WO2022155827A1 - Multi-channel spectral confocal measurement system and measurement method thereof - Google Patents

Abstract

A multi-channel spectral confocal measurement system, which uses a modular design. The entire system is divided into three modules: a spectral confocal probe, an optical fiber adapter module, and a controller module. There may be multiple spectral confocal probes, the optical fiber adapter module may include multiple optical fiber adapters, and one spectral confocal probe is correspondingly connected to one optical fiber adapter. Each component comprised in the three modules can be replaced independently. When any component fails and needs to be replaced, only the faulty component needs to be replaced and recalibration is performed, and there is no need to replace the entire system. Therefore, the interchangeability and maintainability of the system are greatly improved and maintenance costs are reduced. Further disclosed is a measurement method of a multi-channel spectral confocal measurement system.

Description

A multi-channel spectral confocal measurement system and its measurement method technical field

The invention relates to the technical field of high-precision measurement, in particular to a multi-channel spectral confocal measurement system and a measurement method thereof.

Background technique

Non-contact spectral confocal measurement technology is a new type of measurement technology with high precision. Spectral confocal measurement technology has quickly become a hot research topic due to its high measurement accuracy, high speed, and high real-time performance, which can be applied to different environments.

When the traditional multi-channel spectral confocal measurement system is in use, when there is a problem with one part of the entire system, the entire system needs to be replaced and re-calibrated, resulting in higher maintenance costs and time-consuming in actual use. It brings a lot of inconvenience to users.

Therefore, the prior art needs to be further improved.

technical problem

In view of the above-mentioned deficiencies in the prior art, the present invention provides a multi-channel spectral confocal measurement system and a measurement method thereof, which overcome the need for a spectral confocal measurement system in the prior art when a certain component fails. Overall replacement, resulting in high maintenance costs and time-consuming replacement of parts.

technical solutions

In a first aspect, this embodiment provides a multi-channel spectral confocal measurement system, which includes: at least one spectral confocal probe and a system integration chassis;

The spectral confocal probe includes a dispersive lens and a first optical fiber connection port;

The system integration chassis includes an optical fiber adapter module and a controller module;

The optical fiber transfer card module includes several optical fiber transfer cards;

The optical fiber adapter card comprises an optical fiber adapter board, a second optical fiber connection port, a third optical fiber connection port, a wide-spectrum light source and a spectroscope arranged on the optical fiber adapter board;

The controller module includes a line spectrometer, a fiber bundler and a data communication interface;

The optical fiber bundler is arranged on the front face of the line spectrometer; a third optical fiber connection port is arranged between the optical splitter and the optical fiber bundler;

An optical fiber connection line is connected between the first optical fiber connection port, the second optical fiber connection port, the optical splitter, the third optical fiber connection port and the line spectrometer;

The light beam emitted by the wide-spectrum light source enters the dispersive lens, and is dispersed by the dispersive lens to focus on the sample to be tested; the light reflected from the surface of the sample to be tested enters the optical fiber connecting line after passing through the dispersive lens, and is formed by The optical fiber connection line passes through the first optical fiber connection port, the second optical fiber connection port, the optical splitter, the third optical fiber connection port, and the optical fiber bundler in sequence, and is input to the line spectrometer;

The line spectrometer acquires the optical signal of the output light of each optical fiber connecting line in the optical fiber bundler, converts the acquired optical signal into an electrical signal, and transmits it to the processor through the data communication interface, so that the processing is performed. The device obtains the position information of the object to be measured according to the electrical signal.

Optionally, the first optical fiber connection port includes a first optical fiber connection seat, a first optical fiber connector, a second optical fiber connector, and a first optical fiber adapter arranged on the first optical fiber connection seat, and the The first optical fiber connector and the second optical fiber connector are symmetrically arranged on both sides of the first optical fiber adapter.

Optionally, the optical axis of the dispersive lens and the light-emitting end face of the optical fiber connection line in the first optical fiber connection port are at a preset first angle and/or the optical axis of the optical fiber connection seat and the dispersive lens is formed. There is a preset second angle, and the center point of the light-emitting end face is on the optical axis of the dispersive lens.

Optionally, a memory for storing background noise data and calibration data of the spectral confocal probe is provided on the optical fiber adapter board; the controller module is also provided with a microprocessor;

The microprocessor acquires the background noise data and calibration data of the spectral confocal probe stored in the memory, and transmits the background noise data and calibration data of the spectral confocal probe to the processor, so that The processor calibrates the parameters of the dispersive lens and calibrates the measurement results according to the acquired background noise data and calibration data.

Optionally, the optical fiber adapter card is provided with an electrical connector; the controller module is also provided with a bus adapter board connected to the microprocessor;

The electrical connectors of each of the optical fiber adapter cards are connected to the microprocessor through the bus adapter board;

The microprocessor obtains, through the electrical connector, the background noise data, calibration data and operating status information of each optical fiber adapter card of the spectral confocal probe stored in the memory of each optical fiber adapter card, and converts the background noise data, Calibration data and operating status information are transmitted to the processor.

Optionally, the controller module is further provided with a plurality of external device I/O interfaces for establishing connections with external devices.

Optionally, the wide-spectrum light source is an LED light source; an LED driving circuit is provided on the optical fiber adapter card, and the LED driving circuit is connected with the LED light source and is used to control the LED light source to emit light.

Optionally, the side edges of the LED light sources are provided with heat sinks for dissipating heat for the LED light sources.

Optionally, the system integration chassis is further provided with a chassis;

The chassis is provided with a card slot corresponding to the optical fiber adapter card, a socket corresponding to a data communication interface, and a socket corresponding to the external device I/O interface.

In the second aspect, this embodiment also provides a measurement method for a multi-channel spectral confocal measurement system, wherein, applied to the multi-channel spectral confocal measurement system as described above, the method includes:

Turn on the wide-spectrum light source, so that the beam emitted by the wide-spectrum light source passes through the beam splitter and then enters the dispersive lens;

The dispersive lens disperses the input light and focuses it on the surface of the tested sample;

The light reflected from the surface of the tested sample enters the optical fiber connecting line after passing through the dispersive lens, and the optical fiber connecting line passes through the first optical fiber connecting port, the second optical fiber connecting port, the optical splitter, the third optical fiber connecting port, and the optical fiber in sequence. a buncher, input to the line spectrometer;

The line spectrometer acquires the optical signal of the output light of each optical fiber connecting line in the optical fiber bundler, converts the acquired optical signal into an electrical signal, and transmits it to the processor through the data communication interface; The processor obtains the position information of the object to be measured according to the electrical signal.

beneficial effect

Compared with the prior art, the embodiment of the present invention has the following advantages:

According to the system and the measurement method provided by the embodiment of the present invention, the whole system is divided into three parts: a spectral confocal probe, an optical fiber adapter module and a controller module by adopting a modular design; wherein, the spectral confocal probe can be Multiple, the fiber optic adapter module can contain multiple fiber optic adapter cards, and one spectral confocal probe is correspondingly connected to one fiber optic adapter card. Each component contained in the above three parts can be replaced independently. When any one of the components fails and needs to be replaced, only the faulty component needs to be replaced and re-calibrated, and the entire system does not need to be replaced. Therefore, The spectral confocal measurement system disclosed in this embodiment greatly improves the interchangeability and maintainability of the system, and reduces the maintenance cost.

Description of drawings

In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments described in the present invention. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings without any creative effort.

1 is a schematic structural diagram of a multi-channel spectral confocal measurement system in an embodiment of the present invention;

2 is a schematic structural diagram of a spectral confocal probe in an embodiment of the present invention;

3a is a schematic structural diagram of a first implementation manner of a first optical fiber connection port in an embodiment of the present invention;

3b is a schematic structural diagram of a second implementation manner of the first optical fiber connection port in the embodiment of the present invention;

3c is a schematic structural diagram of a third implementation of the first optical fiber connection port in the embodiment of the present invention;

4 is a schematic structural diagram of an optical fiber adapter module in an embodiment of the present invention;

5 is a schematic diagram of light beam propagation on an optical fiber adapter module in an embodiment of the present invention;

6 is a schematic structural diagram of a controller model in an embodiment of the present invention;

7 is a schematic diagram of a connection relationship between a third optical fiber connection port and an optical fiber bundler in an embodiment of the present invention;

Fig. 8a is the receiving spectrum curve of the measurement system in the embodiment of the present invention without eliminating the background noise;

Fig. 8b is the background noise when the measurement system is in a defocused state in the embodiment of the present invention;

Fig. 8c is the light curve received after the measurement system eliminates the background noise in the embodiment of the present invention;

9 is a schematic diagram of the overall appearance structure of a multi-channel spectral confocal measurement system in an embodiment of the present invention;

10 is a schematic diagram of the front structure of the chassis in the embodiment of the present invention;

11 is a schematic diagram of the structure of the back of the chassis in the embodiment of the present invention;

FIG. 12 is a flow chart of the steps of the measurement method in the embodiment of the present invention.

Embodiments of the present invention

Detailed ways

In order to make the objectives, technical solutions and advantages of the present invention clearer and clearer, the present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.

This embodiment provides a multi-channel spectral confocal measurement system, as shown in FIG. 1 , including: at least one spectral confocal probe and a system integration chassis; the system integration chassis includes an optical fiber adapter module and a controller module; The optical fiber transfer card module includes several optical fiber transfer cards, and a spectral confocal probe is connected with an optical fiber transfer card through an optical fiber connecting line.

The spectral confocal probe includes a dispersive lens and a first optical fiber connection port; the first optical fiber connection port is used to connect to one end of an optical fiber connection line, and the other end of the optical fiber connection line is connected to the optical fiber adapter card to establish The optical fiber connection between the spectral confocal probe and the optical fiber adapter card.

Further, the optical fiber adapter card includes an optical fiber adapter board, a second optical fiber connection port, a third optical fiber connection port, a wide-spectrum light source and a spectroscope arranged on the optical fiber adapter board; the controller module Includes line spectrometer, fiber bundler and data communication interface.

The optical fiber bundler is arranged on the front face of the line spectrometer; a third optical fiber connection port is arranged between the optical splitter and the optical fiber bundler; the first optical fiber connection port, the second optical fiber connection port, the optical fiber A fiber optic cable is connected between the device, the third optical fiber connection port and the line spectrometer; therefore, the connection between the optical fiber adapter module and the controller module is established through an optical fiber cable, and one end of the optical fiber cable is connected to the third On the optical fiber connection port, the other end of the optical fiber connection cable is connected to the optical fiber bundle of the controller module. Since each optical fiber adapter module contains multiple optical fiber adapter cards, the third fiber connection on each fiber adapter card is connected. The optical fiber connecting lines connected from the ports are closely arranged on the optical fiber bundler, and the optical fiber bundler is connected with the line spectrometer, and the optical signal output by the optical fiber connecting line is input to the line spectrometer.

Further, the wide-spectrum light source is an LED light source, or other light sources that can emit a wide-spectrum light source, such as: a light source assembly composed of a laser and a fluorescent material layer, when the laser excites the fluorescent material on the fluorescent material layer to emit a wide-spectrum light beam. . The left side of the optical splitter is provided with an optical fiber connecting line interface, which is used to connect the optical fiber connecting line connected with the second optical fiber connecting port, and the left side of the optical splitter is provided with two optical fiber connecting line interfaces, one for connecting To the broad-spectrum light source, the other is connected to the third fiber connection port.

The light emitted by the LED light source is coupled into the optical fiber connecting line in front of it, and is transmitted to the optical splitter through the optical fiber connecting line. The optical fiber connecting line is introduced into the dispersive lens, and the dispersive lens is dispersive and focused on the surface of the sample to be tested. The light focused on the surface of the sample to be tested, after being reflected by the surface of the sample to be tested, is coupled to the optical fiber connection line port in the first optical fiber connection port, and passes through the first optical fiber connection port and the second optical fiber in sequence. Connection port, optical splitter, third fiber connection port, fiber bundler, input to the line spectrometer.

The line spectrometer acquires the optical signal of the output light of each optical fiber connecting line in the optical fiber bundler, converts the acquired optical signal into an electrical signal, and transmits it to the processor through the data communication interface; The processor obtains the position information of the object to be measured according to the electrical signal.

Further, as shown in FIG. 2 , the dispersive lens 201 is arranged corresponding to the first optical fiber connection port, and the first optical fiber connection port includes a first optical fiber connection seat 205 , which is arranged on the first optical fiber connection seat 205 . The first optical fiber connector 204, the second optical fiber connector, and the first optical fiber adapter on the upper side, the optical axis of the dispersive lens 201 and the light-emitting end face 202 of the optical fiber connecting line 203 in the first optical fiber connection port are at a preset angle, and the center point of the light-emitting end face 202 is in the light of the dispersive lens 201 on the axis.

Further, the inner core size of the optical fiber connection line in the first optical fiber connection port has a direct relationship with the strength of the received optical signal, and the resolution of the imaging corresponding to the optical signal received by the line spectrometer, etc., The larger the inner core of the fiber optic cable, the greater the intensity of the optical signal received by the measurement system and the larger the light spot presented, but the resolution of the measurement system will be reduced. On the contrary, the smaller the inner core of the fiber optic cable, the greater the measurement The smaller the intensity of the optical signal received by the system and the smaller the light spot presented, the higher the resolution of the measurement system. Therefore, in order to take into account the intensity of the received optical signal and the resolution of the measurement system, the inner core size of the fiber optic cable is set at 5um to 100um.

Considering that the characteristics of the light-emitting end face of the optical fiber connecting line directly affect the light intensity distribution of the light emitted from the optical fiber connecting line, in this embodiment, the mirror surface of the light-emitting end face is also polished to make the spatial light intensity distribution of the light emitted from the light-emitting end face more uniform. Preferably, an optical fiber cable with an inner core of 20um is selected, and mirror polishing is performed on the light-emitting end face, so as to better meet the requirements of the spectral confocal measurement system.

Further, if the light-emitting end face of the optical fiber connecting line faces the chromatic dispersive lens, more stray light will be reflected from the chromatic dispersive lens. Because the single-point spectral confocal probe only images the on-axis point, it is only necessary to ensure that the center point of the fiber optic cable is on the optical axis. Therefore, the light-emitting end face of the fiber optic cable is inclined at a certain angle to the optical axis and will not cause imaging of the on-axis point. Influence, when the light-emitting end face of the optical fiber connecting line is inclined to the optical axis, it can reduce the oblique incidence of light from other object points to the light-emitting end face of the optical fiber connecting line, so it can reduce the reflected stray light from entering the beam splitter and entering the line spectrometer, so as to effectively Reduce the stray light reflected by the dispersive lens and improve the signal-to-noise ratio of the measurement system.

In this embodiment, the optical fiber connecting line holder and the optical fiber connecting line in the spectral confocal probe are arranged in such a way that the optical axis of the dispersive lens and the light-emitting end face of the optical fiber connecting line in the first optical fiber connecting port are in a preset first An angle and/or a predetermined second angle between the optical fiber connection base and the optical axis of the dispersive lens, and the center point of the light-emitting end face is on the optical axis of the dispersive lens. Specifically, it is divided into the following three situations:

As shown in Figure 3a, the normal line of the light exit end face of the optical fiber connecting line is inclined by a small angle with the optical axis of the dispersive lens, which is called

, preferably, set the preset angle

It is 4° to 16°, that is, the light-emitting end face of the optical fiber connecting line is set to be inclined; or as shown in Figure 3b, the optical fiber connecting seat is installed obliquely, that is, the normal line of the horizontal end face of the optical fiber connecting seat and the optical axis form a preset angle, called

,

The angle ranges from 2° to 8°. Alternatively, the light-emitting end face of the optical fiber connecting line can be set as an inclined plane by the combination of the above-mentioned Fig. 3a and Fig. 3b, and at the same time, the optical fiber connecting seat is installed at an incline, so that the normal line of the horizontal end face of the optical fiber connecting seat and the optical axis form a preset angle, Finally, the angle between the normal of the light-emitting end face of the optical fiber connecting line and the optical axis is

and

Sum.

The above three methods all need to satisfy that the center point of the light-emitting end face of the optical fiber connecting line is on the optical axis. In this way, the stray light reflected from the dispersive lens can be effectively reduced, the background noise can be reduced, and the signal-to-noise ratio of the system can be improved.

As shown in FIG. 4 , the optical fiber adapter card module includes a plurality of optical fiber adapter cards, and one spectral confocal probe is connected to one optical fiber adapter card. Preferably, four spectral confocal probes are used corresponding to four Fiber optic adapter. The main body of the optical fiber adapter card is the optical adapter card with preset specifications, and its specifications are generally 200mm*100mm. The optical fiber adapter board is integrated with the second optical fiber connection port 403, the optical splitter 402, the LED light source 401, the memory 404, the indicator light 409, the button 408, the LED driving circuit 4011 and other components. The second optical fiber connection port 403 includes a second optical fiber adapter, a second optical fiber adapter, a third optical fiber connector, and a fourth optical fiber connector.

Specifically, a connection is established between the first optical fiber connection port and the second optical fiber connection port 403 through a first optical fiber connection line 410. One end of the first optical fiber connection line 410 is connected to the first optical fiber connection port, and the other end is connected to the first optical fiber connection port. Two optical fiber connection ports 403, the second optical fiber connection port 403 includes an optical fiber connection base and a second optical fiber adapter fixed on the optical fiber connection base, and the third optical fiber connectors 4031 and 4031 fixed on both ends of the optical fiber adapter For the fourth optical fiber connector, the first optical fiber connecting line 410 is connected to the third optical fiber connector 4031 .

One end of the second optical fiber connection port 403 is connected to the first optical fiber connection port, and the other end is connected to the optical splitter 402 . The left front end of the optical splitter 402 has an optical fiber connection line interface, and the right front end has two optical fiber connection line interfaces. Among the interfaces of the two optical fiber connecting lines located at the right front end, one interface is connected to the LED light source through the optical fiber connecting line, and the other interface is connected to the third optical fiber connecting port 405 through the optical fiber connecting line. The optical splitter 402 can be connected to a Y-shaped optical fiber connection line or other, and the preferred solution is to use a Y-shaped optical fiber. A third optical fiber connection port 405 is provided on the right side of the optical splitter 402, the optical splitter 402 and the third optical fiber connection port 405 are connected by an optical fiber connection line, and the third optical fiber connection port 405 is bundled with the optical fiber of the controller module. The devices are also connected by fiber optic cables.

The back of the LED light source is close to the heat sink, so that the heat generated by the LED light source can be dissipated in time, effectively reducing the working temperature of the optical fiber adapter board, preventing the temperature of the fiber optic adapter card from being too high, and increasing the stability of the fiber optic adapter card. The optical fiber adapter card is also provided with an LED driving circuit for controlling the LED light-emitting.

At the same time, there is a non-volatile memory on the optical fiber adapter card. The non-volatile memory type can be EPROM or Flash Memory, which stores the background noise information of the system and the calibration parameter information of the spectral confocal probe;

Specifically, as shown in Figure 5, the light emitted from the LED light source is coupled into the optical fiber connecting line, and the light coupled into the optical fiber connecting line is input into the dispersive lens through the optical splitter and the optical fiber adapter. The light is focused on the surface of the sample to be tested, and after the light focused on the surface of the sample to be tested is reflected, it is coupled into the optical fiber connecting line, and is transmitted to the line spectrometer through the spectroscope. The optical splitter is the transmission hub of the optical signal, and the optical signal reflected from the sample to be tested enters the line spectrometer through another optical fiber connection line.

4 and 6, the optical fiber adapter board is provided with a memory for storing the background noise data and calibration data of the spectral confocal probe, and the controller module is also provided with a microprocessor;

The microprocessor acquires the background noise data and calibration data of the spectral confocal probe stored in the memory, and transmits the background noise data and calibration data of the spectral confocal probe to the processor, so that the The processor calibrates the parameters of the dispersive lens and calibrates the measurement results according to the acquired background noise data and calibration data.

The memory is used to store the background noise data of the spectral confocal probe, the calibrated calibration data such as the range of the spectral confocal probe, the use band range, the wavelength shift correspondence, etc. It is a non-volatile memory, which can be EPROM or Flash storage media. Since the above-mentioned data is stored in the memory, when the measurement system is in working state, the spectral confocal probe or the optical fiber adapter card in one or more channels can be hot-swapped independently without affecting other channels. Therefore, the interchangeability and maintainability of the measuring system are improved, and the maintenance cost is reduced.

The memory is connected with the microprocessor provided on the controller module, and the microprocessor acquires the background noise data and calibration data saved in the memory, and transmits the acquired background noise data and calibration data to the processor. After acquiring the above data information, the processor performs noise elimination and calibration processing on the measurement system according to the data information.

Figure 8a shows the optical signal curve collected by the line spectrometer when the measurement system does not eliminate the background noise. When the system does not perform background noise correction, because the received signal is mixed with background noise, the spectral curve received by the detector is wider, and it is not easy to distinguish its peak wavelength. Figure 8b shows the optical signal curve collected by the line spectrometer when the measurement system is in a defocused state and the collected signal data is zeroed; when the system is in a defocused state, that is, there is no sample to be measured within the range of the spectral confocal probe, When there is no light signal reflected back to the system, the CCD or CMOS photosensitive device receives the background noise of the system, and the light intensity of each wavelength is low but not zero. As shown in Figure 8c, the system reads the background noise and removes the background noise data. The optical signal curve collected by the line spectrometer, after the background noise is deducted by the system, the spectral curve received by the CCD or CMOS photosensitive device is different from the undetected spectral curve. Compared with the background noise, the curve becomes sharper and the peak value is more prominent, which can better identify the peak wavelength, and the signal-to-noise ratio is higher, which ensures the measurement accuracy of the system.

With reference to FIG. 4 , several indicator lights 409 , buttons 408 and electrical connectors are also provided on the optical fiber adapter card. The indicator light 409 expresses whether the optical fiber adapter card is powered on and whether it is working normally. For example, if the optical fiber adapter card is powered on and in normal operation, the indicator light is green, and if it is powered on but in an abnormal working state, it indicates The light is red. The buttons 408 include an initialization button, a reset button, a button for eliminating background noise, and the like. Among them, the initialization button restores the calibration data of the dispersive lens corresponding to the optical fiber adapter card to the factory value; the zero button defines the current measurement point as the zero point; the cancel background noise button is used to record the dispersive lens in the defocused state, the dispersive lens and the background noise reflected from the fiber optic cable; the number and function of other buttons are determined according to specific needs.

Further, the optical fiber adapter card is provided with an electrical connector; the controller module is also provided with a bus adapter board connected to the microprocessor; the bus adapter board is connected to a power supply and is a measurement system. powered by.

At least one electrical connector is arranged in each optical fiber adapter card, a bus adapter board is arranged in the controller module, and the electrical connector is connected to the bus adapter board.

The microprocessor obtains the background noise data and calibration data of the spectral confocal probe stored in the memory of each optical fiber adapter card and the operating status information of each optical fiber adapter card through the electrical connector, and combines the background noise data, Calibration data and operating status information are transmitted to the processor. Since the information on each fiber optic adapter card is collected by the microprocessor and transmitted to the processor, there is no delay in the information transmission time between different fiber optic adapter cards, ensuring that the controller module is connected to multiple fiber optic adapters. Synchronization of multi-channel acquisition information between cards. Since multiple spectral confocal probes may measure the sample passing through the measured sample at the same time, the higher the synchronization of the information collected by each spectral confocal probe, the more accurate the final measured data.

Since the components on the fiber optic adapter card are integrated and set up in a modular design, when a certain component fails, only the component needs to be replaced, thereby improving the convenience, practicability and space utilization of the entire system.

Further, the controller module is provided with a fiber bundler, a line spectrometer, a data communication interface, a bus adapter board, a microprocessor, a chassis, and the like.

4, the third optical fiber connection port 405 in each optical fiber adapter module is connected with a fifth optical fiber connection line 412, one end of the fifth optical fiber connection line is connected with the third optical fiber connection port 405, and the other end is connected with the third optical fiber connection port 405. Connected to the optical fiber concentrator, the third optical fiber connecting lines 412 of all optical fiber adapter cards are integrated into the optical fiber concentrator. The connection method is shown in FIG. 7 , one end of each fifth optical fiber connecting line 412 is arranged and connected to the optical fiber bundler, and the effective length of the optical fiber bundler is at least the size of the optical fiber end face multiplied by the number of optical fiber adapter cards, and its length is Between 200um and 5000um, preferably, a 500um*100um fiber bundler is used in this embodiment. The optical fiber bundler closely arranges the fifth optical fiber connecting lines 412 and connects to the line spectrometer, the line spectrometer adopts an area array CCD or a CMOS detector, and the line spectrometer is connected to the processor through a data communication interface. The processor may be a PC. All optical fiber adapter cards are connected to the bus adapter board through electrical connectors, and the bus adapter board is connected to the power supply and the microprocessor; one end of the microprocessor is connected to the processor through the data communication interface, and the other end can also be connected to the external device I/ The O interface connects external electronic devices.

As shown in FIG. 9 , the optical fiber adapter module and the controller module are integrated and placed in the chassis of the system integration chassis. As shown in FIG. 10 and FIG. 11 , the chassis is provided with a plurality of second optical fibers of the optical fiber connection card. The card slot 104 of the connection port, the card slot 104 is provided with an indicator light 101, a button 102 and an optical fiber interface 103, and the first optical fiber connecting line on the spectral confocal probe is connected to the optical fiber through the optical fiber interface 103 The second optical fiber connection port of the connection card is connected. The panel of the chassis is also provided with a number of data communication interfaces 105, a number of external device I/O interfaces 108, a power switch 107 and a power indicator light 106. The size of the chassis is based on the number and structural requirements of the optical fiber adapter cards. It was decided that the range of the structure size is: 200mm*100mm*100mm to 800mm*600mm*600mm. As shown in FIG. 11 , there are power cable ports 1101 and ventilation holes 1102 on the back of the chassis.

The measurement system provided by the invention solves the shortcomings of the previous multi-channel single-point spectral confocal scheme, such as poor multi-channel synchronization, high update and maintenance costs, and background noise. A multi-channel spectral confocal system solution with good channel synchronization, high integration and high signal-to-noise ratio.

On the basis of the above measurement system, this embodiment also proposes a measurement method of a multi-channel spectral confocal measurement system, as shown in FIG. 12 , the measurement method is applied to the multi-channel spectral confocal measurement as described above. system, including:

Step S1, turning on the wide-spectrum light source, so that the light beam emitted by the wide-spectrum light source passes through the spectroscope and then is introduced into the dispersive lens;

Step S2, the dispersive lens disperses the input light and focuses it on the surface of the tested sample;

Step S3, the light reflected from the surface of the tested sample enters the optical fiber connecting line after passing through the dispersive lens, and the optical fiber connecting line passes through the first optical fiber connection port, the second optical fiber connection port, the optical splitter, and the third optical fiber connection in sequence. ports, fiber bundlers, inputs to the line spectrometer;

Step S4, the line spectrometer acquires the optical signal of the output light of each optical fiber connecting line in the optical fiber bundler, converts the acquired optical signal into an electrical signal, and transmits it to the processor through the data communication interface; The processor is made to obtain the position information of the object to be measured according to the electrical signal.

The spectral confocal measurement system and its measurement method provided by the present invention have the following advantages:

1. In this embodiment, the normal line of the light-emitting end face of the optical fiber connecting line corresponding to the dispersive lens and the optical axis are inclined by a small angle, and the normal line of the optical fiber connection seat and the optical axis are inclined by a small angle to reduce the background noise of the system; The background noise cancellation button on the top records the background noise of the channel when the system is out of focus and writes it to the non-volatile memory on the fiber optic adapter card. During normal measurement, the background noise data in the non-volatile memory is read. And deducted, thereby eliminating the influence of background noise on the measurement results and improving the signal-to-noise ratio of the system.

2. The present invention adopts a modular design; the whole system is divided into three parts: a spectral confocal probe, an optical fiber adapter module, and a controller module. All three parts can be replaced independently. The faulty parts are replaced instead of the whole, so the interchangeability and maintainability of the system are greatly improved, and the maintenance cost is reduced.

3. The present invention adopts a hot-swap design, and each optical fiber adapter card contains a non-volatile memory, and the memory stores the calibration parameter information of the system and the spectral confocal probe. The spectral confocal probe and fiber adapter card of one or more channels can be hot-swapped separately, that is, when the system needs to update or replace the components of one or several channels under the working state, the components of the corresponding channel can be directly replaced. Replacement without affecting the operation of other channel components.

4. The present invention adopts a multi-channel design, and can use more than two different single-point spectral confocal probes to measure at the same time. Multiple different positions can be measured simultaneously, which improves the efficiency of the single-point spectral confocal measurement system and expands the use range of the spectral confocal measurement system.

It should be understood that the present invention is not limited to the precise structures described above and illustrated in the accompanying drawings, and that various modifications and changes may be made without departing from its scope. The scope of the present invention is limited only by the appended claims

The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection of the present invention. within the range.

Claims (10)

1. A multi-channel spectral confocal measurement system, comprising: at least one spectral confocal probe and a system integration chassis;

   The spectral confocal probe includes a dispersive lens and a first optical fiber connection port;

   The system integration chassis includes an optical fiber adapter module and a controller module;

   The optical fiber transfer card module includes several optical fiber transfer cards;

   The optical fiber adapter card includes an optical fiber adapter board, a second optical fiber connection port disposed on the optical fiber adapter board, a wide-spectrum light source, and a spectroscope;

   The controller module includes a line spectrometer, a fiber bundler and a data communication interface;

   The optical fiber bundler is arranged on the front face of the line spectrometer; a third optical fiber connection port is arranged between the optical splitter and the optical fiber bundler;

   An optical fiber connection line is connected between the first optical fiber connection port, the second optical fiber connection port, the optical splitter, the third optical fiber connection port and the line spectrometer;

   The light beam emitted by the wide-spectrum light source enters the dispersive lens, and is dispersed by the dispersive lens to focus on the sample to be tested; the light reflected from the surface of the sample to be tested enters the optical fiber connecting line after passing through the dispersive lens, and is formed by The optical fiber connection line passes through the first optical fiber connection port, the second optical fiber connection port, the optical splitter, the third optical fiber connection port, and the optical fiber bundler in sequence, and is input to the line spectrometer;

   The line spectrometer acquires the optical signal of the output light of each optical fiber connecting line in the optical fiber bundler, converts the acquired optical signal into an electrical signal, and transmits it to the processor through the data communication interface, so that the The processor obtains the position information of the object to be measured according to the electrical signal.
2. The multi-channel spectral confocal measurement system according to claim 1, wherein the first optical fiber connection port comprises a first optical fiber connection seat, a first optical fiber connector disposed on the first optical fiber connection seat, A second optical fiber connector and a first optical fiber adapter, the first optical fiber connector and the second optical fiber connector are symmetrically arranged on both sides of the first optical fiber adapter.
3. The multi-channel spectral confocal measurement system according to claim 2, wherein the optical axis of the dispersive lens and the light-emitting end face of the optical fiber connection line in the first optical fiber connection port are at a preset first angle and/or Or a predetermined second angle is formed between the optical fiber connection base and the optical axis of the dispersive lens, and the center point of the light-emitting end face is on the optical axis of the dispersive lens.
4. The multi-channel spectral confocal measurement system according to claim 1, wherein a memory for storing background noise data and calibration data of the spectral confocal probe is provided on the optical fiber adapter board; the control The device module is also provided with a microprocessor;

   The microprocessor acquires the background noise data and calibration data of the spectral confocal probe stored in the memory, and transmits the background noise data and calibration data of the spectral confocal probe to the processor, so that The processor calibrates the parameters of the dispersive lens and calibrates the measurement results according to the acquired background noise data and calibration data.
5. The multi-channel spectral confocal measurement system according to claim 4, wherein the optical fiber adapter card is provided with an electrical connector; the controller module is further provided with a bus connected to the microprocessor transfer board;

   The electrical connectors of each of the optical fiber adapter cards are connected to the microprocessor through the bus adapter board;

   The microprocessor obtains, through the electrical connector, the background noise data, calibration data and operating status information of each optical fiber adapter card of the spectral confocal probe stored in the memory of each optical fiber adapter card, and converts the background noise data, Calibration data and operating status information are transmitted to the processor.
6. The multi-channel spectral confocal measurement system according to claim 1, wherein the controller module is further provided with a plurality of external device I/O interfaces for establishing connections with external devices.
7. The multi-channel spectral confocal measurement system according to claim 1, wherein the wide-spectrum light source is an LED light source; an LED driving circuit is provided on the optical fiber adapter card, and the LED driving circuit is connected to the LED light source. The light source is connected to control the LED light source to emit light.
8. The multi-channel spectral confocal measurement system according to claim 1, wherein a heat sink is provided on the side of the LED light source to dissipate heat for the LED light source.
9. The multi-channel spectral confocal measurement system according to claim 6, wherein the system integration chassis is further provided with a chassis;

   The chassis is provided with a card slot corresponding to the optical fiber adapter card, a socket corresponding to a data communication interface, and a socket corresponding to the external device I/O interface.
10. A method for measuring a multi-channel spectral confocal measurement system, characterized in that, applied to the multi-channel spectral confocal measurement system as claimed in any one of claims 1-9, comprising:

    placing the sample to be tested under the spectral confocal probe;

    Turn on the wide-spectrum light source, so that the beam emitted by the wide-spectrum light source enters the dispersive lens after passing through the beam splitter;

    The dispersive lens disperses the input light and focuses it on the surface of the tested sample;

    The light reflected from the surface of the tested sample enters the optical fiber connecting line after passing through the dispersive lens, and the optical fiber connecting line passes through the first optical fiber connecting port, the second optical fiber connecting port, the optical splitter, the third optical fiber connecting port, and the optical fiber in sequence. a buncher, input to the line spectrometer;

    The line spectrometer acquires the optical signal of the output light of each optical fiber connecting line in the optical fiber bundler, converts the acquired optical signal into an electrical signal, and transmits it to the processor through the data communication interface; The processor obtains the position information of the object to be measured according to the electrical signal.