CN108344507A - A kind of performance testing device and method of Spectral beam combining system - Google Patents
A kind of performance testing device and method of Spectral beam combining system Download PDFInfo
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- CN108344507A CN108344507A CN201711430293.7A CN201711430293A CN108344507A CN 108344507 A CN108344507 A CN 108344507A CN 201711430293 A CN201711430293 A CN 201711430293A CN 108344507 A CN108344507 A CN 108344507A
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- 230000003595 spectral effect Effects 0.000 title claims abstract description 45
- 238000012360 testing method Methods 0.000 title claims abstract description 41
- 238000000034 method Methods 0.000 title claims description 8
- 230000003287 optical effect Effects 0.000 claims abstract description 67
- 238000010998 test method Methods 0.000 claims description 6
- 238000011156 evaluation Methods 0.000 claims description 5
- 238000005286 illumination Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims 2
- 238000004458 analytical method Methods 0.000 claims 1
- 230000007613 environmental effect Effects 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 5
- 238000011056 performance test Methods 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 238000010009 beating Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000571 coke Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
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- 239000004615 ingredient Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
Abstract
The invention discloses a kind of performance testing devices of Spectral beam combining system, including the multiple light sources discharged side by side sequentially placed on the optical axis of Spectral beam combining light path, collimating mirror and grating, it further include the grating sequentially placed on the optical axis of optical system for testing, power attenuator and Hartmann wave front sensor, grating is located at the intersection of this two optical axises, it is the light incidence point of Spectral beam combining light path (optical axis), it is also the beam projecting point of optical system for testing (optical axis), Hartmann wave front sensor includes microlens array and detector array, grating outgoing light along optical system for testing optical axis sequentially through power attenuator, microlens array and detector array, detector array is located at the focused spot of microlens array.The present invention can test each road synthetic laser, position deviation information when their inclination, defocus and incident grating be obtained, to evaluate Spectral beam combining performance；The performance testing device principle of the present invention is simple, and easy to operate, environmental suitability is strong.
Description
Technical field
The present invention relates to the performance test fields of Spectral beam combining system, and in particular to a kind of performance survey of Spectral beam combining system
Try device and method.
Background technology
Spectral beam combining technology using the synthesizers such as grating, by multichannel narrow linewidth optical-fiber laser synthesize single channel high power,
High brightness laser exports.Spectral beam combining optical-fiber laser has that scalability is strong, operating distance is remote, high conversion efficiency, compact-sized
And the advantages that being easy to ensure.Spectral beam combining technology is novel beam-combination technology, every key technology also in fast development, by
Include multiple spectrum ingredient in spectrum beam combination laser, the factor for influencing its synthetic effect is numerous, is proposed to test evaluation method
New requirement, traditional test method are that the photoelectric sensors such as CCD are positioned in synthesis light path, and main to measure wavefront oblique
Rate, the position by reading hot spot judge whether each road laser beam overlaps, but can not to the inclination of single laser and from
The states such as coke are judged.
Invention content
To solve the above problems, the present invention provides a kind of performance testing devices of Spectral beam combining system, including sequentially exist
Multiple light sources discharged side by side, collimating mirror and the grating placed on the optical axis of Spectral beam combining light path, further include sequentially in test light
Grating, power attenuator and the Hartmann wave front sensor placed on the optical axis on road, the grating are located at the friendship of this two optical axises
It is the light incidence point of Spectral beam combining light path (optical axis) and the beam projecting point of optical system for testing (optical axis), the Hart at remittance
Graceful Wavefront sensor includes microlens array and detector array, the light of the grating outgoing along optical system for testing optical axis sequentially
By power attenuator, microlens array and detector array, the detector array is located at the focused spot of microlens array
Place.
Specifically, the light source is laser.
Specifically, the detector array connects spot array display, is shown on the spot array display
Go out the spot array image formed on detector array.
The present invention also provides a kind of performance test methods for the Spectral beam combining system for using performance testing device above-mentioned,
Include the following steps：
Step 1: the optical axis of optical system for testing is placed on the optical axis of Spectral beam combining light path so that the grating is located at this
The intersection of the optical axis of two light paths, the grating are the light incidence point and optical system for testing of Spectral beam combining light path (optical axis)
The beam projecting point of (optical axis)；
Step 2: the optical axis of two light paths provided according to step 1, with collimated reference light on the detector array
Determine the center of light beam；
Step 3: being separately turned on the single channel light source of Spectral beam combining light beam, other road light sources remain off at this time, observation
And analyze its light spot image formed in detector array；
Step 4: by being recorded and being analyzed to light spot image, each single channel light source outgoing of Spectral beam combining light beam is obtained
Position deviation information when the inclination of light beam, defocus and incident grating, to accurately be commented the performance of Spectral beam combining light beam
Valence.
In the step 1, optical system for testing is placed on Spectral beam combining light source optical axis, specifically, the laser of different wave length
The light beam of device outgoing is incident at different angles on the grating, and since optical grating diffraction acts on, diffracted beam is with identical angle
Degree spreads out outgoing from the grid, the light beam of outgoing after power attenuation system vertically into Hartmann sensor, according to test light
Road (optical axis) adjustment Hartmann sensor position makes the detector array be located at the focused spot of microlens array.
In the step two, the center of light beam is determined on the detector array with collimated reference light, specifically
Ground determines the center of light beam with collimated reference light incidence Hartmann wave front sensor, as with reference to benchmark.
Its light spot image formed in detector array is observed and analyzed in the step three, it specifically, will be described
Light spot image record, which is shown on spot array display, to be observed and analyzes.
Accurate evaluation is carried out to Spectral beam combining performance in the step four, specifically, first uses collimated reference optical illumination
Microlens array measures the corresponding spot center coordinate of each lenticule, as with reference to benchmark；When incident beam is not standard
Directional light when, inclination of wave front in lenticule or the variation of the not parallel position offset or size that will cause hot spot are right accordingly
The beam quality of synthetic laser is evaluated.
The present invention provides the performance testing device of Spectral beam combining system and method, it can be achieved that being carried out to each road synthetic laser
Test, the information such as position deviation when obtaining their inclination, defocus and incident grating, to comment Spectral beam combining performance
Valence；The performance testing device principle of the present invention is simple, and easy to operate, environmental suitability is strong；The performance test methods of the present invention are suitable
Field is synthesized for the synthesis of optical fiber laser grating spectrum and other light beams.
Description of the drawings
Fig. 1 is the installation drawing that Spectral beam combining system performance testing is realized in the present invention；
Hot spot (image) when Fig. 2 is collimated light laser light incident Hartmann wave front sensor parallel in the present invention is distributed feelings
Condition；
Hot spot (image) when Fig. 3 is an example oblique laser wavefront incidence Hartmann wave front sensor in the present invention is distributed feelings
Condition；
Fig. 4 is that the hot spot (image) in the present invention before an example defocus laser wave when incident Hartmann wave front sensor is distributed feelings
Condition.
In figure：1- Hartmann sensors, 2,3,4- lasers, 5- collimating mirrors, 6- gratings, 7- power attenuation devices, 8- is micro-
Lens array, 9- detector arrays.
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, right
The specific implementation mode of the present invention is described further.It should be appreciated that specific embodiment described herein is used only for helping
Understand the present invention, does not constitute limitation of the invention.In addition, involved in the various embodiments of the present invention described below
To technical characteristic can be combined with each other as long as they do not conflict with each other.
As shown in Figure 1, a kind of performance testing device of Spectral beam combining system, including sequentially in the optical axis of Spectral beam combining light path
Multiple laser light sources (laser 2,3,4) discharged side by side of upper placement, collimating mirror (lens that light beam is collimated) and
Grating further includes the grating, power attenuator and Hartmann wave front sensor sequentially placed on the optical axis of optical system for testing, described
Grating is located at the intersection of this two optical axises, is the light incidence point of Spectral beam combining light path and the beam projecting of optical system for testing
Point, the Hartmann wave front sensor include microlens array (the lenticule quantity in array, is determined by the pixel needed, as
Plain high, quantity is more) and detector array, the light of the grating outgoing along optical system for testing optical axis sequentially through power attenuation
Device, microlens array and detector array, the detector array are located at the focused spot of microlens array.
The detector array connects spot array display, is computer in the present embodiment, is shown on computer display screen
Go out the spot array image formed on detector array.
Using the performance test methods of the Spectral beam combining system of aforementioned properties test device, include the following steps：
Step 1: the optical axis of optical system for testing is placed on the optical axis of Spectral beam combining light path so that the grating is located at this
The intersection of the optical axis of two light paths, the grating are the light incidence point of Spectral beam combining light path and the light of optical system for testing
Eye point；
Specifically, the light beam of the laser emitting of different wave length is incident at different angles on the grating, due to light
Grid diffraction, diffracted beam are spread out outgoing with identical angle from the grid, and the light beam of outgoing hangs down after power attenuation system
It is straight enter Hartmann sensor, Hartmann sensor position is adjusted according to optical system for testing (optical axis) and makes the detector array position
At the focused spot of microlens array.
Step 2: the optical axis of two light paths provided according to step 1, with collimated reference light (with for the more of Spectral beam combining
Road laser is in same position) center of determining light beam on the detector array；
Specifically, the center that light beam is determined with collimated reference light incidence Hartmann wave front sensor, as with reference to base
It is accurate.
Step 3: being separately turned on the single channel light source of Spectral beam combining light beam, other road light sources remain off at this time, observation
And analyze the light spot image that its (after Hartmann sensor) is formed in detector array；
Specifically, include being observed and analyzing on computer display screen by the light spot image record.
Step 4: by being recorded and being analyzed to light spot image, each single channel light source outgoing of Spectral beam combining light beam is obtained
Position deviation information when the inclination of light beam, defocus and incident grating, Spectral beam combining require to beat each road light in the same of grating
A place (No. 6 elements in Fig. 1), if not beating in the same place, ascends the throne and is equipped with deviation, show as the shape on detector array
At the position of spot array can be variant, to carry out accurate evaluation to the performance of Spectral beam combining light beam.
Specifically, collimated reference optical illumination microlens array is first used, each lenticule (alternatively referred to as sub-aperture) is measured
Corresponding spot center coordinate, as with reference to benchmark；When incident beam is not the directional light of standard, the wavefront in lenticule inclines
The variation of the oblique or not parallel position offset or size that will cause hot spot, accordingly evaluates the beam quality of synthetic laser.
Hartmann sensor is placed according to synthetic laser optical axis, the laser beam-wave of the output of three lasers 2,3,4 in Fig. 1
Long is respectively 1056nm, 1064nm, 1080nm, and beam quality M2 is respectively 1.12,1.11,1.10, and power is 100W.Through
It after crossing collimating mirror 5, is incident on grating at different angles, since optical grating diffraction acts on, diffracted beam is filled by power attenuation
It sets, in order to adapt to the power tolerance range of detector array, it is necessary to power attenuation device is used, is wedge mirror in the present embodiment,
Can be other light splitting eyeglasses or attenuator and combination thereof, the power attenuation of each wavelength is to about 10mW, into Hartmann
The microlens array of sensor enters the detector array of Hartmann sensor after microlens array focuses；All the way
Debugging is opened, laser 2 is opened, laser 3 and laser 4 remain off at this time, obtain light spot image distribution at this time
Situation is as shown in figure 3, black light ray parallel with the arrow, though collimation tilts, incident Hartmann wave front sensor before laser wave
(one, the left side black line that arrow is contacted in figure indicates the plane of incidence of light), intermediate six vertical head and the tail connections arrange small ellipse
Circle is microlens array, and one, the right heavy black indicates that the array after microlens array focuses into Hartmann sensor is visited
The hot spot distributed image formed on device is surveyed, each hot spot removes downwards cross searching；The rightmost side is hot spot distributed image；With it is parallel
Collimated light laser light incident the case where, compared to obtain as shown in Figure 2, the light beam with respect to optical axis have certain inclination；It opens
Open laser 3, laser 2 and laser 4 remain off at this time, obtain its light spot image distribution situation as shown in figure 4,
Black light ray parallel with the arrow, though collimation tilts, (arrow is contacted incident Hartmann wave front sensor in figure before laser wave
One black line in the left side indicate the plane of incidence of light), intermediate six vertical head and the tail connection arrangements it is small it is oval be microlens array,
One heavy black in the right indicates after microlens array focuses into the light formed on the detector array of Hartmann sensor
Spot distributed image, each hot spot become larger and to centre convergence not in cross searching；The rightmost side is hot spot distributed image；With it is parallel
Collimated light laser light incident the case where, compared as shown in Figure 2, hot spot become larger and to centre concentrate indicate the light beam have centainly
Convergence, do not collimate.
The embodiment shows that present invention design is simple, easy to detect, easily operated, practicability is good, is closed in laser spectrum
There is greater significance at field.
The present invention is not only limited to above-mentioned specific implementation mode, and persons skilled in the art are according to disclosed by the invention interior
Hold, other a variety of specific implementation modes may be used and implement the present invention, therefore, every design structure using the present invention and think of
Road does some simple designs changed or change, both falls within the scope of protection of the invention.
Claims (8)
1. a kind of performance testing device and method of Spectral beam combining system, including sequentially place on the optical axis of Spectral beam combining light path
Multiple light sources discharged side by side, collimating mirror and grating, further include the grating sequentially placed on the optical axis of optical system for testing, power
Attenuator and Hartmann wave front sensor, the grating are located at the intersection of this two optical axises, are the light of Spectral beam combining light path
The beam projecting of incidence point and optical system for testing point, the Hartmann wave front sensor includes microlens array and array detection
Device, the light of grating outgoing along optical system for testing optical axis sequentially through power attenuator, microlens array and array detection
Device, the detector array are located at the focused spot of microlens array.
2. performance testing device according to claim 1, it is characterised in that the light source is laser.
3. performance testing device according to claim 2, it is characterised in that the detector array connects spot array
Display shows the spot array image formed on detector array on the spot array display.
4. the test method of performance testing device according to claim 1 or 2 or 3, it is characterised in that include the following steps：
Step 1: the optical axis of optical system for testing is placed on the optical axis of Spectral beam combining light path so that the grating is located at this two
The intersection of the optical axis of light path, the grating are the light incidence point of Spectral beam combining light path and the beam projecting of optical system for testing
Point；
Step 2: the optical axis of two light paths provided according to step 1, is determined with collimated reference light on the detector array
The center of light beam；
Step 3: being separately turned on the single channel light source of Spectral beam combining light beam, other road light sources remain off at this time, observe and divide
Analyse its light spot image formed in detector array；
Step 4: by being recorded and being analyzed to light spot image, each single channel light source outgoing beam of Spectral beam combining light beam is obtained
Inclination, defocus and position deviation information when incident grating, to carry out accurate evaluation to the performance of Spectral beam combining light beam.
5. test method according to claim 4, which is characterized in that in the step 1, optical system for testing is placed on light
It composes on synthesized source optical axis, specifically, the light beam of the laser emitting of different wave length is incident on the grating at different angles
On, since optical grating diffraction acts on, diffracted beam is spread out outgoing with identical angle from the grid, and the light beam of outgoing is by power attenuation
Vertically into Hartmann sensor after system, Hartmann sensor position is adjusted according to optical system for testing and makes the detector array
At the focused spot of microlens array.
6. test method according to claim 4, it is characterised in that in the step two, with collimated reference light described
Determine that the center of light beam specifically determines light with collimated reference light incidence Hartmann wave front sensor on detector array
The center of beam, as with reference to benchmark.
7. test method according to claim 4, it is characterised in that observed in the step three and analyze it in array
The light spot image record is included specifically being seen on spot array display by the light spot image that detector is formed
It surveys and analyzes.
8. test method according to claim 4, it is characterised in that in the step four to Spectral beam combining performance into
Row accurate evaluation specifically first uses collimated reference optical illumination microlens array, measures the corresponding spot center of each lenticule
Coordinate, as with reference to benchmark；When incident beam is not the directional light of standard, inclination of wave front in lenticule or not parallel will make
At the variation of the position offset or size of hot spot, the beam quality of synthetic laser is evaluated accordingly.
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Cited By (1)
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Application publication date: 20180731 |