CN115128729B - Preparation method and device of ultrasonic sensor and ultrasonic sensor - Google Patents
Preparation method and device of ultrasonic sensor and ultrasonic sensor Download PDFInfo
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- CN115128729B CN115128729B CN202210688996.4A CN202210688996A CN115128729B CN 115128729 B CN115128729 B CN 115128729B CN 202210688996 A CN202210688996 A CN 202210688996A CN 115128729 B CN115128729 B CN 115128729B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
- G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
- G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/10—Non-chemical treatment
- C03B37/14—Re-forming fibres or filaments, i.e. changing their shape
- C03B37/15—Re-forming fibres or filaments, i.e. changing their shape with heat application, e.g. for making optical fibres
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/0229—Optical fibres with cladding with or without a coating characterised by nanostructures, i.e. structures of size less than 100 nm, e.g. quantum dots
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/44—Mechanical structures for providing tensile strength and external protection for fibres, e.g. optical transmission cables
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- Optics & Photonics (AREA)
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- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The invention discloses a preparation method and device of an ultrasonic sensor and the ultrasonic sensor. The micro-nano optical fiber is bent into the micro-nano optical fiber ring, and the annular micro-nano optical fiber Fabry-Perot cavity formed by the micro-nano optical fiber ring and the optical fiber Bragg grating is packaged by the polymer protective layer formed by the flexible material, so that an acoustic focusing point is formed at the geometric center of the micro-nano optical fiber ring, and Jiao Banda hours and focal depth can be changed by changing the diameter of the micro-nano optical fiber ring.
Description
Technical Field
The invention relates to the technical field of preparation of micro-nano optical fiber focusing ultrasonic sensors, in particular to a preparation method and device of an ultrasonic sensor and the ultrasonic sensor.
Background
Ultrasonic waves are mechanical waves with vibration frequencies higher than 20 kHz. It has the characteristics of high frequency, short wavelength, small diffraction phenomenon, good directivity, capability of being used as rays to directionally propagate, and the like. The penetration of ultrasound into liquids, solids is great, especially in solids that are opaque to sunlight. The ultrasonic waves can be obviously reflected to form a reflected echo when encountering impurities or interfaces, and the Doppler effect can be generated when the ultrasonic waves collide with a living body. Ultrasonic sensors are widely used in industry, national defense, biomedical and other fields.
In the prior art, ultrasonic detection is generally performed by a piezoelectric ultrasonic sensor and a fiber grating ultrasonic sensor. The piezoelectric voltage sensor is characterized in that a crystal lattice of the piezoelectric material deforms under the action of mechanical external forces such as sound wave conduction (piezoelectric acoustic sensor), changes in polarization state are caused, sensing electric signals are output, or the deformation of the piezoelectric material under the action of an electric field is measured to reflect the magnitude of the electric field; the optical fiber ultrasonic sensor uses optical fiber as a medium to convert ultrasonic waves into the change of the intensity or phase of optical transmission signals in the optical fiber, combines the advantages of high sensitivity, wide frequency band, compact structure, electromagnetic interference resistance and the like of the acoustic signal extraction by an optical detection method, is suitable for application scenes such as biomedical ultrasonic or photoacoustic imaging, industrial nondestructive inspection and the like, and is generally composed of a section of Bragg grating pair or phase shift grating in a single-mode fiber based ultrasonic sensor. When external ultrasound acts on the optical fiber, the refractive index inside the optical fiber is changed, so that the reflection or transmission spectrum wavelength of the sensor is changed, the intensity change of corresponding reflected light or transmitted light is detected through a beam of narrow-band laser, the amplitude and frequency information of the ultrasound are obtained, most of the fiber grating ultrasound sensors are composed of single-mode fibers, the fiber grating ultrasound sensors composed of the single-mode fibers generally keep a linear state when working, and the ultrasound response space distribution of the fiber grating ultrasound sensors is emitted along with the increase of the length of the distance optical fiber.
However, the prior art still has the following drawbacks: piezoelectric ultrasonic sensors generally detect ultrasonic waves by using piezoelectric ceramics with harder textures, and the ceramic surfaces are required to be ground into spherical surfaces and the spherical radius is changed by adjusting the focal length and the light spot characteristics, so that the convenience and the flexibility are low; the fiber grating ultrasonic sensor formed by the single-mode fiber cannot realize focusing detection of a sound field, has low sensitivity, can acquire a high-resolution space image through image reconstruction after multi-point acquisition, reduces the applicability and flexibility of the sensor, and in addition, the single-mode fiber is made of quartz and has a diameter of more than hundred micrometers, so that the sensor cannot bear small curvature bending and has poor flexibility.
Accordingly, there is a need for a method and apparatus for manufacturing an ultrasonic sensor and an ultrasonic sensor that overcomes the above-described deficiencies of the prior art.
Disclosure of Invention
The embodiment of the invention provides a preparation method and device of an ultrasonic sensor and the ultrasonic sensor, so that the flexibility and applicability of the ultrasonic sensor applied to ultrasonic detection are improved.
An embodiment of the present invention provides a method for manufacturing an ultrasonic sensor, including: heating and stretching the middle part of the micro-nano optical fiber to a preset magnitude to obtain a middle part to be bent, and bending the middle part to be bent to obtain a micro-nano optical fiber ring; writing a preset number of fiber Bragg grating pairs on two sides of the micro-nano fiber ring to obtain an annular micro-nano fiber Fabry-Perot cavity; and forming a polymer protective layer through a flexible material to encapsulate the annular micro-nano optical fiber Fabry-Perot cavity.
As an improvement of the above scheme, heating and stretching the middle part of the micro-nano optical fiber to a preset magnitude to obtain the middle part to be bent specifically includes: heating the middle part of the micro-nano optical fiber to a molten state through oxyhydrogen flame to obtain a molten middle part; and uniformly stretching the molten middle part to a preset magnitude to obtain the middle part to be bent.
As an improvement of the above solution, bending the middle portion to be bent to obtain the micro-nano optical fiber ring specifically includes: and bending the middle part to be bent into a ring shape or a knot shape to obtain the micro-nano optical fiber ring.
As an improvement of the above scheme, the fiber bragg grating pair is a pair of bragg gratings with matched central wavelengths.
As a modification of the above solution, the order is in the order of micrometers in diameter.
As an improvement of the scheme, the curvature range of the micro-nano optical fiber ring is 1mm -1 To 10mm -1 。
As an improvement of the above, the distance between the fiber bragg grating pairs is 1mm to 10cm.
As a modification of the above, the thickness of the polymer protective layer is in the range of 0.1 to 10mm.
The invention further provides a preparation device of an ultrasonic sensor correspondingly, which comprises a stretching unit, a writing unit and a packaging unit, wherein the stretching unit is used for heating and stretching the middle part of the micro-nano optical fiber to a preset magnitude so as to obtain a middle part to be bent, and bending the middle part to be bent so as to obtain a micro-nano optical fiber ring; the writing unit is used for writing a preset number of fiber Bragg grating pairs on two sides of the micro-nano fiber ring so as to obtain an annular micro-nano fiber Fabry-Perot cavity; the packaging unit is used for forming a polymer protective layer through a flexible material so as to package the annular micro-nano optical fiber Fabry-Perot cavity.
As an improvement to the above, the stretching unit is further configured to: heating the middle part of the micro-nano optical fiber to a molten state through oxyhydrogen flame to obtain a molten middle part; and uniformly stretching the molten middle part to a preset magnitude to obtain the middle part to be bent.
As an improvement to the above, the stretching unit is further configured to: and bending the middle part to be bent into a ring shape or a knot shape to obtain the micro-nano optical fiber ring.
Another embodiment of the present invention provides an ultrasonic sensor, where the ultrasonic sensor is prepared by a method for preparing an ultrasonic sensor as described above, and the ultrasonic sensor includes a micro-nano optical fiber, a pair of fiber bragg gratings, and a polymer protection layer, where the micro-nano optical fiber includes a micro-nano optical fiber ring and two micro-nano optical fiber straight portions, and the two micro-nano optical fiber straight portions are respectively located at two sides of the micro-nano optical fiber ring, where a pair of fiber bragg gratings in the pair of fiber bragg gratings are respectively inscribed on the two micro-nano optical fiber straight portions, and the polymer protection layer is made of a flexible material.
Compared with the prior art, the technical scheme has the following beneficial effects:
the invention provides a preparation method and a device of an ultrasonic sensor and an ultrasonic sensor, wherein a micro-nano optical fiber is bent into a micro-nano optical fiber ring, and an annular micro-nano optical fiber Fabry-Perot cavity formed by the micro-nano optical fiber ring and an optical fiber Bragg grating is packaged by a polymer protective layer formed by flexible materials, so that an acoustic focusing point is formed at the geometric center of the micro-nano optical fiber ring, and Jiao Banda small and focal depth can be changed by changing the diameter of the micro-nano optical fiber ring.
Drawings
FIG. 1 is a schematic flow chart of a method for manufacturing an ultrasonic sensor according to an embodiment of the present invention;
FIG. 2 is a schematic structural view of a manufacturing apparatus for an ultrasonic sensor according to an embodiment of the present invention;
FIG. 3 is a schematic view of an ultrasonic sensor according to an embodiment of the present invention;
fig. 4 is a schematic diagram illustrating an operation principle of an ultrasonic sensor according to an embodiment of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Detailed description of the preferred embodiments
The embodiment of the invention firstly describes a preparation method of an ultrasonic sensor. Fig. 1 is a schematic flow chart of a method for manufacturing an ultrasonic sensor according to an embodiment of the invention.
As shown in fig. 1, the preparation method comprises the following steps:
and S1, heating and stretching the middle part of the micro-nano optical fiber to a preset magnitude to obtain a middle part to be bent, and bending the middle part to be bent to obtain a micro-nano optical fiber ring.
In one embodiment, heating and stretching the middle portion of the micro-nano optical fiber to a preset magnitude to obtain a middle portion to be bent specifically includes: heating the middle part of the micro-nano optical fiber to a molten state through oxyhydrogen flame to obtain a molten middle part; and uniformly stretching the molten middle part to a preset magnitude to obtain the middle part to be bent.
In one embodiment, bending the middle portion to be bent to obtain the micro-nano optical fiber ring specifically includes: and bending the middle part to be bent into a ring shape or a knot shape to obtain the micro-nano optical fiber ring. In one embodiment, the micro-nano optical fiber ring is uniformly covered by a polymer protection layer, and the polymer can be polydimethylsiloxane or polymethyl methacrylate.
In one embodiment, the fiber bragg grating pair is a pair of center wavelength matched bragg gratings.
In one embodiment, the magnitude is in the order of microns in diameter.
In one implementationIn an example, the diameter of the micro-nano optical fiber is between 1 μm and 20 μm, the micro-nano optical fiber is drawn by single-mode or multimode undoped or doped optical fiber, and the curvature range of the micro-nano optical fiber ring is 1mm -1 To 10mm -1 。
In one embodiment, the fiber Bragg gratings are exposed through a mask or written point by point, and the distance between the fiber Bragg grating pairs is 1mm to 10cm.
In one embodiment, the polymeric protective layer has a thickness in the range of 0.1-10mm.
And S2, writing a preset number of fiber Bragg grating pairs on two sides of the micro-nano fiber ring to obtain an annular micro-nano fiber Fabry-Perot cavity.
And S3, forming a polymer protective layer through a flexible material to encapsulate the annular micro-nano optical fiber Fabry-Perot cavity.
When the ultrasonic sensor prepared by the method works, the geometric center of the bent micro-nano optical fiber forms acoustic focusing, a beam of narrow-band continuous light is introduced into the micro-nano optical fiber ring, when the Bragg grating is acted by ultrasonic waves on the middle optical fiber, the internal transmission light phase is changed, the wavelength of the reflection spectrum is caused to be changed, the reflection or transmission light intensity is caused to be changed, and the light intensity change is measured by the photoelectric detector, so that ultrasonic detection is realized.
The embodiment of the invention describes a preparation method of an ultrasonic sensor, which is characterized in that a micro-nano optical fiber is bent into a micro-nano optical fiber ring, and an annular micro-nano optical fiber Fabry-Perot cavity formed by the micro-nano optical fiber ring and an optical fiber Bragg grating is packaged through a polymer protective layer formed by flexible materials, so that an acoustic focusing point is formed at the geometric center of the micro-nano optical fiber ring, and Jiao Banda hours and focal depth can be changed by changing the diameter of the micro-nano optical fiber ring.
Second embodiment
In addition to the method, the embodiment of the invention also discloses a preparation device of the ultrasonic sensor. Fig. 2 is a schematic structural diagram of a manufacturing apparatus of an ultrasonic sensor according to an embodiment of the present invention.
As shown in fig. 2, the preparing apparatus includes a stretching unit 11, a writing unit 12, and a packaging unit 13.
The stretching unit 11 is used for heating and stretching the middle part of the micro-nano optical fiber to a preset magnitude to obtain a middle part to be bent, and bending the middle part to be bent to obtain a micro-nano optical fiber ring.
In one embodiment, the stretching unit 11 is further configured to: heating the middle part of the micro-nano optical fiber to a molten state through oxyhydrogen flame to obtain a molten middle part; and uniformly stretching the molten middle part to a preset magnitude to obtain the middle part to be bent.
In one embodiment, the stretching unit 11 is further configured to: and bending the middle part to be bent into a ring shape or a knot shape to obtain the micro-nano optical fiber ring.
The writing unit 12 is configured to write a preset number of fiber bragg grating pairs on two sides of the micro-nano fiber ring to obtain an annular micro-nano fiber fabry-perot cavity.
The encapsulation unit 13 is used for forming a polymer protection layer through a flexible material to encapsulate the annular micro-nano optical fiber Fabry-Perot cavity.
It should be noted that the above-described apparatus embodiments are merely illustrative, and the units described as separate units may or may not be physically separate, and units shown as units may or may not be physical units, may be located in one place, or may be distributed over a plurality of network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of this embodiment. In addition, in the drawings of the embodiment of the device provided by the invention, the connection relation between the units indicates that the units have communication connection, and the connection relation can be specifically realized as one or more communication buses or signal lines. Those of ordinary skill in the art will understand and implement the present invention without undue burden.
The embodiment of the invention describes a preparation device of an ultrasonic sensor, which is characterized in that a micro-nano optical fiber is bent into a micro-nano optical fiber ring, and an annular micro-nano optical fiber Fabry-Perot cavity formed by the micro-nano optical fiber ring and an optical fiber Bragg grating is packaged through a polymer protective layer formed by flexible materials, so that an acoustic focusing point is formed at the geometric center of the micro-nano optical fiber ring, and Jiao Banda hours and focal depth can be changed by changing the diameter of the micro-nano optical fiber ring.
Detailed description of the preferred embodiments
In addition to the above methods and apparatus, embodiments of the present invention also describe an ultrasonic sensor. Fig. 3 is a schematic structural diagram of an ultrasonic sensor according to an embodiment of the present invention.
As shown in fig. 3, the ultrasonic sensor is prepared by the preparation method of the ultrasonic sensor, and the ultrasonic sensor comprises a micro-nano optical fiber, a fiber bragg grating pair 103 and a polymer protection layer 104, wherein the micro-nano optical fiber comprises a micro-nano optical fiber ring 102 and two micro-nano optical fiber straight parts 101, the two micro-nano optical fiber straight parts 101 are respectively positioned at two sides of the micro-nano optical fiber ring 102, wherein a pair of fiber bragg gratings in the fiber bragg grating pair 103 are respectively inscribed on the two micro-nano optical fiber straight parts 101, and the polymer protection layer 104 is formed by a flexible material.
In the embodiment, the micro-nano optical fiber annular ultrasonic sensor has good flexibility, is packaged in a flexible protective layer, and has the advantages of electromagnetic environment interference resistance, compact structure and strong flexibility with the traditional piezoelectric ultrasonic transducer, and the whole device is optically transparent, is convenient to integrate with other optical imaging means, and constructs a multi-mode imaging system such as ultrasonic-photoacoustic-optical microscopic imaging and the like; compared with the common optical fiber, the micro-nano optical fiber has low bending loss, and the coverage range of the bending radius can be from cm to micron, so that the micro-nano optical fiber ring can be constructed to realize ultrasonic focusing, and the size and the focal depth of a focusing light spot can be also controlled in a larger range.
To further describe the specific application of the ultrasonic sensor, a description will be given below with reference to fig. 4. Fig. 4 is a schematic diagram illustrating an operation principle of an ultrasonic sensor according to an embodiment of the present invention.
Since the bragg gratings on the two sides of the sensor focusing ultrasonic sensor and the micro-nano optical fiber ring form a fabry-perot cavity, when ultrasonic acts on the micro-nano optical fiber ring, the optical interference phase difference in the optical fiber is changed, and then reflection or transmission spectrum wavelength drift is caused, a beam of narrow-band continuous detection light is injected into the sensor by the continuous narrow-band laser 201 through the circulator 202, the detection wavelength is located at the maximum point of the reflection spectrum slope of the micro-nano optical fiber ring 102, and when the ultrasonic causes the spectrum drift, the reflection detection light intensity is changed, so that ultrasonic detection is realized and the optimal sensitivity is obtained. The above-described change in the output light intensity is converted into an electric signal by the photodetector 203.
Further, the ac component of the electrical signal output from the photodetector 203 is extracted by the high pass filter 204, and the ultrasonic signal is detected and recovered by the signal analyzer 205. The direct current component is extracted by the low-pass filter 206, a real-time feedback signal is output by the control card 207, and the working wavelength of the narrow-band continuous laser is regulated, so that the wavelength is maintained at the maximum slope point of the reflection or transmission spectrum of the sensor in the ultrasonic detection process, thereby realizing the locking of the working point of the sensor and further stably detecting the ultrasonic.
The embodiment of the invention describes an ultrasonic sensor, which is characterized in that a micro-nano optical fiber is bent into a micro-nano optical fiber ring, and an annular micro-nano optical fiber Fabry-Perot cavity formed by the micro-nano optical fiber ring and an optical fiber Bragg grating is packaged by a polymer protective layer formed by flexible materials, so that an acoustic focusing point is formed at the geometric center of the micro-nano optical fiber ring, and Jiao Banda hours and focal depth can be changed by changing the diameter of the micro-nano optical fiber ring.
While the foregoing is directed to the preferred embodiments of the present invention, it will be appreciated by those skilled in the art that changes and modifications may be made without departing from the principles of the invention, such changes and modifications are also intended to be within the scope of the invention.
Claims (6)
1. A method of manufacturing an ultrasonic sensor, the method comprising:
heating and stretching the middle part of the micro-nano optical fiber to a preset magnitude to obtain a middle part to be bent, and bending the middle part to be bent to obtain a micro-nano optical fiber ring; the magnitude is in the order of micrometers in diameter; the curvature range of the micro-nano optical fiber ring is 1mm -1 To 10mm -1 ；
Writing a preset number of fiber Bragg grating pairs on two sides of the micro-nano fiber ring to obtain an annular micro-nano fiber Fabry-Perot cavity; the distance between the fiber bragg grating pairs is 1mm to 10cm;
forming a polymer protective layer through a flexible material to encapsulate the annular micro-nano optical fiber Fabry-Perot cavity;
heating and stretching the middle part of the micro-nano optical fiber to a preset magnitude to obtain a middle part to be bent, wherein the method specifically comprises the following steps of:
heating the middle part of the micro-nano optical fiber to a molten state through oxyhydrogen flame to obtain a molten middle part;
and uniformly stretching the molten middle part to a preset magnitude to obtain the middle part to be bent.
2. The method for manufacturing an ultrasonic sensor according to claim 1, wherein bending the middle portion to be bent to obtain the micro-nano fiber ring specifically comprises:
and bending the middle part to be bent into a ring shape or a knot shape to obtain the micro-nano optical fiber ring.
3. The method of manufacturing an ultrasonic sensor of claim 2, wherein the pair of fiber bragg gratings is a pair of center wavelength matched bragg gratings.
4. A method of manufacturing an ultrasonic transducer according to any of claims 1-3, wherein the thickness of the polymeric protective layer is in the range of 0.1-10mm.
5. A preparation device of an ultrasonic sensor is characterized by comprising a stretching unit, a inscribing unit and a packaging unit, wherein,
the stretching unit is used for heating and stretching the middle part of the micro-nano optical fiber to a preset magnitude to obtain a middle part to be bent, and bending the middle part to be bent to obtain a micro-nano optical fiber ring; the magnitude is in the order of micrometers in diameter; the curvature range of the micro-nano optical fiber ring is 1mm -1 To 10mm -1 ；
The writing unit is used for writing a preset number of fiber Bragg grating pairs on two sides of the micro-nano fiber ring so as to obtain an annular micro-nano fiber Fabry-Perot cavity; the distance between the fiber bragg grating pairs is 1mm to 10cm;
the packaging unit is used for forming a polymer protective layer through a flexible material so as to package the annular micro-nano optical fiber Fabry-Perot cavity;
wherein, the stretching unit is specifically used for:
heating the middle part of the micro-nano optical fiber to a molten state through oxyhydrogen flame to obtain a molten middle part;
and uniformly stretching the molten middle part to a preset magnitude to obtain the middle part to be bent.
6. An ultrasonic sensor, characterized in that the ultrasonic sensor is prepared by the method for preparing an ultrasonic sensor according to any one of claims 1-3, the ultrasonic sensor comprises a micro-nano optical fiber, a pair of fiber bragg gratings and a polymer protection layer, the micro-nano optical fiber comprises a micro-nano optical fiber ring and two micro-nano optical fiber straight parts, the two micro-nano optical fiber straight parts are respectively positioned at two sides of the micro-nano optical fiber ring, wherein a pair of fiber bragg gratings in the pair of fiber bragg gratings are respectively inscribed on the two micro-nano optical fiber straight parts, and the polymer protection layer is made of a flexible material.
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