rafifinal, and the content of aluminium is 99.9% to 99.999% in rafifinal.
Compared with prior art, technical scheme of the present invention has the following advantages：
The present invention is machined the welding surface of the target blankss, and flat thread is formed on the welding surface, described
The tooth form of flat thread is triangle；In the manufacture of target material assembly, on the one hand, by the flat thread, institute can be improved
The roughness, the uniformity and adhesive force of welding surface are stated, on the other hand, the tooth form of the flat thread is triangle, by institute
When stating target blankss and backboard and being welded, the flat thread can be made to be embedded in the backboard；Therefore two above side is combined
Face makes the welding between the target blankss and the backboard when welding the target blankss and backboard to form target material assembly
Intensity is improved, the problem of effectivelying prevent that failure welding or desoldering occur between the target blankss and backboard, the shape to improve
At the performance of target material assembly.
The present invention provides a kind of target blankss, and the target blankss include welding surface, has flat thread on the welding surface, described flat
The tooth form of face screw thread is triangle；In the manufacture of target material assembly, on the one hand, by the flat thread, make the welding surface
Roughness, the uniformity and adhesive force can be improved, on the other hand, the tooth form of the flat thread is triangle,
When the target blankss and backboard are welded, the flat thread can be made to be embedded in the backboard；Therefore above two are combined
A aspect can improve the target blankss and the backboard when welding the target blankss and backboard to form target material assembly
Between weld strength, effectively prevent failure welding occurs between the target blankss and backboard or the problem of desoldering, to improve
Form the performance of target material assembly.
Description of the drawings
Fig. 1 is the flow diagram of one embodiment of processing method of target blankss of the present invention；
Fig. 2 is the vertical view of target blankss in step S1 in Fig. 1；
Fig. 3 is cross-sectional views of the Fig. 2 along AA1 secants；
Fig. 4 is the vertical view of target blankss after forming flat thread in Fig. 1 in step S2；
Fig. 5 is cross-sectional views of the Fig. 4 along BB1 secants；
Fig. 6 is the partial enlarged view of region C in Fig. 5.
Specific implementation mode
By background technology it is found that the performance of target material assembly is to be improved.Its reason is analyzed to be：
The welding of rafifinal target and A6061 aluminium backboards at present mainly uses heat and other static pressuring processes.Specifically, target is provided
Base, the target blankss have the first welding surface and first back side opposite with the welding surface；Backboard, the backboard tool are provided
There are the second welding surface and second back side opposite with second welding surface；By first welding surface and the second welding surface
It is oppositely arranged and is bonded, form initial target material assembly；The pre-heat treatment is carried out to the initial target；After the pre-heat treatment, use
4000 tons or more of hydraulic press squeezes first back side and second back side, and the first welding surface of the target is made to be embedded in
To the second welding surface of the backboard, target material assembly is formed.
But usually first welding surface is plane, therefore in the welding process, it is susceptible to the target blankss and backboard
Welding procedure stability difference and weld strength deficiency problem, formed target material assembly after, between the target blankss and backboard be easy
Gap is generated, or even the problem of desoldering occurs, so as to cause the decline of the target blankss and backboard solder bond rate, and then to described
The performance and used life of target material assembly generates harmful effect.
To solve the above-mentioned problems, the present invention provides a kind of processing method of target blankss, including：Target blankss, the target blankss are provided
With sputter face and the welding surface opposite with the sputter face；The welding surface is machined, in the welding surface
The tooth form of upper formation flat thread, the flat thread is triangle.
The present invention is machined the welding surface of the target blankss, and flat thread is formed on the welding surface, described
The tooth form of flat thread is triangle；In the manufacture of target material assembly, on the one hand, by the flat thread, institute can be improved
The roughness, the uniformity and adhesive force of welding surface are stated, on the other hand, the tooth form of the flat thread is triangle, by institute
When stating target blankss and backboard and being welded, the flat thread can be made to be embedded in the backboard；Therefore two above side is combined
Face makes the welding between the target blankss and the backboard when welding the target blankss and backboard to form target material assembly
Intensity is improved, the problem of effectivelying prevent that failure welding or desoldering occur between the target blankss and backboard, the shape to improve
At the performance of target material assembly.
To make the above purposes, features and advantages of the invention more obvious and understandable, below in conjunction with the accompanying drawings to the present invention
Specific embodiment be described in detail.
With reference to figure 1, Fig. 1 shows the flow diagram of one embodiment of processing method of target blankss of the present invention.The present embodiment target
The processing method of base includes following basic step：
Step S1：Target blankss are provided, the target blankss have sputter face and the welding surface opposite with the sputter face；
Step S2：The welding surface is machined, forms flat thread, the plane spiral shell on the welding surface
The tooth form of line is triangle.
Specific embodiments of the present invention are described further below in conjunction with attached drawing.
With reference to figure 1, in conjunction with referring to figs. 2 and 3, Fig. 2 is the vertical view of target blankss in step S1 in Fig. 1, and Fig. 3 Fig. 2 is cut along AA1
The cross-sectional view of line, the dotted line in Fig. 3 indicate the Axisymmetric Distributed Line of the cross-sectional view, execute step S1, carry
For target blankss 100, the target blankss 100 have sputter face 130 and the welding surface 110 opposite with the sputter face 130.
In sputtering target material manufacturing field, the target blankss 100 and backboard phase solder bond form target material assembly, wherein institute
State combination of the target blankss 100 by the welding surface 110 realization and backboard.During the use of the target material assembly, shape is ionized
At argon ion accelerate under the action of electric field, sputter face 130 described in the argon ion bombardment of acceleration forms a large amount of target atoms, splashes
The a large amount of target atoms projected, which are deposited on substrate, forms metallic film.
The shape of the target blankss 100 can be required according to application environment and sputtering in cylinder, cuboid, annular solid, circle
Cone or any other regular shape or irregular shape.In the present embodiment, the shape of the target blankss 100 is cylinder,
With regard to saying, along being parallel on the direction on 100 surface of the target blankss, the cross-sectional shape of the target blankss 100 is circle.
Since the sputtering technology environment temperature residing for target material assembly is higher, in order to ensure the stabilization of target material assembly sputtering performance
Property, the material of fusing point is high, electrical and thermal conductivity is strong material as the target blankss 100 need to be selected.In the present embodiment, the target blankss
100 material is rafifinal, wherein the content of aluminium is 99.9% to 99.999% in rafifinal.
In sputtering target material manufacturing field, rafifinal target blankss 100 are usually welded with material for the backboard of 6061 aluminium alloys
Binding is closed.Wherein, 6061 aluminium alloys refer to doped with elements such as magnesium, silicon and form Mg2The aluminium alloy of Si phases；The aluminium alloy
It can also be doped with copper or Zn-ef ficiency, to improve the intensity of the aluminium alloy.
It continues to refer to figure 1, in conjunction with reference to fig. 4 to fig. 6, Fig. 4 is that target blankss are bowed after forming flat thread in Fig. 1 in step S2
View, Fig. 5 are cross-sectional views of the Fig. 4 along BB1 secants, and Fig. 6 is the partial enlarged view of region C in Fig. 5, in Fig. 5 and Fig. 6
Dotted line indicate the Axisymmetric Distributed Line of the cross-sectional view, execute step S2, to the welding surface 110 carry out machinery plus
Work forms flat thread 120 on the welding surface 110, and the tooth form of the flat thread 120 is triangle.
On the one hand, by forming the flat thread 120 on the welding surface 110, the welding surface 110 can be increased
Roughness, the uniformity and adhesive force, on the other hand, the tooth form of the flat thread 120 is triangle, by the target blankss
100 with backboard welded when, the flat thread 120 can be made to be embedded in the backboard；Therefore two above side is combined
Face can improve the target blankss 100 and the back of the body when welding the target blankss 100 and backboard to form target material assembly
Weld strength between plate, the problem of effectivelying prevent that failure welding or desoldering occur between the target blankss 100 and backboard, to carry
The performance of high formed target material assembly.
The tooth form of the flat thread 120 is triangle, that is to say, that is added by carrying out machinery to the welding surface 110
Work forms lobe on the welding surface 110, and the lobe is along the radial cross-sectional shape perpendicular to 110 direction of the welding surface
Groove 125 is surrounded for the two neighboring side wall of triangle, and adjacent lobe, the groove 125 is along perpendicular to the welding surface 110
The radial cross-sectional shape in direction is triangle.
It should be noted that the die mould angle α (as shown in Figure 6) of the flat thread 120 is unsuitable too small, also should not be too large.
If the thread form angle α is too small, be easily reduced the mechanical strength of the flat thread 120, by the target blankss 100 and backboard into
When row welding, the flat thread 120 is easy to happen fracture；If the thread form angle α is excessive, it is easy to increase the flat thread
120 are embedded in the difficulty in the backboard, to be easy to cause the weld strength improved between the target blankss 100 and the backboard
Effect unobvious.For this purpose, in the present embodiment, the thread form angle α of the flat thread 120 is 50 degree to 70 degree.It is specific at one
In embodiment, the thread form angle α of the flat thread 120 is 60 degree.Wherein, the thread form angle α refers to two of the lobe
Angle between side wall.
It should also be noted that, the high H of spiral shell (as shown in Figure 6) of the flat thread 120 is unsuitable too small, also should not be too large.
If the high H of the spiral shell of the flat thread 120 is too small, it is strong to be easy to cause the welding improved between the target blankss 100 and the backboard
The effect unobvious of degree；If the high H of the spiral shell of the flat thread 120 is excessive, that is to say, that after forming target material assembly, the target
The height that base 100 protrudes from the backboard is too small, to be easily reduced the quality and performance of the target blankss 100.For this purpose, this implementation
In example, the high H of spiral shell of the flat thread 120 is 0.51 millimeter to 0.71 millimeter, that is to say, that the depth of the groove 125 is
0.51 millimeter to 0.71 millimeter.
It influences each other between the high H of thread form angle α, spiral shell and pitch P (as shown in Figure 6) of the flat thread 120.The present embodiment
In, the pitch P of the high H of thread form angle α and spiral shell based on the flat thread 120, the flat thread 120 are 0.6 millimeter to 0.8 milli
Rice, that is to say, that the opening size of the groove 125 is 0.6 millimeter to 0.8 millimeter.
In the present embodiment, the technique of the mechanical processing is turnery processing.In practical applications, the turnery processing can be with
It is divided into multiple processes to complete.Specifically, the step of being machined to the welding surface 110 include：Threaded blade is provided
(not shown)；Rough turn processing is carried out to the welding surface 110 using the threaded blade；The welding surface 110 is carried out rough turn
After processing, finishing processing is carried out to the welding surface 110 using the threaded blade.
In the present embodiment, turnery processing is carried out to the welding surface 110 using turning machine, the threaded blade is set to
On the turning machine, and the target blankss 100 are fixed on the turning machine.
Specifically, in the step of carrying out turnery processing to the welding surface 110, the threaded blade is with the welding surface
110 centers of circle are radially moved for starting point, meanwhile, the turning machine controls the target blankss 100 to be justified along the welding surface 110
Axis at heart position is rotated, and the flat thread 120 is cut out to get on the bus in the welding surface 110.
In the present embodiment, the threaded blade is 60 degree of threaded blades, to form the flat thread that thread form angle α is 60 degree
120.Wherein, the material of the threaded blade is hard alloy.Since the threaded blade quality of the hard alloy is hard,
Turnery processing is carried out to the welding surface 110 using the threaded blade, it is neat so as to be formed on the welding surface 110
Flat thread 120, and it is smaller to the damage of the welding surface 110.
Specifically, the rough turn processing is for removing 100 material of a large amount of target blankss, to form initial plane screw thread (figure
Do not show), provide Process ba- sis to be subsequently formed the flat thread 120.
In order to while improving processing efficiency, improve the surface quality of the initial plane screw thread, reduce the target blankss
100 cutting force being subject to increase the rough turn processing in the step of carrying out the rough turn processing to the welding surface 110
Number makes the bite of each knife accordingly reduce.In the present embodiment, the number of the rough turn processing is 5 times.
In the step of carrying out rough turn processing to the welding surface 110, the rotating speed of the target blankss 100 is unsuitable too small, also unsuitable
It is excessive.If the rotating speed of the target blankss 100 is too small, the problem of accordingly process time being caused to waste；If the target blankss 100
Rotating speed is big, is easy to cause the target blankss 100 and collapses angle during the rough turn processing, is also easy to increase described initial flat
The surface spikes of face screw thread, to reduce the quality of follow-up flat thread 120.For this purpose, in the present embodiment, the target blankss 100
Rotating speed is 190 revs/min to 210 revs/min.
The bite of the rough turn processing is unsuitable too small, also should not be too large.On the one hand, since the bite influences simultaneously
The spiral shell height and screw pitch of the initial plane screw thread, the bite of the rough turn processing is bigger, then the spiral shell of the initial plane screw thread
High and screw pitch is bigger, correspondingly, the high H of spiral shell of follow-up formed flat thread 120 and pitch P are also bigger, on the other hand, if institute
The bite for stating rough turn processing is too small, and it is long to be easy to cause the process time；If the bite of the rough turn processing is excessive, described
The smooth surface glossiness of initial plane screw thread is poor, and the surface of the initial plane screw thread is susceptible to burr, and the target blankss 100
It is easy to happen and collapses angle, correspondingly, the quality of follow-up formed flat thread 120 is caused to decline.Therefore, in order to ensure follow-up institute's shape
Meeting process requirements at the quality and size of flat thread 120, the bite of the rough turn processing need to control in the reasonable scope,
And the number of the rotating speed and the rough turn processing of the bite and the target blankss 100 cooperates.It is described in the present embodiment
The bite of rough turn processing is 0.09 millimeter to 0.11 millimeter.
In the present embodiment, turnery processing is carried out to the welding surface 110 using turning machine, the step of the rough turn processing
It can be by carrying out instruction programming realization to the turning machine.
It should be noted that in the present embodiment, during carrying out the rough turn processing to the welding surface 110, use
Cutting fluid is to play cooling and lubricant effect.
In the present embodiment, using 3380 emulsifiers as the cutting fluid, the volume ratio of the emulsifier and water is 1:20.
3380 emulsifiers are water-soluble metalworking liquid, and 3380 emulsifier is sprayed by the subsidiary water pump of lathe to the welding surface 110
On, the bore of the water outlet of the water pump is larger, and pressure is also relatively high, and the emitted dose in the unit interval is bigger, therefore institute
Preferable cooling and lubricant effect can be played by stating 3380 emulsifiers, so as to avoid during the rough turn processing,
Cause the initial plane screw thread to generate scratch because lubricating action is bad and causes rough turn process because cooling effect is bad
In have little time heat dissipation the problem of.
In the present embodiment, subsequent step is also needed to the progress finishing processing of the welding surface 110 to form flat thread 120,
It is described after completing the 5 rough turn processing in order to make the size of the flat thread 120 after finishing processing meet process requirements
The screw pitch and spiral shell height of initial plane screw thread reserve allowance, i.e., more than the depth of the groove 125 and the reserved processing of opening size
Amount.Wherein, the allowance refers to：The spiral shell of the screw pitch of the initial plane screw thread and follow-up formed flat thread 120
Away from the difference between P, the difference between the spiral shell height and the high H of spiral shell of follow-up formed flat thread 120 of the initial plane screw thread.
In the present embodiment, the allowance is 0.009 millimeter to 0.011 millimeter.
The finishing processing is used to improve the surface gloss of formed flat thread 120, and removes the target of a small amount of thickness
100 material of base, makes the size of the flat thread 120 meet process requirements.
In the present embodiment, in the step of carrying out finishing processing to the welding surface 110, the rotating speeds of the target blankss 100 is 190
Rev/min to 210 revs/min.
In the present embodiment, according to the allowance after the rough turn processing, the bite of finishing processing described in reasonable set.
Specifically, the bite of the finishing processing is 0.009 millimeter to 0.011 millimeter.
It should be noted that in the present embodiment, during carrying out the finishing processing to the welding surface 110, use
Cutting fluid is to play cooling and lubricant effect.In the present embodiment, using 3380 emulsifiers as the cutting fluid, the emulsifier
Volume ratio with water is 1:20.
In conjunction with reference to figure 1, it is also necessary to which explanation, after forming the flat thread 120, the processing method further includes：
Step S3 is executed, after forming the flat thread 120, ultrasonic cleaning is carried out to the target blankss 100；Execute step S4, ultrasound
After wave cleaning, processing is dried to the target blankss 100.
By the ultrasonic cleaning, to remove the impurity on 120 surface of 100 surface of the target blankss and the flat thread,
Improve the surface cleanliness of the target blankss 100 after processing.
In the present embodiment, processing is dried to the target blankss 100 by the way of air gun drying.When the visual target blankss
When 100 drying, stop the drying process.
The present invention is machined the welding surface 110 of the target blankss 100, and plane is formed on the welding surface 110
The tooth form of screw thread 120, the flat thread 120 is triangle；In the manufacture of target material assembly, on the one hand, pass through the plane
Screw thread 120 can increase the roughness, the uniformity and adhesive force of the welding surface 110, on the other hand, the flat thread
120 tooth form is triangle can be such that the flat thread 120 is embedded in when being welded the target blankss 100 and backboard
In the backboard；Therefore it in conjunction with two above aspect, is being welded by the target blankss 100 and backboard to form target material assembly
When, so that the weld strength between the target blankss 100 and the backboard is improved, effectively prevent the target blankss 100 and backboard it
Between failure welding occurs or the problem of desoldering, to improve the performance of formed target material assembly.
With continued reference to fig. 4 to fig. 6, Fig. 4 is the vertical view of one embodiment of target blankss of the present invention, and Fig. 5 is Fig. 4 along BB1 secants
Cross-sectional view, Fig. 6 are the partial enlarged views of region C in Fig. 5, and the dotted line in Fig. 5 and Fig. 6 indicates that the cross-section structure shows
The Axisymmetric Distributed Line of intention.Correspondingly, the present invention also provides a kind of target blankss.The target blankss include：
Sputter face 130 (as shown in Figure 5)；
The welding surface 110 (as shown in Figure 5) opposite with the sputter face 130 has flat thread on the welding surface 110
The tooth form of 120 (as shown in Figure 5), the flat thread 120 is triangle.
In sputtering target material manufacturing field, the target blankss 100 and backboard phase solder bond form target material assembly, wherein institute
State combination of the target blankss 100 by the welding surface 110 realization and backboard.During the use of the target material assembly, shape is ionized
At argon ion accelerate under the action of electric field, sputter face 130 described in the argon ion bombardment of acceleration forms a large amount of target atoms, splashes
The a large amount of target atoms projected, which are deposited on substrate, forms metallic film.
The shape of the target blankss 100 can be required according to application environment and sputtering in cylinder, cuboid, annular solid, circle
Cone or any other regular shape or irregular shape.In the present embodiment, the shape of the target blankss 100 is cylinder,
With regard to saying, along being parallel on the direction on 100 surface of the target blankss, the cross-sectional shape of the target blankss 100 is circle.
Since the sputtering technology environment temperature residing for target material assembly is higher, in order to ensure the stabilization of target material assembly sputtering performance
Property, the material of fusing point is high, electrical and thermal conductivity is strong material as the target blankss 100 need to be selected.In the present embodiment, the target blankss
100 material is rafifinal, wherein the content of aluminium is 99.9% to 99.999% in rafifinal.
In sputtering target material manufacturing field, rafifinal target blankss 100 are usually welded with material for the backboard of 6061 aluminium alloys
Binding is closed.Wherein, 6061 aluminium alloys refer to doped with elements such as magnesium, silicon and form Mg2The aluminium alloy of Si phases；The aluminium alloy
It can also be doped with copper or Zn-ef ficiency, to improve the intensity of the aluminium alloy.
There is flat thread 120 (as shown in Figure 5), and the tooth form of the flat thread 120 is three on the welding surface 110
It is angular.
On the one hand, the flat thread 120 is used to increase the roughness, the uniformity and adhesive force of the welding surface 110,
On the other hand, the tooth form of the flat thread 120 is triangle can make when being welded the target blankss 100 and backboard
The flat thread 120 is embedded in the backboard；Therefore in conjunction in terms of two above, by the target blankss 100 and backboard into
When row welding is to form target material assembly, the weld strength between the target blankss 100 and the backboard can be improved, institute is effectively prevent
The problem of failure welding or desoldering occur between target blankss 100 and backboard is stated, to improve the performance of formed target material assembly.
The tooth form of the flat thread 120 is triangle, that is to say, that there is lobe on the welding surface 110, it is described prominent
Tooth is triangle along the radial cross-sectional shape perpendicular to 110 direction of the welding surface, and the two neighboring side wall of adjacent lobe encloses
At groove 125, the groove 125 is triangle along the radial cross-sectional shape perpendicular to 110 direction of the welding surface.
It should be noted that the die mould angle α (as shown in Figure 6) of the flat thread 120 is unsuitable too small, also should not be too large.
If the thread form angle α is too small, be easily reduced the mechanical strength of the flat thread 120, by the target blankss 100 and backboard into
When row welding, the flat thread 120 is easy to happen fracture；If the thread form angle α is excessive, it is easy to increase the flat thread
120 are embedded in the difficulty in the backboard, to be easy to cause the weld strength improved between the target blankss 100 and the backboard
Effect unobvious.For this purpose, in the present embodiment, the thread form angle α of the flat thread 120 is 50 degree to 70 degree.It is specific at one
In embodiment, the thread form angle α of the flat thread 120 is 60 degree.Wherein, the thread form angle α refers to two of the lobe
Angle between side wall.
It should also be noted that, the high H of spiral shell (as shown in Figure 6) of the flat thread 120 is unsuitable too small, also should not be too large.
If the high H of the spiral shell of the flat thread 120 is too small, it is strong to be easy to cause the welding improved between the target blankss 100 and the backboard
The effect unobvious of degree；If the high H of the spiral shell of the flat thread 120 is excessive, that is to say, that after forming target material assembly, the target
The height that base 100 protrudes from the backboard is too small, to be easily reduced the quality and performance of the target blankss 100.For this purpose, this implementation
In example, the high H of spiral shell of the flat thread 120 is 0.51 millimeter to 0.71 millimeter, that is to say, that the depth of the groove 125 is
0.51 millimeter to 0.71 millimeter.
It influences each other between the high H of thread form angle α, spiral shell and pitch P (as shown in Figure 6) of the flat thread 120.The present embodiment
In, the pitch P of the high H of thread form angle α and spiral shell based on the flat thread 120, the flat thread 120 are 0.6 millimeter to 0.8 milli
Rice, that is to say, that the opening size of the groove 125 is 0.6 millimeter to 0.8 millimeter.
The present invention provides a kind of target blankss 100, and the target blankss 100 include welding surface 110, are had on the welding surface 110 flat
The tooth form of face screw thread 120, the flat thread 120 is triangle；In the manufacture of target material assembly, on the one hand, by described flat
Face screw thread 120 allows the roughness, the uniformity and adhesive force of the welding surface 110 to be improved, on the other hand, described
The tooth form of flat thread 120 is triangle can make the flat thread when being welded the target blankss 100 and backboard
120 are embedded in the backboard；Therefore it in conjunction with two above aspect, is welded by the target blankss 100 and backboard to be formed
When target material assembly, the weld strength between the target blankss 100 and the backboard can be improved, effectively prevent 100 He of the target blankss
The problem of failure welding or desoldering occur between backboard, to improve the performance of formed target material assembly.
Although of the invention, oneself discloses as above, and present invention is not limited to this.Any those skilled in the art are not departing from
It in the spirit and scope of the present invention, can make various changes or modifications, therefore protection scope of the present invention should be with claim
Subject to limited range.
Claims (15)
1. a kind of processing method of target blankss, which is characterized in that including：
Target blankss are provided, the target blankss have sputter face and the welding surface opposite with the sputter face；
The welding surface is machined, forms flat thread on the welding surface, the tooth form of the flat thread is
Triangle.
2. the processing method of target blankss as described in claim 1, which is characterized in that the thread form angle of the flat thread be 50 degree extremely
70 degree.
3. the processing method of target blankss as described in claim 1, which is characterized in that the screw pitch of the flat thread is 0.6 millimeter
To 0.8 millimeter.
4. the processing method of target blankss as described in claim 1, which is characterized in that a height of 0.51 millimeter of the spiral shell of the flat thread
To 0.71 millimeter.
5. the processing method of target blankss as described in claim 1, which is characterized in that the technique of the mechanical processing adds for turning
Work；
The step of being machined to the welding surface include：Threaded blade is provided；Using the threaded blade to the weldering
Junction carries out rough turn processing；After carrying out rough turn processing to the welding surface, the welding surface is carried out using the threaded blade
Finishing processing.
6. the processing method of target blankss as claimed in claim 5, which is characterized in that the shape of the target blankss is cylinder；To institute
It states in the step of welding surface is machined, the threaded blade is radially moved using the welding surface center of circle as starting point
It is dynamic.
7. the processing method of target blankss as claimed in claim 5, which is characterized in that the thread form angle of the flat thread is 60 degree；
The threaded blade is 60 degree of threaded blades.
8. the processing method of target blankss as claimed in claim 5, which is characterized in that the number of the rough turn processing is 5 times, described
The parameter of rough turn processing includes：Bite is 0.09 millimeter to 0.11 millimeter, and target blankss rotating speed is 190 revs/min to 210 revs/min
Clock.
9. the processing method of target blankss as claimed in claim 5, which is characterized in that the number of the finishing processing is 1 time, described
The parameter of finishing processing includes：Bite be 0.009 millimeter to 0.011 millimeter, target blankss rotating speed be 190 revs/min to 210 turns/
Minute.
10. the processing method of target blankss as described in claim 1, which is characterized in that the material of the target blankss is rafifinal, high-purity
The content of aluminium is 99.9% to 99.999% in aluminium.
11. a kind of target blankss, which is characterized in that including：
Sputter face；
The welding surface opposite with the sputter face has flat thread on the welding surface, and the tooth form of the flat thread is three
It is angular.
12. target blankss as claimed in claim 11, which is characterized in that the thread form angle of the flat thread is 50 degree to 70 degree.
13. target blankss as claimed in claim 11, which is characterized in that the screw pitch of the flat thread is 0.6 millimeter to 0.8 milli
Rice.
14. target blankss as claimed in claim 11, which is characterized in that a height of 0.51 millimeter of the spiral shell of the flat thread to 0.71 milli
Rice.
15. target blankss as claimed in claim 11, which is characterized in that the material of the target blankss is rafifinal, aluminium in rafifinal
Content is 99.9% to 99.999%.
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| CN201710159600.6A CN108620813A (en) | 2017-03-17 | 2017-03-17 | Target blankss and its processing method |
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| CN201710159600.6A CN108620813A (en) | 2017-03-17 | 2017-03-17 | Target blankss and its processing method |
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Family
ID=63686954
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| CN201710159600.6A Pending CN108620813A (en) | 2017-03-17 | 2017-03-17 | Target blankss and its processing method |
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| CN109570931A (en) * | 2018-12-08 | 2019-04-05 | 东曹(上海)电子材料有限公司 | A kind of production method of large scale flat-panel monitor sputtering target material |
| CN113997020A (en) * | 2021-11-10 | 2022-02-01 | 中国航发贵州黎阳航空动力有限公司 | Machining method for reducing roughness of rectifier inner ring |
| CN114434107A (en) * | 2022-02-15 | 2022-05-06 | 株洲火炬安泰新材料有限公司 | Production processing method for improving welding rate of ITO target |
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