CN108527059B - Circular plate periphery polishing device and polishing method using polishing device - Google Patents

Circular plate periphery polishing device and polishing method using polishing device Download PDF

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Publication number
CN108527059B
CN108527059B CN201810597774.5A CN201810597774A CN108527059B CN 108527059 B CN108527059 B CN 108527059B CN 201810597774 A CN201810597774 A CN 201810597774A CN 108527059 B CN108527059 B CN 108527059B
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China
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polishing
clamping block
circular plate
workbench
lower clamping
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CN108527059A (en
Inventor
张兰海
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Suzhou Hangtai Cellular Technology Co ltd
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Suzhou Hangtai Cellular Technology Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/04Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of metal, e.g. skate blades
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Abstract

The utility model discloses a circular plate peripheral edge polishing device, relates to the field of aluminum honeycomb core processing, and aims to solve the problem of inconvenient polishing of the circular plate peripheral edge in the prior art; the polishing device also comprises a round table-shaped upper clamping block used for clamping and fixing the round plate to be polished in a matched manner with the lower clamping block, and a second driving mechanism used for driving the upper clamping block to move up and down along the vertical direction; the upper clamping block is coaxially arranged above the lower clamping block; the workbench is provided with a mounting frame, and the second driving mechanism is arranged on the mounting frame and is movably connected with the upper clamping block; and the polishing device is arranged on the workbench and used for polishing the periphery of the circular plate to be polished. The utility model further aims to provide a method for polishing the circular plate by using the polishing device, which has the advantages of simplicity and convenience in operation and high processing quality of products.

Description

Circular plate periphery polishing device and polishing method using polishing device
Technical Field
The utility model relates to the field of aluminum honeycomb core processing, in particular to a polishing device for the periphery of a circular plate and a polishing method using the polishing device.
Background
A circular plate 8 is shown in figure 1 which is machined from an aluminium honeycomb core. The periphery of the round plate 8 subjected to preliminary stamping is often provided with burrs and needs to be further polished; in some special applications, the periphery of the circular plate 8 needs to be polished to form a conical surface to obtain a circular plate 8 in the shape of a truncated cone as shown in fig. 2. And conventional manual polishing is difficult to ensure polishing quality, and polishing is time-consuming and labor-consuming. Thus, there is a need for a polishing apparatus that can quickly and easily polish the periphery of a circular plate.
Disclosure of Invention
Aiming at the defects in the prior art, the utility model aims to provide the circular plate periphery polishing device which has the advantages of high polishing efficiency and good polishing product uniformity.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
the circular plate periphery polishing device comprises a workbench, wherein a lower clamping block in a circular table shape and a first driving mechanism for driving the lower clamping block to circumferentially rotate in the horizontal direction are arranged on the workbench; the polishing device also comprises a round table-shaped upper clamping block used for clamping and fixing the round plate to be polished in a matched manner with the lower clamping block, and a second driving mechanism used for driving the upper clamping block to move up and down along the vertical direction; the upper clamping block is coaxially arranged above the lower clamping block; the workbench is provided with a mounting frame, and the second driving mechanism is arranged on the mounting frame and is movably connected with the upper clamping block; and the polishing device is arranged on the workbench and used for polishing the periphery of the circular plate to be polished.
Through adopting above-mentioned technical scheme, place the circular plate that will polish at the top surface of clamp splice down, utilize second actuating mechanism drive to go up the clamp splice and reciprocate in vertical direction, press from both sides the tight fixed circular plate of clamp splice cooperation with down. The first driving mechanism drives the lower clamping block to circumferentially rotate in the horizontal direction, and at the moment, the upper clamping block and the circular plate clamped between the upper clamping block and the lower clamping block rotate along with the upper clamping block and the lower clamping block. The periphery of the circular plate can be polished quickly by means of the polishing device in the process of rotating the circular plate, so that the polishing is convenient and quick, and the polished product quality is good in uniformity.
Further, the polishing device comprises a first vertical rod, a second vertical rod and a polishing rod, wherein the first vertical rod and the second vertical rod are perpendicular to the top surface of the workbench, the polishing rod is hinged to the top end of the first vertical rod, and the polishing rod is arranged along the length direction perpendicular to the vertical rod; the polishing rod is divided into a polishing end and a holding end by taking the hinged position as a boundary, the second vertical rod is positioned on one side of the first vertical rod far away from the lower clamping block, and a reset elastic piece is connected between the polishing end and the second vertical rod.
Through adopting above-mentioned technical scheme, pulling the end of gripping can make the end of polishing of pole and the periphery contact of the circular plate of being held between last clamp splice and lower clamp splice, reset elastic component is stretched, utilizes the relative friction between end of polishing and the circular plate to polish the periphery of circular plate. After the holding end is loosened, the reset elastic piece is restored to deform, the polishing end rotates in the direction away from the lower clamping block, and the initial state is restored. In order to avoid frequent replacement of the polishing rod, a friction-resistant polishing strip can be inserted between the polishing end and the periphery of the circular plate during polishing, the polishing end is enabled to rotate to abut against the polishing strip by pulling the holding end, and friction between the polishing strip and the circular plate is utilized for polishing.
Further, the length of the gripping end is greater than the length of the sharpening end.
Through adopting above-mentioned technical scheme, the moment of holding the end is bigger, easily pulls the periphery that can make the end of polishing support tight circular plate with great pressure, polishes the circular plate more rapidly.
Further, the first driving mechanism comprises a driving motor arranged below the workbench and a rotating shaft penetrating through the workbench, wherein the top end of the rotating shaft is fixedly connected with the lower clamping block, and the bottom end of the rotating shaft is fixedly connected with the driving end of the driving motor.
Through adopting above-mentioned technical scheme, the drive motor is circular, can conveniently control with the help of control switch after the circular plate's rotation and direction of rotation have been made things convenient for in control to turn on and off, and the convenience is rapid of polishing.
Further, the mounting frame comprises two guide posts which are perpendicular to the top surface of the workbench and a transverse plate which is arranged between the tail ends of the guide posts far away from the workbench; the second driving mechanism comprises a movable plate which is movably sleeved on the two guide posts and is positioned below the transverse plate, and a driving air cylinder which is arranged on the transverse plate and the movable end of which is fixedly connected with the movable plate; the bottom surface of diaphragm is fixed to be provided with the installation axle, go up the clamp splice and rotate the bottom that sets up in the installation axle.
Through adopting above-mentioned technical scheme, the cooperation of fly leaf and guide pillar has played the guide effect to the removal of last clamp splice for go up clamp splice and lower clamp splice and be in coaxial condition all the time, go up the clamp splice and move down and the clamp splice is better with the centre gripping fixed effect of circular plate when joining in marriage down.
Further, a linear bearing is arranged between the movable plate and the guide post.
By adopting the technical scheme, the sliding friction force between the movable plate and the guide post is reduced, so that the movable plate moves up and down on the guide post more smoothly.
Further, at least two positioning rods distributed along the circumferential direction of the lower clamping block are vertically arranged on the plane of the workbench, and the length of each positioning rod is greater than the distance from the top surface of the lower clamping block to the top surface of the workbench.
Through adopting above-mentioned technical scheme, when the top surface of clamp splice is placed the circular plate of waiting to polish down, can carry out quick location to the position of circular plate for the axis of circular plate and the axis of clamp splice remain unanimous basically down.
Further, the upper clamping block and the lower clamping block are both in a truncated cone shape, the top surface diameter of which is smaller than the bottom surface diameter, and the bottom surface diameter of the upper clamping block is smaller than the top surface diameter of the lower clamping block; the side face of the polishing end is provided with an inclined face.
By adopting the technical scheme, the circular plate polishing machine is suitable for special polishing requirements on the circular plate, and the circular plate with the conical circumferential side surface can be obtained after polishing.
The utility model further aims to provide a polishing method for the periphery of the circular plate, which has the advantages of convenience in operation and high polishing quality.
A polishing method for the periphery of a circular plate uses the polishing device for polishing the periphery of the circular plate.
In summary, the utility model has the following beneficial effects:
1. the upper clamping block is driven to move downwards by the second driving mechanism, so that the circular plate to be polished can be clamped and fixed between the upper clamping block and the lower clamping block, and the circumferential rotation periphery of the circular plate is polished smoothly, thereby being convenient and quick under the cooperation of the first driving device and the polishing device;
2. the polishing end of the polishing rod can be driven to abut against the periphery of the circular plate to polish by pulling the holding end, or the wear-resistant block is abutted between the polishing end and the periphery of the circular plate to polish by using the polishing end, so that the polishing efficiency of the circular plate is high, and the operation is convenient;
3. the upper clamping block and the lower clamping block are both arranged in a circular truncated cone shape with the top surface diameter larger than the bottom surface diameter, so that the periphery of the circular plate can be rapidly polished into a conical surface consistent with the conical side surface taper of the circular truncated cone, and the polishing device can adapt to the polishing requirement of a special circular plate.
Drawings
FIG. 1 is a schematic view of a circular plate in the prior art;
FIG. 2 is a cross-sectional view of a circular plate in the background art;
FIG. 3 is a schematic view of the peripheral polishing apparatus for a circular plate according to embodiment 1;
FIG. 4 is an enlarged view of portion A of FIG. 3;
FIG. 5 is a schematic view showing the structure of the lower clamp block and the polishing apparatus in embodiment 1;
FIG. 6 is a diagram showing the polishing of a circular plate by the circular plate peripheral polishing apparatus of example 1;
FIG. 7 is a second working condition diagram of polishing a circular plate by using the circular plate peripheral polishing device in example 1;
fig. 8 is a third working condition diagram of polishing a circular plate by using the circular plate peripheral polishing device in embodiment 1.
In the figure: 1. a work table; 11. a positioning rod; 12. a first vertical rod; 13. polishing a rod; 131. polishing the end; 132. a grip end; 14. a second vertical rod; 15. an elastic member; 2. an upper clamping block; 3. a lower clamping block; 4. a mounting frame; 41. a guide post; 411. a linear bearing; 42. a cross plate; 5. a driving motor; 51. a rotating shaft; 6. a movable plate; 61. a mounting shaft; 7. a driving cylinder; 8. a circular plate; 9. and (5) grinding the blocks.
Detailed Description
The present utility model will be described in further detail with reference to the accompanying drawings.
Example 1
Referring to fig. 3, the circular plate periphery polishing device comprises a rectangular workbench 1, and a mounting frame 4 is arranged on the workbench 1. The mounting frame 4 comprises two guide posts 41 arranged perpendicular to the workbench 1 and a transverse plate 42 arranged at the top end of the guide posts 41. The top surface of the transverse plate 42 is fixedly provided with a driving air cylinder 7, and the movable end of the driving air cylinder 7 penetrates through the transverse plate 42. The guide post 41 is sleeved with a movable plate 6 positioned below the transverse plate 42, and the top surface of the movable plate 6 is fixedly connected with the movable end of the driving cylinder 7. A linear bearing 411 is provided between the movable plate 6 and the guide post 41, and the movable plate 6 can move up and down along the length direction of the guide post 41 under the drive of the driving cylinder 7. The drive cylinder 7 may be controlled using solenoid valves commonly used in the art.
Referring to fig. 4, a mounting shaft 61 is provided at the bottom surface of the movable plate 6, and an upper clamp block 2 is rotatably coupled to the bottom end of the mounting shaft 61 through a bearing. The upper clamping block 2 is in a round table shape, and the diameter of the top surface is smaller than that of the bottom surface. A lower clamping block 3 in a shape of a circular table is coaxially arranged below the upper clamping block 2. The diameter of the top surface of the lower clamping block 3 is smaller than the diameter of the bottom surface. The taper of the tapered sides of the upper clamping block 2 and the lower clamping block 3 are the same.
Referring to fig. 3 and 4, a rotating shaft 51 penetrating through the table 1 is provided on the table 1, and the lower clamp block 3 is fixedly provided at the top end of the rotating shaft 51 to be rotatable along with the rotating shaft 51 in the horizontal direction. A driving motor 5 is arranged below the workbench 1, the bottom end of the rotating shaft 51 is fixedly connected with the driving end of the driving motor 5, and the rotating shaft 51 can be driven to rotate through the driving motor 5.
Referring to fig. 4 and 5, a polishing device is provided on the table 1. The grinding device comprises a first vertical rod 12, a grinding rod 13, a second vertical rod 14 and an elastic piece 15. The polishing rod 13 is hinged at the top end of the first vertical rod 12, and is divided into a polishing end 131 and a holding end 132 by taking a hinged position as a boundary. The side of the grinding end 131 facing the lower clamping block 3 is provided as an inclined surface, and the length of the holding end 132 is longer than that of the grinding end 131. The polishing end 131 and the top end of the second vertical rod 14 are connected with springs as elastic members 15. According to the arrow square pulling holding end 132 shown in fig. 5, the polishing end 131 can be driven to rotate towards the direction approaching to the lower clamping block 3 against the tensile force of the elastic member 15. Polishing is performed by the inclined surface of the polishing end 131 abutting the peripheral edge of the circular plate 8 (shown in fig. 1) clamped and fixed between the upper clamp block 2 and the lower clamp block 3. The holding end 132 is released, the elastic member 15 is restored to be deformed, and the polishing end 131 is rotated to be reset. In order to avoid excessive wear of the polishing end 131, the polishing end needs to be replaced frequently in actual use, and a polishing block made of wear-resistant materials can be utilized for polishing. When polishing, the holding end 132 is pulled to clamp the polishing block between the polishing end 131 and the periphery of the circular plate 8.
Referring to fig. 4 and 5, the workbench 1 is further provided with two positioning rods 11 perpendicular to the workbench 1, in this embodiment, the two positioning rods 11 are distributed along the circumferential direction of the lower clamping block 3, and the length of the positioning rods 11 is greater than the distance between the top surface of the lower clamping block 3 and the top surface of the workbench 1. When the circular plate 8 (shown in fig. 1) is placed on the top surface of the lower clamping block 3, the circular plate 8 can be quickly placed at a position coaxial with the lower clamping block 3 by virtue of the positioning effect of the positioning rod 11.
The working principle is as follows:
the circular plate 8 to be polished is placed on the top surface of the lower clamping block 3, and the axis of the circular plate 8 and the axis of the lower clamping block 3 can be basically overlapped by the positioning action of the positioning rod 11. The driving cylinder 7 is started to drive the movable plate 6 to move up and down on the guide post 41, and the movable plate 6 drives the mounting shaft 61 and the upper clamping block 2 to move down, so that the circular plate 8 is clamped and fixed between the upper clamping block 2 and the lower clamping block 3 to be in a state shown in fig. 6. At this time, the gripping end 132 is pulled to rotate the polishing end 131 of the polishing rod 13 until the side surface abuts against the periphery of the circular plate 8, and meanwhile, the driving motor 5 is started, and the lower clamping block 3, the circular plate 8 and the upper clamping block 2 are driven to rotate circumferentially synchronously by the rotating shaft 51, so that the periphery of the circular plate 8 can be polished until the circular plate 8 is in a state as shown in fig. 7. Because the taper of the tapered sides of the upper clamping block 2 and the lower clamping block 3 is the same, the circular plate 8 is polished into a truncated cone shape with a trapezoid cross section under the cooperation of the polishing end 131 provided with the inclined surface. The polishing device can be used for rapidly polishing the periphery of the circular plate 8, and is simple and convenient to operate.
Example 2
The circular plate peripheral edge polishing method adopts the circular plate peripheral edge polishing device in the embodiment 1 to polish, and comprises the following specific steps:
firstly, placing a circular plate 8 to be polished on the top surface of a lower clamping block 3, so that the periphery of the circular plate 8 is abutted against a positioning rod 11; the circular plate 8 placed on the lower clamp block 3 is to cover the top surface of the lower clamp block 3;
step two, starting a driving cylinder 7, driving a movable plate 6 to drive a mounting shaft 61 and an upper clamping block 2 to move downwards, and clamping and fixing a circular plate 8 by the upper clamping block 2 and a lower clamping block 3;
step three, starting a driving motor 5, and driving the lower clamping block 3, the circular plate 8 and the upper clamping block 2 to synchronously rotate through a rotating shaft 51;
step four, pulling the holding end 132 of the polishing rod 13 to enable the polishing end 131 to rotate towards the lower clamping block 3; the side surface of the polishing end 131 is abutted against the periphery of the rotary circular plate 8, and the periphery of the circular plate 8 is polished to be in the state shown in fig. 7;
step five, loosening the holding end 132, recovering the deformation of the elastic piece 15, and rotating and resetting the polishing end 131; and (3) closing the driving motor 5, controlling the driving cylinder 7 to drive the movable plate 6 to move upwards, separating the upper clamping block 2 from the lower clamping block 3, and taking out the polished circular plate 8.
Example 3
A circular plate peripheral edge grinding method, which is substantially the same as in example 2, except that: in the fourth step, a polishing block 9 is clamped between the polishing end 131 of the polishing rod 13 and the periphery of the rotary circular plate 8 during polishing, and the polishing block 9 is made of hard wear-resistant materials. When the polishing operation is performed, one hand holds the polishing block 9 so that the end part of the polishing block 9 is positioned between the polishing end 131 and the circular plate 8, and the other hand pulls the holding end 132 of the polishing rod 13 so that the polishing end 131 of the polishing rod 13 abuts against the polishing block 9. By polishing with the frictional force between the polishing block 9 and the peripheral edge of the circular plate 8, the inconvenience of replacement and repair caused by abrasion of the polishing end 131 can be avoided.
The above-described embodiments are provided for illustration only and not for limitation of the present utility model, and modifications may be made to the embodiments without creative contribution by those skilled in the art after reading the present specification, as long as they are protected by patent laws within the scope of claims of the present utility model.

Claims (7)

1. The circular plate periphery polishing device comprises a workbench (1), wherein a lower clamping block (3) and a first driving mechanism for driving the lower clamping block (3) to circumferentially rotate in the horizontal direction are arranged on the workbench (1);
the polishing device further comprises an upper clamping block (2) used for being matched with the lower clamping block (3) to clamp and fix the circular plate (8) to be polished, and a second driving mechanism used for driving the upper clamping block (2) to move up and down along the vertical direction; the upper clamping block (2) is coaxially arranged above the lower clamping block (3);
the workbench (1) is provided with a mounting frame (4), and the second driving mechanism is arranged on the mounting frame (4) and is movably connected with the upper clamping block (2);
the polishing device is arranged on the workbench (1);
the method is characterized in that:
the polishing device is used for polishing the periphery of the circular plate (8) to be polished;
the polishing device comprises a first vertical rod (12) which is perpendicular to the plane of the workbench (1), a second vertical rod (14) and a polishing rod (13) which is hinged to the top end of the first vertical rod (12), wherein the polishing rod (13) is arranged along the length direction perpendicular to the vertical rod; the polishing rod (13) is divided into a polishing end (131) and a holding end (132) by taking a hinged position as a boundary, the second vertical rod (14) is positioned at one side of the first vertical rod (12) far away from the lower clamping block (3), and a reset elastic piece (15) is connected between the polishing end (131) and the second vertical rod (14); the side surface of the polishing end (131) is provided with an inclined surface;
the upper clamping block (2) and the lower clamping block (3) are in a truncated cone shape, the top surface diameter of which is smaller than the bottom surface diameter, and the bottom surface diameter of the upper clamping block (2) is smaller than the top surface diameter of the lower clamping block (3).
2. The circular plate peripheral edge grinding device according to claim 1, wherein: the length of the holding end (132) is longer than the length of the polishing end (131).
3. The circular plate peripheral edge grinding device according to claim 2, wherein: the first driving mechanism comprises a driving motor (5) arranged below the workbench (1) and a rotating shaft (51) penetrating through the workbench (1), wherein the top end of the rotating shaft (51) is fixedly connected with the lower clamping block (3), and the bottom end of the rotating shaft is fixedly connected with the driving end of the driving motor (5).
4. The circular plate peripheral edge grinding device according to claim 2, wherein: the mounting frame (4) comprises two guide posts (41) which are perpendicular to the top surface of the workbench (1) and a transverse plate (42) which is arranged between the tail ends of the guide posts (41) which are far away from the workbench (1); the second driving mechanism comprises a movable plate (6) which is movably sleeved on the two guide posts (41) and is positioned below the transverse plate (42), and a driving air cylinder (7) which is arranged on the transverse plate (42) and the movable end of which is fixedly connected with the movable plate (6); the bottom surface of the transverse plate (42) is fixedly provided with a mounting shaft (61), and the upper clamping block (2) is rotatably connected to the bottom end of the mounting shaft (61).
5. The circular plate peripheral edge grinding device as claimed in claim 4, wherein: a linear bearing (411) is arranged between the movable plate (6) and the guide post (41).
6. A circular plate peripheral edge grinding device in accordance with claim 3, wherein: at least two positioning rods (11) distributed along the circumferential direction of the lower clamping block (3) are vertically arranged on the plane of the workbench (1), and the length of each positioning rod (11) is greater than the distance from the top surface of the lower clamping block (3) to the top surface of the workbench (1).
7. A polishing method for the periphery of a circular plate is characterized in that: polishing with the circular plate peripheral edge polishing device according to claim 1.
CN201810597774.5A 2018-06-11 2018-06-11 Circular plate periphery polishing device and polishing method using polishing device Active CN108527059B (en)

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Publication number Priority date Publication date Assignee Title
CN109514378A (en) * 2018-11-21 2019-03-26 湖南大合新材料有限公司 A kind of band reinforces the gallium antimonide monocrystalline piece side grinding apparatus of fixed function
CN109434687B (en) * 2018-11-21 2023-04-14 湖南大合新材料有限公司 Telescopic pressing module for gallium antimonide single crystal wafer clamping equipment
CN109531332A (en) * 2018-11-21 2019-03-29 湖南大合新材料有限公司 A kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side
CN112222977A (en) * 2020-10-14 2021-01-15 湖州奇奇机电科技有限公司 Edge top surface polishing mechanism for circular plate

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CN101352906A (en) * 2008-09-02 2009-01-28 深圳市乐普泰科技有限公司 Glue injection machining method and apparatus for conductor roll
JP2016203342A (en) * 2015-04-27 2016-12-08 株式会社Sumco Method for manufacturing truer and method for manufacturing semiconductor wafer, and chamfering device for semiconductor wafer

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