CN107552939A - The welding method of target material assembly - Google Patents
The welding method of target material assembly Download PDFInfo
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- CN107552939A CN107552939A CN201610529558.8A CN201610529558A CN107552939A CN 107552939 A CN107552939 A CN 107552939A CN 201610529558 A CN201610529558 A CN 201610529558A CN 107552939 A CN107552939 A CN 107552939A
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Abstract
A kind of welding method of target material assembly, including：There is provided target and backboard, the target has first face of weld, and the backboard has second face of weld；Using turning process after first face of weld or second face of weld form lines, first face of weld and second face of weld are welded together using heat and other static pressuring processes.The welding method of the target material assembly forms lines to increase the roughness of second face of weld by increasing the roughness of first face of weld in first face of weld formation lines, or in second face of weld.And in heat and other static pressuring processes, the lines of first face of weld can be embedded in backboard, or the lines of second face of weld can be embedded in target.Beneficial to the atoms permeating in heat and other static pressuring processes between target and backboard, hence in so that the weld strength of target material assembly is improved.
Description
Technical field
The present invention relates to field of semiconductor manufacture, more particularly to a kind of welding method of target material assembly.
Background technology
In the semiconductor industry, target material assembly needs to meet sputtering performance, and the target material assembly includes target and and target
Material combines and has the backboard of certain bond strength.Backboard is assembled in sputtering base in the target material assembly and plays support work
With, and there is the effect of conduction heat.In magnetron sputtering membrane process, target material assembly be in high voltage electric field and magnetic field intensity compared with
In big magnetic field, target sputters under the ion bombardment effects of high-energy, the neutral atom that goes out from target as sputter or
Molecule deposition forms film on substrate.In whole sputter procedure, the target material assembly is in hot environment, and target
Sputter face is positioned in high vacuum environment, and the back side of backboard needs to be impacted by lasting high-pressure cooling water to improve target group
The heat radiation function of part.It can be seen that in magnetron sputtering technique, there is huge pressure differential in target and backboard both sides.Thus, target and
Bond strength between backboard needs to meet certain requirement, to ensure being smoothed out for magnetron sputtering technique.
At present, the combination between target and backboard is realized by welding.
However, using the welding method of target material assembly in the prior art, the weld strength of target material assembly has much room for improvement.
The content of the invention
The present invention solves the problems, such as to be to provide a kind of welding method of target material assembly, strong to improve the welding of target material assembly
Degree.
To solve the above problems, the present invention provides a kind of welding method of target material assembly, including：Target and backboard are provided,
The target has first face of weld, and the backboard has second face of weld；Using turning process in first face of weld or second face of weld
After forming lines, first face of weld and second face of weld are welded together using heat and other static pressuring processes.
Optionally, the lines is screw thread, and the screw thread is the raised part of first face of weld or second face of weld.
Optionally, the screw thread is multiple tooth forms along the cross sectional shape on radius of fillet direction, and the tooth form is triangle
Shape, rectangle or square.
Optionally, when the tooth form is isosceles triangle, the sidewall bottom of the groove between adjacent tooth form intersects.
Optionally, the height of the tooth form is 0.13mm~0.17mm；The distance between center of adjacent tooth form is
0.19mm~0.25mm.
Optionally, the drift angle of the tooth form is 55 degree~65 degree.
Optionally, the drift angle of the tooth form is 60 degree.
Optionally, the parameter of turning process includes：Cutting speed is 0.02m/min~0.03m/min, and the amount of feeding is
0.02mm/r~0.04mm/r, bite are 0.02mm~0.04mm.
Optionally, the cutter that turning lines uses is screw tool.
Optionally, the screw tool includes several cutting edge portion, and each cutting edge portion has the preceding knife being oppositely arranged
Face and rear knife face and two blade sides between rake face and rear knife face；Described two blade sides are intersecting to be formed
Sword rib；Blade sides intersect with rake face forms side cutting edge；Angle between the cutting edge of side is cutting edge angle.
Optionally, the cutting edge angle is 55 degree~65 degree.
Optionally, the cutting edge angle is 60 degree.
Optionally, before turning is carried out, in addition to：Part sword rib is carried out to wear down processing, forms blade bottom surface, it is described
Intersect respectively with blade sides, remaining sword rib blade bottom surface.
Optionally, the acute angle between the blade bottom surface and remaining sword rib is 30 degree~45 degree.
Optionally, when to the first face of weld turning lines, turning process is from the center of first face of weld to the side of first face of weld
Edge is carried out；When to the second face of weld turning lines, turning process is carried out from the center of second face of weld to the edge of second face of weld.
Optionally, the hardness for the cutter that turning lines uses is in more than HB350.
Optionally, the material of the cutter is tungsten carbide base carbide alloy, titanium carbide base hard alloy or diamond.
Optionally, cutting fluid is used during turning lines；The cutting fluid is emulsifying agent.
Optionally, after first face of weld or the second face of weld turning lines, and heat and other static pressuring processes are used by first face of weld
Before welding together with second face of weld, in addition to：The target and backboard are cleaned using ultrasonic cleaning process.
Optionally, the target is copper target material, aluminium target, titanium target material or tantalum target.
Compared with prior art, technical scheme has advantages below：
The welding method of target material assembly provided by the invention, by forming lines in first face of weld to increase by first face of weld
Roughness, or lines is formed to increase the roughness of second face of weld in second face of weld.And in heat and other static pressuring processes, described
The lines of one face of weld can be embedded in backboard, or the lines of second face of weld can be embedded in target.So as to add the first weldering
Face and the adhesive force of second face of weld, beneficial to the atoms permeating in heat and other static pressuring processes between target and backboard, hence in so that target
The weld strength of material component is improved.
Brief description of the drawings
Fig. 1 is the flow chart of welding method of target assembly in one embodiment of the invention；
Fig. 2 to Fig. 7 is the structural representation of target material assembly welding process in one embodiment of the invention.
Embodiment
As described in background, the weld strength of the welding method of target material assembly has much room for improvement in the prior art.
A kind of welding method of target material assembly, including：Target and backboard are provided；Using heat and other static pressuring processes by target and the back of the body
Plate weld is together.
However, in the above method, because the solder side of target and backboard is more smooth surface, therefore cause target and
The adhesive force of backboard is smaller, causes during heat and other static pressuring processes, and the extent of atomic diffusion between target and backboard is smaller.
Reduce the weld strength of target material assembly.
On this basis, the present invention provides a kind of welding method of target material assembly, including：Target and backboard are provided, it is described
Target has first face of weld, and the backboard has second face of weld；Formed using turning process in first face of weld or second face of weld
After lines, first face of weld and second face of weld are welded together using heat and other static pressuring processes.
By forming lines in first face of weld, by increasing capacitance it is possible to increase the roughness of first face of weld, or form line in second face of weld
Road, by increasing capacitance it is possible to increase the roughness of second face of weld.And in heat and other static pressuring processes, the lines of first face of weld can be embedded in backboard
In, or the lines of second face of weld can be embedded in target.So as to add the adhesive force of first face of weld and second face of weld, it is beneficial to
Atoms permeating in heat and other static pressuring processes between target and backboard, hence in so that the welding quality of target material assembly is improved.
It is understandable to enable the above objects, features and advantages of the present invention to become apparent, below in conjunction with the accompanying drawings to the present invention
Specific embodiment be described in detail.
Fig. 1 is the flow chart of welding method of target assembly in one embodiment of the invention, is comprised the following steps：
S01：There is provided target and backboard, the target has first face of weld, and the backboard has second face of weld；
S02：Using turning process after first face of weld or second face of weld form lines, using heat and other static pressuring processes by the
One face of weld and second face of weld weld together.
The above method is described in detail below in conjunction with the accompanying drawings.
With reference to figure 2, there is provided target 100 and backboard 110.
The purity of the target 100 is more than 4N5, specifically, the purity of the target 100 is 5N or 6N, wherein, 5N is represented
Purity is 99.999%, and 6N represents that purity is 99.9999%.
In the present embodiment, the target 100 is copper target material.
In other embodiments, the target can also be tantalum target, aluminium target or titanium target material.The target can be with
Select the target of other materials.
In the present embodiment, the shape of the target 100 thinks cylinder as example.In other embodiments, the target
The shape of material can select other shapes.
The target 100 has relative first face of weld 101 and sputter face 102.
In the present embodiment, the backboard 110 is copper backboard.The copper backboard can include the copper alloy of evanohm or zinc
Backboard, the copper backboard can also be anaerobic copper backboards.
In other embodiments, the backboard can also be aluminum alloy back plate.The backboard is also an option that other materials
Backboard.
The size of the backboard 110 needs specific design according to the size and actual magnetron sputtering apparatus of target 100.
The backboard 110 has the second relative face of weld 111 and the back side 112.
Then, lines is formed in first face of weld 101 or second face of weld 111 using turning process.
The lines is the raised part formed after turning first face of weld 101 or second face of weld 111.
When forming lines in first face of weld 101, by increasing capacitance it is possible to increase the roughness of first face of weld 101.It is and quiet in subsequent thermal etc.
Press in technique, the lines of first face of weld 101 can be embedded in backboard 110.
When forming lines in second face of weld 111, by increasing capacitance it is possible to increase the roughness of second face of weld 111.It is and quiet in subsequent thermal etc.
Press in technique, the lines of second face of weld 111 can be embedded in target 100.
In the present embodiment, the lines is screw thread.In other embodiments, the lines can be selected as other shapes.
Illustrated below exemplified by forming screw thread in second face of weld 111.
With reference to figure 3, in turning process, the backboard 110 is arranged on the main shaft of lathe, car is housed on the lathe
Cut the cutter 120 of lines, second face of weld 111 of backboard 110 to be processed is towards cutter 120；Start lathe, the main shaft band of lathe
The axis that the backboard 110 is moved around backboard 110 rotates, and cutter 120 encloses movement outward in second face of weld 111 from center, or
Cutter 120 moves left and right in second face of weld 111 from periphery to center, turning is carried out to second face of weld 111, so as in second face of weld
111 form screw thread.
With reference to the top view of the backboard 110 obtained towards second face of weld 111 on the basis of being Fig. 3 with reference to figure 4 and Fig. 5, Fig. 4,
Fig. 5 is the structural representation obtained along A-A1 lines of cut in Fig. 4, and Fig. 4 is illustrated in detail in the screw thread of second face of weld 111 formation.
The screw thread along the cross sectional shape on radius of fillet direction be multiple tooth forms.The tooth form can be triangle,
Rectangle is square.The tooth form is also an option that as other shapes.
In the present embodiment, the tooth form is isosceles triangle.
In the present embodiment, the sidewall bottom of the groove between adjacent tooth form intersects.Due to the groove between adjacent tooth form
Sidewall bottom intersects, hence in so that the density of tooth form maximizes.In other embodiments, the side wall of the groove between adjacent tooth form
Bottom can be with non-intersect.
In the present embodiment, the suitable scope of highly desirable selection of the tooth form.If the height of the tooth form is too small, subsequently
In heat and other static pressuring processes, the depth that the tooth form can be embedded in target 100 is smaller, first face of weld 101 and second face of weld 111
Adhesive force reduces.If the height of the tooth form is excessive, it is necessary to the material for the backboard 110 that turning is fallen is more, causes to waste, add
Process costs.Therefore in the present embodiment, the height selection of the tooth form is 0.13mm~0.17mm.
In the present embodiment, the tooth form is equiangular triangle, and the sidewall bottom of the groove between adjacent tooth form intersects, in tooth
In the case that the height of type is 0.13mm~0.17mm, the distance between center of adjacent tooth form needs to select suitable scope.
If the distance between the center of adjacent tooth form is excessive, cause the drift angle of tooth form excessive, in follow-up heat and other static pressuring processes, the tooth
Type is excessively blunt, is unfavorable for being embedded in target 100, the adhesive force reduction of first face of weld 101 and second face of weld 111.If in adjacent tooth form
The distance between heart is too small, causes the drift angle of tooth form too small, and causing tooth form to bear the ability of external force reduces, and tooth form is in embedded target
It is easily deformed during 100.Therefore in the present embodiment, the distance between center of adjacent tooth form selection for 0.19mm~
0.25mm。
In the present embodiment, tooth form is isosceles triangle, and the drift angle of corresponding tooth form is 55 degree~65 degree.It is specifically, described
The drift angle of tooth form can be selected as 60 degree, and advantage is：In Tutrning Process, the calculating for relative dimensions is more square
Just.
In the present embodiment, the cutter 120 that cutted thread uses is screw tool.
With reference to figure 6, the structure of screw tool has been shown in particular in Fig. 6, and the screw tool includes：
Cutter body 20 and several cutting edge portion 40, cutting edge portion 40 are fixedly connected with cutter body 20；
The cutter body 20 has relative upper surface 201 and lower surface 202 and side 203, the side 203
Between upper surface 201 and lower surface 202；
Center cutter hole 30 is provided with cutter body 20；
Each cutting edge portion 40 has the rake face 401 being oppositely arranged and rear knife face 404 and positioned at rake face and rear knife
Two blade sides 402 between face；
Described two blade sides 402 are intersecting to form sword rib；Blade sides 402, which intersect composition lateral incision with rake face 401, cuts
Sword 403；In a cutting edge portion 40, the angle between two side cutting edges 403 is cutting edge angle θ.
In the present embodiment, so that cutter body 20 is fixedly connected with three cutting edge portion 40 as an example.In other embodiments, it is described
Cutter body can be fixedly connected with a cutting edge portion, two cutting edge portion.In other embodiments, the cutter body can be with
It is fixedly connected with the cutting edge portion of other quantity.
In the present embodiment, the tooth form is isosceles triangle, and the sidewall bottom of the groove between adjacent tooth form intersects.
During two faces of weld 111 form screw thread, cutting edge portion 40 is embedded in backboard 110, and the sword rib of cutting edge portion 40 is parallel to second
The face of weld 111, and rake face 401 and rear knife face 404, perpendicular to second face of weld 111, cutting edge angle θ angular bisector is perpendicular to second
The face of weld 111, blade sides 402 are used to cut the side wall for forming tooth form.
In the present embodiment, the drift angle of the tooth form is 55 degree~65 degree, accordingly, the cutting edge angle θ of the screw tool
For 55 degree~65 degree.
When the drift angle selection of the tooth form is 60 degree, accordingly, the cutting edge angle θ of the screw tool is 60 degree.
In the present embodiment, when to second face of weld, 111 turning lines, from the center of second face of weld 111 to second face of weld 111
Edge carry out so that accessory substance caused by turning will not toward second face of weld 111 center assemble, caused by turning accessory substance hold
Easily excretion.In other embodiments, when to the second face of weld turning lines, from the edge of second face of weld to the center of second face of weld
Carry out.
Specifically, from the center of second face of weld 111 to the edge cutted thread of second face of weld 111.
During to the cutted thread of second face of weld 111, the whole sword rib of the cutting edge portion 40 of screw tool can enter
In backboard 110.Because the screw thread curvature of the central area of second face of weld 111 is larger, thus when from the center of second face of weld 111 to
When the edge of second face of weld 111 is carried out, it is difficult to corresponding larger curvature in the starting point of turning.Therefore need the portion to screw tool
Sword rib is divided to carry out wearing down processing.
Specifically, with reference to figure 7, Fig. 7 shows the structure for sword rib in Fig. 6 wear down the screw tool after handling,
Before carrying out cutted thread, to part sword rib wear down processing, formation blade bottom surface 405, the blade bottom surface 405 respectively with
Blade sides 402, remaining sword rib intersect.No longer it is described in detail on identical part in Fig. 7 and Fig. 6.
Due to having carried out wearing down processing to part sword rib, hence in so that during cutted thread, cutting edge portion 40 is entered
The tread for entering the region of backboard 110 reduces, and the tread refers to that cutting edge portion 40 is prolonged into the region of backboard 110 along sword rib
Stretch the average-size in direction.When being carried out from the center of second face of weld 111 to the edge of second face of weld 111 during turning, in turning
Starting point formed curvature increase.
Acute angle θ 1 between the blade bottom surface 405 and remaining sword rib needs to select suitable scope.It is if described
Acute angle θ 1 between blade bottom surface 405 and remaining sword rib is too small, causes the difficulty increase for wearing down processing.If the blade
Acute angle θ 1 between bottom surface 405 and remaining sword rib is excessive, causes when from the center of second face of weld 111 to second face of weld
When 111 edge is carried out during turning, it is difficult to form larger curvature in the starting point of turning.Therefore in the present embodiment, the blade
Acute angle θ 1 between bottom surface 405 and remaining sword rib is 30 degree~45 degree.
In the present embodiment, the bite of cutted thread mainly and needs the height of tooth form that is formed relevant, it is necessary to formation
The height of tooth form is smaller, and the bite of cutted thread is smaller.
If the amount of feeding of cutted thread is excessive, the part machined away easily circumnutates, and the part machined away is easy and carries on the back
Larger friction occurs between plate 110, by the pattern of damaged screw, if the amount of feeding of cutted thread is too small, turning effect can be reduced
Rate.
If the cutting speed of cutted thread is excessive, causes row to cut and have some setbacks, the accessory substance after turning, which easily squeezes, hinders tooth form, influences
The roughness of screw thread；If the cutting speed of cutted thread is too small, process efficiency is reduced.
To sum up, cutted thread needs to select suitable cutting speed, the amount of feeding and bite.
In the present embodiment, tooth form is isosceles triangle, and the base of adjacent tooth form is connected, tooth form height for 0.13mm~
In the case that the distance between 0.17mm, adjacent tooth form is 0.19mm~0.25mm, the parameter of turning process is：Cutting speed is
0.02m/min~0.03m/min, the amount of feeding are 0.02mm/r~0.04mm/r, and bite is 0.02mm~0.04mm.
The hardness for the cutter 120 that turning lines uses is in more than HB350 so that the hardness of the cutter 120 is relative to target
The hardness of material 100 and backboard 110 is larger so that relatively low in the viscous knife degree of turning process dorsulum 110, turning process produces
Accessory substance is easily drained, thus the pattern of the lines formed is preferable.
Specifically, the material of the cutter 120 is tungsten carbide base carbide alloy, titanium carbide base hard alloy or Buddha's warrior attendant
Stone.
Cutting fluid is used during turning lines, specifically, can be：Cutting fluid is injected in cutting region.
The cutting fluid can play lubrication and cooling effect.Specifically, the cutting fluid is emulsifying agent, advantage exists
In：Prevent backboard 110 from getting rusty.
The mass percent of the emulsifying agent needs to select suitable scope.If the mass percent mistake of the emulsifying agent
It is small, lubrication can be caused to reduce.If the mass percent of the emulsifying agent is excessive, backboard 110 and knife during turning
Thicker fluid retention layer can be formed between tool 120, on the one hand, caused lubricant effect to reduce, on the other hand, reduced emulsifying agent
Heat transfer rate between cutter 120 and backboard 110, cooling effect reduce.In the present embodiment, the quality of the emulsifying agent
Percentage is 20%~30%.
After the turning lines of first face of weld 101, in addition to：Using ultrasonic cleaning process to the target 100 and backboard
110 are cleaned.On the one hand so that the turning scrap that the surface of backboard 110 is attached to after turning lines departs from backboard 110.The opposing party
Face, other impurity of target 100 and backboard 110 are removed.It should be noted that in other embodiments, it can not use clear
Technique is washed to clean target and backboard.
The ultrasonic cleaning process is：Using ultrasonic unit in the rinse bath equipped with cleaning fluid to the He of target 100
Backboard 110 is cleaned.
In the present embodiment, after being cleaned using ultrasonic cleaning process to the target 100 and backboard 110, using heat
Isostatic pressing process welds together first face of weld 101 and second face of weld 111.
In another embodiment, lines is formed in first face of weld using turning process.In the lines that first face of weld is formed
With reference to the lines formed in foregoing teachings in second face of weld, no longer it is described in detail.
Specifically, illustrated exemplified by forming screw thread in first face of weld.
When forming screw thread in first face of weld, the target is arranged on the main shaft of lathe, car is housed on the lathe
Cut the cutter of lines, first face of weld of target to be processed is towards cutter；Start lathe, the main shaft of lathe drives the target to enclose
Axis around target rotates, and cutter encloses movement outward in first face of weld from center, or cutter first face of weld from periphery in
The heart is moved left and right, and turning is carried out to first face of weld, so as to form screw thread in first face of weld.
Screw thread is formed in second face of weld use material in the cutter reference foregoing teachings that first face of weld forms screw thread use
Cutter, be no longer described in detail.
During first face of weld forms screw thread, in cutting edge portion insertion target, the sword rib of cutting edge portion is parallel to the
One face of weld, and rake face and rear knife face, perpendicular to first face of weld, the angular bisector of cutting edge angle is perpendicular to first face of weld, blade side
The side wall of position correspondence tooth form corresponding to face.
The drift angle of the tooth form and the cutting edge angle of screw tool are no longer described in detail with reference to foregoing teachings.
During to the first face of weld turning lines, turning process is carried out from the center of first face of weld to the edge of first face of weld, is made
Obtaining accessory substance caused by turning will not assemble toward the center of first face of weld, and accessory substance caused by turning is easily drained.The turning
Technique can also be carried out from the edge of first face of weld to the center of first face of weld.
When the edge cutted thread from the center of first face of weld to first face of weld, part sword rib can also be worn down
Processing, forms blade bottom surface, and the blade bottom surface is intersected (with reference to figure 7) with blade sides, remaining sword rib respectively so that in car
The curvature increase that the starting point cut is formed.
In the parameter reference foregoing teachings that first face of weld forms the turning process that screw thread uses spiral shell is formed in second face of weld
The parameter for the turning process that line uses, is no longer described in detail.
Use cutting fluid during first face of weld forms screw thread, in the second face of weld shape in cutting fluid reference foregoing teachings
The cutting fluid used into screw thread.
After first face of weld forms lines, in addition to：The target and backboard are cleaned using ultrasonic wave.One side
Face so that the turning scrap that target material surface is attached to after turning departs from target.On the other hand, by by other impurity of target and backboard
Remove.Then first face of weld and second face of weld are welded together using heat and other static pressuring processes.
It should be noted that after the first face of weld turning lines, can not also be to target and backboard turning lines.
Although present disclosure is as above, the present invention is not limited to this.Any those skilled in the art, this is not being departed from
In the spirit and scope of invention, it can make various changes or modifications, therefore protection scope of the present invention should be with claim institute
The scope of restriction is defined.
Claims (20)
- A kind of 1. welding method of target material assembly, it is characterised in that including：There is provided target and backboard, the target has first face of weld, and the backboard has second face of weld；Using turning process after first face of weld or second face of weld form lines, using heat and other static pressuring processes by first face of weld and Second face of weld welds together.
- 2. the welding method of target material assembly according to claim 1, it is characterised in that the lines is screw thread, the spiral shell Line is the raised part of first face of weld or second face of weld.
- 3. the welding method of target material assembly according to claim 2, it is characterised in that the screw thread is along radius of fillet side Upward cross sectional shape is multiple tooth forms；The tooth form is triangle, rectangle or square.
- 4. the welding method of target material assembly according to claim 3, it is characterised in that when the tooth form is isosceles triangle When, the sidewall bottom of the groove between adjacent tooth form intersects.
- 5. the welding method of target material assembly according to claim 4, it is characterised in that the height of the tooth form is 0.13mm ~0.17mm；The distance between center of adjacent tooth form is 0.19mm~0.25mm.
- 6. the welding method of target material assembly according to claim 4, it is characterised in that the drift angle of the tooth form be 55 degree~ 65 degree.
- 7. the welding method of target material assembly according to claim 6, it is characterised in that the drift angle of the tooth form is 60 degree.
- 8. the welding method of target material assembly according to claim 5, it is characterised in that the parameter of turning process includes：Cut It is 0.02m/min~0.03m/min to cut speed, and the amount of feeding is 0.02mm/r~0.04mm/r, bite be 0.02mm~ 0.04mm。
- 9. the welding method of target material assembly according to claim 2, it is characterised in that the cutter that turning lines uses is spiral shell Line cutter.
- 10. the welding method of target material assembly according to claim 9, it is characterised in that the screw tool includes some Individual cutting edge portion, each cutting edge portion have the rake face that is oppositely arranged and rear knife face and positioned at rake face and rear knife face it Between two blade sides；Described two blade sides are intersecting to form sword rib；Blade sides, which intersect composition lateral incision with rake face, cuts Sword；Angle between the cutting edge of side is cutting edge angle.
- 11. the welding method of target material assembly according to claim 10, it is characterised in that the cutting edge angle be 55 degree~ 65 degree.
- 12. the welding method of target material assembly according to claim 11, it is characterised in that the cutting edge angle is 60 degree.
- 13. the welding method of target material assembly according to claim 10, it is characterised in that before turning is carried out, also wrap Include：To part sword rib wear down processing, form blade bottom surface, the blade bottom surface respectively with blade sides, remaining sword rib It is intersecting.
- 14. the welding method of target material assembly according to claim 13, it is characterised in that the blade bottom surface with it is remaining Acute angle between sword rib is 30 degree~45 degree.
- 15. the welding method of target material assembly according to claim 1, it is characterised in that when to the first face of weld turning lines When, turning process is carried out from the center of first face of weld to the edge of first face of weld；When to the second face of weld turning lines, turning work Skill is carried out from the center of second face of weld to the edge of second face of weld.
- 16. the welding method of target material assembly according to claim 1, it is characterised in that the cutter that turning lines uses Hardness is in more than HB350.
- 17. the welding method of target material assembly according to claim 16, it is characterised in that the material of the cutter is carbonization Tungsten base cemented carbide, titanium carbide base hard alloy or diamond.
- 18. the welding method of target material assembly according to claim 1, it is characterised in that adopted during turning lines Use cutting fluid；The cutting fluid is emulsifying agent.
- 19. the welding method of target material assembly according to claim 1, it is characterised in that welded in first face of weld or second After facing lines, and before being welded together first face of weld and second face of weld using heat and other static pressuring processes, in addition to：Using Ultrasonic cleaning process cleans to the target and backboard.
- 20. the welding method of target material assembly according to claim 1, it is characterised in that the target is copper target material, aluminium target Material, titanium target material or tantalum target.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111015111A (en) * | 2019-12-23 | 2020-04-17 | 有研亿金新材料有限公司 | Diffusion welding method for large-size titanium target and copper back plate |
| CN112676782A (en) * | 2020-12-25 | 2021-04-20 | 宁波江丰电子材料股份有限公司 | Method for assembling titanium target and copper back plate |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111015111A (en) * | 2019-12-23 | 2020-04-17 | 有研亿金新材料有限公司 | Diffusion welding method for large-size titanium target and copper back plate |
| CN111015111B (en) * | 2019-12-23 | 2021-10-08 | 有研亿金新材料有限公司 | Diffusion welding method for large-size titanium target and copper back plate |
| CN112676782A (en) * | 2020-12-25 | 2021-04-20 | 宁波江丰电子材料股份有限公司 | Method for assembling titanium target and copper back plate |
| CN113996819A (en) * | 2021-09-30 | 2022-02-01 | 宁波江丰电子材料股份有限公司 | Method for machining sputtering arc surface of circular molybdenum target component |
| CN113996819B (en) * | 2021-09-30 | 2023-07-25 | 宁波江丰电子材料股份有限公司 | Sputtering arc surface machining method of circular molybdenum target assembly |
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