CN112974275A

CN112974275A - Test tray transfer method in test handler

Info

Publication number: CN112974275A
Application number: CN202110190120.2A
Authority: CN
Inventors: 羅闰成; 李相沅
Original assignee: Techwing Co Ltd
Current assignee: Techwing Co Ltd
Priority date: 2017-02-09
Filing date: 2017-12-19
Publication date: 2021-06-18
Anticipated expiration: 2037-12-19
Also published as: CN112974275B; KR20180092355A; TW201830566A; TWI657525B; CN108405355A; CN108405355B

Abstract

The invention relates to a test tray transferring method in a test sorting machine. The test tray is moved by a plurality of transfer shafts, the plurality of transfer shafts being located inside a chamber for accommodating the test tray, the front end of the transfer shafts being spaced apart from a wall of the chamber for accommodating the test tray, the transfer shafts being moved toward or away from the wall of the chamber by advancing or retreating, when a preceding test tray and a succeeding test tray are spaced apart from each other by more than 2 pitches in the chamber, the preceding test tray is moved to be adjacent to the succeeding test tray, or the succeeding test tray is moved to be adjacent to the preceding test tray, the preceding test tray and the succeeding test tray are spaced apart from each other by 1 pitch, and then the preceding test tray and the succeeding test tray are transferred together in a state spaced apart from each other by 1 pitch.

Description

Test tray transfer method in test handler

The present application is a divisional application of a patent application entitled "test tray transfer device for test handler and test tray transfer method" having an application date of 2017, 12 and 19 months, and an application number of 201711374229.1.

Technical Field

The present invention relates to a test tray transfer device for a test handler for transferring a test tray stored in a chamber.

Background

After being tested by the tester, a plurality of produced semiconductor devices are divided into good products and defective products, and only the good products are delivered.

The electrical connection of the tester and the semiconductor device is realized through the test handler.

The test handler electrically connects the semiconductor device to a tester so that the semiconductor device manufactured through a predetermined manufacturing process can be tested by the tester, and sorts a plurality of semiconductor devices by grade according to the test result and loads the semiconductor devices on a customer tray.

Generally, semiconductor devices produced in a state where the packaging operation is completed are supplied to a test handler in a state of being mounted on a customer tray. After the semiconductor devices supplied to the test handler are loaded on the test tray located at the loading position, the semiconductor devices are moved from the loading position to the unloading position through the soak chamber (soak chamber), the test chamber, and the heat removal chamber (desoak chamber) in a state of being loaded on the test tray. The semiconductor device is tested using the tester when the test tray is positioned in the test chamber, and the semiconductor device is unloaded from the test tray when the test tray is positioned in the unloading position.

As is well known, the soaking chamber applies thermal pressure (high temperature or low temperature) to the plurality of semiconductor devices mounted on the accommodated test tray to heat or cool the plurality of semiconductor devices under test temperature conditions, and the heat removing chamber restores the plurality of semiconductor devices mounted on the accommodated test tray to a temperature close to normal temperature.

In most cases, since the soaking chamber and the heat removing chamber sequentially and simultaneously accommodate a plurality of test trays, the plurality of test trays are simultaneously transferred in parallel by 1 Pitch (Pitch) at a time in steps. For this purpose, the test handler has a transfer device for transferring the test tray stepwise in parallel by 1 pitch at a time in the soaking chamber and the heat removing chamber. Such a transfer device is disclosed in korean laid-open patent No. 10-2011-0114281 and the like.

Fig. 1 is a conceptual diagram of a test tray transfer apparatus 100 for a test handler (hereinafter, simply referred to as "transfer apparatus") that transfers a test tray between a soaking chamber and a heat removing chamber. Referring to fig. 1, the transfer device 100 includes a transfer shaft 110 (actually, a plurality of transfer shafts), a rotator (not shown, actually, a plurality of transfer shafts), an advancing/retreating device 140, and a retainer (not shown, actually, a pair of retainer).

The transfer shaft 110 has a plurality of grip protrusions GP for gripping and releasing the test tray TT according to the rotation state. The test tray TT can be inserted into a gripping groove GS formed by a plurality of gripping protrusions GP and gripped by the transfer shaft 110. Here, the pitch between the adjacent gripping grooves GS may be defined as 1 pitch of the pitch at which the test tray TT moves according to one operation of the transfer device 100. The front end of the transfer shaft 110 is configured to be inserted with a ball bushing BB having a movement distance of 1 pitch, and to be coupled to the wall CW of the chamber CH so as to be able to advance or retreat and rotate.

The rotator rotates the transfer shaft 110 to bring the plurality of grip protrusions GP into a state of gripping the test tray TT or into a state of releasing the gripping.

The advancer and retreater 140 advances or retreats the transfer shaft 110 by 1 pitch in the longitudinal direction.

When the transfer shaft 110 grips the test tray TT to transfer the test tray TT, the retainer releases the grip of the test tray TT, and holds the test tray TT while the test tray TT is kept stopped.

According to the conventional technique described above, the test tray TT advances by 1 pitch while being held by the transfer shaft 110 and is held by the holder, and then, the test tray TT is rotated by 1 pitch while being released from holding by the transfer shaft 110 and is then retreated by 1 pitch, and the test tray TT is transferred stepwise by 1 pitch.

However, according to the related art, in the case where a pitch of a plurality of pitches occurs between the former test tray TT and the latter test tray TT, there is a problem that the circulation speed of the test tray TT becomes slow. This will be described in detail with reference to fig. 2.

In fig. 2, the test tray TT1 No. 1 is waiting to be transferred to the test chamber after the transfer by the transfer device 100 is completed, the test tray TT2 No. 2 is being transferred by the transfer device 100, and the test tray TT3 No. 3 is just being accommodated in the soak chamber and waiting to be transferred by the transfer device 100. Wherein, a 4-pitch spacing occurs between the No. 1 test tray TT1 and the No. 2 test tray TT2, and a 6-pitch spacing occurs between the No. 2 test tray TT2 and the No. 3 test tray TT 3.

In the state shown in fig. 2, if the test tray TT1 No. 1 is moved toward the test chamber, the test tray TT2 No. 2 repeats the step of moving by 1 pitch four times to reach the position of the test tray TT1 No. 1. The test tray TT3 No. 3 can be also transferred to the test tray TT1 No. 1 with a pitch of 6 pitches from the test tray TT2 No. 2 maintained. That is, in the state shown in fig. 2, the test tray TT1 No. 1 is not transferred to another position (for example, a test chamber), and the test tray TT cannot be entered into the chamber CH any more, thereby causing an excessive waiting time. Therefore, the circulation movement of the test tray TT1 becomes slow due to the slow movement and waiting time of each 1 pitch, and a problem occurs in that the processing capacity of the test handler decreases.

On the other hand, in the configuration of the related art, when the transfer device 110 moves the test tray TT by 2 pitches or more in one operation, the front end of the transfer shaft 110 cannot go beyond the wall CW of the chamber, and thus it is necessary to enlarge the space inside the chamber in the front-rear direction. However, enlarging the space inside the chamber causes the equipment (test handler) to become large, and also causes energy loss for applying thermal pressure to the semiconductor device.

Disclosure of Invention

Technical problem to be solved

A first object of the present invention is to provide a technique for forming a rapid material flow by selectively advancing or retreating a pitch of 1 pitch or a pitch larger than 1 pitch in one operation without enlarging the internal space of a soaking chamber or a heat removing chamber in the front-rear direction.

A second object of the present invention is to provide a technique capable of maintaining a pitch of 1 pitch between a preceding test tray and a succeeding test tray in a soaking chamber or a heat removing chamber.

Technical scheme for solving problems

In a test tray transfer method in a test handler of the present invention, a test tray is moved by a plurality of transfer shafts located inside a chamber for accommodating the test tray, the front end of the transfer shafts being spaced apart from a wall of the chamber for accommodating the test tray, the transfer shafts being moved toward or away from the wall of the chamber by advancing or retreating, when a preceding test tray and a succeeding test tray are spaced apart from each other by 2 pitches or more in the chamber, the preceding test tray is moved to be adjacent to the succeeding test tray, or the succeeding test tray is moved to be adjacent to the preceding test tray, the preceding test tray and the succeeding test tray are in a state of being spaced apart from each other by 1 pitch, and then the preceding test tray and the succeeding test tray are transferred together in a state of being spaced apart from each other by 1 pitch.

The test tray transfer device for a test handler of the present invention includes: a plurality of transfer shafts having a plurality of gripping protrusions along a longitudinal direction thereof, for gripping or releasing the test tray, and transferring the test tray in a state where the test tray is gripped; at least one rotator for rotating the plurality of transfer shafts to enable the plurality of transfer shafts to grip or release the grip of the test tray; a driving and reversing device which makes the plurality of the transfer shafts advance or retreat with a required pitch; a guide for guiding the forward or backward movement of the transfer shaft when the transfer shaft is moved forward or backward by the advancing/retreating device; and a holder for holding or releasing the test tray, wherein the test tray is released from holding when the test tray is transferred by the transfer shaft, and the test tray is held when the test tray is maintained in a stopped state.

The front end of the transfer shaft is located in the chamber in a state of being separated from the wall of the chamber for accommodating the test tray, and moves forward or backward to approach or separate from the wall of the chamber.

The front end of the transfer shaft is rotatably coupled to the guide side.

The present invention further includes a coupling plate rotatably coupled to rear ends of the plurality of transfer shafts to advance or retract the plurality of transfer shafts together by the advancing/retracting device, wherein the advancing/retracting device advances or retracts the plurality of transfer shafts by advancing or retracting the coupling plate, and wherein a plurality of guides are provided to correspond to the plurality of transfer shafts, respectively, such that the front ends of the transfer shafts are supported by the guides and the rear ends of the transfer shafts are supported by the coupling plate.

A forward and backward moving member coupled to the transfer shaft so as to rotate the transfer shaft, and moving forward or backward together with the transfer shaft by the activation of the forward and backward moving member; and a guide member for guiding the advancing or retreating of the advancing and retreating member.

When the pitch between the adjacent gripping grooves formed by the gripping protrusions is defined as 1 pitch, the guide member has a length that allows the advancing and retreating member, which advances or retreats together with the transfer shaft, to selectively advance or retreat by 1 pitch or a pitch greater than 1 pitch.

In the test tray transfer method in the test handler of the present invention, when a preceding test tray and a succeeding test tray are spaced apart from each other by more than 2 pitches, the preceding test tray is moved so as to be adjacent to the succeeding test tray, so that the preceding test tray and the succeeding test tray are in a state of being spaced apart from each other by 1 pitch, and then, the preceding test tray and the succeeding test tray are transferred together in a state of being spaced apart from each other by 1 pitch. Wherein, when the previous test tray is moved to be adjacent to the next test tray, it is selectively moved by a pitch of 1 pitch or more than 1 pitch to be adjacent to the next test tray by a pitch of 1 pitch.

Advantageous effects of the invention

According to the present invention, the plurality of test trays can be moved in a state adjacent to each other by moving the plurality of test trays by a plurality of pitches in the soaking chamber or the heat removing chamber without enlarging the size of the apparatus, and the occurrence of unnecessary waiting time can be prevented, whereby the test trays can be circulated more rapidly, and the processing capacity of the test handler can be improved. Particularly, the processing capacity of the test handler can be greatly improved under the rapid test and the normal temperature test.

Further, according to the present invention, since the previous test tray and the next test tray can be moved in a state of being adjacent to each other in the chamber, a larger number of test trays can be placed in the chamber, thereby sufficiently securing a time for applying or removing the thermal stimulus to the semiconductor device, and improving the reliability of the test.

Drawings

Fig. 1 is a conceptual diagram of a test tray transfer device for a test handler in the related art.

Fig. 2 is a reference diagram for explaining a problem of the transfer device of fig. 1.

Fig. 3 is a conceptual plan view of a test handler to which the test tray transfer device for a test handler of the present invention is applicable.

Fig. 4 and 5 are schematic perspective views of the test tray transfer device for a test handler according to an embodiment of the present invention, viewed from different angles.

Fig. 6 is a reference diagram for explaining an operation of gripping or releasing the gripping of the test tray by the transfer shaft applied to the transfer device of fig. 4.

Fig. 7 is a side view of a guide applied to the transfer device of fig. 4.

Fig. 8 is a reference view for explaining transfer of a test tray by the transfer device of fig. 4.

Fig. 9 is a reference diagram of a state in which the problem as in fig. 2 is assumed to occur.

Fig. 10 and 11 are reference diagrams for explaining a solution to the problem shown in fig. 9.

Description of the reference numerals

400: test tray transfer device for test handler

411 to 414: transfer shaft

GP: holding projection

GS: holding groove

220: combination board

431 to 433: rotary device

440: advancing and retreating device

451 to 453: guiding device

451a, 453 a: advancing and retreating member

451b, 453 b: guide member

461. 462: maintenance device

Detailed Description

Preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings, and for the sake of simplicity of description, repetitive or substantially identical structural descriptions will be omitted or compressed as much as possible.

Brief description of the test handler

Fig. 3 is a conceptual plan view of a test handler TH to which the test tray transfer device for a test handler (hereinafter, simply referred to as "transfer device") of the present invention is applied.

The test handler TH includes a loading device LA, a soaking chamber SC, a first transfer device TF1, a test chamber TC, a heat removing chamber DC, a second transfer device TF2, and an unloading device UA.

The loading device LA loads a plurality of semiconductor devices to be tested loaded on the customer tray CT1 to the test tray TT located at the loading position LP.

The soaking chamber SC is used to apply thermal stimulus to the plurality of semiconductor devices loaded on the test tray TT from the loading position LP.

The first transfer device TF1 transfers the test tray TT in the soaking chamber SC along the circulating movement direction of the test tray TT.

The test chamber TC provides a space in which a plurality of semiconductor devices loaded on the test tray TT passing through the soaking chamber SC can be tested using a TESTER (TESTER).

The heat removal chamber DC is used to remove thermal stimuli to the semiconductor devices loaded on the test tray TT from the test chamber TC.

The second transfer device TF2 transfers the test tray TT within the heat removing chamber DC along the circulating moving direction of the test tray TT.

The unloading device UA unloads the plurality of semiconductor devices from the test tray TT which enters the unloading position UP and moves toward the empty customer tray CT 2.

Of course, the test tray TT is moved along a closed circulation path C passing through the loading position LP, the inside of the soaking chamber SC, the testing position TP, the inside of the thermal chamber DC, and the unloading position UP and reconnecting to the loading position LP by means of a plurality of transfer devices including the first transfer device TF1 and the second transfer device TF 2.

In the test handler TH according to the example of fig. 3, the test tray TT maintains a horizontal state at the loading position LP and the unloading position UP and a section connected from the unloading position UP to the loading position LP, whereas maintains a vertical state at a transfer section from the inside of the soaking chamber SC to the inside of the heat removing chamber DC. That is, the test handler TH according to the example of fig. 3 is a vertical type test handler in which the semiconductor device and the tester are electrically connected in a state where the test tray TT is vertical.

In the above configurations of the test handler TH, the first transfer device TF1 and the second transfer device TF2 may be used as the transfer devices of the present invention.

Description of the transfer device

Fig. 4 and 5 are schematic perspective views of the test tray transfer device 400 for a test handler according to an embodiment of the present invention, viewed from different angles.

The transfer device 400 includes four transfer shafts 411 to 414, a coupling plate 420, three rotators 431 to 433, a feeder 440, four guides 451 to 454, and a pair of

keepers

461 and 462.

The four transfer shafts 411 to 414 are provided to transfer the test tray TT while holding the test tray TT, and are provided at positions where the vicinity of the four corner edges of the test tray TT can be held or released, respectively.

The transfer shafts 411 to 414 have 10 grip protrusions GP along the front-rear direction to grip or release the test tray TT. Due to the plurality of grip protrusions GP, grip grooves GS are formed between adjacent grip protrusions GP and grip protrusions GP (see enlarged portion a of fig. 4). Then, according to the rotation state of the transfer shafts 411 to 414, the vicinity of the four corners of the test tray TT is inserted into the gripping groove GS as shown in part (a) of fig. 6, or the vicinity of the four corners of the test tray TT is detached from the gripping groove GS as shown in part (b) of fig. 6, and the test tray TT is gripped or released by the transfer shafts 411 to 414. For this purpose, the transfer shafts 411 to 414 are rotatably provided.

The transfer shafts 411 to 414 of the present embodiment are rotatably advanced or retracted by a pitch of 1 pitch (a pitch between the adjacent gripping grooves) to a pitch of 3 pitches in order to transfer the test tray TT.

In the above-described example, the number of the gripping projections GP, the gripping positions of the test trays TT by the transfer shafts 411 to 414, the maximum pitches at which the transfer shafts 411 to 414 can advance or retreat, and the like can be arbitrarily changed according to the scale of the test handler TH, the need, or the customer's request. Further, it is also conceivable to provide three or more transfer shafts 411 to 414 so as to be configured to appropriately hold the test trays TT.

On the other hand, the front ends FE of the transfer shafts 411 to 414 are rotatably coupled to the guides 451 to 454, and the rear ends of the transfer shafts 411 to 414 penetrate the rear wall of the chamber to be rotatably coupled to the coupling plate 420.

The coupling plate 420 is rotatably coupled to rear ends of the four transfer shafts 411 to 414, so that the four transfer shafts 411 to 414 are simultaneously advanced or retreated by the injection and retraction device 440. Therefore, the rear ends of the transfer shafts 411 to 414 may be supported by the coupling plate 420.

The three rotators 431 to 433 are used to rotate the four transfer shafts 411 to 414 at a preset rotation angle. While the rotators denoted by

reference numerals

431 and 433 rotate the transfer shafts 411/414 one at a time, the rotator denoted by reference numeral 432 can rotate the

transfer shafts

412 and 413 simultaneously with the transmission element TE interposed therebetween. According to such operations of the rotators 431 to 433, as shown in fig. 5, the transfer shafts 411 to 414 rotate at a predetermined rotation angle to grip or release the test tray TT. For reference, the plurality of rotators 431 to 433 in the present embodiment are provided as cylinders, but may be provided as a rotary motor or a linear motor according to an embodiment.

The advancer 440 advances or retreats the coupling plate 420 to advance or retreat the transfer shafts 411 to 414, and finally advances or retreats the test tray TT held by the transfer shafts 411 to 414. Such an advancing and retreating device 440 can advance or retreat the transfer shafts 411 to 414 by a selective pitch of 1 pitch, 2 pitches, or 3 pitches by one operation. Therefore, the advancer and retreater 440 preferably uses a servo motor (servo-motor) that can control a moving distance, but a variable cylinder is also contemplated as necessary. For reference, the variable cylinder described herein is a multi-stage cylinder or a double acting type (double acting) multi-stage cylinder, which is a driving cylinder driven at a desired pitch to advance or retreat.

The four guides 451 to 454 guide the advancing or retreating of the transfer shafts 411 to 414 at a pitch of 1 pitch to 3 pitches, and support the leading ends FE of the transfer shafts 411 to 414. Here, the shape of the guide of reference numeral 451 and the guide of reference numeral 454 are similar to each other, and the shape of the guide of reference numeral 452 and the guide of reference numeral 453 are similar to each other, and therefore, the description is made with reference to fig. 7 in which the guide of reference numeral 451 and the guide of reference numeral 453 are cut out.

The

guides

451, 453 include advancing and retreating members 451&, 453& and guide members 45113, 45313.

The advancing-retreating members 451a, 453a advance or retreat together with the

transfer shafts

411, 413 based on the operation of the advancing-retreating device 440, and are rotatably coupled to the

transfer shafts

411, 413. The advancing/retreating members 451a, 453a may be provided in various forms in consideration of the relationship with a plurality of peripheral tools.

The guide members 451b, 453b are provided in pairs on the

respective guides

451, 452, and are provided in a rod shape parallel to the

transfer shafts

411, 413 so as to guide the forward and backward movement of the advancing and retreating members 451a, 453 a. The guide members 451b, 453b have a length that allows the

transfer shafts

411, 413 to rotationally advance or retreat by 1 pitch or 2 pitches or 3 pitches at maximum, which is greater than 1 pitch. That is, the guide members 451b, 453b have a length of at least the maximum advance or retreat distance (3 pitches in this example) of the

transfer shafts

411, 413.

The pair of

retainers

461 and 462 is used for holding the test tray TT while the test tray TT maintains the stopped state. That is, when the test tray TT is transferred while being gripped by the transfer shafts 411 to 414, the

retainers

461 and 462 are in a state of releasing the grip on the test tray TT, and when the test tray TT needs to be maintained in a stopped state while the transfer shafts 411 to 414 release the grip on the test tray TT, the

retainers

461 and 462 are in a state of gripping the test tray TT.

As can be confirmed by referring to fig. 7, in the state where the

transfer shafts

411 and 413 are advanced, the front ends FE of the

transfer shafts

411 and 413 are also spaced from the wall CW of the chamber CH.

The

retainers

461 and 462 can hold or release the upper end and the lower end of the test tray TT, and include holding

plates

461a and 462a and driving sources 461b and 462 b.

The

grip plates

461a and 462a may be provided in various shapes, and most simply, may be provided in a shape having a plurality of grip slits CS (refer to an enlarged portion B of fig. 4).

The driving sources 461b and 462b may be provided as cylinders or motors, and raise and lower the gripping

plates

461a and 462a to grip or release the test tray TT by the gripping

plates

461a and 462 a. Of course, according to the embodiment, the upper holder 461 of the pair of

holders

461 and 462 may not be provided in consideration of the relationship with the plurality of peripheral appliances. In this case, during the movement operation of the test tray TT, the vertical movement of the test tray TT may occur more or less when the

retainers

461 and 462 release or hold the test tray TT.

The transfer device 400 having the above-described configuration will be described by taking the transfer in the soaking chamber SC as an example.

As shown in fig. 8, in a state where the test tray TT is accommodated in the soaking chamber and stacked on the moving rail MR, and the latter test tray TT is not present, the transfer device 400 transfers the test tray TT to the waiting position SP by moving the test tray TT by 3 pitches each time. Of course, at the standby position SP, the test tray TT waits while being held by the transfer rail TR before being transferred to the test chamber.

On the other hand, as shown in fig. 9, when the test tray No. 1 TT1 is located at the waiting position SP and the test tray No. 3 TT3 is located on the moving track MR, the transfer device 400 moves the test tray No. 2 TT2 and the test tray No. 3 TT3 located between the test trays No. 1 TT1 and No. 3 TT3 to be adjacent to each other by 1 pitch, and then moves the test tray No. 2 TT2 and the test tray No. 3 TT3 to the test tray No. 1 TT1 side (waiting position side) in a state of being spaced by 1 pitch. That is, according to the present invention, when the preceding test tray No. 2 TT2 and the succeeding test tray No. 3 TT3 are spaced apart by 2 pitches or more, the test trays No. 2 TT2 and No. 3 TT3 are adjacent to each other with 1 pitch being spaced apart, and then the test trays No. 2 TT2 and No. 3 TT3 are transferred in parallel. By this method, the chamber can accommodate not only one or two test trays TT at a time, but also a larger number of test trays TT, thereby sufficiently securing a time for applying thermal stimulus to the semiconductor device or a time for removing thermal stimulus from the semiconductor device. Also, with this method, there is no possibility that the interval between test tray No. 1 TT1 and test tray No. 2 TT2 assumed in fig. 8 may occur. In particular, by the method of connecting from fig. 9 to fig. 10, the test tray TT may be filled in the chamber CH, whereby the occurrence of unnecessary waiting time may be prevented.

Also, in the state of fig. 9, as shown in fig. 11, the latter test tray TT2 may be made adjacent to the former test tray TT 1.

Of course, when the state of fig. 9 is changed to the state of fig. 10 and 11, the moving pitch of the test tray TT2 No. 2 is shifted by 1 pitch or a pitch more than 1 pitch (the maximum moving pitch allowed in this embodiment is 3 pitches, and thus 2 pitches or 3 pitches) according to the pitch between the previous test tray and the next test tray, thereby making the flow of the material flow faster.

Among them, it is preferable that the control from fig. 9 to 10 is performed when it is necessary to secure a sufficient time for applying or removing the thermal stimulus to or from the semiconductor device, and the control from fig. 9 to 10 is performed when rapid logistics such as rapid test requiring the test tray TT or when it is not necessary to apply the thermal stimulus to the semiconductor device such as normal temperature test.

On the other hand, as can be seen from fig. 7 to 11, the front ends FE of the transfer shafts 411 to 414 are close to or apart from the front wall CW of the chamber CH according to the operation of the transfer device 100.

As described above, according to the present invention, the transfer shafts 411 to 414 are made shorter in length compared to the prior art, and have a structure in which the front ends FE thereof are coupled to the guides 451 to 454 and are spaced apart from the front wall of the chamber in a supported state, so that the test tray TT can be controlled to be transferred by a plurality of pitches at a time without enlarging the space inside the chamber. When the transfer shafts 411 to 414 are moved forward or backward in this structure, the front ends of the transfer shafts 411 to 414 are close to or far from the front wall of the chamber while being positioned inside the chamber.

For reference, the above embodiment is described by taking the case of the vertical test handler TH as an example, but the transfer device according to the present invention may be applied to a horizontal test handler in which the semiconductor device is electrically connected to the tester in a state where the test tray TT is horizontal or a test handler having a structure for transferring the test tray inside the chamber.

As described above, the present invention has been specifically described with reference to the embodiments shown in the drawings, however, the above embodiments are merely illustrative of the preferred embodiments of the present invention, and it should not be understood that the present invention is limited to the above embodiments, and the scope of the present invention should be construed as being limited by the claims and the equivalents thereof.

Claims

1. A test tray transferring method in a test handler is characterized in that,

moving the test tray by a plurality of transfer shafts, the plurality of transfer shafts being located inside a chamber housing the test tray, having front ends spaced apart from walls of the chamber housing the test tray, approaching or separating from the walls of the chamber by advancing or retreating,

when the previous test tray and the next test tray are separated from each other by more than 2 pitches in the chamber, the previous test tray is moved to be adjacent to the next test tray, or the next test tray is moved to be adjacent to the previous test tray, so that the previous test tray and the next test tray are in a state of being separated from each other by 1 pitch, and then the previous test tray and the next test tray are transferred together in a state of being separated from each other by 1 pitch.

2. The test tray moving method in a test handler according to claim 1,

when the preceding test tray and the succeeding test tray are adjacent to each other at a pitch of 1 pitch, the test tray can be transferred by 2 pitches or more.

3. The test tray moving method in a test handler according to claim 1,

when the No. 1 test tray is arranged at a waiting position where the test tray is waited before being transferred to the test chamber, the No. 3 test tray accommodated in the inside of the soaking chamber is arranged in a state of being stacked on the moving track, and the No. 2 test tray is positioned between the No. 1 test tray and the No. 3 test tray, after the No. 2 test tray and the No. 3 test tray are adjacent to each other to a pitch of 1 pitch, the No. 2 test tray and the No. 3 test tray are transferred to the No. 1 test tray side.

4. The test tray moving method in a test handler according to claim 1,

when the former test tray is accommodated in the soaking chamber and stacked on the moving track, the former test tray is moved by 3 pitches each time to be transferred to the waiting position under the condition that the latter test tray does not exist.