CN105737986A - Multifunctional microscopic confocal spectrometer - Google Patents
Multifunctional microscopic confocal spectrometer Download PDFInfo
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- CN105737986A CN105737986A CN201610298186.2A CN201610298186A CN105737986A CN 105737986 A CN105737986 A CN 105737986A CN 201610298186 A CN201610298186 A CN 201610298186A CN 105737986 A CN105737986 A CN 105737986A
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- 238000001069 Raman spectroscopy Methods 0.000 claims abstract description 13
- 238000005286 illumination Methods 0.000 claims abstract description 9
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 30
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- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical group [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 claims description 4
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- 238000000103 photoluminescence spectrum Methods 0.000 description 5
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- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 3
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
- G01J3/4412—Scattering spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
Abstract
The invention discloses a multifunctional microscopic confocal spectrometer. The multifunctional microscopic confocal spectrometer comprises a laser module, an optical path coupling and output main module, an illumination observation module, a microscopic module and a signal detection module, wherein the optical path coupling and output main module and the illumination observation module share one base, the laser module is fixed on the rear side surface of the base, the microscopic module is fixed on the front side surface of the base, and the signal detection module is fixed on the right side surface of the base. According to the invention, microscopic observation of samples of corresponding laser spots is realized, the microscopic confocal test of a sample Raman signal and a photoluminescence signal can be conveniently carried out, and the multifunctional microscopic confocal spectrometer is simple in structure, good in stability, convenient to adjust and convenient to expand.
Description
Technical field
The present invention relates to microspectrograph technical field, be specifically related to have low-cost advantage and be easy to the multi-functional micro-confocal spectroscopic instrument of one of extension.
Background technology
Existing micro confocal spectrogrph is integrated with laser instrument, microscope, confocal pinhole, grating and detector, as shown in Figure 1.In these business-like micro confocal spectrogrphs, grating and detector integrate with micro confocal light path and cannot separate so that function inconvenience extends.Further, whole system integrated makes the use cost of spectrogrph very high, for instance on market, the price of medium-sized commercialization micro confocal spectrogrph is much more expensive.
Additionally, for micro confocal spectrogrph, how to make LASER SPECKLE consistent with confocal pinhole picture point on sample, it is able to measure spectrum and improve the key of spectrogrph signal to noise ratio.Meanwhile, the optical through-hole of microcobjective is very little, and how making laser can incide sample collimatedly is also very important problem.Along with spectrometer system integrated level is more and more higher, the automaticity of spectrogrph also gradually steps up, to such an extent as to the switching of various lasers, choosing of optical filter, all full automations such as the configuration of detector outlet.The raising of automatization makes user, and operation is very easy, but instrument stability under the state of working long hours is proposed significantly high requirement by the full-automation of critical optical elements.This just requires that all optical elements all must be controlled by computer, and once certain optical element performance goes wrong or damaged, the light path changing this optical element collimated light spectrometer will bother very much.
In test process, because the needs of various scientific experimentss, people are inevitably intended to micro confocal spectrogrph and add laser instrument, including ultraviolet and near infrared laser instrument, this is accomplished by adding more optical element in light path or changing the optical filter corresponding with newly added optical maser wavelength and other optical element, but a lot of optical elements of full-automatic spectrum instrument are all fixing, are changing or adding optical element by very inconvenient.It addition, in test process, it is also possible to need to change the microcobjective of different multiples and operating distance.Change or add any element of micro confocal spectrogrph, all must again light path be collimated in principle, but, in the case, full-automatic spectrum instrument is all difficult to laser and signal light path are carried out confocal collimation adjustment.
Existing micro confocal spectrogrph exports general lack of the detector of two or more (containing two) so that when the spectral signal of the different test scope of test, it has to need the spectrogrph of more than two.
Accordingly, as a multi-functional micro confocal spectrometer, changing how to realize quick beam path alignment in a lot of optical element situation, full-automatic spectrometer is difficulty with.Additionally, for to realize arbitrarily adding additional laser line for micro confocal spectrogrph, and when configuring corresponding optical element and optical filter, also to realize the quick collimation of laser light incident light path and signal light path, and quickly select three the even detector of more than four exports and carry out collimating these purposes, design and inventive structure stable, light path design reasonably, the convenient micro confocal spectrogrph of manual collimation is necessary.
Summary of the invention
(1) to solve the technical problem that
Present invention is primarily targeted at and provide a kind of cost low, easy and simple to handle and the rational multi-functional micro-confocal spectroscopic instrument of light path arrangement.
(2) technical scheme
For reaching above-mentioned purpose, the invention provides a kind of multi-functional micro-confocal spectroscopic instrument, this multi-functional micro-confocal spectroscopic instrument includes laser module, light path coupling and output primary module, illuminating watches module, micro-module and signal detection module；Wherein, the coupling of this light path shares same pedestal with output primary module, both illuminating watches modules, and laser module is fixed on this pedestal trailing flank, and micro-module is fixed on this pedestal leading flank, and signal detection module is fixed on the right flank of this pedestal.
In such scheme, this laser module at least includes a laser instrument LS1 and lifter SM1；The coupling of this light path includes optical filter OFT, at least 3 mirror M 1, M2 and M5, at least one plus lens LNS1, and at least one output window W1 with output primary module；This illuminating watches module includes broad-spectrum light source WL, the first beam splitter BS1, the second beam splitter BS2, the 4th plus lens LNS4, photographing unit CMR and mirror M 45；This micro-module includes microcobjective OBJ and focussing mechanism thereof；This signal detection module includes grating spectrograph GSPY and control system thereof；Wherein, the laser of the laser instrument LS1 outgoing being fixed in the laser module of pedestal trailing flank first boosted device SM1 carries out promoting and enter light path coupling and output primary module, in the mirror M 1 that laser light incident after lifting couples to light path and exports in primary module, it is re-reflected in mirror M 2 via mirror M 1, via the laser light incident of mirror M 2 reflection on optical filter OFT；Laser after optical filter OFT reflects glancing incidence in illuminating watches module horizontal by 45 degree of tilted-putted mirror M 45, micro-module it is incident to straight down, through the microcobjective OBJ focusing illumination of micro-module on sample SMP after being reflected mirror M45 reflection；Microcobjective OBJ collects from the laser-bounce light straight up of sample SMP and scattered signal light, is reflected after mirror M45 reflection glancing incidence to optical filter OFT；Laser-bounce light is filtered and decays to only original 1/10 by optical filter OFT6To 1/1012, and it is incident to mirror M 5 after making the scattered signal light transmission optical filter OFT of the overwhelming majority；Mirror M 5 will transmit through after the scattered signal luminous reflectance of this optical filter OFT through aperture HL, is irradiated on plus lens LNS1, via the plus lens LNS1 scattered signal light converged through output window W1；It is input to signal detection module from the scattered signal light of output window W1 output and carries out confocal signal detection.
In such scheme, in laser module, laser instrument LS1 is miniature laser, is fixed in light path coupling and the trailing flank of output primary module pedestal, with leading flank microcobjective on same pedestal, maintains the stability of light path and the convenience of operation.Described miniature laser is helium neon laser or small solid pump laser.
In such scheme, in light path coupling with output primary module, mirror M 2 is positioned on vertical two dimension angular adjusting bracket, and this vertical two dimension angular adjusting bracket is positioned on two-dimension translational platform；Regulate two-dimension translational platform and can make the laser light incident diverse location to mirror M 2, and vertically two dimension angular adjusting bracket makes it reflect the laser light to the center of optical filter OFT for regulating mirror M 2 direction.
In such scheme, in light path coupling with output primary module, optical filter OFT is fixed on a vertical two dimension angular adjusting bracket；Vertical two dimension angular adjusting bracket is placed on a pillar being fixed on pedestal pluggablely；When changing the different wave length of same laser instrument, the vertical two dimension angular adjusting bracket being fixed with respective optical optical filter OFT is changed on this pillar；Regulate the screw thread of vertical two dimension angular adjusting bracket, laser light incident can be made to arrive the microscope objective OBJ of micro-module；It is used in combination equipped with the vertical two dimension angular adjusting bracket of reflecting mirror with other in light path before mirror M 2 by this vertical two dimension angular adjusting bracket, laser alignment can be made to incide the microscope objective OBJ of micro-module, and focus on sample SMP, to produce the sample scattered signal light of standby detection.This optical filter OFT is trap Raman optical filter, sideband Raman optical filter, high-pass filter or low pass filter.
In such scheme, in light path coupling with output primary module, aperture HL is fixed on a dividing plate and its size is adjustable, and light path coupling and output primary module are divided into two Room, left and right with isolation laser veiling glare by this dividing plate.
In such scheme, in light path coupling and output primary module, plus lens LNS1 is positioned on D translation adjusting bracket, by regulating three translation shafts of D translation adjusting bracket, the position of joint plus lens LNS1 can not only be raised in two-dimensional vertical direction, the position of plus lens LNS1 can also be regulated so that scattered signal light can be accurately incident and focus on the entrance slit of grating spectrograph GSPY at optical axis direction.
In such scheme, the angle of each reflecting mirror comprised in lifter SM1, and the angle of mirror M 1, M5 and M45 is all two-dimentional adjustable.
In such scheme, in illuminating watches module, beam splitter BS2 is by from the white light reflection of broad-spectrum light source WL to the microcobjective OBJ of micro-module, via on microcobjective OBJ focusing illumination to sample SMP；Through after beam splitter BS1, reflexing to photographing unit CMR via beam splitter BS1 and carry out sample observation after collecting from the reflection light of sample SMP via the microcobjective OBJ of micro-module.
In such scheme, described beam splitter BS1 and BS2 places in 90 degree of vertical angles, and all becomes 45 degree of angles with light path；Beam splitter BS1 and BS2 is concurrently placed on the same slide rail with two fixed positions；One position of slide rail makes beam splitter BS1 and BS2 be positioned in light path, and the optical imagery for sample SMP is observed；Beam splitter BS1 and BS2 is slided to the another one position of slide rail, beam splitter BS1 and BS2 will leave laser optical path, the white light making broad-spectrum light source WL can not incide on sample, make laser not by the interference of beam splitter BS1 and BS2 simultaneously, such laser can the lossless scattered light signal being excited sample by illuminating watches module, simultaneously, scattered light signal from sample SMP also is able to lossless by illuminating watches module through the microcobjective OBJ collection of micro-module, is then communicated to follow-up signal detection module and is detected by signal detection module.
In such scheme, grating spectrograph GSPY in this signal detection module includes slit SLT, mirror M S1, mirror M S2, grating GRT and detector C CD, wherein: the flashlight from slit SLT incides mirror M S1, being reflected the flashlight after mirror MS1 reflection and be irradiated on grating GRT, the flashlight after grating GRT dispersion is collected by mirror M S2 and reflexes to detector C CD detecting.This grating spectrograph GSPY is placed on fixed support so that the optical axis of grating spectrograph GSPY couples contour with the optical axis of output primary module with light path；Scattered light signal through output window W1 need not be directly entered the slit SLT of grating spectrograph GSPY and detected by follow-up detector C CD by any lifter.
In such scheme, the grating spectrograph GSPY in this signal detection module can be replaced by fiber spectrometer or single track detector.
In such scheme, this laser module also includes laser instrument LS2 and lifter SM2, the coupling of this light path also includes mirror M 3 and M4 with output primary module, mirror M 6, plus lens LNS2 and LNS3, and output window W2 and W3, wherein: mirror M 4, M5 and M6 adjusting bracket be individually positioned on its each self-corresponding slide rail with two fixed positions, it is positioned at the difference of two fixed positions of its corresponding slide rail according to each reflecting mirror, selects different laser, scattered signal light and/or output window；Plus lens LNS2 and LNS3 is respectively placed on D translation adjusting bracket, by regulating three translation shafts of D translation adjusting bracket, the position of three plus lens can not only be adjusted up in two-dimensional vertical side, the position of three plus lens can also be regulated so that scattered signal light can be accurately incident respectively and focus on the signal input center of three signal detection modules at optical axis direction.
In such scheme, described mirror M 4, M5 and M6 adjusting bracket be individually positioned on its each self-corresponding slide rail with two fixed positions, the difference of two fixed positions of its corresponding slide rail it is positioned at according to each reflecting mirror, select different laser, scattered signal light and/or output window, including: mirror M 5 is removed outside light path, plus lens LNS2 can be directly entered from the scattered signal light through optical filter OFT, and be accumulated lens LNS2 and converge to output window W2.Mirror M 5 and M6 are moved in light path, after in succession being reflected by mirror M 5 and M6 from the scattered signal light through optical filter OFT, plus lens LNS3 can be directly entered, and be accumulated lens LNS3 and converge to output window W3.
In such scheme, the angle of each reflecting mirror comprised in lifter SM2, and the angle of mirror M 3, M4 and M6 is all two-dimentional adjustable.
(3) beneficial effect
From technique scheme it can be seen that the present invention can have the advantage that simultaneously
1), on the laser module of a and a above miniature laser is directly fixed on the support of pedestal trailing flank, it is convenient to change；
2) laser module, light path coupling are all fixed on same pedestal with output primary module, illuminating watches module and micro-module, and the stability of whole multi-functional micro-confocal spectroscopic instrument is very good.
3) provide three and above scattered signal light exit, to be connected to different spectrogrph or detector, even can change different types of spectrogrph or detector easily, overcome existing business confocal spectroscopic instrument and not there is the technological deficiency of autgmentability；
4) light path can conveniently switch between various lasers, and quickly collimates；
5) laser instrument can be regulated on a large scale and incide the incident angle of optical filter, simultaneously can the angle of manual adjustments optical filter easily, in order to quickly can regulate confocal microscopy light path collimatedly, improve acquisition of signal efficiency and signal to noise ratio；
6) optical filter regulates support and can manually change and each adjusting bracket can realize two-dimensional directional and finely regulate, it is simple to quick-replaceable laser collimation adjustment light path.
Accompanying drawing explanation
Fig. 1 is the structural representation of micro confocal spectrogrph of the prior art；
Fig. 2 is the top view of the multi-functional micro-confocal spectroscopic instrument according to the embodiment of the present invention；
Fig. 3 is the Raman spectrogram of the crystalline silicon utilizing the multi-functional micro-confocal spectroscopic instrument shown in Fig. 2 and 532 nano lasers to test, and minimum wave number is up to 30 wave numbers；
Fig. 4 is the Raman spectrogram of the germanium silicon superlattices utilizing the multi-functional micro-confocal spectroscopic instrument shown in Fig. 2 and 633 nano lasers to test, and minimum wave number is also up to 30 wave numbers；
Fig. 5 is the top view of the multi-functional micro-confocal spectroscopic instrument of the multiple laser instrument that includes according to the embodiment of the present invention, multiple output windows and coupling optical path thereof；
Fig. 6 is the photoluminescence spectra figure of the stained glass utilizing the multi-functional micro-confocal spectroscopic instrument shown in Fig. 5 and 405 nano lasers to test.
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
As in figure 2 it is shown, the top view that Fig. 2 is the multi-functional micro-confocal spectroscopic instrument according to the embodiment of the present invention.This multi-functional micro-confocal spectroscopic instrument includes laser module, light path coupling and output primary module, illuminating watches module, micro-module and signal detection module；Wherein, the coupling of this light path shares same pedestal with output primary module, both illuminating watches modules, and laser module is fixed on this pedestal trailing flank, and micro-module is fixed on this pedestal leading flank, and signal detection module is fixed on the right flank of this pedestal.
This laser module at least includes a laser instrument LS1 and lifter SM1；The coupling of this light path includes optical filter OFT, at least 3 mirror M 1, M2 and M5, at least one plus lens LNS1, and at least one output window W1 with output primary module；This illuminating watches module includes broad-spectrum light source WL, the first beam splitter BS1, the second beam splitter BS2, the 4th plus lens LNS4, photographing unit CMR and mirror M 45；This micro-module includes microcobjective OBJ and focussing mechanism thereof；This signal detection module includes grating spectrograph GSPY and control system thereof.
Specifically, in multi-functional micro-confocal spectroscopic instrument shown in Fig. 2, concrete light path is as follows: the laser of the laser instrument LS1 outgoing being fixed in the laser module of pedestal trailing flank first boosted device SM1 carries out promoting and enter light path coupling and output primary module, in the mirror M 1 that laser light incident after lifting couples to light path and exports in primary module, it is re-reflected in mirror M 2 via mirror M 1, via the laser light incident of mirror M 2 reflection on optical filter OFT；Laser after optical filter OFT reflects glancing incidence in illuminating watches module horizontal by 45 degree of tilted-putted mirror M 45, micro-module it is incident to straight down, through the microcobjective OBJ focusing illumination of micro-module on sample SMP after being reflected mirror M45 reflection；Microcobjective OBJ collects from the laser-bounce light straight up of sample SMP and scattered signal light, is reflected after mirror M45 reflection glancing incidence to optical filter OFT；Laser-bounce light is filtered and decays to only original 1/10 by optical filter OFT6To 1/1012, and it is incident to mirror M 5 after making the scattered signal light transmission optical filter OFT of the overwhelming majority；Mirror M 5 will transmit through after the scattered signal luminous reflectance of this optical filter OFT through aperture HL, is irradiated on plus lens LNS1, via the plus lens LNS1 scattered signal light converged through output window W1；It is input to signal detection module from the scattered signal light of output window W1 output and carries out confocal signal detection.
In the top view shown in Fig. 2, mirror M 45, microcobjective OBJ and sample SMP are from top to bottom sequentially placed.The angle of each reflecting mirror comprised in lifter SM1, and the angle of mirror M 1, M5 and M45 is all two-dimentional adjustable.
With reference to Fig. 2, in laser module, laser instrument LS1 is miniature laser, such as helium neon laser or small solid pump laser, it is fixed in the trailing flank of light path coupling and output primary module pedestal, with leading flank microcobjective on same pedestal, maintain the stability of light path and the convenience of operation.
In light path coupling with output primary module, mirror M 2 is positioned on vertical two dimension angular adjusting bracket, and this vertical two dimension angular adjusting bracket is positioned on two-dimension translational platform；Regulate two-dimension translational platform and can make the laser light incident diverse location to mirror M 2, and vertically two dimension angular adjusting bracket makes it reflect the laser light to the center of optical filter OFT for regulating mirror M 2 direction.Optical filter OFT is fixed on a vertical two dimension angular adjusting bracket；Vertical two dimension angular adjusting bracket is placed on a pillar being fixed on pedestal pluggablely；When changing the different wave length of same laser instrument, the vertical two dimension angular adjusting bracket being fixed with respective optical optical filter OFT is changed on this pillar；Regulate the screw thread of vertical two dimension angular adjusting bracket, laser light incident can be made to arrive the microscope objective OBJ of micro-module；It is used in combination equipped with the vertical two dimension angular adjusting bracket of reflecting mirror with other in light path before mirror M 2 by this vertical two dimension angular adjusting bracket, laser alignment can be made to incide the microscope objective OBJ of micro-module, and focus on sample SMP, to produce the sample scattered signal light of standby detection.This optical filter OFT is trap Raman optical filter, sideband Raman optical filter, high-pass filter or low pass filter.Aperture HL is fixed on a dividing plate and its size is adjustable, and light path coupling and output primary module are divided into two Room, left and right with isolation laser veiling glare by this dividing plate.Plus lens LNS1 is positioned on D translation adjusting bracket, by regulating three translation shafts of D translation adjusting bracket, the position of joint plus lens LNS1 can not only be raised in two-dimensional vertical direction, the position of plus lens LNS1 can also be regulated so that scattered signal light can be accurately incident and focus on the entrance slit of grating spectrograph GSPY at optical axis direction.
Owing to the miniature laser of this multi-functional micro-confocal spectroscopic instrument is directly fixed on the support of pedestal trailing flank, it is integrally forming with pedestal, Stability Analysis of Structures, and it is very convenient to change laser instrument；The coupling of laser module, light path is all fixed on same pedestal with output primary module, illuminating watches module and micro-module, and the stability of whole multi-functional micro-confocal spectroscopic instrument is very good；Light path can convenient between different optical maser wavelengths switch, and quickly collimates；Laser instrument can be regulated on a large scale and incide the incident angle of optical filter, simultaneously can the angle of manual adjustments optical filter easily, in order to quickly can regulate confocal microscopy light path collimatedly, improve acquisition of signal efficiency and signal to noise ratio；Optical filter adjustment support can manually change and each adjusting bracket can realize two-dimensional directional and finely regulate, it is simple to quick-replaceable laser collimation adjustment light path.
With reference to Fig. 2, transmission illumination observation module and micro-module with the use of, it is possible to achieve the microexamination to sample.In illuminating watches module, beam splitter BS2 is by from the white light reflection of broad-spectrum light source WL to the microcobjective OBJ of micro-module, via on microcobjective OBJ focusing illumination to sample SMP；Through after beam splitter BS1, reflexing to photographing unit CMR via beam splitter BS1 and carry out sample observation after collecting from the reflection light of sample SMP via the microcobjective OBJ of micro-module.Beam splitter BS1 and BS2 places in 90 degree of vertical angles, and all becomes 45 degree of angles with light path；Beam splitter BS1 and BS2 is concurrently placed on the same slide rail with two fixed positions；One position of slide rail makes beam splitter BS1 and BS2 be positioned in light path, and the optical imagery for sample SMP is observed；Beam splitter BS1 and BS2 is slided to the another one position of slide rail, beam splitter BS1 and BS2 will leave laser optical path, the white light making broad-spectrum light source WL can not incide on sample, make laser not by the interference of beam splitter BS1 and BS2 simultaneously, such laser can the lossless scattered light signal being excited sample by illuminating watches module, simultaneously, scattered light signal from sample SMP also is able to lossless by illuminating watches module through the microcobjective OBJ collection of micro-module, is then communicated to follow-up signal detection module and is detected by signal detection module.
With reference to Fig. 2, grating spectrograph GSPY in this signal detection module includes slit SLT, mirror M S1, mirror M S2, grating GRT and detector C CD, wherein: the flashlight from slit SLT incides mirror M S1, being reflected the flashlight after mirror MS1 reflection and be irradiated on grating GRT, the flashlight after grating GRT dispersion is collected by mirror M S2 and reflexes to detector C CD detecting.This grating spectrograph GSPY is placed on fixed support so that the optical axis of grating spectrograph GSPY couples contour with the optical axis of output primary module with light path；Scattered light signal through output window W1 need not be directly entered the slit SLT of grating spectrograph GSPY and detected by follow-up detector C CD by any lifter.
Utilize this multi-functional micro-confocal spectroscopic instrument, the present invention tests the Raman spectrum of silicon single crystal, employ 100 times of Lycra microcobjectives, 1800 ruling gratings, spectrometer input slit width 80 microns, the small solid pump laser using wavelength to be 532 nanometers, the Raman spectrogram surveyed is as shown in Figure 3.Owing to this multi-functional micro-confocal spectroscopic instrument can accurately regulate the angles and positions of critical optical elements, the minimum test wave number of this spectrogrph reaches 30cm-1, it is much better than general commercialization Raman spectrometer.
Change convenient due to the miniature laser of this multi-functional micro-confocal spectroscopic instrument and optical path adjusting is convenient, the small solid pump laser of 532 nanometers is replaced by the helium neon laser of 633 nanometers by the present invention, through quickly regulating, the Raman spectrum of the germanium silicon superlattices surveyed is as shown in Figure 4.Owing to this multi-functional micro-confocal spectroscopic instrument can accurately regulate the angles and positions of critical optical elements, this spectrogrph can measure the Raman signal of the low frequency Folded acoustic phonons of germanium silicon superlattices, and minimum test wave number reaches 30cm-1, also it is much better than general commercialization Raman spectrometer.
It addition, this multi-functional micro-confocal spectroscopic instrument also has extraordinary autgmentability.For example, it is possible to fix more than one laser instrument on the support of pedestal trailing flank, it might even be possible to from introducing other large-scale laser easily.Meanwhile, this multi-functional micro-confocal spectroscopic instrument can be extended to more than one output window and mixes corresponding acquisition of signal module for each output window.Fig. 5 gives the structural representation of a micro confocal spectrogrph including 2 laser modules and 3 signal output windows.
As it is shown in figure 5, relative to the laser module shown in Fig. 2, the laser module in Fig. 5 is possibly together with laser instrument LS2 and corresponding lifter SM2.In order to the laser of laser instrument LS2 outgoing being easily introduced into optical filter OFT and being irradiated on sample, light path coupling also at least needs two mirror M 3 and M4 with output primary module.It addition, multi-functional micro-confocal spectroscopic instrument shown in Fig. 5 has also newly added output window W2 and W3 and corresponding light path coupling element, such as mirror M 6 and plus lens LNS2 and LNS3.
The angle of each reflecting mirror comprised in lifter SM2, and the angle of mirror M 3, M4 and M6 is all two-dimentional adjustable.Realize the selection of laser instrument and output window, mirror M 4, M5 and M6 adjusting bracket be individually positioned on its each self-corresponding slide rail with two fixed positions, it is positioned at the difference of two fixed positions of its corresponding slide rail according to each reflecting mirror, selects different laser, scattered signal light and/or output window.Such as, mirror M 5 is removed outside light path, plus lens LNS2 can be directly entered from the scattered signal light through optical filter OFT, and be accumulated lens LNS2 and converge to output window W2.Mirror M 5 and M6 are moved in light path, after in succession being reflected by mirror M 5 and M6 from the scattered signal light through optical filter OFT, plus lens LNS3 can be directly entered, and be accumulated lens LNS3 and converge to output window W3.
Plus lens LNS2 and LNS3 is also respectively placed on D translation adjusting bracket, by regulating three translation shafts of D translation adjusting bracket, the position of three plus lens not only can be adjusted up in two-dimensional vertical side, also can regulate the position of three plus lens at optical axis direction so that scattered signal light can be accurately incident respectively and focus on the signal input center of three signal detection modules.
It addition, acquisition of signal module is except can being grating spectrograph GSPY, it is also possible to be fiber spectrometer or single track detector.As required, different output windows can couple identical acquisition of signal module or different acquisition of signal modules, thus realizing different test functions.
405nm pumped solid state laser instrument is fixed in the multi-functional micro-confocal spectroscopic instrument shown in Fig. 5 by the present invention as second laser, also the photoluminescence spectra of NewportOG507 stained glass is measured, employ 50 times of long reach object lens, 150 ruling gratings, spectrometer slit widths 200 microns, arrive sample laser power less than 0.004mW, and decay 10000 times, obtained photoluminescence spectra is as shown in Figure 6, can be seen that, although laser power is very faint, we still can obtain the photoluminescence spectra that signal to noise ratio is very high.
Two above example illustrates that the autgmentability of the multi-functional micro-confocal spectroscopic instrument of present invention design is very strong, and cost performance is far above existing commercialization micro confocal spectrogrph, it is easy to the popularization of micro confocal spectrum test technology and micro confocal spectrogrph, and the application in investigation of materials of Raman spectrum and photoluminescence spectra can be promoted.
Particular embodiments described above; the purpose of the present invention, technical scheme and beneficial effect have been further described; it is it should be understood that; the foregoing is only specific embodiments of the invention; it is not limited to the present invention; all within the spirit and principles in the present invention, any amendment of making, equivalent replacement, improvement etc., should be included within protection scope of the present invention.
Claims (18)
1. a multi-functional micro-confocal spectroscopic instrument, it is characterised in that this multi-functional micro-confocal spectroscopic instrument includes laser module, light path coupling and output primary module, illuminating watches module, micro-module and signal detection module；Wherein, the coupling of this light path shares same pedestal with output primary module, both illuminating watches modules, and laser module is fixed on this pedestal trailing flank, and micro-module is fixed on this pedestal leading flank, and signal detection module is fixed on the right flank of this pedestal.
2. multi-functional micro-confocal spectroscopic instrument according to claim 1, it is characterised in that
This laser module at least includes a laser instrument LS1 and lifter SM1；
The coupling of this light path includes optical filter OFT, at least 3 mirror M 1, M2 and M5, at least one plus lens LNS1, and at least one output window W1 with output primary module；
This illuminating watches module includes broad-spectrum light source WL, the first beam splitter BS1, the second beam splitter BS2, the 4th plus lens LNS4, photographing unit CMR and mirror M 45；
This micro-module includes microcobjective OBJ and focussing mechanism thereof；
This signal detection module includes grating spectrograph GSPY and control system thereof；
Wherein, the laser of the laser instrument LS1 outgoing being fixed in the laser module of pedestal trailing flank first boosted device SM1 carries out promoting and enter light path coupling and output primary module, in the mirror M 1 that laser light incident after lifting couples to light path and exports in primary module, it is re-reflected in mirror M 2 via mirror M 1, via the laser light incident of mirror M 2 reflection on optical filter OFT；
Laser after optical filter OFT reflects glancing incidence in illuminating watches module horizontal by 45 degree of tilted-putted mirror M 45, micro-module it is incident to straight down, through the microcobjective OBJ focusing illumination of micro-module on sample SMP after being reflected mirror M45 reflection；
Microcobjective OBJ collects from the laser-bounce light straight up of sample SMP and scattered signal light, is reflected after mirror M45 reflection glancing incidence to optical filter OFT；Laser-bounce light is filtered and decays to only original 1/10 by optical filter OFT6To 1/1012, and it is incident to mirror M 5 after making the scattered signal light transmission optical filter OFT of the overwhelming majority；
Mirror M 5 will transmit through after the scattered signal luminous reflectance of this optical filter OFT through aperture HL, is irradiated on plus lens LNS1, via the plus lens LNS1 scattered signal light converged through output window W1；It is input to signal detection module from the scattered signal light of output window W1 output and carries out confocal signal detection.
3. multi-functional micro-confocal spectroscopic instrument according to claim 2, it is characterized in that, in laser module, laser instrument LS1 is miniature laser, it is fixed in the trailing flank of light path coupling and output primary module pedestal, with leading flank microcobjective on same pedestal, maintain the stability of light path and the convenience of operation.
4. multi-functional micro-confocal spectroscopic instrument according to claim 3, it is characterised in that described miniature laser is helium neon laser or small solid pump laser.
5. multi-functional micro-confocal spectroscopic instrument according to claim 2, it is characterised in that in light path coupling with output primary module, mirror M 2 is positioned on vertical two dimension angular adjusting bracket, and this vertical two dimension angular adjusting bracket is positioned on two-dimension translational platform；Regulate two-dimension translational platform and can make the laser light incident diverse location to mirror M 2, and vertically two dimension angular adjusting bracket makes it reflect the laser light to the center of optical filter OFT for regulating mirror M 2 direction.
6. multi-functional micro-confocal spectroscopic instrument according to claim 2, it is characterised in that in light path coupling with output primary module, optical filter OFT is fixed on a vertical two dimension angular adjusting bracket；Vertical two dimension angular adjusting bracket is placed on a pillar being fixed on pedestal pluggablely；When changing the different wave length of same laser instrument, the vertical two dimension angular adjusting bracket being fixed with respective optical optical filter OFT is changed on this pillar；Regulate the screw thread of vertical two dimension angular adjusting bracket, laser light incident can be made to arrive the microscope objective OBJ of micro-module；It is used in combination equipped with the vertical two dimension angular adjusting bracket of reflecting mirror with other in light path before mirror M 2 by this vertical two dimension angular adjusting bracket, laser alignment can be made to incide the microscope objective OBJ of micro-module, and focus on sample SMP, to produce the sample scattered signal light of standby detection.
7. multi-functional micro-confocal spectroscopic instrument according to claim 6, it is characterised in that this optical filter OFT is trap Raman optical filter, sideband Raman optical filter, high-pass filter or low pass filter.
8. multi-functional micro-confocal spectroscopic instrument according to claim 2, it is characterized in that, in light path coupling with output primary module, aperture HL is fixed on a dividing plate and its size is adjustable, and light path coupling and output primary module are divided into two Room, left and right with isolation laser veiling glare by this dividing plate.
9. multi-functional micro-confocal spectroscopic instrument according to claim 2, it is characterized in that, in light path coupling and output primary module, plus lens LNS1 is positioned on D translation adjusting bracket, by regulating three translation shafts of D translation adjusting bracket, the position of joint plus lens LNS1 can not only be raised, additionally it is possible to regulate the position of plus lens LNS1 at optical axis direction so that scattered signal light can accurately incidence focus on the entrance slit of grating spectrograph GSPY in two-dimensional vertical direction.
10. multi-functional micro-confocal spectroscopic instrument according to claim 2, it is characterised in that the angle of each reflecting mirror comprised in lifter SM1, and the angle of mirror M 1, M5 and M45 is all two-dimentional adjustable.
11. multi-functional micro-confocal spectroscopic instrument according to claim 2, it is characterized in that, in illuminating watches module, beam splitter BS2 is by from the white light reflection of broad-spectrum light source WL to the microcobjective OBJ of micro-module, via on microcobjective OBJ focusing illumination to sample SMP；Through after beam splitter BS1, reflexing to photographing unit CMR via beam splitter BS1 and carry out sample observation after collecting from the reflection light of sample SMP via the microcobjective OBJ of micro-module.
12. multi-functional micro-confocal spectroscopic instrument according to claim 11, it is characterised in that described beam splitter BS1 and BS2 places in 90 degree of vertical angles, and all becomes 45 degree of angles with light path；Beam splitter BS1 and BS2 is concurrently placed on the same slide rail with two fixed positions；One position of slide rail makes beam splitter BS1 and BS2 be positioned in light path, and the optical imagery for sample SMP is observed；Beam splitter BS1 and BS2 is slided to the another one position of slide rail, beam splitter BS1 and BS2 will leave laser optical path, the white light making broad-spectrum light source WL can not incide on sample, make laser not by the interference of beam splitter BS1 and BS2 simultaneously, such laser can the lossless scattered light signal being excited sample by illuminating watches module, simultaneously, scattered light signal from sample SMP also is able to lossless by illuminating watches module through the microcobjective OBJ collection of micro-module, is then communicated to follow-up signal detection module and is detected by signal detection module.
13. multi-functional micro-confocal spectroscopic instrument according to claim 2, it is characterized in that, grating spectrograph GSPY in this signal detection module includes slit SLT, mirror M S1, mirror M S2, grating GRT and detector C CD, wherein: the flashlight from slit SLT incides mirror M S1, being reflected the flashlight after mirror MS1 reflection and be irradiated on grating GRT, the flashlight after grating GRT dispersion is collected by mirror M S2 and reflexes to detector C CD detecting.
14. multi-functional micro-confocal spectroscopic instrument according to claim 13, it is characterised in that this grating spectrograph GSPY is placed on fixed support so that the optical axis of grating spectrograph GSPY couples contour with the optical axis of output primary module with light path；Scattered light signal through output window W1 need not be directly entered the slit SLT of grating spectrograph GSPY and detected by follow-up detector C CD by any lifter.
15. multi-functional micro-confocal spectroscopic instrument according to claim 2, it is characterised in that the grating spectrograph GSPY in this signal detection module can be replaced by fiber spectrometer or single track detector.
16. multi-functional micro-confocal spectroscopic instrument according to claim 2, it is characterized in that, this laser module also includes laser instrument LS2 and lifter SM2, the coupling of this light path also includes mirror M 3 and M4 with output primary module, mirror M 6, plus lens LNS2 and LNS3, and output window W2 and W3, wherein:
Mirror M 4, M5 and M6 adjusting bracket be individually positioned on its each self-corresponding slide rail with two fixed positions, be positioned at the difference of two fixed positions of its corresponding slide rail according to each reflecting mirror, select different laser, scattered signal light and/or output window；
Plus lens LNS2 and LNS3 is respectively placed on D translation adjusting bracket, by regulating three translation shafts of D translation adjusting bracket, the position of three plus lens can not only be adjusted up in two-dimensional vertical side, the position of three plus lens can also be regulated so that scattered signal light can be accurately incident respectively and focus on the signal input center of three signal detection modules at optical axis direction.
17. multi-functional micro-confocal spectroscopic instrument according to claim 16, it is characterized in that, described mirror M 4, M5 and M6 adjusting bracket be individually positioned on its each self-corresponding slide rail with two fixed positions, the difference of two fixed positions of its corresponding slide rail it is positioned at according to each reflecting mirror, select different laser, scattered signal light and/or output window, including:
Mirror M 5 is removed outside light path, plus lens LNS2 can be directly entered from the scattered signal light through optical filter OFT, and be accumulated lens LNS2 and converge to output window W2.Mirror M 5 and M6 are moved in light path, after in succession being reflected by mirror M 5 and M6 from the scattered signal light through optical filter OFT, plus lens LNS3 can be directly entered, and be accumulated lens LNS3 and converge to output window W3.
18. multi-functional micro-confocal spectroscopic instrument according to claim 16, it is characterised in that the angle of each reflecting mirror comprised in lifter SM2, and the angle of mirror M 3, M4 and M6 is all two-dimentional adjustable.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106092891A (en) * | 2016-08-11 | 2016-11-09 | 广东工业大学 | A kind of confocal three-dimensional spectrum micro imaging method and device |
| CN113640219A (en) * | 2021-07-13 | 2021-11-12 | 中国科学院半导体研究所 | Linkage switching device for excitation light, beam splitter and optical filter of spectrometer |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005121479A (en) * | 2003-10-16 | 2005-05-12 | Tokyo Instruments Inc | Confocal microscopic spectroscope |
| CN102507529A (en) * | 2011-09-26 | 2012-06-20 | 中国科学院半导体研究所 | Microscopic confocal Raman spectrometer |
| CN203606288U (en) * | 2013-12-11 | 2014-05-21 | 中国科学院西安光学精密机械研究所 | Confocal micro-raman and laser-induced breakdown spectroscopy combined laser spectrum analysis meter |
| CN205607532U (en) * | 2016-03-08 | 2016-09-28 | 中国科学院半导体研究所 | Multi -functional micro - confocal spectrum appearance |
-
2016
- 2016-05-06 CN CN201610298186.2A patent/CN105737986B/en active Active
- 2016-05-06 CN CN201620406697.7U patent/CN205607532U/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005121479A (en) * | 2003-10-16 | 2005-05-12 | Tokyo Instruments Inc | Confocal microscopic spectroscope |
| CN102507529A (en) * | 2011-09-26 | 2012-06-20 | 中国科学院半导体研究所 | Microscopic confocal Raman spectrometer |
| CN203606288U (en) * | 2013-12-11 | 2014-05-21 | 中国科学院西安光学精密机械研究所 | Confocal micro-raman and laser-induced breakdown spectroscopy combined laser spectrum analysis meter |
| CN205607532U (en) * | 2016-03-08 | 2016-09-28 | 中国科学院半导体研究所 | Multi -functional micro - confocal spectrum appearance |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106092891A (en) * | 2016-08-11 | 2016-11-09 | 广东工业大学 | A kind of confocal three-dimensional spectrum micro imaging method and device |
| CN113640219A (en) * | 2021-07-13 | 2021-11-12 | 中国科学院半导体研究所 | Linkage switching device for excitation light, beam splitter and optical filter of spectrometer |
| CN113640219B (en) * | 2021-07-13 | 2024-02-27 | 中国科学院半导体研究所 | Linkage switching device for excitation light, beam splitter and optical filter of spectrometer |
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