CN108601193A - A kind of long scale uniform heat plasma arcs production method and device - Google Patents

A kind of long scale uniform heat plasma arcs production method and device Download PDF

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Publication number
CN108601193A
CN108601193A CN201810233819.0A CN201810233819A CN108601193A CN 108601193 A CN108601193 A CN 108601193A CN 201810233819 A CN201810233819 A CN 201810233819A CN 108601193 A CN108601193 A CN 108601193A
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cathode
anode
water
cooling
fixed seat
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CN108601193B (en
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陈龙威
刘甫坤
赵颖
江贻满
孟月东
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Hefei Institutes of Physical Science of CAS
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Hefei Institutes of Physical Science of CAS
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/28Cooling arrangements
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/32Plasma torches using an arc
    • H05H1/34Details, e.g. electrodes, nozzles
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/32Plasma torches using an arc
    • H05H1/34Details, e.g. electrodes, nozzles
    • H05H1/3405Arrangements for stabilising or constricting the arc, e.g. by an additional gas flow

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)

Abstract

The invention discloses a kind of long scale uniform heat plasma arcs production method and devices, including:Water-cooled cathode, cathode terminal nylon fixing sleeve, lucite tube, anode tap nylon fixing sleeve, anode fixed seat, water cooling anode, vacuumizes interface, anode terminal, quartz glass tube at cathode fixed seat.Implement method and device provided by the invention, avoid using traveling electrode, multi-stage cascade electrode or introduce plasma atmosphere pollution and electrode corrosion that conducting liquid may be brought, reduces the difficulty that long scale hot plasma electric arc obtains;The uniform and stable hot plasma electric arc of long scale that plasma length, gas temperature and its spatial distribution are controllable in discharging chamber is obtained by the type of cooling and intensity, cathode and anode spacing outside adjusting operating air pressure, working gas type, discharge current, discharging chamber etc. simultaneously, improves the feasibility for meeting more application environments and flexibility.

Description

A kind of long scale uniform heat plasma arcs production method and device
Technical field
The invention belongs to plasma physics and applied science research fields, and in particular to a kind of long scale arc heat etc. from Daughter production method and device.
Background technology
Arc-plasma belongs to a vital classification of low-temp plasma source, be in local thermodynamic equilibrium's state it is equal from Daughter has current density height, gas temperature high(3000K-30000K), energy is concentrated, maintenance voltage is low, working gas type The features such as extensive, it is many often to be widely used in Metal Cutting, welding, melting, spraying, particle nodularization, dielectric material processing etc. The impossible technical process of rule method.In general, DC arc plasma generator by structure can be divided into axis type and Coaxial-type selects different generator architectures according to different applications.To certain generators also frequently with externally-applied magnetic field Mode makes electric arc high speed rotation, to improve the uniformity of electrode life and gas heating;Or by air-flow by hot plasma The region being transferred out of between two electrodes forms thermal plasma torch.Although the characteristics of electric arc hot plasma be operating current it is big and Maintenance voltage is relatively low, however electric field strength required before electric arc startup is higher, and heat over long distances is generated especially for needs Higher breakdown electric field is then needed under the background of plasma arc.
Generating the method for hot plasma arc or thermal plasma torch in the striking stage at present includes mainly:(1)Directly exist It is generated between the cathode and anode of spacing very little;(2)Cathode and anode distance are furthered, gradually pulled open after startup power supply striking; (3)Using cascade electrode, the electric pole short circuit of mutually insulated is finally obtained into the plasma of larger electrode spacing from outside successively Arc or torch;(4)Generate area in electric arc and be passed through conductive liquid reduction and open the required high electric field of arc, finally in cathode and Hot plasma electric arc is formed between anode.However inevitably there are some defects in these means:First method uses solid The arc column area that fixed electrode generates is smaller, and utilizable heat plasma body region reduces;Second and the third method can be with Arc column area is lengthened, effective heat plasma body region is increased, however needs traveling electrode or uses multi-level electrode, this will be needed Heat plasma body device carries out special design, is needed if certain applications mutually close using dynamic sealing or multi-level water cooling electrode Envelope and insulation series connection, increase the complexity of equipment;Fourth method may then introduce impurity, while the liquid of electric conductivity can Energy meeting corroding electrode material, influences electrode life.
Simultaneously as the current density of arc-plasma is high, energy is concentrated, so the hot plasma arc of conventional structure Or thermal plasma torch temperature gradient is big.Such as gas temperature of the hot plasma generation device for spraying at nozzle is high Up to degree up to ten thousand, the particle for spraying is instantly melted or gasifies, then in flight course temperature decrease until get to substrate On be cooled into film, be not suitable for long scale homogeneous material and prepare or the application environments such as surface treatment.
Invention content
For the shortcoming of arc-plasma production method, the present invention provides a kind of long uniform heat plasmas of scale Body production method and device can effectively generate the uniform hot plasma of long scale using method and apparatus of the present invention Source, and can be used for uniformly implementing material preparation and process for treating surface, outstanding feature of the invention over long distances being that long scale is uniform Hot plasma source can provide long scale(30cm-1000cm)Uniform hot plasma(3000K-30000K)Environment, should Device need not use traveling electrode or multi-stage cascade electrode, need not additionally be passed through conductive liquid striking, generate purer Plasma atmosphere, which is easily achieved long scale homogeneous material and prepares or the applications such as surface treatment.
The technical solution adopted by the present invention is:
A kind of long scale uniform heat plasma arcs production method, which is characterized in that include the following steps:
Step S100, installation water-cooled cathode and water cooling anode, cathode installation base and anode mounting base are adjusted between water cooling cathode and anode Away from for 30cm to 1000cm;
Step S101 opens vacuum pump, air pressure in discharging chamber is evacuated to base vacuum 0.1Pa to 100Pa;
Step S102 is passed through working gas, and air pressure is to 10Pa to 300Pa in adjusting discharging chamber;
Step S103 opens cooling system, adjusts cooling water temperature and flow velocity in order to effectively cooling cathode, anode, cathode peace Seat, anode mounting base, discharging chamber outer wall are filled, air blast cooling gas flow plasma to be cooled is adjusted and chamber outer wall occurs;
Step S104, opens high power constant current DC power, and setting electric current exports 1A-6A, starts;
Step S105 after generating steady glow plasma, adjusts high power constant current DC power output current to 20A- 1000A;
Step S106 adjusts charge flow rate and vacuum pumping speed, adjusts in discharging chamber air pressure to 1000Pa-1atm;
Step S107, adjusting gas flow obtain the uniform and stable hot plasma electric arc of 30cm-1000cm long scales.
A kind of long scale uniform heat plasma arcs generation device, which is characterized in that including:Water-cooled cathode, cathode are fixed Seat, cathode terminal nylon fixing sleeve, lucite tube, anode tap nylon fixing sleeve, anode fixed seat, water cooling anode are vacuumized and are connect Mouth, anode terminal, quartz glass tube;The water-cooled cathode, water cooling anode are separately fixed at cathode fixed seat, anode fixed seat On, lower end, the anode fixed seat upper end of cathode fixed seat slot and are stuck in the both ends of quartz glass tube, quartz glass respectively Pipe is outer to be arranged with lucite tube, and stepped hole, cathode terminal are had on cathode terminal nylon fixing sleeve, anode tap nylon fixing sleeve Nylon fixing sleeve is applied mechanically for fixed negative pole end lucite tube and cathode fixed seat and quartz glass tube, the fixation of anode tap nylon In fixed anode end lucite tube and anode fixed seat and quartz glass tube;On anode fixed seat lower end and side wall respectively Connection vacuumizes interface, anode terminal, vacuumizes interface for connecting vacuum pump, anode terminal is for connecting power supply output Anode tap.
A kind of long scale uniform heat plasma arcs generation device, which is characterized in that the water-cooled cathode is thin Elongated structure is made of multistage Metal Material Welding;When the water-cooled cathode is for providing water-cooling channel with effective cooling electric discharge The high temperature that cathode generates;The elongated metal in water-cooled cathode top opens arc for generating required local highfield;Water cooling is cloudy The metal connecting piece of pole end is used for fixed power source cathode terminal;The water cooling anode is made of metal, and is formed between water-cooled cathode Hot plasma region of discharge.
A kind of long scale uniform heat plasma arcs generation device, which is characterized in that the cathode fixed seat is Cylindrical structure is made of metal material, for fixing water-cooled cathode;The cathode fixed seat includes water-cooling channel and air inlet Channel;Water-cooling channel is used to cool down cathode terminal temperature liter caused by the intense radiant heat generated after hot plasma generates and thermal convection current It is high;For inlet channel to be passed through working gas into discharging chamber, it is porous to be tangentially passed through mode that working gas, which is passed through mode,.
A kind of long scale uniform heat plasma arcs generation device, which is characterized in that the anode fixed seat by Metal material is made, and is used for jointed anode binding post;Anode fixed seat lower end forms sealing with interface is vacuumized.
A kind of long scale uniform heat plasma arcs generation device, which is characterized in that the cathode terminal nylon is solid Fixed set, anode tap nylon fixing sleeve are made of nylon material, cathode terminal nylon fixing sleeve and lucite tube, cathode fixed seat Vacuum sealing is respectively formed between quartz glass tube;Anode tap nylon fixing sleeve and lucite tube, anode fixed seat and quartzy glass It is respectively formed vacuum sealing between glass pipe.
A kind of long scale uniform heat plasma arcs generation device, which is characterized in that the lucite tube is Cylinder is made of organic glass, to maintain flowing and effective cooling effect of the cooling water outside quartz glass tube.
A kind of long scale uniform heat plasma arcs generation device, which is characterized in that the quartz glass tube is Cylinder is made of quartz, for generating vacuum discharge room and arc plasma discharge area.
A kind of long scale uniform heat plasma arcs generation device, which is characterized in that the water-cooled cathode it is more Section metal structure include:Striking column, water cooling plug, striking column fixing end, bailey wall, water cooling inner wall, water cooling water inlet, Cathode fixed column and water cooling outlet;Cooling water circulation channel is formed between the bailey wall and water cooling inner wall, it is whole for cooling down A cathode assembly, the end of bailey wall and side wall are tightly connected water cooling plug, water cooling water inlet respectively, water cooling inner wall end with Striking column fixing end is tightly connected, and striking column fixing end is to fixed striking column;The forward end seal connection cathode of bailey wall is solid Fixed column, cathode fixed column are used for fixed power source cathode terminal, and cathode fixed column is water cooling outlet simultaneously.
A kind of long scale uniform heat plasma arcs generation device, which is characterized in that in the cathode fixed seat Inlet channel in working gas to be passed through mode be that four holes are tangentially passed through mode, open up that there are four tangential admissions in cathode fixed seat Hole.
The present invention operation principle be:
By the present invention in that open arc technology with vacuum technique, structure optimization electrode and power supply high pressure, without adjust electrode structure and Position obtains long scale uniform heat plasma source without using conductive liquid, without using multi-stage cascade electrode.Directly The arc column area generated using fixed electrode is smaller, and utilizable heat plasma body region reduces;It opens after arc between elongated electrode Away from use multi-stage cascade electrode method that can lengthen arc column area, increase effective heat plasma body region, however need to move Moving electrode uses multi-level electrode, this will need heat plasma body device to carry out special design, needs to make if certain applications It is sealed against each other with dynamic sealing or multi-level water cooling electrode and series connection of insulating, increases the complexity of equipment;It is noted using conducting liquid Impurity may then be introduced by entering the method for plasma generating area, at the same the liquid of electric conductivity may corroding electrode material, Influence electrode life.The present invention adjusts pd values so that principle, the design of working gas breakdown voltage is greatly reduced using Paschen's law The electrode structure of special shape is superimposed high-voltage arc strike component to enhance internal field on the basis of customary DC power supply, It acts synergistically in terms of three above and then realize long range hot plasma arc opens arc, by gradually increasing after opening arc Discharge plasma is gradually transitioned into arc discharge pattern by the mode of operating air pressure and operating current by aura operating mode.It is logical It crosses flowing gas state in the optimizing regulation discharging chamber to intake method and is maintained at laminar condition, pass through gas-discharge zone at this time Electric current Stable distritation is reached due to self-constriction and Kelvin effect etc., and then realize plasma gas temperature between cathode anode Be uniformly distributed.By adjusting cathode, anode spacing adjusts hot plasma electric arc effective length;It is put by adjusting plasma Electrical pressure and discharge current adjust arc column area's temperature and its distribution;By adjusting the type of cooling outside discharge cavity and forcing cooling degree Adjust gas radial distribution in plasma;Realize that the different of plasma are made by adjusting working gas type in discharging chamber With with function.
It is an advantage of the invention that:
The present invention opens arc means synergistic effect using multiple, avoids traveling electrode, using multi-stage cascade electrode and introducing conduction The corrosion of plasma atmosphere pollution and electrode that liquid may be brought, greatly reduces long scale hot plasma electric arc and opens arc The difficulty in stage;Simultaneously by adjusting operating air pressure, working gas type, discharge current, the type of cooling and cold outside discharging chamber But it is controllable to obtain plasma length in discharging chamber, gas temperature and its spatial distribution for intensity, cathode and anode spacing etc. The different role and work(of hot plasma may be implemented in long scale uniform heat plasma arc, the adjustment of working gas type Can, convenient for being applied to the applications such as long scale homogeneous material preparation or surface treatment, while also allowing for providing relatively pure Hot plasma treatment region.This long scale uniform heat method of generating plasma and device reduce in electric arc start-up course Difficulty, further increase the range and controllability of uniform heat heating region, reduce the uniform heat plasma of long scale The generation difficulty in body arc source, improves the feasibility for meeting more application environments and flexibility.
Description of the drawings
Fig. 1 is long scale uniform heat plasma arcs production method embodiment flow diagram provided by the invention.
Fig. 2 is the example structure schematic diagram of long scale uniform heat plasma arcs generation device provided by the invention.
Fig. 3 is the cathode construction schematic diagram of long scale uniform heat plasma arcs generation device provided by the invention.
Fig. 4 is the air inlet ring structure schematic diagram of long scale uniform heat plasma arcs generation device provided by the invention.
Fig. 5 is long scale uniform heat plasma arcs generation device volt-ampere curve result of calculation provided by the invention(4A- 10A).
Specific implementation mode
With reference to the accompanying drawings and examples to technical scheme in the embodiment of the invention is clearly and completely described, Described embodiment is only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, All other embodiment obtained by those of ordinary skill in the art without making creative efforts, belongs to this item The protection domain of invention.
Embodiment
Fig. 1 is long scale uniform heat plasma arcs production method embodiment flow diagram provided by the invention, such as Fig. 1 It is shown:
In step S100, installation cathode and anode, cathode block and anode seat, adjusting anode and cathode spacing are 30cm to 1000cm.
In step S101, vacuum pump is opened, air pressure in discharging chamber is evacuated to base vacuum 0.1Pa to 100Pa.
In step S102, it is passed through working gas, air pressure is to 10Pa to 300Pa in adjusting discharging chamber.
In step S103, open cooling system, adjust cooling water temperature and flow velocity in order to effectively cooling cathode, anode, Cathode block, anode seat, discharging chamber outer wall adjust air blast cooling gas flow plasma to be cooled and chamber outer wall occur.
In step S104, high power constant current DC power is opened, setting electric current exports 1A-6A, starts.
In step S105, after generating steady glow plasma, electric power outputting current is adjusted to 20A-1000A.
In step S106, charge flow rate and vacuum pumping speed are adjusted, adjusts in discharging chamber air pressure to 1000Pa-1atm.
In step S107, adjusting gas flow obtains the uniform and stable hot plasma electric arc of 30cm-1000cm long scales.
Fig. 2 is the example structure schematic diagram of long scale uniform heat plasma arcs generation device provided by the invention, such as Shown in Fig. 2, which includes:Water-cooled cathode 01, cathode fixed seat 02, cathode terminal Buddhist nun Imperial fixing sleeve 03, anode tap nylon fixing sleeve 05, anode fixed seat 06, water cooling anode 07, vacuumizes interface at lucite tube 04 08, anode terminal 09, quartz glass tube 10.Water-cooled cathode 01, water cooling anode 07 are separately fixed at cathode fixed seat 02, anode In fixed seat 06, lower end, 06 upper end of anode fixed seat of cathode fixed seat 02 slot and are stuck in quartz glass tube 10 respectively Both ends, be arranged with lucite tube 04, cathode terminal nylon fixing sleeve 03, anode tap nylon fixing sleeve 05 outside quartz glass tube 10 On have a stepped hole, cathode terminal nylon fixing sleeve 03 for fixed negative pole end lucite tube 04 and cathode fixed seat 02 and Quartz glass tube 10, anode tap nylon fixing sleeve 05 is for fixed anode end lucite tube 04 and anode fixed seat 06 and quartz Glass tube 10;It is separately connected on 06 lower end of anode fixed seat and side wall and vacuumizes interface 08, anode terminal 09, vacuumized Interface 08 is for connecting vacuum pump, and anode terminal 09 is for connecting power supply output anode end.
Water-cooled cathode 01 is slender type, has multistage Metal Material Welding to be made;The water-cooled cathode 01 is logical for providing water cooling The high temperature that road is generated with cathode when effective cooling electric discharge;It is strong that the elongated metal in 01 top of water-cooled cathode is used to generate required part Electric field is convenient for opening arc;The metal connecting piece of 01 end of water-cooled cathode is used for fixed power source cathode terminal;Water-cooled cathode is by metal material It is made, such as copper, stainless steel, copper-tungsten.
Cathode fixed seat 02 is cylinder, is made of metal material, for fixing water-cooled cathode 01;Cathode fixed seat 02 is wrapped Contain water-cooling channel and air inlet port;Water-cooling channel is used to cool down the intense radiant heat generated after hot plasma generates and thermal convection current Caused cathode terminal temperature increases;For inlet channel to be passed through working gas into discharging chamber, it is 4 that working gas, which is passed through mode, Hole is tangentially passed through mode.
Cathode terminal nylon fixing sleeve 03 is made of nylon material, is fixed with cathode for fixed negative pole end lucite tube 04 Seat 02 and quartz glass tube 10, and in cathode terminal nylon fixing sleeve 03 and lucite tube 04, cathode fixed seat 02 and quartzy glass It is respectively formed vacuum sealing between glass pipe 10.
Lucite tube 04 is cylinder, is made of organic glass, to maintain cooling water outside quartz glass tube 10 Flowing and effective cooling effect.
Anode tap nylon fixing sleeve 05 is made of nylon material, is fixed with anode for fixed anode end lucite tube 04 Seat 06 and quartz glass tube 10, and in anode tap nylon fixing sleeve 05 and lucite tube 04, anode fixed seat 06 and quartzy glass It is respectively formed vacuum sealing between glass pipe 10.
Anode fixed seat 06 is made of metal material, and is used for jointed anode connecting pin 09;It is solid in 06 front end of anode fixed seat Determine water cooling anode 07;In 06 end of anode fixed seat and vacuumize the formation sealing of interface 08.
Anode 07 is made of metal, for forming hot plasma region of discharge between cathode 01.
It vacuumizes interface 08 to be made of metal, for connecting vacuum pump, discharging chamber is made to reach ideal vacuum degree.
Anode terminal 09 is made of metal, for connecting power supply output anode end.
Quartz glass tube 10, for cylinder, is made for generating vacuum discharge room and arc plasma discharge area by quartz At.
Fig. 3 is the cathode construction schematic diagram of long scale uniform heat plasma generating device provided by the invention, such as Fig. 3 institutes Show, which includes:Striking column 11, water cooling plug 12, striking column fixing end 13, bailey wall 14, water cooling inner wall 15, water Cold water inlet 16, cathode fixed column and water cooling outlet 17.It is logical that cooling water circulation is formed between bailey wall 14 and water cooling inner wall 15 Road, for cooling down entire cathode assembly, end and the side wall of bailey wall 14 are tightly connected water cooling plug 12 respectively, water cooling is intake Mouth 16,15 end of water cooling inner wall are tightly connected with striking column fixing end 13, and striking column fixing end 13 is to fixed striking column 11;Water The forward end seal of cold outer wall 14 connects cathode fixed column, and cathode fixed column is used for fixed power source cathode terminal, and cathode fixed column is simultaneously It is water cooling outlet 17.
Striking column 11 is cylinder, by metal(Copper-tungsten)It is made, to generate local forceful electric power on 11 top of striking column , have the function that striking.
Water cooling plug 12 is cylinder, by metal(Stainless steel)It is made, between bailey wall 14 and water cooling inner wall 15 Water-cooling channel is formed, achievees the effect that Water-cooling circulating and sealing.
Striking column fixing end 13 is by metal(Stainless steel)Be made, to fixed striking column 11, because its good electric conductivity with The almost same current potential of striking column 11.
Bailey wall 14 is cylinder, by metal(Stainless steel)It is made, is used to form cooling water circulation, cooling entire cathode Component;Bailey wall 14 and water cooling plug 12,16 welded seal of water cooling water inlet
Water cooling inner wall 15 is cylinder, by metal(Stainless steel)It is made, is used to form cooling water circulation, cooling entire negative pole part Part;Water cooling inner wall 15 and 13 welded seal of striking column fixing end.
Water cooling water inlet 16 is by metal(Stainless steel)It is made, for being passed through cooling water.
Cathode fixed column 17 is by metal(Stainless steel)It is made, is used for fixed power source cathode terminal;Cathode fixed column 17 is simultaneously Water cooling exports, and cooling water is made to form cycle in cathod system.
Fig. 4 provides the air inlet ring structure schematic diagram of long scale uniform heat plasma generating device provided by the invention, such as Shown in Fig. 4, which includes four tangential admission holes 18.
Fig. 5 provides long scale uniform heat plasma generating device volt-ampere curve result of calculation provided by the invention(4- 10A).

Claims (10)

1. a kind of long scale uniform heat plasma arcs production method, which is characterized in that include the following steps:
Step S100, installation water-cooled cathode and water cooling anode, cathode installation base and anode mounting base are adjusted between water cooling cathode and anode Away from for 30cm to 1000cm;
Step S101 opens vacuum pump, air pressure in discharging chamber is evacuated to base vacuum 0.1Pa to 100Pa;
Step S102 is passed through working gas, and air pressure is to 10Pa to 300Pa in adjusting discharging chamber;
Step S103 opens cooling system, adjusts cooling water temperature and flow velocity in order to effectively cooling cathode, anode, cathode peace Seat, anode mounting base, discharging chamber outer wall are filled, air blast cooling gas flow plasma to be cooled is adjusted and chamber outer wall occurs;
Step S104, opens high power constant current DC power, and setting electric current exports 1A-6A, starts;
Step S105 after generating steady glow plasma, adjusts high power constant current DC power output current to 20A- 1000A;
Step S106 adjusts charge flow rate and vacuum pumping speed, adjusts in discharging chamber air pressure to 1000Pa-1atm;
Step S107, adjusting gas flow obtain the uniform and stable hot plasma electric arc of 30cm-1000cm long scales.
2. a kind of long scale uniform heat plasma arcs generation device, which is characterized in that including:Water-cooled cathode, cathode fixed seat, Cathode terminal nylon fixing sleeve, lucite tube, anode tap nylon fixing sleeve, anode fixed seat, water cooling anode, vacuumize interface, Anode terminal, quartz glass tube;The water-cooled cathode, water cooling anode are separately fixed at cathode fixed seat, in anode fixed seat, Lower end, the anode fixed seat upper end of cathode fixed seat slot and are stuck in the both ends of quartz glass tube, quartz glass tube respectively It is arranged with lucite tube outside, stepped hole, cathode terminal Buddhist nun are had on cathode terminal nylon fixing sleeve, anode tap nylon fixing sleeve Imperial fixing sleeve is used for for fixed negative pole end lucite tube and cathode fixed seat and quartz glass tube, anode tap nylon fixing sleeve Fixed anode end lucite tube and anode fixed seat and quartz glass tube;Connect respectively on anode fixed seat lower end and side wall It connects and vacuumizes interface, anode terminal, vacuumize interface for connecting vacuum pump, anode terminal is for connecting power supply output sun Extremely.
3. a kind of long scale uniform heat plasma arcs generation device according to claim 2, which is characterized in that the water Cold cathode is slender structure, is made of multistage Metal Material Welding;The water-cooled cathode is for providing water-cooling channel with effective The high temperature that cathode generates when cooling electric discharge;The elongated metal in water-cooled cathode top is opened for generating required local highfield Arc;The metal connecting piece of water-cooled cathode end is used for fixed power source cathode terminal;The water cooling anode is made of metal, with water cooling the moon Interpolar forms hot plasma region of discharge.
4. a kind of long scale uniform heat plasma arcs generation device according to claim 2, which is characterized in that described the moon Pole fixed seat is cylindrical structure, is made of metal material, for fixing water-cooled cathode;The cathode fixed seat includes water cooling Channel and inlet channel;Water-cooling channel is used to cool down cloudy caused by the intense radiant heat generated after hot plasma generates and thermal convection current Extreme temperature increases;For inlet channel to be passed through working gas into discharging chamber, it is porous tangential that working gas, which is passed through mode, It is passed through mode.
5. a kind of long scale uniform heat plasma arcs generation device according to claim 2, which is characterized in that the sun Pole fixed seat is made of metal material, and is used for jointed anode binding post;Anode fixed seat lower end forms sealing with interface is vacuumized.
6. a kind of long scale uniform heat plasma arcs generation device according to claim 2, which is characterized in that described the moon Extreme nylon fixing sleeve, anode tap nylon fixing sleeve are made of nylon material, cathode terminal nylon fixing sleeve and lucite tube, It is respectively formed vacuum sealing between cathode fixed seat and quartz glass tube;Anode tap nylon fixing sleeve is fixed with lucite tube, anode It is respectively formed vacuum sealing between seat and quartz glass tube.
7. a kind of long scale uniform heat plasma arcs generation device according to claim 2, which is characterized in that described to have Machine glass tube is cylinder, is made of organic glass, to maintain flowing of the cooling water outside quartz glass tube and effectively cooling Effect.
8. a kind of long scale uniform heat plasma arcs generation device according to claim 2, which is characterized in that the stone English glass tube is cylinder, is made of quartz, for generating vacuum discharge room and arc plasma discharge area.
9. a kind of long scale uniform heat plasma arcs generation device according to claim 3, which is characterized in that the water The multistage metal structure of cold cathode includes:Striking column 11, water cooling plug 12, striking column fixing end 13, bailey wall 14, water Cold inner wall 15, water cooling water inlet 16, cathode fixed column and water cooling outlet 17;It is formed between the bailey wall and water cooling inner wall cold But water circulation channel, for cooling down entire cathode assembly, end and the side wall of bailey wall are tightly connected water cooling plug, water respectively Cold water inlet, water cooling inner wall end are tightly connected with striking column fixing end, and striking column fixing end is to fixed striking column;Outside water cooling The forward end seal of wall connects cathode fixed column, and cathode fixed column is used for fixed power source cathode terminal, and cathode fixed column is simultaneously water cooling Outlet.
10. a kind of long scale uniform heat plasma arcs generation device according to claim 4, which is characterized in that described It is that four holes are tangentially passed through mode that working gas, which is passed through mode, in inlet channel in cathode fixed seat, and cathode fixed seat is equipped with band Four tangential admission holes into compression ring.
CN201810233819.0A 2018-03-21 2018-03-21 Long-scale uniform thermal plasma arc generation method and device Active CN108601193B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109743832A (en) * 2018-11-30 2019-05-10 西安航天动力研究所 A kind of large power long service life plasma torch composite cooling apparatus and design method
CN113727507A (en) * 2021-08-17 2021-11-30 哈尔滨工业大学 Multi-channel arc plasma source cascade copper sheet water cooling device and optimization method thereof

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06184732A (en) * 1991-03-22 1994-07-05 Kansai Electric Power Co Inc:The Highly corrosion resistant aluminum thin film for molten carbonate fuel battery
CN103489487A (en) * 2013-09-11 2014-01-01 曾泓瑞 Pulse discharging operating nuclear fusion reaction method and reaction device of pulse discharging operating nuclear fusion reaction
CN203645904U (en) * 2013-12-04 2014-06-11 新疆天业(集团)有限公司 Rotary torch head device of plasma torch
CN104202900A (en) * 2012-08-19 2014-12-10 周开根 Internal-arc plasma torch for thermal decomposition
CN104838730A (en) * 2012-10-01 2015-08-12 弗雷特等离子实验室公司 Plasma arc torch having multiple operation modes
CN105025649A (en) * 2015-07-06 2015-11-04 山西大学 Device and method for generating inductive coupling hot plasma under low air pressure
CN105555005A (en) * 2016-02-16 2016-05-04 衢州迪升工业设计有限公司 Plasma pyrolysis device of telescopic striking arc
CN205336640U (en) * 2016-02-16 2016-06-22 衢州迪升工业设计有限公司 Plasma pyrolysis device of telescopic striking
CN205681688U (en) * 2016-06-15 2016-11-09 大连大学 A kind of plate board-like dielectric barrier discharge plasma device
CN106714437A (en) * 2015-08-18 2017-05-24 南京理工大学 Input-power-adjustable dual-anode arc heating plasma torch

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06184732A (en) * 1991-03-22 1994-07-05 Kansai Electric Power Co Inc:The Highly corrosion resistant aluminum thin film for molten carbonate fuel battery
CN104202900A (en) * 2012-08-19 2014-12-10 周开根 Internal-arc plasma torch for thermal decomposition
CN104838730A (en) * 2012-10-01 2015-08-12 弗雷特等离子实验室公司 Plasma arc torch having multiple operation modes
CN103489487A (en) * 2013-09-11 2014-01-01 曾泓瑞 Pulse discharging operating nuclear fusion reaction method and reaction device of pulse discharging operating nuclear fusion reaction
CN203645904U (en) * 2013-12-04 2014-06-11 新疆天业(集团)有限公司 Rotary torch head device of plasma torch
CN105025649A (en) * 2015-07-06 2015-11-04 山西大学 Device and method for generating inductive coupling hot plasma under low air pressure
CN106714437A (en) * 2015-08-18 2017-05-24 南京理工大学 Input-power-adjustable dual-anode arc heating plasma torch
CN105555005A (en) * 2016-02-16 2016-05-04 衢州迪升工业设计有限公司 Plasma pyrolysis device of telescopic striking arc
CN205336640U (en) * 2016-02-16 2016-06-22 衢州迪升工业设计有限公司 Plasma pyrolysis device of telescopic striking
CN205681688U (en) * 2016-06-15 2016-11-09 大连大学 A kind of plate board-like dielectric barrier discharge plasma device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109743832A (en) * 2018-11-30 2019-05-10 西安航天动力研究所 A kind of large power long service life plasma torch composite cooling apparatus and design method
CN109743832B (en) * 2018-11-30 2021-03-23 西安航天动力研究所 High-power long-life plasma torch composite cooling device and design method
CN113727507A (en) * 2021-08-17 2021-11-30 哈尔滨工业大学 Multi-channel arc plasma source cascade copper sheet water cooling device and optimization method thereof

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