CN115128729A - Ultrasonic sensor preparation method and device and ultrasonic sensor - Google Patents
Ultrasonic sensor preparation method and device and ultrasonic sensor Download PDFInfo
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- CN115128729A CN115128729A CN202210688996.4A CN202210688996A CN115128729A CN 115128729 A CN115128729 A CN 115128729A CN 202210688996 A CN202210688996 A CN 202210688996A CN 115128729 A CN115128729 A CN 115128729A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
- G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
- G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/10—Non-chemical treatment
- C03B37/14—Re-forming fibres or filaments, i.e. changing their shape
- C03B37/15—Re-forming fibres or filaments, i.e. changing their shape with heat application, e.g. for making optical fibres
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/0229—Optical fibres with cladding with or without a coating characterised by nanostructures, i.e. structures of size less than 100 nm, e.g. quantum dots
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/44—Mechanical structures for providing tensile strength and external protection for fibres, e.g. optical transmission cables
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Abstract
The invention discloses a preparation method and a device of an ultrasonic sensor and the ultrasonic sensor. The micro-nano optical fiber is bent into a micro-nano optical fiber ring, and the annular micro-nano optical fiber Fabry-Perot cavity formed by the micro-nano optical fiber ring and the fiber Bragg grating is encapsulated by the polymer protection layer formed by the flexible material, so that an acoustic focus point is formed at the geometric center of the micro-nano optical fiber ring, and the zoom size and the focal depth can be changed by changing the diameter of the micro-nano optical fiber ring.
Description
Technical Field
The invention relates to the technical field of preparation of micro-nano optical fiber focusing ultrasonic sensors, in particular to a method and a device for preparing an ultrasonic sensor and the ultrasonic sensor.
Background
Ultrasonic waves are mechanical waves with a vibration frequency higher than 20 kHz. It has the features of high frequency, short wavelength, less diffraction, high directivity, directional propagation, etc. The penetration of ultrasonic waves into liquids and solids is great, especially in sunlight-opaque solids. Ultrasonic waves hit impurities or interfaces to produce significant reflections and form reflected echoes, and hitting a moving object can produce the Doppler effect. The ultrasonic sensor is widely applied to the aspects of industry, national defense, biomedicine and the like.
In the prior art, ultrasonic detection is usually performed by a piezoelectric type ultrasonic sensor and a fiber grating ultrasonic sensor. When the piezoelectric material is subjected to mechanical external force such as sound wave conduction (piezoelectric acoustic sensor), lattice deformation is caused to cause change of a polarization state, a sensing electric signal is output, or deformation of the piezoelectric material under the action of an electric field is measured to reflect the size of the electric field; the optical fiber ultrasonic sensor converts ultrasonic waves into changes of optical transmission signal intensity or phase in an optical fiber by taking the optical fiber as a medium, realizes acoustic signal extraction by combining an optical detection method, has the advantages of high sensitivity, wide frequency band, compact structure, electromagnetic interference resistance and the like, is suitable for application scenes of biomedical ultrasonic or photoacoustic imaging, industrial nondestructive inspection and the like, and is a common ultrasonic sensor based on the optical fiber grating, and generally comprises a section of single-mode optical fiber internal Bragg grating pair or phase shift grating. When external ultrasonic acts on the optical fiber, the refractive index inside the optical fiber is changed, so that the wavelength of a reflection spectrum or a transmission spectrum of the sensor is changed, intensity change of corresponding reflection light or transmission light is detected through a narrow-band laser beam, amplitude and frequency information of the ultrasonic wave is obtained, most of the fiber grating ultrasonic sensors are formed by single-mode optical fibers, the fiber grating ultrasonic sensors formed by the single-mode optical fibers generally keep a linear state when working, and the ultrasonic response space distribution of the fiber grating ultrasonic sensors is transmitted along with the increase of the length from the optical fibers.
However, the prior art still has the following defects: piezoelectric ultrasonic sensors generally detect ultrasound by using piezoelectric ceramics with hard texture, and the characteristics of focal length and light spot are adjusted by grinding the surface of the ceramics into a spherical surface and changing the radius of the spherical surface, so that the convenience and the flexibility are low; the fiber grating ultrasonic sensor formed by the single mode fiber cannot realize focusing detection on a sound field, has low sensitivity, can obtain a high-resolution space image only through image reconstruction after multi-point acquisition, and reduces the applicability and flexibility of the sensor.
Therefore, there is a need for a method and an apparatus for manufacturing an ultrasonic sensor, and an ultrasonic sensor, which overcome the above-mentioned drawbacks in the prior art.
Disclosure of Invention
The embodiment of the invention provides a preparation method and a device of an ultrasonic sensor and the ultrasonic sensor, so that the flexibility and the applicability of the ultrasonic sensor applied to ultrasonic detection are improved.
An embodiment of the present invention provides a method for manufacturing an ultrasonic sensor, including: heating and stretching the middle part of the micro-nano optical fiber to a preset magnitude to obtain a middle part to be bent, and bending the middle part to be bent to obtain a micro-nano optical fiber ring; etching a preset number of fiber Bragg grating pairs on two sides of the micro-nano fiber ring to obtain an annular micro-nano fiber Fabry-Perot cavity; and forming a polymer protective layer through a flexible material to encapsulate the annular micro-nano optical fiber Fabry-Perot cavity.
As an improvement of the above scheme, the method includes heating and stretching the middle part of the micro-nano optical fiber to a preset magnitude to obtain the middle part to be bent, and specifically includes: heating the middle part of the micro-nano optical fiber to a molten state through oxyhydrogen flame to obtain a molten middle part; and uniformly stretching the melting middle part to a preset magnitude to obtain the middle part to be bent.
As an improvement of the above scheme, bending the middle part to be bent to obtain a micro-nano optical fiber ring specifically includes: and bending the middle part to be bent into a ring shape or a knot shape to obtain the micro-nano optical fiber ring.
As an improvement of the above scheme, the fiber bragg grating pair is a pair of center wavelength matched bragg gratings.
As a refinement of the above, the order is on the order of microns in diameter.
As an improvement of the scheme, the curvature range of the micro-nano optical fiber ring is 1mm -1 To 10mm -1 。
As an improvement of the scheme, the distance between the fiber Bragg grating pairs is 1mm to 10 cm.
As a modification of the above, the thickness of the polymer protective layer ranges from 0.1 to 10 mm.
Correspondingly, the invention further provides a preparation device of the ultrasonic sensor, which comprises a stretching unit, a writing unit and a packaging unit, wherein the stretching unit is used for heating and stretching the middle part of the micro-nano optical fiber to a preset magnitude to obtain the middle part to be bent, and bending the middle part to be bent to obtain a micro-nano optical fiber ring; the engraving unit is used for engraving a preset number of fiber Bragg grating pairs on two sides of the micro-nano fiber ring to obtain an annular micro-nano fiber Fabry-Perot cavity; the packaging unit is used for forming a polymer protection layer through a flexible material so as to package the annular micro-nano optical fiber Fabry-Perot cavity.
As an improvement of the above, the stretching unit is further configured to: heating the middle part of the micro-nano optical fiber to a molten state through oxyhydrogen flame to obtain a molten middle part; and uniformly stretching the melting middle part to a preset magnitude to obtain the middle part to be bent.
As an improvement of the above, the stretching unit is further configured to: and bending the middle part to be bent into a ring shape or a knot shape to obtain the micro-nano optical fiber ring.
Another embodiment of the invention provides an ultrasonic sensor, which is prepared by the preparation method of the ultrasonic sensor, and the ultrasonic sensor comprises a micro-nano optical fiber, a fiber bragg grating pair and a polymer protection layer, wherein the micro-nano optical fiber comprises a micro-nano optical fiber ring and two micro-nano optical fiber straight parts, the two micro-nano optical fiber straight parts are respectively located at two sides of the micro-nano optical fiber ring, a pair of fiber bragg gratings in the fiber bragg grating pair are respectively engraved on the two micro-nano optical fiber straight parts, and the polymer protection layer is made of a flexible material.
Compared with the prior art, the technical scheme has the following beneficial effects:
the invention provides a preparation method and a device of an ultrasonic sensor and the ultrasonic sensor, wherein a micro-nano optical fiber is bent into a micro-nano optical fiber ring, and an annular micro-nano optical fiber Fabry-Perot cavity formed by the micro-nano optical fiber ring and a fiber Bragg grating is packaged through a polymer protection layer formed by a flexible material, so that an acoustic focus point is formed at the geometric center of the micro-nano optical fiber ring, and the size and the depth of focus of a focal shift can be changed by changing the diameter of the micro-nano optical fiber ring.
Drawings
Fig. 1 is a schematic flow chart of a method for manufacturing an ultrasonic sensor according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a manufacturing apparatus of an ultrasonic sensor according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of an ultrasonic sensor according to an embodiment of the present invention;
fig. 4 is a schematic diagram illustrating an operating principle of an ultrasonic sensor according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Detailed description of the preferred embodiment
The embodiment of the invention first describes a preparation method of an ultrasonic sensor. Fig. 1 is a schematic flow chart of a method for manufacturing an ultrasonic sensor according to an embodiment of the present invention.
As shown in fig. 1, the preparation method comprises:
s1, heating and stretching the middle part of the micro-nano optical fiber to a preset magnitude to obtain a middle part to be bent, and bending the middle part to be bent to obtain a micro-nano optical fiber ring.
In one embodiment, the method for bending the micro-nano optical fiber includes the steps of heating and stretching the middle of the micro-nano optical fiber to a preset magnitude to obtain the middle to be bent: heating the middle part of the micro-nano optical fiber to a molten state through oxyhydrogen flame to obtain a molten middle part; and uniformly stretching the melting middle part to a preset magnitude to obtain the middle part to be bent.
In one embodiment, the bending the middle portion to be bent to obtain the micro-nano optical fiber ring specifically includes: and bending the middle part to be bent into a ring shape or a knot shape to obtain the micro-nano optical fiber ring. In one embodiment, the micro-nano optical fiber ring is uniformly covered by a polymer protective layer, and the polymer can be polydimethylsiloxane or polymethyl methacrylate.
In one embodiment, the pair of fiber bragg gratings is a pair of center wavelength matched bragg gratings.
In one embodiment, the order of magnitude is on the order of microns in diameter.
In one embodiment, the diameter of the micro-nano optical fiber is between 1 μm and 20 μm, the micro-nano optical fiber is formed by drawing a single-mode or multi-mode, undoped or doped optical fiber, and the curvature range of the micro-nano optical fiber ring is 1mm -1 To 10mm -1 。
In one embodiment, the fiber bragg grating is exposed through a mask or written point by point, and the distance between the fiber bragg grating pair is 1mm to 10 cm.
In one embodiment, the polymeric protective layer has a thickness in the range of 0.1-10 mm.
And S2, writing a preset number of fiber Bragg grating pairs on two sides of the micro-nano fiber ring to obtain an annular micro-nano fiber Fabry-Perot cavity.
And S3, forming a polymer protection layer through a flexible material to package the annular micro-nano optical fiber Fabry-Perot cavity.
When the ultrasonic sensor prepared by the method works, the geometric center of the micro-nano optical fiber is bent to form acoustic focusing, a beam of narrow-band continuous light is introduced into the micro-nano optical fiber ring, when the Bragg grating acts on the middle optical fiber by ultrasonic waves, the phase of the light transmitted inside the micro-nano optical fiber ring is changed, the wavelength of the reflection spectrum is changed, the change of the reflected or transmitted light intensity is caused, and the change of the light intensity is measured by the photoelectric detector to realize ultrasonic detection.
The embodiment of the invention discloses a preparation method of an ultrasonic sensor, which comprises the steps of bending a micro-nano optical fiber into a micro-nano optical fiber ring, and packaging an annular micro-nano optical fiber Fabry-Perot cavity formed by the micro-nano optical fiber ring and a fiber Bragg grating through a polymer protection layer formed by a flexible material, so that an acoustic focusing point is formed at the geometric center of the micro-nano optical fiber ring, and the size and the depth of focus of a focal spot can be changed by changing the diameter of the micro-nano optical fiber ring.
Detailed description of the preferred embodiment
Besides the method, the embodiment of the invention also discloses a preparation device of the ultrasonic sensor. Fig. 2 is a schematic structural diagram of a manufacturing apparatus of an ultrasonic sensor according to an embodiment of the present invention.
As shown in fig. 2, the manufacturing apparatus includes a drawing unit 11, a writing unit 12, and a packaging unit 13.
The stretching unit 11 is used for heating and stretching the middle part of the micro-nano optical fiber to a preset magnitude to obtain a middle part to be bent, and bending the middle part to be bent to obtain a micro-nano optical fiber ring.
In one embodiment, the stretching unit 11 is further configured to: heating the middle part of the micro-nano optical fiber to a molten state through oxyhydrogen flame to obtain a molten middle part; and uniformly stretching the melting middle part to a preset magnitude to obtain the middle part to be bent.
In one embodiment, the stretching unit 11 is further configured to: and bending the middle part to be bent into a ring shape or a knot shape to obtain the micro-nano optical fiber ring.
The writing unit 12 is configured to write a preset number of fiber bragg grating pairs on two sides of the micro-nano fiber ring to obtain an annular micro-nano fiber fabry-perot cavity.
The packaging unit 13 is used for forming a polymer protection layer through a flexible material to package the annular micro-nano optical fiber Fabry-Perot cavity.
It should be noted that the above-described device embodiments are merely illustrative, where the units described as separate parts may or may not be physically separate, and the parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of the present embodiment. In addition, in the drawings of the embodiment of the device provided by the invention, the connection relationship between the units indicates that the units have communication connection therebetween, and the connection relationship can be specifically implemented as one or more communication buses or signal lines. One of ordinary skill in the art can understand and implement it without inventive effort.
The embodiment of the invention discloses a preparation device of an ultrasonic sensor, which is characterized in that a micro-nano optical fiber is bent into a micro-nano optical fiber ring, and an annular micro-nano optical fiber Fabry-Perot cavity formed by the micro-nano optical fiber ring and a fiber Bragg grating is packaged through a polymer protection layer formed by a flexible material, so that an acoustic focusing point is formed at the geometric center of the micro-nano optical fiber ring, the size and the depth of focus of a focal spot can be changed by changing the diameter of the micro-nano optical fiber ring, and the preparation device improves the flexibility and the applicability of the ultrasonic sensor applied to ultrasonic detection.
Detailed description of the preferred embodiment
In addition to the above-described method and apparatus, an ultrasonic sensor is also described in embodiments of the present invention. Fig. 3 is a schematic structural diagram of an ultrasonic sensor according to an embodiment of the present invention.
As shown in fig. 3, the ultrasonic sensor is prepared by the preparation method of the ultrasonic sensor as described above, the ultrasonic sensor includes a micro-nano optical fiber, a fiber bragg grating pair 103 and a polymer protection layer 104, the micro-nano optical fiber includes a micro-nano optical fiber ring 102 and two micro-nano optical fiber straight parts 101, the two micro-nano optical fiber straight parts 101 are respectively located at two sides of the micro-nano optical fiber ring 102, wherein one pair of fiber bragg gratings in the fiber bragg grating pair 103 is respectively engraved on the two micro-nano optical fiber straight parts 101, and the polymer protection layer 104 is made of a flexible material.
The micro-nano optical fiber annular ultrasonic sensor in the embodiment has good flexibility, is packaged in the flexible protection protective layer, has the advantages of electromagnetic environment interference resistance, compact structure and strong flexibility compared with the traditional piezoelectric ultrasonic transducer, is optically transparent, is convenient to integrate with other optical imaging means, and can be used for constructing ultrasonic-photoacoustic-optical microscopic imaging and other multi-mode imaging systems; compared with the common optical fiber, the micro-nano optical fiber has low bending loss and the coverage range of the bending radius can be from centimeter to micrometer, so that the micro-nano optical fiber ring can be constructed to realize ultrasonic focusing, and the size and the focal depth of a focusing spot can be increased in a larger range.
To further describe the specific application of the ultrasonic sensor, the following description will be made with reference to fig. 4. Fig. 4 is a schematic diagram illustrating an operation principle of an ultrasonic sensor according to an embodiment of the present invention.
The Bragg grating on two sides of the sensor focusing ultrasonic sensor and the micro-nano optical fiber ring form a Fabry-Perot cavity, when ultrasonic acts on the micro-nano optical fiber ring, the optical interference phase difference inside the optical fiber is changed, and further the wavelength of a reflection spectrum or a transmission spectrum is shifted, so that a narrow-band continuous detection light is injected into the sensor from the continuous narrow-band laser 201 through the circulator 202, the detection wavelength is located at the maximum point of the reflection spectrum slope of the micro-nano optical fiber ring 102, and when the spectrum is shifted due to the ultrasonic, the intensity of the reflection detection light is changed, so that the ultrasonic detection is realized, and the optimal sensitivity is obtained. The change in the output light intensity described above is converted into an electric signal using the photodetector 203.
Further, an alternating current component of the electrical signal output from the photodetector 203 is extracted by a high-pass filter 204, and an ultrasonic signal is detected and restored by a signal analyzer 205. The low-pass filter 206 is used for extracting a direct current component, a real-time feedback signal is output through the control card 207, the working wavelength of the narrow-band continuous laser is adjusted, and the wavelength is maintained at the maximum slope point of a reflection spectrum or a transmission spectrum of the sensor in the ultrasonic detection process, so that the locking of the working point of the sensor is realized, and the ultrasonic detection is further performed stably.
The embodiment of the invention discloses an ultrasonic sensor, wherein a micro-nano optical fiber is bent into a micro-nano optical fiber ring, and an annular micro-nano optical fiber Fabry-Perot cavity formed by the micro-nano optical fiber ring and a fiber Bragg grating is packaged through a polymer protection layer formed by a flexible material, so that an acoustic focusing point is formed at the geometric center of the micro-nano optical fiber ring, the zoom size and the focal depth can be changed by changing the diameter of the micro-nano optical fiber ring, and the flexibility and the applicability of the ultrasonic sensor applied to ultrasonic detection are improved.
While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention.
Claims (10)
1. A method for manufacturing an ultrasonic sensor, the method comprising:
heating and stretching the middle part of the micro-nano optical fiber to a preset magnitude to obtain a middle part to be bent, and bending the middle part to be bent to obtain a micro-nano optical fiber ring;
writing a preset number of fiber Bragg grating pairs on two sides of the micro-nano fiber ring to obtain an annular micro-nano fiber Fabry-Perot cavity;
and forming a polymer protective layer through a flexible material to encapsulate the annular micro-nano optical fiber Fabry-Perot cavity.
2. The method for manufacturing the ultrasonic sensor according to claim 1, wherein the middle portion of the micro-nano optical fiber is heated and stretched to a preset magnitude to obtain the middle portion to be bent, and specifically comprises:
heating the middle part of the micro-nano optical fiber to a molten state through oxyhydrogen flame to obtain a molten middle part;
and uniformly stretching the melting middle part to a preset magnitude to obtain the middle part to be bent.
3. The method for manufacturing the ultrasonic sensor according to claim 2, wherein the middle portion to be bent is bent to obtain the micro-nano optical fiber ring, and specifically comprises:
and bending the middle part to be bent into a ring shape or a knot shape to obtain the micro-nano optical fiber ring.
4. The method of claim 3, wherein the fiber Bragg grating pair is a pair of center wavelength matched Bragg gratings.
5. The method of manufacturing an ultrasonic sensor according to claim 4, wherein the order is a diameter micron order.
6. The method for preparing the ultrasonic sensor according to claim 5, wherein the curvature range of the micro-nano optical fiber ring is 1mm -1 To 10mm -1 。
7. The method of claim 6, wherein the distance between the pair of fiber Bragg gratings is 1mm to 10 cm.
8. The method of manufacturing an ultrasonic sensor according to any one of claims 1 to 7, wherein the polymer protective layer has a thickness in the range of 0.1 to 10 mm.
9. A manufacturing apparatus of an ultrasonic sensor, comprising a stretching unit, a writing unit, and an encapsulating unit, wherein,
the stretching unit is used for heating and stretching the middle part of the micro-nano optical fiber to a preset magnitude to obtain a middle part to be bent, and bending the middle part to be bent to obtain a micro-nano optical fiber ring;
the engraving unit is used for engraving a preset number of fiber Bragg grating pairs on two sides of the micro-nano fiber ring to obtain an annular micro-nano fiber Fabry-Perot cavity;
the packaging unit is used for forming a polymer protection layer through a flexible material so as to package the annular micro-nano optical fiber Fabry-Perot cavity.
10. An ultrasonic sensor is characterized by being prepared by the ultrasonic sensor preparation method according to any one of claims 1 to 8, and comprising a micro-nano optical fiber, a fiber Bragg grating pair and a polymer protection layer, wherein the micro-nano optical fiber comprises a micro-nano optical fiber ring and two micro-nano optical fiber straight parts, the two micro-nano optical fiber straight parts are respectively positioned on two sides of the micro-nano optical fiber ring, one pair of fiber Bragg gratings in the fiber Bragg grating pair is respectively inscribed on the two micro-nano optical fiber straight parts, and the polymer protection layer is made of a flexible material.
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1819376A (en) * | 2006-02-20 | 2006-08-16 | 浙江大学 | Optical resonance cavity with micro-fiber optical loop |
| CN102565926A (en) * | 2012-02-28 | 2012-07-11 | 华中科技大学 | Fabry-Perot interferometer and manufacturing method thereof |
| CN103682963A (en) * | 2013-11-29 | 2014-03-26 | 华中科技大学 | Tunable multi-wavelength microfiber laser and production method thereof |
| CN105319650A (en) * | 2015-12-09 | 2016-02-10 | 深圳市鼎硕同邦科技有限公司 | Full-optical-fiber type multi-wavelength etalon based on micro-nano optical fiber ring and manufacturing method of full-optical-fiber type multi-wavelength etalon |
| CN108469416A (en) * | 2018-02-08 | 2018-08-31 | 中北大学 | A kind of coating TiO2The preparation method of the optical-waveguide-type micro-ring resonant cavity humidity sensor of film |
| CN110412689A (en) * | 2019-07-24 | 2019-11-05 | 暨南大学 | A kind of chirp spectral pattern is without chamber optical fiber fp filter and preparation method thereof |
| CN111007154A (en) * | 2019-12-02 | 2020-04-14 | 暨南大学 | Flexible ultrasonic transducer, manufacturing method and all-optical ultrasonic emission and detection method |
| CN114136846A (en) * | 2021-11-09 | 2022-03-04 | 北京航空航天大学 | Nanoparticle detection resonant cavity structure based on Bragg grating |
-
2022
- 2022-06-17 CN CN202210688996.4A patent/CN115128729B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1819376A (en) * | 2006-02-20 | 2006-08-16 | 浙江大学 | Optical resonance cavity with micro-fiber optical loop |
| CN102565926A (en) * | 2012-02-28 | 2012-07-11 | 华中科技大学 | Fabry-Perot interferometer and manufacturing method thereof |
| CN103682963A (en) * | 2013-11-29 | 2014-03-26 | 华中科技大学 | Tunable multi-wavelength microfiber laser and production method thereof |
| CN105319650A (en) * | 2015-12-09 | 2016-02-10 | 深圳市鼎硕同邦科技有限公司 | Full-optical-fiber type multi-wavelength etalon based on micro-nano optical fiber ring and manufacturing method of full-optical-fiber type multi-wavelength etalon |
| CN108469416A (en) * | 2018-02-08 | 2018-08-31 | 中北大学 | A kind of coating TiO2The preparation method of the optical-waveguide-type micro-ring resonant cavity humidity sensor of film |
| CN110412689A (en) * | 2019-07-24 | 2019-11-05 | 暨南大学 | A kind of chirp spectral pattern is without chamber optical fiber fp filter and preparation method thereof |
| CN111007154A (en) * | 2019-12-02 | 2020-04-14 | 暨南大学 | Flexible ultrasonic transducer, manufacturing method and all-optical ultrasonic emission and detection method |
| CN114136846A (en) * | 2021-11-09 | 2022-03-04 | 北京航空航天大学 | Nanoparticle detection resonant cavity structure based on Bragg grating |
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