CN108441834B - Method for diamond coating surface of transmission element of machine tool - Google Patents

Method for diamond coating surface of transmission element of machine tool Download PDF

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Publication number
CN108441834B
CN108441834B CN201810308481.0A CN201810308481A CN108441834B CN 108441834 B CN108441834 B CN 108441834B CN 201810308481 A CN201810308481 A CN 201810308481A CN 108441834 B CN108441834 B CN 108441834B
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Prior art keywords
coating
guide rail
ball screw
linear guide
cleaning
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Expired - Fee Related
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CN201810308481.0A
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CN108441834A (en
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翁建强
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605Carbon
    • C23C14/0611Diamond
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention aims to provide a method for improving the service life, hardness and self-lubricating performance of a transmission element of a machine tool to carry out diamond coating on the surface of the transmission element, which comprises the following steps: cleaning before coating: removing oil, wax and drying; coating operation is carried out by adopting a magnetron sputtering vacuum ion coating machine: installing a ball screw or a linear guide rail on a coating chamber rotating frame, adjusting the rotating speed, closing a coating chamber equipment door, vacuumizing, introducing argon into the coating chamber, heating the temperature in the coating chamber to 110-120 ℃, and starting an ion cleaning source; carrying out titanium target priming coating on the cleaned ball screw or linear guide rail, placing the ball screw or linear guide rail in a magnetron sputtering vacuum system, and depositing for 20 minutes by taking a metal titanium target as a cathode and working gas as argon; coating the part with a diamond coating by gas release; cooling to room temperature, and discharging.

Description

Method for diamond coating surface of transmission element of machine tool
Technical Field
The invention relates to the technical field of diamond film coating, in particular to a method for carrying out diamond coating on the surface of a transmission element of a machine tool.
Background
At present, various ceramic materials are mostly selected as aggregates for screw rods or guide rails for machine tools at home and abroad to prepare wear-resistant coatings, and the wear-resistant coatings have an effect of prolonging the service lives of equipment and elements, but are far from meeting the market and industry requirements.
In the production of ball screw or linear guide, only accurate grinding is carried out on the screw or the guide rail, but the wear resistance is not increased, and the machine tool is in a running state for a long time, so that the service life of the screw or the guide rail is short, the maintenance time is more than one year and less than one week, and a customer needs to repeatedly maintain and replace the worn screw or the guide rail, thereby greatly influencing the economic benefit of an enterprise. In order to achieve the hardness and wear resistance requirements required by manufacturers, the surface of the ball screw or the linear guide rail must be subjected to a coating treatment to achieve the required friction and corrosion resistance of the surface of the ball screw or the linear guide rail.
In view of the above-mentioned drawbacks, the present inventors have made active research and innovation to create a method for diamond coating on the surface of the transmission element of the machine tool, so that the method has industrial utility value.
Disclosure of Invention
In order to solve the technical problems, the invention aims to provide a method for improving the service life, hardness and self-lubricating performance of a ball screw or a linear guide rail by coating diamond on the surface of a transmission element of a machine tool.
The method for coating diamond on the surface of the ball screw or the linear guide rail comprises the following steps:
a) and cleaning before coating:
oil removal: mixing ultrapure water and a metal degreasing agent to prepare an oil removing mixture, and cleaning the surface of the ball screw or the linear guide rail by using the oil removing mixture until no oil stains exist;
wax removal: preparing a paraffin removal mixture from ultrapure water and a paraffin removal cleaning agent, heating the paraffin removal mixture to 80-90 ℃, performing ultrasonic cleaning on the surface of the ball screw or the linear guide rail for 15min, and then performing ultrapure water cleaning until no dirt exists on the surface of the ball screw or the linear guide rail;
and (3) drying: hot air drying by using a blower to remove water vapor on the surface of the ball screw or the linear guide rail;
b) and performing coating operation by adopting a magnetron sputtering vacuum ion coating machine:
b1) installing a ball screw or a linear guide rail on a coating chamber rotating frame, adjusting the rotating speed to 2.0-3.0r/min, closing a coating chamber equipment door, vacuumizing until the vacuum degree of the coating chamber reaches 1.35 multiplied by 10 < -3 > Pa-3.35 multiplied by 10 < -3 > Pa, introducing argon into the coating chamber so as to heat the temperature in the coating chamber to 110 plus-10 < -1 > Pa-7 multiplied by 10 < -1 > Pa, starting an ion cleaning source at the voltage of 1800 plus-10 < -1 > Pa, generating glow discharge, and generating a large amount of argon ions to bombard and clean the surface of the ball screw or the linear guide rail for 20 min;
b2) carrying out titanium target priming coating on the ball screw or the linear guide rail cleaned in the step b1), placing the ball screw or the linear guide rail in a magnetron sputtering vacuum system, taking a metal titanium target as a cathode, taking working gas as argon, and controlling the pressure in the vacuum system to be 3 multiplied by 10-2Pa, the current of the titanium target is 50A, the bias voltage is-300V, the deposition time is 20 minutes, in the process, argon is ionized into argon ions, the argon ions with high energy bombard the surface of the titanium target material, titanium atoms on the surface layer are bombarded away from the surface of the target material, and then the titanium atoms are deposited on a ball screw or a linear guide rail;
b3) carrying out diamond coating on the transmission element treated in the step b2) through gas release, closing argon, introducing acetylene gas, and keeping the vacuum degree at 8 multiplied by 10-1Pa-9×10-1Pa, regulating bias current to 5.0A, displaying absolute vacuum in a vacuum system through a sensor, automatically coating a film by a magnetron sputtering generator, depositing for 40-60min to obtain a ball screw or a linear guide rail coated with a diamond film, and finally obtaining a diamond coating with the thickness of 6-8 microns;
b4) and c, after the step b3) is finished, cooling the temperature in the film coating chamber to room temperature, and discharging to finish the coating operation.
Further, in step a), degreasing: the method comprises the following steps of heating an oil removing mixture to 60-80 ℃ according to the volume part ratio of ultrapure water to a metal oil removing agent of 1: 1-2, cleaning the surface of a ball screw or a linear guide rail for 15 minutes in a high-pressure spraying mode, and rinsing the sprayed ball screw or linear guide rail with ultrapure water until no oil stain exists.
By the scheme, the invention at least has the following advantages: 1. the diamond coating has ultrahigh hardness and self-lubricating function, the surface hardness of the diamond coating can reach 3500HV, and the friction coefficient is 0.005-0.01; 2. the invention is mainly used for carrying out surface coating treatment on the ball screw or the linear guide rail such as the screw and the guide rail of the machine tool, so that the surface of the ball screw or the linear guide rail has low friction coefficient, high surface hardness and high wear resistance, the service life of the ball screw or the linear guide rail is greatly prolonged, the service performance is more than five times of that of the common ball screw or the linear guide rail, and the durability of the machining precision of the machine tool is also enhanced; diamond coatings are useful in many high wear applications such as bearings, medical devices, and food and beverage containers.
The foregoing is a summary of the present invention, and in order to provide a clear understanding of the technical means of the present invention and to be implemented in accordance with the present specification, the following is a detailed description of the preferred embodiments of the present invention.
Detailed Description
The following examples are given to further illustrate the embodiments of the present invention. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
The method for coating diamond on the surface of the ball screw or the linear guide rail comprises the following steps:
a) and cleaning before coating:
oil removal: mixing ultrapure water and a metal degreasing agent to prepare an oil removing mixture, and cleaning the surface of the ball screw or the linear guide rail by using the oil removing mixture until no oil stains exist; preferably, the ratio of the ultrapure water to the metal degreasing agent in the degreasing mixture is 1: 1-2 in parts by volume, the degreasing mixture is heated to 60-80 ℃, the surface of the ball screw or the linear guide rail is cleaned for 15 minutes in a high-pressure spraying mode, and the sprayed ball screw or linear guide rail is rinsed by bubbling ultrapure water until no oil stain exists;
wax removal: preparing a paraffin removal mixture from ultrapure water and a paraffin removal cleaning agent, heating the paraffin removal mixture to 80-90 ℃, performing ultrasonic cleaning on the surface of the ball screw or the linear guide rail for 15min, circularly cleaning the surface of the ball screw or the linear guide rail by using the paraffin removal mixture, and then performing ultrapure water cleaning until the surface of the ball screw or the linear guide rail is free of any dirt;
and (3) drying: hot air is dried by a blower to remove water vapor on the surface of the ball screw or the linear guide rail, the hot air is hot air with the temperature of normal temperature to 200 ℃, and the hot air is a hot air circulation drying mode;
b) and performing coating operation by adopting a magnetron sputtering vacuum ion coating machine:
b1) installing a ball screw or a linear guide rail on a coating chamber rotating frame, adjusting the rotating speed to 2.0-3.0r/min, closing a coating chamber equipment door, vacuumizing until the vacuum degree of the coating chamber reaches 1.35 multiplied by 10 < -3 > Pa-3.35 multiplied by 10 < -3 > Pa, introducing argon into the coating chamber so as to heat the temperature in the coating chamber to 110 plus-10 < -1 > Pa-7 multiplied by 10 < -1 > Pa, starting an ion cleaning source at the voltage of 1800 plus-10 < -1 > Pa, generating glow discharge, and generating a large amount of argon ions to bombard and clean the surface of the ball screw or the linear guide rail for 20 min;
b2) carrying out titanium target priming coating on the ball screw or the linear guide rail cleaned in the step b1), placing the ball screw or the linear guide rail in a magnetron sputtering vacuum system, taking a metal titanium target as a cathode, taking working gas as argon, and controlling the pressure in the vacuum system to be 3 multiplied by 10-2Pa, the current of the titanium target is 50A, the bias voltage is-300V, the deposition time is 20 minutes, in the process, argon is ionized into argon ions, the argon ions with high energy bombard the surface of the titanium target material, titanium atoms on the surface layer are bombarded away from the surface of the target material, and then the titanium atoms are deposited on a ball screw or a linear guide rail;
b3) carrying out diamond coating on the transmission element treated in the step b2) through gas release, closing argon, introducing acetylene gas, and keeping the vacuum degree at 8 multiplied by 10-1Pa-9×10-1Pa, regulating bias current to 5.0A, displaying absolute vacuum in a vacuum system through a sensor, automatically coating a film by a magnetron sputtering generator, depositing for 40-60min to obtain a ball screw or a linear guide rail coated with a diamond film, and finally obtaining a diamond coating with the thickness of 6-8 microns;
b4) and c, after the step b3) is finished, cooling the temperature in the film coating chamber to room temperature, and discharging to finish the coating operation.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, it should be noted that, for those skilled in the art, many modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.

Claims (1)

1. A method for carrying out diamond coating on the surface of a transmission element of a machine tool is used for carrying out diamond coating on the surface of a ball screw or a linear guide rail of the machine tool, and is characterized in that: the method comprises the following steps:
a) and cleaning before coating:
oil removal: mixing ultrapure water and a metal degreasing agent to prepare an oil removing mixture, and cleaning the surface of the ball screw or the linear guide rail by using the oil removing mixture until no oil stains exist;
wax removal: preparing a paraffin removal mixture from ultrapure water and a paraffin removal cleaning agent, heating the paraffin removal mixture to 80-90 ℃, performing ultrasonic cleaning on the surface of the ball screw or the linear guide rail for 15min, and then performing ultrapure water cleaning until no dirt exists on the surface of the ball screw or the linear guide rail;
and (3) drying: hot air drying by using a blower to remove water vapor on the surface of the ball screw or the linear guide rail;
in step a), removing oil: the method comprises the following steps of (1) heating an oil removing mixture to 60-80 ℃ according to the volume part ratio of ultrapure water to a metal oil removing agent in the oil removing mixture to be 1: 1-2, cleaning the surface of a ball screw or a linear guide rail for 15 minutes in a high-pressure spraying mode, and rinsing the sprayed ball screw or linear guide rail with ultrapure water until no oil stain exists;
b) and performing coating operation by adopting a magnetron sputtering vacuum ion coating machine:
b1) installing the ball screw or linear guide rail on a coating chamber rotating frame, adjusting the rotating speed to 2.0-3.0r/min, closing a coating chamber equipment door, and vacuumizing until the vacuum degree of the coating chamber reaches 1.35 multiplied by 10-3Pa-3.35×10-3When Pa is needed, argon is introduced into the film coating chamber to ensure that the pressure in the film coating chamber reaches 3 multiplied by 10-1Pa-7×10-1When Pa is needed, the temperature in the coating chamber is heated to 110-1900 ℃ C., the ion cleaning source is started, the voltage is 1800-1900V, glow discharge is generated, and a large amount of argon ions are generated to carry out bombardment cleaning on the surface of the ball screw or the linear guide rail for 20 min;
b2) carrying out titanium target priming coating on the ball screw or the linear guide rail cleaned in the step b1), placing the ball screw or the linear guide rail in a magnetron sputtering vacuum system, taking a metal titanium target as a cathode, taking working gas as argon, and controlling the pressure in the vacuum system to be 3 multiplied by 10-2Pa, the current of the titanium target is 50A, the bias voltage is-300V, the deposition time is 20 minutes, in the process, argon is ionized into argon ions, the argon ions with high energy bombard the surface of the titanium target material, titanium atoms on the surface layer are bombarded away from the surface of the target material, and then the titanium atoms are deposited on a ball screw or a linear guide rail;
b3) carrying out diamond coating on the transmission element treated in the step b2) through gas release, closing argon, introducing acetylene gas, and keeping the vacuum degree at 7 multiplied by 10-1Pa-8×10-1Pa, regulating bias current to 5.0A, displaying absolute vacuum in a vacuum system through a sensor, automatically coating a film by a magnetron sputtering generator, depositing for 40-60min to obtain a ball screw or a linear guide rail coated with a diamond film, and finally obtaining a diamond coating with the thickness of 6-8 microns;
b4) and c, after the step b3) is finished, cooling the temperature in the film coating chamber to room temperature, and discharging to finish the coating operation.
CN201810308481.0A 2018-04-09 2018-04-09 Method for diamond coating surface of transmission element of machine tool Expired - Fee Related CN108441834B (en)

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CN109457214A (en) * 2018-11-01 2019-03-12 佛山市南海区里水镇经济促进局 A kind of preparation method of harmonic speed reducer surface diamond film

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WO2017089597A1 (en) * 2015-11-27 2017-06-01 Cemecon Ag Coating a body with a layer of diamond and a layer of hard material

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IN2012DN00310A (en) * 2009-07-15 2015-05-08 Hitachi Tool Eng
CN103160794A (en) * 2011-12-16 2013-06-19 中国科学院兰州化学物理研究所 Method for preparing diamond-like carbon film on carbon steel surface or nodular cast iron surface
US9617654B2 (en) * 2012-12-21 2017-04-11 Exxonmobil Research And Engineering Company Low friction coatings with improved abrasion and wear properties and methods of making
CN105506574B (en) * 2015-12-24 2018-03-06 富耐克超硬材料股份有限公司 The preparation method and Nano diamond blade of nano diamond coating

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WO2017089597A1 (en) * 2015-11-27 2017-06-01 Cemecon Ag Coating a body with a layer of diamond and a layer of hard material

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