CN108557419A - Elevator, process cavity equipment and its control method - Google Patents
Elevator, process cavity equipment and its control method Download PDFInfo
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- CN108557419A CN108557419A CN201810549693.8A CN201810549693A CN108557419A CN 108557419 A CN108557419 A CN 108557419A CN 201810549693 A CN201810549693 A CN 201810549693A CN 108557419 A CN108557419 A CN 108557419A
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- process cavity
- elevator
- supported object
- support device
- bellows
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- 238000000034 method Methods 0.000 title claims abstract description 110
- 230000008569 process Effects 0.000 title claims abstract description 87
- 230000009467 reduction Effects 0.000 claims abstract description 24
- 239000000565 sealant Substances 0.000 claims description 17
- 238000007789 sealing Methods 0.000 claims description 13
- 230000032258 transport Effects 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 8
- 238000009434 installation Methods 0.000 abstract description 6
- 230000033001 locomotion Effects 0.000 description 11
- 238000010586 diagram Methods 0.000 description 10
- 230000003028 elevating effect Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 241000237858 Gastropoda Species 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/82—Rotary or reciprocating members for direct action on articles or materials, e.g. pushers, rakes, shovels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/04—Detection means
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
Abstract
The present invention relates to a kind of elevator, process cavity equipment and its control method, which includes：Driving device；Support device connects the driving device, and the driving device drives the support device reduction；Saddle is connect with the support device, and reduction is carried out under the drive of the support device.Structure is simple and easy to implement for the technical solution, and installation is also simple.
Description
Technical field
The present invention relates to field of mechanical technique more particularly to elevator, process cavity equipment and its control methods.
Background technology
In solar energy evacuated equipment, it is often necessary to which substrate is sent into the chamber of process cavity by some manipulators, process cavity
Picking-up device in equipment rises after holding substrate, and manipulator can exit vacuum chamber, completes a substrate by outside to true
The transmission of empty room.The picking-up device is mostly to use worm gear structure or ball screw arrangement, by motor as power source, in snail
Guide frame is installed between worm and gear structure or ball screw arrangement and motor, the power that the motor provides is guided to make worm gear snail
Rod structure or ball screw arrangement realize movement up and down reciprocatingly, and installation is more complicated, and adjusts trouble.
Invention content
The embodiment of the present invention provides elevator, process cavity equipment and its control method.The technical solution is as follows：
According to a first aspect of the embodiments of the present invention, a kind of elevator is provided, including：
Driving device；
Support device connects the driving device, and the driving device drives the support device reduction；
Saddle is connect with the support device, and reduction is carried out under the drive of the support device.
In one embodiment, the driving device includes electronic slide unit.
In one embodiment, the saddle includes：
Supporting plate is connect with described support device one end；
Stud is set to the supporting plate, is used to support supported object.
In one embodiment, the support device includes：
Bellows；
Upper flange is connect with one end of the bellows；
Lower flange is connect with the other end of the bellows；
Inner prop is connect with the driving device, and the inner prop is set in the bellows, one end of the inner prop with
The bellows is fixedly connected by lower flange；The other end of the inner prop passes through the upper flange of described bellows one end.
In one embodiment, the upper flange is equipped with seal groove.
In one embodiment, the elevator further includes：
Fixed frame connects the driving device, for the elevator to be fixed on predeterminated position.
According to a second aspect of the embodiments of the present invention, a kind of process cavity equipment, including above-mentioned elevator and technique are provided
Chamber；
Wherein, the process cavity is provided with trepanning, and the support device of the elevator passes through the trepanning, and the saddle
It is set in the process cavity.
In one embodiment, the process cavity is vacuum chamber；The process cavity equipment further includes：
Sealant is arranged around the trepanning, for sealing the gap between the trepanning and the support device.
In one embodiment, the support device includes bellows, the upper flange being connect with one end of the bellows；
The lower flange being connect with the other end of the bellows；
The upper flange is set to around the trepanning；
The sealant is set to the upper flange.
In one embodiment, the upper flange is equipped with seal groove towards trepanning one side；The sealant is set to
In the seal groove.
In one embodiment, including at least two elevators；The bottom of the process cavity corresponds to each elevator
There are one trepannings for setting.
In one embodiment, the process cavity equipment further includes：
Transmitting device is used for transmission supported object；
Position detecting device, for detecting the supported object location information；
Control device, the supported object location information for being detected according to the position detecting device and the control
Difference in device between pre-stored preset position information controls the transmitting device and elevator.
According to a third aspect of the embodiments of the present invention, a kind of control method of process cavity equipment is provided, is applied to above-mentioned
Process cavity equipment, the method includes：
When position detecting device detects that transmitting device transports supported object to the first predeterminated position, control device control
The driving device driving support device of elevator processed drives saddle to rise so that the supported object is detached from the transmitting device；
When the position detecting device detects that supported object has disengaged from the location information of the transmitting device, the control
Device processed controls the transmitting device and leaves the process cavity；
After the transmitting device leaves process cavity, the driving device driving support dress of the control device control elevator
It sets and the supported object on saddle is driven to move to the second predeterminated position.
The technical solution that the embodiment of the present invention provides can include the following benefits：The present embodiment can be filled by driving
It sets and support device is driven to carry out elevating movement, reduction fortune can be carried out under the drive of support device by placing the saddle of supported object
It is dynamic, it so realizes and the supported object is driven to carry out reduction campaign, structure is simple and easy to implement, and installation is also simple.
It should be understood that above general description and following detailed description is only exemplary and explanatory, not
It can the limitation present invention.
Description of the drawings
The drawings herein are incorporated into the specification and forms part of this specification, and shows the implementation for meeting the present invention
Example, and be used to explain the principle of the present invention together with specification.
Fig. 1 is a kind of structural schematic diagram of elevator shown according to an exemplary embodiment.
Fig. 2 is a kind of structural schematic diagram of elevator shown according to an exemplary embodiment.
Fig. 3 is a kind of structural schematic diagram of support device shown according to an exemplary embodiment.
Fig. 4 is a kind of structural schematic diagram of elevator shown according to an exemplary embodiment.
Fig. 5 is a kind of structural schematic diagram of process equipment shown according to an exemplary embodiment.
Fig. 6 is that a kind of supported object shown according to an exemplary embodiment is illustrated from the external transfer process for being put into saddle
Figure.
Fig. 7 is a kind of flow chart of the control method of process cavity equipment shown according to an exemplary embodiment.
Specific implementation mode
Example embodiments are described in detail here, and the example is illustrated in the accompanying drawings.Following description is related to
When attached drawing, unless otherwise indicated, the same numbers in different drawings indicate the same or similar elements.Following exemplary embodiment
Described in embodiment do not represent and the consistent all embodiments of the present invention.On the contrary, they be only with it is such as appended
The example of the consistent device and method of some aspects being described in detail in claims, of the invention.
Fig. 1 is a kind of structural schematic diagram of elevator shown according to an exemplary embodiment, as shown in Figure 1, the lifting
Machine 1 includes driving device 10；Support device 11 connects the driving device 10, and the driving device 10 drives the support to fill
Set 11 reductions；Saddle 12 is connect with the support device 11, and reduction is carried out under the drive of the support device 11；It is exemplary,
The saddle 12 can be fixed on the top of support device 11.
Here, which can be any device that support device 11 can be driven to do reduction campaign, here
The elevating movement that reduction can be vertically oriented can also be the left and right stretching motion in horizontal direction；Can be according to reality
Border needs to place elevator 1 so that the support device 11 carries out reduction under the driving of driving device 10.
The present embodiment can drive support device reduction, saddle that can be carried out under the drive of support device by driving device
Reduction is so realized and the supported object on saddle is driven to carry out reduction, and structure is simple and easy to implement, and installation is also simple.
In a kind of possible embodiment, the driving device 10 can be electronic slide unit.
Here, which is made of straight line slide unit and motor driving, and motor driving can drive on straight line slide unit
Sliding block move in a straight line, as shown in Figure 1, the driving device 10 in the present embodiment be sliding block 101 in electronic slide unit can be
The reciprocating motion of reduction is done under the drive of motor driving, the connection support device 11 of sliding block 101 on the electronic slide unit, therefore sliding block
101 can drive 11 reduction of support device when doing reduction；The saddle 12 is connect with the support device 11, is such as fixed on support
The top of device 11, therefore support device 11 can drive 12 reduction of saddle in the support device 11 in reduction, on the saddle 12
Supported object can be placed, in this way, this elevator 1 can drive the supported object to carry out reduction campaign, this is transmitted and is supported
Object.
The present embodiment can drive support device to carry out elevating movement by electronic slide unit, and the saddle that place supported object can be with
Elevating movement is carried out under the drive of support device, so realizes and the supported object is driven to carry out elevating movement, it is simple in structure easy
It realizes, installation is also simple.
In a kind of possible embodiment, Fig. 2 is that a kind of structure of elevator shown according to an exemplary embodiment is shown
It is intended to, as shown in Fig. 2, the saddle 12 includes supporting plate 121 and stud 122, which connects with 11 one end of the support device
It connects, exemplary, which can be located at the top of the support device 11；Stud 122 is set to the supporting plate 121, is used for
Supported object is supported, exemplary, stud 122 can be arranged in the upper surface of the supporting plate 121；The supporting plate 121 is used as stud 122
Fulcrum, fulcrum of the stud 122 as supported object.
Here, the stud 122 being arranged on supporting plate 121 can facilitate the transmitting devices such as manipulator to be placed on supported object
Stud 122 can rise a distance after stud 122 holds the supported object, which will not allow supporting plate 121 to encounter machine
Tool hand, and the supported object is made to leave manipulator, allow the transport means such as manipulator may exit off；Certainly, which is also convenient for machine
Tool hand is from holding upper taking-up supported object；Complete the handing-over of supported object.
Here, the distribution of the stud 122 does not interfere with the movement of the transport means such as the manipulator, the stud on supporting plate 121
122 can carry out position distribution according to actual needs, such as can be according to the distribution of weight for the supported object that it bears, what is born
The stud 122 can be uniformly distributed on supporting plate 121 when the distribution of weight of supported object is uniform, in the weight of the supported object born
When amount is unevenly distributed, which can be arranged according to the weight born, and such as bearing the big local stud 122 of weight can
With some more of distribution, the big local stud 122 of weight can be distributed less, etc..
The saddle of the present embodiment includes the stud of the supporting plate being arranged at the top of support device and splint upper surface setting, convenient
The transmitting devices such as external manipulator pick and place supported object from stud.
In a kind of possible embodiment, Fig. 3 is a kind of structure of support device shown according to an exemplary embodiment
Schematic diagram, as shown in figure 3, the support device 11 includes bellows 111, inner prop 112, upper flange 113 and lower flange 114, on
Flange 113 is connect with one end of the bellows 111；Lower flange 114 is connect with the other end of the bellows 111；The inner prop
112 connect with the driving device 10, and the inner prop 112 is set in the bellows 111, one end of the inner prop 112
It is fixedly connected by lower flange 114 with the bellows 111；The other end of the inner prop 112 passes through 111 one end of the bellows
Upper flange 113.
Here, when the elevator 1 is arranged in the vacuum chamber, a trepanning can be arranged in the bottom of vacuum chamber, the elevator 1
Support device passes through the trepanning, allows the saddle to be located in the cavity of vacuum chamber, at this point, can on the upper flange of the bellows 111
The gap between the trepanning and support device is sealed so that a sealant is arranged, realizes the sealing to vacuum chamber；The bellows 111
Lower flange 114 for realizing the connection between bellows 111 and inner prop 112, when inner prop 112 carries out reduction, the lower flange
114 are just connected to the bottom of vacuum chamber all the time by sealant, and the tube body of bellows 111 can with inner prop 112 reduction into
Row stretches or compression.
The support device of the present embodiment includes bellows, the upper flange being connect with one end of the bellows, with the wave
The lower flange of the other end connection of line pipe, is located at the inner prop of the bellows interior；It is arranged in vacuum chamber equipment in the elevator
When middle, sealant can be set on the upper flange of the bellows, seal the gap between vacuum chamber bottom opening and inner prop, realized
Sealing to vacuum chamber.
In a kind of possible embodiment, as shown in figure 3, the upper flange 113 is equipped with seal groove 1131.
The present embodiment can set seal groove in upper flange, which can be used for being arranged sealant, convenient to vacuum chamber
Sealing.
In a kind of possible embodiment, Fig. 4 is a kind of structure of elevator shown according to an exemplary embodiment
Schematic diagram, as shown in figure 4, the elevator 1 further includes fixed frame 13, which connects the driving device 10, is used for
The elevator 1 is fixed on predeterminated position.
The present embodiment can be provided with the fixed frame for connecting the driving device, facilitate the elevator being fixed on default position
It sets.
The present embodiment also provides a kind of process cavity equipment, and Fig. 5 is that a kind of technique shown according to an exemplary embodiment is set
Standby structural schematic diagram, the process equipment include any of the above-described elevator 1 and process cavity 2.
Wherein, the bottom of the process cavity 2 is provided with trepanning 21, and the support device 11 of the elevator 1 passes through described open
Hole 21, the saddle 12 are set in the process cavity 2, in this way, after supported object is placed on saddle 12 by external manipulator,
The saddle 12 of the elevator 1 can drive supported object to lift, and adjust the position of supported object.
Here, saddle 12 may include supporting plate 121 and stud 122, and the stud 122 being arranged on supporting plate 121 can facilitate
Supported object is placed on stud 122 by the transport means such as manipulator, exemplary, and Fig. 6 is shown according to an exemplary embodiment
A kind of supported object is put into the transmission schematic diagram of saddle from outside, and as shown in A figures in Fig. 6, external manipulator 3 is by supported object 4
It is sent into process cavity 2, supported object is placed on to the stud 122 of the saddle 12 at 11 top of support device, which can facilitate
Supported object is placed on movement of the stud 122 without hindering manipulator by the transport means such as manipulator；Then, such as B figures in Fig. 6
Shown, which can drive saddle 12 to rise so that supported object 4 and manipulator 3 are detached from, then, as C schemes in Fig. 6
Shown, manipulator 3 withdraws from the process cavity 2, and the stud 122 being arranged on saddle 12 can facilitate manipulator to exit the process cavity, machine
After tool hand 3 exits, saddle 12 can drive the lifting of supported object 4 to adjust the position of supported object 4, it is made to facilitate process cavity
Process is carried out to the supported object.
Certainly, with reference to figure 6, after supported object 4 carries out process in process cavity 2, manipulator 3 can enter technique
Chamber, elevator can control saddle 12 and the supported object 4 are placed on manipulator 3, then control saddle and decline a distance,
So that supported object 4 and saddle 12 are detached from, then, manipulator 3 can exit the technique with the supported object 4 from inlet and outlet
Chamber, into next process.
The present embodiment can be provided with trepanning in the bottom of process cavity, and the support device of elevator passes through the trepanning, and
Saddle is located in process cavity, which can be placed into the supported object of process cavity, which can drive as needed
Supported object on saddle is lifted, and structure is simple and easy to implement, and installation is also simple.
In a kind of possible embodiment, the process cavity 2 includes vacuum chamber；At this point, the process cavity equipment further includes：
Sealant is arranged around the trepanning 21, for sealing the gap between the trepanning and the support device.
Sealant can also be arranged around the trepanning in the present embodiment, come seal the trepanning and the support device it
Between gap, realize sealing to vacuum chamber.
In a kind of possible embodiment, as shown in figure 3, the support device 11 includes bellows 111, with the ripple
The upper flange 113 of one end connection of pipe 111；The lower flange 114 being connect with the other end of the bellows 111；As shown in figure 5,
The upper flange 113 is set to around the trepanning 21；The sealant 3 is set to the upper flange 113, for sealing
State the gap between trepanning 21 and the support device.
Here, one end of the inner prop 112 in the support device is fixedly connected with the bellows 111 by lower flange 114,
The other end of the inner prop 112 passes through the upper flange 113 of 111 one end of the bellows, in this way, sealant 3 can be with seal and opening
Gap between 21 and the bellows 111, being fixedly connected between lower flange 114 and inner prop 112 can be the sealings such as welding
Connection ensures the sealing in bellows 111, so ensures the vacuum environment in vacuum chamber.
The support device of the present embodiment includes bellows and the upper flange that is connect with one end of the bellows；With it is described
The lower flange of the other end connection of bellows, can be arranged sealant on the upper flange of the bellows, facilitate setting for sealant
It sets.
In a kind of possible embodiment, as shown in figure 3, the upper flange 113 is equipped with sealing towards trepanning one side
Slot 1131；The sealant 3 can be set in the seal groove 1131.
The present embodiment can set seal groove on one side in upper flange towards the trepanning, which can be used for that sealing is arranged
Layer, the convenient sealing to vacuum chamber.
In a kind of possible embodiment, which may include at least two elevators；The technique
The bottom of chamber corresponds to each elevator setting there are one trepanning, and the support device of each elevator can pass through corresponding trepanning, make
The saddle of each elevator is located in the cavity of process cavity.
Here, when supported object is larger, and the supported object can not be held up using an elevator, which can
At least two elevators are arranged, which controls the movement in the same direction synchronized simultaneously of each saddle, ensures each saddle fortune
Dynamic synchronism so that each saddle can be lifted with supported object simultaneously.
The process cavity equipment of the present embodiment may include at least two elevators, can transport larger be supported
Object.
In a kind of possible embodiment, the process cavity equipment further includes：Transmitting device is used for transmission supported object；
Position detecting device, for detecting the supported object location information；Control device, for being examined according to the position detecting device
Difference in the supported object location information and the control device surveyed between pre-stored preset position information, control
The transmitting device and elevator.
Here it is possible to reference to figure 6, as shown in A figures in Fig. 6, supported object 4 can be sent by transmitting device such as manipulator 3
Process cavity 2, position detecting device can detect supported object location information on transmitting device, default position prestored in control device
Confidence breath such as the first predeterminated position and the second predeterminated position, control device can be according to described in position detecting device detection
Difference in supported object location information and the control device between pre-stored first predeterminated position, controlling transmission device
Supported object is transported to the surface of the stud 122 of saddle 12 shown in the first predeterminated position i.e. A figures, it is then possible to control
The support device 11 of elevator 1 drives saddle 12 to rise so that supported object 4 is detached from transmitting device, that is, manipulator 3；Then, such as
In Fig. 6 shown in C figures, after transmitting device such as manipulator 3 leave the process cavity 2, control device can be filled according to the position detection
The difference between pre-stored second predeterminated position in the supported object location information and the control device of detection is set,
The support device 11 of control elevator 1 drives the supported object 4 on saddle to move to the second predeterminated position, second predeterminated position
Process cavity can be facilitated to carry out process to the supported object 4.
The supported object location information that the present embodiment can be detected by control device according to the position detecting device
With the difference between pre-stored preset position information in the control device, the transmitting device and elevator are controlled, is made
It obtains the supported object to be transferred at the position for facilitating process cavity, facilitates the supported object by process.
The present embodiment also provides a kind of control method of process cavity equipment, and Fig. 7 is shown according to an exemplary embodiment
A kind of flow chart of the control method of process cavity equipment, as shown in fig. 7, the control method is used in above-mentioned process cavity equipment,
Include the following steps 701 to 703：
In step 701, when position detecting device detects that transmitting device transports supported object to the first predeterminated position
When, the driving device driving support device that control device controls elevator drives saddle to rise so that the supported object is detached from
The transmitting device.
In a step 702, when the position detecting device detects that supported object has disengaged from the position of the transmitting device
When information, the control device controls the transmitting device and leaves the process cavity.
In step 703, after the transmitting device leaves process cavity, the driving dress of the control device control elevator
Setting driving support device drives the supported object on saddle to move to the second predeterminated position.
Here it is possible to reference to figure 6, as shown in A figures in Fig. 6, supported object 4 is sent into technique by transmitting device such as manipulator 3
When chamber 2, position detecting device can detect the position of supported object on transmitting device, when position detecting device detects transmission dress
Set by supported object transport to when the first predeterminated position i.e. the surface of the stud 122 of saddle 12 shown in A figures when, such as B in Fig. 6
Shown in figure, the driving device 10 that control device can control elevator 1 drives support device 11 that saddle 12 is driven to rise so that quilt
Supporter 4 is detached from transmitting device, that is, manipulator 3；When the position detecting device detects that supported object 4 has disengaged from the transmission
When the location information of device, that is, manipulator 3, the control device can control the transmitting device and leave the process cavity；So
Afterwards, as shown in C figures in Fig. 6, after transmitting device such as manipulator 3 leave the process cavity 2, control device can control elevator 1
Driving device driving support device 11 drives the supported object 4 on saddle to move to the second predeterminated position, second predeterminated position
Process cavity can be facilitated to carry out process to the supported object 4.
What needs to be explained here is that after the completion of process cavity equipment is to the technique of the supported object, can be transmitted by other
Device coordinates the elevator in process cavity to take out, naturally it is also possible to the lifting in process cavity with the transmitting device of this process cavity
Machine takes out, and is illustrated so that the elevator with the transmitting device from this process cavity in process cavity takes out as an example here, again referring to
Fig. 6 is detecting the transmitting device i.e. manipulator 3 after the completion of technique of the process cavity equipment to the supported object 4
Move to third predeterminated position i.e. the underface of supported object 4 when, control device can control elevator 1 driving device 10 drive
Dynamic support device 11 drives saddle 12 to decline, and the supported object 4 is placed on the transmitting device i.e. manipulator 3 so that
The supported object is detached from the saddle 12, and then, control device can control the transmitting device i.e. manipulator 3 and will be supported
Object is transported out the process cavity equipment；Into next process.
The present embodiment can detect that transmitting device transports supported object to the first predeterminated position in position detecting device
When, the driving device driving support device that control device controls elevator drives saddle to rise so that the supported object is detached from
The transmitting device；When the position detecting device detects that supported object has disengaged from the location information of the transmitting device,
The control device controls the transmitting device and leaves the process cavity；After the transmitting device leaves process cavity, the control
The driving device driving support device of device control elevator processed drives the supported object on saddle to move to the second predeterminated position；
It so completes supported object and enters operation in process cavity so that the supported object is transferred at the position for facilitating process cavity,
Facilitate the supported object by process..
Those skilled in the art will readily occur to its of the present invention after considering specification and putting into practice disclosure disclosed herein
Its embodiment.This application is intended to cover the present invention any variations, uses, or adaptations, these modifications, purposes or
Person's adaptive change follows the general principle of the present invention and includes undocumented common knowledge in the art of the invention
Or conventional techniques.The description and examples are only to be considered as illustrative, and true scope and spirit of the invention are by following
Claim is pointed out.
It should be understood that the invention is not limited in the precision architectures for being described above and being shown in the accompanying drawings, and
And various modifications and changes may be made without departing from the scope thereof.The scope of the present invention is limited only by the attached claims.
Claims (13)
1. a kind of elevator, which is characterized in that including：
Driving device；
Support device connects the driving device, and the driving device drives the support device reduction；
Saddle is connect with the support device, and reduction is carried out under the drive of the support device.
2. elevator according to claim 1, which is characterized in that
The driving device includes electronic slide unit.
3. elevator according to claim 1, which is characterized in that the saddle includes：
Supporting plate is connect with described support device one end；
Stud is set to the supporting plate, is used to support supported object.
4. elevator according to claim 1, which is characterized in that the support device includes：
Bellows；
Upper flange is connect with one end of the bellows；
Lower flange is connect with the other end of the bellows；
Inner prop is connect with the driving device, and the inner prop is set in the bellows, one end of the inner prop with it is described
Bellows is fixedly connected by lower flange；The other end of the inner prop passes through the upper flange of described bellows one end.
5. elevator according to claim 4, which is characterized in that the upper flange is equipped with seal groove.
6. elevator according to claim 1, which is characterized in that the elevator further includes：
Fixed frame connects the driving device, for the elevator to be fixed on predeterminated position.
7. a kind of process cavity equipment, which is characterized in that including claim 1 to 6 any one of them elevator and process cavity；
Wherein, the process cavity is provided with trepanning, and the support device of the elevator passes through the trepanning, and the saddle is arranged
In in the process cavity.
8. process cavity equipment according to claim 7, which is characterized in that the process cavity is vacuum chamber；The process cavity
Equipment further includes：
Sealant is arranged around the trepanning, for sealing the gap between the trepanning and the support device.
9. process cavity equipment according to claim 8, which is characterized in that the support device includes bellows, and described
The upper flange of one end connection of bellows；The lower flange being connect with the other end of the bellows；
The upper flange is set to around the trepanning；
The sealant is set to the upper flange.
10. process cavity equipment according to claim 9, which is characterized in that the upper flange is set on one side towards the trepanning
There is seal groove；The sealant is set in the seal groove.
11. according to claim 7 to 10 any one of them process cavity equipment, which is characterized in that including at least two liters
Drop machine；The bottom of the process cavity corresponds to each elevator setting, and there are one trepannings.
12. process cavity equipment according to claim 7, which is characterized in that the process cavity equipment further includes：
Transmitting device is used for transmission supported object；
Position detecting device, for detecting the supported object location information；
Control device, the supported object location information for being detected according to the position detecting device and the control device
Difference between interior pre-stored preset position information, controls the transmitting device and elevator.
13. a kind of control method of process cavity equipment, which is characterized in that be applied to claim 7 to 12 any one of them work
Skill chamber equipment, the method includes：
When position detecting device detects that transmitting device transports supported object to the first predeterminated position, control device control rises
The driving device driving support device of drop machine drives saddle to rise so that the supported object is detached from the transmitting device；
When the position detecting device detects that supported object has disengaged from the location information of the transmitting device, the control dress
It sets the control transmitting device and leaves the process cavity；
After the transmitting device leaves process cavity, the driving device of the control device control elevator drives support device band
Supported object on dynamic saddle moves to the second predeterminated position.
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