CN105506574A - Preparation method of nano-diamond coating and nano-diamond blade - Google Patents
Preparation method of nano-diamond coating and nano-diamond blade Download PDFInfo
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- CN105506574A CN105506574A CN201510987674.XA CN201510987674A CN105506574A CN 105506574 A CN105506574 A CN 105506574A CN 201510987674 A CN201510987674 A CN 201510987674A CN 105506574 A CN105506574 A CN 105506574A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
- C23C16/0281—Deposition of sub-layers, e.g. to promote the adhesion of the main coating of metallic sub-layers
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/271—Diamond only using hot filaments
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/274—Diamond only using microwave discharges
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Abstract
The invention provides a preparation method of a nano-diamond coating. The preparation method comprises the following concrete steps of depositing a transition layer on the surface of a hard alloy matrix by using a physical vapor deposition method; then, carrying out ultrasonic cleaning by using an ultranano-diamond suspension liquid to obtain a hard alloy precipitate pretreatment body; and depositing a nano-diamond coating on the surface of the hard alloy precipitate pretreatment body by using a chemical vapor deposition method. The invention also provides a nano-diamond blade comprising a blade matrix, the transition layer and the nano-diamond coating, wherein the transition layer and the nano-diamond coating are sequentially deposited on the surface of the blade matrix by using the methods. The nano-diamond coating and the hard alloy matrix prepared by using the methods have a relatively high binding force so that the nano-diamond blade has relatively high machining precision and relatively long service life.
Description
Technical field
The invention belongs to technical field of superhard material, be specifically related to a kind of preparation method and Nano diamond blade of nano diamond coating.
Background technology
Along with the kind of superhard material gets more and more, the cutter that can be used as processing cutting industry also gets more and more.Diamond cutter is owing to having high hardness and thermal conductivity, and extremely low frictional coefficient and thermal expansivity, make it to have overwhelming superiority in work material industry, but along with processing industry is to the improve of requirement on machining accuracy, general diamond cutter is made to be difficult to meet present situation, desirable finishing tool is that requirement tool surface needs are extremely smooth, enables to improve working accuracy in work material process.
Nano diamond cutter, not only maintains the advantage of hardness that block diamond has and thermal conductivity, also has some characteristics of nano material concurrently as higher surface smoothness.Nano diamond is structurally main with SP
3certain reticulated structure that hybrid bond is formed by connecting, ensure that the precision in working angles, has lower surfaceness, lower frictional coefficient, be more suitable for precision work field compared to micron diamond coating.But owing to there is the Binder Phase of cobalt in hard alloy substrate, cobalt often promotes that graphite-phase grows, and then cause the bonding force precipitated between diamond coatings and hard alloy substrate to weaken, thus make the precision of existing diamond-coated tools good not, work-ing life is shorter.
In order to solve above Problems existing, people are seeking a kind of desirable technical solution always.
Summary of the invention
By Given this, the present invention is necessary provide a kind of preparation method of nano diamond coating and a kind of utilize above-mentioned preparation method's manufacture have that working accuracy is high, long service life and Nano diamond blade compact with hard alloy substrate, to solve the problem.
First technical scheme provided by the invention mainly by depositing the excessive layer of one deck in cemented carbide substrate surfaces, then at described transition layer surface recycling chemical vapor deposition one deck nano diamond coating, to improve the bonding force between described nano diamond coating and described hard alloy substrate.Particularly, the invention provides a kind of preparation method of nano diamond coating, comprise the following steps:
Deposition transition layer: adopt physical vaporous deposition to deposit one deck transition layer in cemented carbide substrate surfaces, obtain the hard alloy substrate containing transition layer;
Ultrasonic cleaning: the described hard alloy substrate containing transition layer is placed in super nanodiamond suspension and carries out ultrasonic cleaning 20 ~ 50min, obtains Wimet precipitation pre-treatment body after drying process;
Depositing nano diamond coatings: adopt chemical Vapor deposition process to deposit one deck nano diamond coating, obtained nano diamond coating in described Wimet precipitation pre-treatment surface.
Based on above-mentioned, the thickness of described transition layer is 3 ~ 5 μm, and the deposited material of described transition layer comprises the combination of one or more materials in molybdenum, titanium, chromium, niobium, nickel, silicon nitride, aluminum oxide.
Based on above-mentioned, described physical gas-phase deposite method is magnetron sputtering method or arc ion plating.
Based on above-mentioned, described chemical Vapor deposition process is hot filament CVD or MPCVD method.
Based on above-mentioned, the concrete technology of described hot filament CVD is: be 2kPa at pressure, and temperature is under 2300 DEG C ~ 2500 conditions, utilizes hot filament CVD, with H
2, CH
4for reacting gas source reaction on described tungsten cobalt alloy precipitation pre-treatment body forms nano diamond coating in 6 ~ 8 hours, wherein, CH
4gas volume is 1% ~ 5% of total reaction gas source volume.
Based on above-mentioned, the concrete technology of described MPCVD method is: be 13kPa at pressure, and temperature is under 700 DEG C ~ 900 DEG C conditions, utilizes MPCVD method, with H
2, CH
4for reacting gas source reaction on described tungsten cobalt alloy precipitation pre-treatment body forms nano diamond coating in 6 ~ 10 hours, wherein, microwave power is 7kW, CH
4gas volume is 1% ~ 5% of total reaction gas source volume.
Based on above-mentioned, the preparation process of described super nanodiamond suspension specifically comprises:
First be that the super Nano diamond particle of 4 ~ 50nm suspends in a solvent by median size, being mixed with numbers of particles concentration is 10
17~ 10
20the dense super nanodiamond suspension of/g; Then get in the ultrapure water of dense super nanodiamond suspension instillation 10 ~ 50mL described in 2 ~ 5mL, stir and carry out diluting thus obtain described super nanodiamond suspension; Wherein, described ultrapure water refers to that resistivity is greater than the deionized water of 15M cm.
The present invention also provides a kind of Nano diamond blade, and comprise blade base and be deposited on transition layer and the nano diamond coating on described blade base surface successively, described nano diamond coating is prepared by the preparation method of described nano diamond coating.
Preferably, the median size of the Nano diamond particle in described nano diamond coating is 30 ~ 100nm.
Preferably, the surfaceness of described nano diamond coating is 50 ~ 100nm.
Compared with prior art, the preparation method of nano diamond coating provided by the invention, at the transition layer that described cemented carbide substrate surfaces deposits, decreases cobalt composition in described hard alloy substrate to the growth effect of nano diamond coating; Super nanodiamond suspension is adopted to carry out supersound process to it, because the particle diameter of the diamond particles in described super nanodiamond suspension is smaller, with the described hard alloy substrate of transition layer after described super nanodiamond suspension ultrasonic cleaning, easily absorption can as the super Nano diamond particle of the small particle size of nano diamond coating nucleus described in subsequent deposition on its surface; Thus increase the nucleation amount of Nano diamond, be conducive to the deposition of nano diamond coating, and described transition layer together improves the bonding force between described nano diamond coating and described hard alloy substrate, thus add the precision of described Nano diamond blade, wear resistance and work-ing life.
Test proves: adopt digital display micro Vickers (VTD512) to do impression test to the nano diamond coating prepared by method provided by the invention, mode is departed from from diamond film, impression circumferential crack, impression radius three aspect analyze diamond film with the bonding force of substrate, though described nano diamond coating has Indentation Damage but impression is not obvious and radius is less than 30 μm, impression periphery flawless, imply that the remarkable decline of intrinsic stress and thermal stresses, therefore, the nano diamond coating prepared by method provided by the invention and hard alloy substrate have stronger bonding force.
In addition, specify, behind 1/2 depth of cut place, knife face weares and teares bandwidth VB as blunt standard, the blunt standard VB=0.4mm of inserted tool for WC-6%wt.Co with international standard ISO.Turning equipment: CK6136I digital controlled lathe, turning material: ZAlSi
12, turning speed V=200m/min, amount of feed f=24mm/min, turning degree of depth ap=0.5mm, under abrasion loss VB=0.4mm, the life-span of Nano diamond blade provided by the invention is 300 ~ 500min.
Embodiment
Below by embodiment, technical scheme of the present invention is described in further detail.
embodiment 1
The present embodiment provides a kind of preparation method of nano diamond coating, specifically comprises the following steps:
Precipitation transition layer: first tungsten cobalt alloy matrix is obtained clean tungsten cobalt alloy matrix after ultrapure water cleaning, drying; Then adopt arc ion plating at described clean tungsten cobalt alloy matrix surface deposition layer of metal molybdenum transition layer, obtain the tungsten cobalt alloy matrix of surface with molybdenum coating.
Ultrasonic cleaning: be first that the super Nano diamond particle of 4 ~ 50nm suspends in a solvent by particle diameter, preparation numbers of particles concentration is 6 × 10
18the dense super nanodiamond suspension of/g; Then get in the ultrapure water of dense super nanodiamond suspension instillation 50mL described in 2mL, stir and carry out diluting thus obtain described rice diamond suspension; Then described surface is placed in described super nanodiamond suspension with the tungsten cobalt alloy matrix of molybdenum coating and carries out ultrasonic cleaning 20min, then dry 20min at the temperature of 200 DEG C, obtain tungsten cobalt alloy precipitation pre-treatment body.Wherein, described dense super nanodiamond suspension pH value is at normal temperatures 4.5, and described ultrapure water refers to that resistivity is greater than the deionized water of 15M CM.
Depositing nano diamond coatings: be 2kPa at pressure, temperature is under 2300 DEG C of conditions, utilizes hot filament CVD, with H
2, CH
4for reacting gas source reaction on described tungsten cobalt alloy precipitation pre-treatment body forms nano diamond coating in 6 hours.Wherein, CH
4gas volume is 1.5% of total reaction gas source volume, and the surfaceness of obtained described nano diamond coating is 80nm, and the median size of the Nano diamond particle in described nano diamond coating is 100nm.
Simultaneous test 1
Simultaneous test 1 provides a kind of preparation method of nano diamond coating, this preparation method is substantially identical with the preparation method that embodiment 1 provides, difference is: simultaneous test 1 does not comprise the step of above-mentioned ultrasonic cleaning, described tungsten cobalt alloy matrix, after the step through above-mentioned deposition transition layer, directly enters the step of described depositing nano diamond coatings.
Simultaneous test 2
Simultaneous test 2 provides a kind of preparation method of nano diamond coating, this preparation method is substantially identical with the preparation method that embodiment 1 provides, difference is: simultaneous test 2 does not comprise above-mentioned deposition transition layer process, tungsten cobalt alloy matrix, after ultrapure water cleaning, directly enters the step of above-mentioned ultrasonic cleaning and depositing nano diamond coatings.
Test proves: adopt digital display micro Vickers (VTD512) to do impression test to the nano diamond coating being attached to tungsten cobalt alloy matrix surface prepared by the method utilizing the present embodiment to provide, from the bonding force that diamond film departs from mode, diamond composite coating and substrate are analyzed in impression circumferential crack, impression radius three aspect.
Test-results shows: the nano diamond coating obtained by simultaneous test 1 is by after the test of impression instrument, and nano diamond coating directly comes off, and impression is obviously visible and indentation edge crackle has the gesture expanded, and impression radius reaches 150 μm; The nano diamond coating obtained by simultaneous test 2 is by after the test of impression instrument, and nano diamond coating impression is obviously visible and indentation edge crackle has the gesture expanded, and impression radius reaches 30 μm; Though and the nano diamond coating obtained by embodiment 1 has Indentation Damage but impression is not obvious and radius is less than 25 μm, impression periphery flawless imply that the remarkable decline of intrinsic stress and thermal stresses.As can be seen here, the preparation method of the transition layer comprising molybdenum coating that the present embodiment 1 provides and the nano diamond coating of nano diamond coating double-layer structure can significantly improve the bonding force intensity of nano diamond coating and tungsten cobalt alloy matrix.
Embodiment 2
The embodiment of the present invention 2 provides a kind of Nano diamond blade, and it comprises tungsten cobalt alloy matrix and preparation method of nano diamond coating of adopting embodiment 1 to provide and is deposited in metal molybdenum transition layer on described tungsten cobalt alloy matrix and nano diamond coating successively.
Simultaneous test 3
Simultaneous test 3 provides a kind of Nano diamond blade, and the method for it simultaneous test 2 comprised in tungsten cobalt alloy matrix and employing embodiment 1 is deposited on the nano diamond coating on described tungsten cobalt alloy matrix.
Verification experimental verification: carry out cutting test for the blade with diamond composite coating utilizing aforesaid method to obtain with international standard ISO, wherein turning object is ZAlSi
12alloy material, turning speed is 200m/min, and the amount of feed is 24mm/min, and the turning degree of depth is 0.5mm; Behind 1/2 depth of cut place, knife face weares and teares bandwidth VB value for 0.4mm is as blunt standard, the life-span that test records the Nano diamond blade that the present embodiment 2 provides is 400min, and the life-span of the Nano diamond blade that simultaneous test 3 provides is 380min.
Embodiment 3
The embodiment of the present invention 3 provides a kind of preparation method of nano diamond coating, and preparation method's difference that this preparation method and above-described embodiment 1 provide is:
In described precipitation transition layer process, the transition layer of precipitation is titanium layer;
In described ultrasonic cleaning step, the ultrasonic cleaning time is 40min, and at the temperature of 70 DEG C dry 30min; The surfaceness of the nano diamond coating finally obtained is 70nm, and the median size of the Nano diamond particle in described nano diamond coating is 90nm.
In described depositing nano diamond coatings step, concrete technology is: be 13kPa at pressure, and temperature is under 850 DEG C of conditions, utilizes MPCVD method, with H
2, CH
4for reacting gas source reaction on described tungsten cobalt alloy precipitation pre-treatment body forms nano diamond coating in 8 hours, wherein, microwave power is 7kW, CH
4gas volume is 3% of total reaction gas source volume.
The method identical with above-described embodiment 1 is adopted to do impression test to the nano diamond coating prepared by embodiment 3, test-results shows: though the nano diamond coating obtained by embodiment 3 has Indentation Damage impression not obvious and radius is less than 25 μm, impression periphery flawless imply that the remarkable decline of intrinsic stress and thermal stresses.
Embodiment 4
The embodiment of the present invention 4 provides a kind of Nano diamond blade, and it comprises tungsten cobalt alloy matrix and preparation method of nano diamond coating of adopting embodiment 3 to provide and is deposited on titanium layer transition layer on described tungsten cobalt alloy matrix and nano diamond coating successively.
Adopt the method identical with above-described embodiment 2 to do cutting test to the described Nano diamond blade prepared by embodiment 4, test-results shows: the Nano diamond blade cut life-span that embodiment 4 provides is 450min.
Embodiment 5
The present embodiment 5 provides a kind of preparation method of nano diamond coating, and preparation method's difference that this preparation method and embodiment 3 provide is:
In precipitated transition layer process, the described transition layer of precipitation is silicon nitride layer;
In described ultrasonic cleaning step, the ultrasonic cleaning time is 50min, and at the temperature of 130 DEG C dry 10min;
In described depositing nano diamond coatings step, the temperature of described chemical vapour deposition is 2500 DEG C, and reacting gas source is H
2and CH
4, the reaction times is 8 hours; The surfaceness of the nano diamond coating obtained is 65nm, and the median size of the Nano diamond particle in described nano diamond coating is 50nm.
The method identical with embodiment 1 is adopted to do impression test to the nano diamond coating prepared by embodiment 5, result shows: though the nano diamond coating obtained by embodiment 5 has Indentation Damage impression not obvious and radius is less than 20 μm, impression periphery flawless imply that the remarkable decline of intrinsic stress and thermal stresses.
Embodiment 6
The embodiment of the present invention 6 provides a kind of Nano diamond blade, and it comprises tungsten cobalt alloy matrix and preparation method of nano diamond coating of adopting embodiment 5 to provide and is deposited on silicon nitride transition layer on described tungsten cobalt alloy matrix and nano diamond coating successively.
Adopt the method identical with embodiment 2 to do cutting test to the nano diamond coating prepared by embodiment 6, test-results shows: the Nano diamond blade life that embodiment 6 provides is 500min.
Finally should be noted that: above embodiment is only in order to illustrate that technical scheme of the present invention is not intended to limit; Although with reference to preferred embodiment to invention has been detailed description, those of ordinary skill in the field are to be understood that: still can modify to the specific embodiment of the present invention or carry out equivalent replacement to portion of techniques feature; And not departing from the spirit of technical solution of the present invention, it all should be encompassed in the middle of the technical scheme scope of request of the present invention protection.
Claims (10)
1. a preparation method for nano diamond coating, comprises the following steps:
Deposition transition layer: adopt physical vaporous deposition to deposit one deck transition layer in cemented carbide substrate surfaces, obtain the hard alloy substrate containing transition layer;
Ultrasonic cleaning: the described hard alloy substrate containing transition layer is placed in super nanodiamond suspension and carries out ultrasonic cleaning 20 ~ 50min, obtains Wimet precipitation pre-treatment body after drying process;
Depositing nano diamond coatings: adopt chemical Vapor deposition process to deposit one deck Nano diamond layer, obtained nano diamond coating in described Wimet precipitation pre-treatment surface.
2. the preparation method of nano diamond coating according to claim 1, it is characterized in that, the thickness of described transition layer is 3 ~ 5 μm, and the deposited material of described transition layer comprises the combination of one or more materials in molybdenum, titanium, chromium, niobium, nickel, silicon nitride, aluminum oxide.
3. the preparation method of nano diamond coating according to claim 2, is characterized in that, described physical gas-phase deposite method is magnetron sputtering method or arc ion plating.
4. the preparation method of nano diamond coating according to claim 3, is characterized in that, described chemical Vapor deposition process is hot filament CVD or MPCVD method.
5. the preparation method of nano diamond coating according to claim 4, is characterized in that,
The concrete technology of described hot filament CVD is: be 2kPa at pressure, and temperature is under 2300 DEG C ~ 2500 conditions, utilizes hot filament CVD, with H
2, CH
4for reacting gas source reaction on described tungsten cobalt alloy precipitation pre-treatment body forms nano diamond coating in 6 ~ 8 hours, wherein, CH
4gas volume is 1% ~ 5% of total reaction gas source volume.
6. the preparation method of nano diamond coating according to claim 4, is characterized in that,
The concrete technology of described MPCVD method is: be 13kPa at pressure, and temperature is under 700 DEG C ~ 900 DEG C conditions, utilizes MPCVD method, with H
2, CH
4for reacting gas source reaction on described tungsten cobalt alloy precipitation pre-treatment body forms nano diamond coating in 6 ~ 10 hours, wherein, microwave power is 7kW, CH
4gas volume is 1% ~ 5% of total reaction gas source volume.
7. the preparation method of nano diamond coating according to claim 1, is characterized in that, the preparation process of described super nanodiamond suspension specifically comprises:
First be that the super Nano diamond particle of 4 ~ 50nm suspends in a solvent by median size, being mixed with numbers of particles concentration is 10
17~ 10
20the dense super nanodiamond suspension of/g; Then get in the ultrapure water of dense super nanodiamond suspension instillation 10 ~ 50mL described in 2 ~ 5mL, stir and carry out diluting thus obtain described super nanodiamond suspension; Wherein, described ultrapure water refers to that resistivity is greater than the deionized water of 15M cm.
8. a Nano diamond blade, comprise blade base and be deposited on transition layer and the nano diamond coating on described blade base surface successively, it is characterized in that, described nano diamond coating is prepared by the preparation method of nano diamond coating according to any one of claim 1 ~ 7.
9. Nano diamond blade according to claim 8, is characterized in that, the median size of the Nano diamond particle in described nano diamond coating is 30 ~ 100nm.
10. Nano diamond blade according to claim 8 or claim 9, it is characterized in that, the surfaceness of described nano diamond coating is 50 ~ 100nm.
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| CN111041448A (en) * | 2020-01-07 | 2020-04-21 | 汇专科技集团股份有限公司 | Method for preparing diamond coating on surface of cobalt-containing hard alloy and tool and die with diamond coating |
| CN111074232A (en) * | 2019-12-30 | 2020-04-28 | 富耐克超硬材料股份有限公司 | Preparation method of woodworking tool |
| CN112980231A (en) * | 2021-03-05 | 2021-06-18 | 物生生物科技(北京)有限公司 | Surface modification method of nano hard particles with antibacterial performance |
| CN114507858A (en) * | 2019-07-23 | 2022-05-17 | 北京科技大学 | Preparation method of long-life ultra-nano diamond periodic multilayer coating cutter |
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