CN108469416A - A kind of coating TiO2The preparation method of the optical-waveguide-type micro-ring resonant cavity humidity sensor of film - Google Patents

A kind of coating TiO2The preparation method of the optical-waveguide-type micro-ring resonant cavity humidity sensor of film Download PDF

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Publication number
CN108469416A
CN108469416A CN201810127881.1A CN201810127881A CN108469416A CN 108469416 A CN108469416 A CN 108469416A CN 201810127881 A CN201810127881 A CN 201810127881A CN 108469416 A CN108469416 A CN 108469416A
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China
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resonant cavity
micro
optical
ring resonant
coating
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Inventor
闫树斌
王飞
王一飞
张勐
王梦梦
赵学峰
张彦军
薛晨阳
张文栋
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North University of China
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North University of China
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems

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  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
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  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The invention belongs to optical field and micro-nano system regions, specially a kind of coating TiO2The preparation method of the optical-waveguide-type micro-ring resonant cavity humidity sensor of film.A kind of TiO2Optical-waveguide-type micro-ring resonant cavity humidity sensor：Including on waveguiding structure to ring resonator, the photoetching of straight wave guide and input and output grating, and to TiO2The coating of humidity sensitive thin film.It is imitated and is answered using unique claustra possessed by the micro-ring resonant cavity prepared in SOI waveguides, realize that resonance occurs in micro-loop for light wave, it can observe stable resonance phenomena using spectrometer, when extraneous relative humidity changes, humidity sensitive thin film absorbs moisture, resonant cavity refractive index is set to change, to make the output spectral line observed on spectrometer that wave length shift occur, to complete the measurement of humidity.The more general humidity sensor of the present invention is compared, and is had and is made simple, and at low cost, small, the reaction time is short, high sensitivity, and the characteristics of be not easy by electromagnetic interference, therefore, has high application value.

Description

A kind of coating TiO2The preparation of the optical-waveguide-type micro-ring resonant cavity humidity sensor of film Method
Technical field
The invention belongs to optical field and micro-nano system regions, specially a kind of coating TiO2The optical-waveguide-type micro-ring resonant of film The preparation method of chamber humidity sensor.
Background technology
Humidity is raw in weather forecast, environment measuring, agricultural as more difficult detection and one of especially important environmental parameter Production, semiconductor device fabrication, food storing, weaving, power generation, aerospace, locomotive naval vessel etc. suffer from important application. Traditional humidity sensor mainly has the types such as capacitance, resistance, surface acoustic wave, and there are volumes for these sensors greatly, the response time It is long, sensitivity is low, easily by electromagnetic interference, need wet sensitive to coat the shortcomings of.In recent years, conventional moisture sensors are miniaturized in people It is higher and higher with the requirement of integrated level.
Optical microresonator possesses unique optical delivery pattern-Whispering-gallery-mode, i.e. it is micro- to be coupled into optics for laser beam Intracavitary is constrained on intracavitary later, and the great circle above equator constantly detours and is constantly totally reflected on surface, to shape At resonance, while there is optical microcavity higher quality factor and smaller cavity mold volume to be provided to explore high sensor May, therefore, the research of miniature optical humidity sensor becomes new hot spot.
Invention content
Big for volume existing for current conventional moisture sensors, the response time is long, and sensitivity is low, easily by electromagnetic interference, The case where can not adapting to exceedingly odious environment.The present invention proposes a kind of coating TiO2The optical-waveguide-type micro-ring resonant cavity of film is wet Spend the preparation method of sensor.
The present invention adopts the following technical scheme that realization：A kind of coating TiO2The optical-waveguide-type micro-ring resonant cavity of film The preparation method of humidity sensor, includes the following steps：
The first step：SOI Substrate cleans；
Second step：Spin coating, the even layer photoresist of SOI Substrate topsheet surface after cleaning；
Third walks：The photoresist in SOI Substrate topsheet surface is exposed using electron-beam exposure system, and developed, Fixing is handled, and glue-line and the straight wave guide shape glue-line both sides of straight wave guide shape and micro-ring resonant cavity-like are left on photoresist layer Optical grating construction glue-line；
4th step：ICP deep silicon etchings, complete the etching to SOI Substrate topsheet surface Si, and the Si below glue-line is retained；
5th step：The SOI Substrate for completing corrosion is put into acetone soln and carries out cleaning processing of removing photoresist, is used in combination deionized water clear It washes, nitrogen drying obtains optical waveguide, micro-ring resonant cavity（Micro-ring resonant cavity with it is optical waveguide coupled）And optical grating construction；
6th step：On the surface layer of micro-ring resonant cavity and straight wave guide that processing obtains, TiO is used in one layer of coating2Manufactured wet sensitive is thin Film, and it is finally completed the preparation of SOI silicon-based optical micro-ring resonant cavity humidity sensors.
The humidity sensor basic functional principle is：Laser is transmitted by optical fiber, is coupled into straight wave guide by grating, into Entering the light in waveguide can couple in micro-ring resonant cavity, and the other end of straight wave guide connects grating at this time, and optical signal is exported It is transmitted on spectrometer, due to the unique echo wall effect of micro-ring resonant cavity, stable resonance can be observed on spectrometer Spectral line is coated in the TiO on micro-ring resonant cavity surface when the relative humidity in air changes2Film starts to absorb water, to Cause the refractive index of coupling regime to change, the optical resonance parameter of micro-ring resonant cavity is caused to change, it is final to make Spectral line on spectrometer drifts about, by calculating the measurement that can be completed to humidity accordingly.
SOI silicon-based opticals micro-ring resonant cavity humidity sensor produced by the present invention has nano level size, significantly The size of conventional moisture sensors is reduced, for the integrated of the following humidity sensor, micromation lays a solid foundation, together When TiO2The coating of humidity sensitive thin film is more advantageous to the absorption and diffusion of hydrone in sensor, and secondly, it also has the sound being exceedingly fast It, can be in the following accurate quick survey realized to humidity between seasonable and higher sensitivity and preferable recovery Amount, finally, depend on the used optical waveguide resonant cavity Echo Wall transmission characteristic so that it can not by electromagnetic interference, Adapt to various rugged environments.
Therefore, present invention development optical resonance effect realizes that the research work of ultrafast, highly sensitive moisture measurement has very Important research significance and potential using value, by TiO2Humidity sensitive thin film-SOI silicon-based opticals micro-loop waveguiding structure-micro-ring resonant Chamber humidity sensor is applied to have in moisture measurement technology innovative well.
Description of the drawings
Fig. 1 is humidity sensor preparation technology flow chart of the present invention.
Fig. 2 be optical waveguide, micro-ring resonant cavity coupling schematic diagram.
Specific implementation mode
A kind of coating TiO2The optical-waveguide-type micro-ring resonant cavity humidity sensor of film, is realized micro- in SOI Substrate structure The photoetching of ring shape resonator, straight wave guide and grating, and to TiO2The coating of humidity sensitive thin film utilizes the claustra mould of ring resonator Effect, to complete the measurement of humidity, production method includes the following steps：
The first step：SOI Substrate cleans, and carries out ultrasonic wave with absolute ethyl alcohol and cleans in turn, to ensure that SOI sample basal planes are totally clear It is clean；
Second step：Spin coating, the even one layer of positive photoetching rubber of SOI Substrate topsheet surface after cleaning；
Third walks：The positive photoetching rubber in SOI Substrate topsheet surface is exposed using electron-beam exposure system, and is shown Shadow, fixing processing, leave the glue-line and straight wave guide shape glue-line two of straight wave guide shape and micro-ring resonant cavity-like on positive photoresist layer The optical grating construction glue-line of side；
4th step：ICP deep silicon etchings, complete the etching to SOI Substrate topsheet surface Si, and the Si below glue-line is retained；
5th step：The SOI Substrate for completing corrosion is put into acetone soln and carries out cleaning processing of removing photoresist, is used in combination deionized water clear It washes, nitrogen drying obtains optical waveguide, micro-ring resonant cavity and optical grating construction；
6th step：On the surface layer of micro-ring resonant cavity and straight wave guide that processing obtains, TiO is used in one layer of coating2Manufactured wet sensitive is thin Film, and it is finally completed the preparation of SOI silicon-based optical micro-ring resonant cavity humidity sensors.

Claims (1)

1. a kind of coating TiO2The preparation method of the optical-waveguide-type micro-ring resonant cavity humidity sensor of film, it is characterised in that including Following steps：
The first step：SOI Substrate cleans；
Second step：Spin coating, the even layer photoresist of SOI Substrate topsheet surface after cleaning；
Third walks：The photoresist in SOI Substrate topsheet surface is exposed using electron-beam exposure system, and developed, Fixing is handled, and glue-line and the straight wave guide shape glue-line both sides of straight wave guide shape and micro-ring resonant cavity-like are left on photoresist layer Optical grating construction glue-line；
4th step：ICP deep silicon etchings, complete the etching to SOI Substrate topsheet surface Si, and the Si below glue-line is retained；
5th step：The SOI Substrate for completing corrosion is put into acetone soln and carries out cleaning processing of removing photoresist, is used in combination deionized water clear It washes, nitrogen drying obtains optical waveguide, micro-ring resonant cavity and optical grating construction；
6th step：On the surface layer of micro-ring resonant cavity and straight wave guide that processing obtains, TiO is used in one layer of coating2Manufactured wet sensitive is thin Film, and it is finally completed the preparation of SOI silicon-based optical micro-ring resonant cavity humidity sensors.
CN201810127881.1A 2018-02-08 2018-02-08 A kind of coating TiO2The preparation method of the optical-waveguide-type micro-ring resonant cavity humidity sensor of film Pending CN108469416A (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109253836A (en) * 2018-10-18 2019-01-22 武汉大学 A kind of micro-loop optical vacuum meter
CN109596572A (en) * 2018-12-18 2019-04-09 暨南大学 A kind of gas sensor and preparation method thereof
CN110018428A (en) * 2019-04-29 2019-07-16 重庆大学 A kind of magnetic field sensor and preparation method thereof based on silicon-based micro ring resonator
CN111649840A (en) * 2020-05-08 2020-09-11 上海交通大学 Optical resonator low-temperature sensor and preparation and packaging methods thereof
CN115128729A (en) * 2022-06-17 2022-09-30 暨南大学 Ultrasonic sensor preparation method and device and ultrasonic sensor
CN116400457A (en) * 2023-03-24 2023-07-07 深圳技术大学 Offset multiplexer based on rutile titanium dioxide micro-ring resonant cavity

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105445494A (en) * 2015-12-10 2016-03-30 中北大学 MOEMS accelerometer based on planar ring cavity, and manufacturing method of the same

Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
CN105445494A (en) * 2015-12-10 2016-03-30 中北大学 MOEMS accelerometer based on planar ring cavity, and manufacturing method of the same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
MD JAHID等: "Effect of titanium dioxide (TiO2) nanoparticle coating on the detection performance of microfiber knot resonator sensors for relative humidity measurement", 《MATERIALS EXPRESS》 *

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109253836A (en) * 2018-10-18 2019-01-22 武汉大学 A kind of micro-loop optical vacuum meter
CN109596572A (en) * 2018-12-18 2019-04-09 暨南大学 A kind of gas sensor and preparation method thereof
CN109596572B (en) * 2018-12-18 2021-01-05 暨南大学 Gas sensor and preparation method thereof
CN110018428A (en) * 2019-04-29 2019-07-16 重庆大学 A kind of magnetic field sensor and preparation method thereof based on silicon-based micro ring resonator
CN111649840A (en) * 2020-05-08 2020-09-11 上海交通大学 Optical resonator low-temperature sensor and preparation and packaging methods thereof
CN111649840B (en) * 2020-05-08 2021-09-21 上海交通大学 Optical resonator low-temperature sensor and preparation and packaging methods thereof
CN115128729A (en) * 2022-06-17 2022-09-30 暨南大学 Ultrasonic sensor preparation method and device and ultrasonic sensor
CN115128729B (en) * 2022-06-17 2023-08-25 暨南大学 Preparation method and device of ultrasonic sensor and ultrasonic sensor
CN116400457A (en) * 2023-03-24 2023-07-07 深圳技术大学 Offset multiplexer based on rutile titanium dioxide micro-ring resonant cavity
CN116400457B (en) * 2023-03-24 2024-02-06 深圳技术大学 Offset multiplexer based on rutile titanium dioxide micro-ring resonant cavity

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