CN108501232A - A kind of Buddha's warrior attendant wire-electrode cutting device and cutting method for polysilicon - Google Patents
A kind of Buddha's warrior attendant wire-electrode cutting device and cutting method for polysilicon Download PDFInfo
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- CN108501232A CN108501232A CN201810545040.2A CN201810545040A CN108501232A CN 108501232 A CN108501232 A CN 108501232A CN 201810545040 A CN201810545040 A CN 201810545040A CN 108501232 A CN108501232 A CN 108501232A
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- wire
- unwrapping wire
- wheel
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- 238000005520 cutting process Methods 0.000 title claims abstract description 91
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 23
- 229920005591 polysilicon Polymers 0.000 title claims abstract description 23
- 238000000034 method Methods 0.000 title claims abstract description 19
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 80
- 239000010432 diamond Substances 0.000 claims abstract description 80
- 239000013078 crystal Substances 0.000 claims abstract description 71
- 241000606750 Actinobacillus Species 0.000 claims abstract description 54
- 238000004804 winding Methods 0.000 claims description 25
- 238000006073 displacement reaction Methods 0.000 claims description 21
- 230000004323 axial length Effects 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 9
- 238000004064 recycling Methods 0.000 claims description 7
- 238000000926 separation method Methods 0.000 claims description 6
- 230000007423 decrease Effects 0.000 claims description 3
- 238000002360 preparation method Methods 0.000 claims description 3
- 239000004484 Briquette Substances 0.000 description 10
- 229910000831 Steel Inorganic materials 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/042—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with blades or wires mounted in a reciprocating frame
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The invention discloses a kind of Buddha's warrior attendant wire-electrode cutting devices and cutting method for polysilicon in polysilicon chip cutting field, the device includes unwrapping wire roller and take-up roller, the diamond wire that unwrapping wire roller is released bypasses the first directive wheel, the second directive wheel, third directive wheel, two thread rollers, the 4th directive wheel, the 5th directive wheel and the 6th guide roller successively, finally withdraws on take-up roller；The method comprising the steps of：Unwrapping wire roller storage line section is to take-up roller unwrapping wire, take-up pulley is to actinobacillus wheel unwrapping wire, take-up pulley continues to release diamond wire to actinobacillus wheel, crystal holder declines simultaneously, and crystal bar is pushed towards gauze, if until crystal bar cuts into dry plate by gauze, actinobacillus wheel is to take-up pulley unwrapping wire, take-up pulley runs line to unwrapping wire roller storage line section unwrapping wire, unwrapping wire roller storage line Duan Zaixiang take-up roller storage line section unwrapping wire, unwrapping wire roller storage line section sky.The present invention conveys diamond wire by take-up pulley to actinobacillus wheel, it is ensured that the first knife for cutting crystal bar is to use new line, the problems such as avoiding generating into knife TTV, entering knife warpage and stria.
Description
Technical field
Field is cut the invention belongs to polysilicon chip, more particularly to a kind of Buddha's warrior attendant wire-electrode cutting device for polysilicon and is cut
Segmentation method.
Background technology
In the prior art, there are a kind of method of diamond wire recycling cutting silicon chip, number of patent application：
201710597274.7；The applying date：2017.07.20；Publication No.：CN 107379294 A；Date of publication：2017.11.24；The party
Method includes step：The old diamond wire conveyed using actinobacillus wheel cuts silico briquette by zero cutting position, while being received using take-up pulley
Line；After old Buddha's warrior attendant wire cutting, the non-cut portion of silico briquette residue is all cut using the new diamond wire of actinobacillus wheel conveying；Instead
To cabling, newly generated old diamond wire is conveyed to actinobacillus wheel.This method utilizes the old Buddha's warrior attendant wire cutting returned after last time cutting
Silico briquette；Then silico briquette is cut through using new line, therefore incision tip is to utilize new wire cutting；Then it is returned automatically after silico briquette is cut through
Old diamond wire to actinobacillus wheel, the old diamond wire of return is used for starting the when of cutting silico briquette next time.
The above method is disadvantageous in that：Diamond wire to be cut is arranged in right side actinobacillus wheel, Buddha's warrior attendant wire cutting silico briquette
First knife be from actinobacillus wheel to take-up pulley to inlet wire, due to being limited by machine construction, cost concept, in addition to renewing cutting after line
It cuts outside first knife, the first knife for cutting silico briquette is all made of old line and starts to cut, and inlet wire is the upper old line imposed uniformity without examining individual cases and cut, secondary use
Diamond wire cutting power it is poor, and be easy to cause into knife TTV（Beyond the standard-sized margin of tolerance of silicon chip）, enter knife warpage and
The adverse consequences such as stria；Breakage ratio is increased using old wire cutting simultaneously, this method is more since old line participates in cutting, and causes to consume
Line amount is bigger, greatly reduces steel wire utilization rate, increases steel wire cost.
Invention content
An object of the present invention is to provide a kind of Buddha's warrior attendant wire-electrode cutting device for polysilicon, enable to actinobacillus wheel and
Mutual unwrapping wire between take-up pulley, unwrapping wire roller canned paragraphs are to take-up roller canned paragraphs unwrapping wire, between unwrapping wire roller canned paragraphs and take-up pulley mutually
Phase unwrapping wire；Diamond wire is conveyed to actinobacillus wheel by take-up pulley, to be cut to crystal bar.
The object of the present invention is achieved like this：A kind of Buddha's warrior attendant wire-electrode cutting device for polysilicon, including unwrapping wire roller and
The axis of take-up roller, unwrapping wire roller and take-up roller is parallel to each other, is arranged in parallel between unwrapping wire roller and take-up roller there are two thread roller, spiral shell
Line roller periphery is equipped with thread groove, and the axis of thread roller and the axis of unwrapping wire roller are vertical, and the top of the unwrapping wire roller is mutual equipped with axis
Parallel the first directive wheel, the second directive wheel and third directive wheel, the axis of the first directive wheel is vertical with the axis of unwrapping wire roller,
The top of the take-up roller is equipped with axis the 4th directive wheel, the 5th directive wheel and the 6th guide roller parallel to each other, and the 4th is oriented to
The axis of wheel is vertical with the axis of unwrapping wire roller, is wound with diamond wire on the unwrapping wire roller, the diamond wire that unwrapping wire roller is released successively around
Cross the first directive wheel, the second directive wheel, third directive wheel, two thread rollers, the 4th directive wheel, the 5th directive wheel and the 6th conducting wire
Wheel, finally withdraws on take-up roller；Diamond wire is wound in a spiral in along the thread groove of both sides on two thread rollers, forms line
Net；It is equipped with liftable crystal holder above the thread roller, crystal bar is fixed in crystal holder.
As an improvement of the present invention, the unwrapping wire roller includes actinobacillus wheel and storage line section, unwrapping wire roller actinobacillus wheel and storage line section it
Between separated through annular and separation band, the axial length of unwrapping wire roller storage line section is more than the axial length of actinobacillus wheel, and take-up roller includes take-up
Wheel and storage line section, separate between take-up roller take-up pulley and storage line section through annular and separation band, the axial length of take-up roller storage line section is big
In the axial length of take-up pulley, actinobacillus wheel and take-up pulley are oppositely arranged.Unwrapping wire roller includes two regions of actinobacillus wheel and storage line section, is received
Line roller includes two regions of take-up pulley and storage line section, and diamond wire to be cut is in unwrapping wire roller storage line section, unwrapping wire roller storage line
Section can also be to take-up roller storage line section unwrapping wire to take-up pulley unwrapping wire, unwrapping wire roller storage line section；After take-up pulley is wound with diamond wire,
Take-up pulley can be to actinobacillus wheel unwrapping wire.
As a further improvement on the present invention, it is rotatably connected on the wheel shaft of first directive wheel and the 6th directive wheel
Winding displacement swing arm, the end of winding displacement swing arm are equipped with glass pulley, the setting corresponding with unwrapping wire roller, take-up roller respectively of two rows of string pendulum arms.By
It is that when diamond wire unwrapping wire or take-up can change position, and winding displacement swing arm is adapted to gold on the online roller of screw winding in diamond wire
Rigid line is oriented to for it；Winding displacement swing arm is swung, and the diamond wire released for unwrapping wire roller guides, it is ensured that diamond wire is wound on take-up pulley
Or in take-up roller storage line section；Winding displacement swing arm is swung, and the diamond wire released for take-up pulley guides, it is ensured that diamond wire is wound on putting
In line wheel or unwrapping wire roller storage line section.
In order to be preferably oriented to, increase the tension of diamond wire, the wheel shaft of second directive wheel and third directive wheel
It is located in the same horizontal plane, the wheel shaft of the 4th directive wheel and the 5th directive wheel is located in the same horizontal plane.
In order to further increase guide effect, between second directive wheel and third directive wheel be equipped with guide sleeve, the 4th
Guide sleeve is equipped between directive wheel and the 5th directive wheel, diamond wire corresponds to the pilot hole across guide sleeve.
When the present invention works, unwrapping wire roller and take-up roller rotate simultaneously, and unwrapping wire roller is to take-up roller unwrapping wire；Unwrapping wire roller and take-up roller
It rotates backward, take-up roller is to unwrapping wire roller unwrapping wire；While take-up pulley is to actinobacillus wheel unwrapping wire, crystal holder drives crystal bar towards under gauze
Pressure, crystal bar is cut into several polysilicon chips by the upper layer of gauze.Compared with prior art, the beneficial effects of the present invention are：
Under the guiding of thread groove, connected up on thread roller convenient for diamond wire；Under winding displacement swing arm and the guiding of glass pulley, diamond wire can be with
Freely wound on the different zones of unwrapping wire roller, take-up roller.The present invention enables to mutual unwrapping wire between actinobacillus wheel and take-up pulley, puts
Line roller canned paragraphs are to take-up roller canned paragraphs unwrapping wire, mutual unwrapping wire between unwrapping wire roller canned paragraphs and take-up pulley；By take-up pulley to putting
Line wheel conveys diamond wire, to be cut to crystal bar.
The second object of the present invention is to provide a kind of cutting method of the Buddha's warrior attendant wire-electrode cutting device for polysilicon, Neng Goutong
It crosses take-up pulley and conveys diamond wire to actinobacillus wheel, to be cut to crystal bar, it is ensured that the first knife for cutting crystal bar is using new
Line, the problems such as avoiding generating into knife TTV, entering knife warpage and stria.
The object of the present invention is achieved like this：A kind of cutting method of Buddha's warrior attendant wire-electrode cutting device for polysilicon, packet
Include following steps：
（1）Unwrapping wire roller line sending：Unwrapping wire roller and the rotation of take-up roller, unwrapping wire roller storage line section are swung to take-up roller unwrapping wire, winding displacement swing arm,
Under the guiding of glass pulley so that wind k kilometers of diamond wire on take-up pulley；
（2）Take-up pulley line sending：Unwrapping wire roller and take-up roller rotate backward, and take-up pulley swings, arranging to actinobacillus wheel unwrapping wire, winding displacement swing arm
Under the guiding of line wheel so that wind m kilometers of diamond wire on actinobacillus wheel；
（3）Into wire cutting：Take-up pulley continues to release n kilometer of diamond wire, while crystal holder decline to actinobacillus wheel so that crystal bar towards
Gauze pushes, if until crystal bar cuts into dry plate by gauze；
（4）Actinobacillus wheel and take-up pulley loop line：Crystal holder rises, and crystal bar is driven to be separated with gauze, unwrapping wire roller and the rotation of take-up roller, unwrapping wire
It takes turns to take-up pulley unwrapping wire so that all recycling is wound up on take-up pulley the diamond wire of (m+n) kilometer on actinobacillus wheel；Take-up pulley again to
Unwrapping wire roller storage line section unwrapping wire so that all recycling is wound up into unwrapping wire roller storage line section k kilometers of diamond wire on take-up pulley；Unwrapping wire roller
Storage line Duan Zaixiang take-up roller storage line section unwrapping wire so that on take-up roller storage line section winding（k-m-n）The diamond wire of kilometer；
（5）Unwrapping wire roller storage line section sky runs line：Unwrapping wire roller and the rotation of take-up roller, under the guiding of winding displacement swing arm, unwrapping wire roller storage line section
H kilometers of diamond wire is released to take-up roller storage line section.
As a further improvement on the present invention, the step（1）Before beginning, following preparation process is carried out：First in unwrapping wire
The diamond wire of 45 ~ 80km is wound in roller storage line section, then the leading-out terminal of diamond wire is bypassed to the first directive wheel, the second guiding successively
Wheel, third directive wheel, two thread rollers, the 4th directive wheel, the 5th directive wheel and the 6th guide roller, finally consolidate the end of diamond wire
It is scheduled in take-up roller storage line section.
As a further improvement on the present invention, the step（5）After the completion, new crystal bar to be cut is changed, is recycled again
Carry out step（1）、（2）、（3）（4）With（5）, until the diamond wire in unwrapping wire roller storage line section is finished, then increase to unwrapping wire roller storage line section
Add and winds new diamond wire.
As a further improvement on the present invention, the k=7, m=0.5, n=5.5 and h=2.2.In order to ensure crystal bar is complete
Cutting, the size of the crystal bar in the cutting direction is 157.5 ~ 158mm, and after crystal bar is contacted with gauze, crystal bar declines mobile
Stroke is 164mm.
As a further improvement on the present invention, the step（3）In, what take-up pulley was released to actinobacillus wheel is used to cut crystal bar
Diamond wire include new line and old line, it is the new line for having neither part nor lot in cutting first to release, and it is the old line cut through to release afterwards, brilliant
Stick contacted with gauze after to using new wire cutting, crystal bar to drop to 163mm to dropping to 164mm's in the stroke for declining 163mm
Old wire cutting is used in stroke.When this programme can realize cutting each crystal bar, all it is that knife cutting is entered using new line, avoids because old
Wire cutting causes into knife TTV, enters the problems such as knife warpage and stria.
Description of the drawings
Fig. 1 is the structural schematic diagram of the cutter device of the present invention.
Fig. 2 is the structural schematic diagram of the gauze on two thread rollers.
Wherein, 1 unwrapping wire roller, 1a actinobacillus wheels, 1b storage line sections, 2 take-up rollers, 2a take-up pulleies, 2b storage line sections, 3 thread rollers, 4
One directive wheel, 5 second directive wheels, 6 third directive wheels, 7 the 4th directive wheels, 8 the 5th directive wheels, 9 the 6th directive wheels, 10 crystal holders,
11 crystal bars, 12 dividing strips, 13 winding displacement swing arms, 13a glass pulleys, 14 guide sleeves.
Specific implementation mode
As illustrated in fig. 1 and 2, it is a kind of Buddha's warrior attendant wire-electrode cutting device for polysilicon, including unwrapping wire roller 1 and take-up roller 2, puts
The axis of line roller 1 and take-up roller 2 is parallel to each other, unwrapping wire roller 1 include actinobacillus wheel 1a and storage line section 1b, 1 actinobacillus wheel 1a of unwrapping wire roller and
It is separated through annular and separation band 12 between storage line section 1b, the axial length of 1 storage line section 1b of unwrapping wire roller is long more than the axial direction of actinobacillus wheel 1a
Degree, take-up roller 2 includes take-up pulley 2a and storage line section 2b, through annular and separation band 12 between take-up roller 2 take-up pulley 2a and storage line section 2b
It separates, the axial length of 2 storage line section 2b of take-up roller is more than the axial length of take-up pulley 2a, and actinobacillus wheel 1a and take-up pulley 2a are set relatively
It sets；It is arranged in parallel between unwrapping wire roller 1 and take-up roller 2 there are two thread roller 3,3 periphery of thread roller is equipped with thread groove, thread roller 3
The axis of axis and unwrapping wire roller 1 is vertical, and the top of unwrapping wire roller 1 is equipped with axis the first directive wheel 4 parallel to each other, the second directive wheel
5 and third directive wheel 6, the axis of the first directive wheel 4 is vertical with the axis of unwrapping wire roller 1, and it is mutual that the top of take-up roller 2 is equipped with axis
Parallel the 4th directive wheel 7, the 5th directive wheel 8 and the 6th guide roller, the axis of the 4th directive wheel 7 hang down with the axis of unwrapping wire roller 1
Directly, be wound with diamond wire on unwrapping wire roller 1, the diamond wire that unwrapping wire roller 1 is released bypass successively the first directive wheel 4, the second directive wheel 5,
Third directive wheel 6, two thread rollers 3, the 4th directive wheel 7, the 5th directive wheel 8 and the 6th guide roller, finally withdraw wound on take-up
On roller 2；Diamond wire is wound in a spiral in along the thread groove of both sides on two thread rollers 3, forms gauze；3 top of thread roller is equipped with can
The crystal holder 10 of lifting is fixed with crystal bar 11 in crystal holder 10.It is rotatablely connected on the wheel shaft of first directive wheel 4 and the 6th directive wheel 9
Have a winding displacement swing arm 13, the end of winding displacement swing arm 13 is equipped with glass pulley 13a, two rows of string pendulum arms 13 respectively with unwrapping wire roller 1, take-up roller 2
Corresponding setting.The wheel shaft of second directive wheel 5 and third directive wheel 6 is located in the same horizontal plane, and the 4th directive wheel 7 and the 5th is led
It is located in the same horizontal plane to the wheel shaft of wheel 8.Guide sleeve 14 is equipped between second directive wheel 5 and third directive wheel 6, the 4th is oriented to
Guide sleeve 14 is equipped between wheel 7 and the 5th directive wheel 8, diamond wire corresponds to the pilot hole across guide sleeve 14.
A kind of cutting method for being cut polysilicon using above-mentioned cutter device, is included the following steps：
Prepare：The diamond wire of 45 ~ 80km is first wound on 1 storage line section 1b of unwrapping wire roller, then the leading-out terminal of diamond wire is bypassed successively
First directive wheel 4, the second directive wheel 5, third directive wheel 6, two thread rollers 3, the 4th directive wheel 7, the 5th directive wheel 8 and the 6th are led
The end of diamond wire is finally fixed on 2 storage line section 2b of take-up roller by line wheel；
（1）1 line sending of unwrapping wire roller：Unwrapping wire roller 1 and take-up roller 2 rotate, and 1 storage line section 1b of unwrapping wire roller is to 2 unwrapping wire of take-up roller, winding displacement swing arm
13 swing, under the guiding of glass pulley 13a so that 7 kilometers of diamond wire is wound on take-up pulley 2a；
（2）Take-up pulley 2a line sendings：Unwrapping wire roller 1 and take-up roller 2 rotate backward, and take-up pulley 2a is to actinobacillus wheel 1a unwrapping wire, winding displacement swing arm
13 swing, under the guiding of glass pulley 13a so that 0.5 kilometer of diamond wire is wound on actinobacillus wheel 1a；
（3）Into wire cutting：Take-up pulley 2a continues to release 5.5 kilometers of diamond wire to actinobacillus wheel 1a, while crystal holder 10 declines so that
Crystal bar 11 is pushed towards gauze, if until crystal bar 11 cuts into dry plate by gauze；The size of crystal bar 11 in the cutting direction is
157.5 ~ 158mm, after crystal bar 11 is contacted with gauze, it is 164mm that crystal bar 11, which declines mobile stroke,；Take-up pulley 2a is to actinobacillus wheel 1a
It includes new line and old line for cutting the diamond wire of crystal bar 11 to release, and it is the new line for having neither part nor lot in cutting first to release, rear to release
Be the old line cut through, crystal bar 11 contacted with gauze after to using new wire cutting in the stroke for declining 163mm, under crystal bar 11
It drops to and uses old wire cutting in 163mm to the stroke for dropping to 164mm；
（4）Actinobacillus wheel 1a and take-up pulley 2a loop lines：Crystal holder 10 rises, and drives crystal bar 11 to be separated with gauze, unwrapping wire roller 1 and take-up roller
2 rotations, actinobacillus wheel 1a is to take-up pulley 2a unwrapping wire so that all recycling is wound up into take-up pulley to upper 6 kilometers of the diamond wires of actinobacillus wheel 1a
On 2a；Take-up pulley 2a is again to 1 storage line section 1b unwrapping wire of unwrapping wire roller so that all recycling is wound upper 7 kilometers of the diamond wires of take-up pulley 2a
Onto 1 storage line section 1b of unwrapping wire roller；1 storage line section 1b of unwrapping wire roller is again to 2 storage line section 2b unwrapping wire of take-up roller so that 2 storage line section of take-up roller
2b winds 1 kilometer of diamond wire；
（5）1 storage line section 1b skies of unwrapping wire roller run line：Unwrapping wire roller 1 and take-up roller 2 rotate, under the guiding of winding displacement swing arm 13, unwrapping wire roller
1 storage line section 1b releases 2.2 kilometers of diamond wire to 2 storage line section 2b of take-up roller.
New crystal bar to be cut 11 is changed, cycle carries out step again（1）、（2）、（3）（4）With（5）, until unwrapping wire roller 1
Diamond wire on storage line section 1b is finished, then is increased to 1 storage line section 1b of unwrapping wire roller and wound new diamond wire.
The now diamond wire of 50 kilometers of the winding on storage line section 1b of setting preparation stage unwrapping wire roller 1, gauze between two thread rollers 3
Length is 3.6 kilometers, and diamond wire bypasses unwrapping wire roller 1, the first directive wheel 4, the second directive wheel 5, third directive wheel 6, two spiral shells successively
After line roller 3, the 4th directive wheel 7, the 5th directive wheel 8, the 6th guide roller 9 and take-up roller 2, it is wound on 1 storage line section 1b of unwrapping wire roller
The length that 46.4 kilometers of lines, actinobacillus wheel 1a, take-up pulley 2a and 2 storage line section 2b of take-up roller reach the standard grade is 0.To the first knife of cutting cutting the
One crystal bar, the second knife cut second crystal bar, in different cutting steps, each section roll on unwrapping wire roller 1 and take-up roller 2
1 explanation of length list of diamond wire.
Table 1
As seen from Table 1, when cutting first crystal bar, released to actinobacillus wheel 5.5 kilometers of take-up pulley are the new line not cut through entirely,
All using new wire cutting crystal bar.
When cutting second crystal bar, released to actinobacillus wheel first 3.2 kilometers of take-up pulley are the new lines not cut through, rear 2.3
Kilometer is the old line cut through.The stroke of extremely decline 163mm is interior after crystal bar is contacted with gauze uses 3.2 kilometers of new wire cuttings,
Crystal bar, which drops to, uses 2.3 kilometers of old wire cuttings in 163mm to the stroke for dropping to 164mm.Cut third, the 4th etc. its
When his crystal bar, 5.5 kilometers of lines that take-up pulley is released to actinobacillus wheel are 3.2 kilometers of new lines by first releasing and release afterwards
2.3 kilometers of old line compositions.
In addition to first crystal bar, when cutting crystal bar, all it is that knife cutting is entered using new line, can avoid entering caused by old wire cutting
Knife TTV, enter the problems such as knife warpage and stria.
The difference of the method for the silicon wafer cut by diamond wire of the present invention and the conventional method of the prior art is as shown in table 2 below：
Table 2
From table 2 it can be seen that the prior art uses the first half of old Buddha's warrior attendant wire cutting silico briquette, and new line is then used in the tail portion of silico briquette
Cutting, inlet wire are the upper old line imposed uniformity without examining individual cases and cut, and the diamond wire cutting power of secondary use is poor, and is easy to cause into knife TTV,
Enter the adverse consequences such as knife warpage and stria.The present invention enters knife using new line and cuts crystal bar, when depth of cut is 0 ~ 163mm, all
Using new wire cutting, when depth of cut is 163 ~ 164mm, using old wire cutting；Most of depth of cut of crystal bar is all to use
New wire cutting improves cut quality, avoids generating into knife TTV, enter knife warpage and stria；The old line generated after cutting empties back into
In unwrapping wire roller storage line section, after unwrapping wire roller storage line section divides old line to take-up roller storage line section sky run-ministry, unwrapping wire roller storage line section outer layer is old
Line, internal layer are new line, and for unwrapping wire roller storage line section to after take-up pulley unwrapping wire, take-up pulley outer layer is new line, and internal layer is old line, therefore take-up
It takes turns to actinobacillus wheel into when wire cutting, first with new wire cutting, then with old wire cutting；Breakage ratio, new line are reduced using new wire cutting
Participation cutting is more, and the line amount for having neither part nor lot in cutting is less, improves steel wire utilization rate, reduces steel wire cost.
The invention is not limited in above-described embodiments, on the basis of technical solution disclosed by the invention, the skill of this field
For art personnel according to disclosed technology contents, one can be made to some of which technical characteristic by not needing performing creative labour
A little to replace and deform, these are replaced and deformation is within the scope of the invention.
Claims (10)
1. a kind of Buddha's warrior attendant wire-electrode cutting device for polysilicon, which is characterized in that including unwrapping wire roller and take-up roller, unwrapping wire roller and receipts
The axis of line roller is parallel to each other, is arranged in parallel between unwrapping wire roller and take-up roller there are two thread roller, thread roller periphery is equipped with screw thread
Slot, the axis of thread roller and the axis of unwrapping wire roller are vertical, and the top of the unwrapping wire roller is equipped with axis the first guiding parallel to each other
Wheel, the second directive wheel and third directive wheel, the axis of the first directive wheel is vertical with the axis of unwrapping wire roller, the top of the take-up roller
Equipped with axis the 4th directive wheel, the 5th directive wheel and the 6th guide roller parallel to each other, axis and the unwrapping wire roller of the 4th directive wheel
Axis it is vertical, be wound with diamond wire on the unwrapping wire roller, the diamond wire that unwrapping wire roller is released bypasses the first directive wheel, second successively
Directive wheel, third directive wheel, two thread rollers, the 4th directive wheel, the 5th directive wheel and the 6th guide roller, finally withdraw wound on receipts
On line roller；Diamond wire is wound in a spiral in along the thread groove of both sides on two thread rollers, forms gauze；It is equipped with above the thread roller
Liftable crystal holder is fixed with crystal bar in crystal holder.
2. a kind of Buddha's warrior attendant wire-electrode cutting device for polysilicon according to claim 1, which is characterized in that the unwrapping wire roller
It including actinobacillus wheel and storage line section, is separated through annular and separation band between unwrapping wire roller actinobacillus wheel and storage line section, the axis of unwrapping wire roller storage line section
It is more than the axial length of actinobacillus wheel to length, take-up roller includes take-up pulley and storage line section, between take-up roller take-up pulley and storage line section
It is separated through annular and separation band, the axial length of take-up roller storage line section is more than the axial length of take-up pulley, actinobacillus wheel and take-up pulley phase
To setting.
3. a kind of Buddha's warrior attendant wire-electrode cutting device for polysilicon according to claim 2, which is characterized in that described first leads
Winding displacement swing arm is rotatably connected to on the wheel shaft of wheel and the 6th directive wheel, the end of winding displacement swing arm is equipped with glass pulley, two winding displacements
Swing arm setting corresponding with unwrapping wire roller, take-up roller respectively.
4. a kind of Buddha's warrior attendant wire-electrode cutting device for polysilicon according to claim 2 or 3, which is characterized in that described
The wheel shaft of two directive wheels and third directive wheel is located in the same horizontal plane, and the wheel shaft of the 4th directive wheel and the 5th directive wheel is located at together
In one horizontal plane.
5. a kind of Buddha's warrior attendant wire-electrode cutting device for polysilicon according to claim 2 or 3, which is characterized in that described
It is equipped with guide sleeve between two directive wheels and third directive wheel, guide sleeve, Buddha's warrior attendant are equipped between the 4th directive wheel and the 5th directive wheel
Line corresponds to the pilot hole across guide sleeve.
6. according to a kind of cutting method of Buddha's warrior attendant wire-electrode cutting device for polysilicon of claim 3-5 any one of them,
It is characterized in that, includes the following steps：
（1）Unwrapping wire roller line sending：Unwrapping wire roller and the rotation of take-up roller, unwrapping wire roller storage line section are swung to take-up roller unwrapping wire, winding displacement swing arm,
Under the guiding of glass pulley so that wind k kilometers of diamond wire on take-up pulley；
（2）Take-up pulley line sending：Unwrapping wire roller and take-up roller rotate backward, and take-up pulley swings, arranging to actinobacillus wheel unwrapping wire, winding displacement swing arm
Under the guiding of line wheel so that wind m kilometers of diamond wire on actinobacillus wheel；
（3）Into wire cutting：Take-up pulley continues to release n kilometer of diamond wire, while crystal holder decline to actinobacillus wheel so that crystal bar towards
Gauze pushes, if until crystal bar cuts into dry plate by gauze；
（4）Actinobacillus wheel and take-up pulley loop line：Crystal holder rises, and crystal bar is driven to be separated with gauze, unwrapping wire roller and the rotation of take-up roller, unwrapping wire
It takes turns to take-up pulley unwrapping wire so that all recycling is wound up on take-up pulley the diamond wire of (m+n) kilometer on actinobacillus wheel；Take-up pulley again to
Unwrapping wire roller storage line section unwrapping wire so that all recycling is wound up into unwrapping wire roller storage line section k kilometers of diamond wire on take-up pulley；Unwrapping wire roller
Storage line Duan Zaixiang take-up roller storage line section unwrapping wire so that on take-up roller storage line section winding（k-m-n）The diamond wire of kilometer；
（5）Unwrapping wire roller storage line section sky runs line：Unwrapping wire roller and the rotation of take-up roller, under the guiding of winding displacement swing arm, unwrapping wire roller storage line section
H kilometers of diamond wire is released to take-up roller storage line section.
7. a kind of cutting method of Buddha's warrior attendant wire-electrode cutting device for polysilicon according to claim 6, which is characterized in that
The step（1）Before beginning, following preparation process is carried out：The diamond wire of 45 ~ 80km is first wound in unwrapping wire roller storage line section,
The leading-out terminal of diamond wire is bypassed to the first directive wheel, the second directive wheel, third directive wheel, two thread rollers, the 4th guiding successively again
The end of diamond wire, is finally fixed in take-up roller storage line section by wheel, the 5th directive wheel and the 6th guide roller.
8. a kind of cutting method of Buddha's warrior attendant wire-electrode cutting device for polysilicon described according to claim 6 or 7, feature exist
In the step（5）After the completion, new crystal bar to be cut is changed, cycle carries out step again（1）、（2）、（3）（4）With（5）,
Until the diamond wire in unwrapping wire roller storage line section is finished, then increases to unwrapping wire roller storage line section and wind new diamond wire.
9. a kind of cutting method of Buddha's warrior attendant wire-electrode cutting device for polysilicon described according to claim 6 or 7, feature exist
In, the k=7, m=0.5, n=5.5 and h=2.2；The size of the crystal bar in the cutting direction be 157.5 ~ 158mm, crystal bar with
After gauze contact, it is 164mm that crystal bar, which declines mobile stroke,.
10. a kind of cutting method of Buddha's warrior attendant wire-electrode cutting device for polysilicon according to claim 9, feature exist
In the step（3）In, what take-up pulley was released to actinobacillus wheel includes new line and old line for cutting the diamond wire of crystal bar, is first put
It is the new line for having neither part nor lot in cutting to go out, and it is the old line cut through to release afterwards, and crystal bar extremely declines 163mm's after being contacted with gauze
New wire cutting is used in stroke, crystal bar, which drops to, uses old wire cutting in 163mm to the stroke for dropping to 164mm.
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