CN108455255B - Substrate conveying method and substrate conveying equipment - Google Patents
Substrate conveying method and substrate conveying equipment Download PDFInfo
- Publication number
- CN108455255B CN108455255B CN201810265778.3A CN201810265778A CN108455255B CN 108455255 B CN108455255 B CN 108455255B CN 201810265778 A CN201810265778 A CN 201810265778A CN 108455255 B CN108455255 B CN 108455255B
- Authority
- CN
- China
- Prior art keywords
- machine
- buffer
- station
- downstream
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/02—Control or detection
- B65G2203/0266—Control or detection relating to the load carrier(s)
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Control Of Conveyors (AREA)
Abstract
The invention discloses a substrate transmission methodThe method comprises the following steps: the substrate enters a downstream machine from an upstream machine; judging whether a downstream machine table fails; when the downstream machine station has a fault, starting a buffer machine station positioned at the upstream of the downstream machine station, closing the first-in first-out function of the buffer machine station, and enabling the substrate to sequentially pass through the buffer machine station from the upstream machine station and enter the downstream machine station; determining the number n of substrates in a buffer station0When the number n of the substrates in the buffer machine table0When the time is less than the preset maximum value, timing is started, after the time t passes, the buffer machine is closed, the substrate directly flows into the downstream machine from the upstream machine, wherein t is more than or equal to n0*t0，t0The time for transporting a single substrate from the buffer station to the downstream station. According to the invention, the buffer machine table is utilized to avoid stacking caused by the fault of the downstream machine table, the carrying mode can be determined according to the actual number of the substrates in the buffer machine table, the continuity of the flow process of the production line is ensured, and the influence on the production efficiency due to long-time halt is avoided.
Description
Technical Field
The invention relates to the technical field of substrate transmission, in particular to a substrate transmission method and substrate transmission equipment.
Background
The main process flow of the color substrate in the liquid crystal panel industry is cleaning → coating → prebaking → exposing → developing → postbaking, equipment for detection and measurement (full detection/sampling) and the like exist in the middle of the process, the production line is general, the substrate is abnormal due to the stay of the substrate in the process equipment, and in order to prevent the substrate from staying at an upstream equipment due to the abnormality of the downstream equipment, buffer equipment is added behind the main process equipment to be used as prevention, when the downstream equipment is abnormal, the substrate enters the buffer equipment from the upstream equipment and then flows into the downstream equipment, so that the stay of the substrate is avoided.
When the tact time (takt time) of the production line reaches the limit, once glass enters the buffer device, the glass is difficult to come out again, so the buffer device generally starts a first-in first-out function, namely when glass enters the buffer, substrates generated by subsequent upstream machines are placed into the buffer device first, and then the glass which enters the buffer device first is taken out and placed into the downstream machines.
When the tact time of the production line reaches the limit, once the downstream equipment is abnormal, a substrate enters the buffer equipment, and due to the first-in first-out principle, a certain time is needed from the first substrate entering the buffer equipment to the downstream equipment exiting the buffer equipment, the overall flow sheet speed is influenced, so that more and more substrates in the buffer are caused, and the substrate transmission in the upstream is blocked until the substrate transmission in the buffer equipment is blocked, so that the whole production line stops.
Disclosure of Invention
In view of the defects in the prior art, the invention provides a substrate transmission method and substrate transmission equipment, which can ensure that the transmission of a substrate on a production line cannot be influenced by the short-term shutdown or downtime of the equipment, and the quality of a product cannot be influenced.
In order to achieve the purpose, the invention adopts the following technical scheme:
a substrate transfer method comprising:
the substrate enters a downstream machine from an upstream machine;
judging whether a downstream machine table fails;
when the downstream machine station fails, starting a buffer machine station positioned at the upstream of the downstream machine station, closing the first-in first-out function of the buffer machine station, and enabling the substrate to sequentially pass through the buffer machine station from the upstream machine station and enter the downstream machine station;
determining the number n of substrates in the buffer machine table0When the number n of the substrates in the buffer machine table0When the time is less than the preset maximum value, timing is started, the buffer machine table is closed after the time t elapses, and the substrate directly flows into the downstream machine table from the upstream machine table, wherein t is more than or equal to n0*t0，t0The time for conveying the single substrate from the buffer machine to the downstream machine is provided.
As one embodiment, when the number n of the substrates in the buffer stage0When the number n of the base plates reaches a preset maximum value, timing is not carried out, and when the base plates pass through the buffer machine station and enter the downstream machine station until the number n of the base plates in the buffer machine station0And when the preset minimum value is reached, closing the buffer machine table, and enabling the substrate to directly flow into the downstream machine table from the upstream machine table.
As an embodiment, the number of the buffer stations is multiple, and the multiple buffer stations are respectively located between the different upstream stations and the different downstream stations.
As an embodiment, one of the upstream machines is a baking machine, one of the downstream machines is a first detecting machine, and one of the buffer machines is disposed between the baking machine and the first detecting machine.
As an embodiment, one of the upstream machines is a developing machine, one of the downstream machines is a second detecting machine, and one of the buffer machines is disposed between the developing machine and the second detecting machine.
As one embodiment, a buffer stage and/or a detection stage is disposed between at least two of the cleaning stage, the coating stage, the pre-baking stage, the exposure stage, the developing stage, and the post-baking stage.
In one embodiment, the substrate is transported by a robot when directly flowing from the upstream station to the downstream station.
Another objective of the present invention is to provide a substrate transferring apparatus, which includes an upstream machine, a downstream machine, a buffer machine, and a control unit for controlling the transferring status of the substrate, wherein the control unit turns off the fifo function of the buffer machine when the downstream machine fails, and the number n of the substrates in the buffer machine0Starting timing when the time is less than a preset maximum value, controlling the substrate to sequentially pass through the buffer machine from an upstream machine station and enter a downstream machine station, and controlling the substrate to directly flow into the downstream machine station from the upstream machine station after the time t elapses, wherein t is more than or equal to n0*t0，t0The time for conveying the single substrate from the buffer machine to the downstream machine is provided.
As one embodiment, the control unit further controls the number n of the substrates in the buffer stage0When the number n of the base plates reaches a preset maximum value, the base plates do not need to be timed, and the base plates enter the downstream machine table through the buffer machine table until the number n of the base plates in the buffer machine table0When a preset minimum value is reached, a control substrate directly flows into the upstream machine tableAnd (5) downstream machines.
As one embodiment, the substrate transferring apparatus includes a plurality of stations, and a buffer station and/or a detection station is disposed between at least two adjacent stations.
According to the invention, the buffer machine table is utilized to avoid stacking caused by the fault of the downstream machine table, the carrying mode can be determined according to the actual number of the substrates in the buffer machine table, the continuity of the flow process of the production line is ensured, and the influence on the production efficiency due to long-time halt is avoided.
Drawings
FIG. 1 is a schematic diagram of a substrate transfer method according to an embodiment of the invention;
fig. 2 is a schematic structural diagram of a substrate transport apparatus according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Referring to fig. 1, the substrate transmission method according to the embodiment of the present invention mainly includes:
s01, the substrate enters a downstream machine from an upstream machine;
s02, judging whether the downstream machine has a fault;
s03, when the downstream machine has a fault, starting the buffer machine located at the upstream of the downstream machine, closing the first-in first-out function of the buffer machine, ensuring that the transmission speed of the substrate does not influence the subsequent process, and enabling the production line to flow sheets at normal tact time, wherein the substrate sequentially passes through the buffer machine from the upstream machine and enters the downstream machine;
s04, determining the number n of the substrates in the buffer machine table0；
S05, according to the number n of the substrates in the buffer machine table0Determining the transmission mode of the substrate according to the size relation with the preset maximum value, specifically comprising:
s051 buffering the number n of the substrates in the machine table0Less than a preset maximum valueThen, timing is started, after the time t elapses, the buffer machine is closed, the substrate directly flows from the upstream machine to the downstream machine, wherein t is larger than or equal to n0*t0，t0The method is suitable for the condition that the fault processing is rapid, and is used for ensuring that the substrates in the buffer machine table can be completely discharged within the set time t for the time of conveying the single substrate from the buffer machine table to the downstream machine table. Wherein, the value of the preset maximum value depends on tacttime of the production line, so that the transmission progress of the substrate is kept within the beat range of the production line.
S052 number n of substrates in the buffer machine0When the preset maximum value is reached, the fault is represented and cannot be processed quickly, timing is not carried out, the buffer machine is continuously utilized to transmit the substrate from the upstream machine to the downstream machine, and when the substrate enters the downstream machine through the buffer machine until the number n of the substrates in the buffer machine0When the preset minimum value is reached, the fault is removed, the buffer machine can be closed, and the substrate directly flows into the downstream machine from the upstream machine.
Preferably, there are a plurality of buffer stations, and the plurality of buffer stations are respectively located between different upstream stations and downstream stations. For example, one of the upstream machines is a baking machine, one of the downstream machines is a first detecting machine, a buffer machine is disposed between the baking machine and the first detecting machine, the buffer machine can be used as a buffer portion for transferring a substrate from the baking machine to the first detecting machine, so as to prevent stacking or substrate disconnection of the downstream first detecting machine, wherein the baking machine can be a pre-baking machine or a post-baking machine, and the first detecting machine can be used for performing sampling inspection or full inspection on a baking effect. Or one of the upstream machines is a developing machine, one of the downstream machines is a second detection machine, and a buffer machine is arranged between the developing machine and the second detection machine. Or, a buffer machine station and a detection machine station are arranged between at least two of the cleaning machine station, the coating machine station, the pre-baking machine station, the exposure machine station, the developing machine station and the post-baking machine station, so that measures for preventing substrate stacking or supply interruption and measures for detecting the quality of the substrate can be ensured between every two adjacent process links, and the substrate can be ensured to be in a transmission state all the time and the quality of products can be ensured. Generally, when the substrate directly flows into the downstream machine from the upstream machine, the substrate is conveyed by the manipulator, and when the substrate is conveyed from the buffer machine to the downstream machine, the substrate is also conveyed by the same manipulator, so that accurate positioning and grabbing can be realized.
The substrate transmission equipment of the present invention mainly comprises an upstream machine 1, a downstream machine 2, a buffer machine 3 and a control unit (not shown) for controlling the transmission state of the substrate, when the downstream machine fails, the control unit closes the first-in first-out function of the corresponding buffer machine 3, and the number n of the substrates in the buffer machine 30Starting timing when the time is less than the preset maximum value, enabling the control substrate to sequentially pass through the buffer machine 3 from the upstream machine 1 and enter the downstream machine 2, and enabling the control substrate to directly flow into the downstream machine 2 from the upstream machine 1 after the time t elapses, wherein t is more than or equal to n0*t0，t0The time for transferring the single substrate from the buffer stage 3 to the downstream stage 3. The robot 4 is located between the upstream machine 1 and the downstream machine 2, and is configured to grab the substrate from the upstream machine 1 or the buffer machine 3 and place the substrate on the downstream machine 2. The number n of the control units in the base plate of the buffer machine table0When the number of the base plates reaches a preset maximum value, timing is not carried out, and the base plates enter a downstream machine table through a buffer machine table until the number n of the base plates in the buffer machine table0When the preset minimum value is reached, the control substrate directly flows into the downstream machine from the upstream machine.
In this embodiment, the upstream machine, the downstream machine, and the buffer machine are all plural, that is, the upstream machine 1, 1 ', the downstream machine 1, 2 ', and the buffer machine 3, 3 ', and one manipulator 4 is correspondingly disposed between each of the upstream machine 1(1 ') and the downstream machine 2(2 '). For example, the downstream machine 2 is a coating machine, the upstream machine 1 'is a post-baking machine, and the downstream machine 2' is a detecting machine.
The buffer machine table is used for avoiding stacking caused by faults of a downstream machine table, the original functional design of the buffer machine table is not influenced at all, the carrying mode can be determined according to the actual number of the substrates in the buffer machine table, the product line halt caused by the use of the buffer machine table is avoided, the continuity of the flow process of the production line is ensured, and the influence of long-time halt on the production efficiency is avoided.
The foregoing is directed to embodiments of the present application and it is noted that numerous modifications and adaptations may be made by those skilled in the art without departing from the principles of the present application and are intended to be within the scope of the present application.
Claims (8)
1. A substrate transfer method, comprising:
the substrate enters a downstream machine from an upstream machine;
judging whether a downstream machine table fails;
when the downstream machine station fails, starting a buffer machine station positioned at the upstream of the downstream machine station, closing the first-in first-out function of the buffer machine station, and enabling the substrate to sequentially pass through the buffer machine station from the upstream machine station and enter the downstream machine station;
determining the number n of substrates in the buffer machine table0When the number n of the substrates in the buffer machine table0When the time is less than the preset maximum value, timing is started, the buffer machine table is closed after the time t elapses, and the substrate directly flows into the downstream machine table from the upstream machine table, wherein t is more than or equal to n0*t0，t0The time for conveying the single substrate from the buffer machine to the downstream machine is set;
when the number n of the substrates in the buffer machine table0When the number n of the base plates reaches a preset maximum value, timing is not carried out, and when the base plates pass through the buffer machine station and enter the downstream machine station until the number n of the base plates in the buffer machine station0And when the preset minimum value is reached, closing the buffer machine table, and enabling the substrate to directly flow into the downstream machine table from the upstream machine table.
2. The substrate transport method according to claim 1, wherein the plurality of buffer stations are respectively located between the different upstream and downstream stations.
3. The method of claim 2, wherein one of the upstream tools is a bake-out tool, one of the downstream tools is a first inspection tool, and one of the buffer tools is disposed between the bake-out tool and the first inspection tool.
4. The substrate transport method according to claim 3, wherein one of the upstream stations is a developing station, one of the downstream stations is a second inspection station, and one of the buffer stations is disposed between the developing station and the second inspection station.
5. The method of claim 2, wherein a buffer stage and/or a detection stage is disposed between at least two of the cleaning stage, the coating stage, the pre-baking stage, the exposure stage, the developing stage, and the post-baking stage.
6. The method of claim 2, wherein the substrate is transferred by a robot while flowing directly from the upstream tool to the downstream tool.
7. The base plate transmission equipment is characterized by comprising an upstream machine station, a downstream machine station, a buffer machine station and a control unit for controlling the transmission state of the base plates, wherein the control unit closes the first-in first-out function of the buffer machine station when the downstream machine station fails, and the number n of the base plates in the buffer machine station0Starting timing when the time is less than a preset maximum value, controlling the substrate to sequentially pass through the buffer machine from an upstream machine station and enter a downstream machine station, and controlling the substrate to directly flow into the downstream machine station from the upstream machine station after the time t elapses, wherein t is more than or equal to n0*t0，t0The time for conveying the single substrate from the buffer machine to the downstream machine is set; the control unit is also used for controlling the number n of the substrates in the buffer machine table0When the preset maximum value is reached, no timing is carried outThe base plate enters the downstream machine station through the buffer machine station until the number n of the base plates in the buffer machine station0And when the preset minimum value is reached, the control substrate directly flows into the downstream machine from the upstream machine.
8. The substrate transport apparatus of claim 7, comprising a plurality of stations, wherein a buffer station and/or a detection station is disposed between at least two adjacent stations.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810265778.3A CN108455255B (en) | 2018-03-28 | 2018-03-28 | Substrate conveying method and substrate conveying equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810265778.3A CN108455255B (en) | 2018-03-28 | 2018-03-28 | Substrate conveying method and substrate conveying equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108455255A CN108455255A (en) | 2018-08-28 |
| CN108455255B true CN108455255B (en) | 2020-04-10 |
Family
ID=63236952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810265778.3A Active CN108455255B (en) | 2018-03-28 | 2018-03-28 | Substrate conveying method and substrate conveying equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108455255B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109573459B (en) * | 2018-12-25 | 2020-12-18 | 惠科股份有限公司 | Method and system for carrying cassettes |
| CN109742041B (en) * | 2019-01-07 | 2020-11-24 | 成都中电熊猫显示科技有限公司 | Control method and equipment for substrate transfer |
| CN110554670B (en) * | 2019-09-06 | 2023-01-03 | 中电九天智能科技有限公司 | Multi-machine control optimization method based on flexible manufacturing |
| CN111003511B (en) * | 2020-03-05 | 2020-06-30 | 蓝思智能机器人(长沙)有限公司 | Window glass unloading system |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1086867A (en) * | 1996-09-18 | 1998-04-07 | Daihatsu Motor Co Ltd | Automobile door production device |
| WO2000068118A1 (en) * | 1999-05-06 | 2000-11-16 | Tokyo Electron Limited | Transfer system for lcd glass substrate |
| CN101935157B (en) * | 2010-05-19 | 2012-05-02 | 东旭集团有限公司 | Cache device for glass substrate production line and control method thereof |
| CN202784791U (en) * | 2012-09-17 | 2013-03-13 | 东旭集团有限公司 | Online buffering device for glass substrates |
| CN205151119U (en) * | 2015-10-29 | 2016-04-13 | 厦门赛特勒继电器有限公司 | Article buffer memory mechanism |
| CN206915258U (en) * | 2017-04-21 | 2018-01-23 | 广东省智能制造研究所 | A kind of buffer storage for Real-time Balancing multitask production line |
-
2018
- 2018-03-28 CN CN201810265778.3A patent/CN108455255B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN108455255A (en) | 2018-08-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108455255B (en) | Substrate conveying method and substrate conveying equipment | |
| WO2018199484A1 (en) | Lamination device for secondary battery | |
| CN110510405B (en) | Material transmission method, transmission device, transmission system and readable storage medium | |
| JP2006229183A5 (en) | ||
| CN104321858A (en) | Processing station for planar substrates and method for processing planar substrates | |
| CN111002109A (en) | High-flexibility continuous composite automatic production system suitable for flaky materials | |
| KR20130025826A (en) | Substrate processing apparatus, substrate processing method and storage medium | |
| CN101615025B (en) | Maintenance control method and system used for semiconductor processing equipment | |
| JP2000235949A (en) | Coating/developing equipment and its method | |
| CN211516663U (en) | High-flexibility continuous composite automatic production system suitable for flaky materials | |
| JP6891756B2 (en) | Heat treatment line for steel pipes and transfer control method for steel pipes | |
| CN110880461B (en) | Substrate processing apparatus | |
| CN102800560B (en) | Method for automatically monitoring manufacturing procedure | |
| US20030226251A1 (en) | Fitting system and method of fitting substrates with components | |
| CN101339324B (en) | Processing equipment and its control method | |
| KR20160032692A (en) | Device for conveying glass ribbon, device for manufacturing glass plate, method for manufacturing glass plate, method for detecting failure conveying roll and method for preventing defect occurrence in glass ribbon | |
| JP2010079632A (en) | System and method for controlling conveyance of optical member | |
| TWI680330B (en) | Optical film attachment system | |
| JP2541544B2 (en) | Semiconductor manufacturing equipment | |
| KR20150095690A (en) | Workpiece conveyance device, and workpiece conveyance method | |
| CN112558211B (en) | Polaroid attaching mechanism and method for display panel | |
| US20230075394A1 (en) | Inspection system | |
| CN221262308U (en) | Wet processing equipment with induction lamp signal | |
| CN109976100B (en) | Photoetching system and photoetching method thereof | |
| CN221885062U (en) | Integrated system for photolithography process |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |