CN108393793B - Air-suction type bonding-free workpiece bearing device for single-side grinding and polishing - Google Patents
Air-suction type bonding-free workpiece bearing device for single-side grinding and polishing Download PDFInfo
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- CN108393793B CN108393793B CN201810296131.7A CN201810296131A CN108393793B CN 108393793 B CN108393793 B CN 108393793B CN 201810296131 A CN201810296131 A CN 201810296131A CN 108393793 B CN108393793 B CN 108393793B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
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- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
The invention relates to an air-suction type adhesion-free workpiece bearing device for single-side grinding and polishing, which comprises a sucker (11) and is characterized in that a piston cavity (14) is arranged at the center of the sucker (11), a piston ((7) is arranged in the piston cavity (14), the piston (7) is connected with a cylinder cover (15) through an adjusting screw body (10) provided with a micrometer component, the position of the piston in the piston cavity (14) can be adjusted by rotating the adjusting screw body (10), so that the pressure in the piston cavity at the lower part of the piston is adjusted, an air suction hole (16) is formed in the lower part of the piston cavity (14), generates negative pressure to suck a workpiece (1) arranged at the lower part of the sucker (11), and a displacement sensor (12) for measuring the relative displacement of the sucker (11) so as to judge the grinding and polishing amount of the workpiece is arranged on the cylinder cover (15).
Description
Technical Field
The invention relates to a machining device, in particular to a polishing device, and specifically relates to an air-suction type bonding-free workpiece bearing device for single-side polishing.
Background
At present, in actual polishing processing, a workpiece needs to be adhered to a workpiece carrier through glue or wax during single-side polishing, and the workpiece is taken down in a certain mode after use. Therefore, on one hand, the auxiliary time is increased, and the efficiency is reduced; on the other hand, the auxiliary material cost is increased. Sometimes, the phenomena of uneven sticking, unstable sticking and the like occur, thereby affecting the polishing processing quality.
Disclosure of Invention
The invention aims to design an air-suction type non-adhesive workpiece bearing device for single-side grinding and polishing, aiming at the problems of non-uniform adhesion and poor adhesion of the existing bearing device.
The technical scheme of the invention is as follows:
the air-suction type adhesion-free workpiece bearing device for single-side grinding and polishing comprises a sucker 11 and is characterized in that a piston cavity 14 is arranged in the center of the sucker 11, a piston 7 is arranged in the piston cavity 14, the piston 7 is connected with a cylinder cover 15 through an adjusting screw body 10 provided with a micrometer component, the position of the piston in the piston cavity 14 can be adjusted by rotating the adjusting screw body 10, and further the pressure in the piston cavity at the lower part of the piston is adjusted; the lower part of the piston cavity 14 is provided with an air suction hole 16 which generates negative pressure to suck the workpiece 1 arranged at the lower part of the sucker 11; a displacement sensor 12 for measuring the relative displacement of the suction cup 11 and determining the amount of polishing of the workpiece is mounted on the cylinder head 15.
The elastic material layer 2 is arranged at the lower part of the sucker 11, and the elastic material layer 2 is also provided with a through hole matched with the air suction hole 16.
The bottom of the sucker 11 is provided with a plurality of piezoelectric sensors 3 for measuring suction force, and the contact tips of the piezoelectric sensors 3 penetrate through the elastic material layer 2 to be in contact with the workpiece 1.
The layout mode of the air suction holes 16 is to ensure uniform pressure distribution; part of the air suction holes 16 are directly communicated with the piston cavity 14, part of the air suction holes 16 are communicated with the piston cavity through radial holes 17, rigid sealing gaskets 4 and elastic sealing members 6 are installed on the outer sides of the radial holes 17, and the rigid sealing gaskets 4 and the elastic sealing members 6 are positioned in the radial holes through radial hole steps and sealing nuts 5, so that sealing on the outer sides of the radial holes 17 is achieved.
The displacement sensor 12 is an eddy current displacement sensor.
The measuring reference of the displacement sensor 12 is a measuring rod, a ruler on a machine tool or the upper end surface of a trimming ring 13 sleeved outside the suction cup.
The invention has the beneficial effects that:
1) the loading and unloading are convenient, the waiting of heating and cooling is not needed, and the efficiency is higher.
2) The consumable is saved, extra adhesive is not needed, and the processing cost is lower.
3) When the workpiece is connected, the negative pressure is uniformly distributed, so that the stress of the workpiece is uniform, and the surface type precision after the workpiece is processed by the device is higher.
4) The negative pressure value can be controlled by the digital display type screw micrometer component, the negative pressure adsorption force can be ensured to be the same when a batch of workpieces are processed, and the processing quality and the surface type consistency of the same batch of workpieces are higher.
5) The pressure real-time change in the machining process can be tested through the 12 piezoelectric sensor assemblies uniformly distributed below the loader, so that the real-time monitoring of the machining process is realized, and the monitoring and the management of the machining process are facilitated.
6) The eddy current displacement sensor assembly additionally arranged on the loader accessory can test the displacement change of the loader in the vertical direction of the grinding disc surface during processing, can realize real-time monitoring on grinding and polishing stability, can test the processing amount of a workpiece in real time, can avoid excessive processing, and reduces the grinding and polishing rejection rate.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Detailed Description
The invention is further described below with reference to the figures and examples.
As shown in fig. 1.
The suction type adhesion-free workpiece bearing device for single-side grinding and polishing comprises a suction disc 11, wherein a piston cavity 14 is arranged in the center of the suction disc 11, a piston 7 is arranged in the piston cavity 14, a sealing ring 8 is sleeved on the piston 7, the piston 7 is connected with a cylinder cover 15 through an adjusting screw 10 provided with a micrometer component, the cylinder cover 15 is connected with the suction disc 11 through a connecting screw 9, the position of the piston in the piston cavity 14 can be adjusted by rotating the adjusting screw 10, and further the pressure in the piston cavity at the lower part of the piston is adjusted; the lower part of the piston cavity 14 is provided with an air suction hole 16 which generates negative pressure to suck the workpiece 1 arranged at the lower part of the sucker 11; for reliable suction, a layer of elastic material 2 is preferably mounted on the lower portion of the suction cup 11, and the elastic material layer 2 is also provided with through holes matching with the suction holes 16. The layout mode of the air suction holes 16 is to ensure uniform pressure distribution; part of the air suction holes 16 are directly communicated with the piston cavity 14, part of the air suction holes 16 are communicated with the piston cavity through radial holes 17, rigid sealing gaskets 4 and elastic sealing members 6 are installed on the outer sides of the radial holes 17, and the rigid sealing gaskets 4 and the elastic sealing members 6 are positioned in the radial holes through radial hole steps and sealing nuts 5, so that sealing on the outer sides of the radial holes 17 is achieved. In order to detect the suction force in real time, a plurality of piezoelectric sensors 3 for measuring the suction force can be arranged at the bottom of the suction cup 11, and the contact tips of the piezoelectric sensors 3 penetrate through the elastic material layer 2 to be in contact with the workpiece 1. An eddy current displacement sensor 12 for measuring the relative displacement of the suction cup 11 and determining the polishing amount of the workpiece is mounted on the cylinder head 15. The measuring reference of the displacement sensor 12 can adopt the existing measuring rod and ruler on the machine tool, and can also be separately added with the corresponding measuring reference, and the embodiment adopts the upper end surface of the trimming ring 13 sleeved outside the sucker as the measuring reference.
The working principle and the process of the invention are as follows:
1. when the workpiece is bonded, the workpiece is arranged below the elastic material layer 2 and is tightly attached; then, a tool is adopted to rotate the adjusting spiral body and the micrometer part 10, and because a connecting part between the spiral body and the piston 7 has a certain pore, the adjusting spiral body and the micrometer part 10 do rotary motion, and the piston 7 does vertical linear motion. When the piston 7 is moved upwards by the rotation 10, the volume of the inner cavity becomes larger, and the pressure becomes smaller, so that the pressure is smaller than the atmospheric pressure; negative pressure adsorption is generated between the workpiece 1 and the elastic layer 2 due to the action of atmospheric pressure. By observing the scales and displays on the spiral body and the spiral micrometric component 10, the displacement of the piston 7 moving up and down can be controlled, and the control on the adsorption pressure is realized.
2. When the workpiece is unloaded, the piston moves downwards by reversely rotating the adjusting screw body and the micrometer component 10, the volume of the inner cavity is reduced, the pressure is increased, and when the pressure in the inner cavity is equal to or greater than the atmospheric pressure, the workpiece is loosened.
3. Pressure monitoring, when the work piece is installed and is processed, the work piece can contact with the piezoelectric sensor component 3 evenly distributed in the elastic material layer, real-time change of negative pressure borne by the work piece can be measured by the piezoelectric ceramic sensor and converted into a current signal, then the signal data can be transmitted to monitoring software installed on a computer or a mobile phone through a built-in wireless transmitting device, and real-time pressure data is output through the monitoring software.
4. And monitoring the displacement in the vertical direction, wherein when a workpiece is machined, the eddy current sensor 12 monitors the displacement change of the loader in the vertical direction of the grinding disc surface by measuring the distance from the upper surface of the trimming ring 13, and transmits a displacement signal to monitoring software installed in a computer or a mobile phone through a wireless transmitting device in the eddy current sensor 12 to output real-time displacement data.
The parts not involved in the present invention are the same as or can be implemented using the prior art.
Claims (6)
1. A suction type adhesion-free workpiece bearing device for single-side grinding and polishing comprises a sucker (11) and is characterized in that a piston cavity (14) is arranged in the center of the sucker (11), a piston (7) is installed in the piston cavity (14), the piston (7) is connected with a cylinder cover (15) through an adjusting screw body (10) provided with a micrometer component, the cylinder cover (15) is connected with the sucker (11) through a connecting screw (9), the position of the piston in the piston cavity (14) can be adjusted by rotating the adjusting screw body (10), and further the pressure in the piston cavity at the lower part of the piston is adjusted; the sucker (11) is provided with a radial hole (17), and the radial hole (17) is communicated with the piston cavity (14); the lower part of the piston cavity (14) is provided with an air suction hole (16), and the air suction hole generates negative pressure to suck a workpiece (1) arranged at the lower part of the sucker (11); the arrangement mode of the air suction holes (16) is to ensure uniform pressure distribution; part of the air suction holes (16) are directly communicated with the piston cavity (14), part of the air suction holes (16) are communicated with the piston cavity through radial holes (17), and a displacement sensor (12) for measuring the relative displacement of the suction cup (11) so as to judge the polishing amount of the workpiece is arranged on the cylinder cover (15).
2. The air-aspiration type bonding-free workpiece carrying device for single-side grinding and polishing as claimed in claim 1, wherein an elastic material layer (2) is mounted at the lower part of the suction cup (11), and the elastic material layer (2) is also provided with a through hole matched with the suction hole (16).
3. The air-suction type bonding-free workpiece carrying device for single-side grinding and polishing as claimed in claim 1, wherein a plurality of piezoelectric sensors (3) for measuring suction are mounted at the bottom of the suction cup (11), and contacts of the piezoelectric sensors (3) penetrate through the elastic material layer (2) to be in contact with the workpiece (1).
4. The air-suction type bonding-free workpiece bearing device for single-side grinding and polishing as claimed in claim 1, wherein a rigid sealing gasket (4) and an elastic sealing element (6) are mounted on the outer side of the radial hole (17), and the rigid sealing gasket (4) and the elastic sealing element (6) realize positioning in the radial hole through a radial hole step surface and a sealing nut (5) so as to realize sealing on the outer side of the radial hole (17).
5. The air-aspiration type bonding-free workpiece carrier device for single-side polishing and grinding as claimed in claim 1, wherein the displacement sensor (12) is an eddy current displacement sensor.
6. The air-suction type bonding-free workpiece bearing device for single-side grinding and polishing as claimed in claim 1 or 5, wherein the measurement reference of the displacement sensor (12) is the upper end face of a measuring rod, a ruler or a trimming ring (13) sleeved outside the suction cup on a machine tool.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810296131.7A CN108393793B (en) | 2018-04-04 | 2018-04-04 | Air-suction type bonding-free workpiece bearing device for single-side grinding and polishing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810296131.7A CN108393793B (en) | 2018-04-04 | 2018-04-04 | Air-suction type bonding-free workpiece bearing device for single-side grinding and polishing |
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| Publication Number | Publication Date |
|---|---|
| CN108393793A CN108393793A (en) | 2018-08-14 |
| CN108393793B true CN108393793B (en) | 2020-04-07 |
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| CN201810296131.7A Active CN108393793B (en) | 2018-04-04 | 2018-04-04 | Air-suction type bonding-free workpiece bearing device for single-side grinding and polishing |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109015344A (en) * | 2018-09-25 | 2018-12-18 | 天通银厦新材料有限公司 | A kind of sapphire substrate grinding device |
| CN111438632A (en) * | 2020-04-21 | 2020-07-24 | 北京特思迪半导体设备有限公司 | Adjustable 4, 6 cun polishing pressure heads of taking wireless transmission |
| CN114131503A (en) * | 2021-11-17 | 2022-03-04 | 大连理工大学 | Unpowered vacuum adsorption device for sheet polishing |
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| JP2003205455A (en) * | 2002-01-09 | 2003-07-22 | Komatsu Electronic Metals Co Ltd | Chuck device and chuck method |
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