CN109531332A - A kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side - Google Patents
A kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side Download PDFInfo
- Publication number
- CN109531332A CN109531332A CN201811394229.2A CN201811394229A CN109531332A CN 109531332 A CN109531332 A CN 109531332A CN 201811394229 A CN201811394229 A CN 201811394229A CN 109531332 A CN109531332 A CN 109531332A
- Authority
- CN
- China
- Prior art keywords
- gallium antimonide
- guide rod
- top plate
- monocrystalline piece
- antimonide monocrystalline
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
Abstract
A kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side, including pedestal, vacuum chuck and flexible compression module, vacuum chuck is mounted on the output shaft of the second motor, flexible compression module is fixed on bracket, the upper end of support base is arranged in bracket, gallium antimonide monocrystalline piece is mounted on vacuum chuck, and flexible compression module includes cylinder, mounting flange, connecting shaft, bearing, round tube, end plate, guide rod, spring and top plate；Wherein the extension end of mounting flange and cylinder connects, the bottom of mounting flange is arranged in connecting shaft, bearing is arranged in round tube and connects with shaft end is connect, end plate is fixed on round tube bottom, one end of guide rod is arranged in the pilot hole in end plate, the other end of guide rod is fixedly connected with top plate, and restraining position ring block is arranged in guide rod in pilot hole, and spring is set on the guide rod between end plate and top plate.The configuration of the present invention is simple, high degree of automation can carry out quickly folder assembly and disassembly to the gallium antimonide monocrystalline piece of 5-15mm thickness, improve production efficiency.
Description
Technical field
The present invention relates to a kind of quick clamping devices for the polishing of gallium antimonide monocrystalline piece side.
Background technique
Gallium antimonide is a kind of group Ⅲ-Ⅴ compound semiconductor material, can not show a candle to other semiconductor materials (such as to its research
GaAs, InP etc.) like that deeply.But this material was more and more intriguing in recent years, this is mainly Fibre Optical Communication Technology
Development, caused by the potential demand to new device.In optical communications in order to reduce the loss in transmission, always adopt as far as possible
With the light of longer wavelength, the light of 0.8 mum wavelength is used earliest, uses the light of 1.55 mum wavelengths now.Next-generation optical fiber according to estimates
Communication will be using the light of more long wavelength.Research shows that certain non-silicon material optical fiber transmission damage when wavelength is the range of (2~4) μm
It consumes smaller.In all III-V race's materials, gallium antimonide causes more attentions as substrate material because it can with it is each
Ternary, the lattice constant of quaternary solid solution alloy of kind of III-V race's material match, the ranges of these material spectrums (0.8~
μm 4.0) between, conform exactly to require.In addition, more long wave can also be manufactured using the inter-band absorption of gallium antimonide sill superlattices
The detector of long (8~14) μ m.
Gallium antimonide monocrystalline piece surface flatness is increasingly particular about in existing instrument, the existing folder for gallium antimonide monocrystalline piece
It fills the generally existing process that clamps to be responsible for, is easy that gallium antimonide monocrystalline piece surface is caused to damage when clamping.
Summary of the invention
The purpose of the present invention is in view of the above problems, providing a kind of quickly clamping for the polishing of gallium antimonide monocrystalline piece side
Equipment, structure is simple, high degree of automation, and quickly folder assembly and disassembly can be carried out to the gallium antimonide monocrystalline piece of 5-15mm thickness, are mentioned
High production efficiency.
In order to achieve the above object, the technical solution adopted by the present invention is that: it includes pedestal, vacuum chuck and flexible pressure die
Block, vacuum chuck are mounted on the output shaft of the second motor, and flexible compression module is fixed on bracket, and bracket is arranged in support base
Upper end, gallium antimonide monocrystalline piece is mounted on vacuum chuck, and flexible compression module includes cylinder, mounting flange, connecting shaft, axis
It holds, round tube, end plate, guide rod, spring and top plate；Wherein the extension end of mounting flange and cylinder connects, and connecting shaft setting is solid
Determine the bottom of flange, bearing is arranged in round tube and connects with shaft end connect, and end plate is fixed on round tube bottom, and the one of guide rod
It holds in the pilot hole being arranged in end plate, the other end of guide rod is fixedly connected with top plate, and guide rod is provided in pilot hole
Stop collar, spring are set on the guide rod between end plate and top plate.
Further, it is connected between end plate and round tube by sunk screw.
Further, the bottom of top plate has anti-slip layer.
Further, top plate is rubber material.
Beneficial effects of the present invention: it is set the present invention provides a kind of for quickly clamping for gallium antimonide monocrystalline piece side polishing
Standby, structure is simple, high degree of automation, and quickly folder assembly and disassembly can be carried out to the gallium antimonide monocrystalline piece of 5-15mm thickness, are improved
Production efficiency.
When the present invention clamps gallium antimonide monocrystalline piece, the damage to gallium antimonide monocrystalline piece is reduced, improves the matter of product
Amount.
Cylinder drives top plate to move downward in the present invention, and top plate, which compress to gallium antimonide monocrystalline piece upper end, prevents gallium antimonide
Single-chip is subjected to displacement in polishing, the fixation to gallium antimonide monocrystalline piece is strengthened, to realize 5-15mm thickness gallium antimonide list
Chip clamps, and when polishing pad polishes to gallium antimonide monocrystalline piece side, top plate rotates together with gallium antimonide monocrystalline piece, bullet
The flexible of spring protects top plate, with cushion effect, to gallium antimonide monocrystalline piece when pressing to gallium antimonide monocrystalline piece.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is the structural schematic diagram of flexible compression module in the present invention.
Label character described in figure indicates are as follows: the 1, second motor；13, stretch compression module；14, bracket；15, support base；
16, gallium antimonide monocrystalline piece；17, vacuum chuck；18, pedestal；1301, cylinder；1302, bearing；1303, round tube；1304, end plate；
1305, top plate；1306, spring；1307, guide rod；1308, connecting shaft；1309, mounting flange.
Specific embodiment
In order to make those skilled in the art more fully understand technical solution of the present invention, with reference to the accompanying drawing to the present invention into
Row detailed description, the description of this part be only it is exemplary and explanatory, should not have any limitation to protection scope of the present invention
Effect.
As Figure 1-Figure 2, specific structure of the invention are as follows: it includes pedestal 18, vacuum chuck 17 and flexible pressure die
Block 13, vacuum chuck 17 are mounted on the output shaft of the second motor 1, and the compression module 13 that stretches is fixed on the support 14, bracket 14
The upper end of support base 15 is set, and gallium antimonide monocrystalline piece 16 is mounted on vacuum chuck 17, and the compression module 13 that stretches includes cylinder
1301, mounting flange 1309, connecting shaft 1308, bearing 1302, round tube 1303, end plate 1304, guide rod 1307,1306 and of spring
Top plate 1305；Wherein mounting flange 1309 is connect with the extension end of cylinder 1301, and connecting shaft 1308 is arranged in mounting flange 1309
Bottom, bearing 1302, which is arranged in round tube 1303 and with 1308 end of connecting shaft, to be connect, and end plate 1304 is fixed on round tube 1303
Bottom, one end of guide rod 1307 are arranged in the pilot hole 1310 in end plate 1304, the other end and top plate of guide rod 1307
1305 are fixedly connected, and restraining position ring block 1311 is arranged in guide rod 1307 in pilot hole 1310, and spring 1306 is set in end plate 1304
On guide rod 1307 between top plate 1305.
Preferably, it is connected between end plate 1304 and round tube 1303 by sunk screw.
Preferably, the bottom of top plate 1305 has anti-slip layer.
Preferably, top plate 1305 is rubber material.
Compared with prior art, the present invention the advantage with following aspect:
The configuration of the present invention is simple, high degree of automation can quickly clamp the gallium antimonide monocrystalline piece of 5-15mm thickness
And disassembly, improve production efficiency.
When the present invention clamps gallium antimonide monocrystalline piece, the damage to gallium antimonide monocrystalline piece is reduced, improves the matter of product
Amount.
Cylinder drives top plate to move downward in the present invention, and top plate, which compress to gallium antimonide monocrystalline piece upper end, prevents gallium antimonide
Single-chip is subjected to displacement in polishing, the fixation to gallium antimonide monocrystalline piece is strengthened, to realize 5-15mm thickness gallium antimonide list
Chip clamps, and when polishing pad polishes to gallium antimonide monocrystalline piece side, top plate rotates together with gallium antimonide monocrystalline piece, bullet
The flexible of spring protects top plate, with cushion effect, to gallium antimonide monocrystalline piece when pressing to gallium antimonide monocrystalline piece.
It should be noted that, in this document, the terms "include", "comprise" or its any other variant are intended to non-row
His property includes, so that the process, method, article or equipment for including a series of elements not only includes those elements, and
And further include other elements that are not explicitly listed, or further include for this process, method, article or equipment institute it is intrinsic
Element.
Used herein a specific example illustrates the principle and implementation of the invention, the explanation of above example
It is merely used to help understand method and its core concept of the invention.The above is only a preferred embodiment of the present invention, it answers
When pointing out due to the finiteness of literal expression, and objectively there is unlimited specific structure, for the common skill of the art
For art personnel, without departing from the principle of the present invention, several improvement, retouching or variation can also be made, can also incited somebody to action
Above-mentioned technical characteristic is combined in the right way；These improve retouching, variation or combination, or the not improved structure by invention
Think and technical solution directly applies to other occasions, is regarded as protection scope of the present invention.
Claims (4)
1. a kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side, which is characterized in that it includes pedestal (18), true
Suction disk (17) and flexible compression module (13), vacuum chuck (17) are mounted on the output shaft of the second motor (1), are stretched and are compressed
Module (13) is fixed on bracket (14), and bracket (14) setting is in the upper end of support base (15), gallium antimonide monocrystalline piece (16) installation
On vacuum chuck (17), flexible compression module (13) include cylinder (1301), mounting flange (1309), connecting shaft (1308),
Bearing (1302), round tube (1303), end plate (1304), guide rod (1307), spring (1306) and top plate (1305)；Wherein fix
Flange (1309) is connect with the extension end of cylinder (1301), and connecting shaft (1308) is arranged in the bottom of mounting flange (1309), axis
It holds (1302) setting to connect in round tube (1303) and with connecting shaft (1308) end, end plate (1304) is fixed on round tube (1303)
Bottom, in the pilot hole (1310) that one end of guide rod (1307) is arranged in end plate (1304), guide rod (1307) it is another
End is fixedly connected with top plate (1305), and restraining position ring block (1311) are arranged in pilot hole (1310) in guide rod (1307), spring
(1306) it is set on the guide rod (1307) between end plate (1304) and top plate (1305).
2. a kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side according to claim 1, feature exist
In being connect between end plate (1304) and round tube (1303) by sunk screw.
3. a kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side according to claim 1, feature exist
In the bottom of top plate (1305) has anti-slip layer.
4. a kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side according to claim 3, feature exist
In top plate (1305) is rubber material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811394229.2A CN109531332A (en) | 2018-11-21 | 2018-11-21 | A kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811394229.2A CN109531332A (en) | 2018-11-21 | 2018-11-21 | A kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109531332A true CN109531332A (en) | 2019-03-29 |
Family
ID=65849278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811394229.2A Pending CN109531332A (en) | 2018-11-21 | 2018-11-21 | A kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109531332A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111168515A (en) * | 2020-01-09 | 2020-05-19 | 徐绪友 | Wafer multistation edge polishing equipment |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201895206U (en) * | 2010-10-26 | 2011-07-13 | 合肥华信电动科技发展有限公司 | Pneumatic pressing machine |
| CN205414546U (en) * | 2016-02-02 | 2016-08-03 | 浙江永福车业有限公司 | Mechanism is sheared to frame return bend |
| CN105922098A (en) * | 2016-06-20 | 2016-09-07 | 苏州市灵通玻璃制品有限公司 | Glass edge grinding machine |
| JP2017080851A (en) * | 2015-10-29 | 2017-05-18 | 川崎重工業株式会社 | Polishing device, pressing unit, and polishing method |
| CN207058281U (en) * | 2017-07-01 | 2018-03-02 | 福建省石狮市中兴科技有限公司 | A kind of military stainless steel heat-insulation water bottle weld seam automatically grinding equipment |
| CN107838771A (en) * | 2017-12-01 | 2018-03-27 | 成都益睿信科技有限公司 | A kind of optical glass edging device applied widely |
| CN107900833A (en) * | 2017-11-22 | 2018-04-13 | 韩元元 | A kind of sanding apparatus of circular metal sheet edge |
| CN108527059A (en) * | 2018-06-11 | 2018-09-14 | 苏州航泰蜂窝科技有限公司 | Circular slab periphery grinding device and the polishing process for utilizing the grinding device |
-
2018
- 2018-11-21 CN CN201811394229.2A patent/CN109531332A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201895206U (en) * | 2010-10-26 | 2011-07-13 | 合肥华信电动科技发展有限公司 | Pneumatic pressing machine |
| JP2017080851A (en) * | 2015-10-29 | 2017-05-18 | 川崎重工業株式会社 | Polishing device, pressing unit, and polishing method |
| CN205414546U (en) * | 2016-02-02 | 2016-08-03 | 浙江永福车业有限公司 | Mechanism is sheared to frame return bend |
| CN105922098A (en) * | 2016-06-20 | 2016-09-07 | 苏州市灵通玻璃制品有限公司 | Glass edge grinding machine |
| CN207058281U (en) * | 2017-07-01 | 2018-03-02 | 福建省石狮市中兴科技有限公司 | A kind of military stainless steel heat-insulation water bottle weld seam automatically grinding equipment |
| CN107900833A (en) * | 2017-11-22 | 2018-04-13 | 韩元元 | A kind of sanding apparatus of circular metal sheet edge |
| CN107838771A (en) * | 2017-12-01 | 2018-03-27 | 成都益睿信科技有限公司 | A kind of optical glass edging device applied widely |
| CN108527059A (en) * | 2018-06-11 | 2018-09-14 | 苏州航泰蜂窝科技有限公司 | Circular slab periphery grinding device and the polishing process for utilizing the grinding device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111168515A (en) * | 2020-01-09 | 2020-05-19 | 徐绪友 | Wafer multistation edge polishing equipment |
| CN111168515B (en) * | 2020-01-09 | 2021-08-10 | 湖南科鑫泰电子有限公司 | Wafer multistation edge polishing equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP1244151A3 (en) | Semiconductor device and its manufacture method | |
| WO2010062644A3 (en) | Vertical group iii-v nanowires on si, heterostructures, flexible arrays and fabrication | |
| CN109514377A (en) | A kind of gallium antimonide monocrystalline piece side grinding apparatus with dust-absorbing function | |
| CN109531332A (en) | A kind of quick clamping device for the polishing of gallium antimonide monocrystalline piece side | |
| CN102353636A (en) | Method for testing anti-reflection rate of laminated photovoltaic assembly-used ethylene/vinyl acetate copolymer (EVA) on glass | |
| CN204110415U (en) | One gets carton combination | |
| CN109434687A (en) | A kind of flexible compression module in gallium antimonide monocrystalline piece clamping device | |
| CN102816911A (en) | Method for preparing ultrahigh hardness one-way continuous non-grain boundary nano-twin crystal through mechanical deformation | |
| CN204019304U (en) | A kind of grooving apparatus | |
| CN102323243A (en) | Structure and method for testing light transmittance of laminated EVA (Ethylene Vinyl Acetate) film used for photovoltaic assembly | |
| CN111326467A (en) | Flexible inorganic semiconductor film and preparation method thereof | |
| EP2894661B1 (en) | Directly bonded, lattice-mismatched semiconductor device | |
| CN109514378A (en) | A kind of band reinforces the gallium antimonide monocrystalline piece side grinding apparatus of fixed function | |
| CN109531297A (en) | A kind of gallium antimonide monocrystalline piece side grinding apparatus | |
| CN102214721A (en) | Group III nitride solar PV (photovoltaic) cell with double-heterojunction structure | |
| CN109366322B (en) | Side cutting amount adjustable gallium antimonide single crystal wafer comprehensive polishing equipment | |
| CN105149903A (en) | Pressing mechanism of chip assembling machine | |
| CN212084963U (en) | Safe and efficient automatic film expanding equipment | |
| Lin et al. | An adhesive bonding approach by hydrogen silsesquioxane for silicon carbide-based LED applications | |
| CN201698053U (en) | Novel receiving and coupling platform of optical device | |
| CN205415745U (en) | Automatic cutting tool and pneumatic cutting device thereof | |
| CN109290887A (en) | A kind of cutting output adjustable gallium antimonide monocrystalline piece side grinding apparatus | |
| CN112192494A (en) | Universal driving structure | |
| CN102096161A (en) | Three-dimensional fixing method of micro-naked coupling lens | |
| CN115513105B (en) | Multi-size integrated epitaxial wafer device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190329 |
|
| RJ01 | Rejection of invention patent application after publication |