CN108613641B - Two-dimentional orientation error precision measurement method for thin plate crystals - Google Patents
Two-dimentional orientation error precision measurement method for thin plate crystals Download PDFInfo
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- CN108613641B CN108613641B CN201810813573.4A CN201810813573A CN108613641B CN 108613641 B CN108613641 B CN 108613641B CN 201810813573 A CN201810813573 A CN 201810813573A CN 108613641 B CN108613641 B CN 108613641B
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
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Abstract
The invention discloses a kind of two-dimentional orientation error precision measurement methods for thin plate crystals, crystal prototype to be measured is fixed on suction disc in method, detector and X-ray angle are rotated to 2 times of the angle Bragg, crystal prototype to be measured is scanned around the angle θ in the direction z using precise rotating platform, the phase angle of crystal prototype to be measured is rotated around the direction y and is changedUntil 360 ° of rotations are completed at the phase angle of crystal prototype to be measured.Two-dimentional orientation error measurement may be implemented using the above method；Standard crystal is not depended on, measurement result precision is high；Two aspect information of available orientation error size and direction.
Description
Technical field
The present invention relates to a kind of crystal orientation error measuring system and measurement methods, more particularly to one kind to be spread out based on X-ray
Technology is penetrated, suitable for the two-dimentional accurate measurement of thin plate crystals orientation error, belongs to crystal X-ray detection the relevant technologies.
Background technique
Crystal is a kind of material for being widely used in semi-conductor industry and X-ray light splitting field.In crystallography, pass through
Crystal face is defined the arrangement orientation of crystals atom is described.To different use occasion and crystalline, need to select
Different crystal faces.However, there may be angles between selected crystal face and crystallophy surface in actual production process.
Orientation error is defined as the angle between crystal face normal direction and physical surface normal direction.The presence of orientation error can be to crystal
Performance has various influences: in semiconductor industry, orientation error will lead to the electricity of crystal, magnetic property changes
Become, influences electronic component performance.In X-ray optical field, orientation error will affect crystal photoelement energy and space point
Resolution.Therefore, accurately the orientation error of measurement crystal is of great significance.In order to accurately measure orientation error, measurement content is answered
Including three aspects: the size of 1. orientation errors；2. the direction of orientation error；3. the Two dimensional Distribution of orientation error.Only by this
Three parameters are all measured, and could describe the orientation error of crystal perfectly.
Currently, X-ray diffraction (X-ray diffraction, abbreviation XRD) is a kind of common crystal detection means.Root
According to Bragg principle, X-ray wavelength and crystal interplanar distance and the angle Bragg have following relationship:
N λ=2d sin θ is 1.
Wherein, n is diffraction time, and λ is X-ray wavelength, and d is spacing of lattice, and θ is the angle Bragg.Therefore, when monochromatic X- is penetrated
When line is radiated on crystal face, diffraction can just occur for the light for only forming certain degree with crystal face, this is the base of XRD crystal detection
Plinth.
Existing crystal direction finder by measurement monochromatic x-rays by crystal diffraction when, crystallophy surface and incident light
Angle, and using the difference at the angle and the angle Bragg as the orientation error of crystal.But this measurement method has three aspects to ask
Topic:
1. the X-ray hot spot being radiated on crystal is larger, the orientation error measured is being averaged in entire spot area
Value, sample stage also do not have translation functions, are unable to get the Two dimensional Distribution of orientation error；
2. the orientation error measured is projection of the actual orientation error in the direction, measurement result is inaccurate, meanwhile, it is existing
The direction of orientation error can not be measured by having equipment also；
3. the angle of sample stage needs benchmark, existing method be demarcated using standard crystal, then, standard crystal sheet
The orientation error of body will accumulate in final measurement result.
As it can be seen that existing direction finder is unable to satisfy the demand of two-dimension high-precision crystal orientation.
Summary of the invention
The object of the present invention is to provide the two-dimentional orientation errors of a kind of pair of thin plate crystals to implement accurate measurement.
A kind of two-dimentional orientation error precision measurement method of thin plate crystals, comprising the following steps:
Step 1: being zero or initial bit by the playback of index table, precise rotating platform and two-dimension translational platform, crystal prototype to be measured is solid
It is scheduled on suction disc；
Step 2: inputting the measuring point on theoretical interplanar distance, the direction x and the direction z of crystal prototype to be measured in the controls
The angle interval that spacing and measuring point quantity, azimuth rotate every time
Step 3: control system is managed according to the theoretical interplanar distance inputted in monochromatic x-rays wavelength, above-mentioned steps 2
The angle Bragg of opinion, control precise rotating platform rotate the plane of crystal to be measured of crystal prototype to be measured and X-ray angle to Bragg
Angle, and detector and X-ray angle are rotated to 2 times of the angle Bragg；
Step 4: crystal prototype to be measured being scanned around the angle θ in the direction z using precise rotating platform, when detector signal reaches
It is most strong, by angular encoder record around the corner numerical value in the direction z；
Step 5: control index table rotates at the phase angle of crystal prototype to be measured around the direction y to be changedRepeat step
4；
Step 6: repeating step 5, complete 360 ° until the phase angle of crystal prototype to be measured and rotate, that is, complete the survey of the position
Amount；
Step 7: according to the measuring point spacing and measuring point quantity on the direction x and the direction z, controlling the mobile crystalline substance to be measured of two-dimension translational platform
Body sample is to next measurement position；
Step 8: step 4~7 are repeated, until completing the measurement to all positions on crystal prototype to be measured；
Step 9: being carried out using following relationship to each measurement position phase angle and accordingly around the direction z corner numerical value
Fitting, can be obtained the Two dimensional Distribution of crystal prototype orientation error to be measured:
In above-mentioned relation formula, Δ θ is θ variable quantity, characterizes the reading that sample stage is rotated around z-axis, is the data measured；α
For the size of orientation error, characterizing crystalline substance Δ θ to be measured is the projection of surface normal rotational trajectory circle in the x direction.
Using above-mentioned measurement method, technical effect is embodied in following several respects: 1. may be implemented two-dimentional orientation error measurement；
2. not depending on standard crystal, measurement result precision is high；3. two aspect information of available orientation error size and direction.
Detailed description of the invention
Fig. 1 is measuring principle schematic diagram of the invention；
Fig. 2 is the definition schematic diagram of relevant parameter；
Fig. 3 is structural schematic diagram of the invention.
Specific embodiment
Embodiment 1
The present embodiment be exactly for ease of description test method and in advance to system carry out description.In conjunction with Fig. 3, it is used for
The two-dimentional orientation error precision measurement system of thin plate crystals, X-ray source 20, X-ray source 20 obtain after exposing to monochromator 30
Monochromatic light directed crystal prototype A to be measured, is provided with the fixed crystal prototype A to be measured of bracket on workbench 10, and bracket is around being located at vertical
It is to be measured that the Z axis in direction and Z axis are vertically positioned in horizontally Y-axis rotation, bracket straight-line displacement on the direction perpendicular to Y-axis
The crystal face to be measured of crystal prototype A is vertical with Y-axis.
The X-ray issued by X-ray source 20 forms monochromatic light by monochromator 30, and passes through collimation diaphragm 40, purpose
It is to obtain the monochromatic x-rays of small size small divergence angle, realizes the measurement to the part crystal prototype A to be measured.It in this way can be to avoid survey
The excessive caused average effect in region is measured, measurement accuracy and spatial discrimination are improved.
Crystal prototype A to be measured is mounted on workbench 10, it is desirable that meeting basic function includes: the fixed crystalloids to be measured of (1)
Product A；(2) realizes the precision sweep of the angle Bragg, rotates in Fig. 1 around the direction z；(3) angle recordings；(4) realizes azimuth rotation
Turn, is rotated in Fig. 1 around the direction y；(5) realizes two-dimensional movement, the direction x and the translation of the direction z in Fig. 1.The implementation of certain above-mentioned movement
Posture and the position of crystal prototype A to be measured are mainly adjusted, these rotations or movement are realized by relevant mechanism, are had below
Body explanation.
Bracket includes sucker or plate 51, attaching side plate face with the back side of crystal prototype A to be measured and be laid on suction disc 51
The sucker being connected with vacuum environment, suction disc 51 are connected on the dynamic platform 52 of index table 50, are moved platform 52 and are rotated around Y-axis.Crystalline substance to be measured
The fixed form of body sample A can be mechanical or air suction type etc., it is desirable that thin plate crystals fixation is smooth.
The Jing Tai of index table 50 is connected on the dynamic pedestal 61 of precise rotating platform 60, moves pedestal 61 around the Z axis of vertical direction
Rotation.
Precise rotating platform 60 is the angle Bragg precision sweep device, and effect is to realize crystal prototype A to be measured around the precision in the direction z
Scanning changes angle, the i.e. angle Bragg between X-ray and crystal face.The effect of angle recordings is crystalline substance to be measured during record measures every time
Variable quantity of the body around the precision sweep of the direction z.Index table 50 is to realize azimuth rotary setting, and effect is to realize crystal around y
The rotation in direction, is rotated by azimuth, can be completed measurement of the crystal under different orientations, is somebody's turn to do by data processing
The orientation error of position crystal.
Between monochromator 20 and the crystal face to be measured of crystal prototype A to be measured be arranged collimation diaphragm 40, crystal prototype A to be measured to
It surveys and arranges detector 70 on the reflection direction of the reflected light of crystal face.The arrangement of this incident light can be to avoid measured zone mistake
Big caused average effect.
The two-dimension translational platform 80 that guide and limit mechanism is constituted is set between suction disc 51 and dynamic platform 52, and two-dimension translational platform 80 includes
Orthogonal in-plane displancement guiding mechanism, the displacement surface are vertical with Y direction.
The effect of two-dimensional movement is the movement for realizing the crystal face to be measured of crystal prototype A to be measured in xOz plane, reaches measurement
The purpose of two-dimentional orientation error.
Measuring system of the invention require precise rotating platform 60 be the direction z in the angle Bragg precision sweep shaft, that is, Fig. 1, point
Degree turntable 50 is that the direction y in azimuth rotating shaft, that is, Fig. 1 is intersected with X-ray optical axis；Also, the intersection point is located at crystalline substance to be measured
Body surface face.On the one hand it can guarantee that X-ray is radiated at plane of crystal to be measured always when carrying out the precision sweep of the angle Bragg in this way
Same position, on the other hand can guarantee that X-ray is radiated at crystal table to be measured always when changing crystal orientation angle to be measured
The same position in face.
Measuring system of the invention require the physical surface of crystal to be measured with index table 50 i.e. azimuth rotating shaft i.e.
The direction y in Fig. 1 is vertical, can guarantee the angle i.e. crystal face normal direction of measured crystal face normal direction and azimuth rotating shaft in this way
With the angle of physical surface normal direction, that is, orientation error.
When O point of the x-ray irradiation of monochromatic small light spot on plane of crystal to be measured, only pressed from both sides in X-ray and crystal face
When angle meets Bragg principle, monochromatic x-rays just can be by crystal diffraction.Realize crystal to be measured around z by workbench in the present invention
The scanning of direction rotation.During the scanning process, using the variation of X-ray intensity on 70 detection of diffracted direction of detector, work as intensity
Reach maximum value, illustrates that the angle of X-ray at this time and crystal face is the angle Bragg θB, it is Δ that sample, which rotates corresponding reading around z-axis,
θ0.The statement connotation having the same of crystal to be measured and crystal prototype A to be measured.
Embodiment 2
A kind of two-dimentional orientation error precision measurement method of thin plate crystals, comprising the following steps:
Step 1: it is zero or initial bit by the playback of index table 50, precise rotating platform 60 and two-dimension translational platform 80, crystal to be measured
Sample A is fixed on suction disc 51；
Step 2: inputting the survey on theoretical interplanar distance, the direction x and the direction z of crystal prototype A to be measured in the controls
The angle interval that point spacing and measuring point quantity, azimuth rotate every time
Step 3: control system is managed according to the theoretical interplanar distance inputted in monochromatic x-rays wavelength, above-mentioned steps 2
The angle Bragg of opinion, control precise rotating platform 60 by the plane of crystal to be measured of crystal prototype A to be measured and X-ray angle rotate to
The angle Bragg, and detector 70 and X-ray angle are rotated to 2 times of the angle Bragg；Step 4: using precise rotating platform 60 to be measured
Crystal prototype A is scanned around the angle θ in the direction z, when 70 signal of detector reaches most strong, by angular encoder record around the side z
To corner numerical value；
Step 5: control index table 50 rotates at the phase angle of crystal prototype A to be measured around the direction y to be changedIt repeats
Step 4；
Step 6: repeating step 5, complete 360 ° until the phase angle of crystal prototype A to be measured and rotate, that is, complete the position
Measurement；
Step 7: according to the measuring point spacing and measuring point quantity on the direction x and the direction z, controlling the mobile crystalline substance to be measured of two-dimension translational platform
Body sample A is to next measurement position；
Step 8: step 4~7 are repeated, until completing the measurement to all positions on crystal prototype A to be measured；
Step 9: being carried out using following relationship to each measurement position phase angle and accordingly around the direction z corner numerical value
Fitting, can be obtained the Two dimensional Distribution of crystal prototype A orientation error to be measured:
In above-mentioned relation formula, Δ θ is θ variable quantity, characterizes the reading that sample stage is rotated around z-axis, is the data measured；α
For the size of orientation error, characterizing crystalline substance Δ θ to be measured is the projection of surface normal rotational trajectory circle in the x direction.
Sample stage is rotated by a certain angle around the direction y, that is, changes the azimuth of crystal to be measuredDue to azimuth shaft
(direction y) and X-ray intersect at O point, then, X-ray is still radiated on O point after rotation.But due to orientation error
The angle of the presence of α, X-ray and crystal face can change, and cause X-ray can not be by crystal diffraction.At this point, passing through sample again
Platform carries out crystal to be measured around the angle scanning in the direction z, when the signal strength that detector detects reaches maximum value, sample stage again
Rotating corresponding reading around the direction z is Δ θ1.Successively by Crystal Rotation to be measured to different orientations, and measure Δ θi。
Since azimuth shaft and plane of crystal normal direction are parallel, if being reference with crystal face normal direction, in circular dividing table 50
In rotary course, it is equivalent to surface normal direction and is rotated around normal of crystal surface direction.On the other hand, each Δ θ is in X-ray
Angle with crystal face is θBWhen obtain, so measuring principle can simplify as Fig. 2, it may be assumed that in measurement process, surface normal phase
Crystal face normal direction is rotated, in order to make θBSize remains unchanged, and needs to change the size of θ.The variation delta θ of θ by orientation error α and
Rotation phaseIt codetermines.As shown in Fig. 2, Δ θ is the projection of surface normal rotational trajectory circle in the x direction, meet such as ShiShimonoseki
System:
As shown in Fig. 2, relational expression 2. in, Δ θ be θ variable quantity, characterize the reading that sample stage rotate around z-axis, be survey
The data obtained；α is the size of orientation error, characterizes the angle between crystal crystal face normal direction and physical surface normal direction to be measured, Φ is
The phase of orientation error, when to be characterized in azimuth be 0, in the angle of xOz plane projection and x positive direction, the two is orientation error
It is to be measured；It is azimuth, is provided by sample stage around the angle that y-axis rotates；ω is orientation ascent, since Δ θ period of change is
Therefore 2 π work as azimuthWhen using radian as unit, ω=1, whenWhen using angle as unit, ω=π/180；θBFor Bragg
Angle is obtained by theoretical calculation.
By data (Δθ0)、(Δθ1)、(Δθ2)、……(Δθn) be 2. fitted according to relational expression, it can obtain
To the orientation error information of O point.
Claims (1)
1. a kind of two-dimentional orientation error precision measurement method of thin plate crystals, comprising the following steps:
Step 1: it is zero or initial bit by the playback of index table (50), precise rotating platform (60) and two-dimension translational platform (80), crystalline substance to be measured
Body sample (A) is fixed on suction disc (51)；
Step 2: inputting the measuring point on theoretical interplanar distance, the direction x and the direction z of crystal prototype to be measured (A) in the controls
The angle interval that spacing and measuring point quantity, azimuth rotate every time
Step 3: control system obtains theory according to the theoretical interplanar distance inputted in monochromatic x-rays wavelength, above-mentioned steps 2
The angle Bragg, control precise rotating platform (60) by the plane of crystal to be measured of crystal prototype to be measured (A) and X-ray angle rotate to
The angle Bragg, and detector (70) and X-ray angle are rotated to 2 times of the angle Bragg；
Step 4: crystal prototype to be measured (A) being scanned around the angle θ in the direction z using precise rotating platform (60), when detector (70)
Signal reaches most strong, by angular encoder record around the corner numerical value in the direction z；
Step 5: control index table (50) rotates at the phase angle of crystal prototype to be measured (A) around the direction y to be changedIt repeats
Step 4；
Step 6: repeating step 5, complete 360 ° until the phase angle of crystal prototype to be measured (A) and rotate, that is, complete the survey of the position
Amount；
Step 7: according to the measuring point spacing and measuring point quantity on the direction x and the direction z, controlling the mobile crystalloids to be measured of two-dimension translational platform
Product (A) extremely next measurement position；
Step 8: step 4~7 are repeated, until completing the measurement to all positions on crystal prototype to be measured (A)；
Step 9: using following relationship, to each measurement position phase angle and accordingly, around the direction z, corner numerical value is intended
It closes, the Two dimensional Distribution of crystal prototype to be measured (A) orientation error can be obtained:
In above-mentioned relation formula, Δ θ is θ variable quantity, characterizes the reading that sample stage is rotated around z-axis, is the data measured；α is fixed
To the size of error, characterizing Δ θ is the projection of surface normal rotational trajectory circle in the x direction；Φ is the phase of orientation error, table
Sign is when azimuth is 0, angle of the orientation error in xOz plane projection and x positive direction；ω is orientation ascent, since Δ θ becomes
Changing the period is therefore 2 π work as azimuthWhen using radian as unit, ω=1, whenWhen using angle as unit, ω=π/180；
θBFor the angle Bragg, obtained by theoretical calculation.
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| JP2000221147A (en) * | 1999-02-02 | 2000-08-11 | Rigaku Corp | Crystal orientation angle measurement device and method |
| KR20050037086A (en) * | 2003-10-17 | 2005-04-21 | 삼성전자주식회사 | X-ray diffractometer and calibrating method of measuring position of the same |
| CN103257150B (en) * | 2012-08-31 | 2015-12-02 | 云南北方驰宏光电有限公司 | The measuring method of direct measurement crystal orientation fleet angle |
| CN203595676U (en) * | 2014-02-13 | 2014-05-14 | 南京京晶光电科技有限公司 | Device for confirming crystal face of crystal bar |
| CN104155324A (en) * | 2014-07-31 | 2014-11-19 | 陕西大仪科技有限责任公司 | Method for determining three-dimensional direction of single crystal |
| CN204214796U (en) * | 2014-11-28 | 2015-03-18 | 温岭市朗杰机械设备有限公司 | The control circuit of the directed sizing machine of the automatic X-ray of a kind of crystal |
| CN104597065A (en) * | 2015-01-23 | 2015-05-06 | 中国工程物理研究院材料研究所 | X-ray diffractometer |
| CN104914121A (en) * | 2015-06-12 | 2015-09-16 | 朱彦婷 | Method and device for measuring orientation of engineered monocrystal |
| CN106124542B (en) * | 2016-07-22 | 2019-03-01 | 东北大学 | The method for carrying out crystal non-destructive testing using Multifunctional X-ray direction finder |
| CN108195859A (en) * | 2017-12-20 | 2018-06-22 | 北京航空航天大学 | A kind of X ray crystal orientation and residual stress analysis device |
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