CN105506574B - The preparation method and Nano diamond blade of nano diamond coating - Google Patents
The preparation method and Nano diamond blade of nano diamond coating Download PDFInfo
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- CN105506574B CN105506574B CN201510987674.XA CN201510987674A CN105506574B CN 105506574 B CN105506574 B CN 105506574B CN 201510987674 A CN201510987674 A CN 201510987674A CN 105506574 B CN105506574 B CN 105506574B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
- C23C16/0281—Deposition of sub-layers, e.g. to promote the adhesion of the main coating of metallic sub-layers
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/271—Diamond only using hot filaments
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/274—Diamond only using microwave discharges
Abstract
The present invention provides a kind of preparation method of nano diamond coating, and specific steps include：One layer of transition zone is deposited in cemented carbide substrate surfaces using physical vaporous deposition；Then it is cleaned by ultrasonic through super nanodiamond suspension and obtains hard alloy precipitation pre-treatment body；And chemical vapour deposition technique is used, the processing body surface face deposition nano diamond coating before the hard alloy precipitates.The present invention also provides a kind of Nano diamond blade, including blade base and the transition zone and nano diamond coating that are deposited in the blade base surface successively using the above method.There is stronger adhesion by nano diamond coating prepared by the above method and the hard alloy substrate so that the Nano diamond blade has higher machining accuracy and longer service life.
Description
Technical field
The invention belongs to technical field of superhard material, and in particular to the preparation method and nanometer of a kind of nano diamond coating
Diamond blade.
Background technology
More and more with the species of superhard material, the cutter that industry can be cut as processing is also more and more.Diamond
Cutter is due to high hardness and thermal conductivity, and extremely low coefficient of friction and thermal coefficient of expansion, being allowed in rapidoprint
Industry has overwhelming superiority, but with raising of the processing industry to requirement on machining accuracy so that in general diamond cutter is difficult to
Meet present situation, preferable finishing tool is that requirement tool surface needs are extremely smooth, is enabled during rapidoprint
Improve machining accuracy.
Nano diamond cutter, the advantages of not only maintaining hardness possessed by block diamond and thermal conductivity, also have concurrently
Some characteristics such as higher surface smoothness of nano material.Nano diamond is in structure mainly with SP3Hydridization key connection and
Into certain network structure, ensure that the precision in working angles, there is lower surface compared to micron diamond coating
Roughness, lower coefficient of friction, are more suitable for finishing field.But due to the Binder Phase of cobalt in hard alloy substrate be present,
Cobalt often promotes graphite-phase to grow, and then the adhesion for causing to precipitate between diamond coatings and hard alloy substrate weakens,
So that the precision of existing diamond-coated tools is not good enough, service life is shorter.
In order to solve the problem present on, people are seeking a kind of preferable technical solution always.
The content of the invention
By in consideration of it, the present invention is above-mentioned it is necessory to the preparation method and a kind of utilization for providing a kind of nano diamond coating
Preparation method manufacture have that machining accuracy is high, service life is long and with the compact Nano diamond knife of hard alloy substrate
Piece, to solve the above problems.
Technical scheme provided by the invention mainly by depositing one layer of excessive layer first in cemented carbide substrate surfaces, so
One layer of nano diamond coating of chemical vapor deposition is recycled in the transition layer surface afterwards, to improve the nanogold
Adhesion between hard rock coating and the hard alloy substrate.Specifically, the present invention provides a kind of nano diamond coating
Preparation method, comprise the following steps：
Deposit transition zone：One layer of transition zone is deposited in cemented carbide substrate surfaces using physical vaporous deposition, contained
There is the hard alloy substrate of transition zone；
It is cleaned by ultrasonic：The hard alloy substrate containing transition zone is placed in super nanodiamond suspension and surpassed
Sound cleans 20~50min, and hard alloy precipitation pre-treatment body is obtained after drying process；
Deposit nano diamond coating：Using chemical vapour deposition technique, processing body surface face sinks before the hard alloy precipitates
One layer of nano diamond coating of product, is made nano diamond coating.
Based on above-mentioned, the thickness of the transition zone is 3~5 μm, the deposited material of the transition zone include molybdenum, titanium, chromium,
The combination of one or more of materials in niobium, nickel, silicon nitride, aluminum oxide.
Based on above-mentioned, the physical gas-phase deposite method is magnetron sputtering method or arc ion plating.
Based on above-mentioned, the chemical vapour deposition technique is hot filament CVD or microwave plasma chemical gas phase
Sedimentation.
Based on above-mentioned, the concrete technology of the hot filament CVD is：It is 2kPa in pressure, temperature is 2300 DEG C
Under the conditions of~2500 DEG C, using hot filament CVD, with H2、CH4Be reacting gas source the hard alloy precipitation before
Reacted on processing body 6~8 hours and form nano diamond coating, wherein, CH4Gas volume in overall reaction gas volume source 1%
~5%.
Based on above-mentioned, the concrete technology of the MPCVD method is：It is 13kPa in pressure, temperature
Spend under the conditions of 700 DEG C~900 DEG C, using MPCVD method, with H2、CH4It is reacting gas source in institute
State to react 6~10 hours on hard alloy precipitation pre-treatment body and form nano diamond coating, wherein, microwave power 7kW,
CH4Gas volume in overall reaction gas volume source 1%~5%.
Based on above-mentioned, the preparation process of the super nanodiamond suspension specifically includes：
The super Nano diamond particle that average grain diameter is 4~50nm is suspended in a solvent first, is configured to numbers of particles
Concentration is 1017~1020/ g dense super nanodiamond suspension；Then dense super nanodiamond suspension described in 2~5mL is taken
Instill in 10~50mL ultra-pure water, stir and be diluted so as to which the super nanodiamond suspension be made；Wherein, institute
State ultra-pure water and refer to that resistivity is more than 15M cm deionized water.
The present invention also provides a kind of Nano diamond blade, including blade base and is sequentially deposited at the blade base table
The transition zone and nano diamond coating in face, the nano diamond coating are by the preparation side of described nano diamond coating
Prepared by method.
Preferably, the average grain diameter of the Nano diamond particle in the nano diamond coating is 30~100nm.
Preferably, the surface roughness of the nano diamond coating is 50~100nm.
Compared with prior art, the preparation method of nano diamond coating provided by the invention, in the carbide matrix
The transition zone of body surface face deposition, reduces growth shadow of the cobalt component in the hard alloy substrate to nano diamond coating
Ring；It is ultrasonically treated using super nanodiamond suspension, due to the Buddha's warrior attendant in the super nanodiamond suspension
The particle diameter of stone particle is smaller, and the hard alloy substrate with transition zone is by the super nanodiamond suspension ultrasound
After cleaning, easily absorption can be as the super nanogold of the small particle of nano diamond coating nucleus described in subsequent deposition on its surface
Hard rock particle；So as to increase the nucleation amount of Nano diamond, be advantageous to the deposition of nano diamond coating, with the transition zone one
Rise and improve adhesion between the nano diamond coating and the hard alloy substrate, so as to add the nanogold
Precision, wearability and the service life of hard rock blade.
Experiment proves：Using digital display micro Vickers（VTD512）The nanometer prepared to method provided by the present invention
Diamond coatings do impression test, and Buddha's warrior attendant is analyzed in terms of diamond film departs from mode, impression circumferential crack, impression radius three
The adhesion with substrate of stone film, though the nano diamond coating has Indentation Damage impression unobvious and radius is less than 30 μ
M, impression periphery flawless, being remarkably decreased for intrinsic stress and thermal stress is imply that, therefore, prepared by method provided by the present invention
Nano diamond coating and hard alloy substrate have stronger adhesion.
In addition, WC-6%wt.Co is provided to wear bandwidth VB on knife face after at 1/2 cutting depth with international standard ISO needle
As blunt standard, blunt standard VB=0.4mm of hard alloy cutter.Turning equipment：CK6136I numerically controlled lathes, turning material
Material：ZAlSi12, turning speed V=200m/min, amount of feeding f=24mm/min, turning depth ap=0.5mm, wear extent VB=
Under 0.4mm, the life-span of Nano diamond blade provided by the invention is 300~500min.
Embodiment
Below by embodiment, technical scheme is described in further detail.
Embodiment 1
The present embodiment provides a kind of preparation method of nano diamond coating, specifically includes following steps：
Precipitate transition zone：Tungsten-cobalt alloy matrix is obtained into clean tungsten-cobalt alloy matrix after ultra-pure water is cleaned, dried first；
Then layer of metal molybdenum transition zone is deposited in the clean tungsten-cobalt alloy matrix surface using arc ion plating, obtains surface band
There is the tungsten-cobalt alloy matrix of molybdenum coating.
It is cleaned by ultrasonic：The super Nano diamond particle that particle diameter is 4~50nm is suspended in a solvent first, prepares granule number
Mesh concentration is 6 × 1018/ g dense super nanodiamond suspension；Then dense super nanodiamond suspension described in 2mL is taken to instill
In 50mL ultra-pure water, stir and be diluted so as to which the rice diamond suspension be made；Then the surface is carried
The tungsten-cobalt alloy matrix of molybdenum coating is placed in the super nanodiamond suspension and carries out ultrasonic cleaning 20min, then at 200 DEG C
At a temperature of dry 20min, obtain tungsten-cobalt alloy precipitation pre-treatment body.Wherein, the dense super nanodiamond suspension is normal
PH value under temperature is 4.5, and the ultra-pure water refers to that resistivity is more than 15M CM deionized water.
Deposit nano diamond coating：It is 2kPa in pressure, under the conditions of temperature is 2300 DEG C, is sunk using Hot Filament Chemical Vapor
Area method, with H2、CH4Reacted for reacting gas source before the tungsten-cobalt alloy precipitates on processing body and form within 6 hours Nano diamond painting
Layer.Wherein, CH4For gas volume the 1.5% of overall reaction gas volume source, the surface of the obtained nano diamond coating is thick
Rugosity is 80nm, and the average grain diameter of the Nano diamond particle in the nano diamond coating is 100nm.
Contrast test 1
Contrast test 1 provides a kind of preparation method of nano diamond coating, the system that the preparation method provides with embodiment 1
Preparation Method is essentially identical, and difference is：Contrast test 1 does not include the step of above-mentioned ultrasonic cleaning, the tungsten-cobalt alloy base
Body after the step of above-mentioned deposition transition zone, is being directly entered described the step of depositing nano diamond coating.
Contrast test 2
Contrast test 2 provides a kind of preparation method of nano diamond coating, the system that the preparation method provides with embodiment 1
Preparation Method is essentially identical, and difference is：Contrast test 2 does not include above-mentioned deposition transition layer process, and tungsten-cobalt alloy matrix exists
After ultra-pure water cleans, the step of being directly entered above-mentioned ultrasonic cleaning and deposit nano diamond coating.
Experiment proves：Using digital display micro Vickers（VTD512）It is prepared by the method provided using the present embodiment
The nano diamond coating for being attached to tungsten-cobalt alloy matrix surface does impression test, departs from mode, impression periphery from diamond film
The adhesion of diamond composite coating and substrate is analyzed in terms of crackle, impression radius three.
Result of the test shows：After the nano diamond coating as made from contrast test 1 is tested by impression instrument, nanometer Buddha's warrior attendant
Stone coating directly comes off, and impression is clearly visible and indentation edge crackle has the gesture expanded, and impression radius reaches 150 μm；By contrasting
After nano diamond coating is tested by impression instrument made from experiment 2, nano diamond coating impression is clearly visible and impression side
Marginal slit line has the gesture expanded, and impression radius reaches 30 μm；And though the nano diamond coating as made from embodiment 1 has Indentation Damage
But impression unobvious and radius are less than 25 μm, impression periphery flawless imply that being remarkably decreased for intrinsic stress and thermal stress.By
This is visible, the transition zone comprising molybdenum coating and the Nano diamond of nano diamond coating double-layer structure that the present embodiment 1 provides
The preparation method of coating can significantly improve the combination force intensity of nano diamond coating and tungsten-cobalt alloy matrix.
Embodiment 2
The embodiment of the present invention 2 provides a kind of Nano diamond blade, and it is included tungsten-cobalt alloy matrix and carried using embodiment 1
The preparation method of the nano diamond coating of confession is deposited in metal molybdenum transition zone and nanometer on the tungsten-cobalt alloy matrix successively
Diamond coatings.
Contrast test 3
Contrast test 3 provides a kind of Nano diamond blade, and it includes tungsten-cobalt alloy matrix and using pair in embodiment 1
Method than testing 2 is deposited on the nano diamond coating on the tungsten-cobalt alloy matrix.
Verification experimental verification：With international standard ISO needle to utilizing the blade that diamond composite coating is carried made from the above method
Cutting test is carried out, wherein turning object is ZAlSi12Alloy material, turning speed are 200m/min, amount of feeding 24mm/
Min, turning depth are 0.5mm；Bandwidth VB values are worn after using at 1/2 cutting depth on knife face and are used as blunt standard, examination as 0.4mm
The life-span that test obtains the Nano diamond blade that the present embodiment 2 is provided is 400min, the nanometer Buddha's warrior attendant that contrast test 3 is provided
The life-span of stone blade is 380min.
Embodiment 3
The embodiment of the present invention 3 provides a kind of preparation method of nano diamond coating, the preparation method and above-described embodiment 1
The preparation method difference provided is：
In the precipitation transition layer process, the transition zone of precipitation is titanium layer；
In the ultrasonic cleaning step, the ultrasonic cleaning time is 40min, and 30min is dried at a temperature of 70 DEG C；Finally
The surface roughness of obtained nano diamond coating is 70nm, the Nano diamond particle in the nano diamond coating
Average grain diameter is 90nm.
In the deposition nano diamond coating step, concrete technology is：It is 13kPa in pressure, temperature is 850 DEG C of conditions
Under, using MPCVD method, with H2、CH4Handled for reacting gas source before the tungsten-cobalt alloy precipitates
Reacted on body 8 hours and form nano diamond coating, wherein, microwave power 7kW, CH4Gas volume is in overall reaction gas source
The 3% of volume.
Impression test is done to the nano diamond coating prepared by embodiment 3 using with the identical method of above-described embodiment 1,
Result of the test shows：Though the nano diamond coating as made from embodiment 3 has Indentation Damage but impression unobvious and radius are less than
25 μm, impression periphery flawless imply that being remarkably decreased for intrinsic stress and thermal stress.
Embodiment 4
The embodiment of the present invention 4 provides a kind of Nano diamond blade, and it is included tungsten-cobalt alloy matrix and carried using embodiment 3
The preparation method of the nano diamond coating of confession is sequentially deposited at titanium layer transition zone and nanogold on the tungsten-cobalt alloy matrix
Hard rock coating.
The Nano diamond blade prepared by embodiment 4 is cut using with the identical method of above-described embodiment 2
Test, result of the test show：The Nano diamond blade cut life-span that embodiment 4 provides is 450min.
Embodiment 5
The present embodiment 5 provides a kind of preparation method of nano diamond coating, the system that the preparation method provides with embodiment 3
Preparation Method difference is：
In precipitated transition layer process, the transition zone of precipitation is silicon nitride layer；
In the ultrasonic cleaning step, the ultrasonic cleaning time is 50min, and 10min is dried at a temperature of 130 DEG C；
In the deposition nano diamond coating step, the temperature of the chemical vapor deposition is 2500 DEG C, reaction gas
Body source is H2And CH4, the reaction time is 8 hours；The surface roughness of obtained nano diamond coating is 65nm, the nanometer
The average grain diameter of Nano diamond particle in diamond coatings is 50nm.
Impression test is done to the nano diamond coating prepared by embodiment 5 using method same as Example 1, as a result
Show：Though the nano diamond coating as made from embodiment 5 has Indentation Damage but impression unobvious and radius are less than 20 μm, impression
Periphery flawless imply that being remarkably decreased for intrinsic stress and thermal stress.
Embodiment 6
The embodiment of the present invention 6 provides a kind of Nano diamond blade, and it is included tungsten-cobalt alloy matrix and carried using embodiment 5
The preparation method of the nano diamond coating of confession is sequentially deposited at silicon nitride transition zone and nanometer on the tungsten-cobalt alloy matrix
Diamond coatings.
Cutting test is done to the nano diamond coating prepared by embodiment 6 using method same as Example 2, tested
As a result show：The Nano diamond blade life that embodiment 6 provides is 500min.
Finally it should be noted that：The above embodiments are merely illustrative of the technical scheme of the present invention and are not intended to be limiting thereof；To the greatest extent
The present invention is described in detail with reference to preferred embodiments for pipe, those of ordinary skills in the art should understand that：Still
The embodiment of the present invention can be modified or equivalent substitution is carried out to some technical characteristics；Without departing from this hair
The spirit of bright technical scheme, it all should cover among the claimed technical scheme scope of the present invention.
Claims (9)
1. a kind of preparation method of nano diamond coating, comprises the following steps：
Deposit transition zone：One layer of transition zone is deposited in cemented carbide substrate surfaces using physical vaporous deposition, acquisition contained
Cross the hard alloy substrate of layer；
It is cleaned by ultrasonic：The hard alloy substrate containing transition zone is placed in super nanodiamond suspension and carries out ultrasound clearly
20~50min is washed, hard alloy precipitation pre-treatment body is obtained after drying process；The preparation of the super nanodiamond suspension
Step specifically includes：The super Nano diamond particle that average grain diameter is 4~50nm is suspended in a solvent first, is configured to particle
Number concentration is 1017~1020/ g dense super nanodiamond suspension；Then dense super Nano diamond described in 2~5mL is taken to hang
Supernatant liquid is instilled in 10~50mL ultra-pure water, is stirred and is diluted so as to which the super nanodiamond suspension be made；Its
In, the ultra-pure water refers to that resistivity is more than 15M cm deionized water；
Deposit nano diamond coating：Using chemical vapour deposition technique, processing body surface face deposits one before the hard alloy precipitates
Layer nano-diamond layer, is made nano diamond coating.
2. the preparation method of nano diamond coating according to claim 1, it is characterised in that the thickness of the transition zone
For 3~5 μm, the deposited material of the transition zone includes one or more of materials in molybdenum, titanium, chromium, niobium, nickel, silicon nitride, aluminum oxide
The combination of material.
3. the preparation method of nano diamond coating according to claim 2, it is characterised in that the physical vapour deposition (PVD)
Method is magnetron sputtering method or arc ion plating.
4. the preparation method of nano diamond coating according to claim 3, it is characterised in that the chemical vapor deposition
Method is hot filament CVD or MPCVD method.
5. the preparation method of nano diamond coating according to claim 4, it is characterised in that
The concrete technology of the hot filament CVD is：It is 2kPa in pressure, temperature is 2300 DEG C~2500 DEG C conditions
Under, using hot filament CVD, with H2、CH4Reacted for reacting gas source before the hard alloy precipitates on processing body
Form nano diamond coating within 6~8 hours, wherein, CH4Gas volume in overall reaction gas volume source 1%~5%.
6. the preparation method of nano diamond coating according to claim 4, it is characterised in that
The concrete technology of the MPCVD method is：It is 13kPa in pressure, temperature is 700 DEG C~900
Under the conditions of DEG C, using MPCVD method, with H2、CH4Precipitated for reacting gas source in the hard alloy
Reacted on pre-treatment body 6~10 hours and form nano diamond coating, wherein, microwave power 7kW, CH4Gas volume is total
The 1%~5% of reacting gas volume source.
7. a kind of Nano diamond blade, including blade base and it is sequentially deposited at the transition zone on the blade base surface and receives
Rice diamond coatings, it is characterised in that the nano diamond coating is by nanometer according to any one of claims 1 to 6
Prepared by the preparation method of diamond coatings.
8. Nano diamond blade according to claim 7, it is characterised in that the nanometer in the nano diamond coating
The average grain diameter of diamond particles is 30~100nm.
9. the Nano diamond blade according to claim 7 or 8, it is characterised in that the table of the nano diamond coating
Surface roughness is 50~100nm.
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