CN108405355A - Testing, sorting machine test pallet transfer device and test pallet method for transporting - Google Patents
Testing, sorting machine test pallet transfer device and test pallet method for transporting Download PDFInfo
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- CN108405355A CN108405355A CN201711374229.1A CN201711374229A CN108405355A CN 108405355 A CN108405355 A CN 108405355A CN 201711374229 A CN201711374229 A CN 201711374229A CN 108405355 A CN108405355 A CN 108405355A
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- test pallet
- mentioned
- transfer
- screw pitch
- pallet
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/02—Measures preceding sorting, e.g. arranging articles in a stream orientating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
- G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Environmental & Geological Engineering (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The present invention relates to the testing, sorting machine test pallet transfer devices and test pallet method for transporting of the test for supporting semiconductor devices.The testing, sorting machine test pallet transfer device of the present invention has the guiding device for guiding the forward or backward for making the parallel transfer transfer shaft of test pallet.According to the present invention, advance or the advance and retreat of transfer shaft are guided by guiding device, the size without multiplying arrangement also can rapid mobile test pallet.
Description
Technical field
The present invention relates to the testing, sorting machines of the test pallet for transferring the inside for being contained in chamber to be moved with test pallet
Send device.
Background technology
The multiple semiconductor devices produced are divided into non-defective unit and defective products and only non-defective unit go out after the test of tester
Goods.
Tester is realized with being electrically connected for semiconductor devices by testing, sorting machine.
Testing, sorting machine makes semiconductor devices be electrically connected with tester, to make partly to lead by what defined manufacturing process manufactured
Body device can be tested by tester, and according to test result, multiple semiconductor devices are classified according to grade to be loaded into visitor
Family pallet.
In general, the semiconductor devices of the state production to terminate packaging operation is to be loaded into the state of client's pallet to test
Sorting machine supplies.To testing, sorting machine supply semiconductor devices to positioned at the test pallet of loading position load after, with load
In the state of test pallet by soaking chamber (soak chamber), test chamber and hot chamber is removed from loading position
(desoak chamber) is moved to unloading position.When test pallet is located in test chamber, using tester to semiconductor
Device is tested, and when test pallet is located at unloading position, semiconductor devices is unloaded from test pallet.
It is well known that soaking chamber applies hot pressure to the multiple semiconductor devices for being loaded into accommodated test pallet
(high temperature or low temperature), multiple semiconductor devices to be heated or cooled with test temperature condition, except hot chamber will be loaded into
Multiple semiconductor devices of the test pallet accommodated restore the temperature by near ambient temperature.
In most cases, soaking chamber and except hot chamber successively simultaneously accommodate multiple test pallets, therefore multiple tests
Pallet together step every time 1 screw pitch of parallel transfer (Pitch).For this purpose, testing, sorting machine has transfer device, for equal
Hot chamber with except hot chamber with making test pallet step parallel transfer 1 screw pitch every time.This transfer device is disclosed in South Korea's public affairs
Open patent the 10-2011-0114281st etc..
Fig. 1 is in soaking chamber and except hot chamber transfers the testing, sorting machine test pallet transfer device of test pallet
The concept map of 100 (hreinafter referred to as " transfer devices ").Referring to Fig.1, transfer device 100 (is actually set including transfer shaft 110
Be equipped with multiple), circulator (not shown, to be actually provided with multiple), advance and retreat device 140 and maintainer (it is not shown, actually set
It is equipped with a pair).
Transfer shaft 110 has the multiple holding protrusions for test pallet TT being held or being released according to rotation status holding
GP.Test pallet TT can be inserted into the holding slot GS formed by multiple holding proj ections GPs to be held by transfer shaft 110.Wherein,
Spacing between adjacent multiple holding slot GS can be defined as test pallet TT and be moved according to the once-through operation of transfer device 100
1 screw pitch of dynamic spacing.The front end of this transfer shaft 110 has the following structure, and is situated between in a manner of the displacement distance with 1 screw pitch
Enter to have steel ball bushing BB, the wall CW with cavity C H in a manner of it can move forward or back and rotate is combined.
Circulator makes transfer shaft 110 rotate, come make multiple holding proj ections GPs be in hold test pallet TT states or
In the state for releasing holding.
Advance and retreat device 140 makes transfer shaft 110 alongst move forward or back 1 screw pitch.
Transfer shaft 110 holds test pallet TT to transfer test pallet TT, then maintainer releases test pallet TT's
It holds, when test pallet TT maintains halted state, maintainer holds test pallet TT.
According to the prior art as described above, test pallet TT with the state that is held by transfer shaft 110 advance after 1 screw pitch by
Maintainer is held, and then, the state rotation that holding test pallet TT is released with transfer shaft 110 retreats the operation weight of 1 screw pitch later
It is multiple to carry out, the transfer step of test pallet TT 1 screw pitch is moved every time.
However, according to the prior art, multiple screw pitch occur between previous test pallet TT and the latter test pallet TT
Spacing in the case of, there is a problem of that the circulation rate of test pallet TT is slack-off.In this regard, being described in detail with reference to Fig. 2.
In Fig. 2, No. 1 test pallet TT1 terminates to wait for into test chamber movement by the transfer of transfer device 100, and 2
Just by the transfer of transfer device 100, No. 3 test pallet TT3 have just been contained in soaking chamber and have waited for and borrowing by number test pallet TT2
It helps in the transfer of transfer device 100.Wherein, the spacing of 4 screw pitch occurs between No. 1 test pallet TT1 and No. 2 test pallet TT2,
The spacing of 6 screw pitch occurs between No. 2 test pallet TT2 and No. 3 test pallet TT3.
In the state of as shown in Figure 2, if No. 1 test pallet TT1 is moved to test chamber, No. 2 test pallet TT2 will
The step of 1 screw pitch of transfer is repeated four times the position for getting to No. 1 test pallet TT1 every time.Also, No. 3 test pallet TT3
Maintenance in the state of from spacing that can only be to maintain 6 screw pitch with No. 2 test pallet TT2 to No. 1 test pallet TT1 is transferred.That is,
In the state of as shown in Figure 2, No. 1 test pallet TT1 is not transferred to other positions (for example, test chamber), can not to cavity C H
Test pallet TT is entered back into, the extra stand-by period thus can occur.When therefore, because of the slow mobile and waiting of 1 screw pitch every time
Between, and the loopy moving of test pallet TT1 is slack-off, and the problem of processing capacity of testing, sorting machine declines occurs.
On the other hand, in the structure of such as prior art, when transfer device 110 carries out one-off, to make test hold in the palm
Disk TT moves 2 screw pitch or more, then since the front end of transfer shaft 110 can not need to put along front-rear direction beyond the wall CW of chamber
The space of big chamber interior.However, the space inside amplifying chamber causes equipment (testing, sorting machine) to become larger, also result in for pair
Semiconductor devices applies the energy loss of hot pressure.
Invention content
Technical problems to be solved
The first object of the present invention is to provide following technology, do not make soaking chamber or except hot chamber inner space along
Front-rear direction amplifies, and also can be selectively advanced or retreat 1 screw pitch or the screw pitch more than 1 screw pitch in one-off, fast to be formed
The stream flow of speed.
The second object of the present invention is to provide following technology, in soaking chamber or except can make previous survey in hot chamber
The spacing tried between pallet and the latter test pallet maintains 1 screw pitch.
The technical solution solved the problems, such as
The present invention testing, sorting machine test pallet transfer device include：Multiple transfer shafts, alongst have
Multiple holding protrusions can hold test pallet or be released holding, to hold the state transfer test support of test pallet
Disk；At least one circulator to make above-mentioned multiple transfer shafts to be carried out to test pallet by making above-mentioned multiple transfer shafts rotate
It holds or releases and hold；Advance and retreat device makes above-mentioned multiple transfer shafts move forward or back required screw pitch；Guiding device, when above-mentioned transfer
When axis is moved forward or back by above-mentioned advance and retreat device, the forward or backward of above-mentioned transfer shaft is guided；And maintainer, test can be held in the palm
Disk is held or is released holding, when test pallet is transferred by above-mentioned transfer shaft, is released and is held to test pallet, work as survey
When trying pallet maintenance halted state, test pallet is held.
The front end of above-mentioned transfer shaft is located at the state that the wall of the chamber with receiving test pallet separates in above-mentioned chamber
Portion, by moving forward or back come the wall closer or far from above-mentioned chamber.
The front end of above-mentioned transfer shaft is combined with above-mentioned guiding device side in a rotatable way.
The invention also includes board, rear end of the above-mentioned board in a rotatable way with above-mentioned multiple transfer shafts is mutually tied
It closes, to make above-mentioned multiple transfer shafts be moved forward or back together by above-mentioned advance and retreat device, above-mentioned advance and retreat device is by making above-mentioned board
It moves forward or back, to make above-mentioned multiple transfer shafts move forward or back, above-mentioned guiding device is with opposite with above-mentioned multiple transfer shafts respectively
The mode answered is provided with multiple so that the front end of above-mentioned transfer shaft is supported by above-mentioned guiding device, on the rear end of above-mentioned transfer shaft
State board support.
Above-mentioned guiding device includes：Backward member is combined in a manner of above-mentioned transfer shaft can be made to rotate with above-mentioned transfer shaft,
It is moved forward or back together with above-mentioned transfer shaft by the startup of above-mentioned advance and retreat device；And guide member, for guide it is above-mentioned into
Move back the forward or backward of component.
When by being defined as 1 screw pitch based on above-mentioned multiple spacing held between adjacent multiple holding slots that protrusion is formed,
The length of guide sections part, which reaches, may make the backward member moved forward or back together with above-mentioned transfer shaft to be selectively advanced
Or retreat the length of 1 screw pitch or the screw pitch more than 1 screw pitch.
In test pallet method for transporting in the testing, sorting machine of the present invention, when previous test pallet and the latter are tested
When pallet is spaced from each other 2 screw pitch or more, previous test pallet is made to be moved in a manner of adjacent with the latter test pallet, to make
Previous test pallet makes previous test pallet later with the latter test pallet in the state for being spaced from each other 1 screw pitch
It is spaced from each other in the state of 1 screw pitch with the latter test pallet and transfers together.Wherein, when make previous test pallet with it is latter
When the adjacent mode of a test pallet moves, make its selectively moved 1 screw pitch or the screw pitch more than 1 screw pitch, it is previous to make
Test pallet is adjacent with the spacing of 1 screw pitch with the latter test pallet.
Advantageous effect of the invention
According to the present invention, the not size of multiplying arrangement also can be in soaking chamber or except making multiple test pallets in hot chamber
Multiple screw pitch are moved every time, and multiple test pallets can be made to be moved with mutually adjacent state, prevent the extra stand-by period,
Thus test pallet can be made to carry out more rapid loopy moving, to improve the processing capacity of testing, sorting machine.In particular, quick
Test and the lower processing capacity that can greatly improve testing, sorting machine of room temperature test.
Also, according to the present invention, previous test pallet and the latter test pallet can be made with mutually adjacent in chamber
State movement, therefore place greater number of test pallet in chamber, thus can be sufficiently ensured and semiconductor devices is applied
Hot stimulation or the time for removing hot stimulation, to improve the reliability of test.
Description of the drawings
Fig. 1 is the concept map of the testing, sorting machine test pallet transfer device of the prior art.
The reference chart for the problem of Fig. 2 is the transfer device for definition graph 1.
Fig. 3 is that testing, sorting machine test pallet transfer device the conceptual of testing, sorting machine applicatory of the present invention is bowed
View.
Fig. 4 and Fig. 5 is that the testing, sorting machine of the one embodiment of the invention observed from different perspectives is transferred with test pallet
The brief perspective views of device.
Fig. 6 is that the transfer shaft for being applicable in the transfer device of definition graph 4 holds test pallet or release holding
Operation reference chart.
The side view for the guiding device being applicable in the transfer device that Fig. 7 is Fig. 4.
Fig. 8 is the reference chart of the transfer of the test pallet for illustrating the transfer device by Fig. 4.
Fig. 9 is the reference chart for assuming to occur the state such as the problem of Fig. 2.
Figure 10 and Figure 11 is the reference chart for illustrating the solution such as the problem of Fig. 9.
The explanation of reference numeral
400：Testing, sorting machine test pallet transfer device
411 to 414：Transfer shaft
GP：Hold protrusion
GS：Holding slot
220：Board
431 to 433：Circulator
440：Advance and retreat device
451 to 453：Guiding device
451a, 453a：Backward member
451b, 453b：Guide member
461,462：Maintainer
Specific implementation mode
Preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings, in order to illustrate it is brevity, for repeat or
The explanation of substantially the same structure is omitted or is compressed as far as possible.
For the brief description of testing, sorting machine
Fig. 3, which is the testing, sorting machine test pallet transfer device (hreinafter referred to as " transfer device ") of the present invention, to fit
The conceptual top view of testing, sorting machine TH.
Testing, sorting machine TH includes loading device LA, soaking chamber SC, the first transfer device TF1, test chamber TC, removes heat
Chamber DC, the second transfer device TF2 and discharge mechanism UA.
The need for being loaded into client's pallet CT1 multiple semiconductor devices to be tested are loaded onto positioned at load by loading device LA
The test pallet TT of position LP.
Soaking chamber SC is used to apply to the multiple semiconductor devices for being loaded into the test pallet TT from loading position LP
Hot stimulation.
First transfer device TF1 is along the loopy moving direction of test pallet TT, the transfer test support in soaking chamber SC
Disk TT.
Test chamber TC, which is provided, to utilize tester (TESTER) to being loaded into the test pallet TT by soaking chamber SC
The space tested of multiple semiconductor devices.
Except hot chamber DC is hot for being removed to the semiconductor devices for being loaded into the test pallet TT from test chamber TC
Stimulation.
Second transfer device TF2 is along the loopy moving direction of test pallet TT, the transfer test support in except hot chamber DC
Disk TT.
Discharge mechanism UA from the test pallet TT for entering unloading position UP unloads multiple semiconductor devices and to empty client
Pallet CT2 movements.
Certainly, test pallet TT is filled by multiple transfers including the first transfer device TF1 and the second transfer device TF2
It sets, along by loading position LP, the inside of soaking chamber SC, test position TP, the inside of hot chamber DC and unloading position
UP and unloading position UP and the closed circulating path C movements for reconnecting to loading position LP.
In the testing, sorting machine TH of example according to fig. 3, test pallet TT loading position LP and unloading position UP and from
Unloading position UP is connected to the section maintenance level state of loading position LP, however in the inside from soaking chamber SC to except hot chamber
The transfer section of the inside of room DC maintains plumbness.That is, the testing, sorting machine TH of example according to fig. 3 is to hang down in test pallet TT
The rectilinear testing, sorting machine of semiconductor devices and tester electrical connection in the state of straight.
In multiple structures of the above testing, sorting machine TH, the first transfer device TF1 and the second transfer device TF2 can be used as this
The transfer device of invention.
For the explanation of transfer device
Fig. 4 and Fig. 5 is that the testing, sorting machine of the one embodiment of the invention observed from different perspectives is transferred with test pallet
The brief perspective views of device 400.
Transfer device 400 includes four transfer shafts 411 to 414, board 420, three circulators 431 to 433, advance and retreat devices
440, four guiding devices 451 to 454 and a pair of of maintainer 461,462.
Four transfer shafts 411 to 414 are used to transfer test pallet TT in the state of holding test pallet TT, substantially distinguish
The position of holding can be held or be released to the quadrangle adjacent edges of test pallet TT by being set to.
Transfer shaft 411 to 414 along front-rear direction have 10 holding proj ections GPs, come to test pallet TT carry out hold or
It releases and holds.Because of this multiple holding proj ections GPs, holding slot GS is formed between adjacent holding proj ections GP and holding proj ections GP
(referring to the amplifier section A of Fig. 4).Also, according to the rotation status of transfer shaft 411 to 414, as shown in part (a) of Fig. 6, survey
The quadrangle adjacent edges for trying pallet TT are inserted into holding slot GS, or as shown in part (b) of Fig. 6, the quadrangle of test pallet TT
Edge attachments are detached from from holding slot GS, to be in the shape that 411 to 414 couples of test pallet TT of transfer shaft were held or released holding
State.For this purpose, transfer shaft 411 to 414 is arranged in a rotatable way.
Also, the transfer shaft 411 to 414 of the present embodiment in order to transfer test pallet TT and rotatability move forward or back
1 screw pitch (spacing mutually between adjacent holding slot and holding slot) is to spacing needed for 3 screw pitch.
In example described above, hold proj ections GP quantity, by transfer shaft 411 to 414 test pallet TT holding
Maximum spacing that position, transfer shaft 411 to 414 can move forward or back etc. can be according to the scale of testing, sorting machine TH, needs or visitor
The requirement at family and arbitrarily change.Also, it is examined if it can suitably hold test pallet TT on transfer shaft 411 to 414 also structure
Consider setting three or four or more.
On the other hand, the front end FE of transfer shaft 411 to 414 is mutually tied with 451 to 454 side of guiding device in a rotatable way
It closes, the rear end of transfer shaft 411 to 414 is combined with board 420 in a rotatable way through the rear wall of chamber.
Board 420 is combined with the rear end of four transfer shafts 411 to 414 in a rotatable way, makes four transfer shafts
411 to 414 move forward or back together by note advance and retreat device 440.Therefore, the rear end of transfer shaft 411 to 414 can be by board 420
It is supported.
Three circulators 431 to 433 are for making four transfer shafts 411 to 414 be rotated with preset rotation angle.Wherein,
The circulator of reference numeral 431 and 433 respectively rotates every time a transfer shaft 411/414, however the rotation of reference numeral 432
Device intervention, which has, transmits element TE and can make two transfer shafts 412,413 while rotate.According to the behaviour of this circulator 431 to 433
Make, as shown in figure 5, transfer shaft 411 to 414 rotates test pallet TT to be held or released handle with preset rotation angle
It holds.As reference, multiple circulators 431 to 433 in the present embodiment are set as cylinder, however can be set according to embodiment
It is set to rotation motor or linear motor.
Advance and retreat device 440 makes board 420 move forward or back to make transfer shaft 411 to 414 advance or retreat, and finally makes by moving
The test pallet TT that axis 411 to 414 is held is sent to move forward or back.This advance and retreat device 440 can make transfer shaft by once-through operation
411 to 414 move forward or back 1 screw pitch, the spacing of 2 screw pitch or the selectivity in 3 screw pitch.Therefore, it is preferable to use can for advance and retreat device 440
The servo motor (servo-motor) of displacement distance is controlled, however it is also possible to consider use variable cylinder as needed.As reference,
The variable cylinder said herein is Multi-stage cylinder or double-acting type (double acting) Multi-stage cylinder, is required can move forward or back
Screw pitch the driving cylinder that drives of mode.
Four guiding devices 451 to 454 be used to guide 1 screw pitch to 3 screw pitch spacing of transfer shaft 411 to 414 advance or after
It moves back, and supports the front end FE of transfer shaft 411 to 414.Wherein, the guiding device of the guiding device of reference numeral 451 and reference numeral 454
Shape it is mutually similar, the guiding device and the shape of the guiding device of reference numeral 453 of reference numeral 452 are mutually similar, thus join
Fig. 7 of the guiding device of guiding device and reference numeral 453 according to interception reference numeral 451 is illustrated.
Guiding device 451,453 includes backward member 451a, 453a and guide member 451b, 453b.
Operation of backward member 451a, 453a based on advance and retreat device 440 and moved forward or back together with transfer shaft 411,413,
It is combined in a rotatable way with transfer shaft 411,413.This backward member 451a, 453a is contemplated that and the multiple utensils in periphery
Relationship between object is set as variform.
Guide member 451b, 453b are set to each guiding device 451,452 in a pair wise manner, in order to guide backward member
The forward or backward of 451a, 453a, with the rod-shaped setting parallel with transfer shaft 411,413.This guide member 451b, 453b's
Length, which reaches, can make transfer shaft 411,413 rotationally move forward or back 1 screw pitch either more than 2 screw pitch of 1 screw pitch or maximum 3
The length of screw pitch.That is, the length of guide member 451b, 453b, which are at least the maximum of transfer shaft 411,413, moves forward or back distance
(being 3 screw pitch in this example).
A pair of of maintainer 461,462 is used to hold test pallet TT when test pallet TT maintains halted state.That is, test
When pallet TT is transferred in the state of being held by transfer shaft 411 to 414, maintainer 461,462 will be in and release to test pallet TT
The state of holding, transfer shaft 411 to 414 are released to needing test pallet TT to maintain to stop in the state of the holding of test pallet TT
When state, maintainer 461,462 will be in the state held to test pallet TT.
It is confirmed with reference to Fig. 7, under transfer shaft 411,413 forward travel state, the front end FE of transfer shaft 411,413 is also from chamber
The wall CW of room CH is separated.
Maintainer 461,462 can be held or be released holding to the top and bottom of test pallet TT, have grip plate
461a, 462a and driving source 461b, 462b.
Grip plate 461a, 462a may be configured as various shapes, most simply, may be configured as having multiple holding slit CS's
Shape (with reference to the amplifier section B of Fig. 4).
Driving source 461b, 462b may be configured as cylinder or motor, make grip plate 461a, 462a lifting come make grip plate 461a,
462a is held or is released holding to test pallet TT.Certainly, according to embodiment, it is contemplated that with the multiple utensil objects in periphery it
Between relationship be not provided in a pair of of maintainer 461,462 maintainer 461 of upside.In this case, the shifting of test pallet TT
When action, when 461,462 couples of test pallet TT of maintainer release holding or hold, test pallet TT can occur the more
Few vertically moves.
Continue to transfer device 400 with structure as described above, by taking the transfer in the inside soaking chamber SC as an example into
Row explanation.
As shown in figure 8, test pallet TT is contained in the inside of soaking chamber and is laminated in the state of moving track MR, no
In the case of the latter test pallet TT, transfer device 400 makes test pallet TT mobile 3 screw pitch every time, will test support
Disk TT is transferred to holding fix SP.Certainly, in holding fix SP, before test pallet TT is transferred to test chamber, with by transferring
The state that track TR is held waits for.
On the other hand, as shown in figure 9, No. 1 test pallet TT1 is located at holding fix SP, No. 3 test pallet TT3, which are located at, to be moved
Dynamic rail road MR, then as shown in Figure 10, transfer device 400 make 2 between No. 1 test pallet TT1 and No. 3 test pallet TT3
After number test pallet TT2 and No. 3 test pallet TT3 is adjacent to 1 screw pitch spacing, make No. 2 test pallet TT2 and No. 3 test pallets
TT3 is to separate one in the same direction No. 1 sides test pallet TT1 (holding fix side) transfer of state of 1 screw pitch.That is, according to the present invention, it is previous
When being spaced apart 2 screw pitch or more of No. 3 test pallet TT3 of a No. 2 test pallet TT2 and the latter, makes No. 2 test pallet TT2 and 3
Number test pallet TT3 with the state for separating 1 screw pitch it is adjacent after, so that No. 2 test pallet TT2 and No. 3 test pallet TT3 is carried out together
Parallel transfer.By this method, chamber can not only accommodate one or two test pallet TT simultaneously, and can accommodate more multiple
Several test pallet TT applies the time of hot stimulation to semiconductor devices or is gone from semiconductor devices so as to substantially ensure
Except the time of hot stimulation.Also, it fits in this way, No. 1 test pallet TT1 assumed in Fig. 8 and No. 2 surveys also may not be present
Try the possibility that the spacing between pallet TT2 occurs.In particular, the method by being connected to Figure 10 from Fig. 9, will can fill in cavity C H
Full test pallet TT, thus it can be prevented that and the extra stand-by period occurs.
Also, the latter test pallet TT2 and previous test pallet in the state of figure 9, as shown in figure 11, can be made
TT1 is adjacent.
Certainly, it when becoming the state of Figure 10 and Figure 11 from the state of Fig. 9, is tested according to previous test pallet and the latter
Spacing between pallet, the mobile spacing of No. 2 test pallet TT2 move 1 screw pitch or the screw pitch (in the present embodiment more than 1 screw pitch
The maximum of permission moves screw pitch as 3 screw pitch, therefore 2 screw pitch or 3 screw pitch), thus stream flow is made to become faster.
Wherein it is preferred to control from Fig. 9 to Figure 10 be be necessary to ensure that semiconductor devices apply hot stimulation or from
Semiconductor devices carries out when removing the sufficient time of hot stimulation, and the control from Fig. 9 to Figure 10 is that rapid test such as needs to survey
The rapid logistics of examination pallet TT is carried out as room temperature test is not necessarily to the when of applying hot stimulation to semiconductor devices.
On the other hand, with reference to Fig. 7 to Figure 11 it is found that according to the operation of transfer device 100, the front end of transfer shaft 411 to 414
Front wall CWs of the FE closer or far from cavity C H.
As described above, according to the present invention, keep the length of transfer shaft 411 to 414 shorter compared with prior art, before there is it
The structure that end FE is separated in the state that guiding device 451 to 454 is combined and is supported with the front wall of chamber, therefore control
Test pallet TT can once transfer multiple screw pitch also without the space inside amplifying chamber.And make transfer shaft according to this structure
411 to 414 when moving forward or back, and the front end of transfer shaft 411 to 414 is in the state of the inside positioned at chamber closer or far from chamber
The front wall of room.
As reference, above example be illustrated in case of rectilinear testing, sorting machine TH, but according to this
The transfer device of invention is readily applicable to what semiconductor devices in the state of test pallet TT levels was electrically connected with tester
Horizontal type test handler has the testing, sorting machine of the structure for transferring test pallet in chamber interior.
As described above, embodiment by referring to accompanying drawing illustrates the present invention, however above embodiment
It is only illustrated by taking the preferred embodiment of the present invention as an example, should not be understood as that the present invention is limited to above-described embodiment, this hairs
Bright interest field range should be claimed according to invention and its equivalency range understands.
Claims (8)
1. a kind of testing, sorting machine test pallet transfer device, which is characterized in that including：
Multiple transfer shafts alongst can hold test pallet or be released handle with multiple holding protrusions
It holds, the state to hold test pallet transfers test pallet；
At least one circulator, by making above-mentioned multiple transfer shafts rotate, to enable above-mentioned multiple transfer shafts to test pallet
Held or released holding；
Advance and retreat device makes above-mentioned multiple transfer shafts move forward or back required screw pitch；
Guiding device guides the forward or backward of above-mentioned transfer shaft when above-mentioned transfer shaft is moved forward or back by above-mentioned advance and retreat device；
And
Maintainer can hold test pallet or be released holding, when test pallet is transferred by above-mentioned transfer shaft,
Test pallet is released and is held, when test pallet maintains halted state, test pallet is held.
2. testing, sorting machine test pallet transfer device according to claim 1, which is characterized in that above-mentioned transfer shaft
Front end is located at the inside of above-mentioned chamber with the state that the wall of the chamber with receiving test pallet separates, and is leaned on by moving forward or back
Close or remote from the wall of above-mentioned chamber.
3. testing, sorting machine test pallet transfer device according to claim 2, which is characterized in that above-mentioned transfer shaft
Front end is combined in a manner of it can rotate with above-mentioned guiding device side.
4. testing, sorting machine test pallet transfer device according to claim 2, which is characterized in that
Further include board, above-mentioned board is combined in a manner of it can rotate with the rear end of above-mentioned multiple transfer shafts, to make
Above-mentioned multiple transfer shafts move forward or back together by above-mentioned advance and retreat device,
Above-mentioned advance and retreat device is by making above-mentioned board move forward or back, to make above-mentioned multiple transfer shafts move forward or back,
Above-mentioned guiding device is provided with multiple in a manner of corresponding with above-mentioned multiple transfer shafts respectively so that before above-mentioned transfer shaft
End is supported by above-mentioned guiding device, and the rear end of above-mentioned transfer shaft is supported by above-mentioned board.
5. testing, sorting machine test pallet transfer device according to claim 1, which is characterized in that above-mentioned guiding device packet
It includes：
Backward member is combined in a manner of above-mentioned transfer shaft can be made to rotate with above-mentioned transfer shaft, by above-mentioned advance and retreat device
Start to be moved forward or back together with above-mentioned transfer shaft；And
Guide member, the forward or backward for guiding above-mentioned backward member.
6. testing, sorting machine test pallet transfer device according to claim 5, which is characterized in that will be based on above-mentioned more
When a spacing held between adjacent multiple holding slots that protrusion is formed is defined as 1 screw pitch, the length of guide sections part reaches
To enabling to the backward member moved forward or back together with above-mentioned transfer shaft to be selectively advanced or retreat 1 screw pitch or be more than
The length of the screw pitch of 1 screw pitch.
7. a kind of test pallet method for transporting, which is characterized in that
When previous test pallet and the latter test pallet are spaced from each other 2 screw pitch or more, make previous test pallet with
The adjacent mode of the latter test pallet moves, and 1 is spaced from each other to make previous test pallet be in the latter test pallet
The state of screw pitch is moved in the state of making previous test pallet and the latter test pallet is spaced from each other 1 screw pitch together later
It send.
8. test pallet method for transporting according to claim 7, which is characterized in that
When making previous test pallet be moved in a manner of adjacent with the latter test pallet, make its selectively moved 1 spiral shell
Screw pitch away from or more than 1 screw pitch, to keep previous test pallet adjacent with the spacing of 1 screw pitch with the latter test pallet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110190120.2A CN112974275B (en) | 2017-02-09 | 2017-12-19 | Test tray transferring method in test handler |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2017-0017889 | 2017-02-09 | ||
| KR1020170017889A KR20180092355A (en) | 2017-02-09 | 2017-02-09 | Apparatus of transferring test tray for test handler and method of transferring test tray in test handler |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110190120.2A Division CN112974275B (en) | 2017-02-09 | 2017-12-19 | Test tray transferring method in test handler |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108405355A true CN108405355A (en) | 2018-08-17 |
| CN108405355B CN108405355B (en) | 2021-03-09 |
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Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110190120.2A Active CN112974275B (en) | 2017-02-09 | 2017-12-19 | Test tray transferring method in test handler |
| CN201711374229.1A Active CN108405355B (en) | 2017-02-09 | 2017-12-19 | Test tray transfer device and test tray transfer method for test handler |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110190120.2A Active CN112974275B (en) | 2017-02-09 | 2017-12-19 | Test tray transferring method in test handler |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR20180092355A (en) |
| CN (2) | CN112974275B (en) |
| TW (1) | TWI657525B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110856848A (en) * | 2018-08-24 | 2020-03-03 | 泰克元有限公司 | Test tray and handler for testing electronic parts |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102699530B1 (en) * | 2018-10-02 | 2024-08-30 | (주)테크윙 | Handler for testing electronic component |
| KR20220113097A (en) * | 2021-02-05 | 2022-08-12 | (주)테크윙 | Handler for testing electronic components |
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| US20050168214A1 (en) * | 2003-09-18 | 2005-08-04 | Mirae Corporation | Sorting handler for burn-in tester |
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- 2017-02-09 KR KR1020170017889A patent/KR20180092355A/en not_active Application Discontinuation
- 2017-12-08 TW TW106143192A patent/TWI657525B/en active
- 2017-12-19 CN CN202110190120.2A patent/CN112974275B/en active Active
- 2017-12-19 CN CN201711374229.1A patent/CN108405355B/en active Active
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| CN1235927A (en) * | 1998-05-15 | 1999-11-24 | 株式会社村田制作所 | Apparatus for transporting parts |
| US20050168214A1 (en) * | 2003-09-18 | 2005-08-04 | Mirae Corporation | Sorting handler for burn-in tester |
| JP2007107941A (en) * | 2005-10-12 | 2007-04-26 | Fujifilm Corp | Apparatus and method for transfer in inspection process |
| CN101079389A (en) * | 2006-05-24 | 2007-11-28 | 未来产业株式会社 | Handler for testing of packed chip |
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| CN110856848B (en) * | 2018-08-24 | 2022-02-08 | 泰克元有限公司 | Test tray and handler for testing electronic parts |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108405355B (en) | 2021-03-09 |
| CN112974275A (en) | 2021-06-18 |
| TWI657525B (en) | 2019-04-21 |
| TW201830566A (en) | 2018-08-16 |
| KR20180092355A (en) | 2018-08-20 |
| CN112974275B (en) | 2023-06-30 |
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