CN108541228B - The manufacturing method of cubic boron nitride sintered body tool, the cubic boron nitride sintered body used in it and cubic boron nitride sintered body tool - Google Patents

The manufacturing method of cubic boron nitride sintered body tool, the cubic boron nitride sintered body used in it and cubic boron nitride sintered body tool Download PDF

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Publication number
CN108541228B
CN108541228B CN201680078032.0A CN201680078032A CN108541228B CN 108541228 B CN108541228 B CN 108541228B CN 201680078032 A CN201680078032 A CN 201680078032A CN 108541228 B CN108541228 B CN 108541228B
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sintered body
boron nitride
cbn sintered
tool
nitride sintered
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CN108541228A (en
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渡部直树
原田高志
久木野晓
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Sumitomo Electric Industries Ltd
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Sumitomo Electric Industries Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B27/00Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14Cutting tools of which the bits or tips or cutting inserts are of special material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B27/00Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/18Cutting tools of which the bits or tips or cutting inserts are of special material with cutting bits or tips or cutting inserts rigidly mounted, e.g. by brazing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B27/00Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/18Cutting tools of which the bits or tips or cutting inserts are of special material with cutting bits or tips or cutting inserts rigidly mounted, e.g. by brazing
    • B23B27/20Cutting tools of which the bits or tips or cutting inserts are of special material with cutting bits or tips or cutting inserts rigidly mounted, e.g. by brazing with diamond bits or cutting inserts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23PMETAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • B23P15/28Making specific metal objects by operations not covered by a single other subclass or a group in this subclass cutting tools

Abstract

A kind of cubic boron nitride sintered body tool, has: tool base material, the bonding layer being set on tool base material surface and the cubic boron nitride sintered body that tool base material is engaged in via bonding layer.Cubic boron nitride sintered body has the joint surface that engage with bonding layer, and there are include selected from the modification portion at least one of organized as composed by hexagonal boron nitride, boron, boron oxide and nitrogen oxidation boron at least one face in the joint surface.Modification portion has 0.1 μm or more 50.0 μm of thickness below.

Description

Cubic boron nitride sintered body tool, the cubic boron nitride sintered body used in it, Yi Jili The manufacturing method of square boron nitride sintered body tool
Technical field
The present invention relates to cubic boron nitride sintered body used in cubic boron nitride sintered body tool, the tool and cube The manufacturing method of boron nitride sintered body tool.The Japanese patent application No.2015- submitted this application claims on November 5th, 2015 217468 priority, and quote documented whole contents in above-mentioned Japanese publication.
Background technique
Due to the wearability and excellent strength of cubic boron nitride (cBN) sintered body, it is widely used as tool.Have In the tool (hereinafter referred to as " cBN sintered body tool ") of cBN sintered body, generally having engages cBN sintered body via bonding layer The structure made of tool base material.
In such cBN sintered body tool, if cBN sintered body is low with the bond strength of tool base material, work in-process CBN sintered body can fall off from cBN sintered body tool, be unable to satisfy the function as tool.Therefore, in cBN sintered body tool, The bond strength improved between cBN sintered body and tool base material is important.
For example, Japanese Unexamined Patent Publication 2012-096934 bulletin (patent document 1) discloses following technology: by being burnt from cBN The surface of knot body, which removes, combines phase contained in cBN sintered body, so that bumps be arranged on the surface of cBN sintered body, and pass through The Anchoring Effect of the bumps improves the bond strength between cBN sintered body and tool base material.
Existing technical literature
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2012-096934 bulletin
Summary of the invention
CBN sintered body tool of the invention has: tool base material, the bonding layer being set on tool base material surface and The cBN sintered body of tool base material is engaged in via bonding layer, wherein cBN sintered body has the joint surface engaged with bonding layer, There are comprising being selected from by hexagonal boron nitride (hBN), boron (B) (hereinafter, being labeled as at least one face in the joint surface In the case where " boron " or " B ", refer to boron monomer, do not include with other elements constitute compound boron), boron oxide (B2O3) with And nitrogen oxidation boron (B2ON3) composed by least one of group modification portion, modification portion is with 0.1 μm or more 50.0 μm or less Thickness.
CBN sintered body of the invention is the cBN sintered body used in above-mentioned cBN sintered body tool.
The manufacturing method of cBN sintered body tool of the invention is that manufacture has tool base material, is set to tool base material surface On bonding layer and be engaged in via bonding layer tool base material cBN sintered body cBN sintered body tool method, packet It includes: making the step of boron nitride (BN) particles sintering is to make cBN sintered body;Laser is carried out to cBN sintered body by pulse laser The step of processing;The step of cBN sintered body after laser machining is bonded to tool base material via bonding layer, wherein pulse The pulse energy of laser is 0.01J or more 1.5J hereinafter, pulse width is 0.01msec or more 0.40msec hereinafter, output power For 30W or more 500W or less.
Brief Description Of Drawings
[Fig. 1] Fig. 1 is to show the plan view of an example of the cBN sintered body tool according to the 1st embodiment.
[Fig. 2] Fig. 2 is the main view of the cBN sintered body tool of Fig. 1.
[Fig. 3] Fig. 3 is the partial enlarged view of the cBN sintered body tool of Fig. 2.
[Fig. 4 A] Fig. 4 A is to show the schematic diagram for making state of the mixed-powder configuration on support plate.
[Fig. 4 B] Fig. 4 B is to show the schematic diagram for the laminated body being made of support plate and cBN sintered body.
[Fig. 4 C] Fig. 4 C is the schematic diagram shown by support plate from the state after laminated body removing.
[Fig. 4 D] Fig. 4 D is to show the schematic diagram of state of the cBN sintered body after laser machining.
[Fig. 5 A] Fig. 5 A is to be schematically illustrated in by the figure of the machined object before pulse laser machining.
[Fig. 5 B] Fig. 5 B is to be schematically illustrated in by the figure of the machined object after pulse laser machining.
[Fig. 6] Fig. 6 is to show the plan view of an example of the cBN sintered body tool according to the 2nd embodiment.
[Fig. 7 A] Fig. 7 A is the application side of punching press stick when being schematically illustrated in the bond strength of measurement cBN sintered body tool The plan view of the summary of method.
[Fig. 7 B] Fig. 7 B is the application side of punching press stick when being schematically illustrated in the bond strength of measurement cBN sintered body tool The main view of the summary of method.
Specific embodiment
[project to be solved by this invention]
It falls off in order to prevent meeting above-mentioned under the harsh use condition of the market demand in recent years, needs to further increase Bond strength between cBN sintered body and tool base material.
The purpose of the present invention is to provide a kind of cBN sintered body tools for being securely engaged cBN sintered body.
[effect of the invention]
According to the present invention, it is possible to provide a kind of cBN sintered body tool for being securely engaged cBN sintered body.
[explanation of embodiment]
Firstly, listing embodiments of the present invention and being illustrated.
[1] cBN sintered body tool of the invention has: tool base material, the bonding layer being set on tool base material surface, with And the cBN sintered body of tool base material is engaged in via bonding layer, wherein cBN sintered body has the engagement engaged with bonding layer Face, there are comprising selected from by hBN, B, B at least one face in the joint surface2O3And B2ON3In composed group extremely A kind of few modification portion, modification portion have 0.1 μm or more 50.0 μm of thickness below.
According to above-mentioned cBN sintered body tool, by having above-mentioned modified portion, thus making tool base material and cBN sintered body While being securely engaged, the breakage due to caused by the presence in modification portion may also suppress.Above-mentioned cBN sintered body tool as a result, It has been securely engaged cBN sintered body.
[2] in above-mentioned cBN sintered body tool, modification portion preferably has 0.3 μm or more 5.0 μm of thickness below.As a result, The bond strength between cBN sintered body and bonding layer can be improved.
[3] in above-mentioned cBN sintered body tool, the content of cBN is preferably 80.0 volume % or more in cBN sintered body.By This, can be improved the bond strength between cBN sintered body and bonding layer.
[4] in above-mentioned cBN sintered body tool, the content of cBN is preferably 96.0 volume % or more in cBN sintered body.By This, can further improve the bond strength between cBN sintered body and bonding layer.
[5] in above-mentioned cBN sintered body tool, angle is formed by by cross one another two joint surfaces in joint surface Preferably 89.0 ° or more 91.0 ° or less.CBN sintered body is more firmly engaged with tool base material as a result,.
[6] in above-mentioned cBN sintered body tool, the thermal conductivity of cBN sintered body is preferably 70W/mK or more.There is this In the cBN sintered body of the thermal conductivity of sample, due to the presence in the modification portion for being easy to inhibit thickness excessive, as a result, cBN sintering can be improved Bond strength between body and bonding layer.
[7] cBN sintered body of the invention is the cBN sintered body used in above-mentioned cBN sintered body tool.
According to above-mentioned cBN sintered body, due to being used for cBN sintered body tool, thus it can provide and be securely engaged cBN sintering The cBN sintered body tool of body.
[8] manufacturing method of cBN sintered body tool of the invention is that manufacture has tool base material, is set to tool base material table Bonding layer on face and be engaged in via bonding layer tool base material cBN sintered body cBN sintered body tool method, It include: to make the step of BN particles sintering is to make cBN sintered body;CBN sintered body is laser machined by pulse laser Step;The step of cBN sintered body after laser machining is bonded to tool base material via bonding layer, wherein pulse laser Pulse energy is 0.01J or more 1.5J hereinafter, pulse width is 0.01msec or more 0.40msec hereinafter, output power is 30W The above 500W or less.
It is generated according to the manufacturing method of above-mentioned cBN sintered body due to being formed by machined surface by pulse laser With a thickness of 0.1 μm or more 50.0 μm above-mentioned modified portions below, as a result, can manufacture and be securely engaged the above-mentioned of cBN sintered body CBN sintered body tool.
In the manufacturing method of above-mentioned cBN sintered body, pulse laser is preferably optical-fiber laser.This is because by optical-fiber laser Bond strength between the machined surface and joint surface of formation is excellent.
[detailed description of embodiment]
Hereinafter, embodiments of the present invention are illustrated, but present embodiment is not limited to this.It needs to illustrate It is that in the present specification, the statement of " A to B " this form refers to the upper limit lower limit (i.e. A or more B or less) of range, is not remembering The unit of A is carried in the case where only recording the unit of B, the unit of A and the unit of B are identical.
[the 1st embodiment]
[cBN sintered body tool]
Fig. 1 is to show the plan view of an example of cBN sintered body tool according to the present embodiment, and Fig. 2 is the cBN of Fig. 1 The main view of sintered body tool.As shown in Figures 1 and 2, cBN sintered body tool 10 has tool base material 1, is set to tool base material Bonding layer 2 on 1 surface and the cBN sintered body 3 that tool base material 1 is engaged in via bonding layer 2.
Such cBN sintered body tool 10 can be used for the various processing of common metal, especially be effectively used for burning In conjunction with the machining of gold, difficult cutting cast iron, hardened steel, heat-resisting alloy.
In the case where cBN sintered body tool 10 to be used for the purposes of machining, can effectively serve as (for example) boring Head, end mill(ing) cutter, Milling Process is used or turnery processing cutting edge replaced type cutting tip, metal saw, gear cutting tool, hinge Knife, screw tap or crankpin Milling Machining blade etc..
In the case where cBN sintered body tool 10 to be used for the purposes of plastic processing, can effectively serve as (for example) rushing Compression mould, mold mold, friction welding etc..In addition, can illustrated engine components, hard disk drive (HDD), hard disk drive Dynamic device magnetic head, capstan winch, wafer chuck semiconductor transfer arm, camera zoom lens sealing ring, friction-stir welding tool etc..
It should be noted that so-called " machining ", refers to that machining is required ruler while cutting chip The article of very little shape, so-called " plastic processing ", referring to makes its deformation to machining object applied force, so that forming is required ruler The article of very little shape.Plastic processing and machining are the difference is that chip will not be generated.
[tool base material]
As the material of tool base material 1, as long as being used as the conventional known material of this tool base material, without spy Other restriction.For example, the material that superhard alloy, steel, ceramics etc. have resist processing can be suitably used.Wherein, from intensity From the point of view of viewpoint, preferably superhard alloy.
As the shape of tool base material 1, as long as being used as the conventional known shape of this tool base material, do not have yet It is special to limit.In the present embodiment, as depicted in figs. 1 and 2, for having 2 faces (face 1a and face 1b) as via connecing The tool base material 1 for closing layer 2 and engaging shape as the face of cBN sintered body 3 is illustrated.
[bonding layer]
Bonding layer 2 plays the role of for engaging tool base material 1 and cBN sintered body 3.The bonding layer of present embodiment 2 are arranged on the face 1a and face 1b of tool base material 1.About tool base material 1, there is no particular limitation for material, as long as it can Realize the effect.It is, for example, possible to use the bonding layers of following (1) or (2).
(1) a kind of bonding layer, wherein relative to entire bonding layer, the Ti comprising 5 mass % or more and 5 mass % or more Zr, and Ti and Zr add up to 90 mass % hereinafter, surplus be Cu;
(2) a kind of bonding layer, wherein relative to entire bonding layer, the Ti comprising 1 mass % or more and 15 mass % or more Cu, surplus Ag.
In the case where the bonding layer of (1) is stated in use as bonding layer 2, due to the presence of Ti and Zr, so as to make to connect It closes layer 2 and shows high thermo-tolerance and high wetability, it is thus possible to which the engagement for improving bonding layer 2 and cBN sintered body 3 is strong Degree.In addition, due to the presence of Cu, so that the engagement processing under low temperature becomes possible, simultaneously because elasticity high possessed by Cu Modulus, to can be delayed when generated heat flows into tool base material 1 by cBN sintered body 3 in processing by bonding layer 2 Strain caused by difference between the thermal expansion coefficient due to cBN sintered body 3 and the thermal expansion coefficient of tool base material 1.? Use the bonding layer of above-mentioned (2) as in the case where bonding layer 2, above-mentioned same effect can also be played.
It is further preferred, that being further mixed with 5 mass % in the bonding layer of above-mentioned (1) and the bonding layer of above-mentioned (2) Above Ni.In this case, due to can further improve bonding layer 2 to the wetability of cBN sintered body 3, thus cBN is sintered Body 3 and the bond strength of bonding layer 2 further increase.
The thickness of bonding layer 2 is preferably 10 μm or more.When the thickness of bonding layer 2 is less than 10 μm, the engaging force of bonding layer 2 It may be easily reduced.In addition, the thickness of bonding layer 2 is preferably 200 μm or less.Compare work generally, due to the hardness for having bonding layer 2 Have the lower tendency of hardness of base material 1 and cBN sintered body 3, if thus the thickness of bonding layer 2 is more than 200 μm, bonding layer 2 Breakage may occur for body.
[cBN sintered body]
CBN sintered body 3 is engaged in tool base material 1 via bonding layer 2.As shown in Figures 1 and 2, the cBN of present embodiment Sintered body 3 has 2 joint surfaces 3a, 3b as the joint surface engaged with bonding layer 2,2 joint surfaces 3a, 3b it is intersected with each other and Form crestal line 3c.
CBN sintered body 3 includes the crystal grain (cBN grains) being made of cBN.There is no particular limitation for the partial size of cBN grains, but From the viewpoint of improving hardness, 0.1 to 10 μm may be set to.CBN sintered body can be only made of cBN grains, also can wrap Containing other compositions.
As the above-mentioned other compositions other than cBN grains, can enumerate in conjunction with phase.Make cBN particle in conjunction with mutually having The effect being bonded to each other, as long as can have this effect, there is no particular limitation for material.For example, as cBN sintered body Phase is combined contained in 3, and (3) or (4) below can be used.
(3) a kind of combination phase, by following compounds or the compound solid solution and Al compound (AlN, AlB2、Al2O3Deng) constitute, the compound is as being selected from least one of group composed by the 4th to 6 race's element of the periodic table of elements Element and selected from composed by N, C, B and O group at least one of element constitute;
(4) a kind of combination phase, is made of the solid solution of following compounds or the compound, the compound be selected from by Al compound, cobalt (Co), W compound (WC, W2Co21B6、Co3W3C、W3CoB3Deng) composed by group.
In cBN sintered body 3, when combination phase such there are such as above-mentioned (3) and (4), in sintered alloy, casting Particularly good wearability can be shown in the machining of iron, hardened steel, heat-resisting alloy etc..
In addition, as the other compositions other than cBN grains, the BN of the crystal structure other than can enumerating with cBN, For example, the boron nitride (wBN) with the wurtzite-type crystal structure, (compression of the boron nitride with compression-type hexagonal crystal crystal structure Type BN) etc. (still, " BN with the crystal structure other than cBN " does not include hBN).
In the case where cBN sintered body 3 includes above-mentioned combination phase, in order to play this effect for making cBN grains be bonded to each other Fruit, preferably at least comprising the combination phase greater than 3 volume %.On the other hand, in the case where cBN sintered body 3 is free of and combines phase, The content ratio of cBN particle in cBN sintered body 3 is 98 volume % or more.That is, without the cBN sintered body 3 in conjunction with phase In total content ratio of wBN and compression-type BN for containing less than 2 volume %.This is because when manufacture is without in conjunction with phase When cBN sintered body, (residual) wBN and compression-type BN, production rate (residual can be generated in cBN sintered body 3 in manufacturing process Rate) there are the upper limits.
Above-mentioned cBN sintered body 3 can contain the inevitable impurity such as nitrogen (N), hydrogen (H), oxygen (O).In addition, when cBN is burnt Knot body 3 includes when combining phase, may also can be miscellaneous containing superhard alloy, silicon nitride, zirconium oxide, aluminium oxide etc. in manufacturing process Matter.In cBN sintered body 3, the content of each ingredient as inevitable impurity is respectively less than 4%, each ingredient as impurity Content be respectively less than 3%.
[modification portion]
In addition, there is modification portion at least one face in joint surface 3a, 3b in above-mentioned cBN sintered body 3.At this In embodiment, for only there is the case where modification portion on the 3a of joint surface, it is illustrated using Fig. 2 and Fig. 3.
As shown in Figures 2 and 3, in the surface of cBN sintered body 3, exist on the joint surface 3a that is engaged with bonding layer 2 and change Property portion 31, which includes selected from by hBN, B, B2O3And B2ON3At least one of composed group.By aftermentioned Procedure of processing the cBN positioned at cBN sintered body surface is undergone phase transition, to generate hBN.Pass through aftermentioned procedure of processing Make cBN denitrogenation, to generate B.So that cBN is removed all or part of nitrogen by aftermentioned procedure of processing becomes B or BNx(x < 1), B or BNx(x < 1) is oxidized to generate B2O3And B2ON3
That is, there are selected from by hBN, B, B in the region in modification portion 31 in cBN sintered body 32O3And B2ON3At least one of composed group and cBN.It should be noted that changing when cBN sintered body 3 includes to combine phase Property portion 31 region in can further containing combine phase, in addition when cBN sintered body 3 include wBN and/or compression-type BN when, change WBN and/or compression-type BN can further be contained in the region in property portion 31.
Here, in cBN sintered body 3, in the following way to modification portion 31 and the area other than the modification portion 31 Domain distinguishes.It should be noted that using the region other than modification portion 31 in cBN sintered body 3 as matrix 32.
Firstly, for the face of the composition on the thickness direction that joint surface 3a can be observed in cBN sintered body 31, use Cross section polishing machine (CP:Cross section Polisher) carries out CP processing.As such face, Fig. 2 and Fig. 3 can be enumerated Shown in face.CP processing conditions is as described below.In addition, the thickness direction (depth direction) that can not identify joint surface 3a this In the case that kind is constituted, cBN sintered body is cut off on the face of the normal to a surface comprising joint surface 3a, and disconnected to what is occurred Face carries out CP processing.
(CP processing conditions)
Pressing speed: 6kV
Irradiate electric current: 0.30mA
Irradiation time: 300 minutes.
Next, CP machined surface is observed by various analysis methods, to analyze the ingredient of cBN sintered body.It is specific and Speech, by used the Raman spectrum analysis of Raman spectroscopy device, thus confirmation in cBN sintered body with the presence or absence of hBN, B2O3And B2ON3In at least any one.In addition, passing through the energy for used energy dispersion type x-ray analysis equipment Dispersion-type X-ray analyzes (EDS analysis) or Auger electron spectroscopy analysis (AES method), so that whether confirmation deposits in cBN sintered body There is B.Then, it will be considered that there are hBN, B2O3Or B2ON3Region and/or be considered that there are the region of B views For modification portion 31.
It should be noted that will be observed relative to cBN in Raman spectrum analysis (viewing area of 11 μm of μ m) HBN, B of 5 volume % or more2O3Or B2ON3Region be considered as wherein that there are the regions of each ingredient.In addition, being analyzed in EDS In (viewing areas of 22 μm of μ ms), the region that the ratio of B element is 95 atom % or more is considered as the wherein area there are B Domain.Alternatively, the region that the ratio of B element is 95 atom % or more is regarded in AES method (viewing area of 0.2 0.2 μm of μ m) For wherein there are the regions of B.But in AES method, pass through (the row that maked corrections to the C and O that are adsorbed in viewing area surface Except), to calculate the ratio of B element.As the device for AES method, " PHI 700 " can be used, and (ULVAC-PHI share has Limit corporation).
Modification portion 31 has 0.1 to 50.0 μm of thickness d.It include selected from by hBN, B in modification portion 312O3And B2ON3Institute In the case where at least one of group of composition, thickness d can be determined by Raman spectroscopy.For example, being filled by Raman spectrum It sets to observe the surface of the cBN sintered body 3 in Fig. 2 shown on paper, and determines that wherein there are hBN, B2O3Or B2ON3's Region.Then, in this region, from the position of the outmost surface of the joint surface 3a contacted with bonding layer 2, to wherein existing There are hBN, B2O3Or B2ON3Region in that side of penetralia position (apart from joint surface 3a be innermost position) The shortest distance is used as " thickness d ".
In addition, thickness d can be determined by EDS analytic approach in the case where containing B in modification portion 31.For example, to Fig. 2 The surface of cBN sintered body 3 shown on middle paper carries out EDS analysis, and determines the wherein region there are B.Then, at this In region, from the position of the joint surface 3a contacted with bonding layer 2, to wherein there are the penetralia in the region of B that The shortest distance of the position of side is used as " thickness d ".
Therefore, determine thickness d in order to practical, analyzed by Raman spectrum analysis and EDS, so that it is determined that go out wherein there are hBN、B、B2O3Or B2ON3The region of each ingredient, in identified region, it is thus necessary to determine that from the position of joint surface 3b To the shortest distance in the region for the position for being located at that side of penetralia.
[manufacturing method of cBN sintered body tool]
For the manufacturing method of cBN sintered body tool according to the present embodiment, it is illustrated using Fig. 4 A to Fig. 4 D.? This, is illustrated for containing the case where combining phase in cBN sintered body.
[pulverising step]
Firstly, being prepared by this step in conjunction with raw material powder mutually.For example, when using TiN, AlN, TiAlN etc. to make When to combine phase, prepare TiN powder and Al powder, and prepare their mixed-powder, using ball mill to the mixed-powder into Row crushes.It has been made as a result, in conjunction with raw material powder mutually.
As the material of ball mill, hard alloy, silicon nitride, zirconium oxide, aluminium oxide etc. can be enumerated.When production includes knot When closing the cBN sintered body of phase, due to the pulverising step, make above-mentioned hard alloy, silicon nitride, zirconium oxide, aluminium oxide etc. sometimes Impurity can be mixed into the raw material powder in conjunction with phase.
[sintering step]
Next, made combination raw material powder mutually and cBN powder (boron nitride particles) are mixed, to prepare The mixed-powder 41 is configured on the support plate 42 of cemented carbide and is formed as shown in Figure 4 A by mixed-powder 41.So Afterwards, it is conducted into ultra-high pressure apparatus, carries out ultra-high pressure sintering.Ultra-high pressure sintering condition is as described below.
(sintering condition)
Pressure: 3 to 7GPa
Temperature: 1100 to 1900 DEG C
Time: 10 to 180 minutes.
As a result, as shown in Figure 4 B, it is formd on support plate by combining the cBN sintered body mutually constituted with cBN particle, thus It has made and has been attached with laminated body made of support plate 42 on the single side (face) of cBN sintered body 3A.In the present embodiment, By further removing entire support plate 42 from above-mentioned laminated body, as shown in Figure 4 C, cBN sintered body 3A has been made.Support There is no particular limitation for 42 minimizing technology, can enumerate (for example) grinding removal.It should be noted that in cBN sintered body 3A In can contain inevitable impurity and impurity.
[procedure of processing]
Next, being processed by pulse laser to made cBN sintered body 3A.Specifically, being sintered by cBN Body 3A is configured to after plate, and the sintered body of the plate is installed in impulse laser unit, and the sintering volumetric laser of plate is added Work is that required shape has obtained the cBN sintered body 3B through laser machining as shown in Figure 4 D.The pulse energy of pulse laser is 0.01J or more 1.5J hereinafter, pulse width be 0.01msec or more 0.40msec hereinafter, output power be 30W or more 500W with Under.Hereinafter, showing the preferred processing conditions A of the pulse laser including these conditions.
(processing conditions A)
Pulse energy: 0.01 to 1.5J
Pulse width: 0.01 to 0.40msec
Output power: 30 to 500W
Frequency: 100 arrive 2000Hz
Wavelength: 1070nm.
In the machined surface processed by pulse laser in the cBN sintered body 3B after laser machining, shape At modified portion 31.This is because cBN sintered body is thermally processed in processing under the above conditions, so that being located at processing A part of the cBN in face mutually becomes hBN, and so that the cBN positioned at machined surface is removed all or part of nitrogen and become B or BNx(x< 1), B or BNx(x < 1) is oxidized.
[engagement step]
Then, the cBN sintered body 3B after laser machining is bonded to tool base material 1 via bonding layer 2.Specifically, Firstly, with after laser machining cBN sintered body 3B and tool base material 1 clip the material of the raw material as bonding layer 2.At this point, It (is to connect in present embodiment i.e. there are the face in modification portion 31 with the machined surface of the face 1a of tool base material 1 and cBN sintered body 3B Conjunction face 3a) mode relative to each other configures each component.
Next, by by after laser machining cBN sintered body 3B and tool base material 1 clip and constitute the material of bonding layer 2 Obtained by laminated body be set in vacuum drying oven.Then, by the pressure in vacuum drying oven to 2 × 10-2It, will while Pa or less Temperature in furnace is set as 750 DEG C or more, to make the material dissolution for constituting bonding layer 2.As a result, to the cBN after laser machining Sintered body 3B and tool base material 1 carry out engagement processing.Next, the machining object after engagement is processed is taken out from vacuum drying oven and will It lets cool, to make the material solidification for constituting bonding layer 2.Then, to the periphery on the joint surface of cBN sintered body 3B and bonding layer 2, And tool base material 1 and the periphery on the joint surface of bonding layer 2 are ground, so that joint surface periphery (is burnt as cBN The outer surface of knot body tool 10 and the part exposed) it is smoothened.As described above, having made is sintered cBN via bonding layer 2 CBN sintered body tool 10 made of body 3 is engaged with tool base material 1.
When on the face for being equivalent to flank or rake face in the cBN sintered body 3 there is also there is modified portion, ground above-mentioned When mill processing, preferably also to there are the parts in the modification portion to be ground to remove the portion of modification.Although this is because modified Portion plays the effect for improving the bond strength of cBN sintered body 3 and tool base material 1, but on the other hand, compared with matrix 32, There is the lower tendency of hardness in modification portion.
In above-mentioned manufacturing method, the cBN sintered body tool 10 of the combination phase for manufacture comprising above-mentioned (3) or (4) Situation is illustrated, but by not implementing the pulverising step in above-mentioned manufacturing method and as described below change sintering step Suddenly, the cBN sintered body tool 10 for combining phase is free of so as to manufacture.
Firstly, the powder being made of the normal pressure type BN of hBN or thermal decomposition boron nitride (pBN) etc is led as BN particle Enter into ultra-high pressure apparatus.Then, ultra-high pressure sintering is carried out to the powder.Ultra-high pressure sintering condition is as described below.It as a result, will be normal The major part (98% or more) of die mould BN is changed into cBN, as a result, has made without the cBN sintered body for combining phase.It is burnt in the cBN Contain the 2 volume % BN (wBN and/or compression-type BN) below with the crystal structure other than cBN in knot body.
(sintering condition)
Pressure: 8 to 20GPa
Temperature: 1300 to 2300 DEG C
Time: 5 to 30 minutes.
When manufacture is without the cBN sintered body tool 10 for combining phase, the pass of pressure and temperature in ultra-high pressure sintering condition System is important.For example, temperature is preferably from about 1900 to 2300 DEG C when pressure is about 10GPa, when pressure is about 20GPa, Temperature can be set as about 1300 to 1900 DEG C.
In addition, when using hBN as normal pressure type BN, it is preferable to use high crystalline from the viewpoint of improve hardness hBN.The hBN of so-called high crystalline refers to the graphitization index (GI value) in X-ray diffraction method less than 5.So-called GI Value is and the peak area at three peaks (i.e. (100), (101), (102)) of the X-ray diffraction of hBN is imported into following formula (1) The value acquired, crystallinity is bigger, then GI value is smaller.
GI=(I(100)+I(101))/I(102)... formula (1).
On the other hand, it when using pBN as normal pressure type BN, is taken from the viewpoint of improving hardness, it is preferable to use having The pBN of tropism.For example, pBN can have orientation on (002) face, when carrying out X-ray diffraction to pBN from c-axis direction, The ratio between the X-ray diffraction intensity in the X-ray diffraction intensity in (010) face of pBN at this time and (002) face can also be set as 0.1 Below.As long as pBN has such orientation, commercially available product may be used.
[effect]
For the function and effect of cBN sintered body tool 10 according to the present embodiment, what is be compared with routine techniques It is illustrated simultaneously.
According to the technology disclosed in patent document 1, phase is combined by removing from the surface of cBN sintered body, thus in cBN Bumps are set on the surface of sintered body, and by the Anchoring Effect of the bumps to improve cBN sintered body and tool base material Bond strength.However, in this technique, in order to be suitably set bumps on the surface of cBN sintered body, needing to burn cBN The content ratio of cBN in knot body sets relatively low.
In contrast, cBN sintered body tool 10 according to the present embodiment, by existing on the surface of cBN sintered body 3 Having thickness d is 0.1 to 50.0 μm of modification portion 31, to improve the bond strength between cBN sintered body 3 and tool base material 1. Therefore, because limiting not as above-mentioned technology, thus it is applicable to broad range of tool.According to the present embodiment CBN sintered body tool 10 in, the reason of bond strength between cBN sintered body 3 and tool base material 1 is improved, the present invention People is presumed as follows.
HBN, B, B in the presence of modification portion 312O3And B2ON3Wetability be higher than cBN wetability.Therefore, in correspondence In the state of (along) bonding layer 2, the two is engaged in the fine bumps on cBN sintered body surface, thus, compared to not changing Property portion 31 cBN sintered body the case where being engaged with tool base material 1 via bonding layer 2, the cBN sintered body 3 with modification portion 31 Contact area in the case where engaging with tool base material 1 via bonding layer 2 between cBN sintered body 3 and bonding layer 2 becomes larger.By In 2 components bond strength with contact area it is bigger and higher, thus compared with conventional, cBN according to the present embodiment Bond strength in sintered body tool 10 between cBN sintered body 3 and tool base material 1 is got higher.It should be noted that " profit herein It is moist " refer to the wetability of the melt melted relative to the material for constituting bonding layer 2.
On the other hand, when the thickness d in modification portion 31 is less than 0.1 μm, since thickness is excessively thin, thus can not suitably show The said effect as brought by the high wettability of hBN etc. out.When thickness d is more than 50.0 μm, modification portion 31 becomes brokenly in itself Damage, the starting point destroyed.Thickness d is preferably 0.3 to 5.0 μm.
In cBN sintered body tool 10 according to the present embodiment, preferably there are in hBN and B in modification portion 31 At least one.In this case, bond strength has the tendency that further increasing.Itself the reason is as follows that.
That is, in order to manufacture the cBN sintered body tool for having tool base material, bonding layer and cBN sintered body, at least It needs to implement above-mentioned engagement step, in engagement step, the machining object implementation after engagement processing is let cool.However, compared to The thermal expansion coefficient of cBN, the thermal expansion coefficient of bonding layer 2 have higher tendency, thus when letting cool, compared to cBN, bonding layer 2 can larger shrink.Therefore, in conventional cBN sintered body tool (the i.e. cBN sintered body that contacts with each other of matrix 32 and bonding layer 2 Tool) in, have the tendency that biggish internal stress retains as caused by above-mentioned coefficient of thermal expansion differences.This internal stress can The reason of causing cBN sintered body to fall off from cBN sintered body tool can be become.
In contrast, since hBN and B has the thermal expansion coefficient bigger than cBN, thus by matrix 32 and bonding layer There is the modification portion 31 comprising at least one of hBN and B between 2, so as to mitigate above-mentioned coefficient of thermal expansion differences.Therefore, according to CBN sintered body tool 10 with the modification portion 31 comprising at least one of hBN and B can mitigate (reduction) compared with conventional Internal stress, as a result, compared with conventional, the bond strength between cBN sintered body 3 and tool base material 1 is got higher.
In addition, it is highly preferred that it is preferred that there is only hBN, B, B in modification portion 312O3Or B2ON3HBN in the middle.This be because For hBN is most excellent in terms of above-mentioned wetability, thermal expansion coefficient.
In addition, the content ratio of the cBN particle in cBN sintered body 3 is preferably 80.0 volume % or more, more preferably 96.0 Volume % or more.In this case, the bond strength between cBN sintered body 3 and tool base material 1 can be improved.In addition, for Such high content ratio of cBN particle, might have difficulty, but according to this implementation in technology disclosed in patent document 1 Mode is possible.
Although here, the content ratio of the cBN particle in matrix 32 is different from modification portion 31 in cBN sintered body 3 CBN particle content ratio, as long as but the content ratio of the cBN particle in entire cBN sintered body 3 within the above range, Said effect then can be achieved.
In addition, it is preferably 4 to 97 volume % that this, which combines the content ratio of phase, more when cBN sintered body 3 includes to combine phase Preferably 4 to 39 volume %.When cBN sintered body 3, which is free of, combines phase, the content ratio of cBN particle is preferably 98 to 100 bodies Product %.In this case, in cBN sintered body 3, between the mutual bond strength of cBN particle and the hardness of cBN sintered body 3 Harmony it is excellent.
In addition, the thermal conductivity of cBN sintered body 3 is preferably 70W/mK or more.In this case, it is easy to that portion 31 will be modified Thickness d control within the above range, further, the thickness d in modification portion 31 is tended to become uniform.It is believed that this be because For when the thermal conductivity of cBN sintered body 3 is 70W/mK or more, when pulse laser machining is difficult on the surface of blocky sintered body Place generates heat retention, it is thus possible to inhibit the thermally-denatured hyper expanded (promotion) as caused by heat retention.
The thermal conductivity of cBN sintered body 3 is preferably 85W/mK or more, more preferably 100W/mK or more, particularly preferably 120W/mK or more.In addition, the thermal conductivity of cBN sintered body 3 is preferably 2000W/mK or less.This is because when being more than When 2000W/mK, since the conduction of velocity of heat is too fast, to have the tendency for being difficult to be formed the modification portion 31 of adequate thickness.
The thermal conductivity of cBN sintered body 3 can be acquired by the laser flash method according to " JIS R 1611:2010 ".Specifically For, after the sample that cBN sintered body 3 cuts out measurement sample, grinding removes pulse laser machining face, to make straight The measurement sample of the thermal conductivity of diameter 18mm, thickness 1mm.Then, using thermal constant measurement device to measurement sample radiation pulses Laser, so that the specific heat and thermal diffusivity to measurement sample are measured.By by thermal diffusivity multiplied by specific heat and cBN sintered body Density calculate the thermal conductivity of cBN sintered body 3.
Measurement sample is the part for being equivalent to the matrix 32 of cBN sintered body as made by cBN sintered body 3, and is not present Modification portion 31.Therefore, in the present specification, " thermal conductivity of cBN sintered body 3 " with " matrix 32 for constituting cBN sintered body 3 is led Heating rate " is consistent.
CBN sintered body 3 according to the present embodiment is manufactured for the first time by using the manufacturing method of above-mentioned pulse laser 's.This is because by above-mentioned procedure of processing, the cBN on cBN sintered body surface is in appropriate proportions and the mode of appropriate depth Heat modification has occurred, to generate above-mentioned modification portion 31 for the first time.
In contrast, the present inventor confirmed: when processing cBN by scroll saw, Wire-cut Electrical Discharge Machining (WEDM) etc. When sintered body, above-mentioned modification portion not will form.In addition, the case where compared to pulse laser, machined surface is rougher, may There are fine cracks, broken etc..
It as pulse laser, can enumerate: using optical fiber as the optical-fiber laser of amplification medium, using YAG as amplification medium YAG laser, with CO2CO as amplification medium2Laser etc..In addition, pulse laser machining method is according to optical maser wavelength, pulse The difference of width and be divided into hot-working and non-thermal technology.It should be noted that laser is converted to material surface in hot-working The heat absorbed melts material by the heat, while being processed to the material, in contrast, in non-thermal technology In, it absorbs between the atom at the position of laser or intermolecular key is cut off, to make material with atom or molecular state wink Between evaporate, while the material is processed.
In the procedure of processing for carrying out present embodiment, preferably via the hot-working of optical-fiber laser or YAG laser.Work as use When these carry out procedure of processing, above-mentioned preferred processing conditions can be met.Wherein, it is preferable to use optical-fiber laser.This is because with YAG laser processing face is compared, the thinner thickness in the modification portion of optical-fiber laser machined surface, and can especially inhibit the production of fine crack It is raw, to keep the bond strength between cBN sintered body and tool base material 1 excellent.
In addition, pulse energy is preferably 0.01 to 1.5J about processing conditions A, pulse width be preferably 0.01 to 0.40msec.In this case, above-mentioned modified portion 31 can be further properly formed.
In addition, other than above-mentioned processing conditions A, further preferably using the pulse laser for meeting following specification.In this feelings Under condition, since the thickness of bonding layer 2 can be made to become uniformly, thus the stress being applied on joint surface in engagement step becomes equal It is even, as a result, to can further improve the bond strength between tool base material 1 and cBN sintered body 3.Optical-fiber laser is particularly easy to meet Following specification.
(specification of laser oscillator and processing machine)
Laser beam divergence: 2.0mm/mrad or less
Spot diameter: 15 μm or less.
In the case where meeting processing conditions A, the reason of being further improved for bond strength, Fig. 5 A and figure are used 5B is illustrated.Fig. 5 A is the figure of the machined object before being schematically illustrated in pulse laser machining, and Fig. 5 B is schematically to show The figure of the machined object after pulse laser machining is gone out.Arrow in Fig. 5 A indicates the machined object 20 for being irradiated to cuboid On laser direction.
The machined object 20 for preparing cuboid as shown in Figure 5A (plate) uses pulse laser by it in click and sweep when desired When being cut off at position shown in line, due to the property of pulse laser, it can not be punished in position shown in chain-dotted line and cut machined object 20, in fact, having made both machined object 20A and machined object 20B shown in Fig. 5 B.
This is because during cutting off machined object 20 with pulse laser, in that side (face of the plane of incidence of laser 21 that side) with that side (that side of face 22) of exit facet, the width (left and right directions in figure) for being processed the region removed is sent out Changing.It should be noted that in figure 5B, being processed the region removed using the shadow representation of oblique line.Therefore, face 21 and face 22 intersect respectively with section 20a, the 20b formed as cutting made of angle [alpha] and angle beta do not become desired 90 Degree.
For such machining object 20B, relative to Fig. 1 and tool base material shown in Fig. 21 (angle formed by face 1a and face 1b Degree is 90 °), with the face 1a of machined surface 20b and tool base material 1 in opposite directions, the mode opposite with the face 1b of tool base material 1 of face 22 configure The two, in this case, the face opposite each other of tool base material 1 and machining object 20B are not parallel each other.Therefore, it should fill out The in uneven thickness of the bonding layer 2 in the gap between face opposite each other of tool base material 1 and machining object 20B is filled, To need to change with gap.
When bonding layer 2 it is in uneven thickness when, the stress being applied in engagement step on joint surface become unevenly, knot Fruit, the bond strength between machining object 20B and tool base material 1 may become insufficient.Particularly, swash in conventional use of pulse Under conditions of light, angle [alpha] shown in Fig. 5 B is actually 88 ° or less.
In contrast, using the pulse laser for meeting above-mentioned condition A, made machined surface 20b can be made with intersecting with it Face 22 between angle [alpha] be 89.0 ° to 90.0 °.Similarly, the angle between face 21 that machined surface 20b can be made to intersect with it Spending β is 90.0 ° to 91.0 °.That is, can be used should become the cross one another of joint surface in cBN sintered body tool Two faces are formed by the cBN sintered body that angle is 89.0 to 91.0 °.
Therefore, the gap that can make tool between base material 1 and the opposite face of machining object 20B reduces.Therefore, with conventional phase Than, the thickness of bonding layer 2 can be made uniform, thus the stress being applied on joint surface in engagement step becomes uniform, as a result, it can Further increase the bond strength between tool base material 1 and cBN sintered body 3.In addition, from the viewpoint for further increasing bond strength From the point of view of, angle [alpha] is more preferably 89.5 ° to 90.0 °, and angle beta is more preferably 90.0 to 90.5 °.That is, in cBN sintered body In tool, cross one another two faces that should become joint surface, which are formed by the cBN sintered body that angle is 89.5 to 90.5 °, is Preferably.
[the 2nd embodiment]
In the first embodiment described above, laser machined to the cBN sintered body after support plate is eliminated, and use it CBN sintered body tool is formed, still, in the present embodiment, has the cBN sintered body of support plate to no removing support plate It is laser machined, and forms cBN sintered body tool using it.
Specifically, as shown in fig. 6, having support plate 4 on a face of cBN sintered body 3.That is, in this reality It applies in mode, support plate 4 is configured between cBN sintered body 3 and bonding layer 2.Due to have passed through sintering step as described above, Thus cBN sintered body 3 is bonded to each other strongly with support plate 4.
It should be noted that support plate 4 can be the support plate 42 after sintering step shown in Fig. 4 B, it is also possible to support A part of plate 42.That is, for support plate 4, it can be by keeping the support plate 42 after sintering step all residual It stays, to be present on a face of cBN sintered body 3, one can also be remained and not removing whole support plate 42 Part, to be present on a face of cBN sintered body 3.
In the present embodiment, in a same manner as in the first embodiment, it is thus improved on the 3a of joint surface there are modification portion Bond strength between cBN sintered body 3 and tool base material 1.
[the 3rd embodiment]
In the first embodiment described above, for the case where there are modification portions 31 on the joint surface 3a of cBN sintered body 3 It is illustrated, still, in the present embodiment, on the two faces joint surface 3a and joint surface 3b of cBN sintered body 3 All there are the case where modification portion 31 to be illustrated.It should be noted that in addition on the 3b of joint surface there are modification portion 31 with Outside, remaining is identical as the 1st embodiment, thus the description thereof will be omitted.
Referring to Fig. 2, all there are above-mentioned modified portions on the two faces joint surface 3a and joint surface 3b of cBN sintered body 3 31.By not only also carrying out above-mentioned procedure of processing in the formation of joint surface 3a but also in the formation of joint surface 3b, so as to Make such cBN sintered body.
CBN sintered body tool 10 according to the present embodiment, by the way that there are change on joint surface 3a and joint surface 3b Property portion 31, to improve the bond strength between cBN sintered body 3 and tool base material 1.
In addition, when making joint surface 3a and joint surface 3b, it is each to make by meeting the pulse laser of processing conditions A Face is so as to make the two faces joint surface 3a, 3b be formed by angle (that is, with the angle on the vertex crestal line 3c in Fig. 2) 89.0 ° or more 91.0 ° or less.Therefore, compared with conventional, the thickness of bonding layer 2 can be made more uniform, thus in engagement step The stress being applied on joint surface becomes more uniform, as a result, can further improve between tool base material 1 and cBN sintered body 3 Bond strength.
Embodiment
Hereinafter, embodiment is enumerated present embodiment to be described in detail, but present embodiment is not limited to These embodiments.
[embodiment 1]
As follows, the cBN sintered body tool with shape shown in Fig. 1 and Fig. 2 has been made.
Firstly, TiN powder and Al powder (average grain diameter is about 20 μm) are mixed to make in such a way that mass ratio is 4:1 Standby mixture.Next, carrying out heat treatment in 30 minutes to mixture at 1250 DEG C in a vacuum.Use the superhard of φ 4mm Mixture obtained by the ball of alloy and the crucible of cemented carbide will be thermally treated crushes, to obtain the raw material in conjunction with phase Powder (pulverising step).
Next, the cBN powder that preparation is made of cBN particle (average grain diameter is about 4 μm), with the original of above-mentioned combination mutually Mode of the feed powder end with the mixed proportion (volume %) of the cBN powder of cBN phase as 39:61 mixes two kinds of powder, thus It is prepared for mixed-powder.The mixed-powder is placed in vacuum drying oven, is kept for 30 minutes after being warming up to 950 DEG C, to make mixed powder End degassing.Then, the mixed-powder after degassing is stacked in the capsule on the support plate of cemented carbide and being filled in Mo, The capsule is placed in ultra-high pressure apparatus again, step (sintering step) is sintered under following sintering conditions.In sintering step Afterwards, sintered body is taken out from capsule, support plate is ground all to remove it, further progress is ground to adjust shape Shape, to be prepared for discoid cBN sintered body.
(sintering condition)
Pressure: 5GPa
Temperature: 1300 DEG C
Time: 20 minutes.
Next, being processed under following processing conditions to discoid cBN sintered body using fiber laser device (procedure of processing).The triangular prism shaped cBN sintered body with a thickness of 1.0mm has been cut out as a result, which is as schemed 1 and both sides side length shown in Fig. 2 be isosceles triangle that the apex angle between 2mm and both sides is 80 °.It is sintered in the cBN cut out The face of rectangular shape in body is the face through laser machining.
(laser processing condition)
Laser oscillator: the YLR-150/1500 (model) of IPG
Amplification medium: optical fiber
Pulse energy: 0.02J
Pulse width: 0.10msec
Output power: 150W
Frequency: 300Hz
Wavelength: 1070nm
Import gas: nitrogen
Process velocity: 50mm/ minutes.
Next, the tool base material that preparation is made of superhard alloy, it will be by the Ti of 25 mass %, the Zr of 25 mass %, 30 The Ni of the Cu of quality % and 20 mass % constitute bonding layer material clip between cBN sintered body and tool base material, and The laminated body is placed in vacuum drying oven.Then, the pressure in vacuum drying oven is set as 1 × 10-2Its internal temperature is increased to by Pa 850 DEG C, by melting the material of bonding layer, to make cBN sintered body in conjunction with tool base material.CBN sintered body have by 1 machined surface that above-mentioned procedure of processing is formed, the engagement for the cBN sintered body which is configured to be equivalent in Fig. 1 and Fig. 2 Face 3a is configured to non-processing face (corresponding to the face 22 in Fig. 5 B) to be equivalent to the joint surface 3b of cBN sintered body.
Thereafter, cBN sintered body is engaged in material obtained by tool base material from taking-up in vacuum drying oven and let cool.Then, lead to It crosses and the periphery on the joint surface of the periphery and tool base material and bonding layer on the joint surface of cBN sintered body and bonding layer is ground Mill processing, to make smoothened around joint surface.Made as a result, shape with ISO model CNGA 120408, its Top corner portion has the cBN sintered body tool of cBN sintered body.
Table 1 show the manufacturing method of the cBN sintered body tool in embodiment 1 various conditions and manufactured cBN The various features of sintered body tool.
In table 1, one column of cBN content shows the cBN content ratio (volume %) in cBN sintered body, in conjunction with one column of phase Show the composition for constituting the compound for combining phase.In addition, one column of cutting-off method shows cutting (processing) side of cBN sintered body Method (" FB " refers to optical-fiber laser), pulse width and this two column of energy show the pulse width (msec) and pulse when processing The value (J) of energy.
The cBN content ratio in cBN sintered body is calculated as follows.Firstly, (not carrying out engagement step) to after procedure of processing CBN sintered body carry out mirror ultrafinish (still, by the thickness limit of grinding be less than 50 μm), by electron microscope with 2000 It takes pictures again to the cBN sintered body of arbitrary region, and observes black region, gray area and white area.By subsidiary Energy dispersion X-ray spectral device (EDX:Energy Dispersive X-ray spectroscopy), to confirmed Black region is cBN, and gray area and white area are the combination phase other than cBN.Next, using image processing software Binary conversion treatment is carried out to above-mentioned 2000 times captured of photo, calculates region (black region shared by cBN particle in the photo Domain) the gross area, and the percentage of the ratio of black region shared by the cBN sintered body in the photo is set to volume %.
It should be noted that the mixing ratio of cBN content and raw material in cBN sintered body (use by BN particle and bond material Material mixing ratio) it is consistent.Hence, it will be appreciated that being, even if a part for constituting the cBN of cBN sintered body (is wherein located at A part of the cBN of surface region) phase transition be hBN, hBN relative to entire cBN sintered body content ratio still less than 1 body Product %.
By carrying out X-ray diffraction (XRD:X-ray to the cBN sintered body for (not carrying out engagement step) after procedure of processing Diffraction), to confirmed to constitute the composition for combining the compound of phase in cBN sintered body.It should be noted that with Under embodiment 2 to 41 and comparative example 1 to 20 in, finding out method and constituting for cBN content in cBN sintered body combines The confirmation method of the composition of the compound of phase is also same as Example 1.
[embodiment 2 to 25]
CBN sintered body tool has been made by method same as Example 1, the difference is that: for embodiment 1 CBN sintered body tool changes the composition for constituting the compound for combining phase as shown in table 1, changes support as shown in table 1 The presence or absence of body (" having ": remains a part of support;"-": whole supports is removed), and change like that as shown in table 1 Become cBN content (volume %) and simultaneously carry out sintering step, further change like that as shown in table 1 pulse width in procedure of processing and Pulse energy.
It should be noted that having used the raw material powder of combination same as Example 1 mutually in embodiment 2 to 8. In embodiment 9 to 16, by using mass ratio for 8:1 in a manner of mix mixture obtained by cBN powder and AlN powder as raw material Powder.In embodiment 17 to 25, cBN powder will be mixed in such a way that mass ratio is 9:1 and combines material powder (with 2:7:1's Powder obtained by mass ratio mixing Co powder, WC powder and Al powder) obtained by mixture as raw material powder.Embodiment 2, In 10 and 18, configured so that the face in the face 21 corresponded in Fig. 5 B is located at the 3b of face.
[embodiment 26 to 41]
CBN sintered body tool has been made by method same as Example 1, the difference is that: it will be commercially available spherical HBN be packed into as raw material to the capsule being made of refractory metal, and the capsule is directed into ultra-high pressure apparatus, It is sintered step under following sintering condition, in addition changes pulse width and pulse energy in procedure of processing like that as shown in table 2 Amount.In the sintering step, hBN is directly translated into cBN.
(sintering condition)
Pressure: 10GPa
Temperature: 2100 DEG C
Time: 20 minutes.
In embodiment 8,16,25 and 38 to 41 in above-described embodiment 1 to 41, YAG laser in place optical fiber is used to swash Light.In the case where having used YAG laser, other than changing pulse width and pulse energy as shown in table 1, other add Work condition is same as Example 1.But in optical-fiber laser, spot diameter, laser beam divergence in specification are respectively 10 μ M, 1.0mm/mrad, on the other hand, in YAG laser, specification is all bigger than these values.Implementation in embodiment 1 to 41 In example 2,10,18 and 27, configured so that the face in face 21 corresponded in Fig. 5 B is located at the 3b of face, in addition to above-described embodiment with Outside, it is configured so that the face in the face 22 corresponded in Fig. 5 B is located at the 3b of face.
[comparative example 1 to 20]
About pulverising step, in comparative example 1 to 5, the raw material powder of combination same as Example 1 mutually has been used; In comparative example 6 to 10, the raw material powder of combination same as Example 7 mutually has been used;In comparative example 11 to 14, use Raw material powder with the identical combination of embodiment 13 mutually.The mixed proportion of cBN powder such as the cBN content (body in table 3 Product %) shown in.
In addition, in comparative example 1 to 20, process shown in table 3 about procedure of processing.It should be noted that in table In 3, YAG (heat) and YAG (non-thermal) refer to the hot-working via YAG laser and the non-thermal technology via YAG laser.
About table 3, WEDM, scroll saw, the hot-working via YAG laser, the non-thermal technology via YAG laser each processing item Part is as described below.
(processing conditions of WEDM)
Wire material: brass
Linear diameter: 0.3mm
Cut-off velocity: 2mm/ minutes.
(processing conditions of scroll saw)
Wire material: diamond
Linear diameter: 0.2mm
Cut-off velocity: 0.05mm/ minutes.
(via the hot worked processing conditions of YAG laser)
Laser machine: MS 35
Amplification medium: YAG
Pulse energy: 1.6J
Pulse width: 0.5msec
Output power: 40W
Frequency: 100Hz
Wavelength: 1064nm
Process velocity: 50mm/ minutes.
(via the processing conditions of the non-thermal technology of YAG laser)
Laser oscillator: Hawk-Pro-532
Amplification medium: YAG
Pulse width: 25nsec (0.025msec)
Output power: 15W
Frequency: 1000Hz
Wavelength: 532nm
Process velocity: 50mm/ minutes.
[thermal conductivity about cBN sintered body]
By the laser flash method according to " JIS R 1611:2010 ", to acquire embodiment 1 to 41 and comparative example 1 To the thermal conductivity of 20 each cBN sintered body.Specifically, the cBN sintering for (not carrying out engagement step) first after procedure of processing Body cuts out the sample of measurement sample, then fully grinds until sample surfaces are there is no there is modified portion, to make straight The measurement sample of diameter 18mm, thickness 1mm.To the surface irradiated with pulse laser of the measurement sample, specific heat and thermal diffusivity are measured, and Thermal conductivity is calculated using these.The results are shown in tables 1 into table 3.It should be noted that the wavelength of laser is 1.06 μm, arteries and veins Rushing width is 0.4ms.
[evaluation 1: about the presence or absence of modification portion]
In each cBN sintered body tool, change for whether there is to have on the face contacted with bonding layer in cBN sintered body Property portion, observed by Raman spectrum analysis and EDS analysis.
About Raman spectrum analysis, firstly, using CP device, for being equivalent to Fig. 2 paper in cBN sintered body tool Shown on face face carry out CP processing, to be prepared for the sample of observation.Next, using Raman spectroscopy device (HORIBA LabRAM HR-800, wavelength: 532nm) the CP machined surface is observed, thus observation being connect with bonding layer in cBN sintered body Whether the contact surface of touching nearby has hBN, B2O3And B2ON3
It is analyzed about EDS, above-mentioned CP processing is observed using EDS analytical equipment (JED-2300, Japan Electronics Corporation's system) Face, so that whether observation has B near the contact surface contacted with bonding layer in cBN sintered body.
Then, hBN, B, B observed2O3And B2ON3At least one of in the sample of ingredient, will be connect from bonding layer The position of the contact surface of touching is set out, that side of penetralia in the region there are any one in mentioned component Thickness (μm) of the shortest distance as modification portion until position.The results are shown in tables 1 into table 3.
As shown in table 1 to table 3, in the cBN sintered body that machined by optical-fiber laser and by via YAG laser The cBN sintered body that machined of hot-working in, confirmed on the face corresponding to face 3a that there are modification portions.It needs Bright, the modification portion confirmed is both formed in the entire surface in each face in arbitrary cBN sintered body.
It should be noted that about comparative example 14 and 20, since the cBN sintered body processing via WEDM can not be carried out, because And " can not cut off " is expressed as in table 2.
[evaluation 2: the joint surface about cBN sintered body is formed by angle]
Above-mentioned abradant surface is observed using microscope, and is determined joint surface and be formed by angle (face 3a and face 3b institute shape At angle).Its result is illustrated in table 1 and table 2.
[evaluation 3: about bond strength]
In each cBN sintered body tool, the bond strength between cBN sintered body and tool base material is determined.This is connect The measuring method for closing intensity, is illustrated using Fig. 7 A and Fig. 7 B.
Fig. 7 A is the general of the applying method of punching press stick when being schematically illustrated in the bond strength of measurement cBN sintered body tool The plan view wanted, Fig. 7 B are the applying method of punching press stick when being schematically illustrated in the bond strength of measurement cBN sintered body tool Summary main view.
As shown in figs. 7 a and 7b, in cBN sintered body tool 10, load only is applied to cBN sintered body 3, without to work Have base material 1 and apply load, makes contacting by side for the punching press stick 30 and cBN sintered body 3 of cemented carbide in this way.It needs It is noted that being adjusted when cBN sintered body tool 10 has support plate 4 so that load is applied to cBN sintered body 3 With 4 the two of support plate.Then, tool base material 1 is fixed so that its is motionless, the load of punching press stick 30 is then gradually increased, and Measure load when cBN sintered body 3 is broken from tool base material 1.By load when being broken divided by cBN sintered body 3 and tool base material 1 Between bonding area, to calculate the bond strength (kgf/mm of per unit area2).Its result is illustrated in table 1 into table 3.
As shown in table 1 to table 3, it has been confirmed that compared to the cBN sintered body tool of comparative example, the cBN sintered body of embodiment Bond strength in tool between cBN sintered body and tool base material is higher.
Embodiment and embodiment disclosed herein are all exemplary in all respects, it should be considered not being limitation Property.The scope of the present invention is not indicated by above embodiment and embodiment, is indicated by claims, and The all modifications being intended to be included in the meaning and range being equal with scope of the claims.
The explanation of symbol
1 tool base material;2 bonding layers;3,3A cBN sintered body;4 support plates;10 cBN sintered body tools;31 is modified Portion;32 matrixes;The face 1a, 1b, 3a, 3b;3c crestal line;20 machined objects;20A, 20B machining object;20Bb machined surface;20a The plane of incidence;20b exit facet;30 punching press sticks.

Claims (9)

1. a kind of cubic boron nitride sintered body tool, has:
Tool base material,
The bonding layer that is set on tool base material surface and
The cubic boron nitride sintered body of the tool base material is engaged in via the bonding layer, wherein
The cubic boron nitride sintered body has the joint surface engaged with the bonding layer,
There are comprising selected from by hexagonal boron nitride, boron, boron oxide and nitrogen oxidation at least one face in the joint surface The modification portion of at least one of group composed by boron,
The modified portion has 0.1 μm or more 50.0 μm of thickness below.
2. cubic boron nitride sintered body tool according to claim 1, wherein the modified portion has 0.3 μm or more 5.0 μ M thickness below.
3. cubic boron nitride sintered body tool according to claim 1 or 2, wherein the cubic boron nitride sintered body is neutral The content of square boron nitride is 80.0 volume % or more.
4. cubic boron nitride sintered body tool according to claim 1 or 2, wherein the cubic boron nitride sintered body is neutral The content of square boron nitride is 96.0 volume % or more.
5. cubic boron nitride sintered body tool according to claim 1 or 2, wherein by intersecting in the joint surface Two joint surfaces be formed by angle be 89.0 ° or more 91.0 ° or less.
6. cubic boron nitride sintered body tool according to claim 1 or 2, wherein the cubic boron nitride sintered body is led Heating rate is 70W/mK or more.
7. a kind of cubic boron nitride sintered body is used for cubic boron nitride sintered body work described in any one of claims 1 to 6 In tool.
8. a kind of manufacturing method of cubic boron nitride sintered body tool is used for manufacture and has tool base material, is set to the work Have the bonding layer on base material surface and is engaged in the cubic boron nitride sintered body of the tool base material via the bonding layer Cubic boron nitride sintered body tool, the manufacturing method includes:
The step of being sintered boron nitride particles to make cubic boron nitride sintered body;
The step of cubic boron nitride sintered body is laser machined by pulse laser;
The cubic boron nitride sintered body after laser machining is bonded to the tool base material via the bonding layer Step,
In the laser processing the step of, the pulse energy of the pulse laser is 0.01J or more 1.5J hereinafter, pulse width It is 0.01msec or more 0.40msec hereinafter, output power is 30W or more 500W or less.
9. the manufacturing method of cubic boron nitride sintered body tool according to claim 8, wherein the pulse laser is light Fine laser.
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