CN106092891A - A kind of confocal three-dimensional spectrum micro imaging method and device - Google Patents
A kind of confocal three-dimensional spectrum micro imaging method and device Download PDFInfo
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Abstract
The invention discloses a kind of confocal three-dimensional spectrum micro imaging method and device, by light source emitting module outgoing the first light beam, the DMD in optical path modulation module carries out reflection modulation；Light beam after modulation focuses on testee, produces the confocal images of testee；Confocal images is back to after DMD is modulated, carry out grating beam splitting through dispersion probe module, form spectrum picture；Spectrum picture is detected, obtains the intensity signal of image；The confocal spectroscopic image of testee place confocal plane is recovered according to compressed sensing algorithm.Compressive sensing theory is incorporated in confocal three-dimensional spectrum micro-imaging by the present invention, compared with traditional confocal three-dimensional microscopy technology, without increasing mechanical scanning mechanism, the image of sample can be recovered, image sample data is greatly reduced while improving system imaging signal to noise ratio, save system resource and memory space, further shorten the measurement time of imaging process.
Description
Technical field
The present invention relates to three-dimensional spectrum micro-imaging technique field, particularly relate to a kind of confocal three-dimensional spectrum micro-imaging
Method and device.
Background technology
Confocal three-dimensional microscopy technology, by light source, testee and detector 3 conjugation, eliminates beyond focus
Veiling glare, obtains than traditional wide field higher lateral resolution of microscope, is provided with the deepest simultaneously because introduce pin hole detection
Degree chromatography ability, by the upper and lower translation of focal plane thus obtain the microscopic three-dimensional spatial structural form of object.This three-dimensional one-tenth
As ability makes confocal three-dimensional microscopy technology have been widely used for biomedicine, material analysis, industry detection and metering
Among various different fields.
Spectral technique, is by the spectrum after the light splitting of dispersion system, determines physical arrangement and the change of testee
Study grading information, it is achieved the qualitative analysis of object.Through the development of last 100 years, spectral technique more and more ripe and also at each
Field plays an important role.
And confocal three-dimensional spectrum micro-imaging technique is above-mentioned two technology to be closely linked, it can not only carry
For the microscopic three-dimensional spatial form and structure information of object, but also abundant spectral information can be provided, provide material in object
The more details information of structure and composition, therefore has extensively in the fields such as biomedicine detection, food inspection, material tests
Application prospect.
But traditional confocal three-dimensional microscopy technology is that the mode using simple scan is real by mechanical scanner
It is now object dimensional space measurement, the noise brought due to mechanical vibration and the impact of scanning speed, cause traditional confocal
Three-dimensional microscopy commercial measurement accuracy and speed cannot improve.And along with the addition of spectral technique, confocal three-dimensional spectrum shows
Micro-imaging technique, on the basis of original three-dimensional spatial distribution information, adds abundant spectral information, and these are the most significantly
Add the data volume of confocal three-dimensional light spectrum image-forming microtechnique, increase data intractability and data space.These are asked
Topic all significantly limit domestic and international confocal three-dimensional spectrum micro-imaging technique and enters one in fields such as biomedicine, commercial production
Step development and application.
Summary of the invention
It is an object of the invention to provide a kind of confocal three-dimensional spectrum microscopic imaging device and method, it is therefore intended that solve existing
The problem that in technology sampled data output is big, data process and the difficulty of storage is higher.
For solving above-mentioned technical problem, the present invention provides a kind of confocal three-dimensional spectrum microscopic imaging device, including:
Light source emitting module, optical path modulation module and dispersion probe module；
Wherein, described light source emitting module is used for outgoing the first light beam；
Described optical path modulation module includes DMD, for being modulated described first light beam, and to incidence
Light beam focuses on the confocal images produced on testee and is modulated, and the light beam after modulation is incident to described dispersion probe mould
Block；
Described dispersion probe module carries out light splitting for the light beam after described modulation is incident to grating, visits spectrum
Survey, and recover the confocal three-dimensional spectrum picture of described testee according to compressed sensing algorithm.
Alternatively, described light source emitting module includes optical fiber coupling LED and the first battery of lens；
Wherein, described optical fiber coupling LED is for launching the first incident beam；
Light beam after collimation, for collimating described first incident beam, is incident to described by described first battery of lens
Optical path modulation module.
Alternatively, described optical path modulation module also includes:
3rd battery of lens, microscope and Z axis motion controller；
Wherein, described 3rd battery of lens is for by the most described for the incident beam focus after described DMD is modulated
On microscopical testee, and the confocal images of described testee is focused on described DMD；
Described Z axis motion controller is used for controlling described testee and moves in Z-direction.
Alternatively, described dispersion probe module includes:
Spectroscope, the second battery of lens, collimating lens, grating, spectral detector and processor；
Wherein, the light beam that described spectroscope is incident on described DMD for reflection, transmission is through described light path
Light beam after modulation module modulation；
Described second battery of lens is for assembling described spectroscopical transmitted light beam；
Described collimating lens is for carrying out collimation process by the light beam of convergence；
The collimated light beam dispersion after collimating of the described grating is line spectrum；
Described spectral detector is for detecting the described line spectrum formed；
Described processor, for being analyzed described line spectrum, recovers described testee according to compressed sensing algorithm
Confocal three-dimensional spectrum picture.
Alternatively, described spectral detector is EMCCD or spectrogrph.
Present invention also offers a kind of confocal three-dimensional spectrum micro imaging method, including:
Light source emitting module outgoing the first light beam, the DMD in optical path modulation module carries out reflection modulation；
Light beam after modulation focuses on testee, produces the confocal images of testee；
Described confocal images is back to after described DMD is modulated, carry out grating through dispersion probe module and divide
Light, forms spectrum picture；
Described spectrum picture is detected, obtains the intensity signal of image；
The confocal images of described testee place confocal plane is recovered according to compressed sensing algorithm.
Alternatively, the described confocal images bag recovering described testee place confocal plane according to compressed sensing algorithm
Include:
The two dimensional image that testee place confocal plane is original is recovered by greedy algorithm or convex optimized algorithm.
Alternatively, described DMD uses following formula to carry out coded modulation:
Wherein, modulation matrix SkIn element representation kth time modulate the miniature minute surface in corresponding described DMD
Rollover states, its value is respectively 0 or 1；Numerical value 0 represents that miniature minute surface reflects light on baffle, and numerical value 1 represents miniature
Minute surface reflects light to receive on detector；M, n represent the image vertical direction of testee, horizontal direction pixel count respectively.
Alternatively, also include:
Control the movement in Z-direction of the described testee by Z axis motion controller, obtain the two dimension of different focal planes
Image, the dispersion spectrum obtained in conjunction with detection, obtain three-dimensional space shape information and the spectral information of described testee.
Alternatively, carry out grating beam splitting described through dispersion probe module, also include before forming spectrum picture:
After light beam after modulating is assembled through lens, and collimated lens collimate, it is thus achieved that collimated light beam.
Confocal three-dimensional spectrum micro imaging method provided by the present invention and device, by light source emitting module outgoing first
Light beam, the DMD in optical path modulation module carries out reflection modulation；Light beam after modulation focuses on testee,
Produce the confocal images of testee；Confocal images is back to after DMD is modulated, enter through dispersion probe module
Line raster light splitting, forms spectrum picture；Spectrum picture is detected, obtains the intensity signal of image；Calculate according to compressed sensing
Method recovers the confocal images of testee place confocal plane.Confocal three-dimensional spectrum micro imaging method provided by the present invention and
Device, is incorporated into compressive sensing theory in confocal three-dimensional spectrum micro-imaging, with traditional confocal three-dimensional microscopy technology
Compare, it is not necessary to increase mechanical scanning mechanism, the image of sample can be recovered, big while improving system imaging signal to noise ratio
Decrease greatly image sample data, saved system resource and memory space, further shorten the measurement time of imaging process.
Accompanying drawing explanation
For the clearer explanation embodiment of the present invention or the technical scheme of prior art, below will be to embodiment or existing
In technology description, the required accompanying drawing used is briefly described, it should be apparent that, the accompanying drawing in describing below is only this
Some bright embodiments, for those of ordinary skill in the art, on the premise of not paying creative work, it is also possible to root
Other accompanying drawing is obtained according to these accompanying drawings.
Fig. 1 is the structural frames of a kind of detailed description of the invention of confocal three-dimensional spectrum microscopic imaging device provided by the present invention
Figure；
Fig. 2 is the signal of a kind of detailed description of the invention of confocal three-dimensional spectrum microscopic imaging device provided by the present invention
Figure；
The flow chart of the confocal three-dimensional spectrum micro imaging method that Fig. 3 provides for the embodiment of the present invention.
Detailed description of the invention
In order to make those skilled in the art be more fully understood that the present invention program, below in conjunction with the accompanying drawings and detailed description of the invention
The present invention is described in further detail.Obviously, described embodiment be only a part of embodiment of the present invention rather than
Whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art are not making creative work premise
Lower obtained every other embodiment, broadly falls into the scope of protection of the invention.
The structured flowchart of a kind of detailed description of the invention of confocal three-dimensional spectrum microscopic imaging device provided by the present invention is such as
Shown in Fig. 1, this device includes:
Light source emitting module 1, optical path modulation module 2 and dispersion probe module 3；
Wherein, described light source emitting module 1 is for outgoing the first light beam；
Described optical path modulation module 2 includes DMD, for being modulated described first light beam, and to incidence
Light beam focuses on the confocal images produced on testee and is modulated, and the light beam after modulation is incident to described dispersion probe module
3；
Described dispersion probe module 3 carries out light splitting for the light beam after described modulation is incident to grating, carries out spectrum
Detection, and the confocal three-dimensional spectrum picture of described testee is recovered according to compressed sensing algorithm.
Confocal three-dimensional spectrum microscopic imaging device provided by the present invention, by light source emitting module outgoing the first light beam,
DMD in optical path modulation module carries out reflection modulation；Light beam after modulation focuses on testee, produces
The confocal images of testee；Confocal images is back to after DMD is modulated, carry out light through dispersion probe module
Grid light splitting, forms spectrum picture；Spectrum picture is detected, obtains the intensity signal of image；Extensive according to compressed sensing algorithm
The confocal images of multiple testee place confocal plane.Confocal three-dimensional spectrum microscopic imaging device provided by the present invention, will pressure
Contracting perception theory is incorporated in confocal three-dimensional spectrum micro-imaging, compared with traditional confocal three-dimensional microscopy technology, it is not necessary to
Increase mechanical scanning mechanism, the image of sample can be recovered, greatly reduce while improving system imaging signal to noise ratio
Image sample data, has saved system resource and memory space, further shorten the measurement time of imaging process.It addition, this
Application adds spectrographic detection, while obtaining three-dimensional space shape information, it is possible to obtains spectral information, is greatly enriched
Characterize the quantity of information of object, contribute to the integrated informations such as the form of object analysis, object structures, chemical composition, improve detection
Accuracy, there is important practical value.
On the basis of above-described embodiment, in confocal three-dimensional spectrum microscopic imaging device provided by the present invention, light source is sent out
Penetrate module can specifically include:
Optical fiber coupling LED and the first battery of lens；
Wherein, described optical fiber coupling LED is for launching the first incident beam；
Light beam after collimation, for collimating described first incident beam, is incident to described by described first battery of lens
Optical path modulation module.
Optical path modulation module can also include:
3rd battery of lens, microscope and Z axis motion controller；
Wherein, described 3rd battery of lens is for by described the most micro-for the incident beam focus after DMD is modulated
On the testee of mirror, and the confocal images of described testee is focused on described DMD；
Described Z axis motion controller is used for controlling described testee and moves in Z-direction.
Dispersion probe module may include that
Spectroscope, the second battery of lens, collimating lens, grating, spectral detector and processor；
Wherein, the light beam that described spectroscope is incident on described DMD for reflection, transmission is through described light path
Light beam after modulation module modulation；
Described second battery of lens is for assembling described spectroscopical transmitted light beam；
Described collimating lens is for carrying out collimation process by the light beam of convergence；
The collimated light beam dispersion after collimating of the described grating is line spectrum；
Described spectral detector is for detecting the described line spectrum formed；
Described processor, for being analyzed described line spectrum, recovers described testee according to compressed sensing algorithm
Confocal three-dimensional spectrum picture.
It is pointed out that optical fiber coupling LED, DMD, testee and collimating lens in the present embodiment
Front focus is in mutual conjugate position.
In the present embodiment, microscope can specifically use Guangdong, Guangzhou to show inverted fluorescence microscope, and this microscope includes thing
Mirror (20 times and 40 times), micro-object stage；DMD uses spatial light modulator discovery of Texas Instrument
4100, micro mirror number is 1024 × 768, and refreshing frequency is up to more than 20kHz；Range 500um of Z axis piezoelectric position moving stage, point
Resolution is 25nm, it is achieved high-precision Z-direction scans；EMCCD resolution is 128 × 128, face battle array a size of 3.072mm ×
3.072mm, spectral region is at 400-900nm.
A kind of detailed description of the invention of 2 confocal three-dimensional spectrum microscopic imaging devices provided by the present invention below in conjunction with the accompanying drawings
Schematic diagram the present invention is further elaborated on.
The light sent by optical fiber coupling LED, enters to DMD to spectroscope, dichroic mirror through the first battery of lens collimated incident
Row modulation, modulation reflection coupled to inside microscope through the 3rd battery of lens, reflecting mirror, focuses to the measured object of microscope carrier
Body, produces the confocal images of object, focuses on along backtracking and carry out secondary modulation on DMD, be incident to dispersion probe light afterwards
Road.
Its concrete work process includes:
(1) the optical fiber coupling light beam that sends of LED through the first battery of lens of input path and spectroscope at DMD
Upper focusing, is modulated DMD reflection modulation in light path simultaneously, focuses on testee, produces being total to of testee
Burnt image x；
(2) DMD carries out primary modulation according to loading two-dimensional random modulation image thereon to incident illumination, with
Time testee confocal images be modulated the 3rd battery of lens of light path, DMD focuses on, DMD
Confocal images is carried out first encoding modulation the most simultaneously；
In above formula, modulation matrix SkIn element representation kth time modulation corresponding DMD in miniature minute surface
Rollover states, its value is respectively 0 or 1；Numerical value 0 represents that miniature minute surface reflects light on baffle, and numerical value 1 represents micromirror
Face reflects light to receive on detector；M, n represent the image vertical direction of testee, horizontal direction pixel count respectively；
3) image after digital micro-mirror modulation, the second battery of lens in dispersion probe light path is assembled, and collimating lens is accurate
After the most parallel, collimated light beam becomes line spectrum through grating dispersion again；
4) spectrum is detected by EMCCD, obtains p wave band intensity signal λ of imagek1,λk2,…,λkp；
5) modulate, by k time, the data collected, according to the place confocal plane recovering testee of compressed sensing algorithm
Confocal images,
The two dimensional image x that this confocal plane of testee is original is recovered by greedy algorithm or convex optimized algorithm；
6) realize the movement of testee Z-direction by controlling Z axis piezoelectric position moving stage, obtain the two dimension of different focal planes
Image, adds the dispersion spectrum that detection obtains, just obtains three-dimensional space shape information and the spectral information of testee.
Compared with prior art, confocal three-dimensional spectrum microscopic imaging device provided by the present invention has the advantage that
(1) by the focus of collimating lens before optical fiber coupling LED, DMD, testee and detector
Phase conjugate, compared with the micro-imaging technique of wide field, eliminates the veiling glare impact on image, embodies confocal thought, carry mutually
High image contrast and definition；
(2) compressive sensing theory is incorporated in confocal three-dimensional spectrum micro-imaging, micro-with traditional confocal three-dimensional become
As technology is compared, it is not necessary to increase mechanical scanning mechanism, get final product tested recovery sample image, improve the same of system imaging signal to noise ratio
Time greatly reduce image sample data, save system resource and memory space, shorten imaging process further and measure the time；
(3) add spectrographic detection, while obtaining three-dimensional space shape information, it is possible to obtain spectral information simultaneously,
It is greatly enriched the quantity of information characterizing object, contributes to the comprehensively letter such as the form of object analysis, object structures, chemical composition
Breath, improves the accuracy of detection, has important practical value.
The confocal three-dimensional spectrum micro imaging method provided the embodiment of the present invention below is introduced, described below common
Burnt three-dimensional spectrum micro imaging method can be mutually to should refer to above-described confocal three-dimensional spectrum microscopic imaging device.
The flow chart of the confocal three-dimensional spectrum micro imaging method that Fig. 3 provides for the embodiment of the present invention, with reference to Fig. 3 confocal three
The process of dimension spectrum micro imaging method may include that
Step S1: light source emitting module outgoing the first light beam, the DMD in optical path modulation module is carried out instead
Penetrate modulation；
Step S2: the light beam after modulation focuses on testee, produces the confocal images of testee；
Step S3: described confocal images is back to after described DMD is modulated, enter through dispersion probe module
Line raster light splitting, forms spectrum picture；
Step S4: detect described spectrum picture, obtains the intensity signal of image；
Step S5: recover the confocal images of described testee place confocal plane according to compressed sensing algorithm.
On the basis of above-described embodiment, in confocal three-dimensional spectrum micro imaging method provided by the present invention, according to pressure
Contracting perception algorithm recover the confocal images of described testee place confocal plane process can particularly as follows:
The two dimensional image that testee place confocal plane is original is recovered by greedy algorithm or convex optimized algorithm.
As a kind of detailed description of the invention, in the embodiment of the present invention, DMD uses following formula to carry out coded modulation:
Wherein, modulation matrix SkIn element representation kth time modulate the miniature minute surface in corresponding described DMD
Rollover states, its value is respectively 0 or 1；Numerical value 0 represents that miniature minute surface reflects light on baffle, and numerical value 1 represents miniature
Minute surface reflects light to receive on detector；M, n represent the image vertical direction of testee, horizontal direction pixel count respectively.
On the basis of any of the above-described embodiment, confocal three-dimensional spectrum micro imaging method provided by the present invention is all right
Farther include:
Control the movement in Z-direction of the described testee by Z axis motion controller, obtain the two dimension of different focal planes
Image, the dispersion spectrum obtained in conjunction with detection, obtain three-dimensional space shape information and the spectral information of described testee.
In the present embodiment, carry out grating beam splitting described through dispersion probe module, all right before forming spectrum picture
Including:
After light beam after modulating is assembled through lens, and collimated lens collimate, it is thus achieved that collimated light beam.
Confocal three-dimensional spectrum micro imaging method provided by the present invention, by light source emitting module outgoing the first light beam,
DMD in optical path modulation module carries out reflection modulation；Light beam after modulation focuses on testee, produces
The confocal images of testee；Confocal images is back to after DMD is modulated, carry out light through dispersion probe module
Grid light splitting, forms spectrum picture；Spectrum picture is detected, obtains the intensity signal of image；Extensive according to compressed sensing algorithm
The confocal images of multiple testee place confocal plane.Confocal three-dimensional spectrum micro imaging method provided by the present invention, will pressure
Contracting perception theory is incorporated in confocal three-dimensional spectrum micro-imaging, compared with traditional confocal three-dimensional microscopy technology, it is not necessary to
Increase mechanical scanning mechanism, the image of sample can be recovered, greatly reduce while improving system imaging signal to noise ratio
Image sample data, has saved system resource and memory space, further shorten the measurement time of imaging process.
It addition, the application adds spectrographic detection, while obtaining three-dimensional space shape information, it is possible to obtain spectrum letter
Breath, is greatly enriched the quantity of information characterizing object, contributes to the form of object analysis, object structures, chemical composition etc. comprehensive
Information, improves the accuracy of detection, has important practical value.
In this specification, each embodiment uses the mode gone forward one by one to describe, and what each embodiment stressed is and other
The difference of embodiment, between each embodiment, same or similar part sees mutually.For filling disclosed in embodiment
For putting, owing to it corresponds to the method disclosed in Example, so describe is fairly simple, relevant part sees method part
Illustrate.
Professional further appreciates that, in conjunction with the unit of each example that the embodiments described herein describes
And algorithm steps, it is possible to electronic hardware, computer software or the two be implemented in combination in, in order to clearly demonstrate hardware and
The interchangeability of software, the most generally describes composition and the step of each example according to function.These
Function performs with hardware or software mode actually, depends on application-specific and the design constraint of technical scheme.Specialty
Technical staff specifically should can be used for using different methods to realize described function to each, but this realization should not
Think beyond the scope of this invention.
The method described in conjunction with the embodiments described herein or the step of algorithm can direct hardware, processor be held
The software module of row, or the combination of the two implements.Software module can be placed in random access memory (RAM), internal memory, read-only deposit
Reservoir (ROM), electrically programmable ROM, electrically erasable ROM, depositor, hard disk, moveable magnetic disc, CD-ROM or technology
In any other form of storage medium well known in field.
Above confocal three-dimensional spectrum micro imaging method provided by the present invention and device are described in detail.Herein
In apply specific case principle and the embodiment of the present invention be set forth, the explanation of above example is only intended to side
Assistant solves method and the core concept thereof of the present invention.It should be pointed out that, for those skilled in the art, not
On the premise of departing from the principle of the invention, it is also possible to the present invention is carried out some improvement and modification, these improve and modification also falls into
In the protection domain of the claims in the present invention.
Claims (10)
1. a confocal three-dimensional spectrum microscopic imaging device, it is characterised in that including:
Light source emitting module, optical path modulation module and dispersion probe module；
Wherein, described light source emitting module is used for outgoing the first light beam；
Described optical path modulation module includes DMD, for being modulated described first light beam, and to incident beam
Focusing on the confocal images produced on testee to be modulated, the light beam after modulation is incident to described dispersion probe module；
Described dispersion probe module carries out light splitting for the light beam after described modulation is incident to grating, to spectroscopically detectable,
And the confocal three-dimensional spectrum picture of described testee is recovered according to compressed sensing algorithm.
Confocal three-dimensional spectrum microscopic imaging device the most as claimed in claim 1, it is characterised in that described light source emitting module bag
Include optical fiber coupling LED and the first battery of lens；
Wherein, described optical fiber coupling LED is for launching the first incident beam；
Light beam after collimation, for collimating described first incident beam, is incident to described light path by described first battery of lens
Modulation module.
Confocal three-dimensional spectrum microscopic imaging device the most as claimed in claim 2, it is characterised in that described optical path modulation module is also
Including:
3rd battery of lens, microscope and Z axis motion controller；
Wherein, described 3rd battery of lens is for by described the most micro-for the incident beam focus after described DMD is modulated
On the testee of mirror, and the confocal images of described testee is focused on described DMD；
Described Z axis motion controller is used for controlling described testee and moves in Z-direction.
Confocal three-dimensional spectrum microscopic imaging device the most as claimed in claim 3, it is characterised in that described dispersion probe module bag
Include:
Spectroscope, the second battery of lens, collimating lens, grating, spectral detector and processor；
Wherein, the light beam that described spectroscope is incident on described DMD for reflection, transmission is through described optical path modulation
Light beam after module modulation；
Described second battery of lens is for assembling described spectroscopical transmitted light beam；
Described collimating lens is for carrying out collimation process by the light beam of convergence；
The collimated light beam dispersion after collimating of the described grating is line spectrum；
Described spectral detector is for detecting the described line spectrum formed；
Described processor, for being analyzed described line spectrum, recovers the confocal of described testee according to compressed sensing algorithm
Three-dimensional spectrum picture.
Confocal three-dimensional spectrum microscopic imaging device the most as claimed in claim 4, it is characterised in that described spectral detector is
EMCCD or spectrogrph.
6. a confocal three-dimensional spectrum micro imaging method, it is characterised in that including:
Light source emitting module outgoing the first light beam, the DMD in optical path modulation module carries out reflection modulation；
Light beam after modulation focuses on testee, produces the confocal images of testee；
Described confocal images is back to after described DMD is modulated, carry out grating beam splitting through dispersion probe module,
Form spectrum picture；
Described spectrum picture is detected, obtains the intensity signal of image；
The confocal images of described testee place confocal plane is recovered according to compressed sensing algorithm.
Confocal three-dimensional spectrum micro imaging method the most as claimed in claim 6, it is characterised in that described according to compressed sensing calculation
Method is recovered the confocal images of described testee place confocal plane and is included:
The two dimensional image that testee place confocal plane is original is recovered by greedy algorithm or convex optimized algorithm.
Confocal three-dimensional spectrum micro imaging method the most as claimed in claim 7, it is characterised in that described DMD is adopted
Coded modulation is carried out with following formula:
Wherein, modulation matrix SkIn element representation kth time modulate the upset of the miniature minute surface in corresponding described DMD
State, its value is respectively 0 or 1；Numerical value 0 represents that miniature minute surface reflects light on baffle, and numerical value 1 represents that miniature minute surface will
Luminous reflectance receives on detector；M, n represent the image vertical direction of testee, horizontal direction pixel count respectively.
9. the confocal three-dimensional spectrum micro imaging method as described in any one of claim 6 to 8, it is characterised in that also include:
Control the movement in Z-direction of the described testee by Z axis motion controller, obtain the X-Y scheme of different focal planes
Picture, the dispersion spectrum obtained in conjunction with detection, obtain three-dimensional space shape information and the spectral information of described testee.
Confocal three-dimensional spectrum micro imaging method the most as claimed in claim 9, it is characterised in that described through dispersion probe
Module carries out grating beam splitting, also includes before forming spectrum picture:
After light beam after modulating is assembled through lens, and collimated lens collimate, it is thus achieved that collimated light beam.
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| CN107202780A (en) * | 2017-04-28 | 2017-09-26 | 浙江大学 | A kind of super-resolution microscopic method and device based on speckle illumination |
| CN109187502A (en) * | 2018-11-13 | 2019-01-11 | 北京理工大学 | Postposition is divided pupil confocal laser LIBS spectrum micro imaging method and device |
| TWI653440B (en) | 2017-12-27 | 2019-03-11 | 國立臺灣大學 | Spectral-image correlation-based confocal profilometric system and method |
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| CN112505044A (en) * | 2020-11-26 | 2021-03-16 | 暨南大学 | Wide-field illumination confocal microscopic imaging system and method |
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| CN109964116A (en) * | 2016-11-30 | 2019-07-02 | 科磊股份有限公司 | The disfigurement discovery and formulation optimization of inspection for 3 D semiconductor structure |
| CN107202780A (en) * | 2017-04-28 | 2017-09-26 | 浙江大学 | A kind of super-resolution microscopic method and device based on speckle illumination |
| CN107202780B (en) * | 2017-04-28 | 2020-01-14 | 浙江大学 | Super-resolution microscopy method and device based on speckle illumination |
| TWI653440B (en) | 2017-12-27 | 2019-03-11 | 國立臺灣大學 | Spectral-image correlation-based confocal profilometric system and method |
| CN109187502A (en) * | 2018-11-13 | 2019-01-11 | 北京理工大学 | Postposition is divided pupil confocal laser LIBS spectrum micro imaging method and device |
| CN111721718A (en) * | 2020-06-29 | 2020-09-29 | 北京深测科技有限公司 | Spectral imaging method and system |
| CN111721718B (en) * | 2020-06-29 | 2023-09-01 | 北京深测科技有限公司 | Spectral imaging method and system |
| CN112505044A (en) * | 2020-11-26 | 2021-03-16 | 暨南大学 | Wide-field illumination confocal microscopic imaging system and method |
| WO2022155827A1 (en) * | 2021-01-21 | 2022-07-28 | 海伯森技术（深圳）有限公司 | Multi-channel spectral confocal measurement system and measurement method thereof |
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