CN109531332A - A kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side - Google Patents

A kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side Download PDF

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Publication number
CN109531332A
CN109531332A CN201811394229.2A CN201811394229A CN109531332A CN 109531332 A CN109531332 A CN 109531332A CN 201811394229 A CN201811394229 A CN 201811394229A CN 109531332 A CN109531332 A CN 109531332A
Authority
CN
China
Prior art keywords
plate
gallium antimonide
guide rod
monocrystalline piece
antimonide monocrystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811394229.2A
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Chinese (zh)
Inventor
王歆
吴秀丽
陈琳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hunan Dahe New Material Co Ltd
Original Assignee
Hunan Dahe New Material Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hunan Dahe New Material Co Ltd filed Critical Hunan Dahe New Material Co Ltd
Priority to CN201811394229.2A priority Critical patent/CN109531332A/en
Publication of CN109531332A publication Critical patent/CN109531332A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00Drives or gearings; Equipment therefor
    • B24B47/10Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
    • B24B47/12Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power

Abstract

A kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side, including pedestal, vacuum chuck and flexible compression module, vacuum chuck is mounted on the output shaft of the second motor, flexible compression module is fixed on bracket, the upper end of support base is arranged in bracket, gallium antimonide monocrystalline piece is mounted on vacuum chuck, and flexible compression module includes cylinder, mounting flange, connecting shaft, bearing, round tube, end plate, guide rod, spring and top plate;Wherein the extension end of mounting flange and cylinder connects, the bottom of mounting flange is arranged in connecting shaft, bearing is arranged in round tube and connects with shaft end is connect, end plate is fixed on round tube bottom, one end of guide rod is arranged in the pilot hole in end plate, the other end of guide rod is fixedly connected with top plate, and restraining position ring block is arranged in guide rod in pilot hole, and spring is set on the guide rod between end plate and top plate.The configuration of the present invention is simple, high degree of automation can carry out quickly folder assembly and disassembly to the gallium antimonide monocrystalline piece of 5-15mm thickness, improve production efficiency.

Description

A kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side
Technical field
The present invention relates to a kind of quick clamping devices for the polishing of gallium antimonide monocrystalline piece side.
Background technique
Gallium antimonide is a kind of group Ⅲ-Ⅴ compound semiconductor material, can not show a candle to other semiconductor materials (such as to its research GaAs, InP etc.) like that deeply.But this material was more and more intriguing in recent years, this is mainly Fibre Optical Communication Technology Development, caused by the potential demand to new device.In optical communications in order to reduce the loss in transmission, always adopt as far as possible With the light of longer wavelength, the light of 0.8 mum wavelength is used earliest, uses the light of 1.55 mum wavelengths now.Next-generation optical fiber according to estimates Communication will be using the light of more long wavelength.Research shows that certain non-silicon material optical fiber transmission damage when wavelength is the range of (2~4) μm It consumes smaller.In all III-V race's materials, gallium antimonide causes more attentions as substrate material because it can with it is each Ternary, the lattice constant of quaternary solid solution alloy of kind of III-V race's material match, the ranges of these material spectrums (0.8~ μm 4.0) between, conform exactly to require.In addition, more long wave can also be manufactured using the inter-band absorption of gallium antimonide sill superlattices The detector of long (8~14) μ m.
Gallium antimonide monocrystalline piece surface flatness is increasingly particular about in existing instrument, the existing folder for gallium antimonide monocrystalline piece It fills the generally existing process that clamps to be responsible for, is easy that gallium antimonide monocrystalline piece surface is caused to damage when clamping.
Summary of the invention
The purpose of the present invention is in view of the above problems, providing a kind of quickly clamping for the polishing of gallium antimonide monocrystalline piece side Equipment, structure is simple, high degree of automation, and quickly folder assembly and disassembly can be carried out to the gallium antimonide monocrystalline piece of 5-15mm thickness, are mentioned High production efficiency.
In order to achieve the above object, the technical solution adopted by the present invention is that: it includes pedestal, vacuum chuck and flexible pressure die Block, vacuum chuck are mounted on the output shaft of the second motor, and flexible compression module is fixed on bracket, and bracket is arranged in support base Upper end, gallium antimonide monocrystalline piece is mounted on vacuum chuck, and flexible compression module includes cylinder, mounting flange, connecting shaft, axis It holds, round tube, end plate, guide rod, spring and top plate;Wherein the extension end of mounting flange and cylinder connects, and connecting shaft setting is solid Determine the bottom of flange, bearing is arranged in round tube and connects with shaft end connect, and end plate is fixed on round tube bottom, and the one of guide rod It holds in the pilot hole being arranged in end plate, the other end of guide rod is fixedly connected with top plate, and guide rod is provided in pilot hole Stop collar, spring are set on the guide rod between end plate and top plate.
Further, it is connected between end plate and round tube by sunk screw.
Further, the bottom of top plate has anti-slip layer.
Further, top plate is rubber material.
Beneficial effects of the present invention: it is set the present invention provides a kind of for quickly clamping for gallium antimonide monocrystalline piece side polishing Standby, structure is simple, high degree of automation, and quickly folder assembly and disassembly can be carried out to the gallium antimonide monocrystalline piece of 5-15mm thickness, are improved Production efficiency.
When the present invention clamps gallium antimonide monocrystalline piece, the damage to gallium antimonide monocrystalline piece is reduced, improves the matter of product Amount.
Cylinder drives top plate to move downward in the present invention, and top plate, which compress to gallium antimonide monocrystalline piece upper end, prevents gallium antimonide Single-chip is subjected to displacement in polishing, the fixation to gallium antimonide monocrystalline piece is strengthened, to realize 5-15mm thickness gallium antimonide list Chip clamps, and when polishing pad polishes to gallium antimonide monocrystalline piece side, top plate rotates together with gallium antimonide monocrystalline piece, bullet The flexible of spring protects top plate, with cushion effect, to gallium antimonide monocrystalline piece when pressing to gallium antimonide monocrystalline piece.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is the structural schematic diagram of flexible compression module in the present invention.
Label character described in figure indicates are as follows: the 1, second motor;13, stretch compression module;14, bracket;15, support base; 16, gallium antimonide monocrystalline piece;17, vacuum chuck;18, pedestal;1301, cylinder;1302, bearing;1303, round tube;1304, end plate; 1305, top plate;1306, spring;1307, guide rod;1308, connecting shaft;1309, mounting flange.
Specific embodiment
In order to make those skilled in the art more fully understand technical solution of the present invention, with reference to the accompanying drawing to the present invention into Row detailed description, the description of this part be only it is exemplary and explanatory, should not have any limitation to protection scope of the present invention Effect.
As Figure 1-Figure 2, specific structure of the invention are as follows: it includes pedestal 18, vacuum chuck 17 and flexible pressure die Block 13, vacuum chuck 17 are mounted on the output shaft of the second motor 1, and the compression module 13 that stretches is fixed on the support 14, bracket 14 The upper end of support base 15 is set, and gallium antimonide monocrystalline piece 16 is mounted on vacuum chuck 17, and the compression module 13 that stretches includes cylinder 1301, mounting flange 1309, connecting shaft 1308, bearing 1302, round tube 1303, end plate 1304, guide rod 1307,1306 and of spring Top plate 1305;Wherein mounting flange 1309 is connect with the extension end of cylinder 1301, and connecting shaft 1308 is arranged in mounting flange 1309 Bottom, bearing 1302, which is arranged in round tube 1303 and with 1308 end of connecting shaft, to be connect, and end plate 1304 is fixed on round tube 1303 Bottom, one end of guide rod 1307 are arranged in the pilot hole 1310 in end plate 1304, the other end and top plate of guide rod 1307 1305 are fixedly connected, and restraining position ring block 1311 is arranged in guide rod 1307 in pilot hole 1310, and spring 1306 is set in end plate 1304 On guide rod 1307 between top plate 1305.
Preferably, it is connected between end plate 1304 and round tube 1303 by sunk screw.
Preferably, the bottom of top plate 1305 has anti-slip layer.
Preferably, top plate 1305 is rubber material.
Compared with prior art, the present invention the advantage with following aspect:
The configuration of the present invention is simple, high degree of automation can quickly clamp the gallium antimonide monocrystalline piece of 5-15mm thickness And disassembly, improve production efficiency.
When the present invention clamps gallium antimonide monocrystalline piece, the damage to gallium antimonide monocrystalline piece is reduced, improves the matter of product Amount.
Cylinder drives top plate to move downward in the present invention, and top plate, which compress to gallium antimonide monocrystalline piece upper end, prevents gallium antimonide Single-chip is subjected to displacement in polishing, the fixation to gallium antimonide monocrystalline piece is strengthened, to realize 5-15mm thickness gallium antimonide list Chip clamps, and when polishing pad polishes to gallium antimonide monocrystalline piece side, top plate rotates together with gallium antimonide monocrystalline piece, bullet The flexible of spring protects top plate, with cushion effect, to gallium antimonide monocrystalline piece when pressing to gallium antimonide monocrystalline piece.
It should be noted that, in this document, the terms "include", "comprise" or its any other variant are intended to non-row His property includes, so that the process, method, article or equipment for including a series of elements not only includes those elements, and And further include other elements that are not explicitly listed, or further include for this process, method, article or equipment institute it is intrinsic Element.
Used herein a specific example illustrates the principle and implementation of the invention, the explanation of above example It is merely used to help understand method and its core concept of the invention.The above is only a preferred embodiment of the present invention, it answers When pointing out due to the finiteness of literal expression, and objectively there is unlimited specific structure, for the common skill of the art For art personnel, without departing from the principle of the present invention, several improvement, retouching or variation can also be made, can also incited somebody to action Above-mentioned technical characteristic is combined in the right way;These improve retouching, variation or combination, or the not improved structure by invention Think and technical solution directly applies to other occasions, is regarded as protection scope of the present invention.

Claims (4)

1. a kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side, which is characterized in that it includes pedestal (18), true Suction disk (17) and flexible compression module (13), vacuum chuck (17) are mounted on the output shaft of the second motor (1), are stretched and are compressed Module (13) is fixed on bracket (14), and bracket (14) setting is in the upper end of support base (15), gallium antimonide monocrystalline piece (16) installation On vacuum chuck (17), flexible compression module (13) include cylinder (1301), mounting flange (1309), connecting shaft (1308), Bearing (1302), round tube (1303), end plate (1304), guide rod (1307), spring (1306) and top plate (1305);Wherein fix Flange (1309) is connect with the extension end of cylinder (1301), and connecting shaft (1308) is arranged in the bottom of mounting flange (1309), axis It holds (1302) setting to connect in round tube (1303) and with connecting shaft (1308) end, end plate (1304) is fixed on round tube (1303) Bottom, in the pilot hole (1310) that one end of guide rod (1307) is arranged in end plate (1304), guide rod (1307) it is another End is fixedly connected with top plate (1305), and restraining position ring block (1311) are arranged in pilot hole (1310) in guide rod (1307), spring (1306) it is set on the guide rod (1307) between end plate (1304) and top plate (1305).
2. a kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side according to claim 1, feature exist In being connect between end plate (1304) and round tube (1303) by sunk screw.
3. a kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side according to claim 1, feature exist In the bottom of top plate (1305) has anti-slip layer.
4. a kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side according to claim 3, feature exist In top plate (1305) is rubber material.
CN201811394229.2A 2018-11-21 2018-11-21 A kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side Pending CN109531332A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811394229.2A CN109531332A (en) 2018-11-21 2018-11-21 A kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811394229.2A CN109531332A (en) 2018-11-21 2018-11-21 A kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side

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CN109531332A true CN109531332A (en) 2019-03-29

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111168515A (en) * 2020-01-09 2020-05-19 徐绪友 Wafer multistation edge polishing equipment

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201895206U (en) * 2010-10-26 2011-07-13 合肥华信电动科技发展有限公司 Pneumatic pressing machine
CN205414546U (en) * 2016-02-02 2016-08-03 浙江永福车业有限公司 Mechanism is sheared to frame return bend
CN105922098A (en) * 2016-06-20 2016-09-07 苏州市灵通玻璃制品有限公司 Glass edge grinding machine
JP2017080851A (en) * 2015-10-29 2017-05-18 川崎重工業株式会社 Polishing device, pressing unit, and polishing method
CN207058281U (en) * 2017-07-01 2018-03-02 福建省石狮市中兴科技有限公司 A kind of military stainless steel heat-insulation water bottle weld seam automatically grinding equipment
CN107838771A (en) * 2017-12-01 2018-03-27 成都益睿信科技有限公司 A kind of optical glass edging device applied widely
CN107900833A (en) * 2017-11-22 2018-04-13 韩元元 A kind of sanding apparatus of circular metal sheet edge
CN108527059A (en) * 2018-06-11 2018-09-14 苏州航泰蜂窝科技有限公司 Circular slab periphery grinding device and the polishing process for utilizing the grinding device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201895206U (en) * 2010-10-26 2011-07-13 合肥华信电动科技发展有限公司 Pneumatic pressing machine
JP2017080851A (en) * 2015-10-29 2017-05-18 川崎重工業株式会社 Polishing device, pressing unit, and polishing method
CN205414546U (en) * 2016-02-02 2016-08-03 浙江永福车业有限公司 Mechanism is sheared to frame return bend
CN105922098A (en) * 2016-06-20 2016-09-07 苏州市灵通玻璃制品有限公司 Glass edge grinding machine
CN207058281U (en) * 2017-07-01 2018-03-02 福建省石狮市中兴科技有限公司 A kind of military stainless steel heat-insulation water bottle weld seam automatically grinding equipment
CN107900833A (en) * 2017-11-22 2018-04-13 韩元元 A kind of sanding apparatus of circular metal sheet edge
CN107838771A (en) * 2017-12-01 2018-03-27 成都益睿信科技有限公司 A kind of optical glass edging device applied widely
CN108527059A (en) * 2018-06-11 2018-09-14 苏州航泰蜂窝科技有限公司 Circular slab periphery grinding device and the polishing process for utilizing the grinding device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111168515A (en) * 2020-01-09 2020-05-19 徐绪友 Wafer multistation edge polishing equipment

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