CN108545959A - A kind of vacuum coating equipment, glass processing system, film plating process and glass processing method - Google Patents
A kind of vacuum coating equipment, glass processing system, film plating process and glass processing method Download PDFInfo
- Publication number
- CN108545959A CN108545959A CN201810349302.8A CN201810349302A CN108545959A CN 108545959 A CN108545959 A CN 108545959A CN 201810349302 A CN201810349302 A CN 201810349302A CN 108545959 A CN108545959 A CN 108545959A
- Authority
- CN
- China
- Prior art keywords
- air extractor
- room
- vacuum coating
- glass processing
- coating equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 36
- 239000011521 glass Substances 0.000 title claims abstract description 30
- 238000007747 plating Methods 0.000 title claims abstract description 20
- 238000000034 method Methods 0.000 title claims description 15
- 230000008569 process Effects 0.000 title claims description 10
- 238000003672 processing method Methods 0.000 title claims description 4
- 239000011248 coating agent Substances 0.000 claims abstract description 27
- 238000000576 coating method Methods 0.000 claims abstract description 27
- 230000008520 organization Effects 0.000 claims abstract description 4
- 238000005086 pumping Methods 0.000 claims description 9
- 238000001816 cooling Methods 0.000 claims description 6
- 239000003973 paint Substances 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 3
- 238000002386 leaching Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 11
- 230000008901 benefit Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
- C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/151—Deposition methods from the vapour phase by vacuum evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Physical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
The present invention provides a kind of vacuum coating equipments, including enter piece room, coating chamber, slice room, the first air extractor, the second air extractor and third air extractor, wherein enter piece room, coating chamber, slice room be sequentially connected pipeline organization；The first air extractor setting is entering piece room side, and in coating chamber side, the third air extractor is arranged in slice room side for the second air extractor setting；It is described enter piece interior be additionally provided with the first sensing device；The coating chamber includes plated film chamber body, support leg, plating film conveying device, the second sensing device, the support leg is arranged below plated film chamber body and connects, the plating film conveying device is horizontally set in coating chamber body and connects, and second sensing device is arranged in the top of plated film chamber body and connection；It is additionally provided with third sensing device in the slice room.The present invention provides a kind of vacuum coating equipment, realizes the automation plated film of glass；Also achieve the continuity of glass processing production, improving production efficiency.
Description
Technical field
The present invention relates to glass processing fields, and in particular to a kind of vacuum coating equipment, glass processing system, film plating process and
Glass processing method.
Background technology
Existing vacuum coating needs to carry out each procedure of manual control, needs input a large amount of in process of production in this way
Manpower；Existing glass processing system each stage is all to separate to complete in corresponding device simultaneously, such production work
Sequence complex steps, cannot form pipeline system operation, and speed of production is slow；On the other hand, various operated implements take up a large area,
Production cost is increased, in order to reduce input cost and manpower, while realizing the production process of automation.We are required to reality
A kind of vacuum coating equipment of existing plated film automation and a kind of system of processing worked continuously that can realize glass.
Invention content
One of the technical problem to be solved of the present invention is how to realize glass automatic vacuum plated film；The two of problem exist
In the continuity for how realizing glass processing production.
The present invention solves above-mentioned technical problem using following technical scheme：
A kind of vacuum coating equipment, including enter piece room, coating chamber, slice room, the first air extractor, the second air extractor and
Three air extractors, wherein enter piece room, coating chamber, slice room be sequentially connected pipeline organization；First air extractor is set
It sets and is entering piece room side, in coating chamber side, the third air extractor is arranged in slice room for the second air extractor setting
Side；
It is described enter piece interior be additionally provided with the first sensing device；
The coating chamber includes plated film chamber body, support leg, plating film conveying device, the second sensing device, and the support leg is set
It sets below plated film chamber body and is connect with plated film chamber body, the plating film conveying device is horizontally set in coating chamber body, and described
Two sensing devices are arranged in the top of plated film chamber body；
It is additionally provided with third sensing device in the slice room.
Further, first air extractor includes taking out pump and first by the first essence that tracheae is linked in sequence slightly to take out
Pump.
Further, the third air extractor includes that the third essence pumping pump being linked in sequence by tracheae and third are slightly taken out
Pump.
Further, the plating film conveying device is spaced transfer roller.
Including the glass processing system of above-mentioned vacuum coating equipment the present invention also provides a kind of, including is sequentially connected and constitutes
Cleaning machine, air-dry machine, dryer, vacuum coating equipment, pouring paint machine, baking vanish machine and the cooling device of assembly line, the vacuum coating
Machine is above-mentioned vacuum coating equipment.
The present invention also provides a kind of film plating process of vacuum coating equipment, step includes：
1) the first air extractor and third air extractor are opened successively, preheat vacuum coating equipment；So that room pressure reaches
First preset air pressure；The second air extractor is opened to be evacuated coating chamber；
2) after entering the deflation of piece room, workpiece is sent into piece room, it is predetermined to reach second by the pumping of the first air extractor
When air pressure, workpiece is sent into coating chamber；Plated film is completed when reaching third preset air pressure by the pumping of the second air extractor；Wait for slice
When room air pressure is less than the second preset air pressure, workpiece is sent into slice room；Then after slice room is deflated, by the workpiece after plated film
It is sent out from slice room；
Further, first preset air pressure is 1100-1200pa.
Further, second preset air pressure is 5-10pa.
Further, the third preset air pressure is 0.01-0.03pa.
The present invention also provides a kind of application method of glass processing system, step includes：So that glass passes through clearly successively
Wash, air-dry, drying, vacuum coating, leaching paint, baking vanish and cooling, obtain final products, the vacuum coating method is above-mentioned vacuum
Film plating process.
The advantage of the invention is that：
1. the present invention provides a kind of vacuum coating equipment, the automation plated film of glass is realized.
2. the present invention realizes the continuity of glass processing production, improving production efficiency.
Description of the drawings
Fig. 1 is a kind of side view of vacuum coating equipment embodiment of the present invention；
Fig. 2 is a kind of vertical view of vacuum coating equipment embodiment of the present invention；
Fig. 3 is a kind of structure chart of glass processing system embodiment of the present invention.
Specific implementation mode
The present invention is described in detail below in conjunction with attached drawing.
As shown in Figs. 1-3, a kind of glass processing system of the present invention, including following sequence are connected and are constituted for glass one by one
Cleaning machine 100, air-dry machine 200, dryer 300, vacuum coating equipment 400, pouring paint machine 500, the baking vanish of the assembly line of system of processing
Machine 600 and cooling device 700；
Wherein, the vacuum coating equipment 400 includes into piece room 1, coating chamber 2, slice room 3, the first air extractor 4, second
Air extractor 5 and third air extractor 6, wherein enter piece room 1, coating chamber 2, slice room 3 be sequentially connected pipeline organization；
First air extractor 4 setting is entering 1 side of piece room, and the setting of the second air extractor 5 is in 2 side of coating chamber, and described the
Three air extractors 6 are arranged in 3 side of slice room；
It is described enter piece room 1 in be additionally provided with the first sensing device 11；
The coating chamber 2 includes plated film chamber body 21, support leg 22, plates film conveying device 23, the second sensing device 24, described
Support leg 22 is arranged below plated film chamber body 21 and is connect with plated film chamber body 21, and the plating film conveying device 23 is horizontally set on plating
In film chamber body 21, second sensing device 24 is arranged in the top of plated film chamber body 21；
It is additionally provided with third sensing device 31 in the slice room 3.
Specifically, first air extractor 4 includes taking out pump 41 by the first essence that tracheae (figure does not indicate) is linked in sequence
With the first roughing vacuum pump 42；The third air extractor 6 includes taking out pump 61 by the third essence that tracheae (figure does not indicate) is linked in sequence
With third roughing vacuum pump 62；
More specifically, the plating film conveying device 23 is spaced transfer roller (figure does not indicate).
Using the specific as follows of above-mentioned glass processing system production glass：It is workpiece is cleaned successively, air-dried, drying, true
Empty plated film, leaching paint, baking vanish and cooling, obtain final products.
Wherein the vacuum coating method includes the following steps：
1) the first air extractor 4 and third air extractor 6 are opened successively, specifically, first turning on the first essence takes out 41 Hes of pump
Third essence takes out pump 61, preheats vacuum coating equipment；When the first essence takes out pump 41 and third essence is taken out pump 61 and reached and opens the after operating condition
One roughing vacuum pump 42 and third roughing vacuum pump 62 so that room pressure reaches the first preset air pressure 1100pa；Open the second air extractor 5
Coating chamber 2 is evacuated；
2) after entering the deflation of piece room 1, workpiece is sent into piece room 1, it is pre- to reach second by the pumping of the first air extractor 4
When determining air pressure 10pa, workpiece is sent into coating chamber 2；When reaching third preset air pressure 0.03pa by the pumping of the second air extractor 5
Plated film is completed, specifically, so that 2 air pressure of coating chamber is reached third preset air pressure using the pumping of third roughing vacuum pump 62；Wait for 3 gas of slice room
When pressure is less than the second preset air pressure 10pa, workpiece is sent into slice room 3；Then after slice room 3 is deflated, by the work after plated film
Part is sent out from slice room 3；
Wherein, first sensing device 11 detects air pressure in piece room 1；Second sensing device 24 detects coating chamber
Air pressure in 2, the third sensing device 31 detect air pressure in slice room 3.
The foregoing is merely the preferred embodiments of the invention, are not intended to limit the invention creation, all at this
All any modification, equivalent and improvement etc., should be included in the invention made by within the spirit and principle of innovation and creation
Protection domain within.
Claims (10)
1. a kind of vacuum coating equipment, which is characterized in that including entering piece room, coating chamber, slice room, the first air extractor, the second pumping
Device of air and third air extractor, wherein enter piece room, coating chamber, slice room be sequentially connected pipeline organization；Described first
Air extractor setting is entering piece room side, and in coating chamber side, the third air extractor is set for the second air extractor setting
It sets in slice room side；
It is described enter piece interior be additionally provided with the first sensing device；
The coating chamber includes plated film chamber body, support leg, plating film conveying device, the second sensing device, and the support leg setting exists
It is connect below plated film chamber body and with plated film chamber body, the plating film conveying device is horizontally set in coating chamber body, second sense
Device is answered to be arranged in the top of plated film chamber body；
It is additionally provided with third sensing device in the slice room.
2. a kind of glass processing system according to claim 1, which is characterized in that first air extractor includes passing through
The first essence that tracheae is linked in sequence takes out pump and the first roughing vacuum pump.
3. a kind of glass processing system according to claim 1, which is characterized in that the third air extractor includes passing through
The third essence that tracheae is linked in sequence takes out pump and third roughing vacuum pump.
4. a kind of glass processing system according to claim 1, which is characterized in that the plating film conveying device is that interval is set
The transfer roller set.
5. a kind of glass processing system including a kind of vacuum coating equipment described in claim 1, which is characterized in that including according to
Secondary connection and constitute cleaning machine, air-dry machine, dryer, vacuum coating equipment, pouring paint machine, baking vanish machine and the cooling device of assembly line,
The vacuum coating equipment is claim 1-4 any one of them vacuum coating equipments.
6. a kind of film plating process of vacuum coating equipment as described in any one of claim 1-4, which is characterized in that step packet
It includes：
1) the first air extractor and third air extractor are opened successively, preheat vacuum coating equipment；So that room pressure reaches first
Preset air pressure；The second air extractor is opened to be evacuated coating chamber；
2) after entering the deflation of piece room, workpiece is sent into piece room, the second preset air pressure is reached by the pumping of the first air extractor
When, workpiece is sent into coating chamber；Plated film is completed when reaching third preset air pressure by the pumping of the second air extractor；Wait for slice room gas
When pressure is less than the second preset air pressure, workpiece is sent into slice room；Then after slice room is deflated, by the workpiece after plated film from going out
It sends out piece room.
7. the film plating process of vacuum coating equipment according to claim 6, which is characterized in that first preset air pressure is
1100-1200pa。
8. the film plating process of vacuum coating equipment according to claim 6, which is characterized in that second preset air pressure is 5-
10pa。
9. the film plating process of vacuum coating equipment according to claim 6, which is characterized in that the third preset air pressure is
0.01-0.03pa。
10. a kind of glass processing method, based on the glass processing system described in claim 5, which is characterized in that step packet
It includes：So that glass obtains final products successively through over cleaning, air-dried, drying, vacuum coating, leaching paint, baking vanish and cooling, wherein
The vacuum coating is carried out using the vacuum coating method described in claim 6-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810349302.8A CN108545959A (en) | 2018-04-18 | 2018-04-18 | A kind of vacuum coating equipment, glass processing system, film plating process and glass processing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810349302.8A CN108545959A (en) | 2018-04-18 | 2018-04-18 | A kind of vacuum coating equipment, glass processing system, film plating process and glass processing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108545959A true CN108545959A (en) | 2018-09-18 |
Family
ID=63515295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810349302.8A Pending CN108545959A (en) | 2018-04-18 | 2018-04-18 | A kind of vacuum coating equipment, glass processing system, film plating process and glass processing method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108545959A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113025978A (en) * | 2021-02-26 | 2021-06-25 | 张鹏成 | Magnetron sputtering coating device |
| CN113246577A (en) * | 2021-05-06 | 2021-08-13 | 常熟明阳玻璃制品有限公司 | Production process of high-strength self-cleaning bathroom glass |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1469922A (en) * | 1974-06-13 | 1977-04-06 | Hunt C | Vacuum metallising or vacuum coating |
| CN102732825A (en) * | 2011-04-06 | 2012-10-17 | 鸿富锦精密工业（深圳）有限公司 | Preparation method of coated articles and coated articles thereof prepared by the method |
| WO2014089948A1 (en) * | 2012-12-14 | 2014-06-19 | 广东志成冠军集团有限公司 | Multi-functional continuous magneto-controlled sputter coating device |
| CN105970173A (en) * | 2016-06-14 | 2016-09-28 | 肇庆市大力真空设备有限公司 | Vacuum magnetic-control sputter coating equipment |
| CN107365973A (en) * | 2017-08-29 | 2017-11-21 | 肇庆市前沿真空设备有限公司 | A kind of vacuum coating production line and film plating process |
-
2018
- 2018-04-18 CN CN201810349302.8A patent/CN108545959A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1469922A (en) * | 1974-06-13 | 1977-04-06 | Hunt C | Vacuum metallising or vacuum coating |
| CN102732825A (en) * | 2011-04-06 | 2012-10-17 | 鸿富锦精密工业（深圳）有限公司 | Preparation method of coated articles and coated articles thereof prepared by the method |
| WO2014089948A1 (en) * | 2012-12-14 | 2014-06-19 | 广东志成冠军集团有限公司 | Multi-functional continuous magneto-controlled sputter coating device |
| CN105970173A (en) * | 2016-06-14 | 2016-09-28 | 肇庆市大力真空设备有限公司 | Vacuum magnetic-control sputter coating equipment |
| CN107365973A (en) * | 2017-08-29 | 2017-11-21 | 肇庆市前沿真空设备有限公司 | A kind of vacuum coating production line and film plating process |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113025978A (en) * | 2021-02-26 | 2021-06-25 | 张鹏成 | Magnetron sputtering coating device |
| CN113246577A (en) * | 2021-05-06 | 2021-08-13 | 常熟明阳玻璃制品有限公司 | Production process of high-strength self-cleaning bathroom glass |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180918 |